TWM598308U - Precision ceramic worktable with quartz base - Google Patents

Abstract

A precision ceramic workbench includes: a precision ceramic plate with multiple through holes and a quartz base. The multi-through hole precision ceramic disc is porous, and the upper surface of the multi-through hole precision ceramic disc is a workpiece adsorption surface. The multi-hole precision ceramic disc is clamped on the quartz base. At least part of the surface of the quartz base is polished to avoid damage to the quartz base by the energy of the laser light.

Description

Precision ceramic table with quartz base

This creation is related to a precision ceramic worktable, especially a precision ceramic workbench with a quartz base.

The precision ceramic work plate is an appliance that absorbs workpieces for easy processing. The precision ceramic working disc uses air pumping to generate suction to adsorb the workpiece on the workpiece adsorption surface of the multi-hole precision ceramic disc. In this way, the position of the workpiece is fixed. The air pump can also provide air to the precision ceramic working plate, so that the workpiece is desorbed or even suspended on the precision ceramic working plate.

One of the commonly used materials for the base of the conventional precision ceramic working plate is ceramic. During the cutting process, the laser light has the opportunity to irradiate the ceramic base, so that the energy of the laser light will damage the surface of the ceramic base. Therefore, under multiple uses, the ceramic base needs to be frequently removed and reworked, and the ceramic base needs to be replaced after a few rework, resulting in increased costs and low efficiency. In addition, the energy of the laser light will also cause the ceramic base to produce ceramic dust, which will affect the yield of the product.

Therefore, the purpose of this creation is to provide a precision ceramic workbench with a quartz base, which can avoid damage to the base caused by the energy of the laser light.

The technical means used in this creation to solve the problems of the conventional technology is to provide a precision ceramic workbench with a quartz base, including: a multi-hole precision ceramic plate with a plurality of through holes, each The through hole penetrates between the upper surface and the lower surface of the multi-through hole precision ceramic disc, the upper surface of the multi-through hole precision ceramic disc is a workpiece adsorption surface; and a quartz base, the quartz base is made of quartz material , The quartz base has an accommodating recess, a plurality of gas flow channels and a through hole from top to bottom, each of the gas flow channels is in air communication with the accommodating recess, and each of the gas flow channels is in air communication with each other, at least one The gas flow channel is air connected to the through hole, the through hole penetrates the lower surface of the quartz base and the at least one gas flow channel, and the multi-hole precision ceramic disc is clamped in the accommodating recess The through hole forms an opening on the bottom surface of the quartz base by penetrating the bottom surface of the quartz base, and the opening is connected to an air pump so that the air pump can pass through the through hole and each gas flow The channels and the plurality of through holes of the multi-through hole precision ceramic disc form an adsorption force on the workpiece adsorption surface, and at least part of the surface of the quartz base is polished.

In an embodiment of the present creation, a precision ceramic workbench with a quartz base is provided. The upper surface and the lower surface of the quartz base except the surface of the accommodating recess are polished surfaces.

In an embodiment of this creation, a precision ceramic workbench with a quartz base is provided, and the arithmetic average roughness of the polished surface is not more than 0.02A.

In an embodiment of the present invention, a precision ceramic workbench with a quartz base is provided, and the gas flow channel is recessed from the containing recess.

In an embodiment of the present creation, a precision ceramic workbench with a quartz base is provided, and the quartz base is symmetrical about the through hole.

In an embodiment of the present creation, a precision ceramic workbench with a quartz base is provided, and the gas flow channels are distributed in a symmetrical manner.

Through the technical means used in this creation of the precision ceramic workbench with a quartz base, the quartz base is made of transparent quartz material, and the surface of the quartz base is polished, so that most of the laser light will penetrate when the laser light hits the quartz base Quartz base. Therefore, most of the energy of the laser light will not act on the quartz base, so as to avoid damage to the quartz base. Compared with the conventional precision ceramic worktable with a base of ceramic material, the precision ceramic worktable of this creation does not need to frequently remove the quartz base and rework the quartz base, and has better work efficiency and reduces the cost of replacing the base. cost. In addition, when irradiated by laser light, the laser light will pass through the quartz base, and the quartz base will not be damaged and produce dust, which can prevent the dust from affecting the yield of the product.

The following describes the implementation of this creation based on Figures 1 to 5. This description is not intended to limit the implementation of this creation, but is a kind of embodiment of this creation.

As shown in Fig. 1, the size of the precision ceramic table 100 with a quartz base according to an embodiment of the present creation is suitable for an eight-inch wafer. In other embodiments, the precision ceramic table 100 has other larger or smaller sizes to match the wafer to be processed.

Among them, the precision ceramic workbench 100 includes: a multi-hole precision ceramic disc 1 and a quartz base 2.

Specifically, as shown in Figure 1, the multi-through hole precision ceramic disc 1 is a porous material and has a plurality of through holes, and each through hole penetrates the upper surface S1 and the lower surface of the multi-through hole precision ceramic disc. between. The upper surface S1 of the multi-through hole precision ceramic disc 1 is a workpiece adsorption surface.

The diameter of the through holes of the multi-through-hole precision ceramic disc 1 is generally between several micrometers to hundreds of micrometers. The multi-through hole precision ceramic disc 1 has a plurality of through holes so that gas can pass through the multi-through hole precision ceramic disc 1 and has good air permeability.

In the precision ceramic workbench 100 with a quartz base of this embodiment, the multi-through-hole precision ceramic disc 1 is a circular plate body. Of course, in the precision ceramic workbenches of other embodiments, in addition to the circular plate body, the multi-through hole precision ceramic disc 1 may also be a square plate or other shapes.

The quartz base 2 is entirely made of quartz material and can transmit light, and at least part of the surface of the quartz base 2 is polished, so that when the laser light is irradiated on the quartz base 2, most of the laser light will pass through the quartz base 2 . Therefore, the energy of the laser light will not act on the quartz base 2 and damage to the quartz base 2 is avoided.

In detail, the surface roughness Ra (arithmetic average roughness) of the polished surface is not more than 2A. Preferably, in this embodiment, in order to make the polished surface as smooth as a mirror surface to avoid diffusion of laser light on the quartz base 2, the surface roughness Ra of the polished surface does not exceed 0.02A , And ensure that most of the laser light will pass through the quartz base 2.

Therefore, compared to the conventional precision ceramic worktable using a ceramic base, the precision ceramic workbench 100 of the present invention does not need to frequently remove the quartz base 2 and rework the quartz base 2, and has better work efficiency. And reduce the cost of replacing the base. In addition, when the laser light is irradiated, the laser light will pass through the quartz base 2, and the quartz base 2 will not be damaged and generate dust, which can prevent the dust from affecting the product yield.

As shown in FIG. 2, in the precision ceramic workbench 100 of this embodiment, the quartz base 2 has a receiving recess 21, a plurality of gas flow channels 22 and a through hole 23 from top to bottom. The quartz base 2 is symmetrical about the through hole 23.

As shown in Figs. 1 and 3, in the precision ceramic workbench 100 of this embodiment, the upper surface S21 of the quartz base 2 is a ring-shaped plane. The accommodating recess 21 is located in the middle of the upper surface S21 of the quartz base 2. The accommodating recess 21 is a circular groove that matches the shape of the multi-through-hole precision ceramic disc 1 so that the multi-through-hole precision ceramic disc 1 is clamped in the accommodating recess 21. The upper surface of the accommodating recess 21 is coated with glue for sticking to the lower surface of the multi-through hole precision ceramic disc 1 so that the multi-through hole precision ceramic disc 1 can be fixed to the quartz base 2.

As shown in FIG. 3, in the precision ceramic workbench 100 with a quartz base of this embodiment, each of the gas flow channels 22 is in air communication with the accommodating recess 21. Each of the gas flow passages 22 is in air communication with each other, and at least one of the gas flow passages 22 is in air communication with the through hole 23. In other words, the air flowing in through the through hole 23 can flow to all the gas flow passages 22. The through hole 23 penetrates through the lower surface S22 of the quartz base 2 and the at least one gas flow channel 22.

As shown in Figures 2 to 5, in the precision ceramic workbench 100 of this embodiment, the gas flow channel 22 is a groove recessed from the containing recess 21, so that the gas in the gas flow channel 22 can The multi-through-hole precision ceramic disc 1 flowing into the accommodating recess 21. In the precision ceramic workbench of other embodiments, the gas flow channel 22 may also be a channel located inside the quartz base 2, and a plurality of openings are opened on the upper surface of the receiving recess 21.

As shown in Figure 3, in the precision ceramic workbench 100 of this embodiment, a plurality of gas flow passages 22 are distributed in a manner such that the through hole 23 is the center and is symmetrical left and right and symmetrically forward and backward, so that the air extraction effect The multi-through hole precision ceramic disc 1 is symmetrical left and right and symmetrical front and back.

In the precision ceramic workbench 100 of this embodiment, the plurality of gas flow channels 22 are arranged in a cross and concentric circles with the through hole 23 as the center, so that the suction force of the suction is evenly distributed on the multi-through hole precision ceramic disk 1. In the precision ceramic workbench of other embodiments, the plurality of gas flow channels 22 can be arranged vertically and horizontally in a checkerboard shape, which also has the effect of evenly distributing the suction force of the suction.

As shown in FIG. 3, in the precision ceramic workbench 100 of this embodiment, a fixing portion 24 is provided on the periphery of the receiving recess 21 of the quartz base 2. The height of the fixing portion 24 is lower than the upper surface S21. The fixing portion 24 is provided with a plurality of fixing holes 25 for fixing the quartz base 2 to a cutting machine table or other machines.

As shown in FIGS. 4 and 5, according to the precision ceramic workbench 100 of the embodiment of the invention, the lower surface S22 of the quartz base 2 is a flat surface. The through hole 23 passes through the lower surface S22 of the quartz base 2 to form an opening in the center of the lower surface S22 of the quartz base 2. The opening is connected to an air pump to allow the air pump to pass through the through hole 23, each of the gas flow channels 22, and the multiple through holes of the multi-through hole precision ceramic disc 1 to be formed on the workpiece adsorption surface One adsorption force.

As shown in Figs. 3 to 5, the precision ceramic workbench 100 according to the embodiment of this creation is rarely irradiated by the laser because the side surface S23, the fixing surface S24, and the wall surface S25 of the fixing hole of the quartz base 2 The side surface S23, the fixing surface S24, and the wall surface S25 of the fixing hole are not polished, that is, the polished surfaces are the upper surface S21 and the lower surface S22 of the quartz base 2 to achieve a balance between processing cost and performance.

In the precision ceramic workbench of other embodiments, since the side surface S23 of the quartz base 2 is rarely irradiated by laser, the side surface S23 may not be polished, that is, the polished surface is the upper surface S21 and the lower surface of the quartz base 2 S22, the fixing part surface S24 and the wall surface S25 of the fixing hole.

In the precision ceramic workbench of another embodiment, since the wall surface S25 of the fixing hole 25 of the quartz base 2 is rarely irradiated by the laser, the wall surface S25 of the fixing hole 25 may not be polished, that is, the polished surface is the quartz base 2 The upper surface S21, the lower surface S22, the side surface S23, and the fixing portion surface S24 of the surface.

In the precision ceramic workbench of another embodiment, since the fixing surface S24 of the quartz base 2 and the wall surface S25 of the fixing hole 25 are rarely irradiated by laser, the fixing surface S24 and the wall surface S25 of the fixing hole 25 are not polished, and That is, the polished surfaces are the upper surface S21, the lower surface S22, and the side surface S23 of the quartz base 2.

In the precision ceramic workbench of another embodiment, all of the quartz base 2 except for the surface of the receiving recess 21 is a polished surface. In detail, the polished surface includes the upper surface S21, the lower surface S22, the side surface S23 of the quartz base 2, the fixing portion surface S24 of the fixing portion 24, and the wall surface S25 of the fixing hole 25, and has the best effect.

The above descriptions and descriptions are only descriptions of the preferred embodiments of this creation. Those with general knowledge of this technology should make other modifications based on the scope of patent application defined below and the above descriptions, but these modifications should still be made. It is the creative spirit of this creation and within the scope of rights of this creation.

100: Precision ceramic workbench 1: Multi-hole precision ceramic disc 2: Quartz base 21: receiving recess 22: Gas flow path 23: Through hole 24: Fixed part 25: fixing hole S1: upper surface S21: Upper surface S22: Lower surface S23: Side surface S24: Fixed part surface S25: Wall

[Picture 1] is a schematic top view showing a precision ceramic workbench with a quartz base according to an embodiment of this creation; [Figure 2] is a schematic diagram showing the A-A cross-section of the precision ceramic workbench with a quartz base according to the embodiment of Figure 1 of this creation; [Figure 3] is a schematic top view showing the quartz base of the precision ceramic workbench with a quartz base according to an embodiment of this creation; [Figure 4] is a B-B cross-sectional schematic diagram showing the quartz base of the precision ceramic workbench with quartz base according to the embodiment of the third figure of this creation; [Figure 5] is a C-C cross-sectional schematic diagram showing the quartz base of the precision ceramic workbench with quartz base according to the embodiment of the third figure of this creation.

100: Precision ceramic workbench

1: Multi-hole precision ceramic disc

2: Quartz base

24: Fixed part

25: fixing hole

S1: upper surface

S21: Upper surface

S23: Side surface

S24: Fixed part surface

S25: Wall

Claims (6)

A precision ceramic workbench with a quartz base, including: A multi-through-hole precision ceramic disc, the multi-through-hole precision ceramic disc has a plurality of through holes, and each through hole penetrates between the upper surface and the lower surface of the multi-through-hole precision ceramic disc. The upper surface of is a workpiece adsorption surface; and A quartz base, the quartz base is made of quartz material, the quartz base has a containing recess, a plurality of gas flow channels and a through hole from top to bottom, each of the gas flow channels is air connected to the containing recess, each of the The gas flow channels are in air communication with each other, at least one of the gas flow channels is air connected to the through hole, the through hole penetrates the lower surface of the quartz base and the at least one gas flow channel, and the multiple through holes are precise The ceramic disc is clamped in the accommodating recess, the through hole penetrates the lower surface of the quartz base to form an opening on the lower surface of the quartz base, and the opening is connected to an air pump to make the air The pump passes through the through hole, each of the gas flow channels, and the plurality of through holes of the multi-through hole precision ceramic disc to form an adsorption force on the workpiece adsorption surface, and at least part of the surface of the quartz base is polished . Such as the precision ceramic workbench of claim 1, wherein the upper surface and the lower surface of the quartz base except for the surface of the accommodating recess are polished surfaces. Such as the precision ceramic workbench of claim 1, wherein the arithmetic average roughness of the polished surface is not more than 0.02A. Such as the precision ceramic workbench of claim 1, wherein the gas flow channel is recessed from the containing recess. Such as the precision ceramic workbench of claim 1, wherein the quartz base is symmetrical about the through hole. For example, the precision ceramic workbench of claim 1, wherein the gas flow channels are distributed in a symmetrical manner.

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