TWM595875U - Thin film resistor element - Google Patents

Thin film resistor element Download PDF

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TWM595875U
TWM595875U TW108216840U TW108216840U TWM595875U TW M595875 U TWM595875 U TW M595875U TW 108216840 U TW108216840 U TW 108216840U TW 108216840 U TW108216840 U TW 108216840U TW M595875 U TWM595875 U TW M595875U
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resistance
layer
layers
sub
thin film
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TW108216840U
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Chinese (zh)
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陳仲渝
盧契佑
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光頡科技股份有限公司
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Priority to TW108216840U priority Critical patent/TWM595875U/en
Priority to CN202020071599.9U priority patent/CN211062545U/en
Publication of TWM595875U publication Critical patent/TWM595875U/en

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Abstract

A thin film resistor element, wherein a long strip-shaped resistor layer is disposed on a substrate, and two electrode layers separately disposed on the resistor layer, each of the two electrode layers has an extension part extending in a staggered or opposite manner, and the two extension parts may averagely separate the resistor layer into three sub-resistor layers with same resistance. Therefore, the present creation has lower resistance and higher power characteristics at same size of thin film resistor element.

Description

薄膜電阻元件Thin film resistance element

本創作是關於一種薄膜電阻元件,特別有關一種高功率低阻值的薄膜電阻元件。This creation is about a thin film resistor element, especially a thin film resistor element with high power and low resistance.

一般薄膜電阻元件調整電阻值時,多數採用電阻層的面積、長度或材料變化進行調整,亦或是縮小薄膜電阻元件的整體尺寸。Generally, when adjusting the resistance value of a thin-film resistor element, the area, length, or material of the resistive layer is used for adjustment, or the overall size of the thin-film resistor element is reduced.

為因應現今電子元件體積縮小化的發展趨勢,縮小尺寸將提高電阻,衍生熱效應,導致元件所成承受功率受到較大的限制。同時,電子元件精密化的需求,需要低電阻高功率元件,而需要比較大尺寸的元件。In order to cope with the current trend of shrinking the volume of electronic components, reducing the size will increase the resistance and generate thermal effects, resulting in greater restrictions on the power of the components. At the same time, the demand for sophisticated electronic components requires low-resistance, high-power components, and relatively large-sized components.

因應低電阻高功率的精密薄膜電阻元件的需求,本創作提出小尺寸高功率電阻元件的解決方案。In response to the demand for low-resistance, high-power precision thin-film resistor elements, this author proposes solutions for small-sized high-power resistor elements.

為了達到上述目的,本創作提供一種薄膜電阻元件,使得薄膜電阻元件在相同的尺寸下,能降低電阻值並提高電阻容許功率。In order to achieve the above purpose, the present invention provides a thin film resistance element, so that the thin film resistance element can reduce the resistance value and increase the resistance allowable power under the same size.

一種薄膜電阻元件,包含基板、電阻層及二電極層。電阻層設置於基板上,二電極層分開地連接於電阻層的兩端,且電極層與電阻層導通,其中二電極層各具一延伸部可切分電阻層為複數個子電阻層,通常複數個子電阻層的電阻值可皆相同、不相同或部分相同。本創作的薄膜電阻元件設計可在相同電阻元件尺寸下有更低的電阻值及高功率特性。A thin-film resistance element includes a substrate, a resistance layer and a two-electrode layer. The resistance layer is disposed on the substrate, the two electrode layers are separately connected to the two ends of the resistance layer, and the electrode layer and the resistance layer are connected, wherein each of the two electrode layers has an extension portion that can be divided into a plurality of sub-resistance layers, usually a plurality The resistance values of the sub-resistance layers may all be the same, different or partly the same. The design of the thin-film resistance element of this creation can have a lower resistance value and high power characteristics under the same resistance element size.

以下藉由具體實施例配合所附的圖式詳加說明,當更容易瞭解本創作之目的、技術內容、特點及其所達成之功效。The following is a detailed description with specific examples and accompanying drawings, so that it is easier to understand the purpose, technical content, characteristics and effects of the creation.

以下將詳述本創作之各實施例,並配合圖式作為例示。除了這些詳細說明之外,本創作亦可廣泛地施行於其它的實施例中,任何所述實施例的輕易替代、修改、等效變化都包含在本創作之範圍內,並以申請專利範圍為準。在說明書的描述中,為了使讀者對本創作有較完整的瞭解,提供了許多特定細節;然而,本創作可能在省略部分或全部特定細節的前提下,仍可實施。此外,眾所周知的步驟或元件並未描述於細節中,以避免對本創作形成不必要之限制。圖式中相同或類似之元件將以相同或類似符號來表示。特別注意的是,圖式僅為示意之用,並非代表元件實際之尺寸或數量,有些細節可能未完全繪出,以求圖式之簡潔。In the following, each embodiment of the creation will be described in detail, and the drawings will be used as examples. In addition to these detailed descriptions, this creation can also be widely implemented in other embodiments. The easy replacement, modification, and equivalent changes of any of the described embodiments are included in the scope of this creation, and the scope of patent application is quasi. In the description of the specification, in order to allow the reader to have a more complete understanding of this creation, many specific details are provided; however, this creation may still be implemented on the premise that some or all of the specific details are omitted. In addition, well-known steps or elements are not described in detail to avoid unnecessary restrictions on the creation. The same or similar elements in the drawings will be represented by the same or similar symbols. It is important to note that the drawings are for illustrative purposes only, and do not represent the actual size or number of components. Some details may not be fully drawn for simplicity.

本創作是將小尺寸薄膜電阻元件的電阻層上中間設置與電極層的連接點,利用這些連接點使得電阻層形成並聯電阻結構,可降低電阻值,使得本創作可提供更低電阻的薄膜電阻元件。透過連接點的位置,即可調整電阻值。This creation is to set the connection point between the resistance layer and the electrode layer on the middle of the resistance layer of the small-sized thin film resistance element, and use these connection points to form a parallel resistance structure of the resistance layer, which can reduce the resistance value, so that this creation can provide a thin film resistance with lower resistance element. The resistance value can be adjusted through the position of the connection point.

以下實施例中,在電阻層中間設置兩個連接點,使得電阻層可形成三並聯電阻結構,詳細說明如下。但可理解,設置更多的連接點可形成更多的並聯電阻結構。In the following embodiments, two connection points are provided in the middle of the resistance layer, so that the resistance layer can form a three-parallel resistance structure, as described in detail below. However, it can be understood that setting more connection points can form more parallel resistance structures.

請參考圖1,係為本創作一實施例的薄膜電阻元件俯視圖。在此實施例中,一薄膜電阻元件1包含一基板10、一電阻層11及二電極層12。Please refer to FIG. 1, which is a top view of a thin film resistor element according to an embodiment of the present invention. In this embodiment, a thin film resistance element 1 includes a substrate 10, a resistance layer 11 and two electrode layers 12.

電阻層11呈長條狀對應設置於矩形輪廓的基板10上,電阻層11可透過貼合、濺鍍、電鍍或蒸鍍等方式設置於基板10的表面。The resistance layer 11 is provided in a strip shape on the substrate 10 with a rectangular outline, and the resistance layer 11 can be provided on the surface of the substrate 10 by bonding, sputtering, electroplating, or vapor deposition.

二電極層12分別連接該電阻層11相對的兩端,使得該電極層12與該電阻層11導通。電極層12可實質覆蓋、部分重疊或不重疊於該電阻層11的兩端,而達成連接導通的功能。其中該二電極層12各具延伸部13以交錯或相對的方式延伸,而將該電阻層11切分為三子電阻層111, 112, 113,其電阻值表示為R 1, R 2, R 3,形成並聯結構。 The two electrode layers 12 are respectively connected to opposite ends of the resistance layer 11 so that the electrode layer 12 and the resistance layer 11 are electrically connected. The electrode layer 12 may substantially cover, partially overlap, or not overlap the two ends of the resistance layer 11 to achieve the function of connection and conduction. The two electrode layers 12 each have an extension 13 extending in a staggered or opposite manner, and the resistance layer 11 is divided into three sub-resistance layers 111, 112, 113, and the resistance values are expressed as R 1 , R 2 , R 3 , forming a parallel structure.

接著參考圖2及圖3,係為本創作的薄膜電阻元件電路圖及等效電路圖。等效電阻值R eq的倒數為三個子電阻值的倒數和(1/ R eq= 1/R 1+ 1/R 2+ 1/R 3)。例如,在此實施例中,A及A’連接,而B及B’連接,當該三子電阻層111, 112, 113的電阻值相同時,即R 1= R 2= R 3= R/3,在不考慮導線內阻值的情況下,等效電阻值R eq應為原電阻值R的三分之一,即R eq= R 1/3 = R/9。可理解地,不同區段的電阻層面積占比與該段電阻值成正比,因此調整不同區段電阻層面積占比即可調整該段電阻值,而可得到不同的等效電阻。該三子電阻層111, 112, 113的電阻值R 1, R 2, R 3可皆不相同或其中兩者相同,取決於實際所需的電阻值來調整。與過往相同此寸的電阻元件的電阻值相較之下,利用本創作之薄膜電阻元件的電阻值為原電阻值的九分之一,大幅降低電阻值,可滿足精密電阻元件的需求。 Next, referring to FIG. 2 and FIG. 3, it is a circuit diagram and an equivalent circuit diagram of the thin-film resistance element created for this. The reciprocal of the equivalent resistance value R eq is the reciprocal sum of the three sub-resistance values (1/ R eq = 1/R 1 + 1/R 2 + 1/R 3 ). For example, in this embodiment, A and A'are connected, and B and B'are connected, when the resistance values of the three sub-resistance layers 111, 112, 113 are the same, that is, R 1 = R 2 = R 3 = R/ 3. Without considering the internal resistance of the wire, the equivalent resistance value R eq should be one-third of the original resistance value R, that is, R eq = R 1 /3 = R/9. Understandably, the ratio of the resistance layer area of different sections is proportional to the resistance value of the section. Therefore, the resistance value of the section can be adjusted by adjusting the area ratio of the resistance layer of different sections, and different equivalent resistances can be obtained. The resistance values R 1 , R 2 , R 3 of the three sub-resistance layers 111, 112, 113 may be different or both of them are the same, which is adjusted depending on the actually required resistance value. Compared with the resistance value of a resistor element of the same size in the past, the resistance value of the thin-film resistance element of this invention is one-ninth of the original resistance value, which greatly reduces the resistance value and can meet the needs of precision resistance elements.

例如,在一實施例中,二電極層12各自的延伸部13與電阻層11有n個連接點,把電阻層11切分為2n+1段等長的子電阻層,形成並聯電路,每一子電阻層的電阻值為原電阻值R/(2n+1),因此等效電阻值R eq= R/(2n+1) 2。如前述實施例的電極層12各具一延伸部13與電阻層11各具有一個連接點(n=1),電阻層11切分成三子電阻層(3=2*1+1),並聯電路的等效電阻值R eq為原電阻值R的九分之一。 For example, in one embodiment, each extension 13 of the two electrode layers 12 has n connection points with the resistance layer 11, the resistance layer 11 is divided into 2n+1 sub-resistance layers of equal length to form a parallel circuit, each The resistance value of a sub-resistance layer is the original resistance value R/(2n+1), so the equivalent resistance value R eq = R/(2n+1) 2 . As in the previous embodiment, the electrode layer 12 each has an extension 13 and the resistance layer 11 has a connection point (n=1), the resistance layer 11 is divided into three sub-resistance layers (3=2*1+1), and the circuits are connected in parallel The equivalent resistance value R eq is one-ninth of the original resistance value R.

在上述實施例中,基板10可以是氧化鋁、氮化鋁或其他氧化金屬材料等精密陶瓷基板,具有良好的散熱性質的基板,但亦可為其他類型的基板。基板10一般設置成矩形。In the above embodiments, the substrate 10 may be a precision ceramic substrate such as aluminum oxide, aluminum nitride, or other metal oxide materials. The substrate has good heat dissipation properties, but may also be other types of substrates. The substrate 10 is generally rectangular.

以上所述之實施例僅是為說明本創作之技術思想及特點,其目的在使熟習此項技藝之人士能夠瞭解本創作之內容並據以實施,當不能以之限定本創作之專利範圍,即大凡依本創作所揭示之精神所作之均等變化或修飾,仍應涵蓋在本創作之專利範圍內。The above-mentioned embodiments are only to illustrate the technical ideas and characteristics of this creation, and its purpose is to enable those who are familiar with this skill to understand and implement the content of this creation, but should not limit the patent scope of this creation, That is to say, the equal changes or modifications made by Dafan in accordance with the spirit of this creation should still be covered by the patent scope of this creation.

1:薄膜電阻元件 10:基板 11:電阻層 111-113:子電阻層 12:電極層 13:延伸部 R1, R2, R3:子電阻值 R:原電阻值 Req:等效電阻值 A, A’, B, B’:接點 1: Thin film resistive element 10: Substrate 11: Resistance layer 111-113: Sub-resistance layer 12: Electrode layer 13: Extension R 1 , R 2 , R 3 : Sub-resistance value R: Original resistance value R eq : Equivalent resistance Values A, A', B, B': contact

圖1為本創作的薄膜電阻元件俯視圖。Figure 1 is a top view of the thin-film resistance element created for this.

圖2為本創作的薄膜電阻元件電路圖。Figure 2 is a circuit diagram of the thin-film resistance element created for this.

圖3為本創作的薄膜電阻元件等效電路圖。Fig. 3 is the equivalent circuit diagram of the thin-film resistance element created by the author.

1:薄膜電阻元件 1: Thin film resistance element

10:基板 10: substrate

11:電阻層 11: Resistance layer

111-113:子電阻層 111-113: Sub-resistance layer

12:電極層 12: electrode layer

13:延伸部 13: Extension

Claims (4)

一種薄膜電阻元件,包含: 一基板; 一電阻層設置於該基板上; 二電極層分別連接於該電阻層的兩端,與該電阻層導通,其中該二電極層各具一延伸部交錯延伸並連接至該電阻層中間,而將該電阻層切分複數個子電阻層,使得該複數個子電阻層形成並聯電阻。 A thin-film resistance element, including: A substrate A resistance layer is provided on the substrate; The two electrode layers are respectively connected to the two ends of the resistance layer and communicate with the resistance layer, wherein each of the two electrode layers has an extension part staggered and connected to the middle of the resistance layer, and the resistance layer is divided into a plurality of sub-resistance layers , So that the plurality of sub-resistance layers form a parallel resistance. 如申請專利範圍第1項所述之薄膜電阻元件,其中該二電極層的該延伸部各自與該電阻層具有一連接點,而將該電阻層切分為三子電阻層。The thin-film resistance element as described in item 1 of the patent application range, wherein the extensions of the two-electrode layer each have a connection point with the resistance layer, and the resistance layer is divided into three sub-resistance layers. 如申請專利範圍第2項所述之薄膜電阻元件,該三子電阻層的電阻值相同或不相同。As in the thin-film resistance element described in item 2 of the patent application range, the resistance values of the three sub-resistance layers are the same or different. 如申請專利範圍第1項所述之薄膜電阻元件,該複數個子電阻層的電阻值皆相同、完全不相同或部分相同。As in the thin-film resistance element described in item 1 of the patent application range, the resistance values of the plurality of sub-resistance layers are all the same, completely different, or partly the same.
TW108216840U 2019-12-18 2019-12-18 Thin film resistor element TWM595875U (en)

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TW108216840U TWM595875U (en) 2019-12-18 2019-12-18 Thin film resistor element
CN202020071599.9U CN211062545U (en) 2019-12-18 2020-01-14 Thin film resistor element

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