TWM592467U - Turbo molecular pump and its dust-proof rotor element - Google Patents

Abstract

The present invention discloses a turbomolecular pump and its dust-proof rotor element, wherein the dust-proof rotor element includes a rotor seat, a plurality of rotor blade groups, and a dust-proof cover. The rotor base has an exposed connection chamber, a plurality of rotor blade groups are connected to the rotor base and are arranged at intervals, and a dust cover is used to seal the connection chamber. The dustproof cover includes a cover body and a positioning structure. The cover body has two oppositely arranged air pressure balancing holes in gas communication with the connection chamber. The positioning structure extends from the bottom of the cover body into the connection chamber and forms a seal with the connection chamber. When the turbomolecular pump is in use, the dust cover can prevent particulate matter from depositing in the connection chamber of the rotor base, and can eliminate the pressure difference between the outside and the connection chamber.

Description

Turbo molecular pump and its dust-proof rotor element

This creation relates to a vacuum pump and its rotor, in particular to a turbomolecular pump and its dust-proof rotor.

At present, the main semiconductor processes such as ion implantation, furnace tube, film sputtering, plasma etching, chemical mechanical polishing, etc. need to be carried out in the cavity of the high vacuum process; therefore, the vacuum environment of the cavity is One of the key factors affecting process yield, and a clean and stable vacuum environment helps to improve process yield. As the heart of the vacuum system, the turbomolecular pump uses the rotor to rotate at high speed relative to the stator to expel gas from the process cavity to create a high vacuum environment.

However, some semiconductor manufacturing processes will generate a large amount of particles in the pump. These particles can easily accumulate in the places where they are in contact with the gas (such as the rotor and the exhaust port), resulting in a reduction in exhaust efficiency and affecting the vacuum efficiency. In addition, these particles are also easy to accumulate in some exposed locking areas, and when the pressure changes, the unstable air flow will fly back to the process cavity and cause pollution.

Therefore, how to improve the reliability of the turbomolecular pump through the improvement of structural design and improve the yield of the process have become one of the important issues that this business wants to solve.

The technical problem to be solved in this creation is to provide a dust-proof rotor for the shortcomings of the existing technology, which can take into account the process yield and the pressure balance inside the pump. Also, a turbomolecular pump using this dust-proof rotor is provided.

In order to solve the above technical problems, one of the technical solutions adopted in this creation is to provide a dust-proof rotor element, which includes a rotor seat, a plurality of rotor blade groups, and a dust cover. The rotor base has an exposed connection chamber, a plurality of the rotor blade groups are connected to the rotor base and are arranged at intervals, and the dust cover is used to seal the connection chamber; wherein the dust cover includes a cover body And a positioning structure, the cover body has two oppositely arranged gas pressure balancing holes in gas communication with the connection chamber, the positioning structure extends from the bottom of the cover body into the connection chamber and is connected to the connection chamber A seal is formed between the chambers.

In order to solve the above technical problems, another technical solution adopted in this creation is to provide a turbomolecular pump, which includes a housing, a stator element, a dust-proof rotor element, and a high-speed rotating shaft. The casing has a cavity, the stator element is disposed in the cavity, and includes a plurality of stator blade groups arranged at intervals, the dust-proof rotor element is disposed in the cavity, and includes a A rotor seat, a plurality of rotor blade sets and a dust cover, the high-speed rotating shaft is used to drive the dust-proof rotor element to rotate relative to the stator element; the rotor seat has an exposed connection chamber, a plurality of the rotors The blade group is connected to the rotor base and alternately arranged up and down with a plurality of the stator blade groups. The dust cover is used to seal the connection chamber; wherein the dust cover includes a cover body and a positioning structure, the The cover body has two air pressure balancing holes which are oppositely arranged and are in gas communication with the connection chamber. The positioning structure extends from the bottom of the cover body into the connection chamber and forms a seal with the connection chamber.

In an embodiment of the present invention, the rotor seat has a partition inside to define the connection chamber, and the partition is provided with a connection channel connecting the connection chamber; the high-speed rotating shaft It includes a shaft body and an extension portion extending from the shaft body, and the position of the extension portion corresponds to the connection channel; the dust cover further includes a connection structure, which is disposed inside the positioning structure, and The connecting structure is fixed with the extension of the high-speed rotating shaft.

In an embodiment of the present invention, the shaft body has a central area and a peripheral area surrounding the central area, and the extending portion extends from the central area into the connecting channel.

In an embodiment of the present invention, the cover is covered on the connection chamber.

In an embodiment of the present invention, each of the two air pressure balance holes has a cylindrical body, and the two cylindrical bodies can be applied with an external force to rotate the dust cover relative to the rotor base.

In an embodiment of the present invention, the dust cover further includes an elastic sealing ring, which is disposed on the positioning structure.

In an embodiment of the present invention, the positioning structure has a clamping groove, and the elastic sealing ring is fixed on the positioning structure by the clamping groove.

In an embodiment of the present invention, the cover has an outer surface, the positioning structure has an inner surface relative to the outer surface, and the two air pressure balancing holes extend from the outer surface to all Described inside surface.

In an embodiment of the present invention, the cover body further has two counterweight holes disposed oppositely.

In an embodiment of the present invention, the positioning structure has a barb portion, a gap exists between the barb portion and the cover, and has a guide surface facing the boundary of the connection chamber; Wherein the guiding surface is an inclined surface.

One of the beneficial effects of this creation is that the dust-proof rotor element provided by this creation can pass the "rotor base has a connection chamber for assembling high-speed rotating shafts. The dust cover includes a cover body and a positioning structure, wherein the cover body There are two oppositely arranged gas pressure balancing holes that are in gas communication with the connection chamber, and the positioning structure extends from the bottom of the cover into the connection chamber, and forms a seal with the connection chamber" to prevent the particles generated in the process from being deposited on the connection Chamber, and ensure that the pressure in the connection chamber is balanced with the internal pressure of the pump to avoid the generation of unstable airflow to bring particles back into the process cavity and cause pollution.

In order to further understand the characteristics and technical content of this creation, please refer to the following detailed description and drawings of this creation. However, the drawings provided are for reference and explanation only, and are not intended to limit this creation.

In the semiconductor manufacturing process, many process stages have the problem of yield loss caused by random particle defects, so this creation provides a turbomolecular pump for vacuuming the process cavity, the improvement of which is the use of dust-proof rotor elements ; When in use, the dust-proof rotor element not only prevents the particles generated in the process from being deposited in the connection chamber with the rotating shaft, but also ensures that the pressure in the connection chamber is balanced with the internal pressure of the pump to prevent the particles from flying back to the process cavity Cause pollution in the body.

The following is a description of the implementation of the “turbomolecular pump and its dust-proof rotor element” disclosed by the present invention through specific specific examples. Those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. This creation can be implemented or applied through other different specific embodiments. The details in this specification can also be based on different views and applications, and various modifications and changes can be made without departing from the concept of this creation. In addition, the drawings in this creation are only a schematic illustration, not based on actual size, and are declared in advance. The following embodiments will further describe the relevant technical content of the creation, but the disclosed content is not intended to limit the protection scope of the creation.

It should be understood that although terms such as “first”, “second”, and “third” may be used herein to describe various elements or signals, these elements or signals should not be limited by these terms. These terms are mainly used to distinguish one component from another component, or one signal from another signal. In addition, the term "or" as used herein may include any combination of any one or more of the associated listed items, depending on the actual situation.

[First embodiment]

Referring to FIGS. 1 to 4, the turbomolecular pump Z of the present invention mainly includes a casing 1, a stator element 2, a dust-proof rotor element 3 and a high-speed rotating shaft 4. The housing 1 has a cavity 100, the stator element 2, the dust-proof rotor element 3 and the high-speed rotating shaft 4 are all disposed in the cavity 100, and the dust-proof rotor element 3 can be driven by the high-speed rotating shaft 4 to rotate at high speed relative to the stator element 2 . The turbomolecular pump Z can be connected to the processing chamber of a semiconductor process equipment (not shown in the figure) through a pipeline, and the process chamber is evacuated to the vacuum required by a specific semiconductor process (such as an etching process), but this creation is not limited Here.

In practical application, the turbo molecular pump Z further includes a base 5 for assembling the casing 1, the stator element 2, the dust-proof rotor element 3 and the high-speed rotating shaft 4. The base 5 is provided with an exhaust port 500, and the base 5 includes a bearing mechanism 51 and a driving unit 52 (such as a motor). The high-speed rotating shaft 4 is disposed on the bearing mechanism 51. The bearing mechanism 51 can generate magnetic force to support the high-speed rotating shaft 4. The driving unit 52 can drive the high-speed rotating shaft 4 to rotate at high speed. The composition of the bearing mechanism 51, including mechanical bearings, radial magnetic bearings, and axial magnetic bearings, is well known to those skilled in the art, so it will not be repeated here.

The casing 1 is a two-piece casing, which includes a first casing 11 and a second casing 12; the first casing 11 is, for example, an upper casing, the second casing 12 is, for example, a lower casing, and the first casing The body 11 and the second housing 12 can be combined into one body by locking; the main parts of the first housing 11 and the second housing 12 are cylindrical, and form a cavity body 100 together. Further, the first shell 11 and the second shell 12 have a gas guiding function, wherein the first shell 11 defines an upstream area of the cavity 100, and the first shell 11 has a communication with the cavity The air inlet 111 of 100; In addition, the second housing 12 defines a downstream area of the cavity 100, and an inner wall of the second housing 12 is provided with a threaded air guide groove 121. However, these details only describe the feasible implementation of the housing 1 and are not intended to limit the creation. In some embodiments, according to actual needs, the housing 1 may also be a one-piece housing.

When the turbo molecular pump Z is evacuated, the gas will flow into the cavity 100 from the air inlet 111 and flow through the channel between the housing 1, the stator element 2 and the dust-proof rotor element 3, and then to the air guide groove 121 After being compressed, it is discharged from the exhaust port 500.

Referring to FIGS. 1 to 4, as shown in FIGS. 5 and 6, the stator element 2 corresponds to the position of the dust-proof rotor element 3. The stator element 2 includes a plurality of spacers 21 and a plurality of stator blade groups 22, of which a plurality The stator blade groups 22 extend in the radial direction, and are respectively connected to the inner wall of the first housing 11 by a plurality of spacers 21, and are arranged in layers up and down; the spacers 21 may have a ring shape, but are not limited thereto. The dust-proof rotor element 3 includes a rotor base 31, a plurality of rotor blade groups 32 and a dust cover 33, wherein the rotor base 31 has an exposed connection chamber 300 for assembling the high-speed rotating shaft 4; a plurality of rotor blade groups 32 are connected In the rotor base 31, a plurality of rotor blade groups 32 also extend in the radial direction and are alternately arranged with a plurality of stator blade groups 22; a dust cover 33 is used to seal the connection chamber 300.

Further, each stator blade group 22 includes a plurality of stator blades 221, and each rotor blade group 32 includes a plurality of rotor blades 321; the inclination direction of the plurality of rotor blades 321 is opposite to the inclination direction of the plurality of stator blades 221, and The inclination angle of the stator blades 221 in the upper layer is greater than or equal to the inclination angle of the stator blades 221 in the lower layer, and the inclination angle of the rotor blades 321 in the upper layer is greater than or equal to the inclination angle of the rotor blades 321 in the lower layer. By this, it can be ensured that gas molecules irreversibly flow from the intake port 111 to the exhaust port 500. However, the number and tilt angle of the stator blades 221 included in each stator blade group 22 and the number and tilt angle of the rotor blades 321 included in each rotor blade group 32 are not particularly limited. In some embodiments, the number of stator blades 221 can be selected from 16 to 48, and the inclination angle of the stator blades 221 can be between 13 degrees and 45 degrees, depending on the level of the stator blade group 22 Adjustment; similarly, the number of rotor blades 321 can be selected from 25 to 56 according to the level of the rotor blade group 32, and the angle of inclination of the rotor blades 321 can be adjusted between 13 degrees and 45 degrees .

The rotor seat 31 includes a first seat body 311 and a second seat body 312, the position of the first seat body 311 corresponds to the first housing 11, and the position of the second seat body 312 corresponds to the second housing 12; wherein the connection chamber 300 is formed to be recessed downward from the top of the first seat body 311, and the position corresponds to the air inlet 111 of the first housing 11, and a plurality of rotor blades 321 extend from the outer wall of the first seat body 311. In this embodiment, the plurality of rotor blade groups 32, the first seat body 311 and the second seat body 312 are integrally formed; the first seat body 311 is tapered toward the direction of the air inlet 111, and the second seat body 312 is cylindrical. However, these details are merely describing possible implementations of the stator element 2 and the dust-proof rotor element 3 and are not intended to limit the creation.

5 to 8, the dust cover 33 includes a cover body 331, a positioning structure 332 and a connection structure 333, wherein the cover body 331 covers the connection chamber 300, and has at least two oppositely arranged and connected The air pressure balance holes H1 in the gas communication of the chamber 300 are preferably two or four; the positioning structure 332 extends from the bottom of the cover 331 into the connection chamber 300 and forms a seal with the connection chamber 300; the connection structure 333 is provided in the positioning structure The inner side of 332 is used to connect the high-speed rotating shaft 4 and make the high-speed rotating shaft 4 stand upright. It is worth noting that when the dust-proof rotor element 3 rotates at a high speed, the dust cover 33 can effectively block the process particles from entering the connection chamber 300, and the pressure of the connection chamber 300 is kept consistent with the internal pressure of the pump through the air pressure balancing hole H1 to avoid An unstable air flow is generated to bring the particles back into the process cavity and cause pollution.

In addition, the air pressure balance hole H1 can also achieve the effect of adjusting the rotor dynamic balance weight, that is, the air pressure balance hole H1 can reduce the weight to improve the rotor dynamic balance accuracy. According to actual needs, the cover body 331 may have at least two counterweight holes H2 opposite to each other, as shown in FIG. 5. In this embodiment, the air pressure balancing hole H1 penetrates the outer surface S1 of the cover 331 and the inner surface S2 of the positioning structure 332, that is, extends from the outer surface S1 of the cover 331 to the inner surface S2 of the positioning structure 332, as shown in FIG. 7 As shown, but not limited to this. In practical applications, the weight hole H2 may or may not penetrate the outer surface S1 of the cover 331 and the inner surface S2 of the positioning structure 332 as long as it does not affect the high-speed dynamic balance of the rotor.

Further, the positioning structure 332 may be an annular convex rib, and the connecting structure 333 may include a cylindrical portion 3331 and a connecting portion 3332 coupled to the cylindrical portion 3331; the cylindrical portion 3331 and the connecting portion 3332 may be two separate In this way, the dust cover 33 can adapt to different types of rotating shafts and increase the structural strength of the rotor. The cylindrical portion 3331 and the connecting portion 3332 can be screwed together, that is, the cylindrical portion 3331 has an internal thread and the connecting portion 3332 has an external thread, but the creation is not limited thereto. In some embodiments, the cylindrical portion 3331 and the connecting portion may be integrally formed. It is worth noting that the cover 331 has a central highest point T, and the height of the cover 331 decreases from the central highest point T outward with a specific slope or curvature; by this, the cover 331 can play the role of guiding gas, That is, the gas flowing in from the air inlet 111 of the first housing 11 can flow along the upper surface of the cover 331 to the region where the rotor and stator blades 321 and 221 are located, and to prevent particles from being deposited on the cover 331.

Referring to FIGS. 4 to 6, as shown in FIGS. 7 and 8, in order to improve or better maintain the sealing effect of the connection chamber 300, it is preferable to provide an elastic sealing ring 34 on the positioning structure 332. Further, the outer wall of the positioning structure 332 may be provided with a clamping groove R, and the elastic sealing ring 34 is fixed on the outer wall of the positioning structure 332 by the clamping groove R. In addition, in the presence of the elastic sealing ring 34, the positioning structure 332 is constrained by the elastic force provided by the elastic sealing ring 34, so that the axis of the dust cover 33 is always maintained on the axis defined by the high-speed rotating shaft 4.

In order to assemble the dust-proof rotor element 3 and the high-speed rotating shaft 4, as shown in FIG. 6, the first seat body 311 of the rotor seat 31 has a partition 3111 for defining the connection chamber 300, and the partition 3111 A connection channel 3112 communicating with the connection chamber 300 is provided, and its position corresponds to the connection structure 333 of the dust cover 33; the high-speed rotating shaft 4 includes a shaft body 41 and an extension portion 42 extending from the shaft body 41, wherein the extension portion 42 is along the shaft body The axis of 41 extends, and its position corresponds to the connection channel 3112 to be fixed together with the connection structure 333 of the dust cover 33. Further, as shown in FIG. 4, the shaft 41 has a central area 411 and a peripheral area 412 surrounding the central area 411. The extension 42 extends from the central area 411 through the connection channel 3112 into the connection chamber 300; the extension 42 and the connecting portion 3332 can be screwed together, that is, the extending portion 42 has an internal thread and the connecting portion 3332 has an external thread. However, these details only describe the feasible implementation of the high-speed shaft 4 and are not intended to limit the creation. In some embodiments, the extension 42 may only extend to the connection channel 3112 without entering the connection chamber 300.

Referring to FIG. 9, in the presence of the air pressure balancing hole H1, the dust cover 33 can be directly coupled to the rotor base 31 without using any tools. Further, a columnar body 6 (such as a bolt) can be placed in the two opposing air pressure balance holes H1, and an external force is applied to the two columnar bodies 6 at the same time, so that the dust cover 33 rotates relative to the rotor base 31 Then, the connecting portion 3332 is inserted into the extending portion 42 of the high-speed rotating shaft 4.

[Second Embodiment]

Referring to FIG. 10 and FIG. 11, the difference between the second embodiment and the first embodiment is that the positioning structure 332 of the dust cover 33 has an inverted hook portion 3321, wherein the inverted hook portion 3321 has a boundary facing the connection chamber 300 There is a gap G between the hook surface 3321 and the cover 331; the guide surface S3 may be a slope, but it is not limited thereto. Thereby, during the assembly process, the interference between the positioning structure 332 and the boundary of the connection chamber 300 can be reduced, so that the dust cover 33 can be more easily assembled on the rotor base 31. After the assembly is completed, the inverted hook portion 3321 can press against the inner surface (not labeled) of the connection chamber 300 to produce a pressing effect, and at the same time, part of the inverted hook portion 332 will be pressed into the gap G, thus the axis of the dust cover 33 It can always be maintained on the axis defined by the high-speed rotating shaft 4.

[Beneficial effect of embodiment]

One of the beneficial effects of this creation is that the dust-proof rotor element provided by this creation can pass the "rotor base has a connection chamber for assembling high-speed rotating shafts. The dust cover includes a cover body and a positioning structure, wherein the cover body There are two oppositely arranged gas pressure balancing holes that are in gas communication with the connection chamber, and the positioning structure extends from the bottom of the cover into the connection chamber, and forms a seal with the connection chamber" to prevent the particles generated in the process from being deposited on the connection Chamber, and ensure that the pressure in the connection chamber is balanced with the internal pressure of the pump to avoid the generation of unstable airflow to bring particles back into the process cavity and cause pollution.

Furthermore, in the presence of the air pressure balance hole, it is not necessary to use any tools, and the dust cover is directly coupled to the rotor seat, so it is more convenient in use.

Furthermore, the positioning structure of the dust cover may have an elastic sealing ring to improve or better maintain the sealing effect of the connection chamber. In addition, in the presence of the elastic sealing ring, the positioning structure is constrained by the elastic force provided by the elastic sealing ring, so that the dust cover is always kept on the axis of the high-speed rotating shaft.

Furthermore, in order to make it easier to assemble the dust cover to the rotor base and keep the axis of the dust cover on the axis of the rotating shaft, the positioning structure of the dust cover may have a barb portion, wherein the barb portion has a face A guide surface connecting the boundary of the chamber, and there is a gap between the hook portion and the cover.

The content disclosed above is only a preferred and feasible embodiment of this creation, and does not limit the scope of the patent application for this creation, so any equivalent technical changes made by using this creation specification and graphic content are included in this creation application Within the scope of the patent.

Z: Turbo molecular pump 1: Shell 100: cavity 11: The first shell 111: Air inlet 12: Second shell 121: air duct 2: stator element 21: spacer 22: stator blade group 221: stator blade 3: Dust-proof rotor element 300: connection room 31: rotor seat 311: The first body 3111: Partition 3112: Connect channel 312: second body 32: rotor blade group 321: rotor blade 33: Dust cover 331: Cover H1: Air pressure balance hole H2: counterweight hole S1: outside surface T: the highest point in the center 332: Positioning structure 3321: Barb S2: inside surface S3: Guide surface R: Card slot G: gap 333: connection structure 3331: cylindrical part 3332: Connection 34: Elastic sealing ring 4: High speed shaft 41: Shaft 411: Central area 412: Surrounding area 42: Extension 5: Base 500: exhaust port 51: Bearing mechanism 52: Drive unit 6: columnar body

FIG. 1 is a three-dimensional schematic diagram of the turbo molecular pump of the first embodiment of the creation.

FIG. 2 is a three-dimensional exploded schematic view of the turbo molecular pump of the first embodiment of the creation.

FIG. 3 is another three-dimensional exploded schematic diagram of the turbo molecular pump of the first embodiment.

4 is a schematic cross-sectional view of the IV-IV cross-section of FIG. 1.

5 is a schematic perspective view of the dust-proof rotor element of the first embodiment of the creation.

6 is a schematic plan view of the dust-proof rotor element of the first embodiment of the creation.

7 is a schematic structural view of one of the dustproof covers of the first embodiment of the creation.

FIG. 8 is another schematic structural diagram of the dustproof cover of the first embodiment of the creation.

FIG. 9 shows the assembly process of the dust cover, the rotor base, and the high-speed rotating shaft of the first embodiment of the present creation.

FIG. 10 is a schematic diagram of the structure of the dustproof cover of the second embodiment.

FIG. 11 shows the assembly process of the dust cover and the rotor base of the second embodiment of the present creation.

Z: Turbo molecular pump

1: Shell

11: The first shell

111: Air inlet

12: Second shell

33: Dust cover

5: Base

500: exhaust port

Claims (18)

A dust-proof rotor element, including: A rotor base with an exposed connection room; A plurality of rotor blade groups connected to the rotor base and arranged at intervals; and A dustproof cover for sealing the connection chamber, wherein the dustproof cover includes a cover body and a positioning structure, the cover body has two oppositely arranged air pressure balancing holes in gas communication with the connection chamber, the The positioning structure extends from the bottom of the cover into the connection chamber, and forms a seal with the connection chamber. The dust-proof rotor element according to item 1 of the scope of the patent application, wherein the cover body covers the connection chamber. The dust-proof rotor element according to item 2 of the patent application range, wherein each of the two air pressure balance holes has a cylindrical body, and the two cylindrical bodies can be applied with an external force to make the dust cover face each other The rotor seat rotates. The dust-proof rotor element according to item 2 of the patent application scope, wherein the dust-proof cover further includes an elastic sealing ring, which is disposed on the positioning structure. The dust-proof rotor element according to item 4 of the patent application, wherein the positioning structure has a clamping groove, and the elastic sealing ring is fixed to the positioning structure by the clamping groove. The dust-proof rotor element according to item 1 of the patent application range, wherein the cover body has an outer surface, the positioning structure has an inner surface relative to the outer surface, and the two air pressure balance holes It extends from the outside surface to the inside surface. The dust-proof rotor element according to item 1 of the patent application scope, wherein the cover body further has two counterweight holes disposed oppositely. The dust-proof rotor element according to item 1 of the patent application range, wherein the positioning structure has a barb portion, a gap exists between the barb portion and the cover, and has a face facing the connection The guiding surface of the boundary of the chamber; wherein, the guiding surface is a slope. A turbomolecular pump, including: A shell with a cavity; A certain sub-element is arranged in the cavity, and includes a plurality of stator blade groups arranged at intervals; A dust-proof rotor element is provided in the cavity, wherein the dust-proof rotor element includes: A rotor base with an exposed connection room; A plurality of rotor blade groups connected to the rotor base and alternately arranged up and down with the plurality of stator blade groups; and A dustproof cover for sealing the connection chamber, wherein the dustproof cover includes a cover body and a positioning structure, the cover body has two oppositely arranged air pressure balancing holes in gas communication with the connection chamber, the The positioning structure extends from the bottom of the cover into the connection chamber and forms a seal with the connection chamber; and A high-speed rotating shaft is used to drive the dust-proof rotor element to rotate relative to the stator element. The turbomolecular pump according to item 9 of the patent application scope, wherein the rotor seat has a partition inside to define the connection chamber, and the partition is provided with a connection to the connection chamber The connection channel of the high-speed rotating shaft includes a shaft body and an extension portion extending from the shaft body, and the position of the extension portion corresponds to the connection channel; the dust cover further includes a connection structure, which is provided in The inner side of the positioning structure, and the connecting structure and the extension portion of the high-speed rotating shaft are fixed together. The turbomolecular pump according to item 10 of the patent application scope, wherein the shaft body has a central region and a peripheral region surrounding the central region, and the extension portion extends from the central region into the Connect the channel. The turbomolecular pump as described in item 9 of the patent application scope, wherein the cover body covers the connection chamber. The turbomolecular pump as described in item 12 of the patent application scope, wherein each of the two air pressure balance holes has a cylindrical body, and the two cylindrical bodies can be applied with an external force to make the dust cover face each other The rotor seat rotates. The turbomolecular pump as described in item 12 of the patent application scope, wherein the dust cover further includes an elastic sealing ring, which is disposed on the positioning structure. The turbomolecular pump as described in item 14 of the patent application range, wherein the positioning structure has a clamping groove, and the elastic sealing ring is fixed to the positioning structure by the clamping groove. The turbomolecular pump as described in item 9 of the patent application range, wherein the cover has an outer surface, the positioning structure has an inner surface relative to the outer surface, and the two air pressure balance holes It extends from the outside surface to the inside surface. The turbomolecular pump as described in item 9 of the patent application scope, wherein the cover body further has two counterweight holes arranged oppositely. The turbomolecular pump as described in item 9 of the patent application range, wherein the positioning structure has a barbed portion, a gap exists between the barbed portion and the cover, and has a face facing the connection The guiding surface of the boundary of the chamber; wherein, the guiding surface is a slope.

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