TWM587277U - Rotary components and testing equipment - Google Patents

Abstract

A rotating component and a detection device. The setting device includes the rotating component. The rotating component is used to rotate a probe component relative to a device under test, and multiple probes of the probe component can be pressed against a plurality of electrical connection parts of the device under test to electrically connect the device under test and According to the inspection operation, the rotating component includes: an arc-shaped track, a slider, and a driving module. At least a part of the arc-shaped track is arranged around a longitudinal axis. The sliding member is used for connecting with the probe assembly, and the sliding member can move along the arc-shaped track. The driving module can be controlled to move the sliding member along the arc track, so that the probe assembly is rotated relative to the device under test.

Description

Rotary components and testing equipment

The present invention relates to a rotating component and a detection device, in particular to a rotating component and a detection device for rotating a probe card.

Please refer to FIG. 1, which is a schematic diagram of a conventional probe card device P having a rotating function. The probe card device P includes a robot arm P1, a rotating shaft body P2, an auxiliary connecting member P3, and a probe card P4. The robot arm P1 is connected to the rotating shaft body P2, the rotating shaft body P2 is connected to the auxiliary connecting piece P3, and the probe card P4 is disposed on the auxiliary connecting piece P3. The robot arm P1 can be controlled to cause the probe card P4 to move in multiple axes to a designated position. The rotating shaft body P2 can be controlled to rotate a predetermined angle; when the rotating shaft body P2 is controlled to rotate a predetermined angle, the rotating shaft body P2 will drive the auxiliary connection member P3 to rotate, thereby rotating the probe card P4 by a predetermined angle. Adjust the relative position of the probe card P4 and the DUT to be detected.

However, in the above-mentioned common design method of the probe card device P, there are many problems in practical applications. For example, referring to FIG. 2, if the distance between the probe card P4 and the rotation center O of the rotating shaft body P2 is defined as r1, when the rotating shaft body P2 is rotated by a predetermined angle θ 1, the swing distance of the probe card P4 will be Is r1 θ 1; it is undeniable that the driving mechanism that drives the rotating shaft P2 to rotate has its own rotation error, and this rotation error will be amplified accordingly; that is, the relevant personnel or equipment must Before the distance r1 is obtained, it is possible to accurately control the swing distance of the probe card P4, otherwise it will be difficult to accurately control the swing distance of the probe card P4. However, in specific applications, according to the needs of various manufacturers, the auxiliary connector P3 may also be provided with electronic devices with various functions, such as an image capture unit. Therefore, the distance r1 is difficult. To be accurately measured, and the swing distance of the probe card is difficult to be accurately controlled.

For this reason, the author has devoted himself to studying and cooperating with the application of theories, and has proposed a creative design that effectively improves the above problems.

The main purpose of this creation is to provide a rotating component and a detection device to improve the swing distance of a probe card device with a rotating function that is difficult to be accurately controlled in the prior art.

In order to achieve the above object, the present invention provides a rotating component for rotating a probe component relative to a device under test. Multiple probes of the probe component can be pressed against a plurality of electrical connection parts of the device under test. To electrically connect the DUT and perform a detection operation based on the DUT, the rotating component includes: an arc-shaped track, a slider, and a driving module. At least a part of the arc-shaped track is arranged around a longitudinal axis. The sliding member is used for connecting with the probe assembly, and the sliding member can move along the arc-shaped track. The driving module can be controlled to move the sliding member along the arc track, so that the probe assembly is rotated relative to the device under test.

In order to achieve the above object, the present invention also provides a detection device for performing a detection operation on a test piece. The detection device includes: a carrier, a processing device, and a probe device. The carrier is used to carry the device under test. The mobile device is electrically connected to the processing device. The probe device is connected to a mobile device. The probe device includes a probe component and a rotating component. The probe assembly contains a plurality of probes. The rotating component includes: a fixed part, an arc-shaped track, a sliding part and a driving module. The fixing member is fixedly disposed on the mobile device. The arc-shaped track is connected to the fixing member, and at least a part of the arc-shaped track is arranged around a longitudinal axis. The slider is connected to the probe assembly, and the slider can move along an arc-shaped track. The driving module can be controlled by the processing device to move the sliding member along the arc-shaped track, so that the probe assembly is rotated relative to the part to be tested set on the stage. The processing device can control the moving device so that the probe device moves relative to the stage in at least one dimension of the three-dimensional coordinate system; the processing device can control the moving device and the probe device so that multiple probes are pressed against each other. To the multiple electrical connection portions of the device under test; when multiple probes are pressed against the multiple electrical connection portions, the processing device can pass through the multiple probes, Test the test piece.

The beneficial effect of this creation can be that: through the mutual cooperation of the arc-shaped track and the slider, when the drive module drives the slider to move relative to the arc-shaped track, the slider will directly drive the probe card to move. The precision of the module-driven slider can accurately control the moving distance of the probe card, but can effectively improve the existing probe card device with a rotating function, and it is difficult to effectively control the swing distance of the probe card.

In order to further understand the features and technical contents of this creation, please refer to the following detailed description and drawings of this creation, but the drawings are provided for reference and explanation only, and are not intended to limit this creation.

200‧‧‧testing equipment

10‧‧‧Rotary components

11‧‧‧ curved track

12‧‧‧ Slider

13‧‧‧Drive Module

131‧‧‧Drive

132‧‧‧Pushing

133‧‧‧Elastic piece

134‧‧‧Auxiliary connector

14‧‧‧Fixed parts

15‧‧‧ Probe Assembly

151‧‧‧ Probe

20‧‧‧ carrier

30‧‧‧Processing device

40‧‧‧ mobile device

50‧‧‧ Probe device

60‧‧‧Image capture module

601‧‧‧Image capture information

70‧‧‧Fine-tuning kit

C‧‧‧longitudinal axis

Q‧‧‧DUT

Q1‧‧‧Electrical connection

R‧‧‧ circular path

W‧‧‧ Center

FIG. 1 is a schematic diagram of a conventional probe card device.

FIG. 2 is a bottom view of a conventional probe card device.

FIG. 3 is a schematic diagram of a rotating component of the creation.

FIG. 4 is a top view of the rotating component of this creation without an arc-shaped track.

FIG. 5 is a front view of the detection device of this creation.

FIG. 6 is a schematic diagram of a detection device for the creation.

FIG. 7 is a schematic block diagram of a detection device for the creation.

FIG. 8 is a schematic block diagram of another embodiment of a creative detection device.

The following is a specific example to explain the implementation of the rotating components and detection equipment of this creation. Those familiar with this technology can easily understand other advantages and effects of this creation from the content disclosed in this manual. This creation can also be implemented or applied through other different specific examples. The details in this specification can also be modified and changed based on different perspectives and applications without departing from the spirit of this creation. Moreover, the drawings in this creation are only for simple explanation, and are not drawn according to actual size, that is, the actual size of the relevant composition is not reflected, and it will be described first. The following embodiments describe the viewpoints of this creation in detail, but do not limit the scope of this creation in any way. to In the following description, if you refer to a specific drawing or as shown in a specific drawing, it is only used to emphasize in the subsequent description. Most of the related content mentioned in the specific drawing appears, but It is not limited that only the specific drawings can be referred to in this subsequent description.

Please refer to FIG. 3 and FIG. 4 together. FIG. 3 shows a schematic diagram of the rotating component of the present creation, and FIG. 4 shows a schematic diagram of the rotating component 10 of the present creation without the curved track 11. As shown in the figure, the rotating assembly 10 is used to rotate a probe assembly 15 relative to a device under test (not shown). The probe assembly 15 referred to herein is an assembly including at least one probe card. The DUT can be selected according to requirements, for example, it can be a display panel, various chips, etc., which is not limited here.

The rotating assembly 10 includes an arc-shaped track 11, a sliding member 12 and a driving module 13. The arc-shaped track 11 is arranged around a longitudinal axis C. The length, radian, and the like of the arc-shaped track 11 can be changed according to requirements; the longitudinal axis C referred to herein is, for example, parallel to the normal direction of the carrier used to carry the device under test, but is not limited thereto. In practical applications, the longitudinal axis C may be located at the geometric center of the probe assembly 15.

The sliding member 12 can be connected to the probe assembly 15 through an auxiliary connecting member 134, and the sliding member 12 can move along the arc-shaped track 11. The shape of the sliding member 12 and the distance that the sliding member 12 can move relative to the arc-shaped track 11 may be changed according to requirements, and is not limited herein. It should be noted that the arc-shaped track 11 means that when the slider 12 moves relative to the arc-shaped track 11, the movement path of the slider 12 relative to the arc-shaped track 11 is an arc, that is, the actual shape of the arc-shaped track 11 is external Type can be changed according to demand.

The driving module 13 can be controlled to move the slider 12 along the arc-shaped track 11. Since the probe assembly 15 is connected to the slider 12, the probe assembly moves while the slider 12 moves relative to the arc-shaped track 11. 15 will be rotated by an angle corresponding to the device under test Q. The manner in which the driving module 13 drives the slider 12 may be changed according to requirements, and is not limited herein.

As shown in FIG. 4, the driving module 13 may include a driver 131, a pushing member 132 and an elastic member 133. The driver 131 is connected to the pushing member 132, and the driver 131 can be controlled to move the pushing member 132. For example, the driver 131 may Therefore, it includes a motor and a plurality of gear sets. When the driver 131 is controlled to operate, the motor will operate to drive the plurality of gear sets to actuate, thereby driving the pushing member 132 to move linearly.

The pushing member 132 and the sliding member 12 are connected to each other. For example, the pushing member 132 may be abutted against a predetermined position of the slider 12, or the pushing member 132 may be fixedly disposed at a predetermined position of the slider 12. This is not restricted. Regarding the shape of the pushing member 132 and the shape of the sliding member 12, both can be changed according to requirements. The figure shown is only one example.

One end of the elastic member 133 is fixed to a fixing member. The fixing member refers to a member that does not move with the sliding member 12 or the pushing member 132. For example, the fixing member may be a fixed member in the driver 131, or The driving module 13 may be fixedly disposed on the robot arm, and the robot arm may be used as the fixing member. The other end of the elastic member 133 is fixed to the sliding member 12. The fixing manner of the two ends of the elastic member 133, and the size and elastic coefficient of the elastic member 133 can be selected according to actual needs, and are not limited herein.

When the driver 131 is driven and the pushing member 132 pushes against the sliding member 12, one end of the elastic member 133 will be stretched as the sliding member 12 moves relative to the arc-shaped track 11, and the elastic member 133 will generate an elastic recovery correspondingly. force. The arrangement of the elastic member 133 can effectively eliminate the gear set, the motor, or the backlash between the driving module 13. In this way, the driving module 13 drives the slider 12 relative to When the arc-shaped track 11 is actuated, the pushing member 132 will keep in contact with the sliding member 12 at any time, thereby greatly reducing the probability that the backlashes described above may indirectly affect the final position of the probe assembly 15.

It is worth mentioning that in specific applications, the pushing member 132 is driven by the driver 131, and may be pushed against the sliding member 12 in a direction substantially parallel to the tangential direction of the arc-shaped track 11, so that the pushing can be greatly improved. The use efficiency of the force exerted by the member 132 on the slider 12, that is, most of the force exerted by the pushing member 132 on the slider 12 will be converted into the kinetic energy of the slider 12 sliding relative to the arc-shaped track 11.

In addition, as shown in FIG. 4 and FIG. 6, the arc-shaped track 11 may be located on a partial section of a circular path R, and the probe assembly 15 may be correspondingly disposed in a region surrounded by the circular path R. The probe assembly 15 may be located at the center W of the circular path R, and when the pushing member 132 drives the sliding member 12 to move, the sliding member 12 will move along the circular path R. Thus, the driver The mechanism error of 131 itself can be effectively reduced by the relationship of r2 θ 2, which is conducive to the accuracy of control. Among them, the radius of the circular path R is r2, and θ 2 is the rotation angle of the slider 12 relative to the center W.

Please refer to FIG. 7 and FIG. 8 together, which are schematic diagrams of the detection equipment of the creation. As shown in the figure, the detection device 200 is configured to perform a detection operation on a DUT Q. The detection device 200 includes a carrier 20, a processing device 30, a moving device 40, and a probe device 50. The carrier 20 is used to carry the device under test Q. The device under test Q may be various electronic components according to requirements, such as a display panel, and is not limited herein. In practical applications, the stage 20 may only have the function of carrying the device under test Q; or, the stage 20 may have the function of multi-axial movement, and the processing device 30 may control the movement of the stage 20 in a timely manner, thereby The test object Q is caused to move relative to the probe assembly 15; or alternatively, the stage 20 may be integrated with a device such as a conveyor belt, and the stage 20 has a function of transporting the test object Q at the same time.

The processing device 30 is electrically connected to the mobile device 40 and the probe device 50, and the processing device 30 can control the operation of the mobile device 40 and the probe device 50, respectively. The processing device 30 may be a microprocessor having a preset program or may be a computer device, etc., which is not limited herein. In specific implementation, the setting position of the processing device 30 may be changed according to requirements. For example, the processing device 30 may be a computer device independent of the stage 20, the mobile device 40, and the probe device 50, or the processing device 30 may A processor integrated in the stage 20, the mobile device 40, or the probe device 50.

The mobile device 40 is connected to the probe device 50, and the mobile device 40 can be controlled by the processing device 30 to move in at least one dimension direction (X-axis, Y-axis, or Z-axis) of the three-dimensional coordinate system. For example, the mobile device 40 can be a robotic arm, or a mobile device The device 40 may include three linear slide rails, and the processing device 30 can control the operation of each linear slide rail separately, so that the probe device 50 moves in different dimensions.

The probe device 50 includes a rotating assembly 10 and a plurality of probe assemblies 15. Each probe assembly 15 includes a plurality of probes 151; in practical applications, the probe assembly 15 may be a probe card. The plurality of probes 151 included in the probe assembly 15 can be used to contact the plurality of electrical connection parts Q1 of the device Q to be tested, so as to perform related detection operations on the device Q to be tested.

The rotating assembly 10 includes: a fixing member 14 (as shown in FIGS. 3 and 5), an arc-shaped track 11, a sliding member 12, and a driving module 13. The rotating component 10 is integrally connected to the mobile device 40 by the fixing member 14. When the processing device 30 controls the mobile device 40 to operate, the fixing member 14 moves with the moving device 40, so that the entire rotating component 10 moves with the moving device 40. The arc-shaped track 11 is connected with the fixing member 14. The slider 12 is connected to the probe assembly 15, and the slider 12 can move along the arc-shaped track 11. For detailed descriptions of the various components of the rotating assembly 10, please refer to the description of the above embodiment, which will not be repeated here. In addition, the rotating assembly 10 referred to herein may also include the elastic member contained in the foregoing embodiment. 133. The detailed description of the elastic member 133 is as described in the foregoing embodiment.

Please refer to FIG. 8, which is a schematic block diagram of a second embodiment of the detection device of the present invention. As shown in the figure, the biggest difference between this embodiment and the foregoing embodiment is that the detection device may further include an image capturing component 60. The image capturing component 60 may include, for example, a lens, a multi-axis moving mechanism, and a lighting unit, and may be designed according to requirements. The multi-axis moving mechanism may be used to make the lens in any direction of the three-dimensional axis ( X axis, Y axis, or Z axis).

As shown in FIG. 6 and FIG. 8, the image capturing component 60 can be disposed on the mobile device 40 and electrically connected to the processing device 30, and the processing device 30 can control the image capturing component 60 to act on the multiple probes 151 and The DUT Q performs image capture. After the image capturing component 60 is controlled to perform image capturing on the plurality of probes 151 and the device under test Q, an image capturing information 601 is generated correspondingly, and the processing device 30 is capable of acquiring data based on the image capturing resources. The message 601 controls the mobile device 40 to operate correspondingly so that the plurality of probes 151 move relative to the stage 20, so as to adjust the positions of the plurality of probes 151 relative to the plurality of electrical connection portions Q1 of the device under test Q. The processing device 30 can also act according to the image capture information 601 and correspondingly control the drive module 13 of the rotating component 10 to make the probe component 15 rotate around the longitudinal axis relative to the stage 20, thereby adjusting a plurality of probes. Positions of 151 with respect to the plurality of electrical connection portions Q1 of the device under test Q.

In practical applications, the image capturing component 60 may be set at any position of the detection device 200 according to requirements, as long as it can capture an image of at least a part of the probe 151 and its corresponding electrical connection portion Q1. Location is OK, no more restrictions here.

In different applications, the probe device 50 can also be connected with a trimming assembly 70. The fine adjustment component 70 is used to finely adjust the position of the probe component 15 relative to the stage 20, that is, the adjustment accuracy of the fine adjustment component 70 is higher than the adjustment accuracy of the aforementioned mobile device 40. In a specific application, the fine-tuning component 70 may include, for example, three high-precision linear slides, and the fine-tuning component 70 can be controlled by the processing device 30 so as to respectively pass a plurality of probes 151 through different high-precision linear slides. Relative to the stage 20, it moves in at least one dimension of the three-dimensional coordinate system.

According to the above, compared with the existing probe card device with a rotating function, the rotation component and detection equipment of this creation can control the movement of the probe card component more finely; and the rotation component and detection equipment of this creation are in the settings In the embodiment with the elastic member, the existing probe card device with a rotating function can be greatly improved, and the problem of the back gap between the components is likely to affect the position of the probe card.

The above are only the preferred and feasible embodiments of this creation, and are not intended to limit the scope of the patent for this creation. Therefore, any equivalent technical changes made using the description and graphic content of this creation are included in the scope of protection of this creation. .

Claims (10)

A rotating component is used to rotate a probe component relative to a device under test. Multiple probes of the probe component can be pressed against a plurality of electrical connection parts of the device under test to electrically The rotating component comprises: an arc-shaped track, at least a part of which is arranged around a longitudinal axis; and a sliding piece, which is used for Connected with the probe assembly, and the slider can move along the arc-shaped track; and a driving module, which can be controlled to move the slider along the arc-shaped track, so that The probe assembly is rotated relative to the DUT. The rotating assembly according to claim 1, wherein the driving module includes a driver and a pushing member; the driver can be controlled so that the pushing member pushes against the sliding member, so that The slider moves along the arc-shaped track. The rotary assembly according to claim 2, wherein the driver can be controlled to cause the pushing member to push the sliding member in a direction parallel to a tangential direction of the arc-shaped track. The rotating assembly according to claim 2, wherein the rotating assembly further includes a fixing member and an elastic member, the driver is provided on the fixing member, and the arc-shaped track is fixedly provided on the fixing member. One end of the elastic member is fixed to the fixing member, and the other end of the elastic member is connected to the sliding member. A testing device is used for performing a testing operation on a device under test. The testing device includes: a carrier for carrying the device under test; a processing device; and a mobile device which is electrically connected to the device. The processing device; a probe device connected to the mobile device, the probe device comprising: a probe assembly containing a plurality of probes; a rotating assembly containing: a fixing member which fixes Arranged on the moving device; an arc-shaped track connected to the fixing member, and at least a part of the arc-shaped track is arranged around a longitudinal axis; a slide member and the probe Components are connected, and the slider can move along the arc-shaped track; and a driving module, which can be controlled by the processing device to move the slider along the arc-shaped track, so that the slider The probe assembly is rotated relative to the object to be tested provided on the stage; wherein the processing device can control the moving device so that the probe device is relative to the stage in a three-dimensional coordinate system. Movement in at least one dimension of the; The moving device and the probe device can be controlled so that a plurality of the probes are correspondingly pressed against a plurality of electrical connection parts of the DUT; when a plurality of the probes are correspondingly pressed against When there are a plurality of the electrical connection portions, the processing device can perform the detection operation on the device under test through a plurality of the probes. The testing device according to claim 5, wherein the driving module includes a driver and a pushing member; the driver can be controlled so that the pushing member pushes against the sliding member, so that The slider moves along the arc-shaped track. The detecting device according to claim 6, wherein the driver can be controlled to cause the pushing member to push the sliding member in a direction parallel to a tangential direction of the arc-shaped track. The detecting device according to claim 6, wherein the rotating component further includes an elastic member, one end of the elastic member is fixedly disposed on the fixing member, and the other end of the elastic member is connected to the sliding member. . The detection device according to claim 5, wherein the detection device further includes an image capture component, and the processing device can control the image capture component to perform image capture; the processing device can When each of the probes is adjacent to a plurality of the electrical connection parts of the DUT, controlling the image capturing component to capture images of the plurality of probes and the plurality of electrical connection parts, Based on this, at least one image capture information is generated, and the processing device is capable of controlling the rotation component to act according to the image capture information, so that the probe component is centered on the longitudinal axis with respect to the longitudinal axis. The carrier rotates. The detection device according to claim 9, wherein the mobile device is a robot arm, the probe device is further connected with a trimming component, and the trimming component is electrically connected to the processing device, and the processing device can be The image capture information is used to control the fine-tuning component to move a plurality of the probes relative to the stage in at least one dimension of a three-dimensional coordinate system.