TWM582424U - Improvement to high efficiency volatile organic waste gas treatment system - Google Patents

Abstract

The present invention is an improved high-efficiency volatile organic waste gas treatment system, mainly through a combination of an incinerator, a first adsorption reel and a second adsorption reel, and a second desorption through the second adsorption reel a concentrated gas line is connected to the first cooling gas inlet line of the cooling zone of the first adsorption wheel, so that the desorbed concentrated gas in the second desorbed concentrated gas line can be used to supply the first adsorption The use of the cooling zone of the runner enables the treatment efficiency of the volatile organic waste gas to be increased.

Description

High efficiency volatile organic waste gas treatment system improvement

This creation is about the improvement of a high-efficiency volatile organic waste gas treatment system, especially an exhaust gas treatment that can increase the efficiency of organic waste gas treatment and save energy, and is suitable for use in the semiconductor industry, photovoltaic industry or chemical related industries.

The zeolite rotary wheel of a conventional volatile organic waste gas treatment system is composed of an incinerator and a primary heat exchanger and a secondary heat exchanger and a secondary heat exchanger, and is applied in, for example, the semiconductor industry, and generally the overall processing efficiency is about At 90% to 95%.

When the concept of environmental protection is getting more and more attention, the current industry will encounter total control when setting up a new factory. Based on the existing emissions, it is required to stop increasing emissions. Therefore, the past processing efficiency needs to be increased to reduce This is an option for volatile organic emissions.

Because of the increased awareness of environmental protection in recent years, increasing processing efficiency will also increase energy consumption, such as fuel costs, which is a significant expense and burden for manufacturers of equipment.

Therefore, in view of the above-mentioned deficiencies, the present creator can propose an improved high-efficiency volatile organic waste gas treatment system with high processing efficiency and energy saving, and the VOC volatilization of the exhaust gas has a reduced total amount of gas gas due to the improvement of the treatment efficiency. With energy-saving work efficiency, users can easily operate and assemble, and they are dedicated to research and design, to provide user convenience, and to create creative motives for the creators.

The main purpose of the present invention is to provide an improved high-efficiency volatile organic waste gas treatment system, which is mainly designed through a combination of an incinerator, a first adsorption wheel and a second adsorption wheel, and through the second adsorption wheel. a second desorbed concentrated gas line is connected to the first cooling gas inlet line of the cooling zone of the first adsorption wheel to enable the desorbed concentrated gas in the second desorbed concentrated gas line to be used The use of the cooling zone for supplying the first adsorption runner enables the treatment efficiency of the volatile organic waste gas to be increased, thereby increasing the overall utility.

Another object of the present invention is to provide an improved high-efficiency volatile organic waste gas treatment system. When the incinerator is a regenerative incinerator (RTO), the regenerative incinerator (RTO) is provided with an inlet and an outlet. The inlet is connected to the first desorbed concentrated gas line, and the outlet is connected to a chimney, so that the desorbed concentrated gas generated by the desorption zone of the first adsorption reel can be used by the first desorbed concentrated gas tube The road is transported to the regenerative incinerator (RTO) to allow the regenerative incinerator (RTO) to be pyrolyzed to reduce volatile organic waste compounds, thereby increasing overall usability.

In order to achieve the above object, the present invention is a high-efficiency volatile organic waste gas treatment system improvement comprising: an incinerator, a first heat exchanger, a second heat exchanger, a first adsorption runner and a second adsorption a first heat exchanger is provided with a first cold side pipeline; the second heat exchanger is provided with a second cold side pipeline; the first adsorption runner is provided with an adsorption zone, a cooling zone and In the desorption zone, the first adsorption reel is connected with an exhaust gas intake pipe, a first clean air exhaust pipe, a first cooling gas intake pipe, a first cooling gas delivery pipeline, and a first a hot gas delivery line and a first desorption concentrated gas line, one side of the adsorption zone of the first adsorption reel is connected to the exhaust gas intake pipe, and the other side of the adsorption zone of the first adsorption reel Connecting the first clean air exhaust One side of the discharge line, one side of the cooling zone of the first adsorption wheel is connected to the first cooling gas inlet pipe, and the other side of the cooling zone of the first adsorption wheel is connected to the first cooling gas a conveying line, the other end of the first cooling gas conveying line is connected to one end of the first cold side line of the first heat exchanger, and the other end of the first cold side line of the first heat exchanger is Connecting the first hot gas delivery line, the other end of the first hot gas delivery line is connected to the desorption zone of the first adsorption reel, and the other side of the desorption zone of the first adsorption reel is connected to the first a desorption concentrated gas line, the other end of the first desorption concentrated gas line is connected to the incinerator; and the second adsorption revolving wheel is provided with an adsorption zone, a cooling zone and a desorption zone, the The second adsorption reel is connected with a second clean gas exhaust line, a second cooling gas intake line, a second cooling gas delivery line, a second hot gas delivery line and a second desorbed concentrated gas tube. a first clean gas discharge line of the first adsorption runner connected to the adsorption zone of the second adsorption runner On the side, the other side of the adsorption zone of the second adsorption runner is connected to the second clean air discharge pipeline, and one side of the cooling zone of the second adsorption runner is connected to a second cooling gas intake pipeline. The other side of the cooling zone of the second adsorption runner is connected to the second cooling gas delivery pipeline, and the other end of the second cooling gas delivery pipeline is connected to the second cold side pipeline of the second heat exchanger. The other end of the second cold side pipeline of the second heat exchanger is connected to the second hot gas conveying pipeline, and the other end of the second hot gas conveying pipeline is connected to the desorption of the second adsorption runner a second side of the desorption zone of the second adsorption reel is connected to the second desorption concentrated gas line, and the other end of the second desorption concentrated gas line is connected to the first adsorption reel The first cooling gas intake line of the cooling zone.

In order to further understand the features, features and technical contents of the present invention, please refer to the following detailed description of the present invention and the accompanying drawings, which are only for reference and description, and are not intended to limit the present invention.

10‧‧‧Incinerator

11‧‧‧ Entrance

12‧‧‧Export

20‧‧‧First adsorption wheel

201‧‧‧Adsorption zone

202‧‧‧Cooling area

203‧‧‧Decoupling area

21‧‧‧Exhaust air intake pipe

22‧‧‧First clean gas discharge pipeline

23‧‧‧First cooling air intake line

24‧‧‧First cooling gas delivery line

25‧‧‧First hot gas delivery line

26‧‧‧First desorbed concentrated gas pipeline

261‧‧‧ fan

27‧‧‧First bypass line

30‧‧‧Second adsorption runner

301‧‧‧Adsorption zone

302‧‧‧Cooling area

303‧‧‧Decoupling area

31‧‧‧Second clean gas discharge pipeline

311‧‧‧Fan

32‧‧‧Second cooling air intake line

33‧‧‧Second cooling gas delivery line

34‧‧‧Second hot gas delivery line

35‧‧‧Second desorbed concentrated gas pipeline

351‧‧‧ fan

36‧‧‧Second bypass line

40‧‧‧First heat exchanger

41‧‧‧First cold side pipeline

50‧‧‧second heat exchanger

51‧‧‧Second cold side pipeline

60‧‧‧ chimney

Figure 1 is a schematic diagram of the main system architecture of this creation.

The second figure is a schematic diagram of the system architecture of the second bypass pipeline.

The third figure is a schematic diagram of the system architecture of the first bypass pipeline.

Please refer to FIG. 1 to FIG. 3 , which are schematic diagrams of the present embodiment. The best implementation of the improved high-efficiency volatile organic waste gas treatment system of the present invention is applied to the exhaust gas treatment of the plant in the semiconductor industry, the photovoltaic industry or the chemical related industry, and the design of the present invention can increase the treatment efficiency of the organic waste gas, and The efficiency of lifting treatment has increased from 95% to over 97%, and it can greatly reduce the consumption of operating energy, and can fully recover heat energy for use as desorption.

The improved high-efficiency volatile organic waste gas treatment system of the present invention is mainly passed through an incinerator 10, a first adsorption reel 20, a second adsorption reel 30, a first heat exchanger 40 and a second heat exchanger 50. The combined design (as shown in Figures 1 to 3), wherein the incinerator 10 is either a direct-fired incinerator (TO) or a regenerative incinerator (RTO), and the creation of the map The regenerative incinerator (RTO) is taken as an example, and the incinerator 10 described below is a regenerative incinerator (RTO), but the creation is not limited to a regenerative incinerator (RTO), and may be straight. Combustion incinerator (TO) (not shown).

The first adsorption roller 20 is provided with an adsorption zone 201, a cooling zone 202 and a desorption zone 203. The first adsorption runner 20 is a zeolite concentration runner or a concentrated runner of other materials. And an exhaust gas intake line 21 is connected to the first adsorption The adsorption zone 201 of the runner 20 is such that the adsorption zone 201 of the first adsorption runner 20 can adsorb the exhaust gas in the exhaust gas intake line 21, and the other side of the adsorption zone 201 of the first adsorption runner 20 Connected to one end of the first clean air discharge line 22 (as shown in FIGS. 1 to 3), the exhaust gas is purified by the adsorption zone 201 of the first adsorption runner 20, and then the first net The gas discharge line 22 is delivered.

Another side of the cooling zone 202 of the first adsorption wheel 20 is connected to a first cooling gas inlet pipe 23 for gas to enter the cooling zone 202 of the first adsorption wheel 20 for cooling use. The other side of the cooling zone 203 of the first adsorption turret 20 is connected to a first cooling gas delivery line 24, and the other end of the first cooling gas delivery line 24 is connected to the first of the first heat exchanger 40. One end of the cold side line 41 (as shown in FIGS. 1 to 3), wherein the first heat exchanger 40 is any one of an electric heater, a duct heater or a shell and tube heat exchanger, and The electric heater is any one of a heating wire, an electric heating tube or a heating sheet, and the pipeline heater is any one of a gas fuel or a liquid fuel, and the heat source of the shell-and-tube heat exchanger is The incinerator 10 is provided. The other end of the first cold side line 41 of the first heat exchanger 40 is connected to a first hot gas delivery line 25, and the other end of the first hot gas delivery line 25 is connected to the first adsorption wheel. a desorption zone 203 of 20 (shown in Figures 1 to 3) for delivering high temperature hot gas that is heat exchanged via the first heat exchanger 40 to the desorption zone 203 of the first adsorption reel 20 For high temperature desorption use.

Furthermore, the other side of the desorption region 203 of the first adsorption reel 20 is connected to a first desorption concentrated gas line 26, and the first desorption concentrated gas line 26 is connected to the incinerator 10. When the incinerator 10 is a regenerative incinerator (RTO), the regenerative incinerator (RTO) is provided with an inlet 11 and an outlet 12, and the inlet 11 is connected to the first desorbed concentrated gas. The line 26 is connected (as shown in FIGS. 1 to 3) so that the desorbed concentrated gas desorbed by the high temperature can be transported to the regenerative incineration through the first desorbed concentrated gas line 26. The inlet 11 of the furnace (RTO) allows the desorbed concentrated gas to enter the regenerative incinerator (RTO) for pyrolysis to reduce volatile organic waste compounds, and the regenerative incinerator (RTO) outlet 12 is connected. To the chimney 60, the clean gas after pyrolysis can be discharged by the chimney 60.

The first desorbed concentrated gas line 26 is provided with a fan 261 (shown in Figures 2 and 3) to push and pull the desorbed concentrated gas into the regenerative incinerator (RTO). In the inlet 11, the desorbed concentrated gas is allowed to undergo high temperature cracking. In addition, the first cooling air intake line 23 is connected to the exhaust gas intake line 21 through a first bypass line 27 (as shown in FIG. 3), and the exhaust gas intake pipe is enabled. The exhaust gas in the road 21 is used to provide cooling to the cooling zone 202 of the first adsorption turret 20.

The second adsorption revolving wheel 30 is a zeolite concentration revolver or a concentrated revolving wheel of other materials, and the second adsorption revolving wheel 30 is provided with an adsorption zone 301, a cooling zone 302 and a desorption zone 303. The adsorption zone 301 of the second adsorption runner 30 is connected to the other end of the first clean gas discharge line 22 of the first adsorption runner 20, so that the first clean gas discharge pipeline of the first adsorption runner 20 The gas in the 22 can be directly transported to the adsorption zone 301 of the second adsorption runner 30 for adsorption, and the other side of the adsorption zone 301 of the second adsorption runner 30 is connected to a second clean gas discharge pipeline 31. And the other end of the second clean air discharge line 31 is connected to a chimney 60 (as shown in FIGS. 1 to 3) to facilitate the adsorption zone 201 and the second via the first adsorption runner 20. The clean gas adsorbed by the adsorption zone 301 of the adsorption runner 30 is discharged through the chimney 60, wherein the second adsorption runner 30 is second. The clean air discharge line 31 is provided with a fan 311 (shown in Figures 2 and 3) to increase the flow rate of the gas.

The other side of the cooling zone 302 of the second adsorption wheel 30 is connected to a second cooling gas inlet pipe 32, and the other side of the cooling zone 302 of the second adsorption wheel 30 is connected to a second cooling. The gas delivery line 33, the other end of the second cooling gas delivery line 33 is connected to one end of the second cold side line 51 of the second heat exchanger 50 (as shown in Figures 1 to 3), The second heat exchanger 50 is any one of an electric heater, a pipeline heater or a shell and tube heat exchanger, and the electric heater is any one of a heating wire, an electric heating tube or a heating sheet. The duct heater is any one of a gaseous fuel or a liquid fuel, and a heat source of the shell and tube heat exchanger is provided by the incinerator 10. The other end of the second cold side line 51 of the second heat exchanger 50 is connected to a second hot gas delivery line 34, and the other end of the second hot gas delivery line 34 is connected to the second adsorption wheel. The desorption zone 303 of 30 (as shown in FIGS. 1 to 3) is capable of conveying high-temperature hot gas that is subjected to heat exchange via the second heat exchanger 50 to the desorption zone 303 of the second adsorption reel 30. For high temperature desorption use.

Furthermore, the other side of the desorption region 303 of the second adsorption reel 30 is connected to a second desorption concentrated gas line 35, and the second desorption concentrated gas line 35 is connected to the first adsorption revolver a first cooling gas inlet line 23 of the cooling zone 202 of 20 (shown in Figures 1 to 3) for concentrating the desorbed concentrated gas desorbed by the high temperature through the second desorption condensation The gas line 35 is sent to the first cooling gas inlet line 23 of the cooling zone 202 of the first adsorption wheel 20 for use by the cooling gas to cause the desorption zone 303 of the second adsorption wheel 30 to be generated. The desorbed concentrated gas can be re-delivered to the cooling zone 2 of the first adsorption reel 20 via the first cooling gas intake line 23 of the cooling zone 202 of the first adsorption reel 20 a first cooling gas delivery line 24 of 02, the first cooling gas delivery line 24 is heated by the first heat exchanger 40 and then delivered to the first adsorption wheel 20 by the first hot gas delivery line 25 The high temperature desorption is performed in the region 203, so that the desorbed concentrated gas generated in the desorption region 303 of the second adsorption reel 30 can be desorbed by the second high temperature to reduce the residual of the desorption region 203 of the first adsorption reel 20. the amount.

The second desorbed concentrated gas line 35 is provided with a fan 351 (shown in FIGS. 2 and 3) to enable the desorption of the concentrated gas to be pushed into the cooling of the first adsorption wheel 20. In the first cooling gas intake line 23 of the zone 202, the desorbed concentrated gas can be circulated and desorbed. The second cooling gas inlet line 23 is connected to the cooling zone 302 of the second adsorption wheel 30, and the second cooling gas inlet line 32 is of two embodiments, wherein the first embodiment is The second cooling gas inlet line 32 is for fresh air to enter (as shown in FIG. 1), and the fresh air is used to provide cooling of the cooling zone 302 of the second adsorption wheel 30, and the second implementation The second cooling gas inlet line 32 and the first clean air discharge line 22 are connected through a second bypass line 36 (as shown in Figures 2 and 3), enabling The cooling zone 302 provided to the second adsorption turret 30 is cooled and used through the first clean air discharge line 22.

By the above detailed description, it will be apparent to those skilled in the art that the present invention can achieve the foregoing objectives, and has been in compliance with the provisions of the Patent Law, and has filed a patent application.

However, the above is only the preferred embodiment of the present invention, and the scope of the creation of the present invention cannot be limited by this; therefore, the simple equivalent changes and modifications made by the scope of the patent application and the content of the creation specification are All should remain within the scope of this creation patent.

Claims (8)

A high-efficiency volatile organic waste gas treatment system is improved, comprising: an incinerator; a first heat exchanger, the first heat exchanger is provided with a first cold side pipeline; and a second heat exchanger, the second The heat exchanger is provided with a second cold side pipeline; a first adsorption runner, the first adsorption rotor is provided with an adsorption zone, a cooling zone and a desorption zone, and the first adsorption rotor is connected with an exhaust gas inlet a gas line, a first clean air discharge line, a first cooling gas intake line, a first cooling gas delivery line, a first hot gas delivery line, and a first desorption concentrated gas line, One side of the adsorption zone of the first adsorption wheel is connected to the exhaust gas intake pipe, and the other side of the adsorption zone of the first adsorption wheel is connected to one end of the first clean gas discharge pipe, the first One side of the cooling zone of the adsorption wheel is connected to the first cooling gas inlet pipe, and the other side of the cooling zone of the first adsorption wheel is connected to the first cooling gas delivery pipe, the first cooling gas The other end of the conveying pipeline is connected to one end of the first cold side pipeline of the first heat exchanger, the first The other end of the first cold side pipeline of the exchanger is connected to the first hot gas delivery pipeline, and the other end of the first hot gas delivery pipeline is connected to the desorption zone of the first adsorption runner, the first adsorption transfer The other side of the desorption zone of the wheel is connected to the first desorption concentrated gas line, the other end of the first desorption concentrated gas line is connected to the incinerator; and a second adsorption reel, the The second adsorption revolving wheel is provided with an adsorption zone, a cooling zone and a desorption zone, and the second adsorption reel is connected with a second clean gas exhaust pipe, a second cooling gas intake pipe, and a second cooling gas. a conveying pipeline, a second hot gas conveying pipeline and a second desorption concentrated gas pipeline, wherein the first clean gas discharge pipeline of the first adsorption runner is connected to one side of the adsorption zone of the second adsorption runner The other side of the adsorption zone of the second adsorption wheel is connected to the second clean gas row a pipeline, a side of the cooling zone of the second adsorption wheel is connected to a second cooling gas inlet pipe, and the other side of the cooling zone of the second adsorption wheel is connected to the second cooling gas pipe The other end of the second cooling gas delivery line is connected to one end of the second cold side pipeline of the second heat exchanger, and the other end of the second cold side pipeline of the second heat exchanger is connected to the a second hot gas delivery line, the other end of the second hot gas delivery line is connected to the desorption zone of the second adsorption reel, and the other side of the desorption zone of the second adsorption reel is connected to the second decoupling zone A concentrated gas line is attached, and the other end of the second desorbed concentrated gas line is connected to the first cooling gas inlet line of the cooling zone of the first adsorption wheel. The improved high-efficiency volatile organic waste gas treatment system according to claim 1, wherein the incinerator is further a regenerative incinerator, wherein the regenerative incinerator is provided with an inlet and an outlet, and the inlet is connected to the first A desorption concentrate gas line connection is connected to the chimney. The high-efficiency volatile organic waste gas treatment system according to claim 1 or 2, wherein the first desorbed concentrated gas line is further provided with a fan. The high-efficiency volatile organic waste gas treatment system according to claim 1 is improved, wherein the second clean gas discharge pipeline is further provided with a fan. The high-efficiency volatile organic waste gas treatment system according to claim 1, wherein the second desorbed concentrated gas pipeline is further provided with a fan. The high-efficiency volatile organic waste gas treatment system according to claim 1, wherein the exhaust gas intake pipeline is further provided with a first bypass pipeline, the first bypass pipeline system and the first adsorption pipeline The first cooling gas inlet line of the runner is connected. The high-efficiency volatile organic waste gas treatment system according to claim 1, wherein the first clean gas discharge pipeline is further provided with a second bypass pipeline, the second bypass pipeline system and the first The second cooling gas inlet pipe of the second adsorption wheel is connected. The high-efficiency volatile organic waste gas treatment system according to claim 1, wherein the other end of the second clean gas discharge line is further connected to a chimney.