TWM581153U - Rotor device with improved cover - Google Patents

Abstract

The present invention discloses a rotor device having an improved cover suitable for use in a turbomolecular vacuum pump. The rotor device with the improved cover includes a rotating shaft, a rotor body and a cover; one end of the rotating shaft is disposed on the turbo molecular vacuum pump; the rotor system is coupled to the rotating shaft, and the rotor body is concavely formed with respect to one end of the rotating shaft The cover includes a connecting unit and a covering unit, and one end of the connecting unit is coupled to the other end of the rotating shaft, and one end of the covering unit is coupled to the other end of the connecting unit and bears against one end of the rotor body with respect to the rotating shaft, And covering the opening of the locking space, and the surface of the side wall and the other end of the covering unit is a smooth curved surface.

Description

Rotor device with improved cover

The present invention relates to a rotor device for a turbomolecular vacuum pump, and more particularly to a rotor device having an improved cover.

The conventional turbomolecular vacuum pump for vacuum pumping is capable of driving a rotor coupled thereto for vacuum pumping, and further, the center of the rotor is recessed toward the turbomolecular vacuum pump to form a locking space. The rotor and the turbomolecular vacuum pump are combined by a fixing member such as a bolt. However, when the turbo molecular vacuum pump is used in an etching process such as a wafer or an electronic substrate, the dust particles generated during the processing are easily accumulated in the lock space, and the air flow generated by the rotor during the process is easy to make the lock space. The dust particles in the air flow back to the processing area, which may cause contamination of the wafer or electronic substrate in the processing area.

At present, the conventional rotor system for a turbo molecular vacuum pump additionally attaches a cover to the lock space by bolts to prevent dust particles from floating into the lock space, but the bolts have a clearance space after being locked. Resulting in the accumulation of dust particles, it may also cause the dust particles to float back into the processing area from the clearance space; another part of the conventional cover can be locked to the rotating shaft by screwing, but the disassembly is required by The fixture is connected to the recessed structure on the cover, and then the pulling member is coupled to the jig and the force is applied to indirectly drive the cover to rotate out of the rotating shaft. This process is easy to cause damage to the recessed structure due to improper force applied angle or force. The user needs to change the cover frequently; in addition, the recessed structure may accumulate dust or process products, and the recessed structure will disturb the airflow flowing through the cover, so it is easier to float the dust particles back to the processing area and cause the wafer or electronic substrate to be subjected to Pollution.

In light of the above problems, the creator of the present design has designed a rotor device with an improved cover to improve the lack of the prior art, thereby enhancing the industrial use.

In view of the above-mentioned problems, the object of the present invention is to provide a rotor device having an improved cover suitable for being installed in a turbo molecular vacuum pump. The rotor device with the improved cover includes a rotating shaft, a rotor body and a cover; one end of the rotating shaft is disposed on the turbo molecular vacuum pump; the rotor system is coupled to the rotating shaft, and the rotor body is concavely formed with respect to one end of the rotating shaft The cover includes a connecting unit and a covering unit, and one end of the connecting unit is coupled to the other end of the rotating shaft, and one end of the covering unit is coupled to the other end of the connecting unit and bears against one end of the rotor body with respect to the rotating shaft, And covering the opening of the locking space, and the surface of the side wall and the other end of the covering unit is a smooth curved surface.

Preferably, one end of the cover unit can extend in a direction corresponding to the joint unit to form an annular rib, and the annular rib fits against the side wall of the lock space.

Preferably, the covering unit may comprise a bearing portion, the bearing portion being located at one end of the covering unit and located between the side wall of the covering unit and the annular rib, the bearing portion being supported by the rotor body relative to the rotating shaft One end.

Preferably, one end of the cover unit is concavely formed to form a first blind hole, the side wall of the first blind hole includes a first internal thread, and the other end of the other end of the connection unit includes a first external thread, the first external thread The first internal thread is screwed to each other, and the covering unit is fixed to the connecting unit.

Preferably, the other end of the rotating shaft is concavely formed to form a second blind hole, and the sidewall of the second blind hole includes a second internal thread, and the outer surface of one end of the connecting unit includes a second external thread, and the second external thread The second internal thread is screwed to each other, and the connecting unit is fixed to the rotating shaft.

Preferably, the other end of the covering unit may be conical, and the center of the other end of the covering unit is extended toward the direction of the connecting unit.

Preferably, the rotor device with the improved cover may further comprise a plurality of fixing elements, the plurality of fixing elements are combined with the rotor body and the rotating shaft, one end of the plurality of fixing elements is located in the locking space, and the plurality of fixing elements are another One end is located in the rotating shaft, and a plurality of fixing elements are disposed adjacent to the rotating shaft in a ring array.

Preferably, the connecting unit is a stainless steel connecting unit, and the covering unit is an aluminum alloy covering unit.

Preferably, the rotor device with the improved cover further comprises an expansion sleeve fixture, the expansion sleeve fixture comprises a clamping portion and a rotating portion, and one end of the clamping portion is concavely formed to form a clamping space, and the clamping portion The side wall of the holding space is fixed on the side wall of the covering unit, and the rotating part is disposed at the other end of the clamping part, and the rotating part receives an external force to drive the cover to rotate by the clamping part.

Preferably, the rotor device with the improved cover further includes a triggering member, the triggering member includes a grip portion and a triggering portion, and one end of the grip portion is coupled to one end of the pulling portion, and the other portion of the pulling portion One end is concavely formed to form a pulling space, and the pulling space is sleeved on the rotating part, and the shape of the pulling space on the end portion corresponds to the shape of the rotating part at the end, and the holding part receives the external force. The expansion sleeve is rotated by the pulling portion.

In summary, the rotor device with the improved cover of the present invention has the following advantages:

(1) Compared with the conventional rotor device for a turbo molecular vacuum pump, the rotor device of the present invention has a cover covering the locking space to avoid operation of the turbo molecular vacuum pump. During the process, the dust particles floating into the locked space are once again drifted out of the lock space due to the disturbance of the air flow to cause contamination of the processed wafer or electronic substrate.

(2) The cover of the present invention is a combined structure, which comprises a covering unit and a connecting unit. The user can screw the covering unit and the rotating shaft respectively by the two ends of the connecting unit, so that the cover can effectively cover the locking space. At the same time, the rotating shaft is connected; wherein the surface of the covering unit and the outer surface of one end thereof are smooth curves, so that the air flow can be assisted to stabilize during the rotation of the rotating shaft, and the dust particles can be prevented from being deposited on the cover.

(3) The covering unit of the cover of the present invention can be held by the clamping portion of the expansion sleeve fixture, and can be combined with the rotating portion of the expansion sleeve fixture by the pulling member to further support the triggering member Applying force to assemble or disassemble the cover on the rotating shaft, so that there is no need to design a recess or protrusion structure on the cover unit of the cover to increase the possibility that dust particles remain therein.

In order to make the above-mentioned objects, technical features, and gains after actual implementation more comprehensible, a more detailed description will be given below with reference to the corresponding drawings in the preferred embodiments.

In the description of the present invention, it should be noted that the orientation or positional relationship of the terms "middle", "inside" and "outside" is based on the orientation or positional relationship shown in the drawings, only for the convenience of describing the creation. The description and the simplification of the present invention are not intended to be a limitation of the invention. In addition, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of this creation, it should be noted that the terms "set", "link", "fixed", "cover", "lock", "deposit", "run" unless otherwise specified and limited. And "responsibility" should be understood in a broad sense. The specific meaning of the above terms in the present creation can be understood in a specific case for those of ordinary skill in the art.

The embodiments of the rotor device with the improved cover according to the present invention will be described below with reference to the related drawings. For ease of understanding, the same components in the following embodiments are denoted by the same reference numerals.

Please refer to Fig. 1, which is a component configuration diagram of the rotor device with the improved cover of the present invention. The first figure is presented in a partial cross-section. As shown, the purpose of the present invention is to provide a rotor device having a modified cover suitable for use in a turbomolecular vacuum pump 10. The rotor device with the improved cover includes a rotating shaft 20, a rotor body 30 and a cover 50; one end of the rotating shaft 20 is disposed on the turbomolecular vacuum pump 10, and the connection manner thereof may include a threaded fit or an auxiliary fixing by other components; The main body 30 is coupled to the rotating shaft 20, and the rotor body 30 is recessed with respect to one end of the rotating shaft 20 to form a locking space 40. The rotor body 30 can be sleeved on the rotating shaft 20 and locked by a threaded fit. The cover 50 is coupled to the other end of the rotating shaft 20, and one end of the covering unit 70 is coupled to the other end of the connecting unit 60, and is supported by the other end of the connecting unit 60. The rotor body 30 is opposite to one end of the rotating shaft 20 and covers the opening of the locking space 40, and the surface of the side wall and the other end of the covering unit 70 is a smooth curved surface.

For example, by means of the component arrangement, the user controls the turbomolecular vacuum pump 10 according to the processing demand. At this time, the turbo molecular vacuum pump 10 can drive the rotating shaft 20 to operate, and the rotating shaft 20 can drive the rotor body 30 coupled thereto. Rotating, so that the vacuum pumping process can be performed; and by connecting the connecting unit 60 of the cover 50 to the rotating shaft 20, and covering one end of the covering unit 70 of the cover 50 with the opening of the locking space 40, it can be effectively avoided. During the processing, the dust particles fall into the locking space 40, and the surface of the side wall and the other end of the covering unit 70 is designed as a smooth curved surface, that is, the surface of the covering unit 70 and the surface of the other end do not include a hole or a convex structure. Therefore, the airflow can be effectively guided to stabilize, and the dust particles can be prevented from being deposited on the cover 50; the above is only an example and is not limited thereto.

The other end of the cover unit 70 is conical, and the center of the other end of the cover unit 70 is extended toward the direction of the joint unit 60. By this structural design, when the cover unit 70 bears against the rotor body 30 and the rotor When the body 30 is rotated, the surface of the body 30 can be stabilized without disturbing the flow of the airflow, so that the dust particles deposited during the processing can be effectively prevented from being deposited on the cover unit 70. on.

The rotor device with the improved cover further includes a plurality of fixing elements 130, the plurality of fixing elements 130 are combined with the rotor body 30 and the rotating shaft 20, one end of the plurality of fixing elements 130 is located in the locking space 40, and the plurality of fixing elements 130 The other end is located in the rotating shaft 20, and a plurality of fixing elements 130 are disposed adjacent to the rotating shaft 20 in a ring array; wherein the fixing member 130 can be a screw, a bolt, a rivet or the like. Combining the components of the plurality of components, the user can combine the fixing component 130 from the locking space 40 to the rotor body 30 and the rotating shaft 20 to effectively hold the rotor body 30 on the rotating shaft 20.

The connecting unit 60 is a stainless steel connecting unit 60, and the covering unit 70 is an aluminum alloy covering unit 70. The composite material is used to load the covering unit 70 and the connecting unit 60 with a high rotational speed and can withstand a high pH value. Environmental impact.

Please refer to FIG. 2 and FIG. 3, FIG. 2 is a schematic view showing the thread arrangement of the rotor device with the improved cover of the present invention, and FIG. 3 is a perspective view of the cover of the rotor device with the improved cover of the present invention. The second figure is shown in a sectional view. As shown in the figure, one end of the covering unit 70 extends toward the direction corresponding to the connecting unit 60 to form an annular rib 80, and the annular rib 80 is attached to the locking space 40. The side wall; by the configuration of the annular rib 80, the support point can be effectively provided to bear the force applied to the cover unit 70 during the rotation of the rotor body 30, and the limit cover unit 70 can be assisted; Not limited to this.

The cover unit 70 includes a bearing portion 90 at one end of the cover unit 70 and between the side wall of the cover unit 70 and the annular rib 80. The bearing portion 90 bears against the rotor body 30 with respect to the rotor body 30. One end of the rotating shaft 20; by the arrangement of the bearing portion 90, the covering unit 70 can be stably supported on the rotor body 30, and further, by means of the extended region, the joint of the dust particles with the rotor body 30 via the cover 50 can be avoided. The lock space 40 is entered; the above is only an example and is not limited thereto.

One end of the cover unit 70 is recessed to form a first blind hole 101. The sidewall of the first blind hole 101 includes a first internal thread 111, and the other end of the other end of the coupling unit 60 includes a first external thread 121, the first outer The threaded portion 121 is screwed to the first internal thread 111, and the covering unit 70 is fixed to the connecting unit 60; the other end of the rotating shaft 20 is concavely formed to form the second blind hole 102, and the side wall of the second blind hole 102 includes the second The internal thread 112 and the outer surface of one end of the coupling unit 60 include a second external thread 122. The second external thread 122 and the second internal thread 112 are screwed to each other, and the coupling unit 60 is fixed to the rotating shaft 20. With this thread arrangement, the two ends of the coupling unit 60 can be effectively locked to the cover unit 70 and the rotating shaft 20, respectively, and can be easily detached, and can be quickly disassembled for replacement of parts.

Please refer to FIG. 4, which is a schematic diagram of the assembly components of the rotor device with the improved cover of the present invention. 4 is a partial cross-section, as shown, the rotor device with the improved cover further includes an expansion sleeve fixture 140, the expansion sleeve fixture 140 includes a clamping portion 150 and a rotary portion 160, one end of the clamping portion 150 is recessed to form a clamping space 170, the side wall of the clamping space 170 is fixed on the side wall of the covering unit 70, and the rotating portion 160 is disposed at the other end of the clamping portion 150; The rotor device of the modified cover further includes a triggering member 180. The triggering member 180 includes a grip portion 190 and a triggering portion 200. One end of the grip portion 190 is coupled to one end of the triggering portion 200. The other end is recessed to form a pulling space, and the pulling space is sleeved on the rotating portion 160, and the shape of the pulling space at the end portion corresponds to the shape of the rotating portion 160 at the end, and is held. The portion 190 receives the external force, and the expansion sleeve fixture 140 rotates by the triggering portion 200. The expansion sleeve fixture 140 rotates the cover unit 70 of the cover 50 by the clamping portion 150.

For example, the user can correspond the clamping space 170 of the expansion sleeve fixture 140 to the cover unit 70 of the cover 50, and hold the outer side wall of the cover unit 70 by the side wall of the clamping portion 150, and then the trigger member can be The triggering portion 200 of the 180 is sleeved on the rotating portion 160 of the expansion sleeve fixture 140, wherein the end portions of the triggering member 180 and the rotating portion 160 have corresponding shapes, and finally the user can actuate the triggering member 180. The grip portion 190 is biased, and the force applying mode is axially rotated about the screw portion 160, so that the expansion sleeve fixture 140 can be rotated by the trigger member 180, and the expansion sleeve fixture is rotated. The 140 series drives the cover 50 to rotate; therefore, the user can effectively assemble or disassemble the cover 50 to the rotating shaft 20 by the expansion sleeve fixture 140 and the triggering member 180; the above is not limited thereto.

The rotor device with the improved cover of the present invention is compared with the conventional rotor device for the turbomolecular vacuum pump 10. The rotor device of the present invention has a cover 50 covering the locking space 40 to avoid the turbomolecular vacuum pump 10 During the operation, the dust particles floating into the lock space 40 are once again drifted out of the lock space 40 due to the disturbance of the air flow, thereby causing contamination of the processed wafer or the electronic substrate.

The cover 50 of the present invention is a combined structure, and includes a cover unit 70 and a connecting unit 60. The user can screw the cover unit 70 and the rotating shaft 20 respectively through the two ends of the connecting unit 60, so that the cover 50 can be effectively enabled. Covering the locking space 40 and simultaneously connecting the rotating shaft 20; wherein the outer surface of the side wall of the covering unit 70 and one end thereof is a smooth curve, so that the air flow can be assisted to stabilize during the rotation of the rotating shaft 20, and Dust particles are prevented from depositing on the cover 50.

The cover unit 70 of the cover 50 of the present invention can be held by the clamping portion 150 of the expansion sleeve fixture 140, and can be combined with the rotary portion 160 of the expansion sleeve fixture 140 by the trigger member 180 to further The force of the trigger member 180 is used to assemble or disassemble the cover 50 on the rotary shaft 20, so that it is not necessary to design a recessed or raised structure on the cover unit 70 of the cover 50 to increase the possibility that dust particles remain therein.

The above is intended to be illustrative only and not limiting. Any changes or modifications to the school that do not depart from the spirit and scope of this creation shall be included in the scope of the patent application attached.

10‧‧‧ Turbo Molecular Vacuum Pump

20‧‧‧Rotary axis

30‧‧‧Rotor body

40‧‧‧Lock space

50‧‧‧ cover

60‧‧‧Linking unit

70‧‧‧ Covering unit

80‧‧‧Ring ribs

90‧‧‧Affiliation

101‧‧‧ first blind hole

102‧‧‧ second blind hole

111‧‧‧First internal thread

112‧‧‧Second internal thread

121‧‧‧First external thread

122‧‧‧Second external thread

130‧‧‧Fixed components

140‧‧‧Expansion sleeve fixture

150‧‧‧Clamping Department

160‧‧‧Rotary

170‧‧‧Clamping space

180‧‧‧Removable parts

190‧‧‧ grip

200‧‧‧Switching Department

Fig. 1 is a view showing the arrangement of components of a rotor device having an improved cover according to the present invention. Figure 2 is a schematic view of the thread configuration of a rotor assembly having an improved cover according to the present invention. Figure 3 is a perspective view of a cover of a rotor apparatus having an improved cover according to the present invention. Fig. 4 is a schematic view showing the arrangement of the assembled components of the rotor device with the improved cover according to the present invention.

Claims (10)

A rotor device with a modified cover is suitable for being disposed in a turbo molecular vacuum pump, comprising: a rotating shaft, one end of which is disposed on the turbomolecular vacuum pump; a rotor body coupled to the rotating shaft, and the rotor Forming a locking space with respect to one end of the rotating shaft; and a cover comprising: a connecting unit having one end coupled to the other end of the rotating shaft; and a covering unit having one end connected to the connecting The other end of the unit bears against the end of the rotor body with respect to the rotating shaft and covers the opening of the locking space, and the surface of the side wall and the other end of the covering unit is a smooth curved surface. The rotor device of claim 1, wherein the end of the covering unit extends in a direction corresponding to the connecting unit to form an annular rib, the annular rib is attached to the lock Attach the side wall of the space. The rotor device with a modified cover according to claim 2, wherein the covering unit comprises a bearing portion, the bearing portion is located at the end of the covering unit, and is located at a side wall of the covering unit Between the annular ribs, the bearing portion bears against the end of the rotor body with respect to the rotating shaft. The rotor device of claim 1, wherein the end of the cover unit is recessed to form a first blind hole, and the sidewall of the first blind hole comprises a first internal thread. The outer surface of the other end of the connecting unit includes a first external thread, the first external thread is screwed to the first internal thread, and the covering unit is fixed to the connecting unit. The rotor device with the improved cover of claim 1, wherein the other end of the rotating shaft is concavely formed with a second blind hole, and the sidewall of the second blind hole includes a second internal thread. The outer surface of the end of the connecting unit includes a second external thread, and the second external thread is screwed to the second internal thread, and the connecting unit is fixed to the rotating shaft. The rotor device with the improved cover according to claim 1, wherein the other end of the cover unit is conical, and the center of the other end of the cover unit is extended toward the direction of the joint unit. Start. The rotor device with a modified cover according to claim 1, further comprising a plurality of fixing elements, the plurality of fixing elements combining the rotor body and the rotating shaft, one end of the plurality of fixing elements being located The locking space, the other end of the plurality of fixing elements is located in the rotating shaft, and the plurality of fixing elements are disposed adjacent to the rotating shaft in a ring array. The rotor device with the improved cover according to claim 1, wherein the connecting unit is a stainless steel connecting unit, and the covering unit is an aluminum alloy covering unit. The rotor device with the improved cover of claim 1, further comprising an expansion sleeve fixture, the expansion sleeve fixture comprising a clamping portion and a rotating portion, the clamping portion One end of the recess forms a clamping space, and the side wall of the clamping space is fixed to the side wall of the covering unit, and the rotating part is disposed at the other end of the clamping portion, and the rotating part is subjected to an external force The cover is rotated by the clamping portion. The rotor device with the improved cover of claim 9, further comprising a triggering member, the triggering member comprising a grip portion and a triggering portion, the one end of the grip portion being coupled One end of the triggering portion, the other end of the pulling portion is recessed to form a pulling space, the pulling space is sleeved on the rotating portion, and the shape of the pulling space is corresponding to the shape of the end portion. In the shape of the end portion of the screw portion, the external force is received by the grip portion to rotate the expansion sleeve fixture by the trigger portion.