TWM579379U - Support bar and substrate loading cassette having the same - Google Patents
Support bar and substrate loading cassette having the same Download PDFInfo
- Publication number
- TWM579379U TWM579379U TW107216517U TW107216517U TWM579379U TW M579379 U TWM579379 U TW M579379U TW 107216517 U TW107216517 U TW 107216517U TW 107216517 U TW107216517 U TW 107216517U TW M579379 U TWM579379 U TW M579379U
- Authority
- TW
- Taiwan
- Prior art keywords
- support rod
- substrate
- support
- joint
- present
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67346—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
Abstract
適用本創作之示例性實施例的支撐杆，配備通過結合到基板裝載盒中而對基板進行支撐的主體，上述主體，包括：安置部，在一側面配備用於安置上述基板的安置面；以及，結合部，一側與上述安置部連接，在一側面形成可供與上述裝載盒實現螺紋或鉚釘結合的結合孔。A support rod to which the exemplary embodiment of the present invention is applied is provided with a main body that supports the substrate by being incorporated into a substrate loading cassette, the main body including: a seating portion on which a seating surface for arranging the substrate is provided; a joint portion, one side of which is connected to the above-mentioned seating portion, and a side forming a coupling hole for engaging a thread or a rivet with the above-mentioned loading box.
Description
本創作涉及一種支撐杆以及配備上述支撐杆的基板裝載盒。The present invention relates to a support rod and a substrate loading cassette equipped with the above support rod.
通常，液晶顯示裝置的液晶面板，包括：薄膜電晶體基板，在由電極閘線以及資料線定義的圖元區域配備薄膜電晶體以及圖元電極；彩色濾光片基板，配備彩色濾光片層以及公用電極；以及，液晶層，介於上述兩個基板之間。Generally, a liquid crystal panel of a liquid crystal display device includes: a thin film transistor substrate, a thin film transistor and a picture element electrode in a picture element region defined by an electrode gate line and a data line; a color filter substrate with a color filter layer And a common electrode; and a liquid crystal layer interposed between the two substrates.
如上所述構成的液晶顯示裝置的製造工程，能夠分為基板製造工程、單元製造工程以及模組工程等三個工程。首先，基板製造工程被細分為薄膜電晶體製造工程以及彩色濾光片製造工程。The manufacturing process of the liquid crystal display device configured as described above can be divided into three processes of substrate manufacturing engineering, unit manufacturing engineering, and module engineering. First, substrate manufacturing engineering is subdivided into thin film transistor manufacturing engineering and color filter manufacturing engineering.
薄膜電晶體製造工程是指在下部基板上製造多個薄膜電晶體以及圖元電極的工程，而彩色濾光片製造工程是指在形成黑色矩陣的上部基板上利用顏料或燃料形成R、G、B顏色的彩色濾光片層並形成公用電極的工程。The thin film transistor manufacturing engineering refers to the process of manufacturing a plurality of thin film transistors and the picture element electrodes on the lower substrate, and the color filter manufacturing process refers to forming R, G by using pigments or fuels on the upper substrate forming the black matrix. The color filter layer of B color and the process of forming a common electrode.
此外，單元工程是指為了使兩個基板即已完成薄膜電晶體工程的下部基板以及已完成彩色濾光片工程的上部基板之間維持一定的間隔而散步隔離物，然後通過對其進行粘接並注入液晶而製造液晶顯示裝置的單元的工程。In addition, the unit engineering means that the spacers are walked for maintaining a certain interval between the two substrates, that is, the lower substrate on which the thin film transistor engineering has been completed, and the upper substrate on which the color filter engineering has been completed, and then bonding them by bonding them. The liquid crystal is injected to manufacture a unit of the liquid crystal display device.
最後，模組工程是指製造用於執行信號處理的電路部並將液晶顯示裝置面板和信號處理電路部進行連接而製造模組的工程。為了在如上所述的液晶顯示裝置的製造工程中執行各個工程，需要配備一種能夠在將基板移送到相應的工程裝置中之後再將其移送到下一個工程裝置中時對上述基板進行臨時保管的手段。Finally, the module engineering refers to a process of manufacturing a circuit portion for performing signal processing and connecting a liquid crystal display device panel and a signal processing circuit portion to manufacture a module. In order to perform various processes in the manufacturing process of the liquid crystal display device as described above, it is necessary to equip the substrate to be temporarily stored when the substrate is transferred to the corresponding engineering device and then transferred to the next engineering device. means.
作為滿足上述要求的手段，通常使用裝載盒（Cassette），借此能夠在依次對多個基板進行裝載之後再一次性進行移送。此時，能夠通過在裝載盒上沿著高度方向形成多個支撐杆而將多個基板以相互相隔一定距離的形態進行裝載。As means for satisfying the above requirements, a cassette is usually used, whereby the plurality of substrates can be loaded in order and then transferred once. At this time, a plurality of substrates can be loaded with a certain distance from each other by forming a plurality of support bars in the height direction on the loading cassette.
其中，現有的支撐杆會在基板生產線上以一定的週期對裝載盒進行定期清洗，而在清洗過程中所使用的水會在後續的過程中通過墊塊的結合部分滲透到支撐杆的內部，因此可能會使水跌落到裝載在支撐杆下方的基板上並進一步導致基板不良的問題發生。Wherein, the existing support rod periodically cleans the loading box on the substrate production line at a certain cycle, and the water used in the cleaning process penetrates into the inside of the support rod through the joint portion of the spacer in the subsequent process. Therefore, it may cause the water to fall onto the substrate loaded under the support rod and further cause a problem of poor substrate.
此外，平板顯示幕的大型化導致了基板重量的增加，而現有的支撐杆也隨之呈現出了逐漸變重的趨勢，因此，很難實現在寬度方向上的截面積從一端向另一端逐漸變小的錐形形狀。此外，伴隨支撐杆的重量變重，還導致了洩漏（leak）測試等工程所需要的工程費用增加的問題。In addition, the enlargement of the flat panel display leads to an increase in the weight of the substrate, and the existing support rods also tend to become gradually heavier. Therefore, it is difficult to realize the cross-sectional area in the width direction gradually from one end to the other end. Smaller tapered shape. In addition, as the weight of the support bar becomes heavier, it also causes an increase in the engineering cost required for a project such as a leak test.
此外，現有的支撐杆在其長度增加時會造成裝載盒整體重量的增加，且可能會導致安裝有支撐杆的支撐架等的結構發生變形，而且伴隨著所需原材料的用量的增加還會導致製造成本上升的問題。In addition, the existing support rods may increase the overall weight of the loading box when its length is increased, and may cause deformation of the structure of the support frame or the like to which the support rod is mounted, and the amount of raw materials required may increase. The problem of rising manufacturing costs.
[需要解決的技術課題] 本創作之一實施例的目的在於提供一種重量輕、可實現錐形形狀、可以採用不需要配備如端蓋/隔膜或用於防止水流入到內部的獨立部件的實體型形態的支撐杆以及配備上述支撐杆的基板裝載盒。[Technical Problem to be Solved] An object of an embodiment of the present invention is to provide a light weight, tapered shape, and an entity that does not require an independent member such as an end cap/separator or a water source for preventing water from flowing into the interior. A support rod of the type and a substrate loading cassette equipped with the above support rod.
本創作之一實施例的另一目的在於提供一種相對於重量的下沉量較小、能夠通過減少如洩漏（leak）測試等不必要的工程而降低工程費用的支撐杆以及配備上述支撐杆的基板裝載盒。 [課題的解決手段]Another object of an embodiment of the present invention is to provide a support rod that is small in amount of sinking relative to weight, capable of reducing engineering costs by reducing unnecessary engineering such as a leak test, and a support rod equipped with the above-described support rod. Substrate loading box. [The solution to the problem]
在本創作的一個方面，提供一種支撐杆，在配備通過結合到基板裝載盒中而對基板進行支撐的主體的支撐杆中，上述主體，包括：安置部，在一側面配備用於安置上述基板的安置面；以及，結合部，一側與上述安置部連接，在一側面形成可供與上述裝載盒實現螺紋或鉚釘結合的結合孔。In one aspect of the present invention, a support rod is provided, in the support rod provided with a main body supporting the substrate by being coupled to the substrate loading cassette, the main body comprising: a seating portion provided on one side for arranging the substrate And a joint portion, one side of which is connected to the above-mentioned seating portion, and a side forming a coupling hole for coupling with the above-mentioned loading box to realize a thread or a rivet.
此外，上述主體能夠以拉制的方式製作。Further, the above main body can be produced in a drawn manner.
此外，還能夠包括：支撐部，與上述結合部的另一側連接。Further, it may further include: a support portion connected to the other side of the joint portion.
從外，上述安置部以及上述支撐部的厚度能夠向內側方向逐漸增加。From the outside, the thickness of the above-described seating portion and the support portion can be gradually increased in the inward direction.
此外，上述安置部與上述結合部的連接部分以及上述支撐部與上述結合部的連接部分能夠是錐形形狀或R字形形狀。Further, the connecting portion of the seating portion and the joint portion and the connecting portion of the support portion and the joint portion may have a tapered shape or an R-shape.
此外，上述結合部能夠成對形成且上述一對結合部能夠以相隔一定距離的狀態配置在上述安置部的另一側面。Further, the joint portions may be formed in pairs, and the pair of joint portions may be disposed on the other side surface of the seating portion in a state of being spaced apart from each other.
此外，上述主體能夠包括GFRP以及CFRP中的至少一個。Further, the above body can include at least one of GFRP and CFRP.
此外，還能夠包括：鎖合部，與上述裝載盒結合；以及，突出部，在上述鎖合部的一側面突出形成，在一側形成可供結合部插入結合的插入孔。Furthermore, it is also possible to include: a locking portion that is coupled to the loading case; and a protruding portion that is formed to protrude from a side surface of the locking portion, and an insertion hole into which the coupling portion is inserted and coupled is formed on one side.
此外，在上述突出部的一側面能夠形成與上述結合孔一起實現螺紋或鉚釘結合的對應結合孔。Further, on one side surface of the above-mentioned protruding portion, a corresponding coupling hole which realizes the engagement of the thread or the rivet together with the above-mentioned coupling hole can be formed.
在本創作的另一個方面，提供一種支撐杆，配備通過結合到上述基板裝載盒中而對基板進行支撐的主體，上述主體，包括：安置部，配備用於安置上述基板的安置面；以及，結合部，一側與上述安置部連接，在內部形成中空部，在一端部形成與上述中空部連接的插入口。In another aspect of the present invention, there is provided a support rod provided with a main body for supporting a substrate by being coupled to the substrate loading cassette, the main body comprising: a seating portion provided with a seating surface for arranging the substrate; One side of the joint portion is connected to the above-mentioned seating portion, and a hollow portion is formed inside, and an insertion port that is connected to the hollow portion is formed at one end portion.
此外，還能夠包括：支撐部，與上述結合部的另一側連接。Further, it may further include: a support portion connected to the other side of the joint portion.
此外，上述結合部能夠成對形成，且上述一對結合部能夠以相隔一定距離的狀態配置在上述安置部的另一側面。Further, the joint portions may be formed in pairs, and the pair of joint portions may be disposed on the other side surface of the seating portion in a state of being spaced apart from each other.
此外，還能夠包括：鎖合部，與上述裝載盒結合；以及，突出部，在上述鎖合部的一側面以可插入結合到上述插入口的方式突出形成。Furthermore, it is also possible to include a locking portion that is coupled to the loading case, and a protruding portion that is formed to protrude into a side surface of the locking portion so as to be insertably coupled to the insertion opening.
本創作的又一方面提供一種基板裝載盒，包括：上部框架；下部框架；支撐架，為了在上下方向上對上述上部框架以及上述下部框架進行連接，在垂直方向上結合到上述上部框架以及上述下部框架的一側面；以及，支撐杆，通過在垂直方向上連接到上述支撐架中而對基板進行支撐。 [創作效果]Still another aspect of the present invention provides a substrate loading cassette comprising: an upper frame; a lower frame; a support frame coupled to the upper frame and the above in a vertical direction for connecting the upper frame and the lower frame in an up and down direction a side surface of the lower frame; and a support rod supporting the substrate by being connected to the support frame in a vertical direction. [Creation effect]
適用本創作之一實施例的支撐杆以及配備上述支撐杆的基板裝載盒，能夠在對基板進行搬入和裝載之後重新對所裝載的基板進行搬出的過程中確保基板處於穩定的裝載狀態並防止在一系列生產過程中導致基板不良的現象發生。A support rod according to an embodiment of the present invention and a substrate loading cassette equipped with the support rod can ensure that the substrate is in a stable loading state and prevent the substrate from being loaded during the loading and unloading of the loaded substrate after the substrate is loaded and loaded. A series of production processes lead to poor substrate phenomena.
適用本創作之一實施例的支撐杆，具有重量輕、在清洗過程中所使用的水不會流入到支撐杆的內部、可以採用不需要配備如端蓋/隔膜或用於防止水流入到內部的獨立部件的實體型形態等優點。此外，還具有相對於重量的下沉量較小、能夠通過減少如洩漏（leak）測試等不必要的工程而降低工程費用的優點。The support rod of one embodiment of the present invention is applied, and the water used in the cleaning process does not flow into the inside of the support rod, and may be provided without an end cover/separator or to prevent water from flowing into the interior. The advantages of the solid form of the individual components. In addition, it also has the advantage that the amount of sinking relative to the weight is small, and the engineering cost can be reduced by reducing unnecessary engineering such as a leak test.
適用本創作之一實施例的支撐杆，能夠通過錐形形狀或R字形形狀的主體而實現結構力學或幾何學方面的最佳的形狀以及結構，從而將因為何種或自重所導致的下沉量降至最低。A support rod suitable for an embodiment of the present invention is capable of achieving an optimum shape and structure in structural mechanics or geometry by a tapered shape or an R-shaped body, thereby sinking due to what or its own weight. The amount is minimized.
適用本創作之一實施例的支撐杆，能夠通過以拉制的方式製作而降低相對於重量的下沉量，且能夠通過減少洩漏（leak）測試等工程而降低工程費用。The support rod to which one embodiment of the present invention is applied can reduce the amount of sinking with respect to weight by being produced in a drawn manner, and can reduce the engineering cost by reducing the leakage test and the like.
接下來，為了便於具有本創作所屬技術領域之一般知識的技術人員輕易地實施本創作，將結合附圖對適用本創作的實施例進行詳細的說明。本創作能夠以多種不同的形態實現，並不限定於在下述內容中進行說明的實施例。為了能夠更明確地對本創作進行說明，在附圖中對與說明內容無關的部分進行了省略，而且在整個說明書中對於相同或類似的構成要素使用了相同的參考符號。Next, in order to facilitate the implementation of the present invention by those skilled in the art having the general knowledge of the art to which the present invention pertains, the embodiments to which the present invention is applied will be described in detail with reference to the accompanying drawings. The present invention can be implemented in many different forms, and is not limited to the embodiments described below. In order to explain the present invention more clearly, the parts that are not related to the description are omitted in the drawings, and the same reference numerals are used for the same or similar constituent elements throughout the specification.
圖1是對適用本創作之一實施例的支撐杆以及配備上述支撐杆的基板裝載盒進行圖示的斜視圖。圖2是對圖1中的A部分進行放大的斜視圖。BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing a support rod to which an embodiment of the present invention is applied and a substrate loading cassette equipped with the above support rod. Fig. 2 is a perspective view showing an enlarged portion A of Fig. 1.
在對適用本創作之一實施例的基板裝載盒進行說明的過程中，將如圖1所示的從垂直框架8到支撐杆10一側的方向定義為前方並將從支撐杆10到垂直框架8一側的方向定義為後方進行說明。In the description of the substrate loading cassette to which one embodiment of the present invention is applied, the direction from the vertical frame 8 to the side of the support rod 10 as shown in FIG. 1 is defined as the front and will be from the support rod 10 to the vertical frame. The direction of the 8 side is defined as the rear description.
如圖1所示，適用本創作之一實施例的配備支撐杆10的基板裝載盒1，能夠包括：上部框架2；下部框架3；支撐架7；垂直框架8；棒狀部件9；以及，支撐杆10。As shown in FIG. 1, a substrate loading cassette 1 equipped with a support bar 10 according to an embodiment of the present invention can include: an upper frame 2; a lower frame 3; a support frame 7; a vertical frame 8; a rod member 9; Support rod 10.
借此，適用本創作之一實施例的配備支撐杆10的基板裝載盒1，能夠在對基板5進行搬入和裝載之後重新對所裝載的基板進行搬出的過程中確保基板處於穩定的裝載狀態並防止在一系列生產過程中導致基板不良的現象發生。Thereby, the substrate loading cassette 1 equipped with the support rod 10 of one embodiment of the present invention can be used to ensure that the substrate is in a stable loading state during the process of reloading the loaded substrate after the substrate 5 is loaded and loaded. Prevents the occurrence of poor substrate in a series of production processes.
如圖1所示，在適用本創作的一實施例中，上部框架2以及下部框架3能夠分別以板狀形狀形成。此時，上部框架2以及下部框架3能夠分別以與基板5類似的形狀形成，從而對基板進行穩定的支撐。As shown in Fig. 1, in an embodiment to which the present invention is applied, the upper frame 2 and the lower frame 3 can be formed in a plate shape, respectively. At this time, the upper frame 2 and the lower frame 3 can be formed in a shape similar to that of the substrate 5, respectively, thereby stably supporting the substrate.
即，如圖1所示，上部框架2以及下部框架3能夠以矩形形狀形成。此外，為了在上下方向上對上部框架2以及下部框架3進行連接，能夠在垂直方向上將多個支撐架7結合到上部框架以及下部框架的兩側面。That is, as shown in FIG. 1, the upper frame 2 and the lower frame 3 can be formed in a rectangular shape. Further, in order to connect the upper frame 2 and the lower frame 3 in the vertical direction, a plurality of support frames 7 can be coupled to both side faces of the upper frame and the lower frame in the vertical direction.
此時，多個支撐架7能夠以板狀形狀形成，且能夠在上部框架2以及下部框架3的橫向方向上以相隔一定距離的狀態並排配置。此外，能夠在多個支撐杆7上沿著上下方向以相隔一定距離的狀態配置多個棒狀部件9，並借此對矩形形狀的基板5的周邊部進行支撐。At this time, the plurality of support frames 7 can be formed in a plate shape, and can be arranged side by side in a state of being spaced apart from each other in the lateral direction of the upper frame 2 and the lower frame 3. Further, a plurality of rod-like members 9 can be disposed on the plurality of support rods 7 in a state of being spaced apart from each other in the vertical direction, thereby supporting the peripheral portion of the rectangular-shaped substrate 5.
如圖1所示，棒狀部件9能夠以棒狀形狀向上部框架2以及下部框架3的內側方向突出形成，且能夠通過以與上部框架以及下部框架並排的狀態配置多個而對基板5進行支撐。此時，棒狀部件9能夠通過以與基板5的側面垂直的狀態配置而對基板進行支撐。As shown in FIG. 1 , the rod-shaped member 9 can be formed in a rod shape and protruded in the inner side direction of the upper frame 2 and the lower frame 3 , and can be disposed on the substrate 5 by arranging a plurality of the upper frame 2 and the lower frame in parallel. support. At this time, the rod member 9 can be supported by being disposed in a state perpendicular to the side surface of the substrate 5.
此外，為了在上下方向上對上部框架2以及下部框架3進行連接並配置支撐杆10，能夠在上部框架以及下部框架的背面沿著垂直方向結合多個垂直框架8。此時，垂直框架8的縱向截面能夠以H字形狀形成，從而與後續說明的支撐杆10的鎖合部件21結合。Further, in order to connect the upper frame 2 and the lower frame 3 in the vertical direction and arrange the support bars 10, the plurality of vertical frames 8 can be joined in the vertical direction on the back surfaces of the upper frame and the lower frame. At this time, the longitudinal section of the vertical frame 8 can be formed in an H-shape to be combined with the locking member 21 of the support rod 10 described later.
圖3是對適用本創作之一實施例的支撐杆進行圖示的斜視圖。圖4是對適用本創作之一實施例的支撐杆進行圖示的平面圖。Fig. 3 is a perspective view showing a support rod to which an embodiment of the present invention is applied. Fig. 4 is a plan view showing a support rod to which an embodiment of the present invention is applied.
如圖2所示，適用本創作之一實施例的支撐杆10，能夠包括：主體30；墊塊部件50；以及，鎖合部件70。適用本創作之一實施例的支撐杆10，能夠通過沿著多個垂直框架8的上下方向以相隔一定距離的狀態進行配置而對基板5進行支撐。As shown in FIG. 2, the support rod 10 to which one embodiment of the present invention is applied can include: a main body 30; a spacer member 50; and a locking member 70. The support rod 10 to which one embodiment of the present invention is applied can be supported by the substrate 5 in a state of being spaced apart from each other in the vertical direction of the plurality of vertical frames 8.
此外，適用本創作之一實施例的支撐杆10，能夠被配置在多個棒狀部件9之間。這是因為當僅利用棒狀部件9對基板5的兩側端部進行支撐時，可能會因為基板的中央部的下垂而導致基板與用於將基板裝載到裝載盒1或從中取出的機器人等發生碰撞的現象，而通過將多個支撐杆10配置在多個棒狀部件9之間，能夠防止如上所述的危險現象發生。Further, the support rod 10 to which one embodiment of the present invention is applied can be disposed between the plurality of rod members 9. This is because when both end portions of the substrate 5 are supported by the rod-like member 9, the substrate and the robot for loading or unloading the substrate into or from the loading cassette 1 may be caused by the sagging of the central portion of the substrate. The collision phenomenon occurs, and by arranging the plurality of support bars 10 between the plurality of rod members 9, it is possible to prevent the occurrence of a dangerous phenomenon as described above.
此時，如圖1所示，支撐杆10能夠被配置在與用於對基板5進行支撐的棒狀部件9相同的高度，從而與棒狀部件9一起防止基板下垂並使其能夠以平行的的狀態裝載。At this time, as shown in FIG. 1, the support rod 10 can be disposed at the same height as the rod member 9 for supporting the substrate 5, thereby preventing the substrate from sagging together with the rod member 9 and enabling it to be parallel. State loading.
此外，如圖3以及圖4所示，適用本創作之一實施例的支撐杆10，能夠以棒狀形狀的主體30形成。此外，在適用本創作的一實施例中，主體30能夠包括：安置部31；結合部33；以及，支撐部35。Further, as shown in FIGS. 3 and 4, the support rod 10 to which one embodiment of the present invention is applied can be formed in a rod-shaped main body 30. Further, in an embodiment to which the present invention is applied, the main body 30 can include: a seating portion 31; a joint portion 33; and a support portion 35.
在適用本創作的一實施例中，主體30能夠以I字形形狀的截面形成。此外，安置部31能夠是板狀形狀並向前後方向延長形成。此時，在安置部31的上部面能夠形成可供基板安置的安置面32。此外，在安置面32上能夠形成可供墊塊部件50插入的墊塊插入孔52。In an embodiment to which the present invention is applied, the body 30 can be formed in a cross section of an I-shape. Further, the seating portion 31 can be formed in a plate shape and elongated in the front-rear direction. At this time, a seating surface 32 for the substrate can be formed on the upper surface of the seating portion 31. Further, a spacer insertion hole 52 into which the spacer member 50 can be inserted can be formed on the seating surface 32.
同時，結合部33能夠是板狀形狀並向前後方向延長形成。此時，結合部33的上部側能夠在垂直方向上結合到安置部31的下部面。此外，結合部33能夠結合到安置部31的下部面中心部。此時，在結合部33的側面能夠形成可供與鎖合部件70實現螺紋或鉚釘結合的至少一個結合孔34。At the same time, the joint portion 33 can be formed in a plate shape and elongated in the front-rear direction. At this time, the upper side of the joint portion 33 can be coupled to the lower surface of the seating portion 31 in the vertical direction. Further, the joint portion 33 can be coupled to the central portion of the lower face of the seating portion 31. At this time, at least one coupling hole 34 which can be screwed or rivet-coupled to the lock member 70 can be formed on the side surface of the joint portion 33.
借此，適用本創作之一實施例的支撐杆10，具有重量輕、在清洗過程中所使用的水不會流入到支撐杆的內部以及不需要配備如端蓋/隔膜等的優點。Thereby, the support rod 10 of one embodiment of the present invention is applied, and the weight is light, the water used in the washing process does not flow into the inside of the support rod, and the advantages such as the end cap/separator are not required.
此外，適用本創作之一實施例的支撐杆10，具有相對於重量的下沉量較小的優點，且能夠通過減少洩漏（leak）測試等工程而降低工程費用。Further, the support rod 10 to which one embodiment of the present invention is applied has an advantage that the amount of sinking with respect to the weight is small, and the engineering cost can be reduced by reducing the leakage test and the like.
如圖3以及圖4所示，支撐部35能夠是板狀形狀並向前後方向延長形成。此時，支撐部35的上部面能夠在垂直方向上結合到結合部33的下部側。此外，結合部33能夠結合到支撐部35的上部面中心部。As shown in FIGS. 3 and 4, the support portion 35 can be formed in a plate shape and elongated in the front-rear direction. At this time, the upper surface of the support portion 35 can be coupled to the lower side of the joint portion 33 in the vertical direction. Further, the joint portion 33 can be coupled to the center portion of the upper surface of the support portion 35.
此時，在適用本創作的一實施例中，支撐部35以及安置部31能夠以相同的寬度以及長度形成，但是並不限定於此。適用本創作之一實施例的支撐杆10，能夠借助於支撐部35對鎖合部件70的下部側進行支撐，從而強化主體30以及鎖合部件70之間的結合力。At this time, in an embodiment to which the present invention is applied, the support portion 35 and the seating portion 31 can be formed with the same width and length, but are not limited thereto. The support rod 10 to which one embodiment of the present invention is applied can support the lower side of the lock member 70 by means of the support portion 35, thereby reinforcing the bonding force between the main body 30 and the lock member 70.
圖5是對適用本創作之一實施例的支撐杆的第1變形例進行圖示的平面圖。圖6是對適用本創作之一實施例的支撐杆的第2變形例進行圖示的平面圖。Fig. 5 is a plan view showing a first modification of a support rod to which an embodiment of the present invention is applied. Fig. 6 is a plan view showing a second modification of the support rod to which an embodiment of the present invention is applied.
如圖5所示，在適用本創作的一實施例中作為主體30a的第1變形例，安置部31a以及支撐部35a的截面積能夠從兩側端部側向內側方向逐漸增加。即，安置部31a以及支撐部35a的截面積能夠從兩端部向中心部逐漸增加。As shown in FIG. 5, in the first modification to which the main body 30a is applied, the cross-sectional area of the seating portion 31a and the support portion 35a can be gradually increased from the both side end sides to the inner side direction. That is, the cross-sectional area of the seating portion 31a and the support portion 35a can be gradually increased from the both end portions toward the center portion.
適用本發明之一實施例的支撐杆10為了防止在清洗過程中所使用的水以及清洗液蓄積在支撐杆中而使其能夠通過支撐部流出到外部。The support rod 10 to which an embodiment of the present invention is applied is prevented from flowing out to the outside through the support portion in order to prevent water and cleaning liquid used in the cleaning process from accumulating in the support rod.
此外，結合部33a的截面積能夠從內側向兩側端部側逐漸增加。此時，在本創作的一實施例中，主體30a上安置部31a與結合部33a的連接部分以及結合部33a與支撐部35a的連接部分能夠是錐形形狀或R字形形狀。Further, the cross-sectional area of the joint portion 33a can be gradually increased from the inner side to the side end sides. At this time, in an embodiment of the present creation, the connecting portion of the seating portion 31a and the joint portion 33a on the main body 30a and the connecting portion of the joint portion 33a and the support portion 35a may have a tapered shape or an R-shape.
適用本創作之一實施例的支撐杆10，能夠通過錐形形狀或R字形形狀的主體30而實現結構力學或幾何學方面的最佳的形狀以及結構，從而將因為何種或自重所導致的下沉量降至最低。The support rod 10 to which an embodiment of the present invention is applied can realize the optimal shape and structure of the structural mechanics or geometry by the conical shape or the R-shaped main body 30, thereby causing any kind or self-weight. The amount of sinking is reduced to a minimum.
如圖6所示，在適用本創作的一實施例中作為主體30b的第2變形例，安置部31b的安置面32a能夠以向上部方向突出的形狀形成。此時，因為突出形成的安置面32a能夠起到後續說明的墊塊部件50的作用，因此將不需要配備單獨的墊塊部件50。As shown in Fig. 6, in an embodiment to which the present invention is applied, as a second modification of the main body 30b, the seating surface 32a of the seating portion 31b can be formed in a shape protruding in the upward direction. At this time, since the protrudingly formed seating surface 32a can function as the spacer member 50 described later, it is not necessary to provide a separate spacer member 50.
圖7是對適用本創作之一實施例的支撐杆的第3變形例進行圖示的平面圖。圖8是對適用本創作之一實施例的支撐杆的第4變形例進行圖示的平面圖。Fig. 7 is a plan view showing a third modification of the support rod to which an embodiment of the present invention is applied. Fig. 8 is a plan view showing a fourth modification of the support rod to which an embodiment of the present invention is applied.
如圖7所示，在適用本創作的一實施例中作為主體30c的第3變形例，適用本創作之一實施例的主體30c能夠包括安置部31以及結合部33。此時，主體30c能夠以T字形形狀的截面形成。借此，適用本創作之一實施例的支撐杆10，具有重量輕、在清洗過程中所使用的水不會流入到支撐杆的內部以及不需要配備如端蓋/隔膜等的優點。As shown in FIG. 7, in a third modification of the main body 30c in an embodiment to which the present invention is applied, the main body 30c to which one embodiment of the present invention is applied can include the seating portion 31 and the joint portion 33. At this time, the main body 30c can be formed in a cross section of a T-shape. Thereby, the support rod 10 of one embodiment of the present invention is applied, and the weight is light, the water used in the washing process does not flow into the inside of the support rod, and the advantages such as the end cap/separator are not required.
此外，適用本創作之一實施例的支撐杆10，具有相對於重量的下沉量較小的優點，且能夠通過減少洩漏（leak）測試等工程而降低工程費用。Further, the support rod 10 to which one embodiment of the present invention is applied has an advantage that the amount of sinking with respect to the weight is small, and the engineering cost can be reduced by reducing the leakage test and the like.
此外，安置部31能夠是板狀形狀並向前後方向延長形成。此時，在安置部31的上部面能夠形成可供基板安置的安置面32。在適用本創作的一實施例中，在安置面32上能夠形成可供墊塊部件50插入的墊塊插入孔52。Further, the seating portion 31 can be formed in a plate shape and elongated in the front-rear direction. At this time, a seating surface 32 for the substrate can be formed on the upper surface of the seating portion 31. In an embodiment to which the present invention is applied, a spacer insertion hole 52 into which the spacer member 50 can be inserted can be formed on the seating surface 32.
此外，結合部33能夠是板狀形狀並向前後方向延長形成。此時，結合部33的上部側能夠在垂直方向上結合到安置部31的下部面。此外，結合部33能夠結合到安置部31的下部面中心部。此時，在結合部33的側面能夠形成可供與鎖合部件70實現螺紋或鉚釘結合的至少一個結合孔34。Further, the joint portion 33 can be formed in a plate shape and elongated in the front-rear direction. At this time, the upper side of the joint portion 33 can be coupled to the lower surface of the seating portion 31 in the vertical direction. Further, the joint portion 33 can be coupled to the central portion of the lower face of the seating portion 31. At this time, at least one coupling hole 34 which can be screwed or rivet-coupled to the lock member 70 can be formed on the side surface of the joint portion 33.
如圖8所示，作為主體30d的第4變形例，能夠形成成對的結合部33。此外，一對結合部33能夠以相隔一定距離的狀態配置到安置部31的下部面。此時，如圖8所示，一對結合部33能夠被連接到主體30d的安置部31的兩側端部，但是並不限定於此，也能夠被連接到安置部31的下部面內側。適用本創作之一實施例的支撐杆10，能夠借助於結合部33強化主體30d以及鎖合部件70之間的結合力。As shown in FIG. 8, as a fourth modification of the main body 30d, a pair of joint portions 33 can be formed. Further, the pair of joint portions 33 can be disposed to the lower surface of the seating portion 31 in a state of being separated by a certain distance. At this time, as shown in FIG. 8, the pair of joint portions 33 can be connected to both end portions of the seating portion 31 of the main body 30d, but it is not limited thereto, and can be connected to the inner side of the lower surface of the seating portion 31. The support rod 10 to which an embodiment of the present invention is applied can strengthen the bonding force between the main body 30d and the lock member 70 by means of the joint portion 33.
此外，在適用本創作的一實施例中，如圖3所示，能夠在主體30、30a、30b、30c、30d、30e的一側端部如主體的後方一側端部形成用於將主體結合到裝載盒1的垂直框架8中的鎖合部件70。Further, in an embodiment to which the present invention is applied, as shown in FIG. 3, one end portion of the main body 30, 30a, 30b, 30c, 30d, 30e can be formed at the rear end portion of the main body for the main body. The locking member 70 is incorporated into the vertical frame 8 of the loading cassette 1.
借此，能夠將適用本創作之一實施例的支撐杆10固定到支撐架7上，從而將基板5裝載到支撐杆的上部面。此時，支撐杆10能夠與鎖合部件70形成為一體，但是並不限定於此，也能夠單獨地與鎖合部件結合。Thereby, the support rod 10 to which one embodiment of the present invention is applied can be fixed to the support frame 7, thereby loading the substrate 5 to the upper surface of the support rod. At this time, the support rod 10 can be integrally formed with the lock member 70, but the present invention is not limited thereto, and can be separately coupled to the lock member.
此外，如圖3所示，在適用本創作的一實施例中，鎖合部件70能夠包括鎖合部71以及突出部73。如圖3所示，在適用本創作的一實施例中，鎖合部71能夠以圓形或六角形的截面形成，且能夠利用如鋁合金、不銹鋼合金等非鐵金屬構成。Further, as shown in FIG. 3, in an embodiment to which the present invention is applied, the lock member 70 can include the lock portion 71 and the projection portion 73. As shown in FIG. 3, in an embodiment to which the present invention is applied, the lock portion 71 can be formed in a circular or hexagonal cross section, and can be formed of a non-ferrous metal such as an aluminum alloy or a stainless steel alloy.
此外，如圖2以及圖3所示，在鎖合部71的兩側面以及背面，能夠形成用於與垂直框架8實現螺紋結合的多個螺栓插入孔72。此外，通過將螺栓鎖合到鎖合部71的螺栓插入孔72，能夠將其結合到垂直框架8中。此時，在垂直框架8和鎖合部71結合時與鎖合部件的螺栓插入孔72對應的位置，能夠形成螺栓孔（未圖示）。Further, as shown in FIGS. 2 and 3, a plurality of bolt insertion holes 72 for screwing the vertical frame 8 can be formed on both side surfaces and the back surface of the lock portion 71. Further, by bolting the bolt to the bolt insertion hole 72 of the lock portion 71, it can be incorporated into the vertical frame 8. At this time, a bolt hole (not shown) can be formed at a position corresponding to the bolt insertion hole 72 of the lock member when the vertical frame 8 and the lock portion 71 are coupled.
如圖3所示，在鎖合部71的正面，能夠向前方突出形成突出部73。此外，突出部73能夠以截面為圓形或矩形的棒狀形狀形成，但是並不限定於此。此時，突出部73如圖3所示，能夠在其一側端部如突出部73的前方一側端部形成沿著上下方向貫通的插入孔74。As shown in FIG. 3, on the front surface of the lock portion 71, the protruding portion 73 can be formed to protrude forward. Further, the protruding portion 73 can be formed in a rod shape having a circular or rectangular cross section, but is not limited thereto. At this time, as shown in FIG. 3, the protruding portion 73 can have an insertion hole 74 penetrating in the vertical direction at one end portion of the protruding portion 73 at one end portion thereof.
此時，在適用本創作的一實施例中，插入孔74能夠向後方即突出部73的長度方向延長形成，且為了使結合部33中的至少一部分被插入結合而能夠以與結合部33的外側面對應的方式形成。借此，能夠對鎖合部件70以及主體30進行結合。At this time, in an embodiment to which the present invention is applied, the insertion hole 74 can be formed to extend rearward, that is, in the longitudinal direction of the protruding portion 73, and can be combined with the joint portion 33 in order to allow at least a part of the joint portion 33 to be inserted and joined. The outer side is formed in a corresponding manner. Thereby, the lock member 70 and the main body 30 can be joined.
此外，突出部73如圖3所示，能夠在其一側面如突出部73的兩側面形成對應結合孔75。此時，對應結合孔75能夠以與結合部33的結合孔34對應的方式形成，從而與結合孔34一起實現螺紋結合或鉚釘結合。Further, as shown in FIG. 3, the protruding portion 73 can be formed with a corresponding coupling hole 75 on one side surface thereof such as both side faces of the protruding portion 73. At this time, the corresponding coupling hole 75 can be formed in a manner corresponding to the coupling hole 34 of the joint portion 33, thereby achieving screwing or rivet bonding together with the coupling hole 34.
適用本創作之一實施例的支撐杆10，能夠實現在結合部33被插入結合到插入孔74中時支撐杆的墊塊部件50與突出部互不干擾的結合結構。The support rod 10 to which an embodiment of the present invention is applied can realize a joint structure in which the spacer member 50 of the support rod and the protruding portion do not interfere with each other when the joint portion 33 is inserted into the insertion hole 74.
圖9是對適用本發明之一實施例的支撐杆的第5變形例進行圖示的平面圖。Fig. 9 is a plan view showing a fifth modification of the support rod to which an embodiment of the present invention is applied.
此時，如圖9所示，作為主體30e的第5變形例，安置部31a以及支撐部35b的截面積能夠從兩側端部側向內側方向逐漸增加。即，安置部31a以及支撐部35b的截面積能夠從兩端部向中心部逐漸增加。At this time, as shown in FIG. 9, as a fifth modification of the main body 30e, the cross-sectional areas of the seating portion 31a and the support portion 35b can be gradually increased from the side edges toward the inner side. That is, the cross-sectional area of the seating portion 31a and the support portion 35b can be gradually increased from the both end portions toward the center portion.
適用本發明之一實施例的支撐杆10為了防止在清洗過程中所使用的水以及清洗液蓄積在支撐杆中而使其能夠通過支撐部流出到外部。The support rod 10 to which an embodiment of the present invention is applied is prevented from flowing out to the outside through the support portion in order to prevent water and cleaning liquid used in the cleaning process from accumulating in the support rod.
此外，如圖5以及圖9所示，主體30e的安置部31a以及結合部33a能夠以與上述第1變形例相同的形狀形成。此時，能夠通過使支撐部35b的長度小於安置部31a而降低相對於重量的下沉量並實現結構力學或幾何學方面的最佳的形狀以及結構，從而將因為荷重或自重所導致的下沉量降至最低。Further, as shown in FIGS. 5 and 9, the seating portion 31a and the joint portion 33a of the main body 30e can be formed in the same shape as the above-described first modification. At this time, it is possible to reduce the amount of sinking with respect to the weight and achieve the optimum shape and structure in terms of structural mechanics or geometry by making the length of the supporting portion 35b smaller than the seating portion 31a, thereby causing the lowering due to the load or the self-weight. The sinking amount is reduced to a minimum.
圖10是對圖1中的A部分進行放大的斜視圖。圖11是對適用本創作之一實施例的支撐杆進行圖示的斜視圖。圖12是對適用本創作之一實施例的支撐杆的第6變形例進行圖示的斜視圖。Fig. 10 is a perspective view showing an enlarged portion A of Fig. 1. Fig. 11 is a perspective view showing a support rod to which an embodiment of the present invention is applied. Fig. 12 is a perspective view showing a sixth modification of the support rod to which an embodiment of the present invention is applied.
如圖10至圖12所示，適用本創作之一實施例的支撐杆10的第6變形例，能夠以在其內部形成中空部的棒狀形狀的主體130形成。此時，通過在主體130的內部形成中空部，能夠節省原材料、減少整體重量並使其製作更加容易。As shown in FIGS. 10 to 12, a sixth modification of the support rod 10 to which one embodiment of the present invention is applied can be formed by a rod-shaped main body 130 having a hollow portion formed therein. At this time, by forming the hollow portion inside the main body 130, the material can be saved, the overall weight can be reduced, and the production can be made easier.
此外，在適用本創作的一實施例中，主體130能夠包括安置部31以及結合部133。此時，安置部31能夠是板狀形狀並向前後方向延長形成。此外，在安置部31的上部面能夠形成可供基板安置的安置面32。在適用本創作的一實施例中，在安置面32上能夠形成可供墊塊部件50插入的墊塊插入孔52。Further, in an embodiment to which the present invention is applied, the main body 130 can include the seating portion 31 and the joint portion 133. At this time, the seating portion 31 can be formed in a plate shape and elongated in the front-rear direction. Further, a seating surface 32 for the substrate can be formed on the upper surface of the seating portion 31. In an embodiment to which the present invention is applied, a spacer insertion hole 52 into which the spacer member 50 can be inserted can be formed on the seating surface 32.
此外，結合部133如圖12所示，能夠在內部形成中空部並以圓筒形形狀向前後方向延長形成。此外，結合部133能夠以圓形的截面形狀形成，但是並不限定於此，還能夠以矩形、橢圓形、多邊形等截面形狀形成。此時，結合部133能夠結合到安置部31的下部面中心部。Further, as shown in FIG. 12, the joint portion 133 can be formed with a hollow portion inside and formed in a cylindrical shape in the front-rear direction. Further, the joint portion 133 can be formed in a circular cross-sectional shape, but is not limited thereto, and can be formed in a cross-sectional shape such as a rectangular shape, an elliptical shape, or a polygonal shape. At this time, the joint portion 133 can be coupled to the lower surface center portion of the seating portion 31.
圖13是對適用本創作之另一實施例的支撐杆的第7變形例進行圖示的平面圖。Fig. 13 is a plan view showing a seventh modification of the support rod to which another embodiment of the present invention is applied.
如圖13所示，作為主體130a的第7變形例，能夠形成成對的結合部33a。此外，一對結合部33a能夠以相隔一定距離的狀態配置到安置部31的下部面。此時，如圖13所示，一對結合部33a能夠被連接到安置部31的下部面內側。此時，支撐部35a能夠是板狀形狀並向前後方向延長形成。此時，支撐部35a的上部面能夠在垂直方向上結合到結合部33a的下部側。As shown in FIG. 13, as a seventh modification of the main body 130a, a pair of joint portions 33a can be formed. Further, the pair of joint portions 33a can be disposed to the lower surface of the seating portion 31 in a state of being separated by a certain distance. At this time, as shown in FIG. 13, the pair of joint portions 33a can be connected to the inner side of the lower face of the seating portion 31. At this time, the support portion 35a can be formed in a plate shape and elongated in the front-rear direction. At this time, the upper surface of the support portion 35a can be coupled to the lower side of the joint portion 33a in the vertical direction.
此外，支撐部35a以及安置部31能夠以相同的寬度以及長度形成，但是並不限定於此。適用本創作之一實施例的支撐杆10，能夠通過支撐部35a使鎖合部件70被插入結合。Further, the support portion 35a and the seating portion 31 can be formed with the same width and length, but are not limited thereto. The support rod 10 of one embodiment of the present invention is applied, and the lock member 70 can be inserted and coupled by the support portion 35a.
此外，如圖11所示，在適用本創作的一實施例中，鎖合部件70a能夠包括鎖合部71以及突出部173。如圖11所示，在適用本創作的一實施例中，鎖合部71能夠以圓形或六角形的截面形成，且能夠利用如鋁合金、不銹鋼合金等非鐵金屬構成。Further, as shown in FIG. 11, in an embodiment to which the present invention is applied, the lock member 70a can include the lock portion 71 and the protrusion portion 173. As shown in Fig. 11, in an embodiment to which the present invention is applied, the lock portion 71 can be formed in a circular or hexagonal cross section, and can be formed of a non-ferrous metal such as an aluminum alloy or a stainless steel alloy.
此外，如圖10以及圖11所示，在鎖合部71的兩側面以及背面，能夠形成用於與垂直框架8實現螺紋結合的多個螺栓插入孔72。此時，通過將螺栓鎖合到鎖合部71的螺栓插入孔72，能夠將其結合到垂直框架8中。此時，在垂直框架8和鎖合部71結合時與鎖合部件的螺栓插入孔72對應的位置，能夠形成螺栓孔（未圖示）。Further, as shown in FIGS. 10 and 11 , a plurality of bolt insertion holes 72 for screwing with the vertical frame 8 can be formed on both side surfaces and the back surface of the lock portion 71 . At this time, by bolting the bolt to the bolt insertion hole 72 of the lock portion 71, it can be coupled into the vertical frame 8. At this time, a bolt hole (not shown) can be formed at a position corresponding to the bolt insertion hole 72 of the lock member when the vertical frame 8 and the lock portion 71 are coupled.
如圖11所示，在鎖合部71的正面，能夠向前方一側突出形成突出部173。此時，突出部173能夠以截面為圓形或矩形的棒狀形狀形成，但是並不限定於此。As shown in FIG. 11, on the front surface of the lock portion 71, the protruding portion 173 can be formed to protrude forward. At this time, the protruding portion 173 can be formed in a rod shape having a circular or rectangular cross section, but is not limited thereto.
此外，主體130如圖11所示，能夠在其一側端部如主體的後方一側端部形成插入口134。此時，在適用本創作的一實施例中，插入口134能夠以與突出部73的外側面對應的方式形成，從而通過將突出部插入到插入口中而對鎖合部件70a以及主體130進行結合。Further, as shown in FIG. 11, the main body 130 can be formed with an insertion opening 134 at one end portion thereof, such as the rear side end portion of the main body. At this time, in an embodiment to which the present invention is applied, the insertion opening 134 can be formed in a manner corresponding to the outer side surface of the protruding portion 73, thereby combining the locking member 70a and the main body 130 by inserting the protruding portion into the insertion opening. .
在適用本創作的一實施例中，主體30、130能夠利用碳纖維強化塑膠（carbon fiber reinforced plastic，CFRP）、玻璃纖維強化塑膠（Glass Fiber Reinforced Plastic，GFRP）、碳膜、玻璃強化膜、芳香聚醯胺膜以及金屬薄膜中的至少一種以單層或多層形成。In an embodiment in which the present invention is applied, the main body 30, 130 can utilize carbon fiber reinforced plastic (CFRP), Glass Fiber Reinforced Plastic (GFRP), carbon film, glass reinforced film, and aromatic poly At least one of the guanamine film and the metal thin film is formed in a single layer or a plurality of layers.
其中，碳纖維強化塑膠（CFRP）是一種比強度（specific strength）、剛性（rigidity）、斷裂強度（rupture strength）非常優秀的，將由碳纖維構成的織物或薄片含浸到環氧樹脂並經過硬化而得到的物質。Among them, carbon fiber reinforced plastic (CFRP) is excellent in specific strength, rigidity, and rupture strength. The fabric or sheet made of carbon fiber is impregnated with epoxy resin and hardened. substance.
此外，玻璃纖維強化塑膠（Glass Fiber Reinforced Plastic；GFRP）是一種強度高、重量輕、耐久性和耐衝擊性以及耐磨損性優秀的，將由玻璃纖維構成的織物或薄片含浸到環氧樹脂並經過硬化而得到的物質。In addition, Glass Fiber Reinforced Plastic (GFRP) is a high-strength, lightweight, durable and impact-resistant and wear-resistant, fabric impregnated with epoxy or woven fabric. A substance obtained by hardening.
此外，在適用本創作的一實施例中，在主體30、130的一側面如上部面，能夠結合用於對裝載基板5時主體所受到的衝擊進行吸收並防止在基板上出現劃痕的墊塊部件50。此時，在主體的上部面能夠形成可供墊塊部件結合的墊塊插入孔52。Further, in an embodiment to which the present invention is applied, on one side of the main body 30, 130, as described above, it is possible to incorporate a pad for absorbing the impact received by the main body when the substrate 5 is loaded and preventing scratches on the substrate. Block component 50. At this time, a pad insertion hole 52 into which the spacer members are coupled can be formed on the upper surface of the main body.
此時，墊塊部件50為圓柱形的凸起形狀，能夠利用塑膠材質製成，但是並不限定於此。此外，墊塊部件50能夠以其外周面與墊塊插入孔52對應的方式形成，從而被螺紋結合或嵌入結合到墊塊插入孔中。At this time, the spacer member 50 has a cylindrical convex shape and can be made of a plastic material, but is not limited thereto. Further, the spacer member 50 can be formed in such a manner that its outer peripheral surface corresponds to the spacer insertion hole 52 so as to be screwed or embedded in the spacer insertion hole.
在適用本創作的一實施例中，主體30、130能夠通過拉制工程進行製造。在適用本創作的一實施例中，通過利用拉制工程製造支撐杆10，能夠以實體型形態形成。In an embodiment in which the present invention is applicable, the bodies 30, 130 can be manufactured by drawing. In an embodiment to which the present invention is applied, the support rod 10 can be manufactured in a solid form by using a drawing process.
借此，適用本創作之一實施例的支撐杆10，能夠通過在主體30、130採用實體型形態，防止在清洗過程中所使用的水流入到支撐杆的內部，且不需要配備如端蓋以及隔膜等，還能夠實現錐形形狀。Thereby, the support rod 10 of one embodiment of the present invention can be applied to prevent the water used in the cleaning process from flowing into the interior of the support rod by adopting a solid form in the main body 30, 130, and does not need to be equipped with an end cover, for example. As well as diaphragms, etc., it is also possible to achieve a tapered shape.
此外，適用本創作之一實施例的支撐杆10，具有相對於重量的下沉量較小的優點，且能夠通過減少洩漏（leak）測試等工程而降低工程費用。Further, the support rod 10 to which one embodiment of the present invention is applied has an advantage that the amount of sinking with respect to the weight is small, and the engineering cost can be reduced by reducing the leakage test and the like.
此外，適用本創作之一實施例的支撐杆，能夠通過以拉制的方式製作而降低相對於重量的下沉量，且能夠通過減少洩漏（leak）測試等工程而降低工程費用。Further, the support rod to which one embodiment of the present invention is applied can reduce the amount of sinking with respect to weight by being produced in a drawn manner, and can reduce the engineering cost by reducing the leakage test and the like.
在上述內容中對適用本創作的一實施例進行了詳細的說明，但是本創作的主旨並不限定於在本說明書中所公開的實施例，能夠理解本創作的主旨的從業人員能夠在相同的主旨範圍內通過對構成要素進行附加、變更、刪除、追加等而輕易地實現其他實施例，但是這些實施例也應理解為被包含在本創作的主旨範圍之內。In the above, an embodiment to which the present invention is applied has been described in detail, but the gist of the present invention is not limited to the embodiment disclosed in the present specification, and practitioners who can understand the gist of the present creation can be identical. Other embodiments are easily implemented by adding, changing, deleting, adding, etc., constituent elements, but these embodiments are also intended to be included in the scope of the present invention.
1‧‧‧基板裝載盒1‧‧‧Substrate loading box
2‧‧‧上部框架2‧‧‧ upper frame
3‧‧‧下部框架3‧‧‧ Lower frame
5‧‧‧基板5‧‧‧Substrate
7‧‧‧支撐架7‧‧‧Support frame
8‧‧‧垂直框架8‧‧‧ vertical frame
9‧‧‧棒狀部件9‧‧‧ rods
10‧‧‧支撐杆10‧‧‧Support rod
30、30a、30b、30c、30d、30e 、130、130a‧‧‧主體30, 30a, 30b, 30c, 30d, 30e, 130, 130a‧‧‧ subjects
31、31a、31b‧‧‧安置部31, 31a, 31b‧‧‧Relocation Department
32、32a‧‧‧安置面32, 32a‧‧‧Settlement
33、33a、133‧‧‧結合部33, 33a, 133‧ ‧ joints
34‧‧‧結合孔34‧‧‧Contact hole
35、35a、35b‧‧‧支撐部35, 35a, 35b‧ ‧ support
134‧‧‧插入口134‧‧‧ insertion port
50‧‧‧墊塊部件50‧‧‧Cushion parts
52‧‧‧墊塊插入孔52‧‧‧pad insertion hole
70、70a‧‧‧鎖合部件70, 70a‧‧‧ Locking parts
71‧‧‧鎖合部71‧‧‧Locking Department
72‧‧‧螺栓插入孔72‧‧‧Bolt insertion hole
73、173‧‧‧突出部73, 173‧‧ ‧ protruding parts
74‧‧‧插入孔74‧‧‧Insert hole
75‧‧‧對應結合孔75‧‧‧ corresponding joint hole
圖1是對適用本創作之一實施例的支撐杆以及配備上述支撐杆的基板裝載盒進行圖示的斜視圖。 圖2是對圖1中的A部分進行放大的斜視圖。 圖3是對適用本創作之一實施例的支撐杆進行圖示的斜視圖。 圖4是對適用本創作之一實施例的支撐杆進行圖示的平面圖。 圖5是對適用本創作之一實施例的支撐杆的第1變形例進行圖示的平面圖。 圖6是對適用本創作之一實施例的支撐杆的第2變形例進行圖示的平面圖。 圖7是對適用本創作之一實施例的支撐杆的第3變形例進行圖示的平面圖。 圖8是對適用本創作之一實施例的支撐杆的第4變形例進行圖示的平面圖。 圖9是對適用本發明之一實施例的支撐杆的第5變形例進行圖示的平面圖。 圖10是對圖1中的A部分進行放大的斜視圖。 圖11是對適用本創作之一實施例的支撐杆進行圖示的斜視圖。 圖12是對適用本創作之另一實施例的支撐杆的第6變形例進行圖示的平面圖。 圖13是對適用本創作之另一實施例的支撐杆的第7變形例進行圖示的平面圖。BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing a support rod to which an embodiment of the present invention is applied and a substrate loading cassette equipped with the above support rod. Fig. 2 is a perspective view showing an enlarged portion A of Fig. 1. Fig. 3 is a perspective view showing a support rod to which an embodiment of the present invention is applied. Fig. 4 is a plan view showing a support rod to which an embodiment of the present invention is applied. Fig. 5 is a plan view showing a first modification of a support rod to which an embodiment of the present invention is applied. Fig. 6 is a plan view showing a second modification of the support rod to which an embodiment of the present invention is applied. Fig. 7 is a plan view showing a third modification of the support rod to which an embodiment of the present invention is applied. Fig. 8 is a plan view showing a fourth modification of the support rod to which an embodiment of the present invention is applied. Fig. 9 is a plan view showing a fifth modification of the support rod to which an embodiment of the present invention is applied. Fig. 10 is a perspective view showing an enlarged portion A of Fig. 1. Fig. 11 is a perspective view showing a support rod to which an embodiment of the present invention is applied. Fig. 12 is a plan view showing a sixth modification of the support rod to which another embodiment of the present invention is applied. Fig. 13 is a plan view showing a seventh modification of the support rod to which another embodiment of the present invention is applied.
Claims (14)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ??10-2018-0098284 | 2018-08-23 | ||
| KR1020180098284A KR20200022562A (en) | 2018-08-23 | 2018-08-23 | Support bar and substrate loading cassette having the same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWM579379U true TWM579379U (en) | 2019-06-11 |
Family
ID=67704072
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW107216517U TWM579379U (en) | 2018-08-23 | 2018-12-05 | Support bar and substrate loading cassette having the same |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR20200022562A (en) |
| CN (1) | CN210259207U (en) |
| TW (1) | TWM579379U (en) |
-
2018
- 2018-08-23 KR KR1020180098284A patent/KR20200022562A/en not_active Application Discontinuation
- 2018-11-06 CN CN201821819548.9U patent/CN210259207U/en not_active Expired - Fee Related
- 2018-12-05 TW TW107216517U patent/TWM579379U/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR20200022562A (en) | 2020-03-04 |
| CN210259207U (en) | 2020-04-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7652743B2 (en) | Liquid crystal display element | |
| US7965497B2 (en) | Flat panel display apparatus and method of manufacturing the same | |
| KR101903485B1 (en) | Cassette for loading substrate | |
| US20160282655A1 (en) | Liquid crystal display panel and display apparatus | |
| CN101216633B (en) | Back board device for backlight module | |
| US20080111937A1 (en) | Flat panel display and backlight module thereof | |
| KR101944718B1 (en) | Insert structure and cassette for loading substrate with the same | |
| US7545475B2 (en) | Liquid crystal display device having particular interval between spacer groups | |
| JP2010120690A (en) | Tray for conveying plate-like goods | |
| US20160107704A1 (en) | Vehicle body lower portion structure | |
| TWM579379U (en) | Support bar and substrate loading cassette having the same | |
| CN102126586A (en) | Intake container of protective membrane assembly | |
| ITTO990415A1 (en) | VIBRATION DAMPER | |
| KR101725263B1 (en) | Support bar and substrate loading cassette having the same | |
| WO2018000837A1 (en) | Transfer plate and transfer device | |
| US20070018555A1 (en) | Reinforced upper frame for supporting cabin of heavy construction equipment using welding deformation preventing structure, and method of manufacturing the same | |
| CN111142291B (en) | Liquid crystal display panel and preparation method thereof | |
| TWI269766B (en) | A cassette for receiving a glass substrate for an LCD panel | |
| KR20080054061A (en) | Three ph bar connection nine of cassette for lcd glass | |
| KR101277216B1 (en) | Cassette for loading glasses | |
| CN105353542A (en) | Support rod and substrate-receiving box equipped with same | |
| KR200483767Y1 (en) | Deck plate using end bending upper plate | |
| KR101928269B1 (en) | Side support structure and cassette for loading substrate with the same | |
| KR102133328B1 (en) | Side support structure and cassette for loading substrate with the same | |
| JP2002243891A5 (en) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4K | Annulment or lapse of a utility model due to non-payment of fees |