TWM577912U - Sealing assembly - Google Patents

Abstract

A sealing assembly disposed in a dovetail groove of a first member is provided, so that a gap between the first member and a second member can be sealed. The sealing assembly includes a first sealing element and a second sealing element. The fist sealing element is disposed on a bottom surface of the dovetail groove. The second sealing element is disposed above the first sealing element and protrudes from an opening of the dovetail groove. The second sealing element has a recessed portion with the first sealing element received therein.

Description

Sealing assembly

The present invention relates to a sealing assembly, and more particularly to a sealing assembly which can prevent the sealing member from being twisted by a lateral force in the dovetail groove and can be easily disassembled.

Referring first to FIG. 1, FIG. 1 is a schematic view showing a conventional sealing member 10 mounted inside a dovetail groove of a first member 20. As shown in FIG. 1, the conventional conventional sealing member 10 is, for example, an O-ring, and the first member 20 is, for example, a wall or a gate of a process chamber in a semiconductor processing apparatus. Door), wherein since the dovetail groove 22 has a structural feature of a lower width and a lower width, when the sealing member 10 is to be installed inside the dovetail groove 22, it must be directly inserted into the dovetail groove 22 from the top to the bottom. It should be understood that since the sealing member 10 is pressed against the bottom of the dovetail groove 22 after installation, and its tip end protrudes from one of the connecting faces 21 of the first member 20, the sealing member 10 can be transmitted through the sealing member 10 The first member 20 and a second member (not shown) abutting therewith are brought into close contact with each other.

However, since the cross-section of the conventional sealing member 10 is circular, it is easy to generate a torsion phenomenon during the relative movement of the abutting second member during the opening during use (as indicated by the direction of the arrow in FIG. 1). In particular, the sealing element 10 may be broken by this torsion phenomenon, thereby seriously affecting the sealing effect.

Next, referring to Fig. 2, Fig. 2 is a schematic view showing another conventional sealing member 10' installed in the inside of the dovetail groove 22 of a first member 20. As shown in Fig. 2, another type of sealing member 10' does not have a circular cross section and is not easily twisted when it is actuated, but since its shape substantially corresponds to the dovetail groove 22 (lower width and upper width), it is greatly The difficulty in the installation and disassembly of the sealing member 10' is increased (the interference is severe).

In view of this, how to provide a sealing mechanism that can be easily disassembled and is not easily twisted has become an important issue.

In view of the foregoing conventional problems, an embodiment of the present invention provides a sealing assembly in which the sealing assembly is disposed in a dovetail groove of a first member for making the first member and the first member Two components combined. It is to be noted that the dovetail groove has a bottom surface and an opening, the opening has a first width in a first axial direction, and the bottom surface has a second width in the first axial direction, wherein the second width is greater than The aforementioned first width.

In one embodiment, the sealing assembly includes a first sealing member and a second sealing member, wherein the first sealing member is disposed on the bottom surface of the dovetail groove, and the second sealing member is disposed on the first sealing member. And exposing the opening, wherein the second sealing member has a recess, and the first sealing member is located in the recess.

In one embodiment, the second sealing member further has two extending portions on opposite sides of the recessed portion, and the extending portions contact the bottom surface of the dovetail groove, wherein the first sealing member is sandwiched by the foregoing Between extensions.

In an embodiment, the hardness of the first sealing element is greater than or equal to the hardness of the second sealing element.

In one embodiment, the first sealing element of the sealing assembly has a Teflon material.

In an embodiment, the second sealing element of the sealing assembly has a rubber material.

In one embodiment, the first sealing element of the aforementioned seal assembly has a circular or polygonal cross section.

In one embodiment, the first sealing element of the sealing assembly has a third width in the first axial direction, wherein the third width is between 0.1 and 0.6 times the second width. In one embodiment, the first sealing member has a third width in the first axial direction, wherein the third width is 0.25 to 0.35 times the second width.

In one embodiment, the dovetail groove has a depth in a second axial direction, and the first sealing member has a height in the second axial direction. It should be particularly noted that the second axial direction is perpendicular to the first axial direction, and the height is between 0.2 and 0.7 times the aforementioned depth.

In one embodiment, the dovetail groove further has a side wall connecting the opening and the bottom surface, wherein the first sealing element is located in the recess and simultaneously contacts the bottom surface and the sidewall.

In one embodiment, the second sealing element of the aforementioned seal assembly has an asymmetrical structure.

In one embodiment, the first member 20 is, for example, a wall or a gate of a process chamber in a semiconductor process device.

In one embodiment, the second sealing member has an inverted L-shaped or inverted L-shaped cross section.

The sealing assembly of the present embodiment will be described below. However, it will be readily appreciated that the present creative embodiment provides many suitable creative concepts and can be implemented in a wide variety of specific contexts. The specific embodiments disclosed are merely illustrative of the use of the present invention in a particular way, and are not intended to limit the scope of the present invention.

Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning meaning It will be understood that these terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning consistent with the relevant art and the context or context of the present disclosure, and should not be in an idealized or overly formal manner. Interpretation, unless specifically defined herein.

The above and other technical contents, features and effects of the present invention will be apparent from the following detailed description of the preferred embodiments. The directional terms mentioned in the following embodiments, for example, up, down, left, right, front or back, etc., are only directions referring to the additional drawings. Therefore, the directional terms used in the embodiments are intended to illustrate that they are not intended to limit the present invention.

Please refer to FIG. 3 and FIG. 4 together. FIG. 3 is a schematic view showing the sealing assembly 30 of the embodiment of the present invention before being combined with a first member 20, and FIG. 4 is a view showing the sealing assembly 30 and the third drawing. A schematic diagram of a component 20 combined. It should be understood that the first member 20 in this embodiment is, for example, a wall or a gate door of one of the processing chambers of the semiconductor processing device, and a dovetail is formed on one of the connecting faces 21 of the first member 20. Groove 22 (dovetail groove).

As can be seen from the third and fourth figures, the dovetail slot 22 has a bottom surface 221, two side walls 222, and an opening 223. The two side walls 222 are connected to the opening 223 and the bottom surface 221, and the opening 223 is first. The axial direction (X-axis) has a first width W1 (Fig. 4), and the bottom surface 221 has a second width W2 in the first axial direction (X-axis), wherein the second width W2 is greater than the first width W1.

Continuing to refer to Figures 3 and 4, the sealing assembly 30 of the present embodiment mainly includes a first sealing member 31 and a second sealing member 32. The first sealing member 31 and the second sealing member 32 may be elongated, for example. The structure may alternatively be an annular or polygonal closed structure in which the first sealing element 31 has a circular cross section and the second sealing element 32 has an inverted U-shaped cross section. It should be noted that the bottom side of the second sealing member 32 is formed with two extending portions 321 and a recessed portion 322, wherein the recessed portion 322 is located between the two extending portions 321 and the recessed portion 322 faces the foregoing A sealing member 31; in addition, a guide surface 323 is formed at the end of the two extending portions 321 respectively, which can facilitate the smooth sliding of the first sealing member 31 into the recess portion 322 during assembly.

During the assembly process, the first sealing member 31 can be placed on the bottom surface 221 of the dovetail groove 22, and then the second sealing member 32 can be inserted into the dovetail groove 22 from the opening 223 of the dovetail groove 22, and the dovetail groove is protruded. The opening 223 of 22 (as shown in FIG. 4), at this time, the first sealing member 31 slides along the aforementioned guide surface 323 and is caught in the recess 322 below the second sealing member 32, so that the first seal can be made. The element 31 and the second sealing element 32 are enriched as much as possible in the inner space of the dovetail groove 22.

It should be understood that the extensions 321 located on both sides of the second sealing member 32 will contact the bottom surface 221 of the dovetail groove 22 after assembly, and the two extension portions 321 will be clamped to the first sealing member 31 and Between the two side walls 222 of the dovetail 22, the first sealing element 31 is clamped between the two extensions 321. Since the extension portion 321 of the second sealing member 32 in the present embodiment has flexibility, the bonding strength between the sealing assembly 30 and the first member 20 can be effectively improved by the foregoing arrangement.

For example, the first sealing element 31 may be made of a Teflon material, and the second sealing element 32 may be made of a rubber material such as a Perfluoroelastomer, a Fluoro-elastomer or a Fluorinated rubber. (Fluorosilicone). Alternatively, the first sealing member 31 and the second sealing member 32 may be made of a rubber material having the same hardness or different hardness. It should be particularly noted that the hardness of the first sealing member 31 must be greater than or equal to the hardness of the second sealing member 32 to facilitate the disassembly and assembly of the sealing assembly 30, and at the same time achieve the desired sealing effect.

In addition, as can be seen from FIG. 4, the first sealing member 31 has a third width W3 in the first axial direction (X-axis), wherein the third width W3 can be between 0.1 and 0.6 times the second width W2. In a preferred embodiment, the third width W3 may be between 0.25 and 0.35 times the second width W2 (for example, about 0.3 times). Furthermore, the dovetail groove 22 has a depth H in a second axial direction (Y-axis), and the first sealing member 31 has a height h in the second axial direction (Y-axis), wherein the second axial direction (Y-axis) The system is perpendicular to the first axial direction (X-axis), and the height h is between 0.2 and 0.7 times the depth H (preferably 0.3 to 0.5 times). In particular, the configuration of the embodiment can not only facilitate the disassembly and assembly of the sealing assembly 30, but also achieve the desired sealing effect.

Next, please refer to FIGS. 4 and 5 together, wherein FIG. 5 is a schematic view showing a state in which the connecting face 21 of the first member 20 and the connecting face 41 of the second member 40 are joined to each other. As shown in FIGS. 4 and 5, since the assembled second sealing member 32 protrudes slightly upward from the connecting face 21 of the first member 20, when the connecting face 21 of the first member 20 and the second member 40 are When the connecting faces 41 are engaged with each other, the second sealing member 32 is slightly deformed by the second member 40 while the second sealing member 32 can be in close contact with the connecting face 41 of the second member 40 to form a seal.

It should be understood that the seal assembly 30 of the present embodiment is composed of two separable different members (the first seal member 31 and the second seal member 32), wherein the second seal member 32 does not have a circular cross section, Therefore, it is difficult to cause a twist phenomenon inside the dovetail groove 22, so that the problem that the seal assembly 30 is easily broken due to the twist can be avoided. On the other hand, since the sealing assembly 30 of the present embodiment is composed of two different members, when the sealing assembly 30 is removed, the second sealing member 32 can be pulled out first, and then the first sealing member 31 is removed. The inside of the dovetail groove 22 is taken out, whereby the difficulty in attaching and detaching the seal assembly 30 can be greatly reduced, and the convenience in use can be greatly improved.

Referring to FIG. 6, FIG. 6 is a schematic view showing the sealing assembly 30 of another embodiment of the present invention combined with a first member 20. As shown in Fig. 6, the cross-sectional shape of the first sealing member 31 and the second sealing member 32 in this embodiment is different from the cross-sectional shape shown in Figs. 3 to 5, wherein the first sealing member 31 may have a polygonal shape ( For example, a triangular shape, a quadrangular shape, or other various cross-sectional shapes, the second sealing member 32 has a slightly inverted L-shaped cross section. In the present embodiment, the recessed portion 322 of the second sealing member 32 is formed asymmetrically and corresponds to the structural shape of the first sealing member 31, thereby ensuring that the two can be in close contact with each other when actuated.

It should be noted that the first sealing element 31 in this embodiment is assembled into the recessed portion 322 of the second sealing element 32 after assembly, and the first sealing element 31 simultaneously abuts the bottom surface 221 of the dovetail groove 22 and One of the side walls 222 of the dovetail groove 22 can provide a good positioning effect of the sealing assembly 30 through the bottom surface 221 and the side wall 222, thereby greatly improving the assembly efficiency of the sealing assembly 30.

Similarly, in the embodiment, the first sealing member 31 can be made of Teflon, and the second sealing member 32 can be made of rubber, such as Perfluoroelastomer, Fluoro-elastomer or Fluorosilicone. Alternatively, the first sealing member 31 and the second sealing member 32 may also be made of a rubber material having the same hardness or different hardness, but the hardness of the first sealing member 31 must be greater than or equal to the hardness of the second sealing member 32 to facilitate The assembly and assembly of the sealing assembly 30 can also achieve the desired sealing effect.

Although the embodiments of the present invention and its advantages have been disclosed as above, it should be understood that those skilled in the art can make changes, substitutions and refinements without departing from the spirit and scope of the present invention. In addition, the scope of protection of the present invention is not limited to the processes, machines, manufacturing, material compositions, devices, methods, and steps in the specific embodiments described in the specification, and any one of ordinary skill in the art may disclose the present disclosure. It is understood that the processes, machines, manufactures, compositions, devices, methods, and steps that are presently or in the future can be used in accordance with the present invention as long as they can perform substantially the same function or achieve substantially the same results in the embodiments described herein. Therefore, the scope of protection of the present invention includes the above processes, machines, manufacturing, material compositions, devices, methods and steps. In addition, each patent application scope constitutes an individual embodiment, and the scope of protection of the present invention also includes the combination of each patent application scope and embodiment.

Although the present invention has been disclosed in the preferred embodiments, it is not intended to limit the present invention. Anyone skilled in the art can make some changes and refinements without departing from the spirit and scope of the present invention. The scope of protection of this creation is subject to the definition of the scope of the patent application attached.

10‧‧‧Sealing components  10'‧‧‧ Sealing element  20‧‧‧ first component  21‧‧‧ Connection surface  22‧‧‧鸠尾槽  221‧‧‧ bottom  222‧‧‧ side wall  223‧‧‧ openings  30‧‧‧ Sealing components  31‧‧‧First sealing element  32‧‧‧Second sealing element  321‧‧‧Extension  322‧‧‧Depression  323‧‧‧guide angle  40‧‧‧ second component  41‧‧‧ Connection surface  H‧‧‧height  H‧‧‧ Depth  W1‧‧‧ first width  W2‧‧‧ second width  W3‧‧‧ third width  

1 is a schematic view showing a conventional sealing member 10 mounted inside a dovetail groove 22 of a first member 20.  Figure 2 shows a schematic view of another conventional sealing element 10' mounted within the dovetail 22 of a first member 20.  Fig. 3 is a schematic view showing the sealing assembly 30 of the embodiment of the present invention before being joined to a first member 20.  Fig. 4 is a view showing the sealing assembly 30 of Fig. 3 combined with the first member 20.  Fig. 5 is a view showing a state in which the joint surface 21 of the first member 20 and the joint surface 41 of the second member 40 are joined to each other.  Figure 6 is a schematic view showing the sealing assembly 30 of another embodiment of the present invention combined with a first member 20.  

Claims (18)

A seal assembly is disposed in a dovetail groove of a first member for engaging the first member with a second member, wherein the dovetail groove has a bottom surface and an opening, the opening having a first axial direction a first width having a second width in the first axial direction, wherein the second width is greater than the first width, the sealing assembly comprising:  a first sealing member disposed on the bottom surface of the dovetail groove;  a second sealing member is disposed on the first sealing member and protrudes from the opening, wherein the second sealing member has a recessed portion, and the first sealing member is located in the recessed portion.   The sealing assembly of claim 1, wherein the second sealing member further has two extending portions on opposite sides of the recessed portion, and the extending portions contact the bottom surface of the dovetail groove, wherein the A sealing element is interposed between the extensions. The seal assembly of claim 1, wherein the first seal member has a hardness greater than a hardness of the second seal member. The seal assembly of claim 1, wherein the first seal member has a hardness equal to the hardness of the second seal member. The seal assembly of claim 1, wherein the first seal member has a Teflon material. The sealing assembly of claim 1, wherein the second sealing member has a rubber material. The sealing assembly of claim 1, wherein the second sealing member has a perfluororubber material. The seal assembly of claim 1, wherein the first seal member has a circular cross section. The seal assembly of claim 1, wherein the first seal member has a polygonal cross section. The sealing assembly of claim 1, wherein the first sealing element has a third width in the first axial direction, wherein the third width is between 0.1 and 0.6 times the second width. The sealing assembly of claim 1, wherein the first sealing member has a third width in the first axial direction, wherein the third width is 0.25 to 0.35 times the second width. The seal assembly of claim 1, wherein the dovetail groove has a depth in a second axial direction, and the first sealing element has a height in the second axial direction, wherein the second axial direction is vertical In the first axial direction, and the height is between 0.2 and 0.7 times the depth. The seal assembly of claim 1, wherein the dovetail groove has a depth in a second axial direction, and the first sealing element has a height in the second axial direction, wherein the second axial direction is vertical In the first axial direction, and the height is 0.3 to 0.5 times the depth. The sealing assembly of claim 1, wherein the dovetail groove further has a side wall connecting the opening and the bottom surface, wherein the first sealing member is located in the recess and simultaneously contacts the bottom surface and the side wall. The seal assembly of claim 1, wherein the second seal member has an inverted U-shaped cross section. The seal assembly of claim 1, wherein the second seal member has an inverted L-shaped cross section. The seal assembly of claim 1, wherein the second seal member has an asymmetrical structure. The sealing assembly of claim 1, wherein the first member is a wall or a gate of one of the processing chambers of the semiconductor processing device.