TWM576656U - Displacement measuring mechanism for automated equipment - Google Patents

Displacement measuring mechanism for automated equipment Download PDF

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Publication number
TWM576656U
TWM576656U TW107209290U TW107209290U TWM576656U TW M576656 U TWM576656 U TW M576656U TW 107209290 U TW107209290 U TW 107209290U TW 107209290 U TW107209290 U TW 107209290U TW M576656 U TWM576656 U TW M576656U
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Taiwan
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scale
linear slide
measuring mechanism
disposed
displacement measuring
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TW107209290U
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Chinese (zh)
Inventor
黃懿華
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英屬維京群島商詮優科技有限公司
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Priority to TW107209290U priority Critical patent/TWM576656U/en
Publication of TWM576656U publication Critical patent/TWM576656U/en

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Abstract

一種自動化設備之位移量測機構,自動化設備至少具一機座、至少一沿一工作軸線平行於機座的荷重線性滑軌、一平行於荷重線性滑軌的驅動單元及一與荷重線性滑軌及驅動單元連結的滑台,該驅動單元藉一滑座與滑台連接。該位移量測機構包含一刻度尺,安置在機座上且平行於工作軸線。一非荷重線性滑軌,安置於機座上,該刻度尺安置在該非荷重線性滑軌上。一線性滑座,連結於該滑台。一讀頭,連結於線性滑座且對應於刻度尺。將刻度尺靠近於工作軸線的安置方式,除安裝簡易之外,也不受既有線性滑軌產品的尺寸之限制,更有利於量產化,以降低成本。 A displacement measuring mechanism for an automatic device, the automation device having at least one base, at least one load linear slide parallel to the base along a working axis, a drive unit parallel to the load linear slide and a load linear slide And a sliding table connected to the driving unit, the driving unit is connected to the sliding table by a sliding seat. The displacement measuring mechanism includes a scale disposed on the base and parallel to the working axis. A non-loading linear slide rail is disposed on the base, and the scale is disposed on the non-load linear slide. A linear slide is coupled to the slide. A read head is attached to the linear slide and corresponds to the scale. The installation method of placing the scale close to the working axis, in addition to the simple installation, is not limited by the size of the existing linear slide product, and is more advantageous for mass production to reduce the cost.

Description

自動化設備之位移量測機構 Displacement measuring mechanism for automated equipment

本創作是有關於一種位移量測裝置,特別是有關於一種拆裝簡易方便,且量測精確度高、成本低的自動化設備之位移量測機構。 The present invention relates to a displacement measuring device, in particular to a displacement measuring mechanism for an automatic device which is easy to assemble and disassemble, has high measurement accuracy and low cost.

線性編碼器,包含有光學編碼器(Linear Encoder)、磁性編碼器(Magnetic encoder)、雷射編碼器(Laser Encoder)等,一般通稱為光學尺,光學尺是一種融合了機電原理的光學裝置,主要用來監視自動化設備中操作機構的運動狀態,並測得其行進距離,讓自動化設備能如期完成預設的操作動作。 The linear encoder includes a linear encoder, a magnetic encoder, a laser encoder, etc., and is generally called an optical scale. The optical scale is an optical device incorporating an electromechanical principle. It is mainly used to monitor the motion state of the operating mechanism in the automation equipment, and measure the travel distance, so that the automation equipment can complete the preset operation actions as scheduled.

由於光學尺在自動化控制設備(如工具機)中,能有效降低滾珠螺桿熱膨脹所造成的定位誤差,以增加加工精度、提升工件品質,所以已成為主要的位置量測裝置之一,而現有的光學尺依照安裝方式而言,主要可分為外加式與內建式兩種。 Since the optical ruler can effectively reduce the positioning error caused by the thermal expansion of the ball screw in the automatic control equipment (such as the machine tool) to increase the machining accuracy and improve the quality of the workpiece, it has become one of the main position measuring devices, and the existing one. According to the installation method, the optical ruler can be mainly divided into external type and built-in type.

如第6圖所示,即為一種現有外加式的光學尺,這種光學尺是1安裝在工具機的一荷重線性滑軌2一側,令光學尺1的尺身與荷重線性滑軌2平行設置,並在一荷重滑座3上安裝一讀頭4,讓讀頭4接近並對應於光學尺1,當該讀頭4受動於該荷重滑座3而相對於該光學尺1作位移,進而能取得位移數據。 As shown in Fig. 6, it is an existing external optical scale which is mounted on the side of a load-bearing linear slide 2 of the machine tool, so that the ruler of the optical scale 1 and the load linear slide 2 Parallelly disposed, and a read head 4 is mounted on a load slide 3, the read head 4 is brought close to and corresponds to the optical scale 1, and the read head 4 is displaced relative to the optical scale 1 when it is driven by the load slide 3 In order to obtain displacement data.

但這種外加式的光學尺1,不但怕油污(判讀失真),而且還容易因外力撞擊而損壞,更麻煩的是,基於光學尺1必須和荷重線性滑軌2 保持平行度的要求,加上荷重線性滑軌2周側通常僅留有狹窄的組裝空間,這造成了光學尺1在安裝上的困難,假設所面對的機具其負載平台屬於較長移動行程者(如龍門型銑床),所組配的光學尺的有效量程也必須更長,如此一來,組裝人員除了需面對組裝空間狹窄的問題之外,在進行人工校正光學尺1和荷重線性滑軌2的平行度時,更是一大挑戰,並徒增人工校正的困難度。 However, the external optical ruler 1 is not only afraid of oil stain (interpretation distortion), but also easily damaged by external force impact, and more troublesome, based on the optical ruler 1 and the load-bearing linear slide 2 The requirement of maintaining parallelism, plus the 2 weeks side of the load linear slide rail, usually only leaves a narrow assembly space, which makes the optical scale 1 difficult to install, assuming that the load platform of the implement is a longer moving stroke. In the case of a gantry type milling machine, the effective range of the assembled optical scale must also be longer. As a result, the assembler is required to manually correct the optical scale 1 and load linearity in addition to the problem of narrow assembly space. The parallelism of the slide rail 2 is even more challenging, and the difficulty of manual correction is increased.

然而,為克服如前述外加式光學尺1,其人工校正困難的安裝問題,如第7圖所示,另一種內建式的磁性尺5,則藉助於工具機其荷重線性滑軌2平行於工具機的工作軸線而設,所以直接將磁性尺5安裝在荷重線性滑軌2兩側的滑槽6上,校正上較光學尺來得容易,但是,一般通用的荷重線性滑軌2其滑槽6高度有限,約僅60mm左右,安裝空間相當窄小,而且,因磁性尺5的解析度低於光學尺的解析度,所以越小尺寸的磁性尺其解析度則越低,礙於量測精確度的使用需求,內建式的磁性尺5並不利於安裝小型的磁性尺(如35mm以下小尺寸的磁性尺),否則精度不高,另外,磁性尺5的價格昂貴,使用越大尺寸的磁性尺,將使成本大為增加。 However, in order to overcome the external optical scale 1 as described above, it manually corrects difficult installation problems, as shown in Fig. 7, another built-in magnetic ruler 5, with the aid of the machine tool, the load linear slide 2 is parallel to The working axis of the machine tool is set, so that the magnetic ruler 5 is directly mounted on the chute 6 on both sides of the load-bearing linear slide rail 2, and it is easy to correct the upper optical scale. However, the general-purpose load-bearing linear slide rail 2 has its chute. 6 height is limited, about 60mm, the installation space is quite narrow, and because the resolution of the magnetic ruler 5 is lower than the resolution of the optical scale, the lower the resolution of the magnetic ruler, the lower the resolution, hindering the measurement. The need for precision, the built-in magnetic ruler 5 is not conducive to the installation of small magnetic feet (such as small size magnetic feet below 35mm), otherwise the accuracy is not high, in addition, the magnetic rule 5 is expensive, the larger the size The magnetic ruler will greatly increase the cost.

綜上,外加式光學尺1其人工校正困難,且安置在荷重線性滑軌2外部,不但怕油污,且抗振力很弱,容易損壞,而內建式的磁性尺5雖較不怕油污,但價格昂貴,抗振力也很弱,因此,不論是外加式的光學尺1或是內建式的磁性尺5,其共通的問題在於,抗振力弱,且容易遭外力撞擊而損壞,一但有損壞問題,很難拆卸下來,甚至於根本不能拆,除非將整個機台組件全部拆卸,故維修相當困難。 In summary, the external optical scale 1 is difficult to manually correct and is placed outside the load-bearing linear slide 2, which is not only afraid of oil pollution, but also has weak anti-vibration force and is easily damaged, while the built-in magnetic ruler 5 is less afraid of oil stains. However, the price is high and the anti-vibration resistance is also very weak. Therefore, whether it is an external optical scale 1 or a built-in magnetic ruler 5, the common problem is that the anti-vibration force is weak and is easily damaged by external impact. However, there is a problem of damage, it is difficult to disassemble, or even can not be removed at all, unless the entire machine assembly is completely disassembled, so maintenance is quite difficult.

另外,因內建式磁性尺之量測精度有限的使用問題,如第8圖所示,所以亦有業者在該荷重線性滑軌2的滑槽6兩側各安裝一只磁性尺5、7,一只是增量式(incremental)的磁性尺5,另一只是絕對式(absolute)的磁性尺7,如此一來,不但增加使用成本,量測誤差之改善也很有限,而 且在左、右滑槽6上各安裝一只磁性尺5、7,不論在安裝、拆裝上,都困難許多。 In addition, due to the limited measurement accuracy of the built-in magnetic ruler, as shown in Fig. 8, a manufacturer also installs a magnetic ruler 5, 7 on each side of the chute 6 of the load-bearing linear slide 2. One is an incremental magnetic ruler 5, and the other is an absolute magnetic ruler 7. As a result, the cost of use is increased, and the measurement error is limited. A magnetic ruler 5, 7 is mounted on each of the left and right chutes 6, which is difficult to install and disassemble.

本創作的自動化設備之位移量測機構,將在靠近於工作軸線處裝設刻度尺,不但組裝容易,更有利於拆卸之方便性。 The displacement measuring mechanism of the automated device of the present invention will be equipped with a scale near the working axis, which is not only easy to assemble, but also facilitates the convenience of disassembly.

本創作的自動化設備之位移量測機構,因為在靠近於工作軸線處裝設刻度尺,所以刻度尺也不受尺寸之限制,有利於刻度尺大量生產之優點,以降低製造及使用成本。 In the displacement measuring mechanism of the automatic device of the present invention, since the scale is installed close to the working axis, the scale is not limited by the size, which is advantageous for the mass production of the scale to reduce the manufacturing and use cost.

本創作的自動化設備之位移量測機構,由於刻度尺的安裝位置位於自動化設備的工作軸線(加工點)上,兩者相重合而位於同一直線,工作誤差極為微小,更可獲得最高的加工精確度。 The displacement measuring mechanism of the automatic equipment of the present invention, because the installation position of the scale is located on the working axis (machining point) of the automation equipment, the two coincide with each other and lie on the same straight line, the working error is extremely small, and the highest machining precision can be obtained. degree.

因此,本創作所提出之一種自動化設備之位移量測機構,該自動化設備至少具有一機座、至少一沿著一工作軸線平行安置在該機座上的荷重線性滑軌、一與該荷重線性滑軌平行設置的驅動單元,及一與該荷重線性滑軌及該驅動單元連結的滑台,該驅動單元桿藉一滑座與該滑台連接,該位移量測機構包含有:一刻度尺,安置在該機座上,且平行於該工作軸線。一非荷重的線性滑軌,安置於該機座上,該刻度尺安置在該非荷重的線性滑軌上。一線性滑座,連結於該滑台。一讀頭,連結於該線性滑座,並且對應於該刻度尺。 Therefore, the displacement measuring mechanism of the automatic device proposed by the present invention has at least one base, at least one load linear slide rail disposed parallel to the base along a working axis, and a load linearity a driving unit parallel to the sliding rail, and a sliding table coupled to the load linear sliding rail and the driving unit, the driving unit rod is connected to the sliding table by a sliding seat, and the displacement measuring mechanism comprises: a scale , placed on the base and parallel to the working axis. A non-loaded linear slide rail is disposed on the base, and the scale is disposed on the non-load linear slide rail. A linear slide is coupled to the slide. A read head is coupled to the linear slide and corresponds to the scale.

依照本創作上述之自動化設備之位移量測機構,其中,更包含一固定架,該線性滑座固定於該滑座上,該固定架安置在該線性滑座上,且靠近於該驅動單元,該讀頭安置於該固定架上,藉由該滑座驅動該線性滑座並同步帶動該固定架之位移進而連動該讀頭,致使該讀頭相對於該刻度尺作位移,進而取得位移數據。 The displacement measuring mechanism of the above-mentioned automatic device according to the present invention further includes a fixing frame, the linear sliding seat is fixed on the sliding seat, and the fixing frame is disposed on the linear sliding seat and adjacent to the driving unit. The read head is disposed on the fixing frame, and the sliding carriage drives the linear sliding seat to synchronously drive the displacement of the fixing frame to interlock the reading head, so that the reading head is displaced relative to the scale, thereby obtaining displacement data. .

依照本創作上述之自動化設備之位移量測機構,其中,該刻度尺靠近於該驅動單元,且鄰近於該工作軸線。 The displacement measuring mechanism of the above-described automatic device according to the present invention, wherein the scale is adjacent to the driving unit and adjacent to the working axis.

依照本創作上述之自動化設備之位移量測機構,其中,該刻度尺的安裝位置是軸對於該自動化設備的工作軸線。 According to the creation of the displacement measuring mechanism of the above-mentioned automatic device, the mounting position of the scale is the working axis of the shaft for the automation device.

依照本創作上述之自動化設備之位移量測機構,其中,該機座更設有一基準平台,該基準平台平行於該荷重線性滑軌,該非荷重的線性滑軌倚靠在該基準平台上,以使該非荷重的線性滑軌與該荷重線性滑軌平行設置。 The displacement measuring mechanism of the above-mentioned automatic device according to the present invention, wherein the base further comprises a reference platform parallel to the load linear slide, the non-load linear slide resting on the reference platform, so that The non-loaded linear slide is disposed in parallel with the load linear slide.

依照本創作上述之自動化設備之位移量測機構,其中,該刻度尺與該讀頭組成一線性編碼器,該線性編碼器為磁性編碼器、光學編碼器、雷射編碼器中的任一個。 According to the present invention, the displacement measuring mechanism of the above-mentioned automatic device, wherein the scale and the read head constitute a linear encoder, which is any one of a magnetic encoder, an optical encoder, and a laser encoder.

依照本創作上述之自動化設備之位移量測機構,其中,該驅動單元為滾珠螺桿、尺條及齒輪、線性馬達之任一個。 According to the creation of the displacement measuring mechanism of the above-mentioned automatic device, the driving unit is any one of a ball screw, a ruler and a gear, and a linear motor.

本創作之另一種自動化設備之位移量測機構,該自動化設備至少具有一機座、至少一沿著一工作軸線平行安置在該機座上的荷重線性滑軌、一與該荷重線性滑軌平行設置的驅動單元,及一與該荷重線性滑軌及該驅動單元連結的滑台,該驅動單元藉一滑座與該滑台連接,該位移量測機構包含有:一刻度尺,安置在該滑台上,且平行於該工作軸線。一非荷重的線性滑軌,安置於該滑台上,該刻度尺安置在該非荷重的線性滑軌上。一線性滑座,連結於該機座。一讀頭,連結於該線性滑座,並且對應於該刻度尺。 Another displacement measuring mechanism of the automated device of the present invention, the automation device having at least one base, at least one load linear slide rail disposed parallel to the base along a working axis, and a load parallel to the load linear slide a driving unit, and a sliding table coupled to the load linear sliding rail and the driving unit, wherein the driving unit is connected to the sliding table by a sliding seat, the displacement measuring mechanism comprises: a scale disposed thereon On the slide table, parallel to the working axis. A non-loaded linear slide rail is disposed on the slide table, and the scale is disposed on the non-load linear slide rail. A linear slide is attached to the base. A read head is coupled to the linear slide and corresponds to the scale.

依照本創作上述之自動化設備之位移量測機構,其中,更包含一固定架,該固定架安置在該線性滑座上,且靠近於該驅動單元,該讀頭安置在該固定架上,靠近並對應於該刻度尺。 The displacement measuring mechanism of the above-mentioned automatic device according to the present invention further includes a fixing frame disposed on the linear sliding seat and adjacent to the driving unit, the reading head is disposed on the fixing frame, close to And corresponds to the scale.

依照本創作上述之自動化設備之位移量測機構,其中,該刻 度尺靠近於該驅動單元,且鄰近於該工作軸線。 According to the creation of the above-mentioned displacement measuring mechanism of the automatic device, wherein, at the moment A ruler is adjacent to the drive unit and adjacent to the working axis.

依照本創作上述之自動化設備之位移量測機構,其中,該刻度尺與該讀頭組成一線性編碼器,該線性編碼器為磁性編碼器、光學編碼器、雷射編碼器中的任一個。 According to the present invention, the displacement measuring mechanism of the above-mentioned automatic device, wherein the scale and the read head constitute a linear encoder, which is any one of a magnetic encoder, an optical encoder, and a laser encoder.

依照本創作上述之自動化設備之位移量測機構,其中,該驅動單元為滾珠螺桿、尺條及齒輪、線性馬達之任一個。 According to the creation of the displacement measuring mechanism of the above-mentioned automatic device, the driving unit is any one of a ball screw, a ruler and a gear, and a linear motor.

據上所述,相較於現有光學尺的平行度安裝不易,現有內建式磁性尺不利於工具機整體製造設計,以及兩者都難以拆卸維修等問題。本創作的自動化設備之位移量測機構中,將刻度尺靠近於該工作軸線的安裝方式,除具有拆裝簡易之外,也不受尺寸之限制,而且,還有利於刻度尺大量生產之優點,以降低成本。此外,再透過非荷重線性滑軌的設置,使該刻度尺在安裝上更加便利,並與該工作軸線(加工路徑)恆保平行,以確保位移量測的精確度,更有效減低工作誤差。 According to the above, compared with the parallelism of the existing optical scale, the installation is not easy, and the existing built-in magnetic ruler is not conducive to the overall manufacturing design of the machine tool, and the problems that both are difficult to disassemble and repair. In the displacement measuring mechanism of the automatic device of the present invention, the installation method of placing the scale close to the working axis is not limited by the size, and is also advantageous for the mass production of the scale. To reduce costs. In addition, through the setting of the non-loading linear slide rail, the scale is more convenient to install and parallel with the working axis (machining path) to ensure the accuracy of the displacement measurement and more effectively reduce the working error.

本案: The case:

10‧‧‧機座 10‧‧‧ machine base

11‧‧‧基準平台 11‧‧‧ benchmark platform

20‧‧‧線性滑軌 20‧‧‧Linear slides

21‧‧‧滑座 21‧‧‧Slide

30‧‧‧驅動單元 30‧‧‧Drive unit

31‧‧‧滑座 31‧‧‧Slide

40‧‧‧滑台 40‧‧‧ slide table

50‧‧‧位移量測機構 50‧‧‧ Displacement measuring mechanism

51‧‧‧刻度尺 51‧‧‧ scale

52‧‧‧讀頭 52‧‧‧Reading

53‧‧‧非荷重線性滑軌 53‧‧‧ Non-load linear slides

531‧‧‧軌道 531‧‧‧ Track

54‧‧‧線性滑座 54‧‧‧linear slide

541‧‧‧鎖點 541‧‧‧ lock points

55‧‧‧固定架 55‧‧‧Retaining frame

60‧‧‧加工刀具 60‧‧‧Processing tools

61‧‧‧工件 61‧‧‧Workpiece

70‧‧‧固定架 70‧‧‧ fixed frame

80‧‧‧旋轉軸承 80‧‧‧Rotary bearings

81‧‧‧內圈 81‧‧‧ inner circle

82‧‧‧外圈 82‧‧‧Outer ring

90‧‧‧加工刀具 90‧‧‧Processing tools

100‧‧‧自動化設備 100‧‧‧Automation equipment

L‧‧‧工作軸線 L‧‧‧Working axis

A‧‧‧加工點 A‧‧‧Processing point

S‧‧‧距離 S‧‧‧ distance

先前技術: Prior art:

1‧‧‧荷重線性滑軌 1‧‧‧Load linear slide

2‧‧‧滑軌 2‧‧‧Slide rails

3‧‧‧光學尺 3‧‧‧ optical ruler

4‧‧‧荷重滑座 4‧‧‧Load slide

5‧‧‧讀頭 5‧‧‧Reading

6‧‧‧磁性尺 6‧‧‧Magnetic ruler

7‧‧‧滑槽 7‧‧‧Chute

8‧‧‧磁性尺 8‧‧‧Magnetic ruler

第1圖為本創作自動化設備之位移量測機構第一較佳實施例的組合圖。 1 is a combination diagram of a first preferred embodiment of a displacement measuring mechanism of an authoring automation device.

第2圖為該讀頭藉由該固定架安置在線性滑座上的示意圖。 Figure 2 is a schematic view of the read head mounted on the linear slide by the holder.

第3圖為相類似於第1圖的視圖,是說明該位移量測機構安裝在稍偏離工作軸線上。 Figure 3 is a view similar to Figure 1 illustrating the displacement measuring mechanism mounted slightly off the working axis.

第4圖為本創作自動化設備之位移量測機構第二較佳實施例的組合圖。 Figure 4 is a combination diagram of a second preferred embodiment of the displacement measuring mechanism of the authoring automation device.

第5圖為該位移量測機構運用於一旋轉軸承上的示意圖。 Figure 5 is a schematic view of the displacement measuring mechanism applied to a rotating bearing.

第6圖為現有的光學尺安裝於荷重線性滑軌上的示意圖。 Figure 6 is a schematic view of a conventional optical scale mounted on a load-bearing linear slide.

第7圖為現有的磁性尺與荷重線性滑軌的平面圖。 Figure 7 is a plan view of a conventional magnetic ruler and load linear slide.

第8圖為現有兩個磁性尺安裝於荷重線性滑軌兩側的示意圖。 Figure 8 is a schematic view showing the mounting of two magnetic feet on both sides of the load linear slide.

參照第1、2圖所示,本創作自動化設備之位移量測機構的第一較佳實施例,該自動化設備100至少具有一機座10、至少一沿著一工作軸線L平行安置在該機座10上的荷重線性滑軌20、一與該荷重線性滑軌20平行設置的驅動單元30,及一連結於該荷重線性滑軌20及該驅動單元30的滑台40,該荷重線性滑軌20、該驅動單元30和該滑台40之間分別藉由一滑座21與一滑座31之連接,致使該滑台40藉由各該滑座21、該滑座31而在該荷重線性滑軌20、該驅動單元30上滑動,以進行左移或右移之直線運動。其中,該驅動單元30為滾珠螺桿(Ballscrew)、尺條及齒輪(Rack and Pinion)、線性馬達(Linear Motor)之任一個,本實施例,該驅動單元30是以滾珠螺桿為例。 Referring to Figures 1 and 2, in a first preferred embodiment of the displacement measuring mechanism of the present invention, the automation device 100 has at least one base 10, at least one of which is placed in parallel along a working axis L. a load linear slide 20 on the seat 10, a drive unit 30 disposed parallel to the load linear slide 20, and a slide 40 coupled to the load linear slide 20 and the drive unit 30, the load linear slide 20, the driving unit 30 and the sliding table 40 are respectively connected to a sliding seat 31 by a sliding seat 21, so that the sliding table 40 is linearly loaded by the sliding seat 21 and the sliding seat 31. The slide rail 20 and the driving unit 30 slide to perform a linear motion of moving left or right. The driving unit 30 is any one of a ball screw (Ballscrew), a ruler and a gear (Rack and Pinion), and a linear motor. In the embodiment, the driving unit 30 is a ball screw.

本創作的特點在於,該位移量測機構50,包含有一刻度尺(Graduation,俗稱Scale)51、一讀頭52、一非荷重線性滑軌53及一線性滑座54。 The present invention is characterized in that the displacement measuring mechanism 50 includes a scale (Graduation, commonly known as Scale) 51, a read head 52, a non-load linear slide 53 and a linear slide 54.

該刻度尺51,安置在該機座10上,平行且鄰近於該工作軸線L,並且靠近於該驅動單元30。本實施例中,該刻度尺51及該讀頭52組成一線性編碼器,該線性編碼器包含有磁性編碼器(Magnetic encoder,亦稱磁性尺)、光學編碼器(Linear Encoder,亦稱光學尺)、雷射編碼器(Laser Encoder,亦稱雷射光學尺)等。此外,基於磁性尺具有抗油耐污的優點,故本創作該刻度尺51更以使用磁性尺為最佳。 The scale 51 is disposed on the base 10 in parallel and adjacent to the working axis L and adjacent to the drive unit 30. In this embodiment, the scale 51 and the read head 52 form a linear encoder, which includes a magnetic encoder (also known as a magnetic scale) and an optical encoder (a linear encoder). ), laser encoder (Laser Encoder, also known as laser optical ruler). In addition, since the magnetic ruler has the advantage of being resistant to oil and stain, the scale 51 is preferably optimized to use a magnetic ruler.

該非荷重線性滑軌53,安置於該機座10上,該刻度尺51安置在該非荷重線性滑軌53上。 The non-loading linear slide rail 53 is disposed on the base 10, and the scale 51 is disposed on the non-loading linear slide rail 53.

該線性滑座54,連結於該滑台40。 The linear slider 54 is coupled to the slide table 40.

該讀頭52,連結於該線性滑座54,並且對應於該刻度尺51。本實施例中,該讀頭52是一解碼器(Decoder),用以解讀該刻度尺51的位置資料,再由一控制中心(圖未示)作運算控制,以達到控制該滑台40執行右移或右移之運動,由於該控制中心並非本案主要訴求重點,故在此不再多加說明。 The read head 52 is coupled to the linear slider 54 and corresponds to the scale 51. In this embodiment, the read head 52 is a decoder (Decoder) for interpreting the position data of the scale 51, and then being controlled by a control center (not shown) to control the execution of the slide 40. The movement of right shift or right shift, because the control center is not the main appeal of this case, it will not be explained here.

該位移量測機構50更包含一固定架55,該線性滑座54連結於該滑座31上,該固定架55安置在該線性滑座54上,且連結於該驅動單元30,該讀頭52安置於該固定架55上。實施上,該非荷重線性滑軌53可於製造該機座10時,一併設置於該機座10上,如此一來,將該刻度尺51安置在該非荷重線性滑軌53一側的軌道531上,並且透過該固定架55來安裝該讀頭52,便能藉由該滑座31驅動該線性滑座54,並同步帶動該固定架55之位移進而連動該讀頭52,使該讀頭52相對於該刻度尺51作位移,進而取得位移數據。 The displacement measuring mechanism 50 further includes a fixing bracket 55. The linear sliding seat 54 is coupled to the sliding seat 31. The fixing bracket 55 is disposed on the linear sliding seat 54 and coupled to the driving unit 30. The reading head 52 is disposed on the fixing frame 55. In practice, the non-loading linear slide rail 53 can be disposed on the base 10 when the base 10 is manufactured. Thus, the scale 51 is disposed on the track 531 on the side of the non-load-loaded linear slide 53. The read head 52 is mounted on the fixing frame 55, and the linear slider 54 is driven by the sliding seat 31, and the displacement of the fixing frame 55 is synchronously driven to interlock the reading head 52 to make the reading head. 52 is displaced relative to the scale 51 to obtain displacement data.

此外,如第2圖所示,在實施上,該自動化設備的機座10更具有一基準平台11,該基準平台11和第1圖中的荷重線性滑軌20平行設置,因此,當裝設該位移量測機構50時,直將該非荷重線性滑軌53貼靠在該基準平台11上,以使該非荷重線性滑軌53和該荷重線性滑軌20平行設置,藉此則無須再作校正,載設其上的刻度尺51便與一加工刀具60之加工點A平行對位(見第1圖),組裝快速且精確,以省去再次校正之不便。 In addition, as shown in FIG. 2, in practice, the base 10 of the automation device further has a reference platform 11 which is disposed in parallel with the load-bearing linear slide 20 in FIG. 1, so that when installed When the displacement measuring mechanism 50 is positioned, the non-loading linear slide rail 53 is directly abutted on the reference platform 11 so that the non-loading linear slide rail 53 and the load linear slide rail 20 are arranged in parallel, thereby eliminating the need for correction. The scale 51 placed thereon is aligned parallel to the machining point A of the machining tool 60 (see Fig. 1), and the assembly is fast and accurate, so as to save the inconvenience of recalibration.

本實施例中,該位移量測機構50包含運用於自動化設備機100的各個工作軸線上,例如裝設在靠近於X軸、Y軸、Z軸的驅動單元(滾珠螺桿)一側。 In the present embodiment, the displacement measuring mechanism 50 is included on each working axis of the automatic equipment machine 100, for example, mounted on the side of the driving unit (ball screw) close to the X-axis, the Y-axis, and the Z-axis.

因此,本創作自動化設備之位移量測機構,將該刻度尺51 靠近於該驅動單元30的安裝方式,由於該驅動單元30周圍空間較寬敞,除有利於拆裝之外,更無受限地能安裝各式大小尺寸的刻度尺51,所以該刻度尺51在無尺寸限制的情況下,將可大量生產,以降低製造成本,並適用於各式機型的自動化設備(工具機)。其次,基於該刻度尺51的安裝位置是軸對於自動化設備100對一工件61進行加工的加工點A上,該加工點A與該工作軸線L重合而位於同一直線,角度偏差等於零或驅近於零,阿貝誤差(Abbe error)相當微小,所以,將讀頭52安置在該滑座31一側以對應於該刻度尺51,就能隨著滑台40之位移,透過該讀頭52讀取該刻度尺51的位置資料,正確且無誤地控制該滑台40執行右移或右移的直線運動,以利於工件61之切削作業,並且獲得最高的加工精確度。 Therefore, the displacement measuring mechanism of the authoring automation device, the scale 51 Close to the mounting manner of the driving unit 30, since the space around the driving unit 30 is relatively spacious, in addition to facilitating disassembly and assembly, more than a limited size of the scale 51 can be installed, so the scale 51 is In the case of no size limitation, it can be mass-produced to reduce manufacturing costs and is suitable for various types of automation equipment (tool machines). Secondly, based on the mounting position of the scale 51, the machining point A for machining a workpiece 61 by the automation device 100 is coincident with the working axis L and is in the same straight line, the angular deviation is equal to zero or close to Zero, the Abbe error is quite small, so that the read head 52 is placed on the side of the slider 31 to correspond to the scale 51, and can be read through the read head 52 as the slide 40 is displaced. Taking the position data of the scale 51, the linear movement of the slide 40 to perform right shift or right shift is controlled correctly and without error to facilitate the cutting work of the workpiece 61 and obtain the highest machining accuracy.

另外,如第3圖所示,將該位移量測機構50安裝在該滑座31的一側,使得該讀頭52對應於該刻度尺51,該刻度尺51安裝在該驅動單元30周側,並鄰靠於工作軸線L,由於該刻度尺51與驅動單元30之間的距離S相當短,距離S數值很微小,幾乎驅近於零,阿貝誤差(Abbe error)亦相當微小,所以,工件61進行切削作業時,亦能獲得高度的加工精確度。 Further, as shown in FIG. 3, the displacement measuring mechanism 50 is mounted on one side of the carriage 31 such that the read head 52 corresponds to the scale 51, and the scale 51 is mounted on the circumferential side of the drive unit 30. And adjacent to the working axis L, since the distance S between the scale 51 and the driving unit 30 is relatively short, the distance S value is very small, almost approaching zero, and the Abbe error is also relatively small, so When the workpiece 61 performs cutting work, a high degree of machining accuracy can also be obtained.

參照第4圖所示,本創作自動化設備之位移量測機構的第二較佳實施例,該自動化設備100至少具有一機座10、至少一沿著一工作軸線L(加工點A)平行安置在該機座10上的荷重線性滑軌20、一與該荷重線性滑軌20平行設置的驅動單元30,及一連結於該荷重線性滑軌20及該驅動單元30的滑台40,該荷重線性滑軌20、該驅動單元30和該滑台40之間分別藉由一滑座21與一滑座31之連接,致使該滑台40藉由各該滑座21、該滑座31而在該荷重線性滑軌20、該驅動單元30上滑動,以進行左移或右移之直線運動。其中,該驅動單元30為滾珠螺桿、尺條及齒輪、線性馬達之任一個,本實施例,該驅動單元30是以滾珠螺桿為例。 Referring to FIG. 4, in a second preferred embodiment of the displacement measuring mechanism of the present invention, the automation device 100 has at least one base 10 and at least one parallelly disposed along a working axis L (machining point A). a load linear slide rail 20 on the base 10, a drive unit 30 disposed in parallel with the load linear slide rail 20, and a slide table 40 coupled to the load linear slide rail 20 and the drive unit 30, the load The linear slide rail 20, the driving unit 30 and the sliding table 40 are respectively connected to a sliding seat 31 by a sliding seat 21, so that the sliding table 40 is located by the sliding seat 21 and the sliding seat 31. The load linear slide 20 is slid on the driving unit 30 for linear movement of left shift or right shift. The driving unit 30 is any one of a ball screw, a ruler and a gear, and a linear motor. In the embodiment, the driving unit 30 is a ball screw.

該第二實施例中,該位移量測機構50,包含有一刻度尺51、 一讀頭52、一設置於該滑台40上的非荷重線性滑軌53及一連結於該機座10上的線性滑座54,該刻度尺51安置在非荷重線性滑軌53而與該滑台40連結,平行且鄰近於該工作軸線L,該讀頭52固定於該線性滑座54而連結於該機座10,並且對應於該刻度尺51,本實施例中,更包含一固定架70,該固定架70是安置於該機座10上,且靠近於該驅動單元30,而該讀頭52安置在該固定架70上,靠近並對應於該刻度尺51。藉此,將該刻度尺51平行靠近於該工作軸線L而安裝在該滑台40上,而將該讀頭52透過固定架70的支撐架設而連結於機座10上,並且靠近於該刻度尺51,即可透過該滑台40帶動刻度尺51相對該讀頭52作位移,亦能取得位移數據,並且達到與上述實施例相同的使用功效,此不再多加說明。 In the second embodiment, the displacement measuring mechanism 50 includes a scale 51, a read head 52, a non-loading linear slide 53 disposed on the slide 40, and a linear slide 54 coupled to the base 10, the scale 51 being disposed on the non-load linear slide 53 and The sliding table 40 is coupled to be parallel and adjacent to the working axis L. The reading head 52 is fixed to the linear sliding seat 54 and coupled to the base 10, and corresponds to the scale 51. In this embodiment, a fixed portion is further included. The holder 70 is disposed on the base 10 and adjacent to the driving unit 30, and the reading head 52 is disposed on the fixing frame 70, adjacent to and corresponding to the scale 51. Thereby, the scale 51 is mounted on the slide table 40 in parallel with the working axis L, and the read head 52 is coupled to the base 10 through the support erection of the fixing frame 70, and is close to the scale. The ruler 51 can drive the scale 51 to be displaced relative to the read head 52 through the slide table 40, and can also obtain the displacement data, and achieve the same use effect as the above embodiment, which will not be further explained.

歸納上述,由於本創作該位移量測機構50捨棄原有將光學尺(磁性尺)配設在荷重線性滑軌上的方式,而是改以獨立的小型滑軌模式裝設在機台上,其非荷重線性滑軌53並不擔負支撐滑台40的作用,而是另外單純作為位移感測器(scale)的功能來使用,因此,本創作該刻度尺51不再受到現有荷重線性滑軌截面形狀、尺寸的限制,一方面有利於組裝者可視組裝空間來安裝該位移量測機構50,也因此,本創作除具有拆裝、維修簡易的優點之外,也不受原有滑軌尺寸之限制,而且,本創作的位移量測機構50還可以採用現有的小型滑軌,大量生產之優點,以降低成本。此外,再透過非荷重線性滑軌53設置,使該刻度尺51在安裝上更加便利,並與該工作軸線L(加工路徑)恆保平行,以確保位移量測的精確度,更有效減低工作誤差。 In summary, since the displacement measuring mechanism 50 of the present invention discards the original method of arranging the optical ruler (magnetic ruler) on the load linear slide rail, it is installed on the machine platform in an independent small slide rail mode. The non-loading linear slide 53 does not bear the function of the support slide 40, but is simply used as a function of a displacement sensor. Therefore, the scale 51 is no longer subjected to the existing load linear slide. The limitation of the cross-sectional shape and size, on the one hand, facilitates the assembler to visually assemble the space to install the displacement measuring mechanism 50, and therefore, the creation is not limited by the original slide rail size except for the advantages of disassembly and assembly and maintenance. However, the displacement measuring mechanism 50 of the present invention can also adopt the existing small slide rails and mass production advantages to reduce the cost. In addition, through the non-loading linear slide 53 setting, the scale 51 is more convenient to install and parallel with the working axis L (machining path) to ensure the accuracy of the displacement measurement, and more effectively reduce the work. error.

附帶說明的是,基於該刻度尺51是靠近於該驅動單元30的安裝方式,並將該讀頭52組裝在滑座31底部而間隔對應於刻度尺51,因此,在實際安裝上,只要將該刻度尺51安裝在該驅動單元30周側,越靠近工作軸線L越好,落於工作軸線L上是最佳(如第1圖的安裝方式), 若稍微偏離也無仿(如第3圖或第4圖所示),只要調整該讀頭52的位置,讓兩者相互對應,還是可以達到預期的使用功效與目的。其次,參考第2圖所示,由於一般自動化設備於該滑座31上均設有複數個提供鎖固的鎖點551,實際運用上,更可藉由既有的鎖點551,配合固定架55的連接,即可將該讀頭52安置其上,以使該讀頭52對應於該刻度尺51,如此一來,不但增加了組裝之方便性,而且更確保組裝無誤,以提高整體組裝之精確度。 Incidentally, based on the scale 51 being mounted close to the driving unit 30, the head 52 is assembled at the bottom of the slider 31 and the interval corresponds to the scale 51. Therefore, in actual installation, The scale 51 is mounted on the circumferential side of the driving unit 30, and the closer to the working axis L, the better, and it is optimal to fall on the working axis L (as in the mounting mode of FIG. 1). If there is no deviation or imitation (as shown in Fig. 3 or Fig. 4), as long as the position of the read head 52 is adjusted so that the two correspond to each other, the intended use effect and purpose can be achieved. Secondly, referring to FIG. 2, since the general automation device is provided with a plurality of locking points 551 for providing locking on the sliding seat 31, in practice, the existing locking point 551 can be used together with the fixing frame. The connection of the head 52 is such that the read head 52 is placed thereon so that the read head 52 corresponds to the scale 51, so that the assembly convenience is increased, and the assembly is ensured to improve the overall assembly. The accuracy.

最後,針對現有光學尺或磁性尺存在有安裝困難的問題,然因本創作的位移量測機構50藉以靠近於該驅動單元30的安裝方式,不但具有方便於配線,且組裝與拆卸時亦較為順手、簡易,且安置於驅動單元30周側或下方,且可避免塵灰、油污染,也不會直接遭受高載重的線性滑軌及其機組振動所影響。 Finally, there is a problem that the existing optical scale or the magnetic ruler has difficulty in installation. However, the displacement measuring mechanism 50 of the present invention is installed close to the driving unit 30, which is convenient for wiring, and is also relatively easy to assemble and disassemble. It is easy and simple, and is placed on the side of the drive unit 30 or below, and can avoid dust and oil pollution, and is not directly affected by the high-load linear slide and its unit vibration.

值得一提的是,從精密機械設計誤差因素的角度來看,除了光學尺或磁性尺(感測器)自身的製造問題之外,吾人尚需考慮阿貝誤差(Abbe error)的存在,而根據阿貝誤差的計算公式來表示:Abbe error=S*Sinθ(其中,S代表線性運動軸與感測軸之間的距離,θ角代表切削軸與感應軸的角度差),因此,S的數值愈大誤差就愈大。 It is worth mentioning that, from the point of view of the error factors of precision mechanical design, in addition to the manufacturing problems of optical tapes or magnetic scales (sensors), we still need to consider the existence of Abbe error. According to the calculation formula of Abbe error: Abbe error=S*Sinθ (where S represents the distance between the linear motion axis and the sensing axis, and θ represents the angular difference between the cutting axis and the sensing axis), therefore, S The larger the value, the larger the error.

同理可證,由於本創作刻度尺51的安裝位置是落置於工作軸線L(第1圖)或鄰近於工作軸線L(如第3圖或第4圖)上,安裝位置驅近於工作軸線L,角度偏差等於零或驅近於零,根據Abbe error=S*Sinθ,因此,自動化設備100之加工刀具60對工件61進行加工的加工點A與該工作軸線L重合而位於同一直線,而且刻度尺51與驅動單元30之間的距離S相當短,最佳時的距離S數值等於零(第1圖)或是幾乎驅近於零(如第3圖或第4圖),所以本創作位移量測機構50,阿貝誤差(Abbe error)相當微小,故相對於現有光學尺、磁性尺安裝於荷重線性滑軌旁的工作誤差,本創作的阿貝誤差極為微小,故可提高自動化設備之加工精度。 Similarly, since the installation position of the creation scale 51 is placed on the working axis L (Fig. 1) or adjacent to the working axis L (such as Fig. 3 or Fig. 4), the installation position is close to work. The axis L, the angular deviation is equal to zero or close to zero, according to Abbe error=S*Sinθ, therefore, the machining point A at which the machining tool 60 of the automation device 100 processes the workpiece 61 coincides with the working axis L and is in the same straight line, and The distance S between the scale 51 and the driving unit 30 is relatively short, and the optimum distance S value is equal to zero (Fig. 1) or almost close to zero (such as Fig. 3 or Fig. 4), so the creation displacement The measurement mechanism 50 has a relatively small Abbe error. Therefore, compared with the existing optical scale and the magnetic scale installed on the load linear slide, the Abbe error of the creation is extremely small, so that the automation equipment can be improved. Precision.

再值得一提的,本創作第1圖至第4圖中,該位移感測機構50均是揭示一種直線運動的安裝使用方式,當然該位移感測機構50也可運用於旋轉運動的自動化設備中,如第5圖所示,例如將該讀頭52安裝在一旋轉軸承80的一內圈81,而將該刻度尺51安裝在一外圈82,或者兩者位置互換,藉此,當一加工刀具90沿著加工點A執行旋轉運動時,即可透過該讀頭52相對於該刻度尺51取得旋轉位移數據。 It is worth mentioning that, in the first to fourth figures of the present invention, the displacement sensing mechanism 50 discloses a manner of installation and use of a linear motion. Of course, the displacement sensing mechanism 50 can also be applied to an automatic device for rotating motion. As shown in FIG. 5, for example, the read head 52 is mounted on an inner ring 81 of a rotary bearing 80, and the scale 51 is mounted on an outer ring 82, or the positions of the two are interchanged, whereby When a machining tool 90 performs a rotational motion along the machining point A, the rotational displacement data can be obtained with respect to the scale 51 through the read head 52.

以上所述,僅為本創作之一個較佳實施例而已,當不能以此限定本創作實施之範圍,即大凡依本創作申請專利範圍及新型說明內容所作之簡單的等效變化與修飾,皆應仍屬本創作專利涵蓋之範圍內。 The above description is only a preferred embodiment of the present invention, and the scope of the present invention cannot be limited by this, that is, the simple equivalent changes and modifications made by the applicant according to the scope of the patent application and the new description of the creation are all It should remain within the scope of this creation patent.

Claims (12)

一種自動化設備之位移量測機構,該自動化設備至少具有一機座、至少一沿著一工作軸線平行安置在該機座上的荷重線性滑軌、一與該荷重線性滑軌平行設置的驅動單元,及一與該荷重線性滑軌及該驅動單元連結的滑台,該驅動單元桿藉一滑座與該滑台連接,該位移量測機構包含有:一刻度尺,安置在該機座上,平行於該工作軸線;一非荷重的線性滑軌,安置於該機座上,該刻度尺安置在該非荷重的線性滑軌上;一線性滑座,連結於該滑台;及一讀頭,連結於該線性滑座,並且對應於該刻度尺。 A displacement measuring mechanism for an automatic device, the automation device having at least one base, at least one load linear slide rail disposed parallel to the base along a working axis, and a driving unit disposed in parallel with the load linear slide rail And a sliding table coupled to the load linear sliding rail and the driving unit, the driving unit rod is connected to the sliding table by a sliding seat, and the displacement measuring mechanism comprises: a scale disposed on the base Parallel to the working axis; a non-loaded linear slide rail is disposed on the base, the scale is disposed on the non-load linear slide rail; a linear slide is coupled to the slide table; and a read head , attached to the linear slide, and corresponding to the scale. 如請求項第1項所述之自動化設備之位移量測機構,其中,更包含一固定架,該線性滑座固定於該滑座上,該固定架安置在該線性滑座上,且靠近於該驅動單元,該讀頭安置於該固定架上,藉由該滑座驅動該線性滑座並同步帶動該固定架之位移進而連動該讀頭,致使該讀頭相對於該刻度尺作位移,進而取得位移數據。 The displacement measuring mechanism of the automatic device of claim 1, further comprising a fixing frame, wherein the linear sliding seat is fixed on the sliding seat, the fixing frame is disposed on the linear sliding seat, and is close to The driving unit is disposed on the fixing frame, and the slider drives the linear sliding seat to synchronously drive the displacement of the fixing frame to interlock the reading head, so that the reading head is displaced relative to the scale. Further, displacement data is obtained. 如請求項第1項所述之自動化設備之位移量測機構,其中,該刻度尺靠近於該驅動單元,且鄰近於該工作軸線。 The displacement measuring mechanism of the automated device of claim 1, wherein the scale is adjacent to the driving unit and adjacent to the working axis. 如請求項第1項所述之自動化設備之位移量測機構,其中,該刻度尺的安裝位置是軸對於該自動化設備的工作軸線。 The displacement measuring mechanism of the automatic device of claim 1, wherein the mounting position of the scale is an axis of operation of the axis with respect to the automation device. 如請求項第1項所述之自動化設備之位移量測機構,其中,該機座更設有一基準平台,該基準平台平行於該荷重線性滑軌,該非荷重的線性滑軌倚靠在該基準平台上,以使該非荷重的線性滑軌與該荷重線性滑軌平行設置。 The displacement measuring mechanism of the automatic device of claim 1, wherein the base further comprises a reference platform parallel to the load linear slide, the non-load linear slide leaning against the reference platform Upper, so that the non-loaded linear slide is disposed in parallel with the load linear slide. 如請求項第1項所述之自動化設備之位移量測機構,其中,該刻度尺與該讀頭組成一線性編碼器,該線性編碼器為磁性編碼器、光學編碼器、雷 射編碼器中的任一個。 The displacement measuring mechanism of the automatic device according to claim 1, wherein the scale and the read head comprise a linear encoder, the linear encoder is a magnetic encoder, an optical encoder, and a lightning Shoot any of the encoders. 如請求項第1項所述之自動化設備之位移量測機構,其中,該驅動單元為滾珠螺桿、尺條及齒輪、線性馬達之任一個。 The displacement measuring mechanism of the automatic device according to claim 1, wherein the driving unit is any one of a ball screw, a ruler and a gear, and a linear motor. 一種自動化設備之位移量測機構,該自動化設備至少具有一機座、至少一沿著一工作軸線平行安置在該機座上的荷重線性滑軌、一與該荷重線性滑軌平行設置的驅動單元,及一與該荷重線性滑軌及該驅動單元連結的滑台,該驅動單元藉一滑座與該滑台連接,該位移量測機構包含有:一刻度尺,安置在該滑台上,且平行於該工作軸線;一非荷重的線性滑軌,安置於該滑台上,該刻度尺安置在該非荷重的線性滑軌上;一線性滑座,連結於該機座;及一讀頭,連結於該線性滑座,並且對應於該刻度尺。 A displacement measuring mechanism for an automatic device, the automation device having at least one base, at least one load linear slide rail disposed parallel to the base along a working axis, and a driving unit disposed in parallel with the load linear slide rail And a sliding table coupled to the load-bearing linear slide rail and the driving unit, the driving unit is connected to the sliding table by a sliding seat, the displacement measuring mechanism comprises: a scale disposed on the sliding table, Parallel to the working axis; a non-loaded linear slide rail disposed on the slide table, the scale is disposed on the non-load linear slide rail; a linear slide joint coupled to the base; and a read head , attached to the linear slide, and corresponding to the scale. 如請求項第8項所述之自動化設備之位移量測機構,其中,更包含一固定架,該固定架安置在該線性滑座上,且靠近於該驅動單元,該讀頭安置在該固定架上,靠近並對應於該刻度尺。 The displacement measuring mechanism of the automatic device of claim 8, further comprising a fixing frame disposed on the linear sliding seat and adjacent to the driving unit, the reading head being disposed at the fixing On the shelf, close to and corresponding to the scale. 如請求項第8項所述之自動化設備之位移量測機構,其中,該刻度尺靠近於該驅動單元,且鄰近於該工作軸線。 The displacement measuring mechanism of the automated device of claim 8, wherein the scale is adjacent to the driving unit and adjacent to the working axis. 如請求項第8項所述之自動化設備之位移量測機構,其中,該刻度尺與該讀頭組成一線性編碼器,該線性編碼器為磁性編碼器、光學編碼器、雷射編碼器中的任一個。 The displacement measuring mechanism of the automatic device according to claim 8, wherein the scale and the read head comprise a linear encoder, the linear encoder is a magnetic encoder, an optical encoder, and a laser encoder. Any one. 如請求項第8項所述之自動化設備之位移量測機構,其中,該驅動單元為滾珠螺桿、尺條及齒輪、線性馬達之任一個。 The displacement measuring mechanism of the automatic device according to claim 8, wherein the driving unit is any one of a ball screw, a ruler and a gear, and a linear motor.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI666421B (en) * 2018-07-10 2019-07-21 英屬維京群島商詮優科技有限公司 Displacement measuring mechanism of automatic equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI666421B (en) * 2018-07-10 2019-07-21 英屬維京群島商詮優科技有限公司 Displacement measuring mechanism of automatic equipment

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