TWM567956U - Wafer support sheet - Google Patents

Wafer support sheet Download PDF

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Publication number
TWM567956U
TWM567956U TW107209905U TW107209905U TWM567956U TW M567956 U TWM567956 U TW M567956U TW 107209905 U TW107209905 U TW 107209905U TW 107209905 U TW107209905 U TW 107209905U TW M567956 U TWM567956 U TW M567956U
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Taiwan
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wafer
support
support table
creation
film
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TW107209905U
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Chinese (zh)
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摩西 邱
劉汝拯
陳松平
何江波
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大陸商義柏應用技術(深圳)有限公司
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Publication of TWM567956U publication Critical patent/TWM567956U/en

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  • Packaging Frangible Articles (AREA)

Abstract

本創作一種晶圓支撐片,置於繃框包裝盒內,包括支撐主體,所述支撐主體的外周設有卡位,中心設有凸出的用於放置晶圓的支撐台。本創作,和繃框包裝盒配合使用,用於晶圓的限位、分隔和支撐,使得晶圓在儲存、運輸過程中處於非接觸和微移動的狀態,從而對晶圓起到保護的作用,支撐台可採用吸塑成型工藝所產生的凹陷結構,如同支撐台內部被挖空的樣子,使得支撐片有足夠的空間方便晶圓的放置,晶圓的有效區域不會接觸到支撐片,從而有效地保護晶圓不被污染、劃傷、破裂,或因相互移動而造成功能失效。 The invention provides a wafer support sheet, which is placed in a stretch frame package, and comprises a support body. The support body has a card slot on the outer circumference and a convex support table for placing the wafer. This creation, in conjunction with the stretch frame packaging box, is used for the limitation, separation and support of the wafer, so that the wafer is in a non-contact and micro-moving state during storage and transportation, thereby protecting the wafer. The support table can adopt the concave structure generated by the plastic forming process, as the inside of the support table is hollowed out, so that the support piece has enough space to facilitate the placement of the wafer, and the effective area of the wafer does not contact the support piece. This effectively protects the wafer from contamination, scratches, cracks, or functional failure due to mutual movement.

Description

晶圓支撐片 Wafer support sheet

本創作涉及晶圓隔離保護的技術領域,具體涉及一種晶圓支撐片。 The present invention relates to the technical field of wafer isolation protection, and in particular to a wafer support sheet.

繃框是一種專門用於保護晶圓的產品,晶圓通常是放置在繃框的中央,兩邊用特製的薄膜把晶圓跟繃框連接在一起。 The stretch frame is a product specifically designed to protect wafers. The wafers are usually placed in the center of the stretch frame, and the wafers are connected to the stretch frame by special films on both sides.

目前市場上很少出現繃框在一個容器內得到適當保護的產品,常見的晶圓的產品為圓形薄片狀,並沒有相應的支撐台,因此繃框中的晶圓在包裝運輸過程中會出現以下問題: At present, there are few products on the market where the stretch frame is properly protected in a container. The common wafer products are round flakes and there is no corresponding support table. Therefore, the wafer in the frame will be packaged and transported. The following problems occur:

(1)容易受到碰撞而發生跳動、摩擦等現象,造成晶圓被磨損、污染。 (1) It is easy to be bumped and bounces, rubs, etc., causing the wafer to be worn and contaminated.

(2)嚴重情況下則使晶圓破裂。 (2) In severe cases, the wafer is broken.

(3)而且在使用過程中不易存放及拿取,給使用者造成很大的苦惱。 (3) It is not easy to store and take during use, which causes great trouble to the user.

有鑑於此,急需對現有的晶圓運輸和存儲裝置的結構進行改進,以方便操作,提高存儲的便捷性。 In view of this, there is an urgent need to improve the structure of existing wafer transportation and storage devices to facilitate operation and improve storage convenience.

本創作所要解決的技術問題是現有的晶圓運輸和存儲裝置 存在不宜存儲、操作不便的問題。 The technical problem to be solved by this creation is the existing wafer transport and storage device. There are problems that are not suitable for storage and inconvenience.

為了解決上述技術問題,本創作所採用的技術方案是提供一種晶圓支撐片,置於繃框包裝盒內,包括支撐主體,所述支撐主體的外周設有卡位,中心設有凸出的用於放置晶圓的支撐台。 In order to solve the above technical problem, the technical solution adopted by the present invention is to provide a wafer support sheet, which is placed in a stretch frame package, and includes a support body, the support body has a card slot on the outer circumference, and the center is provided with a convex shape. A support table for placing wafers.

在另一個優選的實施例中,所述支撐主體的外周設有凸耳,所述卡位為弧形,設置在所述凸耳的兩側根部。 In another preferred embodiment, the outer periphery of the support body is provided with a lug, and the latching position is curved and disposed on both sides of the lug.

在另一個優選的實施例中,所述支撐台包括錐形部和平臺部,所述平臺部設置在所述錐形部的中心。 In another preferred embodiment, the support table includes a tapered portion and a platform portion, the platform portion being disposed at a center of the tapered portion.

在另一個優選的實施例中,繃框的內部設有薄膜,薄膜的中心設有通孔,所述支撐台置於薄膜上,且凸出面張緊薄膜。 In another preferred embodiment, the inside of the stretch frame is provided with a film, and the center of the film is provided with a through hole, the support table is placed on the film, and the convex surface tensions the film.

在另一個優選的實施例中,所述凸耳為均勻排布的多個,各個所述凸耳的外周為圓弧線,且所述圓弧線在一個同心圓上 In another preferred embodiment, the lugs are a plurality of evenly arranged, the outer circumference of each of the lugs is a circular arc line, and the circular arc line is on a concentric circle.

與現有技術相比,本創作和繃框包裝盒配合使用,用於晶圓的限位、分隔和支撐,使得晶圓在儲存、運輸過程中處於非接觸和微移動的狀態,從而對晶圓起到保護的作用,支撐台可採用吸塑成型工藝所產生的凹陷結構,如同支撐台內部被挖空的樣子,使得支撐片有足夠的空間方便晶圓的放置,晶圓的有效區域不會接觸到支撐片,從而有效地保護晶圓不被污染、劃傷、破裂,或因相互移動而造成功能失效。 Compared with the prior art, the creation and the frame packing box are used together for the limitation, separation and support of the wafer, so that the wafer is in a non-contact and micro-moving state during storage and transportation, thereby facing the wafer. For protection, the support table can adopt the concave structure generated by the plastic forming process, as the inside of the support table is hollowed out, so that the support piece has enough space to facilitate the placement of the wafer, and the effective area of the wafer does not Contact with the support sheet to effectively protect the wafer from contamination, scratches, cracks, or functional failure due to mutual movement.

1‧‧‧支撐主體 1‧‧‧Support subject

2‧‧‧支撐台 2‧‧‧Support table

3‧‧‧錐形部 3‧‧‧Cone

4‧‧‧凸耳 4‧‧‧ lugs

41‧‧‧卡位 41‧‧‧ card position

5‧‧‧繃框包裝盒 5‧‧‧Bracket box

6‧‧‧繃框 6‧‧‧Band frame

7‧‧‧晶圓 7‧‧‧ wafer

第一圖為本創作的結構示意圖。 The first picture is a schematic diagram of the structure of the creation.

第二圖為本創作應用於繃框包裝盒內的結構示意圖。 The second figure is a schematic view of the structure applied to the frame of the stretch frame.

第三圖為圖2中A部的結構放大圖。 The third figure is an enlarged view of the structure of the portion A in Fig. 2.

本創作提供了一種晶圓支撐片,和繃框包裝盒配合使用,用於晶圓的限位、分隔和支撐,使得晶圓在儲存、運輸過程中處於非接觸和微移動的狀態,從而對晶圓起到保護的作用。支撐台可採用吸塑成型工藝所產生的凹陷結構,如同支撐台內部被挖空的樣子,使得支撐片有足夠的空間方便晶圓的放置。晶圓的有效區域不會接觸到支撐片,從而有效地保護晶圓不被污染、劃傷、破裂,或因相互移動而造成功能失效。下面結合說明書附圖和具體實施方式對本創作做出詳細說明。 The present invention provides a wafer support sheet for use with a stretch frame package for limiting, separating and supporting the wafer, so that the wafer is in a non-contact and micro-moving state during storage and transportation, thereby The wafer acts as a protection. The support table can adopt the concave structure generated by the plastic forming process, as the inside of the support table is hollowed out, so that the support piece has enough space to facilitate the placement of the wafer. The effective area of the wafer does not contact the support sheet, thereby effectively protecting the wafer from contamination, scratching, cracking, or functional failure due to mutual movement. The present invention will be described in detail below in conjunction with the drawings and specific embodiments of the specification.

如第一圖所示,本創作提供的一種晶圓支撐片,置於繃框包裝盒5內,包括支撐主體1,支撐主體1的外周設有卡位41,中心設有凸出的用於放置晶圓7的支撐台2。 As shown in the first figure, a wafer support sheet provided by the present invention is placed in the stretch frame package 5, and includes a support body 1. The outer periphery of the support body 1 is provided with a card 41, and the center is provided with a convex portion for The support table 2 of the wafer 7 is placed.

卡位41置於支撐主體1的外周,起到限位和方便取放的作用,在於與繃框包裝盒5內部的缺口形成配合,減少支撐片在容器內部移動的空間,避免晶圓7被劃傷、破裂,而且也方便地取出或放入晶圓7時不接觸到,有效避免晶圓7被污染,方便了使用者,提高了效率。 The card position 41 is placed on the outer circumference of the support body 1 to serve as a limit and convenient pick-and-place function, and is formed to cooperate with the notch inside the stretch frame package 5 to reduce the space for the support piece to move inside the container, thereby preventing the wafer 7 from being removed. Scratches, ruptures, and also easy to remove or put into the wafer 7 without contact, effectively avoiding contamination of the wafer 7, facilitating the user and improving efficiency.

如第二圖和第三圖所示,本創作和繃框包裝盒5配合使用,用於晶圓7的限位、分隔和支撐,使得晶圓7在儲存、運輸過程中處於非接觸和微移動的狀態,從而對晶圓7起到保護的作用。支撐台2可採用吸塑成型工藝所產生的凹陷結構,如同支撐台2內部被挖空的樣子,使得本創作有足夠的空間方便晶圓7的放置。晶圓7的有效區域不會接觸到支撐台2,從而有效地保護晶圓7不被污染、劃傷、破裂,或因相互移動而造成功能失效。 As shown in the second and third figures, the present invention is used in conjunction with the stretch box 5 for the limitation, separation and support of the wafer 7, so that the wafer 7 is non-contact and micro during storage and transportation. The state of movement, thereby protecting the wafer 7. The support table 2 can adopt the concave structure generated by the plastic forming process, as the inside of the support table 2 is hollowed out, so that the creation has sufficient space to facilitate the placement of the wafer 7. The effective area of the wafer 7 does not contact the support table 2, thereby effectively protecting the wafer 7 from contamination, scratching, cracking, or functional failure due to mutual movement.

現有的繃框包裝盒5被設計成包含一個單一的繃框6,當晶圓7放在一個由繃框6支撐的薄膜上,並將本創作放入在薄膜下方,那麼支撐片會使薄膜保持張力狀態,晶圓7自然貼附在裸露的支撐台2上,相對於繃框6更牢固地保持相對運動,有助於保持晶圓7在繃框包裝盒5內的安全。如果沒有在張力的狀態下,可能使晶圓7振動或“鼓”起來,這樣的運動可能導致晶圓7與附近物體之間產生不必要的接觸,並且甚至會導致晶圓7的彎曲和開裂。 The existing stretch frame 5 is designed to include a single stretch frame 6. When the wafer 7 is placed on a film supported by the stretch frame 6, and the creation is placed under the film, the support film will make the film Maintaining the tension state, the wafer 7 is naturally attached to the bare support table 2, maintaining a relatively firm relative movement relative to the stretch frame 6, helping to maintain the safety of the wafer 7 within the stretch frame 5. If the tension is not in the state of tension, the wafer 7 may be vibrated or "drumed". Such movement may cause unnecessary contact between the wafer 7 and nearby objects, and may even cause bending and cracking of the wafer 7. .

本創作的優點是:當多個繃框6疊放在一起時,由本創作將其隔離,即本創作放置於繃框6之間。由於本創作中間高兩邊低的結構,且有一定的厚度,因此晶圓7除了與支撐台2接觸外,其餘部分與繃框6接觸,從而有效保護了晶圓7。 The advantage of this creation is that when a plurality of stretched frames 6 are stacked together, they are separated by the present creation, that is, the creation is placed between the stretched frames 6. Since the middle of the creation has a low structure on both sides and a certain thickness, the wafer 7 is in contact with the stretch frame 6 except for the contact with the support table 2, thereby effectively protecting the wafer 7.

支撐主體1的外周設有凸耳4,卡位41為弧形,設置在凸耳4的兩側根部。卡位41設置在凸耳4的兩側,弧形的卡位41更為圓滑,能大大提高卡位41的固定性,方便拿取和下放。 The outer periphery of the support body 1 is provided with lugs 4 which are arcuate and are disposed on both sides of the lugs 4. The card position 41 is disposed on both sides of the lug 4, and the arc-shaped card position 41 is more rounded, which can greatly improve the fixing of the card position 41, and is convenient for taking and lowering.

支撐台2包括錐形部3和平臺部,平臺部設置在錐形部3的中心。這種結構能夠增加支撐台2的厚度,並保證晶圓7可放置在平臺部,平整服帖。 The support table 2 includes a tapered portion 3 and a platform portion which is disposed at the center of the tapered portion 3. This structure can increase the thickness of the support table 2 and ensure that the wafer 7 can be placed on the platform portion to be flattened.

繃框6的內部設有薄膜,薄膜的中心設有通孔,支撐台2置於薄膜上,且凸出面張緊薄膜。這種結構形式限定了本創作和現有的繃框6的位置關係和連接關係,使得繃框6、薄膜、本創作和晶圓7具有一個整體的緩震結構,緩衝性能更強,進一步提高了平穩程度。 The inside of the stretch frame 6 is provided with a film, and the center of the film is provided with a through hole, and the support table 2 is placed on the film, and the convex surface tensions the film. This structural form defines the positional relationship and the connection relationship between the present creation and the existing stretch frame 6, so that the stretch frame 6, the film, the present creation and the wafer 7 have an integral cushioning structure, and the cushioning performance is stronger, which further improves the structure. The degree of stability.

凸耳4為均勻排布的多個,各個凸耳4的外周為圓弧線,且圓 弧線在一個同心圓上。凸耳4的設置保證均衡性和重心的穩定性,外周為圓弧線,與包裝盒5的內壁的缺口契合,更易加工。 The lugs 4 are a plurality of evenly arranged, and the outer circumference of each lug 4 is a circular arc and a circle The arc is on a concentric circle. The arrangement of the lugs 4 ensures balance and stability of the center of gravity, and the outer circumference is a circular arc line, which fits into the notch of the inner wall of the package 5, and is easier to process.

本創作的使用方法(工作過程)如下:把一個晶圓7放在一個由繃框6支撐的薄膜上,並將放入繃框包裝盒5內,然後將本創作放入到薄膜下。讓薄膜保持在張力的狀態下,然後晶圓7自然貼附在支撐台2上,隨後依此類推堆放繃框6。因為它們被裝入或從容器取出都是保持張力狀態,所以不會影響到晶圓7的相對運動,從而保護晶圓7不會彎曲,開裂。 The method of use (working process) of this creation is as follows: A wafer 7 is placed on a film supported by the stretch frame 6, and placed in the frame 5, and then the creation is placed under the film. The film is held under tension, and then the wafer 7 is naturally attached to the support table 2, and then the stretch frame 6 is stacked. Because they are loaded or removed from the container, the tension is maintained, so that the relative movement of the wafer 7 is not affected, thereby protecting the wafer 7 from bending and cracking.

本創作和繃框包裝盒5配合使用,用於晶圓7的限位、分隔和支撐,使得晶圓7在儲存、運輸過程中處於非接觸和微移動的狀態,從而對晶圓7起到保護的作用。支撐台2可採用吸塑成型工藝所產生的凹陷結構,如同支撐台2內部被挖空的樣子,使得支撐片有足夠的空間方便晶圓7的放置。晶圓7的有效區域不會接觸到支撐片,從而有效地保護晶圓7不被污染、劃傷、破裂,或因相互移動而造成功能失效。 The creation and the frame packing box 5 are used together for the limitation, separation and support of the wafer 7, so that the wafer 7 is in a non-contact and micro-moving state during storage and transportation, thereby playing on the wafer 7. The role of protection. The support table 2 can adopt a concave structure generated by a plastic forming process, as the inside of the support table 2 is hollowed out, so that the support piece has sufficient space for the placement of the wafer 7. The active area of the wafer 7 does not contact the support sheet, thereby effectively protecting the wafer 7 from contamination, scratching, cracking, or functional failure due to mutual movement.

由上所述者僅為用以解釋本創作之較佳實施例,並非企圖據以對本創作做任何形式上之限制,是以,凡有在相同之創作精神下所做有關本創作之任何修飾或變更者,為其他可據以實施之型態且具有相同效果者,皆仍應包括在本創作意圖保護之範疇內。 The above description is only a preferred embodiment for explaining the present creation, and is not intended to impose any form limitation on the creation, so that any modification related to the creation in the same creative spirit is made. Or the changer, other types that can be implemented according to the same effect, should still be included in the scope of protection of this creative intention.

綜上所述,本創作「晶圓支撐片」,其實用性及成本效益上,確實是完全符合產業上發展所需,且所揭露之結構創作亦是具有前所未有的創新構造,所以其具有「新穎性」應無疑慮,又本創作可較習用之結構更具功效之增進,因此亦具有「進步性」,其完全符合我國專利法有關 新型專利之申請要件的規定,乃依法提起專利申請,並敬請 鈞局早日審查,並給予肯定。 In summary, the “wafer support sheet” of this creation is indeed in line with the development of the industry in terms of practicality and cost-effectiveness, and the disclosed structure creation has an unprecedented innovative structure, so it has “ "Newty" should be taken care of, and this creation can be more effective than the conventional structure, so it is also "progressive", which is fully in line with China's patent law. The requirements for the application requirements for new patents are to file a patent application in accordance with the law, and please review it with the bureau and give it affirmation.

Claims (5)

一種晶圓支撐片,包括:一支撐主體,所述支撐主體的外周設有卡位,中心設有凸出的用於放置晶圓的支撐台。 A wafer support sheet comprises: a support body, a peripheral portion of the support body is provided with a card position, and a center is provided with a protruding support table for placing the wafer. 如請求項1所述之晶圓支撐片,其中所述支撐主體的外周設有凸耳,所述卡位為弧形,設置在所述凸耳的兩側根部。 The wafer support sheet of claim 1, wherein the outer periphery of the support body is provided with a lug, and the card position is curved and disposed on both sides of the lug. 如請求項1所述之晶圓支撐片,其中所述支撐台包括錐形部和平臺部,所述平臺部設置在所述錐形部的中心。 The wafer support sheet of claim 1, wherein the support table comprises a tapered portion and a platform portion, the platform portion being disposed at a center of the tapered portion. 如請求項1所述之晶圓支撐片,其中該繃框的內部設有薄膜,薄膜的中心設有通孔,所述支撐台置於薄膜上,且凸出面張緊薄膜。 The wafer support sheet of claim 1, wherein the inside of the stretch frame is provided with a film, and a center of the film is provided with a through hole, the support table is placed on the film, and the convex surface is stretched. 如請求項1所述之晶圓支撐片,其中所述凸耳為均勻排布的多個,各個所述凸耳的外周為圓弧線,且所述圓弧線在一個同心圓上。 The wafer support sheet of claim 1, wherein the lugs are a plurality of evenly arranged, the outer circumference of each of the lugs is a circular arc line, and the circular arc line is on a concentric circle.
TW107209905U 2018-06-21 2018-07-20 Wafer support sheet TWM567956U (en)

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CN201820962403.8U CN208699383U (en) 2018-06-21 2018-06-21 Wafer supporting sheet

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TWM567956U true TWM567956U (en) 2018-10-01

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CN208699383U (en) 2019-04-05

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