TWM567831U - Two port valve - Google Patents

Abstract

The present invention discloses a double-twist valve which can provide adhesion suppression against deposition of a sealing member and prevent sealing of a sealing member from being lowered. In the double-twist valve (1), when the valve body (20) is locked by the first flow path opening (12a), the first sealing member (15) provided on the valve seat (10) opens the flow path ( 12a) The periphery is hermetically sealed, and the entire sealing member (15) is disposed at the front end (16a) of the opening wall (16) in the direction of the axis (L1) than the first flow path opening (12a). And the valve seat (10) closest to the end edge (13b) in the periphery of the second flow path opening (13a) is located further toward the base end side of the opening wall (16).

Description

Double valve

[0001] The present invention is, for example, a double-twist valve that uses an operating gas for depressurizing a vacuum chamber or the like in a semiconductor manufacturing apparatus.

[0002] In a semiconductor manufacturing apparatus, when an operating gas is used to apply a film forming process on a semiconductor substrate, the processing is performed in a vacuum chamber. In this case, the vacuum chamber is decompressed by using a vacuum pump, and the vacuum pump and the vacuum chamber are connected to the external flow path by opening and closing the double flow valve. In the double-twist valve, for example, as shown in Patent Document 1, the first weir portion for connection to the vacuum chamber, the second weir portion for connection to the vacuum pump, and the flow path connecting the first weir portion and the second weir portion In the flow path, a valve seat is provided on the first weir portion side, and a valve body that contacts/separates the valve seat and a sealing member attached to the valve body are provided. [0003] However, in the double-twist valve described above, since the flow path opening openings of the sealing member and the first weir portion face each other, the valve body is separated from the valve seat to open the valve, and the operation flows from the first weir portion. The gas directly hits the sealing member mounted on the valve body. Therefore, deposits such as by-products (products other than the film formation product) on the sealing member are likely to adhere, and the sealing property of the sealing member is lowered. [Prior Art Document] [Patent Document] [0004] [Patent Document 1] Japanese Patent Publication No. 2006-312981

[Technical Problem to be Solved] [0005] Therefore, the technical problem of the present invention is to suppress the adhesion of the deposit of the sealing member, and to provide a double-twist valve which can prevent the sealing property of the sealing member from being lowered. [Means for Solving the Problems] [0006] In order to achieve the above object, the double-twist valve of the present invention has a main valve portion and a valve driving portion that are connected in the axial direction, and the main valve portion has a shaft opening in the axial direction. In the primary side sill portion, the second side sill portion that is opened in the direction orthogonal to the axis, and the valve housing that has the flow path portion connected to the two dam portions are opened in the flow path portion of the primary side sill portion a valve body formed by enclosing a first flow path opening, a valve body that opens and closes the opening of the first flow path in contact with the valve seat, and the valve body drives the valve body in the axial direction by the valve driving unit In the present invention, the first flow passage opening is erected in the axial direction from the inner circumferential side of the valve seat toward the flow passage portion side. The annular opening wall forms the valve seat, and has a first sealing member that contacts and separates the valve body, and the first sealing member surrounds the opening wall, and the opening wall is larger than the first one in the axial direction. The distal end of the sealing member protrudes toward the flow path portion side, and the valve body has an escape portion that avoids interference with the opening wall when the first sealing member abuts. [0007] In this case, the secondary side dam portion has an open second flow path opening in the flow path portion, and the end of the second flow path opening is closest to the end of the valve seat in the axial direction The edge is preferably closer to the flow path portion than the distal end of the first sealing member. Further, the valve housing includes a primary side casing portion having the primary side weir portion, and a casing body portion having the secondary side weir portion and the flow path portion, and the flow path portion is borrowed It is preferably formed by the inner peripheral wall of the casing main body portion, and a portion of the inner peripheral wall adjacent to the valve seat is formed in a tapered shape that is tapered from the flow path portion side toward the valve seat. In this case, the primary side casing portion and the casing body portion are formed as separate bodies, and the valve seat is formed on the primary side casing portion, and the valve casing is formed by the primary side casing. It is preferable that the portion and the housing body portion are coupled to each other. [0008] Further, in the above preferred embodiment of the double-twist valve, in the valve body, the opposing surface of the valve seat includes an annular convex portion, and the opposing surface of the valve seat of the annular convex portion Forming a sealing surface that contacts/separates from the first sealing member. In this case, it is preferable that the escape portion is formed by a concave portion surrounded by the annular convex portion. Further, in a preferred embodiment of the double-twist valve, a valve shaft extending in the axial direction is fixed to a surface of the valve body facing the valve drive portion, and the valve drive portion has: The main valve portion and the valve driving portion are coupled to each other with respect to the fixed piston and the cylinder chamber that reciprocates in the axial direction with respect to the valve shaft, and the connecting member is disposed in the axial direction. An insertion hole is provided, and the insertion hole is inserted into the valve shaft in an airtight manner and slidably. The connecting member vertically and airtightly partitions the flow path portion of the main valve portion and the cylinder chamber of the valve driving portion. In this case, it is preferable that a second sealing member is provided on an orientation surface of the valve body facing the valve driving portion, the second sealing member surrounding the valve shaft, and the first flow path opening At the time of opening, the flow path portion and the insertion hole are hermetically sealed by abutting against the connecting member. Further, preferably, when the second sealing member is in contact with the connecting member, the entire valve body is located closer to the connecting member than the peripheral edge of the second flow path opening in the axial direction. The edge is closer to the side of the joint member. Further, more preferably, the cylinder chamber is partitioned by the piston into a first pressure chamber on the connecting member side, a first pressure chamber, and a second pressure chamber on the opposite side in the axial direction. Each of the chambers is provided with a crucible for discharging the compressed fluid, and the insertion hole is provided with a through hole for discharging the compressed fluid leaking from the sealing member of the first pressure chamber beyond the insertion hole to the atmosphere. Furthermore, it is still more preferable that an indicator is attached to an end of the valve shaft opposite to the valve body, and the indicator is formed to form the cylinder chamber to form the cylinder housing in an airtight manner and freely slide in the axial direction. The valve body passes through the cylinder housing in response to the reciprocation of the valve body, and the piston is sandwiched between the valve shaft and the indicator and fixed to the valve shaft. [New effect] According to the present invention, the first flow path opening in the primary side portion is annularly arranged in the axial direction from the inner circumferential side of the valve seat toward the flow path portion side. The opening wall is formed, and the valve seat has a valve body contacting/separating the first sealing member to surround the opening wall, and the opening wall is more inclined than the tip end of the first sealing member in the axial direction The side of the road is protruding. Therefore, it is possible to prevent the fluid flowing from the primary side crotch portion toward the secondary side crotch portion from directly hitting the sealing member attached to the valve body, suppress deposition of deposits to the sealing member, and prevent the sealing member from being poor in sealing property. .

[0012] Hereinafter, an embodiment of the present double-twist valve will be described in detail with reference to the drawings. As shown in FIGS. 1 and 2, the main valve portion 2 is provided with a valve body 20 that contacts/separates the valve seat 10 and the valve seat 10, and has the valve body 20 driven. In the valve drive unit 3, the main valve unit 2 is disposed on the first end side in the direction of the axis L1, and the valve drive unit 3 is disposed in common on the second end side, and the main valve unit 2 and the valve are provided. The drive units 3 are connected to each other. [0013] The main valve portion 2 has a primary side dam portion 12 that is connected to a vacuum chamber or the like that connects the semiconductor manufacturing device in a direction of the axis L1 (not shown), and is opened in the direction of the axis L1 with respect to the orthogonal axis L2. (not shown) A secondary side dam portion 13 such as a vacuum pump is connected to form a valve housing 5 of the flow path portion 11 that connects the two dam portions 12 and 13. The valve housing 5 is composed of a primary side casing portion 6 that forms the primary side weir portion 12, and a casing body portion 7 that forms the secondary side weir portion 13 and the flow path portion 11. The primary side casing portion 6 and the casing body portion 7 are respectively formed as different individuals, and the valve casing 5, the primary side casing portion 6 and the casing body portion 7 are configured to be airtight to each other by a sealing member. link. [0014] The flow path portion 11 side of the primary side casing portion 6 (the boundary between the flow path portion 11 and the primary side dam portion 12) is formed in the first flow path of the primary side dam portion 12 in which the flow path portion 11 is opened. The opening 12a forms the valve seat 10 so as to surround the first flow path opening 12a. Moreover, as shown in FIG. 3, the valve seat 10 is an annular groove 14 which is formed in a ring shape, and is formed in a ring-shaped first sealing member 15 which is made of, for example, a synthetic resin such as rubber. Then, the valve body 20 is opened and closed by the contact/separation of the first sealing member 15 to open and close the first flow path opening 12a. In other words, in the double-bend valve 1, when the first flow passage opening 12a is closed, the valve body 20 is not provided to the valve seat in order to ensure the airtightness of the sealing member 15 between the primary side dam portion 12 and the flow path portion 11. 10 on. Further, as shown in FIG. 3, an annular wall-shaped opening wall 16 is formed on the radially inner peripheral side of the valve seat 10, and is provided upright in the direction of the axis L1 on the side of the flow path portion 11, by the opening The front end 16a of the wall 16 surrounds the field to form the first flow path opening 12a. Further, the first sealing member 15 of the valve seat 10 is disposed so as to surround the periphery of the opening wall 16 of the first flow path opening 12a. At this time, the opening wall 16 is closer to the opening direction of the valve body 20 in the direction of the axis L1 than the tip end 15a of the valve body 20 that is in contact with the sealing member 15, that is, the flow path portion. 11 side) protruding. In other words, the entire first sealing member 15 (that is, the entire valve seat 10) is disposed more in the direction of the axis L1 than the first flow path opening 12a (that is, the front end 16a of the opening wall 16). Retreating toward the proximal end side of the opening wall 16 described above. In this manner, it is possible to prevent the flow of the gas such as the operating gas flowing into the flow path portion 11 from the first flow passage opening 12a through the primary side dam portion 12, and directly collide with the first sealing member 15. Therefore, deposits such as the by-products of the gas (products other than the film formation product) contained in the above-described gas can be prevented from being deposited and adhered to the first sealing member 15, and as a result, the first sealing can be achieved. When the life of the member 15 is extended, the airtightness when the first flow path opening 12a of the valve body 20 is closed can be maintained longer. Further, in the primary side dam portion 12, the diameter of the first flow path opening 12a which is the inner diameter of the opening wall 16, that is, the axis L1, and the inner diameter of the portion which is connected to the inner circumferential surface of the opening wall 16 are equal to each other. [0017] On the other hand, the case main body portion 7 is formed to be hollow, and the flow path portion 11 of the inner peripheral wall is formed in common, and has a first opening portion 17 and a second opening at both ends in the direction of the axis L1. Part 18. Further, as described above, the first opening portion 17 includes the primary side casing portion 6 including the primary side weir portion 12 to thereby hermetically mount the sealing member. Moreover, the second opening portion 18 and the connecting member 30 to be described later are airtightly fitted via a sealing member. Further, between the first opening portion 17 and the second opening portion 18 of the casing main body portion 7, the second side dam portion 13 along the first dam portion 12 and the orthogonal direction is opened. Further, a boundary between the secondary side dam portion 13 of the inner peripheral wall of the flow path portion 11 forms a second flow path opening 13a of the secondary side dam portion 13 opened to the flow path portion 11. At this time, in the direction of the axis L1, the end edge 13b closest to the valve seat 10 among the peripheral edges of the second flow path opening 13a is located closer to the distal end 15a of the first sealing member 15 or the front end 16a of the opening wall 16. It is located further in the opening direction of the valve body 20 (that is, on the side of the flow path portion 11). Further, in the direction of the axis L2, the end edge 13b is located on the outer peripheral side of the valve seat 10. [0019] The portion of the inner peripheral wall of the flow path portion 11 adjacent to the valve seat 10 is formed to be smaller toward the valve seat 10 from the flow path portion 11 side (that is, the second opening portion 18 side). An annular tapered surface 7a. Thereby, the tapered surface 7a is also formed by extending the inner peripheral wall between the end edge 13b of the second flow path opening 13a and the valve seat 10. As described above, in the present embodiment, the bottom surface is formed by the valve seat 10 including the first sealing member 15, and the annular groove is formed by the opening wall 16 and the tapered surface 7a. The first flow path opening 12a of the primary side sill portion 12 is on the outer circumferential side, and the entire second flow path opening 13a is closer to the valve body 20 than the groove in the direction of the axis L1. That is, it is disposed on the side of the second opening portion 18. Therefore, in the flow path portion 11, the flow of the fluid flowing out from the first flow path opening 12a and flowing out from the second flow path opening 13a can suppress the first sealing member 15 directly colliding with the valve seat 10. Further, even if, for example, the flow of the fluid flows into the groove, the tapered surface 7a is quickly guided to the outside of the groove or to the second flow path opening 13a, thereby suppressing the fluid in the groove. Staying. [0021] The valve body 20 is formed in a circular disk shape or a slightly cylindrical shape, and is disposed on the axis L1. When the valve body 10 side of the valve body 20 faces the first opposing surface 21 and the first flow path opening 12a is closed, that is, when the valve body 20 abuts against the first sealing member, in order to avoid the opening wall 16 The interference of the escape section 22. Further, the first opposing surface 21 includes an annular convex portion 23, and the valve seat 10 and the opposing first facing surface 21 of the annular convex portion 23 are in contact with the first sealing member 15/ The sealing surface 24 is separated. Further, the escape portion 22 is formed by surrounding the concave portion by the annular convex portion 23. On the other hand, the valve body 20 faces the second opposing surface 25 on the side of the valve driving unit 3, and faces the connecting member 30. In the center of the second opposing surface 25, the extending valve shaft 26 in the direction of the axis L1 is fixed. That is, the valve body 20 and the valve shaft 26 are integrally formed, and the valve body 20 is provided at the front end portion of the valve shaft 26. Further, the second opposing surface 25 is a dovetail groove 27 that is formed in a ring shape so as to surround the valve shaft 26, and the dovetail groove 27 is fitted into the connection when the first channel opening 12a is opened. The member 30 has a ring-shaped second sealing member 28. When the first channel opening 12a is opened, the entire valve body 20 is located closer to the peripheral edge 13c of the connecting member 30 than the peripheral edge of the second channel opening 13a in the direction of the axis L1. The joint member 30 side. Thereby, when the first flow path opening 12a is opened, the flow of the fluid in the flow path portion 11 can be smoothly guided from the first flow path opening 12a to the second flow path opening 13a. [0023] The connecting member 30 has a first surface 31a facing the second opposing surface 25 side of the valve body 20 at both ends in the axial line L1 direction (that is, on the side of the flow path portion 11), and the first surface The surface 31a faces away from the second surface 31b facing the valve driving portion 3 side. Further, between the first surface 31a and the second surface 31b, an insertion hole 32 through which the valve shaft 26 is airtight and slidably inserted is provided in the direction of the axis L1. Here, the first surface 31a forms an inner wall of the flow path portion 11, and the flow path portion 11 is airtightly partitioned. When the first flow path opening 12a is opened, the second sealing member 28 that faces the valve body 20 on the first surface 31a can be used to form the flow path portion 11 and the insertion hole 32. Sealed airtightly. Further, in the insertion hole 32, a scraper 33 that prevents foreign matter such as sludge adhering to the surface of the valve shaft 26 from entering, a bearing member 36 that slidably supports the valve shaft 26, and the insertion hole 32 and the valve shaft 26 are prevented. The third sealing member 35 that is hermetically sealed is provided in order from the first surface side 31a toward the second surface side 31b. [0024] On the other hand, the valve driving unit 3 includes a piston 41 fixed to the valve shaft 26 and a cylinder chamber 40 that reciprocates the piston 41 in the direction of the axis L1, and is formed inside the cylinder chamber 40. The cylinder housing 8. The cylinder case 8 has a second opening 18 on the side of the connecting member 30 in the direction of the axis L1, and similarly, the cylinder chamber 40 is also opened on the side of the connecting member 30. Then, the second surface 31b side of the connecting member 30 of the opening portion 18 is hermetically fitted, and as a result, the cylinder chamber 40 of the valve driving portion 3 is made gas by the second surface 31b of the connecting member 30. The dense land is zoned. Thereby, the main valve portion 2 and the valve driving portion 3, that is, the valve housing 5 and the cylinder housing 8, are hermetically connected by the connecting member 30 interposed therebetween. [0025] The cylinder chamber 40 is in the direction of the axis L1, and the first pressure chamber 42 located on the second surface side 31b of the connecting member 30 and the second pressure chamber 43 on the opposite side are respectively In the division, the pressure chambers 42 and 43 respectively open the first weir 44 and the second weir 45 which are supplied and discharged as a compressed fluid of the leading fluid. Then, the compressed fluid is supplied and discharged to the pressure chambers 42 and 43 through the weirs 44 and 45, and the inner cylinder 41 reciprocates in the direction of the axis L1 by the cylinder chamber 40, so that the valve body 20 is oriented in the direction of the axis L1. The first flow path opening 12a is opened and closed by reciprocating movement. Further, in the insertion hole 32, the fluid from the first pressure chamber side is sealed closer to the first pressure chamber 42 side than the third sealing member 35 (that is, on the second surface 31b side). A lip seal member 34 that allows the flow of fluid from the reverse side is provided. Further, between the lip seal member 34 and the third seal member 35, the first pressure chamber 42 exceeds the through hole in which the compressed fluid leaking from the lip seal member 34 in the insertion hole 32 escapes to the atmosphere. 37. The connecting member is opened in a radial direction. Further, the end portion of the valve shaft 26 opposite to the valve body 20, that is, the base end portion located in the second pressure chamber 43 of the valve shaft 26, indicates the primary side weir portion 12 and The communication state of the secondary side dam portion 13 is such that an elongated cylindrical indicator 46 is formed, and the valve shaft 24 is coaxially extended in the direction of the axis L1. Further, the cylinder case 8 is provided with a through hole 47 that penetrates between the second pressure chamber 43 and the outside on the axis L1. Further, the indicator 46 is inserted into the through hole 47 in an airtight and slidable manner, and the valve body 20 is reciprocated in the cylinder housing 8 in response to the reciprocation of the valve body 20. Specifically, in the state in which the valve body 20 abuts between the primary side dam portion 12 and the secondary side dam portion 13 by the first sealing member 15 abutting the valve seat 10, the entire indicator is Concealed in the cylinder housing, the valve body is separated from the valve seat, and the first sealing member abuts against the first surface of the connecting member in a state in which the primary side portion and the secondary side portion communicate with each other. The front end of the 46 protrudes from the cylinder housing. Here, the base end portion of the indicator 46 is coupled to the proximal end portion of the valve shaft 26 by means of screwing or the like, and the piston 41 is provided at the proximal end portion of the valve shaft 26 on the axis L1. The base end of the indicator 46 is clamped and fixedly mounted on the valve shaft. [0029] When the double boring valve 1 is actuated, the compressed fluid is collectively exhausted from the first pressure chamber 42 through the first weir 44, and the compressed fluid is supplied to the second pressure chamber 43 through the second weir 45. At the time of gas, the sealing surface 24 of the valve body 20 abuts against the first sealing member 15 of the valve seat 10, and the gap between the primary side dam portion 12 and the secondary side dam portion 13 is blocked. Conversely, when the first pressure 44 is supplied to the compressed fluid by the first pressure chamber 42 and the compressed fluid is exhausted from the second pressure chamber 43 by the second pressure 45, the sealing surface 24 of the valve body 20 is the slave valve. The first sealing member 15 of the seat 10 is separated, and the second sealing member 28 of the valve body 20 is in contact with the first surface 31a of the connecting member 30 to communicate between the primary side portion 12 and the secondary side portion 13 . As described above, with the double-valve valve 1 of the present embodiment, the flow of the valve body 20 at the first flow path opening 12a is blocked by providing the first sealing member 15 on the valve seat 10 The periphery of the road opening 12a is hermetically sealed, and the entire sealing member 15 is disposed at a front end 16a and an opening 2a of the second flow path that are formed to form an opening 16 from the first flow path opening 12a in the direction of the axis L1. The end edge 13b is located further toward the proximal end side of the opening wall 16, and the flow rate of the fluid such as the operating gas flows from the flow path portion 11 of the first flow path opening 12a, thereby preventing direct exposure of the first sealing member 15. As a result, adhesion to the deposit of the first sealing member 15 is suppressed, and the sealing property of the first sealing member 15 can be prevented from being lowered. [0031] The above is a detailed description of an embodiment of the present invention, and the present invention is not limited to the above-described embodiments, and can be carried out in various ways without departing from the scope of the present patent protection. Modifications. For example, the second sealing member is not necessarily provided on the valve body as in the present embodiment, and may be provided on the first surface 31a of the coupling member 30.

[0032]

1‧‧‧Double helium valve

2‧‧‧Main Valve Department

3‧‧‧ Valve Drive Department

5‧‧‧ valve housing

6‧‧‧Primary side shell

7‧‧‧ housing body

7a‧‧‧ Cone

8‧‧‧Cylinder housing

10‧‧‧ valve seat

11‧‧‧Flow Department

12‧‧‧One side squat

12a‧‧‧1st flow path opening

13‧‧‧Second side crotch

13a‧‧‧2nd flow path opening

13b, 13c‧‧‧ edge

14‧‧‧ Groove

15‧‧‧1st sealing member

15a‧‧‧Top of the first sealing member

16‧‧‧Open wall

16a‧‧‧ front end of the open wall

17‧‧‧1st opening

20‧‧‧ valve body

21‧‧‧1st opposite

22‧‧‧Escape Department

23‧‧‧ annular convex

24‧‧‧ sealing surface

25‧‧‧2nd opposite

26‧‧‧ valve shaft

28‧‧‧2nd sealing member

30‧‧‧Connected components

31a‧‧‧The first side of the joint member

31b‧‧‧The second side of the connecting member

32‧‧‧ inserted through hole

34‧‧‧Lip seal member

37‧‧‧through hole

40‧‧‧Cylinder room

41‧‧‧Piston

42‧‧‧1st pressure chamber

43‧‧‧2nd pressure chamber

46‧‧‧ indicator

L1, L2‧‧‧ axis

[0011] FIG. 1 is a cross-sectional view showing a state in which the valve is closed in an embodiment of the present double-twist valve. Fig. 2 is a cross-sectional view showing a state in which the valve of the double helium valve of Fig. 1 is opened. Fig. 3 is an enlarged cross-sectional view showing the essential part of Fig. 1;

Claims (11)

A double-turn valve having a main valve portion and a valve drive portion connected in an axial direction, the main valve portion having a valve housing, a valve seat and a valve body; the valve housing having a primary side opened in the axial direction a crotch portion, a secondary side crotch portion opened in a direction orthogonal to the axis, and a flow path portion connecting the two crotch portions; the valve seat being formed to be open to the flow path portion surrounding the primary crotch portion a first flow path opening; the valve body is opened and closed by contact/separation with the valve seat, and the valve body drives the valve body in the axial direction to cause the valve body to In the contact/separation of the valve seat, the first flow path opening is formed by an annular opening wall that is erected in the axial direction from the inner circumferential side of the valve seat toward the flow path portion side. The valve seat has a first sealing member that is in contact with and separated from the valve body, and the first sealing member surrounds the opening wall, and the opening wall is larger than the first axis in the axial direction (1) The distal end of the sealing member protrudes toward the flow path portion side, and the valve body has an escape portion that avoids interference with the opening wall when the first sealing member is abutted. The double-twist valve according to claim 1, wherein the secondary side dam portion has a second flow path opening that is open to the flow path portion, and the outermost side of the second flow path opening is the most in the axial direction The end edge close to the valve seat is located closer to the flow path portion than the distal end of the first sealing member. The double-twist valve according to claim 1 or 2, wherein the valve housing includes a primary-side housing portion having the primary side dam portion, and the secondary side dam portion and the flow path portion. a housing main body portion, wherein the flow path portion is formed by an inner peripheral wall of the case main body portion, and a portion adjacent to the valve seat of the inner peripheral wall is formed from the flow path portion side toward the valve seat Cone-shaped cone. The double-twist valve according to claim 3, wherein the primary side casing portion and the casing body portion are formed as different bodies, and the valve seat is formed on the primary side casing portion, the valve casing It is formed by mutually connecting the primary side casing part and the casing main body part. The double-twist valve according to claim 1 or 2, wherein the opposing surface of the valve seat of the valve body includes an annular convex portion formed on a facing surface of the valve seat of the annular convex portion A sealing surface that contacts/separates the first sealing member. The double-twist valve according to claim 5, wherein the escape portion is formed by a concave portion surrounded by the annular convex portion. The double-twist valve according to claim 1 or 2, wherein a valve shaft extending in the axial direction is fixed to a surface of the valve body facing the valve drive portion, and the valve drive portion has a piston fixed to the valve shaft and a cylinder chamber that reciprocates the piston in the axial direction, wherein the main valve portion and the valve driving portion are coupled to each other by a connecting member, and the connecting member is provided with an insertion hole penetrating in the axial direction. The insertion hole is inserted through the valve shaft in an airtight and slidable manner, and the connecting member separates the flow path portion of the main valve portion and the cylinder chamber of the valve driving portion in an airtight manner. The double-twist valve according to claim 7, wherein a surface of the valve body facing the valve drive unit side is provided with a second sealing member, and the second sealing member surrounds the valve shaft and the first flow is When the road opening is opened, the connecting member is brought into contact with the connecting member to hermetically seal the flow path portion and the insertion hole. The double-twist valve according to claim 8, wherein when the second sealing member abuts against the connecting member, the entire valve body is located at the outermost edge of the opening of the second flow path in the axial direction. An end edge close to the above-described joint member is closer to the joint member side. The double-cylinder valve according to claim 9, wherein the cylinder chamber is partitioned by the piston into a first pressure chamber on the side of the connecting member and a second side opposite to the first pressure chamber in the axial direction a pressure chamber, wherein the pressure chambers are respectively provided with a discharge for discharging the compressed fluid, and the insertion holes are provided: the compressed fluid leaking from the sealing member of the first pressure chamber beyond the insertion hole is discharged to the atmosphere Through hole. The double-twist valve according to claim 10, wherein an indicator is attached to an end portion of the valve shaft opposite to the valve body, and the indicator seals the cylinder housing forming the cylinder chamber in the axial direction And slidably penetrated, and the valve body is reciprocated by the valve driving portion, and is externally inserted into the cylinder housing, and the piston is clamped between the valve shaft and the indicator and fixed to the valve shaft. .