TWM562487U - Conductive terminal material and resistor - Google Patents

Conductive terminal material and resistor Download PDF

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Publication number
TWM562487U
TWM562487U TW107203454U TW107203454U TWM562487U TW M562487 U TWM562487 U TW M562487U TW 107203454 U TW107203454 U TW 107203454U TW 107203454 U TW107203454 U TW 107203454U TW M562487 U TWM562487 U TW M562487U
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resistor
core layer
conductive
substrate
impedance element
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TW107203454U
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Chinese (zh)
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黃宗熙
蔡承琪
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新力應用材料有限公司
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Publication of TWM562487U publication Critical patent/TWM562487U/en

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Abstract

The present invention discloses a conductive terminal material and a resistor. The conductive terminal material comprises a plurality of conductive particles. Each conductive particle comprises a core layer and a cladding layer covering the core layer. The material of the core layer comprises metal or alloy thereof. The material of the cladding layer comprises graphene, graphite, carbon nanotube, carbon nanoball, or combinations thereof. The present invention can meet the requirements of restriction of the use of hazardous substance in electrical and electronic products (RoHS).

Description

導電端子材料與電阻器 Conductive terminal material and resistor

本新型係關於一種導電端子材料與電阻器。 The present invention relates to a conductive terminal material and a resistor.

按,歐盟議會和歐盟部長級理事會一致同意自2006年7月起禁止在電子電器設備中使用鉛、鎘、汞、鉻等四種重金屬。因此,銷往歐盟的電子電器產品需要符合電機電子產品中有害物質禁限用指令(RoHS)所規定的有害物質要求。 According to the European Parliament and the EU Ministerial Council, it has been agreed to ban the use of four heavy metals such as lead, cadmium, mercury and chromium in electrical and electronic equipment since July 2006. Therefore, electrical and electronic products sold to the EU need to comply with the hazardous substances requirements of the Restriction of Hazardous Substances (RoHS) in electrical and electronic products.

本新型的目的為提供一種導電端子材料與電阻器。本新型的電阻器可符合電機電子產品中有害物質禁限用指令(RoHS)所規定的有害物質要求。 The purpose of the present invention is to provide a conductive terminal material and a resistor. The new resistors are compatible with the hazardous substances requirements of the Restriction of Hazardous Substances (RoHS) in electrical and electronic products.

本新型提出一種導電端子材料,包括多個導電粒子,每一個導電粒子包含一核心層及包覆核心層的一包覆層,核心層的材料包含金屬或其合金,包覆層的材料包含石墨烯、石墨、奈米碳管、奈米碳球、或其組合。 The present invention provides a conductive terminal material comprising a plurality of conductive particles, each conductive particle comprising a core layer and a cladding layer covering the core layer, the material of the core layer comprises a metal or an alloy thereof, and the material of the cladding layer comprises graphite Alkene, graphite, carbon nanotubes, nanocarbon spheres, or a combination thereof.

本新型更提出一種電阻器,包括一基材、一阻抗元件以及兩導電端子。阻抗元件設置於基材上。兩導電端子設置於基材上,並分別連接阻抗元件的兩側,兩導電端子分別具有多個導電粒子,每一個導電粒子包含一核心層及包覆核心層的一包覆層,核心層的材料包含金屬或其合金,包覆層的材料包含石墨烯、石墨、奈米碳管、奈米碳球、或其組合。 The present invention further provides a resistor comprising a substrate, an impedance element and two conductive terminals. The impedance element is disposed on the substrate. The two conductive terminals are disposed on the substrate and are respectively connected to two sides of the impedance element. The two conductive terminals respectively have a plurality of conductive particles, and each of the conductive particles comprises a core layer and a cladding layer covering the core layer, and the core layer The material comprises a metal or an alloy thereof, and the material of the coating layer comprises graphene, graphite, carbon nanotubes, nanocarbon spheres, or a combination thereof.

承上所述,在本新型的一種導電端子材料與電阻器中,導電端子材料或導電端子包括多個導電粒子,每一個導電粒子包含核心層及包覆核心層的包覆層,核心層的材料包含金屬或其合金,包覆層的材料包含 石墨烯、石墨、奈米碳管、奈米碳球、或其組合。藉此,可使本新型的電阻器可符合電機電子產品中有害物質禁限用指令(RoHS)所規定的有害物質要求。 As described above, in a conductive terminal material and a resistor of the present invention, the conductive terminal material or the conductive terminal includes a plurality of conductive particles, and each of the conductive particles includes a core layer and a cladding layer covering the core layer, and the core layer The material comprises a metal or an alloy thereof, and the material of the coating layer comprises Graphene, graphite, carbon nanotubes, nanocarbon spheres, or a combination thereof. Therefore, the resistor of the present invention can meet the requirements of hazardous substances stipulated by the RoHS Directive for Restriction of Hazardous Materials in Electrical and Electronic Products.

1‧‧‧電阻器 1‧‧‧Resistors

11‧‧‧基材 11‧‧‧Substrate

12‧‧‧阻抗元件 12‧‧‧ impedance components

13a、13b‧‧‧導電端子 13a, 13b‧‧‧ conductive terminals

131‧‧‧導電粒子 131‧‧‧ conductive particles

1311‧‧‧核心層 1311‧‧‧ core layer

1312‧‧‧包覆層 1312‧‧‧Cladding

14‧‧‧保護層 14‧‧‧Protective layer

M‧‧‧混合材料 M‧‧‧Mixed materials

S‧‧‧溶劑 S‧‧‧ solvent

S1‧‧‧第一表面 S1‧‧‧ first surface

S2‧‧‧第二表面 S2‧‧‧ second surface

S3‧‧‧第三表面 S3‧‧‧ third surface

S01~S05‧‧‧步驟 S01~S05‧‧‧Steps

圖1為本新型較佳實施例的一種電阻器的製造方法的流程步驟圖。 1 is a flow chart showing a method of manufacturing a resistor according to a preferred embodiment of the present invention.

圖2A至圖2F分別為本新型較佳實施例的電阻器的製造過程示意圖。 2A to 2F are respectively schematic views showing a manufacturing process of a resistor according to a preferred embodiment of the present invention.

圖3為本新型較佳實施例的電阻器製造方法的另一流程步驟圖。 3 is another flow diagram of a method of fabricating a resistor in accordance with a preferred embodiment of the present invention.

以下將參照相關圖式,說明依本新型較佳實施例的導電端子材料與電阻器,其中相同的元件將以相同的參照符號加以說明。 The conductive terminal material and the resistor according to the preferred embodiment of the present invention will be described below with reference to the related drawings, wherein the same elements will be described with the same reference numerals.

請參照圖1、圖2A至圖2F所示,其中,圖1為本新型較佳實施例的一種電阻器1的製造方法的流程步驟圖,而圖2A至圖2F分別為本新型較佳實施例的電阻器1的製造過程示意圖。 Referring to FIG. 1 and FIG. 2A to FIG. 2F , FIG. 1 is a flow chart of a method for manufacturing a resistor 1 according to a preferred embodiment of the present invention, and FIGS. 2A to 2F are respectively a preferred embodiment of the present invention. A schematic diagram of the manufacturing process of the resistor 1 of the example.

如圖1所示,電阻器1的製造方法可包括:設置一阻抗元件於一基材上(步驟S01);將多個導電粒子與一溶劑混合,以形成一混合材料,其中導電粒子包含一核心層及包覆核心層的一包覆層,核心層的材料包含金屬或其合金,且包覆層的材料包含石墨烯、石墨、奈米碳管、奈米碳球、或其組合(步驟S02);設置混合材料於一基材上,並使混合材料分別連接阻抗元件的兩側(步驟S03);以及進行一燒結製程,以於基材上形成兩導電端子(步驟S04)。以下,請分別配合圖2A至圖2F所示,以說明電阻器1的製造過程。 As shown in FIG. 1, the manufacturing method of the resistor 1 may include: disposing an impedance element on a substrate (step S01); mixing a plurality of conductive particles with a solvent to form a mixed material, wherein the conductive particles comprise a a core layer and a cladding layer covering the core layer, the material of the core layer comprises a metal or an alloy thereof, and the material of the cladding layer comprises graphene, graphite, a carbon nanotube, a carbon sphere, or a combination thereof (step S02); disposing the mixed material on a substrate, and connecting the mixed materials to both sides of the impedance element respectively (step S03); and performing a sintering process to form two conductive terminals on the substrate (step S04). Hereinafter, please refer to FIG. 2A to FIG. 2F, respectively, to explain the manufacturing process of the resistor 1.

首先,如圖2A所示,步驟S01為:設置一阻抗元件12於一基材11上。其中,基材11可為硬性基材或軟性基材,硬性基材可為玻璃、金屬、陶瓷或樹脂基材、或是複合式基材。本實施例的基材11是以氧化鋁(Al2O3)的硬性基材為例。另外,阻抗元件12為一電阻材料所構成,並且不含鉛、鎘、汞、鉻等四種重金屬,以符合電機電子產品中有害物質禁限用指令(RoHS)所規定的有害物質要求。在圖2A中,基材11具有一第 一表面S1、兩第二表面S2與一第三表面S3,第一表面S1與第三表面S3為基材11的相反表面,且兩個第二表面S2位於基材11的左右側,並分別連接第一表面S1與第三表面S3,而阻抗元件12是設置於基材11的第一表面S1。 First, as shown in FIG. 2A, step S01 is to set an impedance element 12 on a substrate 11. The substrate 11 may be a rigid substrate or a soft substrate, and the rigid substrate may be a glass, a metal, a ceramic or a resin substrate, or a composite substrate. The substrate 11 of the present embodiment is exemplified by a hard substrate of alumina (Al 2 O 3 ). In addition, the impedance element 12 is composed of a resistive material and does not contain four heavy metals such as lead, cadmium, mercury, and chromium to meet the hazardous substance requirements stipulated by the RoHS Directive for Restriction of Hazardous Substances in Electrical and Electronic Products. In FIG. 2A, the substrate 11 has a first a surface S1, two second surfaces S2 and a third surface S3, the first surface S1 and the third surface S3 are opposite surfaces of the substrate 11, and the two second surfaces S2 are located on the left and right sides of the substrate 11, and respectively The first surface S1 and the third surface S3 are connected, and the impedance element 12 is disposed on the first surface S1 of the substrate 11.

另外,如圖2B與圖2C所示,步驟S02為:將多個導電粒子131與一溶劑S混合,以形成一混合材料,其中導電粒子131包含一核心層1311及包覆核心層1311的一包覆層1312,核心層1311的材料包含金屬或其合金,且包覆層1312的材料包含石墨烯(graphene)、石墨(graphite)、奈米碳管(carbon nanotube,CNT)、奈米碳球(carbon nanoball)、或其組合。於此,可將包含多個導電粒子131的導電端子材料混合於溶劑S中並攪拌均勻,以得到膏狀的混合材料。其中,導電粒子131的核心層1311為不含鉛、鎘、汞、鉻等四種重金屬之金屬,例如銀、銅、錳、鎳、金、鋁、鐵或錫等金屬,或上述金屬的任意組合的合金,並不限定。另外,若導電粒子131的包覆層1312的材料是石墨時,其可為天然石墨或人工石墨,並不限制。在本實施例的導電粒子131中,包覆層1312包覆核心層1311的目的是為了可快速導熱,避免使用時溫度太高而燒毀電阻器1。 In addition, as shown in FIG. 2B and FIG. 2C, step S02 is: mixing a plurality of conductive particles 131 with a solvent S to form a mixed material, wherein the conductive particles 131 include a core layer 1311 and a cladding core layer 1311. The cladding layer 1312, the material of the core layer 1311 comprises a metal or an alloy thereof, and the material of the cladding layer 1312 comprises graphene, graphite, carbon nanotube (CNT), nano carbon sphere. (carbon nanoball), or a combination thereof. Here, the conductive terminal material containing the plurality of conductive particles 131 may be mixed in the solvent S and stirred uniformly to obtain a paste-like mixed material. The core layer 1311 of the conductive particles 131 is a metal containing no heavy metals such as lead, cadmium, mercury, or chromium, such as a metal such as silver, copper, manganese, nickel, gold, aluminum, iron or tin, or any of the above metals. The alloy of the combination is not limited. In addition, if the material of the cladding layer 1312 of the conductive particles 131 is graphite, it may be natural graphite or artificial graphite, and is not limited. In the conductive particles 131 of the present embodiment, the cladding layer 1312 covers the core layer 1311 for the purpose of rapid heat conduction, and avoids burning the resistor 1 when the temperature is too high.

另外,溶劑S可例如為水、二甲基甲醯胺(DMF)、四氫呋喃(THF)、酮類、醇類、醋酸乙脂、或甲苯。本實施例的溶劑S是以水為例。在不同的實施例中,當溶劑S為酮類時,其可為N-甲基吡咯烷酮(NMP)、或丙酮;當溶劑S為醇類時,其可為乙醇(Ethanol)、或乙二醇(Ethylene glycol)。此外,溶劑S亦可為上述溶劑(水、二甲基甲醯胺、四氫呋喃、酮類、或醇類)的任意混合,並不限定。 Further, the solvent S may be, for example, water, dimethylformamide (DMF), tetrahydrofuran (THF), ketones, alcohols, ethyl acetate, or toluene. The solvent S of this embodiment is exemplified by water. In various embodiments, when the solvent S is a ketone, it may be N-methylpyrrolidone (NMP), or acetone; when the solvent S is an alcohol, it may be ethanol (Ethanol), or ethylene glycol. (Ethylene glycol). Further, the solvent S may be any mixture of the above solvents (water, dimethylformamide, tetrahydrofuran, ketones, or alcohols), and is not limited.

接著,如圖2D所示,進行步驟S03為:設置混合材料M於一基材11上,並使混合材料M分別連接阻抗元件12的兩側。混合材料M可利用塗佈、沾粘、印刷或濺鍍(supptering)等方式設置於基材11上。於此,塗佈可為噴射塗佈(spray coating)、或旋轉塗佈(spin coating),而印刷可為噴墨列印(inkjet printing)、或網版印刷(screen printing),並不限定。值得一提的是,上述設置於基材11的順序依序為步驟S01的阻抗元件12與步驟S02、S03的混合材料M,然並不以此為限,在不同的實施例中, 也可先進行步驟S02、S03的混合材料M的設置,再進行步驟S01之阻抗元件12的設置。 Next, as shown in FIG. 2D, step S03 is performed to set the mixed material M on a substrate 11 and connect the mixed materials M to both sides of the impedance element 12, respectively. The mixed material M can be provided on the substrate 11 by coating, sticking, printing, or supping. Here, the coating may be spray coating or spin coating, and the printing may be inkjet printing or screen printing, and is not limited. It is to be noted that the order of the substrate 11 is in the order of the impedance element 12 of the step S01 and the mixed material M of the steps S02 and S03, but not limited thereto. In different embodiments, Alternatively, the setting of the mixed material M in steps S02 and S03 may be performed first, and then the setting of the impedance element 12 in step S01 may be performed.

接著,進行一燒結製程,以於基材11上形成兩導電端子13a、13b(步驟S04)。其中,燒結製程的燒結溫度可介於800℃~1050℃,以去除混合材料M中的溶劑S(例如水分),並使混合材料M中留下來的導電端子材料(多個導電粒子131)的分子重新排列,經冷卻(可為室溫冷卻)後可在基材11上形成兩導電端子13a、13b。如圖2D所示,導電端子13a、13b分別位於基材11的第一表面S1上,並分別連接阻抗元件12的兩側,且經由兩個第二表面S2而延伸至第三表面S3,使得本實施例的電阻器1為一表面貼裝元件(surface-mount device,SMD)。在不同的實施例,電阻器1也可為不同型式的電阻,本新型並不限制其實際呈現的態樣。在一些實施例中,導電端子13a、13b的成份及其重量百分比可如下:銅粉,80%~90%;錳粉,5%~15%;鎳粉,1%~10%;錫粉,1%~10%;碳,1%~10%。 Next, a sintering process is performed to form the two conductive terminals 13a, 13b on the substrate 11 (step S04). Wherein, the sintering temperature of the sintering process may be between 800 ° C and 1050 ° C to remove the solvent S (eg, moisture) in the mixed material M, and the conductive terminal material (the plurality of conductive particles 131 ) remaining in the mixed material M The molecules are rearranged, and after cooling (which can be cooled at room temperature), two conductive terminals 13a, 13b can be formed on the substrate 11. As shown in FIG. 2D, the conductive terminals 13a, 13b are respectively located on the first surface S1 of the substrate 11, and are respectively connected to both sides of the impedance element 12, and extend to the third surface S3 via the two second surfaces S2, so that The resistor 1 of this embodiment is a surface-mount device (SMD). In different embodiments, the resistor 1 can also be a different type of resistor, and the present invention does not limit the manner in which it is actually presented. In some embodiments, the components of the conductive terminals 13a, 13b and their weight percentages can be as follows: copper powder, 80% to 90%; manganese powder, 5% to 15%; nickel powder, 1% to 10%; tin powder, 1%~10%; carbon, 1%~10%.

再說明的是,在阻抗的公式中,電阻值=電阻常數(ρ)×長度/面積,因此,影響導電端子13a、13b的阻抗值的因素可包括材料本身(導電粒子131的核心層1311與包覆層1312)特性、導電粒子131的粒徑大小、導電粒子131的截面積或厚度與製程溫度,設計者可藉由上述因素通過適當的調配組成成份來控制導電端子13a、13b(混合材料)的阻抗值,使其阻抗值越低越好,以成為可適用於電阻器1的導電端子。 Further, in the equation of the impedance, the resistance value = resistance constant (ρ) × length / area, therefore, factors affecting the impedance values of the conductive terminals 13a, 13b may include the material itself (the core layer 1311 of the conductive particles 131 and The characteristics of the cladding layer 1312), the particle size of the conductive particles 131, the cross-sectional area or thickness of the conductive particles 131, and the process temperature, the designer can control the conductive terminals 13a, 13b by appropriately adjusting the composition components by the above factors (mixed materials) The impedance value is such that the lower the impedance value, the better, so as to be a conductive terminal applicable to the resistor 1.

另外,請參照圖3所示,其為本新型較佳實施例的電阻器1製造方法的另一流程步驟圖。與圖1不同的是,除了步驟S01至步驟S04之外,圖3的製造方法更可包括步驟S05:設置一保護層14覆蓋在阻抗元件12上。如圖2E與圖2F所示,保護層14是設置並覆蓋在阻抗元件12上,以保護阻抗元件12不被異物破壞其特性。在一些實施例中,保護層14的材料例如但不限於為環氧樹脂(Epoxy)或壓克力。 In addition, please refer to FIG. 3, which is another flow chart of the method for manufacturing the resistor 1 of the preferred embodiment of the present invention. The difference from FIG. 1 is that, in addition to steps S01 to S04, the manufacturing method of FIG. 3 may further include step S05: providing a protective layer 14 overlying the impedance element 12. As shown in FIGS. 2E and 2F, the protective layer 14 is disposed and covered on the impedance element 12 to protect the impedance element 12 from damage by foreign matter. In some embodiments, the material of the protective layer 14 is, for example but not limited to, Epoxy or Acrylic.

因此,本實施例的電阻器1為表面貼裝元件(SMD),其包括基材11、阻抗元件12、兩導電端子13a、13b及保護層14。阻抗元件12設置於基材11上,兩導電端子13a、13b設置於基材11上,並分別連接阻 抗元件12的兩側,其中,兩導電端子13a、13b分別具有多個導電粒子131,每個導電粒子131包含核心層1311及包覆核心層1311的包覆層1312,核心層1311的材料包含金屬或其合金,而包覆層1312的材料包含石墨烯、石墨、奈米碳管、奈米碳球、或其組合。另外,保護層14覆蓋在阻抗元件12上,以保護阻抗元件12免於被異物破壞其特性。 Therefore, the resistor 1 of the present embodiment is a surface mount component (SMD) including a substrate 11, an impedance element 12, two conductive terminals 13a, 13b, and a protective layer 14. The impedance element 12 is disposed on the substrate 11, and the two conductive terminals 13a, 13b are disposed on the substrate 11, and are respectively connected to the resistor On both sides of the resistive element 12, wherein the two conductive terminals 13a, 13b respectively have a plurality of conductive particles 131, each of the conductive particles 131 comprises a core layer 1311 and a cladding layer 1312 covering the core layer 1311, and the material of the core layer 1311 comprises The metal or alloy thereof, and the material of the cladding layer 1312 comprises graphene, graphite, carbon nanotubes, nanocarbon spheres, or a combination thereof. In addition, a protective layer 14 is overlaid on the impedance element 12 to protect the impedance element 12 from damage by foreign matter.

通過上述的導電端子材料,使本實施例所製得的電阻器1可符合電機電子產品中有害物質禁限用指令(RoHS)所規定的有害物質要求(無鉛、鎘、汞、鉻等四種重金屬)。 Through the above-mentioned conductive terminal material, the resistor 1 obtained in the present embodiment can meet the requirements of harmful substances stipulated by the Restriction of Hazardous Substances (RoHS) in motor electronic products (lead-free, cadmium, mercury, chromium, etc.) Heavy metal).

綜上所述,在本新型的一種導電端子材料與電阻器中,導電端子材料或導電端子包括多個導電粒子,每一個導電粒子包含核心層及包覆核心層的包覆層,核心層的材料包含金屬或其合金,包覆層的材料包含石墨烯、石墨、奈米碳管、奈米碳球、或其組合。藉此,可使本新型的電阻器可符合電機電子產品中有害物質禁限用指令(RoHS)所規定的有害物質要求。 In summary, in a conductive terminal material and resistor of the present invention, the conductive terminal material or the conductive terminal comprises a plurality of conductive particles, each conductive particle comprises a core layer and a cladding layer covering the core layer, and the core layer The material comprises a metal or an alloy thereof, and the material of the coating layer comprises graphene, graphite, carbon nanotubes, nanocarbon spheres, or a combination thereof. Therefore, the resistor of the present invention can meet the requirements of hazardous substances stipulated by the RoHS Directive for Restriction of Hazardous Materials in Electrical and Electronic Products.

以上所述僅為舉例性,而非為限制性者。任何未脫離本新型之精神與範疇,而對其進行之等效修改或變更,均應包含於後附之申請專利範圍中。 The above is intended to be illustrative only and not limiting. Any equivalent modifications or alterations to the spirit and scope of the present invention are intended to be included in the scope of the appended claims.

Claims (6)

一種導電端子材料,包括:多個導電粒子,每一個該導電粒子包含一核心層及包覆該核心層的一包覆層,該核心層的材料為金屬或其合金,該包覆層的材料為石墨烯、石墨、奈米碳管、奈米碳球、或其組合。 A conductive terminal material comprising: a plurality of conductive particles, each of the conductive particles comprising a core layer and a cladding layer covering the core layer, the core layer material being a metal or an alloy thereof, the material of the cladding layer It is graphene, graphite, carbon nanotubes, nanocarbon spheres, or a combination thereof. 如申請專利範圍第1項所述的導電端子材料,其中該金屬為銀、銅、錳、鎳、金、鋁、鐵或錫。 The conductive terminal material according to claim 1, wherein the metal is silver, copper, manganese, nickel, gold, aluminum, iron or tin. 一種電阻器,包括:一基材;一阻抗元件,設置於該基材上;以及兩導電端子,設置於該基材上,並分別連接該阻抗元件的兩側,該兩導電端子分別具有多個導電粒子,每一個該導電粒子包含一核心層及包覆該核心層的一包覆層,該核心層的材料為金屬或其合金,該包覆層的材料為石墨烯、石墨、奈米碳管、奈米碳球、或其組合。 A resistor comprising: a substrate; an impedance element disposed on the substrate; and two conductive terminals disposed on the substrate and respectively connected to two sides of the impedance element, the two conductive terminals respectively having Conductive particles, each of the conductive particles comprising a core layer and a cladding layer covering the core layer, the core layer is made of a metal or an alloy thereof, and the material of the cladding layer is graphene, graphite, and nanometer. Carbon tube, nano carbon sphere, or a combination thereof. 如申請專利範圍第3項所述的電阻器,其中該金屬為銀、銅、錳、鎳、金、鋁、鐵或錫。 The resistor of claim 3, wherein the metal is silver, copper, manganese, nickel, gold, aluminum, iron or tin. 如申請專利範圍第3項所述的電阻器,其中該基材具有一第一表面、兩第二表面與一第三表面,該阻抗元件設置於該第一表面,該兩第二表面分別連接該第一表面與該第三表面,且該兩導電端子分別位於該第一表面上,並經由該兩第二表面且延伸至該第三表面。 The resistor of claim 3, wherein the substrate has a first surface, two second surfaces, and a third surface, the impedance element is disposed on the first surface, and the two surfaces are respectively connected The first surface and the third surface, and the two conductive terminals are respectively located on the first surface and extend through the two second surfaces to the third surface. 如申請專利範圍第3項所述的電阻器,更包括:一保護層,覆蓋在該阻抗元件上。 The resistor of claim 3, further comprising: a protective layer overlying the impedance element.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI666660B (en) * 2018-03-16 2019-07-21 新力應用材料有限公司 Conductive terminal material, resistor and method of manufacturing the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI666660B (en) * 2018-03-16 2019-07-21 新力應用材料有限公司 Conductive terminal material, resistor and method of manufacturing the same

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