TWM556328U - Actuating-sensing module - Google Patents

Abstract

The present invention provides an actuation sensing module, which is composed of an actuator device, a first substrate, a valve sheet layer and a second substrate. The first substrate comprises an intake passage, an exhaust passage, an intake port and an exhaust port, and the second substrate defines a through slot. The valve plate layer is disposed between the first substrate and the second substrate, and the intake valve and the exhaust valve respectively close and block the intake passage and the exhaust passage. The actuating device closes the through slot of the second substrate to form a compression chamber between the valve plate layer and the through slot. The air inlet, the intake passage, the compression chamber, the exhaust passage and the exhaust port communicate with each other to form an air flow loop, and the sensor is disposed in the air flow loop. The actuating device drives one of the outside gases to circulate in the airflow loop, and the sensor can monitor the circulating gas.

Description

Actuating sensor module

The present invention relates to an actuating sensing module, and more particularly to an actuating sensing module for sensing gas through a gas circulation.

At present, human beings are increasingly paying attention to the monitoring of the environment in life, such as carbon monoxide, carbon dioxide, volatile organic compounds (VOC), PM2.5, etc., and the exposure of these gases in the environment can cause harm to the human body. The health effects are serious and even endangering life. Therefore, environmental gas monitoring has attracted the attention of all countries and has gradually become a topic that cannot be ignored in life.

However, in the prior art, the ambient gas detecting instrument is too large, for example, an air filter, and is inconvenient for the user to carry around. Therefore, the user has difficulty in obtaining the gas information of the surrounding environment, and the user has difficulty. It is still very likely that it will be exposed to an environment that is harmful to human body gases. Therefore, how to obtain the gas information of the surrounding environment anytime and anywhere is a problem that needs to be solved at present.

In addition, the conventional environmental gas detecting instrument does not have the function of waterproofing and dustproofing. If water or liquid flows into the instrument during the circulation of the gas, the output gas is easily hydrated, thereby causing The electronic components that sense the gas are exposed to moisture, rust, and even the risk of damage. In addition, the conventional environmental gas detecting instrument also has no dustproof function. If dust enters the environmental gas detecting instrument during the gas circulation process, the component may be damaged, the gas transmission efficiency may be lowered, and the like. Therefore, how to make the environmental gas detection instrument waterproof and dustproof is also a problem that needs to be solved at present.

Therefore, how to develop a tool that can improve the above-mentioned conventional technology, can make the instrument or equipment for detecting environmental gas small, miniaturized and mute, and has the functions of waterproofing and dustproof, which is an urgent problem to be solved at present. .

The main purpose of the present invention is to provide an actuating sensor module that generates a pressure gradient in a flow channel after design by a gas wave generated by a high-frequency operation of a piezoelectric film, so that the gas flows at a high speed and passes through the flow path. The difference in impedance, the gas is transmitted from the suction end to the discharge end, and the apparatus or equipment using the gas transmission device of the prior art has a large volume, is difficult to be thinned, cannot achieve a portable type, and has a large noise. .

Another main purpose of the present invention is to provide an actuating sensor module which has both waterproof and dustproof functions, and is configured to filter water vapor and dust by means of a protective film, and to solve the conventional gas transport device in the process of gas transport. There is a problem that moisture or dust enters the gas transmission device, which causes damage to components, decreased gas transmission efficiency, and the like.

In order to achieve the above objective, one of the more general embodiments of the present invention provides an actuation sensing module comprising: a first substrate including an intake passage, an exhaust passage, an intake port and an exhaust port, and an intake passage and The exhaust passage communicates with the exhaust port and the exhaust port respectively to the outside of the first substrate; the second substrate defines a through slot; the valve layer includes an intake valve and an exhaust valve, and the valve layer is disposed on the first substrate and Between the second substrates, the intake valve and the exhaust valve respectively close the insulating passage and the exhaust passage; the actuating device is disposed on the second substrate and closes the through slot to penetrate the valve layer and the second substrate Forming a compression chamber between the slots, wherein the intake port, the intake passage, the compression chamber, the exhaust passage, and the exhaust port communicate with each other to form an air flow circuit; and the sensor is disposed at any position in the air flow circuit; Actuating the device, causing the inlet valve of the valve plate layer to vibrate upward to introduce one of the outside air into the intake passage via the intake port, and to pass the gas through the valve layer into the compression chamber, and then through the actuating device Compress the compression chamber to make the valve layer Exhaust valve vibration down Opened, allowing gas to flow from the compression chamber through the valve layer into the exhaust passage, and exhausted by the exhaust port Out, for the sensor disposed in the airflow loop to monitor the circulating gas.

1, 2‧‧‧ actuation sensor module

10, 20‧‧‧ first substrate

101, 201‧‧‧ intake passage

1011, 2011‧‧‧ air intake

102, 202‧‧‧ exhaust passage

1021, 2021‧‧ vent

103, 203‧‧ ‧ convex structure

11, 21‧‧‧ second substrate

110, 210‧‧‧through slots

1102‧‧‧Second intake passage

1103‧‧‧Second exhaust passage

111‧‧‧ convex structure

12, 22‧‧‧ actuation device

121, 221‧‧‧ actuation film

122, 222‧‧‧ piezoelectric film

13, 23‧‧‧ valve layer

131, 231‧‧‧ intake valve

132, 232‧‧‧ exhaust valve

2321‧‧‧ convex structure

133a, 133b‧‧‧ gap

14, 24‧‧‧ sensors

151, 251‧‧‧ first control circuit

152, 252‧‧‧ second control circuit

161, 261‧‧‧ first protective film

162, 262‧‧‧ second protective film

A, A’‧‧‧ compression chamber

FIG. 1A is a schematic structural view of an actuation sensing module according to a preferred embodiment of the present invention.

FIG. 1B is a schematic view showing the intake structure of the actuation sensing module according to a preferred embodiment of the present invention.

FIG. 1C is a schematic view showing the exhaust actuation structure of the actuation sensing module according to a preferred embodiment of the present invention.

FIG. 2A is a schematic structural view of an actuation sensing module according to another preferred embodiment of the present invention.

FIG. 2B is a schematic diagram of the intake actuation structure of the actuation sensing module according to another preferred embodiment of the present invention.

FIG. 2C is a schematic diagram of the exhaust actuation structure of the actuation sensing module of another preferred embodiment of the present invention.

Some exemplary embodiments embodying the features and advantages of the present invention are described in detail in the following description. It is to be understood that the present invention is capable of various modifications in various aspects, and is not to be construed as a limitation.

The actuating sensor module of the present invention can be used to sense the air quality of the surrounding environment, and at the same time has the effects of waterproofing, dustproofing and mute, and can be applied to a mobile phone, a tablet computer, a wearable device or any structure to include a microprocessor. Similar mobile electronic devices such as RAM. Please refer to FIG. 1A , which is a structural schematic diagram of an actuation sensing module according to a preferred embodiment of the present invention. As shown, the actuation sensing module 1 includes a first substrate 10, a second substrate 11, an actuator 12, a valve sheet layer 13, and a sensor 14. The first substrate 10 is formed with an intake passage 101 and an exhaust passage 102, and the intake passage 101 and the exhaust passage 102 respectively form an intake port 1011 and a row on an outer surface of the first substrate 10. Air port 1021. The second substrate 11 is opened Throughout the slot 110, in the present embodiment, the through slot 110 is formed by a recess 1101 and a second intake passage 1102 and a second exhaust passage 1103 through which the recess 1101 is passed. After the first substrate 10 and the second substrate 11 are assembled and assembled, the second inlet channel 1102 and the second exhaust channel 1103 of the second substrate 11 respectively correspond to the inlet passage 101 and the exhaust of the first substrate 10 . Channel 102.

In the preferred embodiment of the present invention, the first substrate 10 and the second substrate 11 can be, but are not limited to, an application specific wafer (ASIC) or a system single chip (SOC), and the first substrate 10 is formed by a semiconductor process to form an air intake thereof. The channel 101 and the exhaust channel 102, and the second substrate 11 is also formed into a structure of the through-groove 110 through a semiconductor process. The first substrate 10 and the second substrate 11 are combined in a package manner.

In the preferred embodiment of the present invention, the first substrate 10 further produces a first control circuit 151 through a semiconductor process, and the second substrate 11 also produces a second control circuit 152 through a semiconductor process. The first control circuit 151 and the second control circuit 152 are integrated circuits, wherein the first control circuit 151 is electrically connected to the sensor 14 to receive the sensing data generated by the sensor 14 and perform arithmetic processing. The second control circuit 152 is electrically coupled to the actuation device 12 to provide actuation of the actuation device 12. In other embodiments of the present invention, only one of the first substrate 10 and the second substrate 11 is fabricated by a semiconductor process to provide a control circuit, and the single control circuit is used to provide the driving device 12 to drive power and calculate processing. Sensing data received from sensor 14.

Continuing to refer to FIG. 1A , the actuating device 122 is configured to drive a gas that is closed to the through-groove 110 of the second substrate 11 , thereby defining a compression chamber A between the through-groove 110 and the valve sheet layer 13 . In the preferred embodiment of the present invention, the actuating device 12 is a microelectromechanical system (MEMS), which performs micro-machining of the surface of the material by means of dry and wet etching to form an integrally formed micro gas. Pumping, which mainly comprises an actuating film 121 and a piezoelectric film 122, wherein the actuating film 121 is a transmissive surface micromachining The planar structure made by the surface micromachining, and the actuating film 121 is composed of a thin film of a metal material or a film of a polycrystalline silicon, but it is not limited thereto, and may be changed according to actual conditions. The piezoelectric film 122 may be, but not limited to, a metal oxide film formed by a Sol-gel method and attached to the surface of the actuation film 121. When the piezoelectric film 122 drives the actuation film 121 to vibrate upward, the compression chamber A generates a pressure gradient, and then the gas flows from the intake passage 101 through the second intake passage 1102 into the compression chamber A (ie, as shown in FIG. 1B). Conversely, when the piezoelectric film 122 drives the actuation film 121 to vibrate downward, the compression chamber A is compressed, and the gas flows out of the compression chamber A through the second exhaust passage 1103 into the exhaust passage 102. (ie as shown in Figure 1C). By reciprocating vibration of the piezoelectric film 122 up and down in the vertical direction, the gas can be driven to flow at a high speed, and the gas is transmitted from the suction end to the discharge end through the difference in impedance of the flow path in and out, and the gas pressure at the discharge end is greater than the atmospheric pressure. In this state, there is still the ability to continuously push out the gas and operate in a silent state.

Continuing to refer to FIG. 1A , the valve layer 13 is disposed between the first substrate 10 and the second substrate 11 and includes an intake valve 131 and an exhaust valve 132 , both of which are openable and closeable valve switch structures. In the closed state of the valve, the intake valve 131 closes the intake passage 101 of the first substrate 10 to isolate the intake passage 101 and the second intake passage 1102; and the exhaust valve 132 closes the exhaust of the first substrate 10. The passage 102 isolates the exhaust passage 102 from the second exhaust passage 1103. In the state where the valve is open, the second intake passage 1102 will open the intake passage 101 of the first substrate 10, and the second exhaust passage 1103 will open the exhaust passage 102 of the first substrate 10; The intake port 1011, the intake passage 101, the compression chamber A, the exhaust passage 102, and the exhaust port 1021 communicate with each other to form an air flow circuit.

In the present embodiment, as shown in FIG. 1A, the valve sheet layer 13 is an elastic film structure, and by forming a plurality of gaps 133a and 133b, the intake valve 131 and the exhaust valve 132 are respectively defined to form The intake valve 131 and the exhaust valve 132 are in the form of an elastic membrane that can be deformed and opened by the air pressure, and the gas flows through the gaps 133a and 133b at the periphery thereof. Even worse, first The substrate 10 further has a convex portion structure 103 corresponding to the intake valve 131 to generate a pre-force contact with the intake valve 131. Similarly, the second substrate 11 also has a convex portion corresponding to the exhaust valve 132. The structure 111 is configured to generate a pre-force top exhaust valve 132. By the arrangement of the convex portions 103 and 111, it is possible to prevent the gas in the air flow circuit from flowing back through the intake valve 131 or the exhaust valve 132.

Continuing to refer to FIG. 1A, sensor 14 can be placed at any of the above airflow circuits to sense airflow. In the preferred embodiment of the present invention, the sensor 14 is disposed on the first substrate 10 or the second substrate 11 through a semiconductor process and is in contact with or adjacent to the airflow loop. In the present embodiment, the sensor 14 is disposed in the exhaust passage 102 of the second substrate 11 and disposed corresponding to the exhaust port 1021. The sensor 14 of the embodiment is electrically connected to the first control circuit 151 to obtain a driving power source and detect the concentration of at least one specific target in the gas of the airflow loop. The sensor 14 may include at least one of an oxygen sensor, a carbon monoxide sensor, a carbon dioxide sensor, a temperature sensor, an ozone sensor, and a volatile organic compound sensor, or a combination thereof, but is not limited thereto, and may be changed according to actual conditions.

Please refer to FIG. 1A, FIG. 1B and FIG. 1C. 1B is a schematic diagram of an intake actuation structure of an actuation sensing module in a preferred embodiment of the present invention; FIG. 1C is a preferred embodiment of the present invention, the actuation structure of the actuation sensing module schematic diagram. The state in which the actuation sensing module 1 of the present embodiment is not enabled is as shown in FIG. 1A. When the actuation sensing module 1 is driven, the second control circuit 152 provides a drive power to the actuator 12 to enable the actuation device 12 to reciprocate in a vertical direction. When the actuating device 12 vibrates upward, as shown in FIG. 1B, the volume of the compression chamber A becomes larger, the pressure becomes smaller, and a pressure gradient is generated, so that the intake valve 131 of the valve sheet layer 13 is driven by atmospheric pressure to vibrate upward. Turning on, at this time, the exhaust valve 132 of the valve plate layer 13 remains closed and the top contact structure 111 is topped. In this way, one of the external gases can be introduced into the intake passage 101 via the intake port 1011 and flow through the plurality of gaps 133a of the valve sheet layer 13 into the compression chamber A. Conversely, when the actuating device 12 vibrates downward, as in the first As shown in FIG. 1C, the compression chamber A becomes smaller in volume and the pressure becomes larger, thereby generating a pressure gradient, causing the exhaust valve 132 of the valve sheet layer 13 to vibrate downward, and at the same time, the intake valve 131 of the valve sheet layer 13 is It vibrates downward and closes by touching the convex structure 103. As a result, the gas in the compression chamber A flows through the plurality of voids 133b of the valve sheet layer 13 into the exhaust passage 102, and is discharged to the outside of the actuation sensing module 1 through the exhaust port 1021.

By arranging the intake valve 131 and the exhaust valve 132 of the valve plate layer 13 to have opposite opening directions, the gas can be circulated in the air flow circuit in a single flow direction without causing a backflow phenomenon, thereby providing a The circulating airflow continues to flow through the sensor 14 to enable the sensor 14 to monitor the concentration of at least one particular target in the surrounding ambient air for information regarding immediate ambient air monitoring. Moreover, the speed of the gas circulation is accelerated by the actuating device 12, so that the sensor 14 can detect the most immediate environmental gas information, and can prompt the use whenever it detects that the surrounding environment contains toxic or dangerous gases. Take immediate protective measures to avoid gas poisoning, gas explosions, etc.

Continuing to refer to FIG. 1A , in the preferred embodiment of the present invention, the actuation sensing module 1 further includes a first shielding film 161 and a second shielding film 162 . The first protective film 161 is closed to the air inlet 1011 of the first substrate 10 , and the second protective film 162 is closed to the air outlet 1021 of the first substrate 10 . The first protective film 161 and the second protective film 162 are both waterproof, dustproof, and gas-permeable film-like structures. Through the arrangement, water vapor and dust can be prevented from entering the airflow loop from the air inlet 1011 or the exhaust port 1021, so that the interior of the actuation sensing module 1 is kept dry and dust-free, thereby avoiding the internality of the airflow loop. The components are rusted, damaged, or damaged due to dust accumulation due to moisture. At the same time, the protection levels of the first protective film 161 and the second protective film 162 can be, but are not limited to, IP64 of the International Protection Marking (IEC 60529), that is, the dustproof level is 6 (complete dustproof, dust) Unable to enter); waterproof rating is 4 (anti-splash, water splashing from any angle to the device has no negative effect). In other embodiments, the first The protection level of the protective film 161 and the second protective film 162 can also be the international protection level certification IP68 grade, that is, the dustproof level is 6; the waterproof level is 8 (no negative effect when continuously immersed in water). In addition, the protection levels of the first protective film 161 and the second protective film 162 may also be of the international protection level certification IP65, IP66 or IP67, but are not limited thereto.

Please refer to FIG. 2A, which is a schematic structural view of another preferred embodiment of the present invention. As shown in FIG. 2A, the actuation sensing module 2 of the present embodiment includes a first substrate 20, a second substrate 21, an actuation device 22, a valve sheet layer 23, and a sensor 24. The first substrate 20 is disposed with an air inlet passage 201 and an exhaust passage 202, and the air inlet passage 201 and the exhaust passage 202 are respectively formed on an outer surface of the first substrate 20 to form an air inlet port 2011 and a Exhaust port 2021. The second substrate 21 defines a through-groove 210. After the first substrate 20 and the second substrate 21 are assembled and assembled, the inlet passage 201 and the exhaust passage 202 of the first substrate 20 can communicate with the through-groove 210 of the second substrate 21.

Referring to FIG. 2A, in the embodiment, the first substrate 20 is further processed by a semiconductor process to form a first control circuit 251, and the second substrate 21 is also fabricated by a semiconductor process to form a second control circuit 252. The first control circuit 251 is electrically connected to the sensor 24 to receive the sensing data generated by the sensor 24 and is processed. The second control circuit 252 is electrically connected to the actuator 22 to provide the driving device 22 to drive the power. The actuating device 22 is disposed on the second substrate 21 and closes the through slot 210, thereby defining a compression chamber A' between the through slot 210 and the valve sheet layer 23.

Continuing to refer to FIG. 2A, the valve layer 23 is disposed between the first substrate 20 and the second substrate 21, and includes an intake valve 231 and an exhaust valve 232, both of which are openable and closeable valve switch structures. In the closed state of the valve, the intake valve 231 closes the intake passage 201 of the first substrate 20 to isolate the intake passage 201 and the through slot 210; and the exhaust valve 232 closes the exhaust passage 202 of the first substrate 20, The exhaust passage 202 and the through slot 210 are isolated. When the valve is opened, the through slot 210 can open the intake passage 101 and the exhaust passage of the first substrate 10. 102, so that the air inlet 2011, the intake passage 201, the compression chamber A', the exhaust passage 202, and the exhaust port 2021 communicate with each other to form an air flow circuit.

In the present embodiment, an annular groove is formed in the first substrate 20 corresponding to the intake valve 231 to form a convex structure 203, thereby generating a pre-force contact valve of the intake valve 231. Similarly, the body of the valve layer 23 is corresponding to the exhaust valve 232, and an annular groove is formed to form a convex structure 2321 to generate a valve for the pre-acting contact with the exhaust valve 232. By the arrangement of the convex portions 203 and 2321, the valves of the intake valve 231 and the exhaust valve 232 can be tightly closed, thereby preventing the gas in the air flow circuit from flowing back through the valve port of the intake valve 231 or the exhaust valve 232.

The actuator 22 of this embodiment can be a piezoelectric actuator of the same construction and actuation as the previous embodiment. The sensor 24 of this embodiment is disposed in the intake passage 201 of the second substrate 21 and is disposed corresponding to the intake port 2011. The sensor 24 is further electrically connected to the first control circuit 251 to obtain a driving power source.

Please also refer to Figures 2A, 2B and 2C. 2B is a schematic diagram of an intake actuation structure of an actuation sensing module according to another preferred embodiment of the present invention; FIG. 2C is a diagram showing an exhaust actuation structure of an actuation sensing module according to another preferred embodiment of the present invention; schematic diagram. The state in which the actuation sensing module 2 of the present embodiment is not enabled is as shown in FIG. 2A. When the actuation sensing module 2 is driven, the second control circuit 252 provides a drive power to the actuation device 22 to enable the actuation device 22 to reciprocate in a vertical direction. When the actuating device 22 vibrates upward, as shown in FIG. 2B, the volume of the compression chamber A' becomes larger, the pressure becomes smaller, and a pressure gradient is generated, so that the valve of the intake valve 231 of the valve sheet layer 23 is subjected to atmospheric pressure. Drive and vibrate upwards to open the valve port. At this time, the exhaust valve 232 of the valve plate layer 23 remains closed and is contacted by the top of the convex structure 203. In this way, one of the external gases can be introduced into the intake passage 201 via the intake port 2011, and the valve port of the intake valve 231 enters the compression chamber A'. When the actuating device 22 vibrates downward, as shown in FIG. 1C, the compression chamber A' is reduced in volume and the pressure is increased, thereby generating a pressure gradient, so that the valve of the exhaust valve 232 of the valve piece layer 23 is oriented. Vibrate and open the valve port; At this time, the intake valve 231 of the valve sheet layer 23 is pressed to press down the boss structure 203 to close the valve port. As a result, the gas in the compression chamber A' flows through the open valve port of the exhaust valve 232 of the valve layer 23, enters the exhaust passage 202, and is discharged to the actuation sensing module through the exhaust port 2021. 2 outside.

Continuing to refer to FIG. 2A to FIG. 2C , the actuation sensing module 2 of the present embodiment further includes a first shielding film 261 and a second shielding film 262 . The first shielding film 261 encloses the first substrate 20 . The air inlet 201 and the second shielding film 262 are closed to the exhaust port 202, but not limited thereto. The first protective film 261 and the second protective film 262 are both waterproof, dustproof and gas-permeable film-like structures. Through the arrangement, water vapor and dust can be prevented from entering the airflow from the air inlet 201 or the exhaust port 202. In the circuit, the inside of the actuating sensor module 2 is kept dry and dust-free, thereby achieving the effects of avoiding rust, damage or component damage caused by moisture accumulation in the components provided in the air flow circuit. . The protection level of the first protective film 261 and the second protective film 262 is preferably, but not limited to, the international protection level certification IP64, IP65, IP66, IP67 or IP68.

In summary, the actuating sensor module provided in the present invention activates the membrane through the piezoelectric membrane to actuate the pressure chamber, thereby causing a pressure gradient in the compression chamber, thereby allowing the gas to flow at a high speed, and achieving gas circulation. And achieve the effect of rapid gas transmission and mute. In this case, the gas is monitored by the sensor to monitor the gas in order to obtain the gas information of the surrounding environment at any time. In addition, through the arrangement of the first protective film and the second protective film, the internal components of the sensing module can be prevented from being damaged or rusted due to moisture or dust accumulation, thereby improving gas transmission efficiency and improving the operation efficiency of the device. . Therefore, the gas circulation control device of this case is of great industrial use value, and the application is filed according to law.

This case has been modified by people who are familiar with the technology, but it is not intended to be protected by the scope of the patent application.

Claims (19)

An actuation sensor module includes: a first substrate, an intake passage, an exhaust passage, an intake port and an exhaust port, wherein the intake passage and the exhaust passage respectively pass the intake air a port and the exhaust port are connected to the outside of the first substrate; a second substrate defines a through slot; a valve layer includes an intake valve and an exhaust valve, and the valve plate layer is disposed on the first Between the substrate and the second substrate, and the intake valve and the exhaust valve respectively close and isolate the intake passage and the exhaust passage; the actuating device is disposed on the second substrate and closes the through slot to Forming a compression chamber between the valve plate layer and the through groove of the second substrate, wherein the air inlet, the air inlet channel, the compression chamber, the exhaust channel and the exhaust port communicate with each other to form An air flow circuit; and a sensor disposed at any one of the air flow circuits; the drive device is driven to open the intake valve of the valve layer upward to open a gas of the outside world a port is introduced into the intake passage and the gas flows through the valve layer to enter Compressing the chamber, and compressing the compression chamber through the actuating device, causing the exhaust valve of the valve layer to vibrate downwardly, so that the gas flows from the compression chamber through the valve layer into the exhaust passage And being discharged from the exhaust port for the sensor disposed in the airflow loop to monitor the circulating gas. The actuating sensor module of claim 1, wherein the sensor is disposed in the intake passage corresponding to the intake port. The actuating sensor module of claim 1, wherein the sensor corresponding to the exhaust port is disposed in the exhaust passage. The actuating sensor module of claim 1, wherein the sensor is configured to pass through a semiconductor process One of the first substrate and the second substrate. The actuating sensor module of claim 1, wherein the first substrate is formed by the semiconductor process to form the inlet channel and the exhaust channel, and the second substrate is formed by the semiconductor process to form the through groove. The actuating sensor module of claim 1, wherein the first substrate is formed by a semiconductor process to form a first control circuit, and the second substrate is printed by a semiconductor process to form a second control circuit, the first The control circuit is electrically connected to the sensor to receive the sensing data generated by the sensor and is processed, and the second control circuit is electrically connected to the actuating device to provide the driving device driving power. The actuating sensor module of claim 1, wherein the intake valve and the exhaust valve are respectively an openable and closeable valve switch structure. The actuating sensor module of claim 1, wherein the valve layer is an elastic membrane valve. The actuating sensor module of claim 8, wherein the valve layer further comprises a plurality of gaps disposed at a periphery of the intake valve and the exhaust valve for the gas to circulate. The actuating sensor module of claim 9, wherein the first substrate corresponds to the intake valve and the second substrate corresponds to the exhaust valve, and further has a convex structure to generate a The pre-force touches the intake valve and the exhaust valve to prevent the gas from flowing backward. The actuating sensor module of claim 8, wherein the exhaust valve and one of the intake valves further have a convex structure to generate a pre-force to contact the exhaust valve One of the valves of the intake valve to prevent backflow of the gas. The actuating sensor module of claim 1, wherein the sensor comprises at least one of an oxygen sensor, a carbon monoxide sensor, a carbon dioxide sensor, a temperature sensor, an ozone sensor, and a volatile organic sensor. Or a combination thereof. The actuating sensor module of claim 1, wherein the actuating device is a MEMS gas pump and is an integrally formed structure comprising: The uniform moving film is a planar structure made by the surface micromachining technology, and is composed of a metal material film or a polycrystalline germanium film; and a piezoelectric film is a metal oxide film formed by a sol-gel method. And attached to a surface of the actuating film; when the piezoelectric film drives the actuating film to vibrate upward, the compression chamber generates a pressure gradient to cause the gas to flow in from the inlet channel; when the piezoelectric film is driven When the actuating membrane vibrates downward, the compression chamber is compressed to allow the gas to flow out of the exhaust passage. The actuating sensor module of claim 1, wherein the actuating sensor module further comprises a first protective film and a second protective film, the first protective film being closedly disposed at the air inlet The second protective film is disposed in the exhaust port, and the first protective film and the second protective film are both waterproof, dustproof, and gas-permeable film structure. The actuating sensor module of claim 14, wherein the first protective film and the second protective film have a degree of protection of the international protection level IP64. The actuating sensor module of claim 14, wherein the first protective film and the second protective film have a degree of protection of the international protection level IP65. The actuating sensor module of claim 14, wherein the first protective film and the second protective film have a degree of protection of the international protection level IP66. The actuating sensor module of claim 14, wherein the first protective film and the second protective film have a degree of protection of the international protection level IP67. The actuating sensor module of claim 14, wherein the first protective film and the second protective film have a degree of protection of the international protection level IP68.