TWM552478U - Transporting device - Google Patents

Abstract

A transporting device includes a cassette body and a cover body. The cassette body has an opening, and a sheet-shaped article is adapted to enter an inner of the cassette body through the opening. The cover body has an outer side and an inner side opposite to each other, and is adapted to cover the opening. The cover body has a retaining assembly at the inner side, the cover has a locking mechanism, the locking mechanism includes an operating portion, and the operating portion is operated at the outer side of the cover body and connected with the retaining assembly. When the cover body covers the opening, the operating portion is adapted to rotate such that the locking mechanism becomes a locking state or an unlocking state. When the locking mechanism becomes the locking state, the operating portion drives the retaining assembly to move or protrude from the inner side of the cover body toward the inner of the cassette body and retain the sheet-shaped article. When the locking mechanism becomes the unlocking state, by the driving of the operating portion or the driving of a restoring assembly, the retaining assembly moves or draws back toward the inner side of the cover body to be retracted to the cover body.

Description

Carrier

The present invention relates to a carrier device and, more particularly, to a carrier for carrying a sheet.

Generally, the fragile sheet, such as a wafer, a photomask, a glass substrate, or the like used in the semiconductor or optoelectronic industry, must be prevented from colliding if it is to be transported from the ground to the ground, otherwise the chipping is likely to occur. Moreover, such as wafers, reticle, and the like, which are susceptible to quality due to particulate contamination, it is also necessary to avoid dust adhering during transportation. Therefore, packaging of such articles generally cannot use buffers such as paper or foam which are prone to fines. material.

Taking a wafer as an example, a front opening wafer pod (FOUP) commonly used in the industry for loading a plurality of wafers usually includes a box body and a cover body that can be repositionably covered in the box body. The two together form an accommodating space, and a carrying component is disposed in the casing to carry a plurality of wafers. The inner side of the cover body is provided with a holding component for holding the wafer in the casing. If the wafer is circular, the holding component can be embedded in the recess of the inner panel of the cover without protruding the recess, as long as the convex arc edge of the wafer can protrude into the recess to the holding component. The holding component is held. However, if the sheet to be loaded is square, such as a square wafer, etc., the square sheet does not have a convex curved edge that can be extended to the holding component embedded in the recess of the inner panel of the cover. This causes the holding assembly to be unable to hold the square sheet.

The novel creation provides a carrier device in which the holding assembly of the cover body can effectively hold the sheet in the casing.

The carrier of the present invention is adapted to accommodate at least one piece and includes a box and a cover. The casing has an opening adapted to pass through the opening into the interior of the casing. The cover body has a pair of outer side plates and an inner side plate, and the outer side plate and the inner side plate cover the opening when the cover body passes, so that the outside air cannot pass through the cover body and enter the casing. The cover is adapted to cover the opening such that the inner side panel faces the interior of the case. The cover body has a holding component on a side of the inner side plate facing the inner side of the casing, the cover body has a latching mechanism, the latching mechanism includes an operating portion, the operating portion is adapted to be operated by the outer side of the cover body, and the operating portion is connected to the operating portion Hold the component. When the cover covers the opening, the operating portion is adapted to rotate so that the latch mechanism becomes a latched state that interferes with the casing, and is adapted to rotate to cause the latch mechanism to be in an unlocked state separated from the casing. When the operating portion rotates to bring the latch mechanism into the latched state, the operating portion drives the holding assembly to move or protrude from the inner side plate of the cover toward the inside of the case to hold the sheet in the casing. When the operation portion is rotated to bring the latch mechanism into the unlocked state, the holding member is moved or contracted toward the inner side plate of the cover body by the driving of the operating portion or the driving of the resetting assembly to be engaged with the cover body.

In an embodiment of the present invention, the cover body has at least one pushing member, and the pushing member passes through the inner side plate to connect the holding assembly and the operating portion, and the operating portion is adapted to rotate to drive the holding assembly by the pushing member.

In an embodiment of the present invention, at least one side of the inner side panel is provided with a sealing member to maintain airtightness on both sides of the pushing portion of the inner side panel.

In an embodiment of the present invention, the pushing member includes a rod portion and a pushing portion, and the pushing portion abuts against the holding assembly, and the rod portion passes through the inner side plate to connect the pushing portion and the operating portion.

In an embodiment of the present invention, the pushing portion has a slope, and the pushing portion is adapted to move in a pushing direction to push the holding assembly to move from the inner side plate of the cover body to the inside of the casing body in a moving direction by the inclined surface. Or a protrusion, wherein the pushing direction is perpendicular to the moving direction, and the inclined surface is inclined to the pushing direction and the moving direction.

In an embodiment of the present invention, the cover body has an interlocking mechanism on the inner side panel, and the linkage mechanism includes at least one linkage rod disposed on the inner side panel, the linkage rod has a pivoting portion, and the pivoting portion is pivotally connected to the pivoting portion. An inner side plate of the cover body, and one end of the linkage rod is connected to the holding assembly, and the operating portion is adapted to rotate and pivots the linkage rod by the second end to drive the holding assembly.

In an embodiment of the present invention, the cover body has a linkage mechanism, and the linkage mechanism includes at least one linkage rod disposed on the inner side panel, the linkage rod has a pivoting portion, and the pivoting portion is pivotally connected to the cover body. The inner side plate has one end connected to the holding component, and the other end is connected with the pushing member, and the operating portion is adapted to rotate and drive the pushing member to push the linkage rod to pivot, thereby driving the holding assembly to act.

In an embodiment of the present invention, the holding assembly is adapted to move or protrude from the inner side panel of the cover body toward the inner side of the casing in a moving direction, and the linkage rod is pivotally connected to the inner side of the cover body along a pivot axis. The plate, the pivot axis is perpendicular to the direction of movement.

In an embodiment of the present invention, the operating portion has a slope and is adapted to rotate to push the pushing member by the inclined surface, and the inclined surface is inclined in a direction in which the holding assembly moves or protrudes.

In an embodiment of the present invention, the latch mechanism includes at least one latch, and the operating portion is connected to the latch. When the cover covers the opening, the operating portion is adapted to rotate to drive the latch to protrude from the outer edge of the cover. Interference with the casing and suitable for rotation to drive the bolt into the cover to separate from the casing.

Based on the above, in the carrying structure of the present invention, in addition to the latching or unlocking of the cover to the casing, the latching mechanism on the cover can further move the holding component of the inner panel of the cover toward the inside of the casing. Or protruding. Thereby, the holding assembly can effectively hold the sheet in the casing.

The above described features and advantages of the present invention will become more apparent and understood from the following description.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing the appearance of a carrier device according to an embodiment of the present invention. Fig. 2 is a perspective view of the casing of Fig. 1. Fig. 3 is a perspective view of the cover of Fig. 1. Referring to FIG. 1 to FIG. 3 , the carrier device 100 of the embodiment includes a box body 110 and a cover body 120 . The casing 110 has an opening 110a, and a sheet (not shown) such as a wafer or a square substrate is adapted to enter the inside of the casing 110 through the opening 110a. The interior of the casing 110 has a load bearing assembly 114 that is adapted to carry the sheets.

4 is a perspective view of the cover of FIG. 3 from another perspective. Referring to FIG. 3 and FIG. 4 , the cover body 120 has an outer side plate 120 a and an inner side plate 120 b , and the outer side plate 120 a and the inner side plate 120 b are arranged to cover the opening 110 a of the cover body 120 so that the outside air cannot pass through the cover body. 120 enters the structure within the casing 110. The cover 120 is adapted to cover the opening 110a of the casing 110 shown in FIG. 2 with the inner panel 120b facing the inside of the casing 110.

That is to say, in the closed state, the gas outside the casing 110 cannot enter the inside of the casing 110 through the outer panel 120a and the inner panel 120b from the outer side of the cover 120, so that the cover 120 can be covered after the opening 110a, and the outside is ensured. The various contaminants do not enter the inside of the casing 110 as the ambient gas contaminates the wafer or the substrate on which the substrate is placed.

As shown in FIG. 4, the cover 120 has a holding component 124 for holding a plurality of components in the casing 110 by a plurality of holding members 124a thereon when covering the opening 110a of the casing 110. The leading edge of the sheet.

Referring to FIG. 1 and FIG. 3, the cover 120 has at least one latching mechanism 122 (shown as two), and each latch mechanism 122 includes an operating portion 122a and at least one latch 122b (shown as two). The portion 122a is adapted to be operated by the outside of the cover 120, and the operating portion 122a is connected to the latch 122b. When the cover 120 covers the opening 110a of the casing 110, the operating portion 122a is adapted to be rotated by the driving of a robot arm or other driving unit in the process system to drive the latch 122b to protrude from the outer edge of the cover 120 ( Interference with the slot 110b of the casing 110 as shown in FIG. 3 causes the latch mechanism 122 to interfere with the latching state of the casing 110. In addition, when the cover 120 covers the opening 110a of the casing 110, the operating portion 122a is adapted to be reversely rotated by the driving of a robot arm or other driving unit in the process system to drive the latch 122b into the cover 120. Separated from the casing 110, the latch mechanism 122 is in an unlocked state separated from the casing 110.

Fig. 5 is a perspective view showing a partial structure of the cover of Fig. 3; Referring to FIG. 5, in the embodiment, the operating portion 122a can be a turntable having a sliding slot connected to the inner end of the latch 122b or another suitable kind of linkage mechanism to convert the rotating motion of the operating portion 122a into the latch 122b. The translation action, this new creation does not limit this.

The operating portion 122a can be directly or indirectly coupled to the holding assembly 124. In this embodiment, the cover body 120 has at least one pushing member 129 (shown as two) as shown in FIG. 4 and FIG. 5, and the operating portion 122a is connected to the pushing member 129 passing through the inner side plate 120b. Holding component 124.

When the operating portion 122a rotates to bring the latch mechanism 122 into the latched state, the operating portion 122a drives the holding assembly 124 to move or protrude from the inner side plate 120b of the cover 120 toward the inside of the casing 110 by the pushing member 129. The leading edge of the sheet located within the casing 110 is contacted and held. When the operating portion 122a rotates in the reverse direction to bring the latch mechanism 122 into the unlocked state, it is driven by the pusher 129 of the operating portion 122a or a set of resetting components (not shown) such as a return spring. The assembly 124 is moved or contracted toward the inner side plate 120b of the cover 120 to be folded over the cover 120.

With the above configuration and actuation mode, the holding assembly 124 can effectively hold the sheet in the casing 110, particularly a square sheet. On the other hand, when the cover 120 is separated from the casing 110, the holding assembly 124 is folded into the cover 120 as described above, so that the overall thickness of the cover 120 can be reduced to reduce the occupation of the cover 120 in the manufacturing system. The space, thereby saving the space cost of the process system, can also prevent the protruding holding assembly 124 from colliding with nearby equipment or personnel during the process of picking up the cover 120.

As shown in FIG. 5, at least one side of the inner side plate 120b of the present embodiment is provided with at least one sealing member 127 (shown as two), and the sealing member 127 is, for example, a telescopic sleeve having a closed end connected to the operating portion. Between the 122a and the inner side plate 120b, a sleeve is disposed between the operating portion 122a and the inner side plate 120b. Thereby, the airtightness of the pusher member 129 of the inner side plate 120b can be maintained, and the contaminants in the external environment can be prevented from penetrating into the casing 110 through the operation portion 122a or the like through the atmosphere in the environment.

Fig. 6A is a perspective view showing a partial structure of the cover of Fig. 4; FIG. 6B illustrates the state of the pusher of FIG. 6A as it is pushed. Referring to FIG. 6A and FIG. 6B, in detail, the pushing member 129 of the embodiment includes a rod portion 129a and a pushing portion 129b. The pushing portion 129b abuts against the holding assembly 124 shown in FIG. 4, and the rod portion 129a passes through. The inner plate 120b is connected to the push portion 129b and the operation portion 122a shown in Fig. 5 . The pushing portion 129b has a slope S1, and the pushing portion 129b is adapted to move from the position shown in FIG. 6A to the position shown in FIG. 6B in the pushing direction D2 to push the holding assembly 124 in the moving/projecting direction D1 by the inclined surface S1 (indicated in the figure) 2) Moving or protruding from the inner side plate 120b of the cover 120 toward the inside of the casing 110, wherein the pushing direction D2 is perpendicular to the moving/projecting direction D1, and the inclined surface S1 is inclined to the pushing direction D2 and the moving/projecting direction D1. FIG. 7A illustrates the holding assembly of FIG. 4 folded on the inner side of the cover.

FIG. 7B illustrates a state in which the holding assembly of FIG. 4 moves out of the inside of the cover. When the pushing portion 129b is in the state shown in FIG. 6A, the holding member 124 is pushed out by the pushing portion 129b to be in the collapsed state shown in FIG. 7A. When the pushing portion 129b is in the state shown in FIG. 6B, the holding member 124 is pushed out by the pushing portion 129b to be in the non-retracted state shown in FIG. 7B and adapted to hold the sheet in the casing 110.

Figure 8 is a perspective view of the retaining assembly of Figure 4. In the present embodiment, the holding assembly 124 can have a slope S3 that abuts against the slope S1 of the pushing portion 129b (suitable for FIGS. 6A and 6B), and can be smoothly pushed by the slope S1 of the pushing portion 129b.

Fig. 9 is a perspective view of the operation portion and the pusher of Fig. 5; Referring to FIG. 9, the operating portion 122a of the present embodiment drives the pusher 129 to move, for example, by the guide groove T. Specifically, the different sections of the guide groove T are different from the rotation center of the operation portion 122a, and the pusher 129 has the convex portion located in the guide groove T. As the operation portion 122a rotates, the convex portion of the pusher 129 moves along the guide groove T to change its distance from the center of rotation of the operation portion 122a, thereby causing the pusher 129 to move. In other embodiments, the operating portion 122a can convert the amount of rotation of the operating portion 122a into the amount of translation of the pushing member 129 by other suitable structures, which is not limited by the novel creation.

The novel creation does not limit the manner in which the operating portion drives the holding assembly, and the following is illustrated by the drawings. Figure 10 is a perspective view of a cover body of another embodiment of the present invention. The design of the casing corresponding to the embodiment shown in Fig. 10 is the same as that of the casing 110 of Fig. 1. The difference between the embodiment shown in FIG. 10 is that the cover body 220 has a linkage mechanism 226 on the inner side plate 220b, and the linkage mechanism 226 includes at least one linkage rod 226a (shown as four) disposed on the inner side panel, and each linkage rod 226a has A first end E1, a second end E2 and a pivoting portion P. The pivoting portion P is located between the first end E1 and the second end E2 and is pivotally connected to the inner side plate 220b of the cover 220. The first end E1 is connected to the holding component 224, and the second end E2 is connected to the pushing member 229. The portion 222a (corresponding to the operating portion 122a shown in FIG. 1) is adapted to rotate and the driving member 229 is driven to pivot by the second end E2 to pivot the linkage rod 226a to drive the holding assembly 224 by the linkage rods 226a of the linkage mechanism 226. The sheet located in the casing is held by moving from the inner side plate 220b of the cover 220 to the inside of the casing (the casing 110 shown in Fig. 1).

In detail, the holding assembly 224 of the present embodiment is adapted to move from the inner side plate 220b of the cover 220 to the casing in the moving/projecting direction D3 (corresponding to the moving/projecting direction D1 shown in FIG. 2) (FIG. 1) The interior of the illustrated housing 110) is moved or protruded, and each of the linkage bars 226a is pivotally coupled to the inner side plate 220b of the cover 220 in a pivot axis A perpendicular to the direction of movement. In addition, the ratio of the distance between the first end E1 and the pivoting portion P and the distance between the second end E2 and the pivoting portion P is such that the operating portion 222a can drive the first end E1 to generate an appropriate displacement amount. It is designed to drive the holding assembly 224 to move the appropriate distance to hold the sheet.

Figure 11 is a partial perspective view of the cover of Figure 10. Referring to FIG. 11, the operation portion 222a (corresponding to the operation portion 122a shown in FIG. 1) of the present embodiment may have an inclination to the movement/projection direction D3 (corresponding to the movement/projection direction D1 shown in FIG. 2). A slope S2 is adapted to rotate and the pushing member 229 is moved in the moving/projecting direction D3 by the inclined surface S2 to drive the linkage rod 226a to rotate. When the pusher 229 is reset in the direction opposite to the moving/projecting direction D3 in accordance with the reverse rotation of the operating portion 122a, the interlocking lever 226a is, for example, a reset member (such as a return spring) provided at the second end E2. 230) and reset. In other embodiments, the operating portion can drive the linkage rod to rotate by other suitable structures, which is not limited by the novel creation. Further, the sealing member 227 provided at the inclined surface S2 shown in FIG. 11 functions similarly to the sealing member 127 of FIG. 5 for maintaining airtightness at both sides of the pushing member 229 of the cover 220.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the novel creation, and any person skilled in the art can make some changes without departing from the spirit and scope of the novel creation. Retouching, the scope of protection of this new creation is subject to the definition of the scope of the patent application attached.

100‧‧‧ Carrier

110‧‧‧Box

110a‧‧‧ openings

110b‧‧‧ slots

114‧‧‧Loading components

120, 220‧‧‧ cover

120a‧‧‧Outer board

120b, 220b‧‧‧ inside panel

122‧‧‧Latch mechanism

122a, 222a‧‧‧Operation Department

122b, 222b‧‧‧ latch

124, 224‧‧‧ holding components

124a, 224a‧‧‧ holding parts

127, 227‧‧‧ sealing elements

129, 229‧‧‧ pushers

129a‧‧‧ pole

129b‧‧‧Promotion Department

226‧‧‧ linkage agency

226a‧‧‧ linkage rod

230‧‧‧Return spring

A‧‧‧ pivot axis

D1, D3‧‧‧Moving/protrusion direction

D2‧‧‧ Driving direction

E1‧‧‧ first end

E2‧‧‧ second end

P‧‧‧ pivotal department

S1, S2, S3‧‧‧ bevel

T‧‧‧ guiding slot

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing the appearance of a carrier device according to an embodiment of the present invention. Fig. 2 is a perspective view of the casing of Fig. 1. Fig. 3 is a perspective view of the cover of Fig. 1. 4 is a perspective view of the cover of FIG. 3 from another perspective. Fig. 5 is a perspective view showing a partial structure of the cover of Fig. 3; Fig. 6A is a perspective view showing a partial structure of the cover of Fig. 4; FIG. 6B illustrates the state of the pusher of FIG. 6A as it is pushed. FIG. 7A illustrates the inner panel of the retaining assembly of FIG. 4 folded over the cover. FIG. 7B illustrates a state in which the holding assembly of FIG. 4 moves out of the inner side panel of the cover. Figure 8 is a perspective view of the retaining assembly of Figure 4. Fig. 9 is a perspective view of the operation portion and the pusher of Fig. 5; Figure 10 is a perspective view of a cover body of another embodiment of the present invention. Figure 11 is a partial perspective view of the cover of Figure 10.

122‧‧‧Latch mechanism

122a‧‧‧Operation Department

122b‧‧‧Latch

127‧‧‧ sealing element

129‧‧‧ Pusher

Claims (10)

A carrier adapted to receive at least one sheet and comprising: a casing having an opening, wherein the sheet is adapted to enter the interior of the casing through the opening; and a cover having an opposite one The outer side plate and the inner side plate are adapted to cover the opening so that the inner side plate faces the inside of the box body, and the outer side plate and the inner side plate cover the opening when the cover body is configured to prevent the outside air from passing through a structure that enters the casing body, wherein the cover body has a holding component on a side of the inner side plate facing the inside of the casing, the cover body has a latching mechanism, and the latching mechanism includes an operating portion, The operating portion is adapted to be operated by the outside of the cover, and the operating portion is coupled to the holding assembly, wherein when the cover covers the opening, the operating portion is adapted to rotate to cause the latching mechanism to interfere with the box a latched state of the body, and adapted to rotate to cause the latch mechanism to be in an unlocked state separated from the casing, and when the operating portion is rotated to cause the latching mechanism to be in the latched state, the operating portion is driven The holding component from the The inner panel of the body moves or protrudes toward the inside of the casing to hold the sheet located in the casing, and when the operating portion rotates to bring the latch mechanism into the unlocked state, the operating portion Driving or a reset component drives the holding assembly to move or contract toward the inner side of the cover to be engaged with the cover. The carrier device of claim 1, wherein the cover body has at least one pushing member, and the pushing member passes through the inner side plate of the cover body to connect the holding device. And the operating portion, the operating portion is adapted to rotate to drive the holding assembly by the pushing member. The carrier device of claim 2, wherein at least one side of the inner side panel is provided with a sealing member to maintain airtightness on both sides of the inner side plate through which the pushing member passes. The carrier device of claim 2, wherein the pushing member comprises a rod portion and a pushing portion, the pushing portion abuts against the holding assembly, the rod portion is connected through the inner side plate The pushing portion and the operating portion. The carrier device of claim 4, wherein the pushing portion has a slope, the pushing portion is adapted to move in a pushing direction, and the inclined portion pushes the holding component from the cover body in a moving direction The inner side plate moves or protrudes toward the inside of the casing, wherein the pushing direction is perpendicular to the moving direction, and the inclined surface is inclined to the pushing direction and the moving direction. The carrier device of claim 1, wherein the cover body has a linkage mechanism, and the linkage mechanism includes at least one linkage rod disposed on the inner side panel, the linkage rod having a pivoting portion, the pivoting joint The connecting portion is pivotally connected to the inner side plate of the cover body, and the connecting rod is connected to the holding assembly at one end, and the operating portion is adapted to rotate and drive the connecting rod to pivot, thereby driving the holding assembly to act. The carrier device of claim 2, wherein the cover body has a linkage mechanism, and the linkage mechanism includes at least one linkage rod disposed on the inner side panel, the linkage rod has a pivoting portion, the pivoting joint The pivoting portion is pivotally connected to the inner side plate of the cover body, and one end of the connecting rod is connected to the holding component, and the other end is connected to the pushing member. The operating portion is adapted to rotate and drive the pushing member to push the linkage rod to pivot, thereby driving the holding assembly to act. The carrier device of claim 6 or 7, wherein the holding assembly is adapted to move or protrude from the inner side panel of the cover body toward the inside of the box body in a moving direction, the linkage rod edge A pivot axis is pivotally connected to the inner side panel of the cover body, the pivot axis being perpendicular to the moving direction. The carrier device of claim 7, wherein the operating portion has a slope and is adapted to rotate to push the pushing member by the inclined surface, the inclined surface being inclined in a direction in which the holding assembly moves or protrudes. The carrier device of claim 1, wherein the latching mechanism comprises at least one latch, the operating portion is connected to the latch, and when the cover covers the opening, the operating portion is adapted to rotate to drive the latch from The outer edge of the cover protrudes to interfere with the casing, and is adapted to rotate to drive the latch to move into the cover to be separated from the casing.