TWM536812U - Motor module and sliding table device - Google Patents

Motor module and sliding table device Download PDF

Info

Publication number
TWM536812U
TWM536812U TW105210507U TW105210507U TWM536812U TW M536812 U TWM536812 U TW M536812U TW 105210507 U TW105210507 U TW 105210507U TW 105210507 U TW105210507 U TW 105210507U TW M536812 U TWM536812 U TW M536812U
Authority
TW
Taiwan
Prior art keywords
rotor
motor module
rotating shaft
motor
table device
Prior art date
Application number
TW105210507U
Other languages
Chinese (zh)
Inventor
Kun-Cheng Zeng
Yu-Ling Liu
qi-wen Zhong
En-Yi Zhu
Original Assignee
Toyo Automation Co Ltd
Delta Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Automation Co Ltd, Delta Electronics Inc filed Critical Toyo Automation Co Ltd
Priority to TW105210507U priority Critical patent/TWM536812U/en
Publication of TWM536812U publication Critical patent/TWM536812U/en

Links

Landscapes

  • Linear Motors (AREA)
  • Machine Tool Units (AREA)

Description

馬達模組及滑台裝置Motor module and slide unit

本新型係關於一種馬達模組,特別關於一種馬達模組及滑台裝置。The present invention relates to a motor module, and more particularly to a motor module and a slide device.

滑台裝置由於具有線性移動的特性,被廣泛應用於工業界機台上,並且需進行線性移動對工作機構之承載,使該工作機構藉由線性滑軌帶動而進行直線移動,利於校準以及操作作業的進行。Due to the linear movement characteristics, the slide table device is widely used in industrial machines, and needs to be linearly moved to the working mechanism, so that the working mechanism can be linearly moved by linear slides, which is convenient for calibration and operation. The work is carried out.

滑台裝置主要具有一線性軌道以及一滑動單元。滑動單元主要具有一滑座滑設於線性軌道上,並具有一承載件結合於滑座上。當一馬達模組驅動轉動軸時,與轉動軸接合之滑座亦會在線性軌道之軌道槽移動,並且承載件上之工作機構係被帶動而進行線性移動。The slide table device mainly has a linear track and a sliding unit. The sliding unit mainly has a sliding seat sliding on the linear track and has a bearing member coupled to the sliding seat. When a motor module drives the rotating shaft, the sliding seat engaged with the rotating shaft also moves in the track groove of the linear track, and the working mechanism on the carrier is driven to linearly move.

在習知的滑台裝置中,皆是由一聯軸器連接轉動軸及馬達軸心,使得馬達運作時可經由聯軸器帶動轉動軸。然而,長時間使用下,聯軸器易產生損壞或鬆脫。並且,由於是使用聯軸器連接馬達軸心與轉動軸,因此馬達轉速無法太高以免整體結構無法負荷。此外,聯軸器產生的撓性誤差亦會造成精度降低,而降低裝置的工作效能。最後,由於滑台裝置需要預留空間來設置聯軸器,因而無法有效節省空間並達到輕量化的目的。In the conventional slide table device, a rotating shaft and a motor shaft are connected by a coupling, so that the rotating shaft can be driven by the coupling when the motor is in operation. However, the coupling is prone to damage or looseness under prolonged use. Moreover, since the coupling is used to connect the motor shaft and the rotating shaft, the motor speed cannot be too high to prevent the entire structure from being loaded. In addition, the flexibility error caused by the coupling will also reduce the accuracy and reduce the working efficiency of the device. Finally, since the slide table device needs to reserve space to set the coupling, it is not effective in saving space and achieving weight reduction.

因此,如何提供一種馬達模組及滑台裝置,能以創新的結構設計解決上述問題,進而提升滑台裝置的使用壽命、工作效能及競爭力,實為當前重要課題之一。Therefore, how to provide a motor module and a slide table device can solve the above problems with an innovative structural design, thereby improving the service life, work efficiency and competitiveness of the slide table device, which is one of the current important topics.

有鑒於上述課題,本新型之一目的在於提供一種馬達模組及滑台裝置,能以創新的結構設計解決習知問題,進而提升滑台裝置的使用壽命、工作效能及競爭力。In view of the above problems, an object of the present invention is to provide a motor module and a slide table device, which can solve the conventional problems with an innovative structural design, thereby improving the service life, work efficiency and competitiveness of the slide table device.

為達上述目的,本新型之一種馬達模組包含一定子、一轉子以及一轉動軸。轉子係具有一貫孔並由定子所驅動。轉動軸係經由貫孔而穿設轉子並與轉子相對固定。To achieve the above object, a motor module of the present invention includes a stator, a rotor, and a rotating shaft. The rotor system has a constant bore and is driven by the stator. The rotating shaft is threaded through the through hole and fixed relative to the rotor.

在一實施例中,定子係環繞轉子而設置。In an embodiment, the stator is disposed around the rotor.

在一實施例中,轉動軸係為一螺桿。In one embodiment, the rotating shaft is a screw.

在一實施例中,轉動軸具有至少一凹槽,一連接件係設置於凹槽並連接轉動軸與轉子。In an embodiment, the rotating shaft has at least one groove, and a connecting member is disposed on the groove and connects the rotating shaft and the rotor.

在一實施例中,轉子具有至少一固定部,至少一固定件設置於固定部而將轉動軸固定於轉子。In an embodiment, the rotor has at least one fixing portion, and at least one fixing member is disposed on the fixing portion to fix the rotating shaft to the rotor.

在一實施例中,當具有複數該固定件時,該等固定件係為螺絲與固定片之組合。In an embodiment, when there are a plurality of the fixing members, the fixing members are a combination of a screw and a fixing piece.

在一實施例中,當轉子具有複數固定部時,該等固定部係分別設置於轉子之兩端。In an embodiment, when the rotor has a plurality of fixing portions, the fixing portions are respectively disposed at both ends of the rotor.

為達上述目的,本新型之一種滑台裝置包含一線性軌道、一滑動單元以及上述任一馬達模組。滑動單元係可於該線性軌道上移動。轉動軸係與滑動單元耦接。To achieve the above object, a slide device of the present invention comprises a linear track, a slide unit and any of the above motor modules. The sliding unit is movable on the linear track. The rotating shaft system is coupled to the sliding unit.

如上所述,在本新型之馬達模組中,轉動軸係穿設馬達之一轉子並與轉子相對固定。藉此,本新型之馬達模組就省略了習知聯軸器的使用,進而產生許多優點。例如,當馬達模組應用於滑台裝置時,可避免聯軸器長時間使用易損壞或鬆脫的風險,並因而延長滑台裝置的使用壽命;並且由於是使用轉子直接接合轉動軸,因此可使馬達轉速再次提升而能增加滑台裝置的應用性並提高其工作效能;此外,本新型亦可避免聯軸器所產生的撓性誤差,進而提升滑台裝置的精度及工作效能;最後,由於滑台裝置不需要預留空間來設置聯軸器,因而可大幅節省空間並達到輕量化的目的。As described above, in the motor module of the present invention, the rotating shaft passes through one of the rotors of the motor and is fixed to the rotor. Therefore, the motor module of the present invention omits the use of the conventional coupling, thereby generating many advantages. For example, when the motor module is applied to the slide unit, the risk of the coupling being prone to damage or looseness for a long period of time can be avoided, and thus the service life of the slide unit is extended; and since the rotor is directly engaged with the rotating shaft, The motor speed can be increased again to increase the applicability of the slide device and improve its working efficiency; in addition, the present invention can also avoid the flexibility error generated by the coupling, thereby improving the accuracy and working efficiency of the slide device; Since the slide table device does not need to reserve space for setting the coupling, it can save space and achieve weight reduction.

圖1為本新型一實施例之馬達模組13及滑台裝置1的分解示意圖,圖2為本新型一實施例之馬達模組13及滑台裝置1的組合剖面示意圖。需注意者,本新型不限制馬達模組13的應用範圍,並且本新型亦不限制滑台裝置1的用途與領域,只要其係用於承載一工作機構以使其進行線性移動。1 is an exploded perspective view of a motor module 13 and a slide table device 1 according to an embodiment of the present invention. FIG. 2 is a schematic cross-sectional view showing a motor module 13 and a slide table device 1 according to an embodiment of the present invention. It should be noted that the present invention does not limit the application range of the motor module 13, and the present invention does not limit the use and field of the slide device 1, as long as it is used to carry a working mechanism for linear movement.

如圖1及圖2所示,本實施例之滑台裝置1係包含一線性軌道11、一滑動單元12以及一馬達模組13。線性軌道11可供滑動單元12於其上滑動,而滑動單元12可在線性軌道11上移動。由於此部分可由習知技術者所熟知,故於此不再贅述。As shown in FIGS. 1 and 2, the slide table device 1 of the present embodiment includes a linear track 11, a slide unit 12, and a motor module 13. The linear track 11 is slidable thereon by the sliding unit 12, and the sliding unit 12 is movable on the linear track 11. Since this part is well known to those skilled in the art, it will not be repeated here.

馬達模組13包含一馬達131及一轉動軸132。馬達131例如為一伺服馬達(servomotor)。而在其他實施例中,馬達131例如為一步進馬達(step motor)。轉動軸132例如為螺桿,並例如為一滾珠螺桿。轉動軸132係與滑動單元12耦接,且轉動軸132係穿設馬達131之一轉子1311並與轉子1311相對固定。轉子1311係具有一貫孔O,轉動軸132係經由貫孔O而穿設轉子1311。The motor module 13 includes a motor 131 and a rotating shaft 132. The motor 131 is, for example, a servomotor. In other embodiments, the motor 131 is, for example, a step motor. The rotating shaft 132 is, for example, a screw and is, for example, a ball screw. The rotating shaft 132 is coupled to the sliding unit 12, and the rotating shaft 132 passes through one of the rotors 1311 of the motor 131 and is fixed to the rotor 1311. The rotor 1311 has a constant hole O, and the rotating shaft 132 passes through the through hole O through the rotor 1311.

在本實施例中,轉動軸132具有至少一凹槽1321,一連接件1322係設置於凹槽1321並連接轉動軸132與轉子1311。藉此可使轉動軸132與轉子1311相對固定並增強兩者之間的連結強度。此外,藉由連接件1322與凹槽1321的設置亦使得組裝更為簡易。本實施例不特別限制凹槽1321與連接件1322之形狀,只要兩者相互配合即可。另外,本實施例之轉子1311係為中空圓柱狀,但本新型不限於此。In the present embodiment, the rotating shaft 132 has at least one groove 1321, and a connecting member 1322 is disposed on the groove 1321 and connects the rotating shaft 132 and the rotor 1311. Thereby, the rotating shaft 132 can be relatively fixed to the rotor 1311 and the joint strength between the two can be enhanced. In addition, the assembly by the connector 1322 and the recess 1321 also makes assembly easier. The embodiment does not particularly limit the shape of the recess 1321 and the connecting member 1322 as long as the two cooperate with each other. Further, the rotor 1311 of the present embodiment has a hollow cylindrical shape, but the present invention is not limited thereto.

另外,在一實施例中,轉動軸132與轉子1311亦可一體成型製成,例如是藉由射出成型(injection molding)。Further, in an embodiment, the rotating shaft 132 and the rotor 1311 may also be integrally formed, for example, by injection molding.

另外,如圖2所示,馬達131可更具有一編碼器133,其係與轉動軸132連接並可感測轉子1311的旋轉位置並回饋。另外,馬達131更具有一軸承134、一軸承迫緊環135及一斜角軸承136,轉動軸132係穿設軸承134、軸承迫緊環135及斜角軸承136,並且斜角軸承136可以藉由預壓來提高軸向的剛性。另外,馬達131可更具有至少一永久磁鐵137,於此永久磁鐵137可為環狀並包覆連接於轉子1311上。此外,馬達131更具有一定子138,其係環繞轉子1311而設置。藉由定子138所造成的電磁效應可帶動永久磁鐵137與轉子1311的轉動。Further, as shown in FIG. 2, the motor 131 may further include an encoder 133 which is coupled to the rotating shaft 132 and which can sense the rotational position of the rotor 1311 and feed back. In addition, the motor 131 further has a bearing 134, a bearing pressing ring 135 and a bevel bearing 136. The rotating shaft 132 is provided with a bearing 134, a bearing pressing ring 135 and a bevel bearing 136, and the bevel bearing 136 can be borrowed. The axial rigidity is increased by preloading. In addition, the motor 131 may further have at least one permanent magnet 137, and the permanent magnet 137 may be annular and coated and coupled to the rotor 1311. In addition, the motor 131 has a stator 138 that is disposed around the rotor 1311. The electromagnetic effect caused by the stator 138 can drive the rotation of the permanent magnet 137 and the rotor 1311.

圖3為本新型另一實施例之馬達模組23及滑台裝置2的分解示意圖,圖4為本新型另一實施例之馬達模組23及滑台裝置2的組合剖面示意圖。圖3及圖4係顯示本新型之轉子與轉動軸結合之另一態樣。3 is an exploded perspective view of a motor module 23 and a slide device 2 according to another embodiment of the present invention, and FIG. 4 is a schematic cross-sectional view showing a motor module 23 and a slide device 2 according to another embodiment of the present invention. Figures 3 and 4 show another aspect of the combination of the rotor of the present invention and the rotating shaft.

如圖3及圖4所示,本實施例之滑台裝置2係包含一線性軌道21、一滑動單元22以及一馬達模組23。線性軌道21可供滑動單元22於其上滑動,而滑動單元22可在線性軌道21上移動。由於此部分可由習知技術者所熟知,故於此不再贅述。As shown in FIG. 3 and FIG. 4, the slide table device 2 of the present embodiment includes a linear track 21, a slide unit 22, and a motor module 23. The linear track 21 is slidable thereon by the sliding unit 22, and the sliding unit 22 is movable on the linear track 21. Since this part is well known to those skilled in the art, it will not be repeated here.

馬達模組23包含一馬達231及一轉動軸232。轉動軸232係與滑動單元22耦接,且轉動軸232係穿設馬達231之一轉子2311並與轉子2311相對固定。轉子2311係具有一貫孔O,轉動軸232係經由貫孔O而穿設轉子2311。The motor module 23 includes a motor 231 and a rotating shaft 232. The rotating shaft 232 is coupled to the sliding unit 22, and the rotating shaft 232 passes through one of the rotors 2311 of the motor 231 and is fixed to the rotor 2311. The rotor 2311 has a constant hole O, and the rotating shaft 232 passes through the through hole O through the rotor 2311.

在本實施例中,轉子2311具有至少一固定部F,固定件24設置於固定部F而將轉動軸232固定於轉子2311。在本實施例中,轉子2311具有兩固定部F,且該等固定部F係分別設置於轉子2311之兩端,並且固定部F具有兩固定孔。另外,本實施例具有複數固定件24,該等固定件24例如是螺絲241與固定片242之組合。藉由固定片242將轉動軸232固定在轉子2311內,再藉由螺絲241將固定片242鎖固使得轉動軸232緊固於轉子2311。In the present embodiment, the rotor 2311 has at least one fixing portion F, and the fixing member 24 is provided to the fixing portion F to fix the rotating shaft 232 to the rotor 2311. In the present embodiment, the rotor 2311 has two fixing portions F, and the fixing portions F are respectively disposed at both ends of the rotor 2311, and the fixing portion F has two fixing holes. In addition, the present embodiment has a plurality of fixing members 24, such as a combination of a screw 241 and a fixing piece 242. The rotating shaft 232 is fixed in the rotor 2311 by the fixing piece 242, and the fixing piece 242 is locked by the screw 241 so that the rotating shaft 232 is fastened to the rotor 2311.

另外,如圖4所示,馬達231可更具有一編碼器233、至少一永久磁鐵237及一定子238。由於馬達231之上述構件及其他構件可參照上述實施例,故於此不再贅述。In addition, as shown in FIG. 4, the motor 231 may further include an encoder 233, at least one permanent magnet 237, and a stator 238. Since the above-mentioned members and other members of the motor 231 can be referred to the above embodiments, they will not be described again.

綜上所述,在本新型之馬達模組中,轉動軸係穿設馬達之一轉子並與轉子相對固定。藉此,本新型之馬達模組就省略了習知聯軸器的使用,進而產生許多優點。例如,當馬達模組應用於滑台裝置時,可避免聯軸器長時間使用易損壞或鬆脫的風險,並因而延長滑台裝置的使用壽命;並且由於是使用轉子直接接合轉動軸,因此可使馬達轉速再次提升而能增加滑台裝置的應用性並提高其工作效能;此外,本新型亦可避免聯軸器所產生的撓性誤差,進而提升滑台裝置的精度及工作效能;最後,由於滑台裝置不需要預留空間來設置聯軸器,因而可大幅節省空間並達到輕量化的目的。In summary, in the motor module of the present invention, the rotating shaft is threaded through one of the rotors of the motor and fixed relative to the rotor. Therefore, the motor module of the present invention omits the use of the conventional coupling, thereby generating many advantages. For example, when the motor module is applied to the slide unit, the risk of the coupling being prone to damage or looseness for a long period of time can be avoided, and thus the service life of the slide unit is extended; and since the rotor is directly engaged with the rotating shaft, The motor speed can be increased again to increase the applicability of the slide device and improve its working efficiency; in addition, the present invention can also avoid the flexibility error generated by the coupling, thereby improving the accuracy and working efficiency of the slide device; Since the slide table device does not need to reserve space for setting the coupling, it can save space and achieve weight reduction.

以上所述僅為舉例性,而非為限制性者。任何未脫離本新型之精神與範疇,而對其進行之等效修改或變更,均應包含於後附之申請專利範圍中。The above is intended to be illustrative only and not limiting. Any equivalent modifications or alterations to the spirit and scope of the present invention are intended to be included in the scope of the appended claims.

1、2‧‧‧滑台裝置1, 2‧‧ ‧ slide table device

11、21‧‧‧線性軌道11, 21‧‧‧ linear orbit

12、22‧‧‧滑動單元12, 22‧‧‧ sliding unit

13、23‧‧‧馬達模組13, 23‧‧‧ Motor Module

131、231‧‧‧馬達131, 231‧‧ ‧ motor

1311、2311‧‧‧轉子1311, 2311‧‧‧ rotor

132、232‧‧‧轉動軸132, 232‧‧‧ rotating shaft

1321‧‧‧凹槽1321‧‧‧ Groove

1322‧‧‧連接件1322‧‧‧Connecting parts

133、233‧‧‧編碼器133, 233‧‧ ‧ encoder

134‧‧‧軸承134‧‧‧ bearing

135‧‧‧軸承迫緊環135‧‧‧bearing compression ring

136‧‧‧斜角軸承136‧‧‧Bevel bearing

137、237‧‧‧永久磁鐵137, 237‧‧‧ permanent magnets

138、238‧‧‧定子138, 238‧‧‧ stator

24‧‧‧固定件24‧‧‧Fixed parts

241‧‧‧螺絲241‧‧‧ screws

242‧‧‧固定片242‧‧‧Fixed tablets

F‧‧‧固定部F‧‧‧Fixed Department

O‧‧‧貫孔O‧‧‧Tongkong

圖1為本新型一實施例之馬達模組及滑台裝置的分解示意圖。1 is an exploded perspective view of a motor module and a slide table device according to an embodiment of the present invention.

圖2為本新型一實施例之馬達模組及滑台裝置的組合剖面示意圖。2 is a schematic cross-sectional view showing a combination of a motor module and a slide table device according to an embodiment of the present invention.

圖3為本新型另一實施例之馬達模組及滑台裝置的分解示意圖。3 is an exploded perspective view of a motor module and a slide table device according to another embodiment of the present invention.

圖4為本新型另一實施例之馬達模組及滑台裝置的組合剖面示意圖。4 is a schematic cross-sectional view showing a combination of a motor module and a slide table device according to another embodiment of the present invention.

1‧‧‧滑台裝置 1‧‧‧Slide table device

13‧‧‧馬達模組 13‧‧‧Motor Module

131‧‧‧馬達 131‧‧‧Motor

1311‧‧‧轉子 1311‧‧‧Rotor

132‧‧‧轉動軸 132‧‧‧Rotary axis

1321‧‧‧凹槽 1321‧‧‧ Groove

1322‧‧‧連接件 1322‧‧‧Connecting parts

133‧‧‧編碼器 133‧‧‧Encoder

134‧‧‧軸承 134‧‧‧ bearing

135‧‧‧軸承迫緊環 135‧‧‧bearing compression ring

136‧‧‧斜角軸承 136‧‧‧Bevel bearing

137‧‧‧永久磁鐵 137‧‧‧ permanent magnet

138‧‧‧定子 138‧‧‧ Stator

Claims (8)

一種馬達模組,包含:一定子;一轉子,該轉子係具有一貫孔並由該定子所驅動;以及一轉動軸,係經由該貫孔而穿設該轉子並與該轉子相對固定。 A motor module comprising: a stator; a rotor having a constant bore and driven by the stator; and a rotating shaft through which the rotor is passed and fixed relative to the rotor. 如申請專利範圍第1項所述之馬達模組,其中該定子係環繞該轉子而設置。 The motor module of claim 1, wherein the stator is disposed around the rotor. 如申請專利範圍第1項所述之馬達模組,其中該轉動軸係為一螺桿。 The motor module of claim 1, wherein the rotating shaft is a screw. 如申請專利範圍第1項所述之馬達模組,其中該轉動軸具有至少一凹槽,一連接件係設置於該凹槽並連接該轉動軸與該轉子。 The motor module of claim 1, wherein the rotating shaft has at least one groove, and a connecting member is disposed on the groove and connects the rotating shaft and the rotor. 如申請專利範圍第1項所述之馬達模組,其中該轉子具有至少一固定部,至少一固定件設置於該固定部而將該轉動軸固定於該轉子。 The motor module of claim 1, wherein the rotor has at least one fixing portion, and at least one fixing member is disposed at the fixing portion to fix the rotating shaft to the rotor. 如申請專利範圍第5項所述之馬達模組,其中當具有複數該固定件時,該等固定件係為螺絲與固定片之組合。 The motor module of claim 5, wherein when there are a plurality of the fixing members, the fixing members are a combination of a screw and a fixing piece. 如申請專利範圍第5項所述之馬達模組,其中當該轉子具有複數該固定部時,該等固定部係分別設置於該轉子之兩端。 The motor module of claim 5, wherein when the rotor has a plurality of the fixing portions, the fixing portions are respectively disposed at both ends of the rotor. 一種滑台裝置,包含:一線性軌道;一滑動單元,係可於該線性軌道上移動;以及一申請專利範圍第1項至第7項中任一項所述之馬達模組,其中該轉動軸係與該滑動單元耦接。 A sliding table device comprising: a linear track; a sliding unit movable on the linear track; and the motor module according to any one of claims 1 to 7, wherein the rotating A shafting system is coupled to the sliding unit.
TW105210507U 2016-07-13 2016-07-13 Motor module and sliding table device TWM536812U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW105210507U TWM536812U (en) 2016-07-13 2016-07-13 Motor module and sliding table device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW105210507U TWM536812U (en) 2016-07-13 2016-07-13 Motor module and sliding table device

Publications (1)

Publication Number Publication Date
TWM536812U true TWM536812U (en) 2017-02-11

Family

ID=58607667

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105210507U TWM536812U (en) 2016-07-13 2016-07-13 Motor module and sliding table device

Country Status (1)

Country Link
TW (1) TWM536812U (en)

Similar Documents

Publication Publication Date Title
JP5955309B2 (en) Electric linear actuator and electric motor thereof
US11485028B2 (en) Linear joint and legged robot having the same
JP6711036B2 (en) Uniaxial actuator and uniaxial actuator device including the same
CN106575901B (en) The bicycle auxiliary actuator of electricity
TWI610522B (en) Motor module and slide apparatus
KR20150124847A (en) Integrated support unit for servo motor and rectilinear movement apparatus including the same
US10859143B2 (en) Linear driving system
TWM536812U (en) Motor module and sliding table device
JPS598502B2 (en) Rotary drive mechanism
JP6811575B2 (en) Linear actuator and linear actuator device
JP2016016479A (en) Joint driving device
CN104534041B (en) Electric actuator of double-redundancy direct-drive type roller screw pair
JP2017067197A (en) Linear motion device
CN204835885U (en) Lead screw step motor
CN105058426A (en) Peripheral-pipeline mounting rotating base for industrial robot and assembling method thereof
JP6710055B2 (en) Scale integrated linear motor and linear motion unit equipped with the linear motor
TWI663349B (en) Motor module for electric actuator
KR101325279B1 (en) Ballscrew with the ring support to bearing
US10138879B2 (en) Housing and method of manufacturing the same
JP2015086931A (en) Linear actuator
TWI470723B (en) Wafer handling robot
TWM570381U (en) Motor module with protection sleeve for screw rod
TWI668945B (en) Linear driving system
TWM570382U (en) Motor module for electric actuator
JP2008208952A (en) Shaft fastening structure for shaft coupling

Legal Events

Date Code Title Description
MC4K Revocation of granted utility model