TWM535319U - Auto focusing device providing inspection and measurement - Google Patents

Description

Provides inspection and measurement of the autofocus device

An autofocus device for providing inspection and measurement, especially an autofocus detection device.

High-precision optical inspection technology, which is widely used in inspection technologies such as panels, wafers, die or electronic components.

However, in the case of the conventional high-precision optical device, if the focus is not in focus, the high-precision optical device cannot obtain an effective image. Although the autofocus system can be used to overcome the above-mentioned shortcomings of not being able to effectively obtain an effective image, the autofocus system is a micro-moving lens method for performing comparative analysis of image elements, thereby finding the most appropriate image capturing focal length, but autofocusing. The distance is limited, so the autofocus system cannot be applied to situations where the focus distance is large and the accuracy is high. Therefore, the existing solution is to adjust the detection platform and focus on the person and perform random sampling.

As described above, the existing autofocus system has a limitation of large focusing distance and high precision, and manual adjustment has the disadvantages of time consuming and labor-intensive, so the existing high-precision optical detecting technology still has room for improvement.

In view of the above disadvantages, the purpose of the present invention is to provide an autofocus apparatus and method for providing inspection and measurement, which can achieve a visual module by changing a position of a test object in a third axial direction. The effect of focusing.

In order to achieve the above object, the technical means of the present invention is to provide an autofocus device for providing inspection and measurement, which comprises: a measuring unit, adjacent to the measuring unit, the detecting unit has a visual module and a platform, the visual module is located above the platform; and a control unit The measuring unit is connected to the measuring unit and the detecting unit; wherein the measuring unit provides at least one information of the object to be tested or information of at least one target of the at least one object to be tested, the control unit is And calculating information of the at least one object or calculating information of the at least one target according to the information of the at least one object to be tested or according to the information of the at least one target, so that the platform is adjusted to be tested at the platform The distance between the object and the vision module.

As described above, the shape of the object to be tested may be a rectangle, a circle, or a polygon, and the surface of the object to be tested may be a curved surface, a concave curved surface, a convex curved surface, or a concave-convex surface. With the above information, the control unit controls the bearing platform to adjust the position of the object to be tested in a third axial direction, so that the visual module can surely complete the focusing process of the object to be tested, so the visual module can A flat surface and a non-coplanar object to be tested obtains a clear and usable image.

In addition, the spanning unit is capable of capturing information for a plurality of objects to be tested or a specific object to be tested. The information described herein is the span; and the detection unit is capable of detecting for a plurality of analytes or specific analytes.

1‧‧‧Meeting unit

11‧‧‧Reading module

2‧‧‧Detection unit

20‧‧ ‧ captain

21‧‧‧ Displacement Module

22‧‧‧Vision Module

3‧‧‧Control unit

40‧‧‧Test object

41‧‧‧Tray

S1~S2‧‧‧ steps

Figure 1 is a schematic diagram of an automatic focusing device that provides inspection and measurement.

Figure 2 is a flow chart of an automatic focusing method for providing inspection and measurement.

Figure 3 is a schematic diagram of at least one object to be tested and a distance measuring unit.

Figure 4 is a partial schematic view of at least one object to be tested and a tray.

Figure 5 is a schematic diagram of at least one object to be tested and a detecting unit.

Figure 6 is a schematic diagram of at least one object to be tested and a detecting unit.

The embodiments of the present invention are described below by way of specific embodiments, and those skilled in the art can easily understand other advantages and effects of the present invention by the contents disclosed in the present specification.

Please refer to FIG. 1 , which is a first embodiment of an auto-focusing device for providing inspection and measurement, comprising a measuring unit 1, a detecting unit 2 and a control unit 3.

The distance measuring unit 1 has at least one reading module 11. In an embodiment, the reading module 11 can be a laser thickness gauge or a laser range finder. In still another embodiment, the reading module 11 can be a reader or a far infrared sensor.

The detecting unit 2 is adjacent to the measuring unit 1 , and the detecting unit 2 has a platform 20 , a displacement module 21 and a vision module 22 . The displacement module 21 is disposed under the cap 20, and the displacement module 21 is configured to cause the cap 20 to perform a first axial direction, a second axial direction, a third axial direction or a first axial direction to a third axial direction. For movement, the aforementioned first axial to third axial directions may be regarded as X-axis, Y-axis, and Z-axis, but are not limited. The vision module 22 is disposed above the platform 20. The above-described reading module 11 can be disposed above the platform 20 or above and below the platform 20.

The control unit 3 is a signal connection detecting unit 2 and a distance measuring unit 1.

Please refer to Figure 2 for illustration. This creation is applied to an autofocus method that provides inspection and measurement. The steps include:

In step S1, the surface height or thickness of at least one object to be tested is measured. As shown in FIGS. 3 and 4, at least one object to be tested 40 is placed on a tray 41 having at least one pair of position marks 42. The alignment mark 42 is adjacent to the object to be tested 40. For example, the object to be tested 40 is a panel, a wafer, a die, or an electronic component.

The tray 41 is located at the top end of the cap 20. The tray 41 can be fixed to the top end of the cap 20 by means of a clamp, a clamping tool or a mechanical device. If the reading module 11 is only disposed above the platform 20, the reading module 11 first reads the alignment mark 42 to confirm whether the object to be tested 40 is located in the reading module 11 and can read the object to be tested 40. position. If the object to be tested 40 is already at a position readable by the reading module 11, the platform 20 stops operating. If the object to be tested 40 is not located at a position readable by the reading module 11, the platform 20 moves the object to be tested 40 to a position readable by the reading module 11.

The reading module 11 is a laser range finder, and the reading module 11 is configured to capture the height of at least one object 40 at the top of the tray 41. The height is the top of the tray 41 to the object to be tested 40. The distance from the top. The reading module 11 converts the aforementioned height into a height information.

If there are a plurality of objects 40 to be tested, and the top of the object to be tested 40 may have a high and low undulation. The cap 20 is moved in a first axial direction, a second axial direction, or a combination of the first axial direction and the second axial direction, thereby changing the position of the test object 40 relative to the reading module 11 to enable the reading mode Group 11 can capture the height of a plurality of analytes 40. The reading module 11 transmits at least one height information to the control unit 3, and the control unit 3 receives at least one height information. The control unit 3 averages the received height information to obtain a high average information. The height average information includes the average height of the object to be tested 40 and the position of the object to be tested 40 with respect to the tray 41.

Alternatively, the plurality of height information as described above is received by the control unit 3, but in this step, the control unit 3 does not average the plurality of height information.

Or, the object to be tested 40 has at least one target, and the reading module 11 captures at least one target information, and converts the captured information of the at least one target into at least one target information, and then at least one The target information is transmitted to the control unit 3.

If the reading module 11 is disposed above and below the stage 10, and the reading module 11 is a laser thickness gauge, the reading module 11 measures the total thickness of the tray 41 of the object 40 to be tested. The total thickness is the distance from the top end of the object 40 to the bottom end of the tray 41. The reading module 11 converts the aforementioned total thickness into a thickness information and transmits the thickness information to the control unit 3. The control unit 3 receives the thickness information. If the reading module 11 transmits a plurality of thickness information to the control unit 3, the control unit 3 averages the received thickness information to obtain a thickness average information. The thickness average information includes the average total thickness of the object to be tested 40 and the tray 41, and the position of the object to be tested 40 with respect to the tray 41.

Alternatively, the plurality of thickness information as described above is received by the control unit 3, but in this step, the control unit 3 does not average the plurality of thickness information.

If the reading module 11 is a reader or a far-infrared sensor, the height or thickness of the object to be tested 40 can be measured first in another process, and when the reading module 11 reads the object to be tested 40 After the barcode or wafer, or the reading module 11 reads the tray 41 After the barcode or the wafer, the reading module 11 obtains the height or thickness of the object to be tested 40. As described above, the reading module 11 now transmits the height information or the thickness information to the control unit 3, so that the control unit 3 obtains High average information or thickness average information.

In addition, if the surface of the object to be tested 40 has a high or low undulation, or an irregular concave-convex surface, or a curved surface, the reading module 11 extracts the surface information of the object to be tested 40, and transmits the surface information to the surface. The control unit 3, the control unit 3 calculates the surface information to obtain the surface state of the object to be tested 40, and the aforementioned height information or thickness information. As described above, when the reading module 11 captures the surface information, the platform 20 also cooperates with the position of the object to be tested 40 to perform the first axial movement, the second axial movement or the first axial direction and the first The combination of two axial movements.

In summary, the distance measuring unit 1 provides information of at least one object to be tested 40 or information of at least one object of the at least one object to be tested 40 to the control unit 3. Alternatively, the span unit 1 can extract information for a plurality of objects 40 to be tested or a specific object to be tested 40. The information described herein is span, but is not limited.

In step S2, a focus adjustment is performed. Referring to FIG. 5, the platform 20 moves the object to be tested 40 together with the tray 41 to the lower side of the vision module 22 of the detecting unit 2.

The visual module 22 captures the image information of the object 40 and the alignment mark 42 and transmits the image information to the control unit 3, where the image information includes the relative distance between the object 40 and the alignment mark 42. The control unit 3 determines whether the object to be tested 40 is in the set position according to the image information.

If not, the displacement module 21 of the inspection unit 2 causes the bearing platform 20 to perform a first axial movement, a second axial movement or a combination of the first axial direction and the second axial direction to be located on the bearing platform. The top 40 of the object to be tested 40 is returned to the set position.

Alternatively, the control unit 3 notifies the worker, but causes the worker to return the object to be tested 40 that is not in the set position to the set position.

If the object to be tested 40 is already in the set position, the control unit 3 controls the displacement module 21 according to the thickness information or the height information described above, and causes the platform 20 to perform a third axial movement, as shown in FIG. After the platform 20 is moved to a predetermined distance in the third axial direction, the displacement module 21 stops operating.

The visual module 22 captures the image information to be tested of the object to be tested 40, and transmits the image information to be tested to the control module 3, and the control module 3 detects the object to be tested 40 according to the image information to be tested.

The control unit 3 can also determine whether the object to be tested 40 has flaws according to the image information to be tested or the image information described above, and the flaw is not damaged or the size is different. If there is a defect, the control unit 3 notifies the worker to take out or replace the object to be tested 40 having the defect; or the control unit 3 is the object to be tested 40 that is memorized or marked for further processing in the subsequent process.

If the fifth and sixth figures are further discussed, as shown in FIG. 5, according to the height information or the thickness information, the thickness or height of the object to be tested 40 is thicker or higher than the remaining objects 40, so the displacement module 21 may be selected to move or move a distance away from the vision module 22 along the third axis to conform to the focal length of the vision module 22.

As shown in FIG. 6, according to the height information or the thickness information, the thickness or height of the object to be tested 40 is thinner or lower than the remaining objects 40, and the displacement module 21 faces the visual module 22 along the third axis. The direction is moved a distance to match the focal length of the vision module 22.

As described above, the control unit 3 calculates the information of the at least one object 40 or calculates the information of the at least one object according to the information of the at least one object 40 or according to the information of the at least one object 40, so that the platform 20 is adjusted. The distance between the object 40 of the platform 20 and the vision module 22. The information described herein is the thickness information or height information described above, and the foregoing calculation can be regarded as an average. The average of at least one of the objects 40 to be tested is converted into thickness average information or height average information. The average of at least one of the subject information is converted to the target average information.

In addition, the control module 3 can also sequentially capture the image of the object to be tested 40 at different positions according to the plurality of information. Or the platform 20 maintains a fixed position of the third axis according to the height average information or the thickness average information, so that the vision module 22 captures the image of the object 40 to be tested. Therefore, the vision module 22 can measure the object to be tested 40 at a single point, and then the platform 20 moves the single point or the object to be tested 40 to be below the vision module 22, and adjusts the platform according to the foregoing information. 20 is in the position of the third axis to facilitate image taking.

Furthermore, the control unit 3 can also determine the shape of the object to be tested 40 by the image captured by the vision module 22, for example, if the object to be tested 40 is circular, rectangular, polygonal or irregular, the control unit 3 can be judged by the captured image. For example, if the object to be tested 40 is a curved object, the multi-point ranging value on the curved surface can be obtained by the movement of the first axial direction and the second axial direction of the cap 20, and the control unit 3 can draw the contour of the curved surface. And analyze and calculate the surface condition.

Furthermore, the detecting unit 2 is capable of detecting a plurality of objects 40 to be tested or a specific object to be tested 40.

In summary, the shape of the object to be tested 40 may be rectangular, circular or polygonal, and the surface of the object to be tested 40 may be a curved surface, a concave curved surface, a convex curved surface or a concave-convex surface. The present invention measures the height or thickness of the object to be tested 40. The displacement module 21 adjusts the position of the object to be tested 40 in the third axial direction according to the thickness or height, so that the vision module 22 can surely complete the focusing process of the object 40, so the vision module 22 can The object 40 that is not flat and not coplanar obtains a clear and usable image.

The specific embodiments described above are only used to illustrate the features and functions of the present invention, and are not intended to limit the scope of implementation of the present invention, without departing from the spirit and technical scope of the present invention. Equivalent changes and modifications made by the disclosure of the disclosure are still covered by the scope of the following patent application.

1‧‧‧Meeting unit

11‧‧‧Reading module

2‧‧‧Detection unit

20‧‧ ‧ captain

21‧‧‧ Displacement Module

22‧‧‧Vision Module

3‧‧‧Control unit

Claims (4)

An autofocus device for providing inspection and measurement, comprising: a measuring unit; a detecting unit adjacent to the measuring unit, the detecting unit having a visual module and a cap, the visual mode The group is located above the platform; and a control unit is connected to the distance measuring unit and the detecting unit; wherein the measuring unit provides at least one information of the object to be tested or is located in the at least one object to be tested The at least one target information is provided to the control unit, and the control unit calculates information of the at least one object to be tested or calculates information of the at least one object according to the information of the at least one object to be tested or according to the information of the at least one object So that the pedestal adjusts the distance between the object to be tested and the vision module located on the pedestal. The automatic focusing device for inspecting and measuring according to the first aspect of the invention, wherein the detecting unit further has a displacement module, and the displacement module is disposed below the platform. An autofocus device for providing inspection and measurement as described in claim 1, wherein the distance measuring unit has a reading module, and the reading module is located above the platform. An autofocus device for providing inspection and measurement as described in claim 3, wherein the reading module is a laser range finder, a laser thickness gauge, a code reader or a far infrared ray sensor. Device.