TWM533242U - System for recycling and regenerating waste photoresist - Google Patents

System for recycling and regenerating waste photoresist

Info

Publication number
TWM533242U
TWM533242U TW105211496U TW105211496U TWM533242U TW M533242 U TWM533242 U TW M533242U TW 105211496 U TW105211496 U TW 105211496U TW 105211496 U TW105211496 U TW 105211496U TW M533242 U TWM533242 U TW M533242U
Authority
TW
Taiwan
Prior art keywords
waste photoresist
recycling
treatment
neutralization
dewatering
Prior art date
Application number
TW105211496U
Other languages
English (en)
Inventor
Wen-Feng Lo
Original Assignee
Wen-Feng Lo
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wen-Feng Lo filed Critical Wen-Feng Lo
Priority to TW105211496U priority Critical patent/TWM533242U/zh
Publication of TWM533242U publication Critical patent/TWM533242U/zh

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
TW105211496U 2016-07-29 2016-07-29 System for recycling and regenerating waste photoresist TWM533242U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW105211496U TWM533242U (en) 2016-07-29 2016-07-29 System for recycling and regenerating waste photoresist

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW105211496U TWM533242U (en) 2016-07-29 2016-07-29 System for recycling and regenerating waste photoresist

Publications (1)

Publication Number Publication Date
TWM533242U true TWM533242U (en) 2016-12-01

Family

ID=58225899

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105211496U TWM533242U (en) 2016-07-29 2016-07-29 System for recycling and regenerating waste photoresist

Country Status (1)

Country Link
TW (1) TWM533242U (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI605075B (zh) * 2016-07-29 2017-11-11 羅文烽 廢光阻劑回收再生系統與方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI605075B (zh) * 2016-07-29 2017-11-11 羅文烽 廢光阻劑回收再生系統與方法

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