TWM530883U - Piezoelectric actuator - Google Patents

Description

Piezoelectric actuator structure

The present invention relates to a piezoelectric actuator structure, and more particularly to a piezoelectric actuator structure suitable for a miniature ultra-thin and silent microfluidic control device.

At present, in various fields, such as medicine, computer technology, printing, energy and other industries, the products are developing in the direction of refinement and miniaturization. Among them, products such as micro-pumps, sprayers, inkjet heads, industrial printing devices, etc. The fluid transport structure is its key technology, which is how to break through its technical bottleneck with innovative structure and be an important part of development.

For example, in the pharmaceutical industry, many instruments or devices that require pneumatic power, such as sphygmomanometers, or portable, wearable instruments or equipment, are usually equipped with conventional motors and pneumatic valves. Achieve the purpose of its fluid transport. However, limited by the volume limitations of conventional motors and fluid valves, it is difficult for such instruments to reduce the size of their overall devices, that is, it is difficult to achieve the goal of thinning, and it is impossible to achieve portable purposes. In addition, these conventional motors and fluid valves also cause noise problems when they are actuated, resulting in inconvenience and discomfort in use.

Therefore, how to develop a microfluidic control device capable of improving the above-mentioned conventional technical defects and enabling the conventional pneumatic or pneumatically driven instrument or device to be small, miniaturized and muted, thereby achieving a portable and portable purpose The piezoelectric actuator structure used is an urgent problem to be solved.

The main purpose of the present invention is to provide a microfluidic control device suitable for use in a portable or wearable instrument or device and a piezoelectric actuator structure thereof, which are fluid fluctuations generated by high frequency actuation of a piezoelectric actuator. Producing a pressure gradient in the designed flow path, causing the fluid to flow at a high speed, and transmitting the fluid from the suction end to the discharge end through the difference in the impedance of the flow path in and out of the flow path, and solving the conventional technique using pneumatic power driven instruments or The equipment is large in size, difficult to thin, unable to achieve portable purposes, and lack of noise.

In order to achieve the above object, a broader aspect of the present invention provides a piezoelectric actuator structure comprising: a suspension plate having a square shape with a side length of 8-10 mm and which can be The outer peripheral portion is flexed and vibrated; the outer frame is disposed on the outer side of the suspension plate; at least one bracket is connected between the suspension plate and the outer frame to provide elastic support; and the piezoelectric driving body is in a square shape and has less than suspension The side of the side of the board is long and attached to the first surface of the suspension plate for applying a voltage to drive the suspension plate to bend and vibrate.

Some exemplary embodiments embodying the features and advantages of the present invention are described in detail in the following description. It is to be understood that the present invention is capable of various modifications in various aspects, and is not to be construed as a limitation.

The microfluidic control device 1 of the present invention can be applied to industries such as medical technology, energy, computer technology or printing, and is used for conveying fluids, but not limited thereto. Please refer to FIG. 1 and FIG. 2A. FIG. 1A is a schematic view showing the front combined structure of the microfluidic control device according to the preferred embodiment of the present invention, and FIG. 2A is a front exploded view showing the microfluidic control device shown in FIG. Fig. 2B is a schematic view showing the back side exploded structure of the microfluidic control device shown in Fig. 1, and Fig. 3 is a schematic sectional view showing the microfluidic control device shown in Fig. 1. As shown in FIG. 1 , FIG. 2A , FIG. 2B , and FIG. 3 , the microfluidic control device 1 of the present invention mainly includes a housing 10 and a piezoelectric actuator 13 , wherein the housing 10 includes a bearing housing. 11 and the base 12, the carrying case 11 is a frame structure having a side wall 118 at the periphery, and the side wall 118 formed by the periphery and the bottom plate member define an accommodating space 11a (as shown in FIG. 2B). The base 12 is composed of a cover plate 120 and a flexible plate 121, but is not limited thereto. As shown in FIG. 2A, the piezoelectric actuator 13 includes a piezoelectric driving body 131, a suspension plate 132, an outer frame 133, and at least one bracket 134. The piezoelectric driving body 131 can be, but is not limited to, a pressure. The electric ceramic plate is a square plate-like structure, and its side length is smaller than the side length of the suspension plate 132, and can be attached to the suspension plate 132. In the present embodiment, the suspension plate 132 is a flexible square plate-like structure; the outer frame 133 is disposed on the outer side of the suspension plate 132, and the shape of the outer frame 133 also substantially corresponds to the shape of the suspension plate 132. In the present embodiment, the outer frame 133 is a square hollow frame structure; and the suspension plate 132 and the outer frame 133 are connected by a bracket 134 and provide elastic support. As shown in FIG. 2A and FIG. 2B , the microfluidic control device 1 of the present invention may further include an insulating spacer 14 and a conductive spacer 15 , and the insulating spacer 14 may be two insulating spacers 141 and 142 . The two insulating spacers 141 and 142 are provided with the conductive pads 15 interposed therebetween. When the microfluidic control device 1 of the present invention is assembled, that is, as shown in FIGS. 2A, 2B, and 3, the carrier housing 11, the insulating spacer 142, the conductive spacer 15, the insulating spacer 141, The piezoelectric actuator 13, the flexible piece 121, the cover plate 120, and the like are assembled correspondingly, and the insulating spacer 142, the conductive spacer 15, the insulating spacer 141, the piezoelectric actuator 13, and the base 12 are assembled. The microfluidic control device 1 having a small size and a miniaturized outer shape can be formed as shown in Fig. 1 by being disposed in the accommodating space 11a in the carrier case 11.

Referring to FIG. 1 , FIG. 2B and FIG. 3 , as described above, the carrier housing 11 of the microfluidic control device 1 is a frame structure having a side wall 118 at the periphery, and the side wall 118 formed by the periphery thereof The bottom plate member defines an accommodating space 11a. When the piezoelectric actuator 13 is received in the accommodating space 11a, it will be surrounded by the side wall 118 of the carrying case 11 as shown in FIG. It is disposed on the outer side of the piezoelectric actuator 13, and the bottom of the piezoelectric actuator 13 is closed by the base 12. In this embodiment, the bottom plate of the bearing housing 11 has an outer surface 110 and an inner surface 111, wherein the inner surface 111 is further recessed to form the chamber 112, and the carrier housing 11 has a plurality of inner portions. The first communication holes 113, 114 of the surface 111 and the outer surface 110. As shown in FIG. 1 and FIG. 3, the first pressure relief chamber 115 and the first outlet chamber 116 are further recessed on the outer surface 110 of the carrier housing 11, and one end of the first communication hole 113, 114 The chamber is in communication with the chamber 112, and the other end is in communication with the first pressure relief chamber 115 and the first outlet chamber 116, respectively. Moreover, in the embodiment, a protrusion structure 117 may be further added to the first outlet chamber 116, for example, but not limited to a cylindrical structure.

In the present embodiment, the base 12 of the microfluidic control device 1 is composed of a cover plate 120 and a flexible plate 121, but is not limited thereto. The cover plate 120 has a first surface 120a and a second surface 120b disposed opposite to the first surface 120a, and at least one through the first surface 120a is disposed on the cover plate 120, as shown in FIGS. 2A and 2B. And a second communication hole 120c of the second surface 120b. As shown in FIG. 2B, the at least one second communication hole 120c is visible on the first surface 120a. In this embodiment, the number of the second communication holes 120c is four, but not limited thereto. The fluid is supplied from the outside of the device into the microfluidic control device 1 via the at least one second communication hole 120c. The second communication hole 120c is penetrated to the second surface 120b. As shown in FIG. 2A, the second communication hole 120c is visible from the second surface 120b of the cover 120, and has at least one bus bar hole 120d thereon. The hole 120d is in communication with the second communication hole 120c on the first surface 120a and is disposed correspondingly. The center of the bus bar hole 120d has a central recess 120e, that is, the central recess 120e is also connected to the bus hole. The 120d is connected to each other, so that the fluid is input from the at least one second communication hole 120c and guided to the at least one bus bar hole 120d, and then concentrated and concentrated to the central recess 120e through the at least one bus bar hole 120d, and as shown in FIG. As shown in the figure, after the cover plate 120 is assembled correspondingly to the flexible piece 121, the central recess 120e can correspond to a confluence chamber 120f constituting a confluent fluid for temporarily storing the fluid. In some embodiments, the material of the cover 120 may be, but is not limited to, a stainless steel material, but is not limited thereto. In other embodiments, the depth of the confluence chamber 120f formed by the central recess 120e is the same as the depth of the busbar holes 120d, but is not limited thereto.

In the present embodiment, the flexible sheet 121 is made of a flexible material, and may be, for example, but not limited to, a copper material, but not limited thereto, and has a first-class appearance on the flexible sheet 121. The passage hole 121a is provided corresponding to the central recess 120e of the second surface 120b of the cover 120, so that the flow passage hole 121a can communicate with the confluence chamber 120f as shown in Fig. 3. Further, as shown in FIG. 3, the flexible sheet 121 and the piezoelectric actuator 13 have a gap g0. In the present embodiment, the flexible sheet 121 and the piezoelectric actuator 13 are outside the frame. The gap g0 between the 133 is filled with a material, such as a conductive paste, but not limited thereto, so that the depth of the gap g0 can be maintained between the flexible sheet 121 and the suspension plate 132 of the piezoelectric actuator 13. To form another temporary storage chamber 121d, the fluid can be guided through the flow path hole 121a of the flexible sheet 121 to flow more rapidly between the chambers, and the suspension plate 132 and the flexible sheet 121 are kept at an appropriate distance to contact each other. The interference is reduced, so that the noise generation can be reduced. In other embodiments, the height of the outer frame 133 of the high voltage electric actuator 13 can be increased to add a gap when assembled with the flexible piece 121. But not limited to this.

In addition, please refer to FIG. 2A, FIG. 2B and FIG. 3 simultaneously, and the microfluidic control device 1 further has an insulating sheet 142, a conductive sheet 15 and another insulating sheet 141, which are sequentially placed on the bearing. The housing 11 is interposed between the piezoelectric actuator 13 and the shape thereof substantially corresponds to the shape of the outer frame of the piezoelectric actuator 13. In some embodiments, the insulating sheets 141, 142 are made of an insulating material, such as plastic, but not limited thereto for insulation; in other embodiments, the conductive sheet 15 is It is made of a conductive material, such as metal, but not limited to it for electrical conduction. Moreover, in the embodiment, a conductive pin 151 may be disposed on the conductive sheet 15 for electrical conduction.

Please refer to FIG. 4A, FIG. 4B and FIG. 4C simultaneously, which are front sides of the piezoelectric actuator of the piezoelectric actuator of the micro fluid control device according to another preferred embodiment of the present invention. The schematic diagram of the structure, the structure of the back surface, and the schematic structure of the cross-section are as shown. The piezoelectric actuator 13 is assembled by a suspension plate 132, an outer frame 133, at least one bracket 134 and a piezoelectric actuator 131. The piezoelectric actuator 131 is a piezoelectric element, which is, but not limited to, a piezoelectric ceramic plate. In the embodiment, the suspension plate 132, the outer frame 133 and the bracket 134 are integrally formed. The structure can be composed of a metal plate, for example, a stainless steel material, but not limited thereto, so that the piezoelectric actuator 13 of the microfluidic control device 1 of the present invention is composed of the piezoelectric actuator 131 and The metal plates are bonded, but not limited to this. As shown in the figure, the suspension plate 132 has a first surface 132a and a corresponding second surface 132b, and the piezoelectric driving body 131 is attached to the first surface 132a of the suspension plate 132, and as shown in FIG. 4B, The suspension plate 132 further has a central portion 132d and an outer peripheral portion 132e. When the piezoelectric driving body 131 is driven by a voltage, the suspension plate 132 can be flexibly vibrated from the central portion 132d to the outer peripheral portion 132e; the outer frame 133 is disposed around the suspension plate 132. The outer side; and the at least one bracket 134 is coupled between the suspension plate 132 and the outer frame 133 to provide elastic support. In this embodiment, one end of the bracket 134 is connected to the outer frame 133, and the other end is connected to the suspension plate 132, and further has at least one gap 136 between the bracket 134, the suspension plate 132 and the outer frame 133. The fluid is circulated, and the type and number of the suspension plate 132, the outer frame 133, and the bracket 134 have various changes. In addition, the outer frame 133 may further have an outwardly protruding conductive pin 135 for power connection, but not limited thereto.

As shown in FIG. 4A, the first surface 132a of the suspension plate 132 and the first surface 133a of the outer frame 133 and the first surface 134a of the bracket 134 have a flat coplanar structure, and the embodiment is taken as an example, wherein the suspension plate 132 is a square structure, and each side of the suspension plate 132 is between 8 mm and 10 mm, and the thickness is between 0.1 mm and 0.4 mm. Moreover, the side length of the piezoelectric driving body 131 is smaller than the side length of the suspension plate 132, and is also designed as a square plate structure corresponding to the suspension plate 132, and the thickness of the piezoelectric driving body 131 is 0.05 mm-0.3. Between mm, through the design of the square piezoelectric driver 131 and the square suspension plate 132 used in the present case, the disc shape is different from the conventional technology, and the micro-ultra-thin and silent design trend can be lower. The effect of power consumption design.

As shown in FIG. 4B, in the embodiment, the suspension plate 132 has a square shape and a stepped surface structure, that is, the second surface 132b of the suspension plate 132 further has a convex portion 132c. It is disposed in an intermediate portion of the second surface 132b, and may be, but is not limited to, a circular convex structure. In some embodiments, the height of the convex portion 132c is between 0.02 mm and 0.08 mm, and the diameter is 5.5 mm, but not limited thereto. However, the shape of the suspension plate 132 is not limited thereto, and may be a double-sided flat plate-like structure, and the embodiment shown in FIGS. 2A to 3, but the form can be followed. Changes in actual application conditions are not limited to such implementations. And, as shown in FIGS. 4B and 4C, the convex portion 132c of the suspension plate 132 is coplanar with the second surface 133b of the outer frame 133, and the second surface 132b of the suspension plate 132 and the second surface 134b of the bracket 134 It is also coplanar, and the convex portion 132c of the suspension plate 132 and the second surface 133b of the outer frame 133 and the second surface 132b of the suspension plate 132 and the second surface 134b of the bracket 134 have a specific depth.

As described above, in the microfluidic control device 1 of the present invention, in order to miniaturize the microfluidic control device 1, a piezoelectric actuator 13 having a square design is designed in the same device peripheral size as the present invention. Compared with the conventional circular piezoelectric actuator design, it has obvious advantages of power saving. The comparison of power consumption is shown in Table 1 below:

Table I         <TABLE border="1" borderColor="#000000" width="_0001"><TBODY><tr><td> Piezoelectric Actuator Type</td><td> Operating Frequency</td><td > Power consumption</td></tr><tr><td> Square (10mm side length) </td><td> 18kHz </td><td> 1.1W </td></tr><tr ><td> Circle (10mm diameter) </td><td> 28kHz </td><td> 1.5W </td></tr><tr><td> Square (9mm side length) </td ><td> 22kHz </td><td> 1.3W </td></tr><tr><td> Round (9mm diameter) </td><td> 34kHz </td><td> 2W </td></tr><tr><td> Square (8mm side length) </td><td> 27kHz </td><td> 1.5W </td></tr><tr><td > Round (8mm diameter) </td><td> 42kHz </td><td> 2.5W </td></tr></TBODY></TABLE>

Therefore, it is known from the above table that the square-sized (8 mm to 10 mm) square-shaped piezoelectric actuator 13 is more economical than the circular piezoelectric actuator of the same diameter (8 mm to 10 mm). Electricity. The reason for its power saving is presumed to be that the power consumption of the capacitive load operating at the resonant frequency increases with the increase of the frequency, and the resonant frequency of the piezoelectric actuator 13 designed by the square of the side length is significantly higher. The piezoelectric actuators of the same diameter and circular shape are low, so the relative power consumption is also significantly lower, that is, the piezoelectric actuator 13 of the square design of the present invention is compared with the conventional circular piezoelectric actuator. The design has the advantage of power saving, especially for wearable devices, saving power is a very important design focus.

Please refer to FIG. 5A, which is a schematic diagram of various embodiments of the piezoelectric actuator shown in FIG. 2A. As shown in the figure, it can be seen that the suspension plate 132, the outer frame 133 and the bracket 134 of the piezoelectric actuator 13 can have various types, and at least can have (a) to (f) shown in FIG. 5A and There are various aspects, such as (g) to (l) shown in Fig. 5B, but in these aspects, the suspension plate 132 and the outer frame 133 are square structures. For example, the frame a1 and the suspension plate a0 of the (a) aspect are both square structures, and are connected by a plurality of brackets a2, for example, four, but not limited thereto. And a gap a3 is provided between the bracket a2 and the suspension plate a0 and the outer frame a1 for fluid circulation. In this embodiment, the bracket a2 connected between the outer frame a1 and the suspension plate a0 may be but not limited to a board connecting portion a2, and the board connecting portion a2 has both end portions a2' and a2", The one end portion a2' is connected to the outer frame a1, and the other end portion a2" is connected to the suspension plate a0, and the two end portions a2' and a2" are corresponding to each other and are disposed on the same axis. In the same manner, it also has an outer frame b1, a suspension plate b0, a bracket b2 connected between the outer frame b1 and the suspension plate b0, and a gap b3 through which the fluid flows, and the bracket b2 may be, but is not limited to, one The board connecting portion b2 and the board connecting portion b2 have both end portions b2' and b2", and the end portion b2' is connected to the outer frame b1, and the other end portion b2" is connected to the suspension plate b0. The plate connecting portion b2 is connected to the outer frame b1 and the suspension plate b0 at an oblique angle of 0 to 45 degrees, in other words, the two end portions b2' and b2" are not disposed on the same horizontal axis. It is a setting relationship of mutual misalignment. In the (c) aspect, the outer frame c1, the suspension plate c0, and the support c2 connected between the outer frame c1 and the suspension plate c0, and the space c3 for fluid circulation are similar to the foregoing embodiment, wherein The design of the board connecting portion c2 as the bracket is slightly different from the (a) aspect. However, in this aspect, the two end portions c2' and c2" of the board connecting portion c2 are still corresponding to each other and are disposed. On the same axis.

Further, in the (d) aspect, the structure also has an outer frame d1, a suspension plate d0, a support d2 connected between the outer frame d1 and the suspension plate d0, and a space d3 through which the fluid flows, and the like. The plate connecting portion d2 as a bracket further has a structure such as a suspension plate connecting portion d20, a beam portion d21, and an outer frame connecting portion d22, wherein the beam portion d21 is disposed in a gap d3 between the suspension plate d0 and the outer frame d1, and The direction of the arrangement is parallel to the outer frame d1 and the suspension plate d0, and the suspension plate connection portion d20 is connected between the beam portion d21 and the suspension plate d0, and the outer frame connection portion d22 is connected to the beam portion d21 and the outer frame d1. The suspension plate connecting portion d20 and the outer frame connecting portion d22 also correspond to each other and are disposed on the same axis.

In the (e) aspect, the outer frame e1, the suspension plate e0, the support e2 connected between the outer frame e1 and the suspension plate e0, and the space e3 for fluid circulation are all the same as the aforementioned (a), (c). The pattern is similar, in which the design of the plate connecting portion e2 as the bracket is slightly different from the (a) and (c) aspects, in which the suspension plate e0 is in the form of a square, and Each side has a two-plate connecting portion e2 connected to the outer frame e1, and the two end portions e2' and e2" of each of the plate connecting portions e2 are also corresponding to each other and disposed on the same axis. In the embodiment, the frame f1, the suspension plate f0, the bracket f2, and the gap f3 are also provided, and the bracket f2 may be but not limited to a board connecting portion f2. In this embodiment, the board connecting portion f2 The structure is a V-shaped structure. In other words, the board connecting portion f2 is also connected to the outer frame f1 and the suspension plate f0 at an oblique angle of 0 to 45 degrees. Therefore, each board connecting portion f2 has an end portion f2" and The suspension plate f0 is connected and has two end portions f2' connected to the outer frame f1, that is, the end portions b2' and the end portions b2" are not disposed on the same horizontal axis.

Please refer to FIG. 5B, which is a schematic diagram of other various embodiments of the piezoelectric actuator shown in FIG. 4A. As shown in the figure, various other aspects such as (g) to (l) show various designs of the piezoelectric actuator 13 which can be used as the microfluidic control device 1 of the present invention. The appearance patterns of the (g) to (l) aspects generally correspond to the types of (a) to (f) shown in Fig. 5A, but in the cases of (g) to (l) Each of the suspension plates 132 of the piezoelectric actuator 13 is provided with a convex portion 132c, that is, a structure such as g4, h4, i4, j4, k4, and l4 as shown in the figure, and is (a)~( f) the aspect or the (g)~(l) isomorphism, the suspension plate 132 and the outer frame 133 are all designed in a square shape to achieve the aforementioned low power consumption effect; and thus the implementation aspect It can be seen that the suspension plate 132 is a double-sided flat plate structure or a stepped structure having a convex portion on the surface, which is within the protection scope of the present case, and is connected to the bracket 134 between the suspension plate 132 and the outer frame 133. The type and quantity can also be changed according to the actual application situation, and is not limited to the situation shown in this case. As mentioned above, the suspension plate 132, the outer frame 133 and the bracket 134 may be integrally formed, but not limited thereto, and the manufacturing method may be conventional processing, or yellow etching, or laser. Processing, or electroforming, or electrical discharge machining, etc., are not limited to this.

Please also refer to FIGS. 6A to 6C, wherein FIGS. 6A to 6C are diagrams showing the operation of the microfluidic control device shown in FIG. 2A. 6A to 6C are schematic views showing the steps of the microfluidic control device 1 in the case of transporting gas, and are schematic diagrams of the cutting action in an ultra-short time such as several milliseconds or microseconds. First, as shown in FIG. 6A, it can be seen that the microfluidic control device 1 is sequentially carried by the carrier housing 11, the insulating sheet 142, the conductive sheet 15, the other insulating sheet 142, the piezoelectric actuator 13, the flexible sheet 121, and The cover plate 120 and the like are stacked in a structure in which a chamber 112 is provided between the carrier housing 11 and the piezoelectric actuator 13. And a gap g0 is formed between the flexible piece 121 and the piezoelectric actuator 13, and the flow path hole 121a of the flexible piece 121 is disposed adjacent to the central portion 132d or the central portion 132d of the suspension plate 132, As described above, the gap g0 can be filled with a material, such as a conductive paste, but not limited thereto, so that the gap can be maintained between the flexible sheet 121 and the suspension plate 132 of the piezoelectric actuator 13. The depth of g0, in turn, can direct the airflow to flow more rapidly; and, in response to the depth of the gap g0, another temporary storage chamber 121d can be formed between the flexible sheet 121 and the piezoelectric actuator 13 for temporary use. The storage chamber 121d can communicate with the confluence chamber 120f between the cover 120 and the flexible plate 121 through the flow passage hole 121a of the flexible piece 121, or can pass through the piezoelectric actuator A gap 136 between the brackets 134 of 13 is in communication with the chamber 112 between the carrier housing 11 and the piezoelectric actuator 13.

When the microfluidic control device 1 is actuated, a voltage is applied mainly to the piezoelectric actuator 131 of the piezoelectric actuator 13, and the piezoelectric actuator 13 is biased by the voltage to be supported by the holder 134 as a fulcrum. Reciprocating vibration. As shown in FIG. 6A, when the piezoelectric actuator 13 is subjected to voltage actuation and is bent upward and vibrated, the fluid enters through at least one second communication hole 120c on the cover 120 and passes through at least one confluence communicating therewith. The venting hole 120d is collected in the central recess 120e, that is, the confluence chamber 120f, and flows into the temporary storage chamber 121d via the flow path hole 121a corresponding to the central recess 120e on the flexible sheet 121, and thereafter, When the piezoelectric actuator 13 vibrates, the flexible piece 121 resonates to reciprocate vertically. As shown in FIG. 6B, the portion of the flexible piece 121 corresponding to the central recess 120e is also Then, the vibration deformation is upwardly bent, whereby the deformation of the flexible sheet 121 is performed to compress the volume of the temporary storage chamber 121d, and the fluid in the chamber is pushed to flow to both sides; as shown in FIG. 6C, when the pressure is applied The electric actuator 13 is driven by a voltage to vibrate downward, and the flexible piece 121 is returned to the initial position, but at this time, the fluid in the temporary chamber 121d is squeezed to flow to both sides, and is passed through the piezoelectric actuator 13 The gap 136 between the brackets 134 passes upwardly and flows into the chamber 112. And further discharging the fluid from the first communication holes 113, 114 of the carrying case 11 out of the microfluidic control device 1 to achieve a micro, ultra-thin and silent microfluidic control device that can utilize piezoelectric switching power 1.

Please refer to FIGS. 7A to 7D, wherein FIGS. 7A to 7D are partial actuation diagrams of the microfluidic control device shown in FIG. 2A. 7A to 7D are schematic diagrams showing the steps of the microfluidic control device 1 in the case of transmitting gas, and are schematic diagrams of the cutting action in an ultra-short time such as several milliseconds or microseconds. As shown in FIGS. 7A and 7B, when the piezoelectric actuator 13 of the microfluidic control device 1 is subjected to voltage actuation and is bent upward and vibrated, at least one second communication hole 120c on the cover 120 enters, and The at least one bus bar hole 120d communicating therewith is collected at the central recess 120e of the center, that is, the confluence chamber 120f, and flows into the temporary cavity via the flow path hole 121a corresponding to the central recess 120e on the flexible piece 121. In the chamber 121d. Further, since the flexible sheet 121 is a light and thin sheet-like structure, when the piezoelectric actuator 13 vibrates, the flexible sheet 121 resonates and reciprocates vertically, which is flexible. The portion of the piece 121 corresponding to the central recess 120e is also deformed by bending vibration, that is, the portion corresponding to the central recess 120e is the movable portion 121b of the flexible piece 121, when the piezoelectric actuator 13 is bent upward and vibrated. The movable portion 121b of the flexible portion 121 corresponding to the central recess 120e is driven by the introduction and pushing of the fluid and the vibration of the piezoelectric actuator 13, and is deformed as the piezoelectric actuator 13 is bent upward, that is, 7B, at this time, the movable piece 121b of the flexible piece 121 corresponding to the central recess 120e still maintains an upward bending vibration deformation, but the piezoelectric actuator 13 is again subjected to voltage actuation and downwardly bending and vibrating, and in this embodiment In the example, since the second surface 132b of the suspension plate 132 of the piezoelectric actuator 13 has a convex portion 132c (as shown in FIG. 4B), when the piezoelectric actuator 13 is controlled to be bent downward, The movable portion 121b of the flexible sheet 121 that deforms upwardly and flexibly is in contact with the convex portion of the suspension plate 132 132c, thereby closing the passage of the fluid into the temporary storage chamber 121d, and suppressing the vibration of the piezoelectric actuator 13 between the region other than the convex portion 132c of the suspension plate 132 and the fixed portion 121c on both sides of the flexible sheet 121 The spacing of the temporary storage chambers 121d does not become small, so that the flow rate of the fluid flowing between them does not decrease, and no pressure loss occurs, so that the volume of the temporary storage chamber 121d is more effectively compressed, and As shown in FIG. 7C, when the piezoelectric actuator 13 continues to bend downward and vibrate, the fluid in the temporary chamber 121d can be caused to push to flow to both sides, and via the bracket 134 of the piezoelectric actuator 13. The gap 136 is traversed upward to obtain a higher discharge pressure; and at this time, as the convex portion 132c of the suspension plate 132 of the piezoelectric actuator 13 is driven downward and collided, the flexible sheet 121 is The movable portion 121b is also deformed downwardly by vibration and returned to the initial position. Finally, as shown in FIG. 7D, when the piezoelectric actuator 13 is returned to the initial position without voltage actuation, it is flexible. The movable portion 121b of the sheet 121 also returns to the initial position. In this embodiment, it can be seen that the design of the suspension plate 132 of the piezoelectric actuator 13 having the convex portion 132c is applied to the microfluidic control device 1 of the present invention to achieve better fluid transmission efficiency, but the design of the convex portion 132c is The state, quantity and position may be changed according to the actual application situation, and are not limited thereto.

Please refer to FIG. 8A to FIG. 8C , which are schematic diagrams showing the front combined structure of the micro fluid control device and the micro valve device according to another preferred embodiment of the present invention, a schematic view of the front side exploded structure, and a schematic view of the back structure of the micro valve device. As shown in FIG. 8A and FIG. 8B, the microfluidic control device 1 of the present invention can further be combined with a microvalve device 2, which utilizes a light, thin, and flexible valve piece 22 to act in response to a pressure difference, thereby making the valve piece 22 passively generating the flow path switch, and causing the fluid to flow in one direction, accumulating pressure on any container at the outlet end, and when the pressure is required to be relieved, by regulating the output of the microfluidic control device 1, the fluid is discharged through the communication flow channel. The blood pressure is reduced or completely discharged to relieve pressure, and the microfluidic control device 1 applied to the sphygmomanometer can be achieved. As shown in FIG. 8B, the micro valve device 2 includes an outlet cover 21 and a valve piece 22, and the outlet cover 21 and the valve piece 22 are sequentially stacked on the carrier housing 11 of the microfluidic control device 1. . As described above, the first pressure relief chamber 115 and the first outlet chamber 116 are further recessed on the outer surface 110 of the carrier housing 11, and the first pressure relief chamber 115 and the first outlet chamber 116 are respectively transmitted. The first communication holes 113, 114 are connectable to the chamber 112, and further have a convex structure 117 at the first outlet chamber 116. In the embodiment, the valve piece 22 can be, but is not limited to, a light, thin, flexible sheet-like structure, and has a valve hole 220 thereon, when the valve piece 22 and the outlet cover 21 and the micro fluid When the bearing housing 11 of the control device 1 is assembled and assembled, the valve hole 220 is correspondingly disposed corresponding to the convex portion structure 117 of the first outlet chamber 116 of the carrier housing 11, whereby the design of the single valve hole 220 is adopted. So that the fluid can reach the one-way flow in response to the pressure difference.

Referring to FIGS. 8B and 8C, as shown, the outlet cover 21 has an outer surface 210 and a corresponding inner surface 211, and has an outer surface 210 and an inner surface 211 on the outlet cover 210. The pressure relief through hole 212 and the outlet through hole 213 are recessed on the inner surface 211 of the outlet cover plate 210 to form a second pressure relief chamber 214 and a second outlet chamber 215, as shown in FIG. 8C, and the second The pressure relief chamber 214 is correspondingly disposed at the pressure relief through hole 212, and the second outlet chamber 215 is correspondingly disposed at the outlet through hole 213, and the second pressure relief chamber 214 and the second outlet chamber 215 There is a communication passage 216 communicating with the recessed passage between the second pressure relief chamber 214 and the second outlet chamber 215. In this embodiment, one end of the pressure relief through hole 212 is in communication with the second pressure relief chamber 214, and a convex portion structure 212a formed by the protrusion may be further added to the end portion thereof, for example, but not limited to a cylindrical structure, the other end is connected to the outer surface 210 of the outlet cover 21 to communicate with the outside; and one end of the outlet through hole 213 is in communication with the second outlet chamber 215, and the other end is connected to the outlet 23, In this embodiment, the outlet 23 can be connected to a device (not shown), such as a sphygmomanometer, but not limited thereto. The outlet cover 21 further has at least one limiting structure 217 (as shown in FIG. 9A ). In this embodiment, the limiting structure 217 is disposed in the second pressure relief chamber 214 and is a ring shape. The block structure, and not limited thereto, is mainly used for assisting the support of the valve piece 22 when the micro valve device 2 performs the pressure collecting operation, so as to prevent the valve piece 22 from collapsing, and the valve piece 22 can be made more Opening or closing rapidly causes the valve flap 22 to open or close the control fluid delivery.

As shown in FIG. 9B, when the outlet cover 21 and the valve piece 22 of the micro valve device 2 are sequentially stacked on the carrier housing 11 of the microfluidic control device 1, the valve hole 220 of the valve piece 22 is connected to the outlet. The outlet through hole 213 of the cover plate 21 is in communication, and due to the atmospheric pressure input from the outlet through hole 213, the valve piece 22 is caused to be downward, and the valve hole 220 is brought into close contact with the bearing housing 11 The protrusion structure 117 in the outlet chamber 116 is closed, so that the fluid in the chamber 112 of the carrier housing 11 will not flow back into the first outlet chamber 116, and at the same time, the carrier housing 11 A pressure relief chamber 115 is also blocked by the valve piece 22, so that the effect of preventing fluid leakage is better, and the restriction structure 217 of the second pressure relief chamber 214 is transmitted through the outlet cover 21 to assist The valve piece 22 is supported so as not to collapse, and the valve piece 22 can be opened or closed more quickly.

Please refer to FIG. 9A, which is a schematic diagram of the collective pressure operation of the microfluidic control device and the microvalve device shown in FIG. 8A. As shown in the figure, when the fluid is moved by the microfluidic control device 1 and flows out of the first communication hole 114 of the carrier housing 11 into the first outlet chamber 116, the upward pressing of the fluid will cause a corresponding The valve piece 22 disposed on the first outlet chamber 116 is bent upwardly, so that the valve hole 220 abutting against the protrusion structure 117 can be opened upward, so that the fluid can be discharged from the first outlet chamber 116. Flowing through the valve hole 220 into the second outlet chamber 215 of the outlet cover 21, and then discharging out of the outlet through hole 213; at the same time, the fluid in the chamber 112 of the microfluidic control device 1 is also squeezed. Flowing through the other first communication hole 113 to the first pressure relief chamber 115, at this time, due to the pressure generated by the fluid pressure, the valve piece 22 is deformed upwardly to resist the pressure relief through hole of the closed outlet cover 21 212, and as shown, it can be seen that the valve piece 212 not only closes the pressure relief through hole 212, but also blocks the second pressure relief chamber 214 and the communication flow path 216 of the outlet cover 21, so that the fluid is concentrated by another The side outlet through holes 213 and the outlets 23 are discharged to the outside. In some embodiments, the outlet through hole 213 and the outlet 23 can be connected to the air bag of the sphygmomanometer for use as a gas gathering, but not limited thereto.

Please refer to FIG. 9B, which is a schematic diagram of the pressure reduction or pressure relief operation of the micro fluid control device and the micro valve device shown in FIG. 9A. As shown in the figure, when a device connected to the outlet through hole 213 and the outlet 23, for example, an air bag of a sphygmomanometer, is used for pressure relief, the microvalve device 2 is controlled to close the microfluidic control device 1 at this time. Thereby, the fluid is discharged, and the fluid transfer amount of the microfluidic control device 1 is regulated, so that the fluid is no longer input into the chamber 112 of the carrying case 11, and the fluid will be input downward from the outlet through hole 213 to the first The second outlet chamber 215 is expanded to expand the volume of the second outlet chamber 216, and the pressing force causes the flexible valve piece 22 to be bent downwardly and flattened against the first outlet chamber of the carrier housing 11. The convex portion structure 117 of the 116 is closed, so that the valve hole 220 of the valve piece 22 is closed again by the protrusion of the convex portion structure 117; and the gas in the second outlet chamber 216 can flow through the communication flow path 217. In the second pressure relief chamber 214, the volume of the second pressure relief chamber 214 is expanded, and the valve piece 22 corresponding to the second pressure relief chamber 214 is also bent downwardly, at this time due to the valve piece 22 Bending downward so that it does not rebut against the end of the pressure relief through hole 212 With the structure 212a, the pressure relief through hole 212 is in an open state, and the fluid in the device (not shown) connected to the outlet 23 can be discharged and depressurized by the one-way pressure relief operation; For example, the fluid in the air bag of the sphygmomanometer communicating with the outlet through hole 213 and the outlet 23 at this time can be depressurized through the pressure relief through hole 212 to be discharged, or completely discharged to complete the pressure relief operation. .

In summary, the microfluidic control device provided in the present invention comprises a housing and a piezoelectric actuator disposed in the housing, and the housing is composed of a carrier shell and a base, and the square type designed by the present invention is used. The piezoelectric actuator is actuated to allow fluid to flow from the second communication hole of the cover of the base, and to flow along the communicating bus hole and the central hole, and through the flow path hole of the flexible piece to make the fluid flexible A pressure gradient is generated in the temporary chamber formed between the sheet and the piezoelectric actuator, so that the fluid flows at a high speed and can be continuously transmitted, so that the fluid can be quickly transported, and at the same time, the effect of mute can be achieved, and The overall volume of the microfluidic control device is reduced and thinned for portable and portable purposes, and can be combined with another microvalve device to be more widely used in medical equipment and related equipment. Therefore, the microfluidic control device of this case is of great industrial value and is submitted in accordance with the law.

Even though the present invention has been described in detail by the above-described embodiments, it can be modified by those skilled in the art, and is not intended to be protected as claimed.

1‧‧‧Microfluidic control device
10‧‧‧shell
11‧‧‧ Carrying shell
11a‧‧‧ accommodating space
110‧‧‧ Carrying the outer surface of the casing
111‧‧‧The inner surface of the bearing shell
112‧‧‧ chamber
113, 114‧‧‧ first connecting hole
115‧‧‧First pressure relief chamber
116‧‧‧First out of the chamber
117, 212a‧‧‧ convex structure
118‧‧‧ side wall
12‧‧‧Base
120‧‧‧ cover
120a‧‧‧ first surface of the cover
120b‧‧‧ second surface of the cover
120c‧‧‧second connecting hole
120d‧‧‧ bus bar hole
120e‧‧‧Center recess
120f‧‧‧ confluence chamber
121‧‧‧Flexible film
121a‧‧‧Flow hole
121b‧‧‧movable department
121c‧‧‧Fixed Department
121d‧‧‧ temporary storage chamber
13‧‧‧ Piezoelectric Actuator
131‧‧‧ Piezoelectric drive
132‧‧‧suspension plate
132a‧‧‧The first surface of the suspension plate
132b‧‧‧Second surface of the suspension plate
132c‧‧‧ convex
132d‧‧‧Central Department
132e‧‧‧The outer part
133‧‧‧Front frame
133a‧‧‧ first surface of the outer frame
133b‧‧‧ second surface of the outer frame
134‧‧‧ bracket
134a‧‧‧ first surface of the stent
134b‧‧‧Second surface of the stent
135, 151‧‧‧ conductive pins
136‧‧‧ gap
14,141,142‧‧‧Insulation gasket
15‧‧‧Electrical gasket
2‧‧‧ miniature valve device
21‧‧‧Export cover
210‧‧‧Exit cover outer surface
211‧‧‧ The inner surface of the exit cover
212‧‧‧Relief through hole
213‧‧‧Export through hole
214‧‧‧Second pressure relief chamber
215‧‧‧Second out of the chamber
216‧‧‧Connected runners
217‧‧‧Limited structure
22‧‧‧ Valves
220‧‧‧ valve hole
23‧‧‧Export
G0‧‧‧ gap
(a)~(l)‧‧‧Different implementations of conductive actuators
A0~l0‧‧‧suspension board
A1~l1‧‧‧ frame
A2~l2‧‧‧ bracket, plate connection
A2', b2', c2', e2', f2'‧‧‧ brackets attached to the end of the frame
A2", b2", c2", e2", f2"‧‧‧ brackets attached to the end of the suspension plate
D20‧‧‧suspension plate connection
D21‧‧‧ Beam Department
D22‧‧‧Frame connection
A3~f3‧‧‧ gap
G4~l4‧‧‧ convex

1 is a schematic view showing the front combined structure of the microfluidic control device of the preferred embodiment of the present invention. Fig. 2A is a front exploded view showing the microfluidic control device shown in Fig. 1. Fig. 2B is a schematic exploded view showing the back side of the microfluidic control device shown in Fig. 1. Fig. 3 is a schematic cross-sectional view showing the microfluidic control device shown in Fig. 1. 4A is a schematic view showing the front combined structure of a piezoelectric actuator of a microfluidic control device according to another preferred embodiment of the present invention. Fig. 4B is a schematic view showing the structure of the back side of the piezoelectric actuator shown in Fig. 4A. Fig. 4C is a schematic cross-sectional view showing the piezoelectric actuator shown in Fig. 4B. Fig. 5A is a schematic view showing various embodiments of the piezoelectric actuator shown in Fig. 2A. Fig. 5B is a schematic view showing other various embodiments of the piezoelectric actuator shown in Fig. 4A. 6A to 6C are schematic views showing the operation of the microfluidic control device shown in Fig. 2A. 7A to 7D are schematic views showing a partial operation of the microfluidic control device shown in Fig. 2A. FIG. 8A is a schematic view showing the front combined structure of the micro fluid control device and the micro valve device according to another preferred embodiment of the present invention. Fig. 8B is a front exploded view showing the microfluidic control device and the microvalve device shown in Fig. 8A. Fig. 8C is a schematic view showing the structure of the back surface of the microvalve device shown in Fig. 8A. Figure 9A is a schematic diagram of the collective pressure actuation of the microfluidic control device and the microvalve device shown in Fig. 8A. Figure 9B is a schematic diagram of the pressure reduction or pressure relief operation of the microfluidic control device and the microvalve device shown in Fig. 9A.

13‧‧‧ Piezoelectric Actuator

131‧‧‧ Piezoelectric drive

132‧‧‧suspension plate

132a‧‧‧The first surface of the suspension plate

133‧‧‧Front frame

133a‧‧‧ first surface of the outer frame

134‧‧‧ bracket

134a‧‧‧ first surface of the stent

135‧‧‧Electrical pins

136‧‧‧ gap

Claims (12)

A piezoelectric actuator structure comprising: a suspension plate having a square structure and being bendable and vibrating from a central portion to an outer peripheral portion; a piezoelectric driving body having a square structure having a length smaller than a side of the suspension plate a side length attached to one of the first surfaces of the suspension plate for applying a voltage to drive the suspension plate to bend and vibrate; an outer frame disposed around the outer side of the suspension plate; and at least one bracket coupled to the suspension Between the plate and the outer frame to provide elastic support, wherein the bracket comprises: a beam portion disposed in a gap between the suspension plate and the outer frame, the direction of which is disposed parallel to the outer frame and a suspension plate; a suspension plate connecting portion connected between the beam portion and the suspension plate; and an outer frame connecting portion connected between the beam portion and the outer frame and connected to the suspension plate Corresponding to, and set on the same axis. The piezoelectric actuator structure of claim 1, wherein the at least one bracket is a board connecting portion for connecting the suspension board and the outer frame. The piezoelectric actuator structure according to claim 2, wherein both end portions of the board connecting portion correspond to each other and are disposed on the same axis. The piezoelectric actuator structure according to claim 2, wherein the plate connecting portion is connected to the suspension plate and the outer frame at an oblique angle of 0 to 45 degrees. The piezoelectric actuator structure according to claim 1, wherein the suspension plate has a square structure and has a side length of 8 mm. The piezoelectric actuator structure according to claim 1, wherein the suspension plate has a square structure and has a side length of 9 mm. The piezoelectric actuator structure according to claim 1, wherein the suspension plate has a square structure and has a side length of 10 mm. The piezoelectric actuator structure of claim 1, wherein one of the suspension plates has a convex portion on the second surface. The piezoelectric actuator structure of claim 8, wherein the height of the protrusion of the suspension plate is between 0.02 mm and 0.08 mm. The piezoelectric actuator structure according to claim 8, wherein the convex portion of the suspension plate has a circular convex structure and has a diameter of 5.5 mm. The piezoelectric actuator structure according to claim 1, wherein the suspension plate has a thickness of between 0.1 mm and 0.4 mm. The piezoelectric actuator structure of claim 1, wherein the piezoelectric actuator has a thickness of between 0.05 mm and 0.3 mm.