TWM526751U - Chemical deposition sealing device - Google Patents

Description

Chemical deposition sealing device

The present disclosure relates to a chemical deposition sealing device, in particular to a two-piece synchronously sealed two-piece hanger, which has a simple structure, is easy to manufacture, and has high mechanism reliability.

Chemical deposition is an important process equipment for the miniaturization of the 3C industry. In the past, it was a chemical deposition method for single-slot single-chip (eg, wafer). In recent years, with the industrial demand, the chemical deposition of single-slot and double-chip has become more and more important. With the advantages of doubled production capacity and small chemical liquid usage, it has gradually become the mainstream technology of chemical deposition.

The conventional two-piece (eg, wafer) deposition sealing technology still requires a secondary seal. Each seal must be leak tested to ensure the quality of the seal, avoiding chemical liquid leakage to the back of the substrate (eg, wafer), resulting in different chemical processes. Chemical liquid cross-contamination and affect the quality and stability of chemical deposition. One of the well-known structures requires the use of airbag components to charge and deflate and rotate the servo motor to deform the elastic structural hook plate, and finally produce the fastening force to achieve the wafer sealing effect, but the manufacturing cost is obviously too high; It is known that the structure must control the tightening torque required for sealing to achieve the wafer sealing effect, but the thickness of the substrate changes, which will cause the initial rotational position deviation and increase the complexity of the automated process.

In summary, how to overcome the shortcomings of the conventional deposition and sealing technology of two-piece (eg, wafer) is an important issue that is well-understood by those skilled in the art.

In an embodiment, the present disclosure provides a chemical deposition sealing device comprising: a first fastening component; a second fastening component engaged with the first fastening component; and a positioning device disposed on the Between the first fastening component and the second fastening component, the positioning device comprises: a first socket for carrying a substrate; and a second socket for carrying another substrate; wherein the first a fastening component has a first flange, the second fastening component has a second flange, the first flange is provided with a first inner sealing ring, and the second flange is provided with a second inner sealing ring. And the second fastening component is provided with a second outer sealing ring.

10‧‧‧First fastening component

11‧‧‧First fastening plate

111‧‧‧First hole

112‧‧‧First flange

113‧‧‧First inner seal ring

12‧‧‧ first hook plate

121‧‧‧ first hook hole

13‧‧‧ activity board

131‧‧‧ activity hook

132‧‧‧ rod body

20‧‧‧Second fastening component

21‧‧‧Second fastening plate

214‧‧‧Second outer seal ring

211‧‧‧Second hole

221a‧‧ Wide section

221b‧‧‧narrow

212‧‧‧second flange

213‧‧‧Second inner seal ring

22‧‧‧Second hook plate

221‧‧‧Second hook hole

30‧‧‧ Positioning device

31‧‧‧First seat

311‧‧‧Limited board

32‧‧‧Second seat

33‧‧‧ Pin body

331‧‧‧ one end

332‧‧‧Flange

333‧‧‧The other end

34‧‧‧Flexible components

P1, P2‧‧‧ substrate

T‧‧‧ trough

S‧‧‧Liquid

FIG. 1 is a schematic diagram of a combined structure according to an embodiment of the present disclosure.

Figure 2 is a partially exploded perspective view of the embodiment of Figure 1.

Figure 3 is a schematic longitudinal sectional view of Figure 1.

Figure 4 is a schematic longitudinal sectional view of Figure 2.

FIG. 5 is a schematic front view of the positioning device of the present disclosure.

Figure 6 is a schematic view of the right side of Figure 5.

Figure 7 is a schematic cross-sectional view of the A-A of Figure 5;

Figure 8 is a schematic view of the structure of Figure 7 when pressurized.

FIG. 9 is a schematic structural view of a movable hook plate and a hook hole according to the present disclosure.

FIG. 10 is a schematic exploded view of the fastening device of the present disclosure.

FIG. 11 is a schematic view showing the structure of the first hook hole plate of FIG. 10 in cooperation with the movable hook plate and not hooked.

Figure 12 is a schematic cross-sectional view of the line B-B of Figure 11;

Figure 13 is a schematic enlarged view of the portion C of Figure 12;

FIG. 14 is a schematic view showing the structure of the first hook hole plate and the movable hook plate of FIG.

Figure 15 is a schematic cross-sectional view of the D-D of Figure 14.

Figure 16 is a schematic enlarged view of the portion E of Figure 15.

FIG. 17 is a schematic enlarged view of the structure when the hook is not hooked.

FIG. 18 is a schematic enlarged view of the structure when the hook is closed.

19 is a schematic perspective view corresponding to FIG. 17.

FIG. 20 is a schematic perspective view corresponding to FIG. 18. FIG.

Referring to FIG. 1 to FIG. 4 , a chemical deposition sealing device of the present disclosure includes a first fastening component 10 , a second fastening component 20 , and a positioning device 30 . The first fastening component 10 is engaged with the second fastening component 20 , and the positioning device is disposed between the first fastening component 10 and the second fastening component 20 . The sealing device shown in FIG. 1 carries, for example, a substrate (eg, a wafer), and is immersed in a tank T for performing a chemical deposition process, wherein the substrate (eg, a wafer) is entirely immersed in the liquid S for chemical deposition. Process.

Referring to FIGS. 4-7 , the positioning device 30 includes a first socket 31 , a second socket 32 , a plurality of pin bodies 33 , and a plurality of elastic members 34 . The first socket 31 is used to carry a substrate P1, and the second socket 32 is used to carry another substrate P2. The plurality of pins 33 and the plurality of elastic members 34 are disposed on the first socket 31. Between the second sockets 32; in one embodiment, the substrate is a wafer. As shown in FIG. 7, the outer end of one end 331 of each axial direction of the pin body 33 has a flange 332. A retaining plate 31 is provided with a limiting plate 311. The limiting plate 311 has a distance D from the first bearing block 31. The pin body 33 is provided with the one end 331 of the flange 332. Between the 311 and the first socket 31 , the opposite end 333 of the pin body 33 protrudes from the limiting plate 311 and is fixed to the second socket 32 . As shown in FIG. 7, when the plurality of elastic members 34 are in a released state, the flange 332 abuts against the limiting plate 311, as shown in FIG. 8, when the plurality of elastic members 34 are in a compressed state, the flange 332 is away from the limit plate. In an embodiment, the first socket 31 and the second socket 32 are both circular.

Please refer to FIG. 2 to FIG. 4 and FIG. 9 to FIG. 18 . As shown in FIG. 4 , the first fastening component 10 includes a first fastening plate 11 , a first hook plate 12 and a movable hook plate 13 . The first fastening plate 11 has a first hole 111. The inner edge of the first hole 111 has a first flange 112. As shown in FIG. 10, the first hook plate 12 is disposed on the first hole. One side of the fastening plate 11 has a plurality of first hook holes 121; the movable hook plate 13 is disposed on the first hook plate 12 opposite to the one surface of the first hook plate 12 The movable hooking plate 13 has a plurality of movable hooks 131, and a side of the movable hooking plate 13 is provided with a rod 132.

As shown in FIG. 4 , the second fastening component 20 includes a second fastening plate 21 and a second hook plate 22 . The second fastening hole 21 is provided with a second hole 211 corresponding to the first hole 111, and the second edge 212 of the second hole 211 has a second flange 212; as shown in FIG. The plate 22 is disposed on one surface of the second fastening plate 21 , and the second hook plate 22 has a plurality of second hook holes 221 . As shown in FIG. 9, the second hook hole 221 has a wide portion 221a and a narrow portion 221b.

As shown in FIG. 1 and FIG. 4 , the positioning device 30 is sandwiched between the first flange 112 of the first fastening component 10 and the second flange 212 of the second fastening component 20 . The first socket 31 and the substrates P1 and P2 (such as FIG. 17 and FIG. 18) carried by the second socket 32 are exposed to the first hole 111 and the second hole 211, respectively. The first flange 112 is provided with a first inner seal ring 113, the second flange 212 is provided with a second inner seal ring 213, and the second fastening plate 21 is provided with a second outer seal ring 214. .

Referring to FIG. 9 , in an embodiment, in the chemical deposition sealing device of the present disclosure, the first fastening component 10 is provided with a first inner sealing ring 113 and a plurality of movable hooks 131 ; the second fastening component 20 is provided with a first a second inner sealing ring 213, a second outer sealing ring 214, and a plurality of second hook holes 221; in this embodiment, the assembly of the plurality of movable hooks 131 and the plurality of second hook holes 221 is fastened to achieve a two-piece substrate. Sealing function.

Referring to FIG. 7 and FIG. 8 , in an embodiment, a chemical deposition sealing device of the present disclosure, when the plurality of elastic members 34 are in a released state, the flange 332 abuts against the limiting plate 311. For positioning, for loading or unloading a substrate (eg, a wafer); as shown in FIG. 8, when the plurality of elastic members 34 are in a compressed state, the flange 332 is away from the limiting plate 311. When the dual substrate is in a floating state, the multi-directional degree of freedom design can adjust the orientation and posture of the substrate, thereby ensuring that the two substrates are evenly bonded to the first inner seal ring 113 and the second inner seal ring 213.

Referring to FIG. 17 and FIG. 18, in an embodiment, a chemical deposition sealing device of the present disclosure places the positioning device 30 between the first fastening component 10 and the second fastening component 20, and transmits pressure. For example, in the pressure (for example, air pressure, etc.) of one of the first fastening components 10, the positioning device 30 can be in a floating state (as shown in FIG. 8), and the two substrates P1 and P2 can be uniformly adhered to the two substrates. The first inner seal ring 113 and the second inner seal ring 213; and through the additional pressure, the second outer seal ring 214 of the second fastening component 20 can be brought into close contact with the first fastening component 10, so that the movable hook column 131 enters First The wide portion 211a of the second hook hole 211 (shown in FIG. 19). Subsequently, the external force pushes the rod 132 (as shown in FIG. 15), so that the movable hook 131 enters the narrow portion 211b of the second hook hole 211 (as shown in FIG. 20). Since one end of the movable hook 131 is in contact with the first fastening component 10 and thus rotates, the movable hook 131 can be attached to the second hook hole 211 (as shown in FIG. 18). In addition, the external pressure is removed, and the second outer seal ring 214 generates an outward fastening force to ensure the tightness of the first fastening component 10 and the second fastening component 20. In this embodiment, when the first fastening component 10, the second fastening component 10 and the positioning device 30 complete the sealing, the two substrates P1 and P2 are passed through the first inner sealing ring 133 and the second inner sealing ring 213. The sealing effect, the first fastening component 10 and the second fastening component 10 achieve a sealing/sealing effect through the second outer sealing ring 214. It can be seen from the above that the present disclosure completes the sealing of the double substrate only by one pressing and fastening action.

In summary, the chemical deposition sealing device provided by the present disclosure, the first dual-substrate hanger with synchronous sealing of two substrates, can complete the sealing of the double substrate only by one pressing and fastening action, and only needs one leak test. The sealing quality is confirmed, and at the same time, the bearing, the pin body and the elastic member of the positioning device are designed, so that the chipping in the substrate sealing process can be avoided. In summary, the chemical deposition sealing device provided by the disclosure has the advantages of synchronous double-substrate sealing, and has the advantages of simple structure, easy manufacture and high mechanism reliability compared with domestic and foreign manufacturers.

However, the specific embodiments described above are merely used to explain the features and functions of the present disclosure, and are not intended to limit the scope of the disclosure, and may be used without departing from the spirit and scope of the disclosure. Equivalent changes and modifications made to the disclosure are still covered by the scope of the following claims.

10‧‧‧First fastening component

20‧‧‧Second fastening component

30‧‧‧ Positioning device

T‧‧‧ trough

S‧‧‧Liquid

Claims (6)

A chemical deposition sealing device comprising: a first fastening component; a second fastening component engaged with the first fastening component; a positioning device disposed on the first fastening component and the first fastening component Between the two fastening components, the positioning device comprises: a first socket for carrying a substrate; a second socket for carrying another substrate; wherein the first fastening component has a first convex The second fastening component has a second flange, the first flange is provided with a first inner sealing ring, the second flange is provided with a second inner sealing ring, and is disposed on the second fastening component There is a second outer seal ring. The chemical deposition sealing device of claim 1, wherein the positioning device further comprises: a plurality of pin bodies disposed between the first socket and the second socket, wherein the pin body is axially One end of the one end has a flange, and the first bearing seat is provided with a limiting plate, and the limiting plate has a distance D between the first bearing seat, and one end of the flange of the pin body is disposed at the limit Between the plate and the first socket, the other end of the pin body protrudes from the limiting plate and is fixed to the second socket; a plurality of elastic members are disposed on the first socket and the second socket Between the plurality of elastic members being in a released state, the flange abuts against the limiting plate, and when the plurality of elastic members are in a compressed state, the flange is away from the limiting plate. The chemical deposition sealing device of claim 1, wherein the first socket and the second socket are both circular. The chemical deposition sealing device of claim 1, wherein the first fastening component comprises: a first fastening plate having a first hole, the inner edge of the first hole having the first a first hook hole plate is disposed on one surface of the first fastening plate, the first hook hole plate has a plurality of first hook holes; and a movable hook plate is disposed on the first hook plate opposite to the One of the first hook plate, the movable hook plate has a plurality of movable hooks; the second fastening component comprises: a second fastening plate, wherein the first hole is provided with a second hole, the first The inner edge of the two holes has the second flange; a second hook plate is disposed on one side of the second fastening plate, and the second hook plate has a plurality of second hook holes. The chemical deposition sealing device of claim 4, wherein the positioning device is sandwiched between the first flange and the second flange, the first socket and the second socket are carried The substrate is exposed to the first hole and the second hole, respectively. The chemical deposition sealing device of claim 4, wherein a side of the movable hook plate is provided with a rod body.