TWM523003U - Improved rotor lid for turbomolecular vacuum pump - Google Patents

Description

Improvement of rotor cover for turbo molecular vacuum pump

The creation is a rotor cover for a turbo molecular vacuum pump, a rotor is arranged above the turbo molecular vacuum pump, a lock chamber is recessed in the center of the rotor, and a rotor cover for closing the lock chamber, and the rotor cover can block dust from entering The technical field of the lock chamber.

For the first press, please refer to the first and second figures. [This is a cross-sectional view of the rotor combination and cover combination of the conventional turbomolecular vacuum pump]. Among them, the turbomolecular vacuum pump 10 used for vacuum pumping, the turbomolecular vacuum pump 10 The vacuum pumping operation is performed by driving a rotor 20, and the lock chamber 201 of the screw spindle 51 is recessed in the center of the rotor 20.

However, when the turbomolecular vacuum pump 10 is used in a process of gradually plating such as a wafer or an electronic substrate, it is easy to accumulate dust particles in the lock chamber 201, and the dust particles accumulated in the lock chamber 201 are easily caused by unstable airflow. The change and spray flying, and the flying dust particles will cause the dust particles to trace back to the processing area to contaminate the wafer and other products (such as: Figure 1; in addition, the wafer and dust particles are not drawn and labeled here).

Then, in order to prevent the dust particles from accumulating in the lock chamber 201, the product of the cover 202 that closes the lock chamber 201 is designed above the rotor 20, and the cover 202 is provided with a bolt 30 that is locked to the bottom side of the lock chamber 201. However, there is still a small amount of space for the dust particles to be accumulated in the bolt 30 locking region, so that the blocking of the cover 202 is not perfect, and the bolt 30 is also locked to easily over-destroy the cover 202, so that the cover 202 is deformed after the rotor 20 is rotated at a high speed. And rupture shift (such as: Figure 2; in addition, dust particles are not drawn and labeled here).

In view of this, the present author has intensively explored the related fields of the improvement of the strength of the cover 202, and has been continuously developing and modifying to solve the above problems.

In view of the above, it is known that the conventional cover is deformed and broken after the rotor is rotated at a high speed. The splitting of the cracks, therefore, prompted the creator to develop in the direction of increasing the displacement and reducing the blockage, and through the creators of the case to think in many ways, and think about it, according to the overall production is the best way.

A rotary shaft is arranged above the turbomolecular vacuum pump, a rotor is sleeved on the rotating shaft, a locking chamber is recessed in the center of the rotor, a side wall is arranged around the locking chamber, and a rotating shaft is fixed in the center of the locking chamber, wherein A rotor cover for closing the lock chamber is arranged above the rotor, and a bolt bolted to the bottom side of the lock chamber extends downwardly from the center of the rotor cover.

The lower surface of the rotor cover has a flat surface which is flat on the upper edge of the rotor. The flat surface has an extension extending into the lock chamber, and the extension portion can be closely attached to the side wall of the lock chamber. And a ring groove is arranged around the extension section, and an O-ring which is closely adjacent to the side wall of the lock chamber is sleeved in the ring groove.

Further, above the rotor cover, there is another arc-shaped or tapered-shaped flow-conducting surface which is raised from the center and is lowered toward the periphery, and the bottom side of the rotor cover is enlarged and recessed to reduce the volume below the concave chamber, and the center of the lower concave chamber is further The bolt is screwed to the bottom side of the lock chamber. In addition, a side shallow groove is added around the rotor cover, and two to four side shallow grooves are arranged equiangularly around the rotor cover.

The utility model relates to a rotor cover for a turbomolecular vacuum pump, wherein a rotary shaft is arranged above the turbomolecular vacuum pump, a segment is protruded above the rotary shaft, a thread segment is arranged on the upper side of the segment, and an inner screw hole is recessed in the center of the thread segment. Then, a rotor is sleeved on the rotating shaft, and a lock chamber is recessed in the center of the rotor. The rotor has a segment hole in the center of the lock chamber for the thread segment of the segment to be inserted, and the lock chamber is inserted A nut of the threaded section is locked, and a rotor cover for closing the locking chamber is arranged above the rotor, and a bolt of a screw hole in the center of the threaded section of the bottom side of the locking chamber extends downwardly from the center of the rotor cover.

In addition, the rotor cover has a flat surface on the upper edge of the rotor cover, and the extension surface extends into the extension portion of the lock chamber, and the extension portion can be closely attached to the side wall of the lock chamber. Wherein, a ring groove is added around the extending portion below the rotor cover, and an O-ring which is closely adjacent to the side wall of the lock chamber is disposed in the ring groove.

Furthermore, the rotor cover has a centrally rising surface and a lowering guide surface toward the periphery, and the bottom side of the rotor cover is increased in recess to reduce the volume below the recess, and the center of the lower recess is provided with a screwed internal screw. The bolt of the hole.

The beneficial effect of the creation is that the rotor cover is integrally formed, so that the lock chamber is free from dirt after being closed, and the flow guiding surface can be used as an auxiliary rotor to enhance the airflow guidance smoothly, and The benefits of having the best emission standards.

The technical content and other objects and features of the present invention can be fully understood by referring to the detailed description of the embodiments below.

[Use]

10‧‧‧ Turbo Molecular Vacuum Pump

101‧‧‧ mandrel

20‧‧‧Rotor

201‧‧‧Lock room

202‧‧‧ cover

30‧‧‧ bolt

[this creation]

1‧‧‧ Turbo Molecular Vacuum Pump

11‧‧‧Rotary axis

111‧‧‧Class

112‧‧‧Threaded section

113‧‧‧Inner hole

12‧‧‧Rotor

13‧‧‧Lock room

13A‧‧‧Class

13B‧‧‧ Nuts

131‧‧‧ side wall

2‧‧‧Rotor cover

21‧‧‧ bolt

22‧‧‧Conduit

23‧‧‧Under the alcove

23A‧‧‧Dome

24‧‧ ‧ flat joint

25‧‧‧Extension

251‧‧‧ ring groove

252‧‧‧O-ring

26‧‧‧Side shallow groove

Figure 1 is a rotor assembly diagram of a conventional turbomolecular vacuum pump.

Figure 2 is a cross-sectional view of a conventional combination of lids.

Fig. 3 is a combination diagram of the rotor cover of the turbomolecular vacuum pump of the present invention.

Figure 4 is a schematic view of a rotor-shaped guide surface with a tapered shape.

Figure 5 is a schematic view of the lower concave chamber of the circular arc-shaped diversion mask dome.

Figure 6 is a schematic view of the lower recess of the dome of the tapered conical mask of the present invention.

Fig. 7 is a schematic view showing the arc-shaped flow guiding surface of the rotor cover of the thin shell.

Fig. 8 is a schematic view showing a tapered conical flow guiding surface of the rotor cover of the present invention.

Figure 9 is a schematic view of the solid rotor cover with an arc-shaped flow guiding surface.

Figure 10 is a schematic view of a solid rotor cover with a pointed conical flow surface.

Figure 11 is a schematic view of the rotor cover of the created planar sheet.

Figure 12 is a schematic view of the rotor cover of the created planar sheet with extensions.

Figure 13 is a three-dimensional schematic view of the side of the rotor cover with a shallow groove.

Figure 14 is a schematic diagram of the combination of the shallow groove on the side of the rotor cover of the creation.

Figure 15 is a combination of the rotor cover and the rotating shaft of the turbomolecular vacuum pump of the present invention.

Figure 16 is a schematic view of a rotor-shaped guide surface and an extended section of the rotor cover of the present invention.

In order to make your reviewer have a better understanding of this creation, Zize is below The column examples illustrate.

Please refer to Figures 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, and 14 for the review of the rotor cap assembly and rotor cover of the turbomolecular vacuum pump. The tip of the conical flow guiding surface, the lower concave chamber of the dome of the circular arc-shaped diversion mask, the lower concave chamber of the dome of the tapered conical flow mask, and the arc-shaped flow guiding surface of the thin-shell rotor cover The thin-shell rotor cover has a tapered cone-shaped flow guiding surface, the solid rotor cover has an arc-shaped flow guiding surface, the solid rotor cover has a pointed cone-shaped flow guiding surface, the planar sheet body has a rotor cover, and the plane The rotor cover of the sheet body has an extended section, the rotor cover has a shallow groove on the side, and the rotor cover has a shallow groove combination on the side. The rotor cover is modified by a rotor cover 2 for a turbomolecular vacuum pump 1 . A rotating shaft 11 is disposed, a rotor 12 is sleeved on the rotating shaft 11, a locking chamber 13 is recessed in the center of the rotor 12, a side wall 131 is arranged around the locking chamber 13, and a rotating shaft 11 is fixed in the center of the locking chamber 13, wherein , the rotor 12 is provided with a closed lock chamber 1 The rotor cover 2 of the rotor cover 2 extends downwardly from the center of the rotor cover 2 with a bolt 21 screwed to the bottom side of the lock chamber 13.

In addition, the integrally formed rotor cover 2 has a circular arc-shaped or tapered-shaped flow guiding surface 22 which is raised from the center and is lowered toward the periphery, and the rotor 12 is assisted by the flow guiding surface 22 to enhance the airflow. The smoothness of the discharge, and the dirt and dust particles are completely discharged from the turbo-type vacuum pump 1 according to the flow guiding surface 22, and the rotor cover 2 can perfectly close the lock chamber 13, so that the lock chamber 13 can be clean and free from contamination. The bottom side of the rotor cover 2 is recessed and recessed for reducing the volume of the recess 23, and the lower recess 23 is provided to prevent the rotor cover 2 from interfering with the stability of the rotor 12 in rotation, and the bottom of the lower recess 23 is provided with a screw. The bolt 21 is connected to the bottom side of the lock chamber 13 (as shown in Fig. 3; in addition, dirt and dust particles are not drawn and labeled here).

Further, under the rotor cover 2, there is a flat surface 24 which is flat on the upper edge of the rotor 12. The locking surface 13 can be completely closed according to the flat surface 24, and the extension surface 24 has an extension extending into the locking chamber. In the segment 25, the extension 25 is just adjacent to the side wall 131 of the lock chamber 13. A ring groove 251 is further disposed around the extending portion 25, and the ring groove 251 is further sleeved with an O-ring 252 that closely abuts the side wall 131 of the locking chamber 13, and the extension portion 25 is supplemented by an O-ring 252. The effect of the closing effect of the rotor cover 2 on the locking chamber 13 and the stability of the assembly (as shown in Fig. 3); the tapered cone-shaped flow guiding surface 22, the annular groove 251 and the O-ring 252 are shown in Fig. 4. Show).

However, the upper part of the rotor cover 2 has a circular arc which is raised in the center and lowered toward the periphery. Or a conical flow-conducting surface 22, and the bottom side of the rotor cover 2 has an concave chamber 23 which is concavely below the dome 23A (as shown in Fig. 5; and the tapered conical flow surface 22 is Figure 6 shows).

However, the rotor cover 2 has a circular arc-shaped or tapered-shaped flow guiding surface 22 which is raised from the center and is lowered toward the periphery, and the bottom side of the rotor cover 2 has a circular arc shape or a tapered shape. The lower recess 23, the lower recess 23 makes the rotor cover 2 thinner, and the rotor cover 2 closes the lock chamber 13 only with the flat surface 24 (as shown in Fig. 7; and the tapered guide) The flow surface 22 is shown in Fig. 8).

Moreover, the rotor cover 2 has a circular arc-shaped or tapered-shaped flow guiding surface 22 which is raised from the center to the periphery, and the rotor cover 2 can be made into a solid object according to the different environment requirements of the rotor 12 (eg: 9 is shown; and the tapered flow guiding surface 22 is shown in FIG. 10).

In addition, the rotor cover 2 is a flat piece, and the rotor cover 2 has a flat surface 24 which is flat on the upper edge of the rotor 12. The flat surface 24 has an extension 25 extending into the lock chamber, and the extension 25 is just It can be closely attached to the side wall 131 of the lock chamber 13. A ring groove 251 is further disposed around the extending portion 25, and an O-ring 252 is disposed in the ring groove 251 to fit the side wall 131 of the locking chamber 13 (as shown in FIG. 11; and the extending portion 25 is Figure 12)).

In addition, a side shallow groove 26 is added around the rotor cover 2, and two or four side shallow grooves 26 are arranged equiangularly around the rotor cover 2, and the side shallow groove 26 is just for the user to operate the rotor by using a jig or a tool. The combination and separation of the cover 2 and the rotor 12 (as shown in Fig. 13; in addition, the rotor 12 is referred to with reference to Fig. 14; and the jig or tool is not shown and labeled herein).

Please refer to Figures 15 and 16 for the reviewer. [This is a schematic diagram of the combination of the rotor cover and the rotating shaft of the turbo-molecular vacuum pump of the creation, the tapered guide surface and the extension of the rotor cover]; The rotor cover 2 of the molecular vacuum pump 1 has a rotating shaft 11 protruding above the rotating shaft 11 and a stepped section 111 protruding above the rotating shaft 11. The upper side of the segment 111 is provided with a threaded section 112, and the threaded section 112 is below the center. An inner screw hole 113 is recessed, and then a rotor 12 is sleeved on the rotating shaft 11, and a locking chamber 13 is recessed in the center of the rotor 12. The rotor 12 has a threaded section 112 of the class segment 111 at the center of the locking chamber 13. The through hole 13A is inserted into the hole 13A, and a nut 13B of the locking thread segment 112 is inserted into the lock chamber 13, and a rotor cover 2 for closing the lock chamber 13 is disposed above the rotor 12, and the rotor cover 2 extends downwardly from the center There is a bolt 21 screwed into the screw hole 113 in the center of the threaded section 112 on the bottom side of the lock chamber 13.

Then, the integrally formed rotor cover 2 has a circular arc-shaped or tapered-shaped flow guiding surface 22 which is raised from the center to the periphery, and the bottom side of the rotor cover 2 is recessed and recessed for reducing the volume. The chamber 23 is further provided with a bolt 21 screwed to the inner screw hole 113 at the center of the lower recess chamber 23. Further, under the rotor cover 2, there is another flat surface 24 which is flattened to the upper edge of the rotor 12 and completely closes the lock chamber 13. The flat surface 24 further has an extension 25 extending into the lock chamber, and the extension 25 It can be closely attached to the side wall 131 of the lock chamber 13. A ring groove 251 is further disposed around the extending portion 25, and the ring groove 251 is further provided with an O-ring 252 which is closely adjacent to the side wall 131 of the locking chamber 13 (as shown in FIG. 14; and a tapered guide) The flow surface 22 is shown in Fig. 15).

According to the above description, the rotor cover 2 of the present invention is integrally formed as a complete member, and the rotor cover 2 is guided by the flow guiding surface 22 as a guide airflow and dust particles to discharge the turbomolecular vacuum pump 1. Thus, the integrally manufactured rotor cover 2 is eliminated. It is customary to lock excessively to destroy the possible deformation and the lack of cracking. In addition, the use of the rotor cover 2 can completely close the lock chamber 13, so that the lock chamber 13 cannot be an excellent object for the effect of the sealed space in which dust particles are accumulated, and it is a patent requirement that conforms to novelty, advancement, and industrial applicability.

However, the above is only the preferred embodiment of the present invention. When it is not possible to limit the scope of the implementation of this creation, that is, the equivalent changes and modifications made by the applicant in accordance with the scope of the patent application and the content of the creation specification should still be It is within the scope of this creation patent.

1‧‧‧ Turbo Molecular Vacuum Pump

11‧‧‧Rotary axis

12‧‧‧Rotor

13‧‧‧Lock room

131‧‧‧ side wall

2‧‧‧Rotor cover

21‧‧‧ bolt

22‧‧‧Conduit

23‧‧‧Under the alcove

24‧‧ ‧ flat joint

25‧‧‧Extension

Claims (10)

The utility model relates to a rotor cover for a turbo molecular vacuum pump. A turbo shaft is arranged above a rotary shaft, a rotor is sleeved on the rotating shaft, a lock chamber is recessed in the center of the rotor, and a side wall is arranged around the lock chamber, and the center of the lock chamber is closed. The rotating shaft is fixed, and is characterized in that: a rotor cover for closing the locking chamber is arranged above the rotor, and a bolt bolted to the bottom side of the locking chamber extends downward from the center of the rotor cover. The rotor cover for a turbomolecular vacuum pump according to claim 1, wherein the rotor cover has a flat surface adjacent to the upper edge of the rotor, and the flat surface extends into the lock chamber. The extension section is adjacent to the side wall of the lock chamber. The rotor cover for a turbomolecular vacuum pump according to claim 2, wherein a ring groove is added around an extension of the rotor cover, and a side wall of the ring groove is closely fitted to the lock chamber. O-ring. The rotor cover for a turbomolecular vacuum pump according to claim 1, wherein the rotor cover has a circular arc-shaped flow guiding surface with a central height rising toward the periphery, and the bottom side of the rotor cover is increased. The recess has a recess for reducing the volume, and the center of the lower recess is further provided with the bolt screwed to the bottom side of the lock chamber. The rotor cover for a turbomolecular vacuum pump according to claim 1, wherein the rotor cover has a conical flow surface with a central portion rising downward toward the periphery, and the bottom side of the rotor cover is increased. The recess has a recess for reducing the volume, and the center of the lower recess is further provided with the bolt on the bottom side of the lock lock chamber. The rotor cover for a turbomolecular vacuum pump according to claim 1, wherein a lateral shallow groove is added around the rotor cover, and the rotor cover is exactly equiangularly distributed around the rotor cover. Two to four sides of the shallow groove. The utility model relates to a rotor cover for a turbomolecular vacuum pump, wherein a rotary shaft is arranged above the turbomolecular vacuum pump, a segment is protruded above the rotary shaft, a thread segment is arranged on the upper side of the segment, and an inner screw hole is recessed in the center of the thread segment. Then, a rotor is sleeved on the rotating shaft, and a lock chamber is recessed in the center of the rotor. The rotor has a segment hole in the center of the lock chamber for the thread segment of the segment to be inserted, and a lock chamber is placed in the lock chamber. The nut of the threaded section is locked, and a rotor cover of the closed lock chamber is arranged above the rotor, and a bolt of a screw hole in the center of the threaded section of the bottom side of the lock chamber extends downwardly from the center of the rotor cover. The rotor cover for a turbomolecular vacuum pump according to claim 7, wherein the rotor cover has a flat surface adjacent to the upper edge of the rotor, and the flat surface extends into the lock chamber. The extension section is adjacent to the side wall of the lock chamber. The rotor cover for a turbomolecular vacuum pump according to claim 8, wherein a ring groove is added around an extension of the rotor cover, and a side wall of the ring groove is closely fitted to the lock chamber. O-ring. The rotor cover for a turbomolecular vacuum pump according to claim 7, wherein the rotor cover has a centrally elevated and downwardly directed flow guiding surface, and the bottom side of the rotor cover is enlarged and recessed. The recess is reduced under the volume, and the bolt of the inner screw hole is further provided at the center of the lower recess.