TWM522948U - Magnetic carrying device for film coating - Google Patents

Description

Magnetic carrier for coating

The invention relates to a bearing device for coating, in particular to a magnetic bearing device for coating.

Referring to Figures 1 and 2, U.S. Patent No. 6,290,824, the disclosure of which is incorporated herein by reference. The continuous magnetic thin film coating system 1 has a plurality of process chambers 11 in an X direction, and has a transport chamber 12, an inlet chamber 13, and a carry-out chamber. An outlet chamber 14, a plurality of divider valves 15, a plurality of X-direction transport mechanisms 16, and a plurality of Y-direction transport mechanisms 17.

As shown in FIG. 1, the transfer cavity 12 extends in the X direction; the loading cavity 13 and the loading cavity 14 are respectively connected through two of the partition valves 15 to connect the valve 15 to The opposite ends 121 of the transfer chamber 12, and the process chambers 11 are passed through the remaining partition valve 15 to connect the transfer chamber 12. The X-direction transmission mechanisms 16 are respectively disposed in the loading cavity 13, the transmission cavity 12 and the loading cavity 14 to carry the carrier device 18 to move in the X direction, and the Y-direction transmission The mechanism 17 is disposed in the transmission cavity 12 to carry the carrier device 18 to reciprocate between the transfer cavity 12 and the process chambers 11 in a Y direction.

Referring to FIG. 2, when the carrier device 18 is in each process chamber 11, the tray device 18 is moved up and down in a Z direction through a tray carrying mechanism 111 in each processing chamber 11. Above a target 112 in each process chamber 11. Referring to Figures 3 and 4, the carrier device 18 has a pallet 181 and two permanent bar magnets 182 spaced from one another on the tray 181. A tray-shaped perforation 180 is provided at a center of the tray 181, and a substrate 19 for performing a coating process is disposed in the stepped perforation 180 of the tray 18 to be located between the permanent magnetic strips 182. . The carrier device 18 is permeable to the permanent magnetic strips 182 to provide the substrate 19 with a magnetic field B parallel to the planar direction of the substrate 19.

When the substrate 19 is subjected to the coating process, sputtering particles sputtered from the target 112 collide with each other and deposit on a surface of the substrate 19 facing the target 112; At the same time, the magnetic field B generated by the permanent magnetic strips 182 can align the sputtered particles in the direction of the magnetic field B, so that the arranged sputtered particles are deposited on the surface of the substrate 19 to form a magnetically oriented film. Oriented film, not shown). Further, when the tray device 18 provided with the substrate 19 is removed from the process chamber 11 via one of the Y-direction transport mechanisms 17, the magnetic alignment film deposited on the surface of the substrate 19 is still permeable before being completely cooled. The magnetic field B provided by the permanent magnetic strips 182 is such that the orientation of the magnetic alignment film is not disordered.

Although the magnetic field B provided by the chucking device 18 to the substrate 19 allows the orientation of the magnetically oriented film to remain prior to incomplete cooling. However, the contribution of the distribution of the magnetic field B to the order orientation of the magnetic alignment film is still limited.

As can be seen from the above description, improving the detailed structure of the magnetic bearing device for coating and further improving the magnetic field distribution is a problem to be solved by those skilled in the art.

Therefore, the object of the present invention is to provide a magnetic bearing device for coating.

Therefore, the novel magnetic bearing device for coating is used for carrying at least one object to be plated, which comprises a base, a magnetic conductive unit, and a magnetic unit. The base has a reference surface. The magnetic conductive unit is disposed on the reference surface of the base and has a plurality of protrusions spaced apart from each other along a first direction. The magnetic unit is disposed on the reference surface. In the present invention, a height of a top surface of each of the studs of the magnetic conductive unit is greater than a height of a top surface of the magnetic unit.

The function of the present invention is to introduce the magnetic conductive unit into the magnetic bearing device for coating, such that the magnetic conductive unit and the magnetic unit have a height difference, so that the height of the top surface of each of the protruding portions of the magnetic conductive unit is greater than the magnetic The top surface height of the cell, thereby eliminating the magnetic field of the vertical component of the total amount of magnetic field generated by the magnetic unit, and effectively contributing the magnetic field of the horizontal component.

As shown in FIG. 5 and FIG. 6, a first embodiment of the magnetic bearing device for coating of the present invention is used to carry a plurality of in-line sputtering systems (not shown). Plating 5. The first embodiment of the novel magnetic bearing device for coating includes a base 2, a magnetic guiding unit 3, and a magnetic unit 4.

The base 2 has a reference surface 21. In the first embodiment of the present invention, the reference surface 21 of the susceptor 2 is defined by a top surface 22 of the susceptor 2 as shown in FIG.

The magnetic conductive unit 3 is disposed on the reference surface 21 of the base 2, and has a plurality of protrusions 31 spaced apart from each other along a first direction x, and a base 32 located under the protrusions 31. Each of the studs 31 of the magnetic conductive unit 3 extends in a rib shape on the reference surface 21 along a second direction y substantially perpendicular to the first direction x. The base portion 32 of the magnetic conductive unit 3 has a setting area 321 for placing the waiting plate 5 between the innermost adjacent studs 31 of the studs 31.

The magnetic unit 4 is disposed on the reference surface 21; wherein, as shown in FIG. 6, a height of a top surface 311 of each of the protrusions 31 of the magnetic conductive unit 3 is greater than a top surface 41 of the magnetic unit 4. a height.

In the first embodiment of the present invention, the magnetic unit 4 has a pair of permanent magnetic ribs 42, which also have a surrounding wall 33. Further, more specifically, the magnetic conductive unit 3 and the magnetic unit 4 are disposed on the reference surface 21. As shown in FIG. 5 and FIG. 6 , the pair of permanent magnetic ribs 42 extend in the second direction y to be outside the two protrusions 31 respectively located at the outermost sides of the protrusions 31 , and the circumference of the magnetic conductive unit 3 A wall 33 surrounds the pair of permanent magnetic ribs 42 and the studs 31 and the base 32 of the magnetically permeable unit 3. Preferably, the protrusions 31, the base 32 and the surrounding wall 33 of the magnetic conductive unit 3 are made of a magnetic conductive material having a permeability (μ) of more than 500; the circumference of the magnetic conductive unit 3 A top surface of the wall 33 is higher than the top surface 311 of the studs 31. In the first embodiment of the present invention, the magnetic conductive unit 3 is described by taking the surrounding wall 33 as an example, but the present invention is not limited thereto.

Referring to FIG. 7 and FIG. 8, there is shown a magnetic line distribution diagram of the first embodiment of the present invention which is generated by the magnetic conductive unit 3 and the magnetic unit 4. It can be seen from the distribution of the red magnetic lines of force shown in FIG. 7 that the magnetic magnetic field 3 of the first embodiment of the present invention can provide the magnetic magnetic lines in a direction parallel to the reference surface 21 without the surrounding wall 33. The magnetic field of the horizontal component, but the red magnetic lines of force are more difficult to be enclosed around the studs 31 of the magnetically permeable unit 3, the base 32 and the periphery of the waiting plate 5. It can be seen from the distribution of the red magnetic lines of force shown in FIG. 8 that the magnetic conductive unit 3 of the first embodiment of the present invention can be made red by the surrounding wall 33 of the magnetic conductive unit 3 under the condition of having the surrounding wall 33. The magnetic lines of force are enclosed in the surrounding wall 33 as much as possible to prevent the magnetic field around the waiting plate 5 from interacting with the magnetic field of a cathode (not shown) in the coating chamber of the continuous sputtering system, thereby reducing the waiting The plating material 5 has a magnetic loss around the object to be plated 5 when a coating process is performed through the continuous sputtering system.

The magnetic flux density (G) versus distance (mm) curve obtained from the first embodiment of the present invention from Fig. 7 and Fig. 8 is shown in Fig. 9. It can be seen from FIG. 9 that when the magnetic conductive unit 3 of the first embodiment of the present invention does not have the surrounding wall 33, the magnetic flux density of the first embodiment perpendicular to the reference surface 21 at the setting area 321 The range (see dark red curve) is between -5 G and 12 G, and the range of magnetic flux density (see light blue curve) parallel to the reference surface 21 of the first embodiment at the setting area 321 is Between 12 G ~ 15 G. It is shown that the magnetic bearing device for coating of the present invention has the height of the top surface 311 of each of the protrusions 31 being greater than the height of the top surface 41 of the magnetic unit 4 after the introduction of the magnetic conductive unit 3, so that the horizontal magnetic field component is greater than the vertical direction. Magnetic field component. Referring to FIG. 9, when the magnetic conductive unit 3 of the first embodiment of the present invention has the surrounding wall 33, the magnetic flux density range of the first embodiment perpendicular to the reference surface 21 at the setting area 321 ( See dark blue curve) has decreased from -5 G ~ 12 G to -3 G ~ 10 G, and the magnetic flux density range of the first embodiment parallel to the reference surface 21 at the setting area 321 (see depth) The green curve is increased from 12 G to 15 G to 31 G to 33 G. It is confirmed that the first embodiment of the present invention makes the height of the top surface 311 of each of the pillars 31 of the magnetic conductive unit 3 larger than the height of the top surface 41 of the magnetic unit 4 and fits the surrounding wall 33, thereby reducing the magnetic perpendicular to the reference surface 21. The density of the flux and the contribution of the magnetic flux density parallel to the reference surface 21 are effectively prevented to prevent the charged particles sputtered from the target (not shown) from being affected by the magnetic field of the vertical component to generate a convolution.

Referring to FIG. 10, a second embodiment of the magnetic bearing device for coating of the present invention is substantially the same as the first embodiment, and is different in that the base 2, the magnetic conductive unit 3 and the magnetic unit 4 are Detailed structure. Further, the reference surface 21 of the susceptor 2 is also different from the first embodiment, and the magnetic permeable unit 3 does not have the surrounding wall 33 as shown in FIG.

Specifically, the base 2 has a closed chamber 20 and a top surface 22 located outside the closed chamber 20. In the second embodiment of the present invention, the reference surface 21 of the susceptor 2 is lower than the top surface 22 of the susceptor 2, and the magnetic conductive unit 3 and the magnetic unit 4 are based on the reference surface 21 An interface; the magnetic unit 3 and the magnetic unit 4 are disposed in the closed chamber 20 of the base 2, the magnetic conductive unit 3 is located on the reference surface 21, and the magnetic unit 4 is located at the reference The top surface 22 of the susceptor 2 has a setting area 221 for placing the waiting plating material 5.

In the second embodiment of the present invention, the number of permanent magnetic ribs 42 of the magnetic unit 4 is a plurality, and the permanent magnetic ribs 42 extend along the second direction y as shown in FIG. Under the studs 31 of the magnetic conductive unit 3.

Preferably, the adjacent pillars 31 of the magnetic conductive unit 3 have a first gap S ₁ , S _{1 is} between 0.5 cm and 5 cm; and the adjacent permanent magnetic ribs 42 of the magnetic unit 4 have a first The two gaps S ₂ , S _{2 are} between 0.5 cm and 5 cm; each of the protrusions 31 of the magnetic conductive unit 3 has a first width W ₁ along the first direction x, and W _{1 is} between 0.2 cm and 1 cm. Each of the permanent magnetic ribs 42 of the magnetic unit 4 has a second width W ₂ along the first direction x, and W _{2 is} between 0.5 cm and 2 cm.

It should be noted that the second embodiment of the present invention is the first gap S ₁ and the second gap S _{2 ,} and the protrusions 31 and the permanent magnetic ribs 42 of each of the permanent pillars 31 and the permanent magnetic ribs 42 . The first width W ₁ and the second width W ₂ adjust the magnetic field generated by the interaction between the magnetic conductive unit 3 and the magnetic unit 4. Referring to FIG. 10, when the first width W ₁ and the second width W _{2 are} too small, the parallel and vertical magnetic fields between the left and right sides of the second embodiment are uneven, so that the left and right sides are There is a large difference in the distribution of the magnetic field between the side and the center.

FIG. 11 is a view showing the distribution of magnetic lines of force generated by the magnetic conductive unit 3 and the magnetic unit 4 of the second embodiment of the present invention. The magnetic flux density (G) versus distance (mm) plot obtained from the second embodiment of the present invention from FIG. 11 is shown in FIG. As can be seen from FIG. 12, the magnetic flux density range (see deep red and light blue curves) perpendicular to the reference surface 21 taken from the center and the edge in the second direction y of the second embodiment tends to be Between -2 G ~ 2 G, the range of magnetic flux density parallel to the reference surface 21 obtained from the same two places (see dark blue and dark green curves) of the second embodiment is close to 32 G ~ 33 G. It can be confirmed from the analysis result shown in FIG. 12 that the second embodiment of the present invention has the permanent magnetic ribs 42 of the magnetic unit 4 disposed under the respective pillars 31 of the magnetic conductive unit 3 (that is, disposed on the reference surface). 21), the height of the top surface 311 of each of the studs 31 is greater than the height of the top surface 41 of the magnetic unit 4, the magnetic flux density perpendicular to the reference surface 21 can be eliminated and the magnetic parallel to the reference surface 21 can be effectively contributed. The pass density prevents the charged particles (not shown) from being affected by the magnetic field of the vertical component to produce a convolution. In addition, the second embodiment of the present invention is based on the magnetic conductive unit 3 and the magnetic unit 4 being disposed in the closed chamber 20 of the base 2, and having the setting on the top surface 22 of the base 2 Zone 221 is provided for the waiting plate 5 to be placed. Compared with the first embodiment, the second embodiment of the present invention provides a larger area of the setting area 221; therefore, the number of objects to be plated 5 placed in the setting area 221 can be increased, or the object to be plated 5 can be reduced. The quantity is changed to place a large area of the object to be plated 5 .

As is apparent from the detailed description of the above embodiments, in the structural improvement of the magnetic carrier device for coating film of the embodiments of the present invention, the difference in height between the magnetic conductive unit 3 and the magnetic unit 4 can effectively contribute the horizontal component. The magnetic field causes the charged particles sputtered from the target to be unaffected by the magnetic field of the vertical component, and is deposited on the surface of each of the objects to be plated 5 while being affected by the magnetic field of the horizontal component to form a magnetic orientation. film.

In summary, the magnetic bearing device of the present invention transmits the height difference between the magnetic conductive unit 3 and the magnetic unit 4 such that the height of the top surface 311 of each of the protruding pillars 31 of the magnetic conductive unit 3 is greater than that of the magnetic unit 4. The top surface 41 can eliminate the magnetic field of the vertical component to effectively contribute the magnetic field of the horizontal component. Therefore, the purpose of the present invention can be achieved.

However, the above is only a preferred embodiment of the present invention, and when it is not possible to limit the scope of the present invention, any simple equivalent changes and modifications made in accordance with the scope of the present patent application and the contents of the patent specification are It is still within the scope of this new patent.

2‧‧‧Base

20‧‧‧Closed room

21‧‧‧ reference plane

22‧‧‧ top surface

221‧‧‧Setting area

3‧‧‧Magnetic unit

31‧‧‧Bump

311‧‧‧ top surface

32‧‧‧ base

321‧‧‧Setting area

33‧‧‧

4‧‧‧Magnetic unit

41‧‧‧ top surface

42‧‧‧Permanent magnetic ribs

5‧‧‧The object to be plated

x‧‧‧First direction

Y‧‧‧second direction

S ₁ ‧‧‧First gap

S ₂ ‧‧‧Second gap

W ₁ ‧‧‧first width

W ₂ ‧‧‧second width

Other features and effects of the present invention will be apparent from the following description of the drawings, wherein: Figure 1 is a top view of a continuous magnetic thin film coating disclosed in U.S. Patent No. 6,290,824. Figure 2 is a cross-sectional view showing a carrier device disposed in a process chamber of the continuous magnetic thin film coating system; Figure 3 is a perspective view showing the carrier device and a device disposed on the carrier device Figure 4 is a cross-sectional view taken along line IV-IV of Figure 3, illustrating a detailed structure of the carrier device; Figure 5 is a plan view showing a magnetic carrier device for the novel coating film FIG. 6 is a cross-sectional view taken along line VI-VI of FIG. 5, illustrating a detailed structure of the first embodiment of the present invention; FIG. 7 is a magnetic line distribution diagram illustrating the first embodiment of the present invention. a magnetic field line distribution generated by a magnetic conductive unit and a magnetic unit without a surrounding wall; FIG. 8 is a magnetic line distribution diagram illustrating the first embodiment of the present invention having the surrounding wall The magnetic flux distribution generated by the magnetic conductive unit and the magnetic unit; FIG. 9 is a magnetic flux density (G) versus distance (mm) curve calculated from FIG. 7 and FIG. A magnetic flux density distribution parallel to a reference plane and perpendicular to the reference plane in a setting region of the first embodiment; FIG. 10 is an incomplete cross-sectional view illustrating a second magnetic carrier device for the novel coating film Embodiment 11 is a magnetic line distribution diagram illustrating the distribution of magnetic lines of force generated by a magnetic conductive unit and a magnetic unit of the second embodiment of the present invention; and FIG. 12 is a magnetic field calculated from FIG. The density (G) versus distance (mm) plot illustrates the magnetic flux density distribution parallel to a reference plane and perpendicular to the reference plane of the second embodiment of the present invention.

2‧‧‧Base

21‧‧‧ reference plane

22‧‧‧ top surface

3‧‧‧Magnetic unit

31‧‧‧Bump

311‧‧‧ top surface

32‧‧‧ base

321‧‧‧Setting area

33‧‧‧

4‧‧‧Magnetic unit

41‧‧‧ top surface

42‧‧‧Permanent magnetic ribs

5‧‧‧The object to be plated

x‧‧‧First direction

Claims (10)

A magnetic bearing device for coating is used for carrying at least one object to be plated, comprising: a base having a reference surface; a magnetic guiding unit disposed on the reference surface of the base and having a plurality of a pillar spaced apart from each other; and a magnetic unit disposed on the reference surface; wherein a height of a top surface of each of the pillars of the magnetic conductive unit is greater than a height of a top surface of the magnetic unit. The magnetic carrier device for coating according to claim 1, wherein the magnetic conductive unit further has a base under the protrusions. The magnetic bearing device for coating according to claim 2, wherein each of the protrusions has a rib shape on the reference surface extending in a second direction substantially perpendicular to the first direction. The magnetic bearing device for coating according to claim 3, wherein the reference surface is defined by a top surface of the base, and the magnetic conductive unit and the magnetic unit are disposed on the reference surface . The magnetic bearing device for coating according to claim 4, wherein the magnetic unit has a pair of permanent magnetic ribs extending in the second direction to be respectively located at the outermost sides of the protrusions Outside the two protrusions, the base of the magnetic conductive unit has a setting area for placing the object to be plated between the adjacent pillars of the innermost side of the protrusions. The magnetic bearing device for coating according to claim 5, wherein the magnetic conductive unit further has a surrounding wall surrounding the pair of permanent magnetic ribs and the protruding posts of the magnetic conductive unit and the base. The magnetic bearing device for coating according to claim 3, wherein the base has a closed chamber and a top surface located outside the closed chamber, the reference surface of the base being lower than the base The top surface, the magnetic unit and the magnetic unit are an interface with the reference surface, the magnetic unit and the magnetic unit are disposed in the closed chamber of the base, and the magnetic conductive unit is located at the reference And the magnetic unit is located under the reference surface, and the top surface of the base has a setting area for placing the object to be plated. The magnetic bearing device for coating according to claim 7, wherein the magnetic unit has a plurality of permanent magnetic ribs extending in the second direction to respectively correspond to the magnetically permeable unit. Under the convex column. The magnetic bearing device for coating according to claim 8, wherein the adjacent pillars of the magnetic conductive unit have a first gap S ₁ , and S _{1 is} between 0.5 cm and 5 cm; There is a second gap S ₂ between adjacent permanent magnetic ribs, and S _{2 is} between 0.5 cm and 5 cm. The magnetic bearing device for coating according to claim 8, wherein each of the protrusions of the magnetic conductive unit has a first width W ₁ in the first direction, and W _{1 is} between 0.2 cm and 1 cm; Each of the permanent magnetic ribs of the magnetic unit has a second width W ₂ in the first direction, and W _{2 is} between 0.5 cm and 2 cm.