TWM521259U - Cathode module - Google Patents

Abstract

A cathode module suited for an ion source is provided. The ion source includes a housing. The cathode module includes a cathode and a filament. The cathode assembled to a side of the housing has a containing cavity that the filament is received therein. The filament has a first arc portion, a second arc portion, and a third arc portion, wherein the first arc portion is connected between the second arc portion and the third arc portion. The second arc portion and the third arc portion are closed to each other and form a bottleneck at two opposite ends of the first arc portion.

Description

Cathode module

The present invention relates to a cathode module, and more particularly to a cathode module for an ion source.

Ion Implantation technology not only provides various semiconductor doping requirements, but because it can accurately control the doping content and distribution of dopants, ion implantation technology has become the most important blending process in semiconductor devices. Quality preset technology.

An ion implanter is a semiconductor processing device used to implement ion implantation techniques to direct energized, charged particles into a wafer. The ion source is one of the main parts of the ion implanter, which is used to generate ions. The basic principle of the ion source is to use a special gas to heat the gas molecules at a suitable low pressure. Ionization by impact, thus producing dopant ions that are required for ion implanters.

Further, the ion source utilizes a filament, such as a tungsten wire, which emits hot electrons to bombard a cathode to heat the cathode, causing the cathode to generate hot electrons and collide with the reaction gas in the ion source to generate electricity. Pulp.

However, with the long-time heating and the corrosive action caused by the highly reactive reaction gas or the dissociated ions, it is easy to cause breakage or breakage between the bottom of the cathode and the side wall, thereby causing the ion implanter to crash. It does not work, and therefore increases the frequency of ion source replacement and increases the cost of repairing the ion implanter.

The novel creation provides an ion source cathode module that improves the life of the cathode by changing the contour configuration of the filament.

The cathode module of the present invention is suitable for an ion source. The ion source includes a tank. The cathode module includes a cathode and a filament. The cathode is mounted on one side of the case and the cathode         The crucible has a receiving groove facing away from the box. The filament is disposed in the receiving groove. The filament has a first arcuate portion, a second arcuate portion and a third arcuate portion, wherein the first arcuate portion is coupled between the second arcuate portion and the third arcuate portion. The second curved portion and the third curved portion are close to each other to form a bottleneck at opposite ends of the first curved portion       

In an embodiment of the present invention, the inner diameter of the first curved portion is greater than or equal to the relative distance from the central inflection point of the second curved portion to the central inflection point of the third curved portion.

In an embodiment of the present invention, the inner diameter of the first curved portion is 6.6 mm, and the relative distance from the central inflection point of the second curved portion to the central inflection point of the third curved portion is 5.4mm.

In an embodiment of the present invention, the first curved portion, the second curved portion and the third curved portion are in the same plane, and the opening of the first curved portion is oriented opposite to the second curved portion. The opening faces and the opening of the third curved portion faces.

In an embodiment of the present invention, the cathode has a fillet structure in its receiving groove, surrounding the first curved portion, the second curved portion and the third curved portion.

In an embodiment of the present invention, the accommodating groove has a groove bottom and a groove wall, and the fillet structure is connected between the groove bottom and the groove wall.

In an embodiment of the novel creation, the above-mentioned fillet structure is an inner fillet.

In an embodiment of the present invention, the inner fillet has a radius of 3 mm.

In an embodiment of the present invention, the cathode module further includes a filament device member having two forceps arms respectively holding the two ends of the filament to make the first curved portion and the second curved portion. And the third curved portion extends into the receiving groove.

In an embodiment of the present invention, the cathode module further includes a fixing member mounted on one side of the casing, and the cathode is embedded in the fixing member.

In an embodiment of the present invention, the cathode further has at least one recessed groove, and the fixing member has at least one latching protrusion, and the cathode is inserted and fixed by the latching protrusion being engaged with the recessed groove. In the fixture.

In an embodiment of the present invention, the linear distance from the virtual center of the second curved portion to the virtual center of the third curved portion is 8 mm ± 1 mm.

Based on the above, in the above embodiment of the present invention, the filament disposed in the accommodating groove of the cathode is divided into a first curved portion, a second curved portion and a third curved portion, wherein the first curved portion is connected Between the second curved portion and the third curved portion, and more importantly, the contour of the filament in the arcuate portion is such that the second curved portion and the third curved portion are located toward the first curved portion. Focusing close, and forming a neck at the opposite ends of the first curved portion, that is, allowing the curved portion to be away from the sidewall of the cathode. In this way, not only the side wall of the cathode is protected from the direct bombardment of the hot electrons generated by the filament to have a long service life, but also the filament as the cathode heat source can generate a heat source due to the arrangement position of the curved portion. The concentrated effect further increases the plasma generation efficiency of the ion source.

The above described features and advantages of the present invention will become more apparent and understood from the following description.

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic illustration of an ion source in accordance with an embodiment of the present invention. Only a portion of the ion implanter is shown herein, and portions of the ion source are more clearly identified. 2 is an exploded view of the ion source of FIG. 1. Figure 3 is a schematic illustration of the filament of Figure 2, while providing a right angle coordinate system, while Figure 3 is a filament in the Y-Z plane. Referring to FIG. 1 to FIG. 3 simultaneously, in the embodiment, the ion source 100 of the ion implanter (not shown) includes a case 120, a gas generator 130 and a cathode module 110. The casing 120 is composed of, for example, a plurality of partitions, and the casing 120 has an internal space SP, an extraction hole 122 and a through hole 124, wherein the extraction hole 122 is located at the top of the casing 120, and the through hole 124 is located at the side of the casing 120. The gas generator 130 is assembled to the bottom of the tank 120 to inject the reaction gas gas into the internal space SP.

The cathode module 110 includes a cathode 114, a filament 112, a filament device member 111, and a fixture 113. The cathode 114 has a receiving groove 114a, which is opposite to the internal space SP of the casing 120 when the cathode 114 is mounted on the side of the casing 120. The cathode 114 of the present embodiment has a substantially cup structure for passing through the foregoing The through hole 124 is installed in the inner space SP of the casing 120, but the accommodating groove 114a is exposed to the outside of the casing 120.

As shown in FIG. 2, the cathode 114 is actually assembled to the case 120 by being embedded in the fixing member 113. Further, the cathode 114 has a recessed groove 114d, and the fixing member 113 has a latching projection 113a (only one of the latching projections on one side is shown here because of the viewing angle, but it can correspond to the number of the recessed grooves 114a and Therefore, it is not limited thereby, so that the cathode 114 can be pierced and fixed in the fixing member 113 by the structure of the latching portion 113a being engaged with the recessed groove 114d, and then the fixing member 113 can be combined by The case 120 allows the fixing member 113 and the cathode 114 to be coupled to the same side of the case 120. The filament device member 111 has two caliper arms 111a, 111b that are respectively clamped at opposite ends of the filament 112 to thereby allow the filament 112 to protrude into the accommodating groove 114a.

Accordingly, the filament 112 is disposed in a portion of the accommodating groove 114a for heating the cathode 114 and causing the cathode 114 to emit a plurality of hot electrons, and is injected into the internal space SP of the tank 120 with the gas generator 130. The gas interacts to generate a plurality of ions which are extracted out of the tank 120 via the extraction holes 12a.

As shown in FIG. 3, the filament 112 has a first curved portion C1, a second curved portion C2 and a third curved portion C3, wherein the first curved portion C1 is connected to the second curved portion C2 and the third curved portion. The portion C3 is located in the YZ plane, and the first arc is formed because the opening of the first curved portion C1 faces the opening with respect to the second curved portion C2 toward the opening of the third curved portion C3. The portion C1, the second curved portion C2 and the third curved portion C3 form a horseshoe-like in-plane structure.

It should be noted that, in this embodiment, as shown in FIG. 3, the first curved portion C1, the second curved portion C2, and the third curved portion C3 each have corresponding virtual centers A1, A2, and A3, and The second curved portion C2 and the third curved portion C3 are close to each other to form a neck at the opposite ends of the first curved portion C1, and thus the first curved portion C1 is in an "inverted" "Ω" shape. The linear distance between the virtual center A2 of the second curved portion C2 and the virtual center A3 of the third curved portion C3 is 8 mm ± 1 mm.

Further, the inner diameter of the first curved portion C1 may be greater than or equal to the relative distance from the central inflection point T1 of the second curved portion C2 to the central inflection point T2 of the third curved portion C3. It should be noted here that the central inflection point refers to the inflection point at the center of the arc length of the curved portion. For example, here, with reference to the straight line Z1 of the parallel Z axis, the inner diameter of the first curved portion C1 corresponds to the relative distance between the inflection points T3 and T4, that is, it is orthographically projected to the straight line Z2. The projection length L2 produced on it. On the other hand, the relative inversion of the central inflection point T1 of the second curved portion C2 to the straight line Z1 and the central inflection point T2 of the third curved portion C3 to the straight line Z1 is the projected length L1 as shown. . According to this, the projection length L2 ≧ projection length L1, and in the present embodiment, the inner dimension of the first curved portion C1 (ie, the projection length L2) is 6.6 mm, and the central inflection point T1 of the second curved portion C2 The relative distance (i.e., projection length L1) to the central inflection point T2 of the third curved portion C3 is 5.4 mm.

4 is a cross-sectional view of the cathode of FIG. 2, based on the X-Y plane. Referring to FIG. 2 to FIG. 4 simultaneously, in the embodiment, the cathode 114 further has a fillet structure R1 located in the receiving groove 114a.         When the filament 112 is clamped by the two caliper arms 111a, 111b of the filament device 111, the first curved portion C1, the second curved portion C2 and the third curved portion C3 are extended into the accommodating groove 114a. The first curved portion C1, the second curved portion C2 and the third curved portion C3 are surrounded by the fillet structure R1. Further, the cathode 114 has a groove bottom 114b and a groove wall 114c, and the fillet structure R1 is substantially connected between the groove bottom 114b and the groove wall 114c. Here, the first curved portion C1, the second curved portion C2, and the third curved portion C3 are filled with the corner structure R         The surrounding configuration of 31 is such that the thickness of the groove wall 114c can be increased by the fillet structure R1 to resist the filament 114 at the first curved portion C1, the second curved portion C2 and the third curved portion C3. The structural impact on the cathode 114 due to heating and corrosion. Here, the fillet structure R1 of the present embodiment is substantially semi-rounded and has a radius of 3 mm.       

In summary, in the above embodiment of the novel creation, the cathode module affects its arrangement in the cathode by changing the contour of the filament, and the cathode is matched with the fillet structure in the curved portion of the filament, thereby being reduced. The temperature and corrosion shock generated by the cathode due to the heating of the filament, and thus the life of the cathode 1.4 times.

Further, in the filament structure, the second curved portion and the third curved portion are concentrated toward the position of the first curved portion, and a bottleneck is formed at opposite ends of the first curved portion, thereby being far away The groove wall of the cathode, which not only allows the side wall of the cathode to be subjected to direct bombardment by the hot electrons generated by the filament to have a long service life, but also allows the filament as the cathode heat source to be disposed due to the arc portion The effect of heat source concentration is generated, thereby increasing the plasma generation efficiency of the ion source.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the novel creation, and any person skilled in the art can make some changes without departing from the spirit and scope of the novel creation. Retouching, the scope of protection of this new creation is subject to the definition of the scope of the patent application attached.

100‧‧‧Ion source
110‧‧‧ Cathode Module
111‧‧‧Film device
111a, 111b‧‧‧ clamp arm
112‧‧‧filament
113‧‧‧Fixed parts
113a‧‧‧Carmen convex
114‧‧‧ cathode
114a‧‧‧ accommodating slots
114b‧‧‧ bottom
114c‧‧‧ slot wall
114d‧‧‧ slotted
120‧‧‧ cabinet
122‧‧‧ extraction holes
124‧‧‧through holes
130‧‧‧ gas generator
A1, A2, A3‧‧‧ Virtual Center
C1‧‧‧First curved part
C2‧‧‧Second curved part
C3‧‧‧ Third curved part
L1, L2‧‧‧ projection length
R1‧‧‧ fillet structure
SP‧‧‧Internal space
T1, T2‧‧‧ Central recurve points
T3, T4‧‧‧ recurve points
Z1‧‧‧ Straight line
Gas‧‧‧reaction gas
XYZ‧‧‧right angle coordinates

1 is a schematic illustration of an ion source in accordance with an embodiment of the present invention. 2 is an exploded view of the ion source of FIG. 1. Figure 3 is a schematic illustration of the filament of Figure 2. Figure 4 is a cross-sectional view of the cathode of Figure 2 .

112‧‧‧filament

A1, A2, A3‧‧‧ Virtual Center

C1‧‧‧First curved part

C2‧‧‧Second curved part

C3‧‧‧ Third curved part

L1, L2‧‧‧ projection length

T1, T2‧‧‧ Central recurve points

T3, T4‧‧‧ recurve points

Z1‧‧‧ Straight line

X-Y-Z‧‧‧right angle coordinates

Claims (12)

A cathode module is suitable for an ion source, the ion source comprises a box, the cathode module comprises: a cathode mounted on one side of the box, the cathode having a receiving groove facing away from the box And a filament disposed in the accommodating groove, the filament having a first curved portion, a second curved portion and a third curved portion, the first curved portion being connected to the second arc Between the shape and the third curved portion, wherein the second curved portion and the third curved portion are close to each other to form a bottle neck at opposite ends of the first curved portion. The cathode module of claim 1, wherein an inner diameter of the first curved portion is greater than or equal to a central inflection point of the second curved portion to another of the third curved portion. The relative distance of the central recurve. The cathode module of claim 2, wherein the first curved portion has an inner diameter of 6.6 mm, and the central curved point of the second curved portion is opposite to the central portion of the third curved portion. The relative distance of the curved points is 5.4 mm. The cathode module of claim 1, wherein the first curved portion, the second curved portion and the third curved portion are in the same plane, and the opening of the first curved portion is opposite The opening of the second curved portion faces the opening of the third curved portion. The cathode module of claim 4, wherein the cathode has a fillet structure in the accommodating groove, surrounding the first curved portion, the second curved portion and the third curved portion unit. The cathode module of claim 5, wherein the accommodating groove has a groove bottom and a groove wall, and the fill structure is connected between the groove bottom and the groove wall. The cathode module of claim 5, wherein the fillet structure is an inner fillet. The cathode module of claim 7, wherein the radius of the fillet is 3 mm. The cathode module of claim 1, further comprising: a filament device member having two forceps arms respectively clamping the two ends of the filament to make the first curved portion and the second arc The shape and the third curved portion protrude into the receiving groove. The cathode module of claim 1, further comprising: a fixing member mounted on the side of the casing, the cathode being embedded in the fixing member. The cathode module of claim 9, wherein the cathode further has at least one recessed groove, and the fixing member has at least one latching protrusion, and the latching protrusion is engaged with the recessed groove. The cathode is passed through and fixed in the fixing member. The cathode module of claim 1, wherein a linear distance from a virtual center of the second curved portion to a virtual center of the third curved portion is 8 mm ± 1 mm.