TWM520975U - Mechanical arm - Google Patents

Mechanical arm Download PDF

Info

Publication number
TWM520975U
TWM520975U TW105202284U TW105202284U TWM520975U TW M520975 U TWM520975 U TW M520975U TW 105202284 U TW105202284 U TW 105202284U TW 105202284 U TW105202284 U TW 105202284U TW M520975 U TWM520975 U TW M520975U
Authority
TW
Taiwan
Prior art keywords
robot arm
channel
loop
double
cover sheet
Prior art date
Application number
TW105202284U
Other languages
Chinese (zh)
Inventor
Zeng-Hong Peng
Original Assignee
Advance Prec Industry Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advance Prec Industry Corp filed Critical Advance Prec Industry Corp
Priority to TW105202284U priority Critical patent/TWM520975U/en
Publication of TWM520975U publication Critical patent/TWM520975U/en

Links

Description

機械手臂Mechanical arm

本創作是有關一種機械手臂,尤指一種能夠真空吸附並搬動工件的機械手臂。This creation is about a robotic arm, especially a robotic arm that can vacuum absorb and move a workpiece.

隨著科技日新月異,各種晶圓片大量應用在許多電子產品中,由於晶圓片之生產與製作屬於極為精密之加工技術,因此通常需藉助各種特殊功能之機械手臂來進行運輸傳遞等作業。一般晶圓片製造的過程中,需仰賴由前端完全平整之真空機械手臂(robot blade)進行吸取以搬運傳輸。With the rapid development of technology, a variety of wafers are widely used in many electronic products. Since the production and fabrication of wafers are extremely precise processing techniques, it is usually necessary to carry out transportation and transportation operations by using robots with various special functions. In the process of wafer manufacturing, it is necessary to rely on a robot blade that is completely flattened at the front end for suction to transport.

現有的真空機械手臂因使用之需求,會在其上設有氣槽,且氣槽一端與通氣管連通,藉此使機械手臂前端形成負壓,以便吸取晶片或其他適合的工件。氣槽的另一端(即底面)則必須要蓋設一鋁板,密封所述氣槽,以利通過氣槽吸附晶片。現有固定所述鋁板的方式通常施以液態膠或環氧樹脂(AB膠)再密封所述氣槽。然而上述液態膠或AB膠固化須等待較長的時間(通常為24小時),故無法立即使用機械手臂。此外,若施以上述液態膠或AB膠的過程中,很容易造成塗佈不平整而造成漏氣的現象,因此使機械手臂無法穩定地吸取晶片或工件,導致吸附效果不佳。The existing vacuum robot arm is provided with a gas groove on the one hand, and one end of the gas groove is connected with the vent pipe, thereby forming a negative pressure on the front end of the robot arm to suck up the wafer or other suitable workpiece. The other end of the gas tank (ie, the bottom surface) must be covered with an aluminum plate to seal the gas tank to facilitate the adsorption of the wafer through the gas tank. Existing methods for fixing the aluminum plate are usually applied with liquid glue or epoxy resin (AB glue) to reseal the gas tank. However, the above liquid glue or AB glue has to wait for a long time (usually 24 hours), so the robot arm cannot be used immediately. In addition, in the process of applying the above liquid glue or AB glue, it is easy to cause unevenness in coating and gas leakage, so that the robot arm cannot stably suck the wafer or the workpiece, resulting in poor adsorption effect.

有鑑於此,本創作人遂針對上述現有技術,特潛心研究並配合學理的運用,盡力解決上述之問題點,即成為本創作人改良之目標。In view of this, the creator has made great efforts to solve the above problems by focusing on the above-mentioned prior art, and has devoted himself to the application of the theory, that is, the goal of the creator's improvement.

本創作目的之一,在於提供一種能夠立即使用,密封效果佳且不易漏氣,進而達到穩固吸附並搬動工件的機械手臂。One of the purposes of this creation is to provide a robotic arm that can be used immediately, has a good sealing effect, and is not easy to leak, thereby achieving stable adsorption and moving the workpiece.

為達上述目的,本創作提供一種機械手臂包括一板體以及一蓋片。板體包含相對應設置的一第一表面及一第二表面,第一表面還設有一槽道。蓋片遮蓋且密封槽道,其中蓋片與槽道之間還設有一耐熱膠。To achieve the above object, the present invention provides a mechanical arm including a plate body and a cover sheet. The plate body comprises a first surface and a second surface correspondingly disposed, and the first surface is further provided with a channel. The cover sheet covers and seals the channel, and a heat resistant glue is further disposed between the cover sheet and the channel.

較佳地,槽道還包含一第一環圈及一第二環圈。Preferably, the channel further comprises a first loop and a second loop.

較佳地,第一環圈的尺寸大於該第二環圈的尺寸。Preferably, the size of the first loop is larger than the size of the second loop.

較佳地,第一環圈與該第二環圈之間更設有一平台。Preferably, a platform is further disposed between the first loop and the second loop.

較佳地,耐熱膠設置於該蓋片與該平台之間。Preferably, a heat resistant glue is disposed between the cover sheet and the platform.

較佳地,第二表面相對該槽道還設有至少一吸孔。Preferably, the second surface is further provided with at least one suction hole relative to the channel.

較佳地,板體的材質為金屬或陶瓷。Preferably, the material of the plate body is metal or ceramic.

較佳地,板體或該蓋片的材質為鋁材或不鏽鋼。Preferably, the plate body or the cover sheet is made of aluminum or stainless steel.

較佳地,耐熱膠為一雙面PVC膠帶、雙面PE膠帶、雙面PET膠帶或雙面矽樹脂膠帶。Preferably, the heat resistant adhesive is a double-sided PVC tape, a double-sided PE tape, a double-sided PET tape or a double-sided silicone tape.

較佳地,槽道形狀為橢圓形、矩形或不規則形狀。Preferably, the channel shape is elliptical, rectangular or irregular.

有關本創作之詳細說明及技術內容,配合圖式說明如下,然而所附圖式僅提供參考與說明用,並非用來對本創作加以限制者。The detailed description and technical content of the present invention are described below with reference to the drawings, but the drawings are only for reference and explanation, and are not intended to limit the creation.

如圖1至圖3所示,本創作提供一種機械手臂包括一板體100以及一蓋片200。如圖所示,板體100的外型輪廓較佳為一矩形,然而其他不同的實施例中,亦可為方形、圓形、菱形,甚至為不規則的形狀,並不限制。As shown in FIGS. 1 to 3, the present invention provides a mechanical arm including a plate body 100 and a cover sheet 200. As shown, the outline of the plate body 100 is preferably a rectangle. However, in other different embodiments, it may be a square, a circle, a diamond, or even an irregular shape, and is not limited.

板體100包含相對應設置的一第一表面110及一第二表面120,第一表面110還設有一槽道150。如圖所示的槽道150形狀包含但不限於橢圓形、矩形、不規則,甚至是特殊形狀,並不限定。蓋片200遮蓋且密封槽道150,其中蓋片200與槽道150之間還設有一耐熱膠170,以加強定位蓋片200及密封槽道150的效果。The board body 100 includes a first surface 110 and a second surface 120. The first surface 110 is further provided with a channel 150. The shape of the channel 150 as shown includes, but is not limited to, an ellipse, a rectangle, an irregular, or even a special shape, and is not limited. The cover sheet 200 covers and seals the channel 150. A heat-resistant adhesive 170 is further disposed between the cover sheet 200 and the channel 150 to enhance the effect of positioning the cover sheet 200 and sealing the channel 150.

在圖1及圖3所示的實施例中,槽道150還包含一第一環圈152及一第二環圈154。第一環圈152的尺寸大於第二環圈154的尺寸,其中第一環圈152與第二環圈154之間更設有一平台156,因此耐熱膠170能夠設置於蓋片200與平台156之間。In the embodiment shown in FIGS. 1 and 3, the channel 150 further includes a first loop 152 and a second loop 154. The size of the first ring 152 is larger than the size of the second ring 154. A platform 156 is further disposed between the first ring 152 and the second ring 154. Therefore, the heat resistant adhesive 170 can be disposed on the cover sheet 200 and the platform 156. between.

當蓋片200設置於槽道150的平台156時,蓋片200的表面較佳是與第一表面110齊平,以預防刮傷工件或達到其他目的。When the cover sheet 200 is disposed on the platform 156 of the channel 150, the surface of the cover sheet 200 is preferably flush with the first surface 110 to prevent scratching of the workpiece or for other purposes.

進一步地,本實施例的耐熱膠170較佳為一雙面PVC膠帶、雙面PE膠帶、雙面PET膠帶、雙面矽樹脂(Silicone)膠帶或其他適合的雙面膠,用以分別貼附蓋片200及平台156之間,使本創作板體100能夠快速使用。Further, the heat resistant adhesive 170 of the embodiment is preferably a double-sided PVC tape, a double-sided PE tape, a double-sided PET tape, a double-sided silicone resin (Silicone) tape or other suitable double-sided tape for attaching separately. Between the cover sheet 200 and the platform 156, the present board 100 can be quickly used.

此外,第二表面120相對槽道150還設有至少一吸孔130。在如圖1所示的實施例中,吸孔130較佳有三個,然而在其他不同的實施例中,吸孔130的數量可視需要而改變,並不限定。再者,上述其一的吸孔130更可連接一通氣管(圖略),並藉由剩餘的吸孔130作為吸附晶片、工件或工作物(圖略)之用。然而在其他不同的實施例中,通氣管(圖略)亦可連接於槽道150內壁的任一側,以透過吸孔130吸附晶片、工件或工作物(圖略),視需要而改變。In addition, the second surface 120 is further provided with at least one suction hole 130 opposite to the channel 150. In the embodiment shown in FIG. 1, the number of the suction holes 130 is preferably three. However, in other different embodiments, the number of the suction holes 130 may be changed as needed, and is not limited. Furthermore, the suction hole 130 of the above one can be connected to a vent pipe (not shown), and the remaining suction hole 130 can be used as an adsorption wafer, a workpiece or a workpiece (not shown). However, in other different embodiments, the vent tube (not shown) may be attached to either side of the inner wall of the channel 150 to adsorb the wafer, the workpiece or the workpiece through the suction hole 130 (not shown), and may be changed as needed. .

為了使板體100形成負壓的狀態,須將貼附有耐熱膠170的蓋片200或平台156遮蓋並密封槽道150。經由風源(圖略)連接通氣管進行抽真空,使板體100的槽道150形成負壓,並對晶片/工件或其他適合工作物(圖略)進行吸附。此時,即可將主要為板體100的機械手臂搬動晶片/工件或其他適合工作物到待加工區或其他適合的區域。In order to form the plate body 100 in a negative pressure state, the cover sheet 200 or the platform 156 to which the heat-resistant glue 170 is attached is required to cover and seal the channel 150. The vent pipe is connected via a wind source (not shown) to evacuate, so that the channel 150 of the plate body 100 is under negative pressure, and the wafer/workpiece or other suitable workpiece (not shown) is adsorbed. At this point, the robotic arm, which is primarily the plate body 100, can be moved to the wafer/workpiece or other suitable work to the area to be processed or other suitable area.

在此必須說明的是,板體100的材質較佳為金屬或陶瓷。在金屬的材質中,板體100或蓋片200的材質亦可選自鋁材、不鏽鋼或其他適合的材質。It must be noted here that the material of the plate body 100 is preferably metal or ceramic. In the material of the metal, the material of the plate body 100 or the cover sheet 200 may also be selected from aluminum, stainless steel or other suitable materials.

因此本創作透過貼附耐熱膠170使成板體100的機械手臂能夠立即使用,且同時具有密封效果佳、不易漏氣,進而達到穩固吸附並搬動工件的優點。Therefore, the present invention enables the robot arm of the plate body 100 to be used immediately by attaching the heat-resistant glue 170, and at the same time has the advantages of good sealing effect and low air leakage, thereby achieving stable adsorption and moving the workpiece.

綜上所述,本文於此所揭示的實施例應被視為用以說明本創作,而非用以限制本創作。本創作的範圍應由後附申請專利範圍所界定,並涵蓋其合法均等物,並不限於先前的描述。In summary, the embodiments disclosed herein are to be considered as illustrative of the present invention and are not intended to limit the present invention. The scope of this creation is defined by the scope of the appended patent application and covers its legal equivalents and is not limited to the foregoing description.

100‧‧‧板體100‧‧‧ board

110‧‧‧第一表面110‧‧‧ first surface

120‧‧‧第二表面120‧‧‧second surface

130‧‧‧吸孔130‧‧ ‧ suction hole

150‧‧‧槽道150‧‧‧ channel

152‧‧‧第一環圈152‧‧‧ first ring

154‧‧‧第二環圈154‧‧‧second ring

156‧‧‧平台156‧‧‧ platform

170‧‧‧耐熱膠170‧‧‧Heat resistant adhesive

200‧‧‧蓋片200‧‧‧ coverslips

圖1為繪示本創作機械手臂的分解示意圖。FIG. 1 is an exploded perspective view showing the robot arm of the present invention.

圖2為繪示本創作機械手臂的立體示意圖。2 is a perspective view showing the robot arm of the present invention.

圖3為繪示本創作機械手臂的部分剖視圖。3 is a partial cross-sectional view showing the robot arm of the present invention.

100‧‧‧板體 100‧‧‧ board

110‧‧‧第一表面 110‧‧‧ first surface

120‧‧‧第二表面 120‧‧‧second surface

130‧‧‧吸孔 130‧‧ ‧ suction hole

150‧‧‧槽道 150‧‧‧ channel

152‧‧‧第一環圈 152‧‧‧ first ring

154‧‧‧第二環圈 154‧‧‧second ring

156‧‧‧平台 156‧‧‧ platform

170‧‧‧耐熱膠 170‧‧‧Heat resistant adhesive

200‧‧‧蓋片 200‧‧‧ coverslips

Claims (10)

一種機械手臂,包括: 一板體,包含相對應設置的一第一表面及一第二表面,該第一表面還設有一槽道;以及 一蓋片,遮蓋且密封該槽道,其中該蓋片與該槽道之間還設有一耐熱膠。A mechanical arm includes: a plate body including a first surface and a second surface correspondingly disposed, the first surface further having a channel; and a cover sheet covering and sealing the channel, wherein the cover A heat resistant glue is also disposed between the sheet and the channel. 如請求項1所述的機械手臂,其中該槽道還包含一第一環圈及一第二環圈。The robot arm of claim 1, wherein the channel further comprises a first loop and a second loop. 如請求項2所述的機械手臂,其中該第一環圈的尺寸大於該第二環圈的尺寸。The robot arm of claim 2, wherein the size of the first loop is greater than the size of the second loop. 如請求項2所述的機械手臂,其中該第一環圈與該第二環圈之間更設有一平台。The robot arm of claim 2, wherein a platform is further disposed between the first loop and the second loop. 如請求項4所述的機械手臂,其中該耐熱膠設置於該蓋片與該平台之間。The robot arm of claim 4, wherein the heat resistant glue is disposed between the cover sheet and the platform. 如請求項1所述的機械手臂,其中該第二表面相對該槽道還設有至少一吸孔。The robot arm of claim 1, wherein the second surface is further provided with at least one suction hole relative to the channel. 如請求項1所述的機械手臂,其中該板體的材質為金屬或陶瓷。The robot arm of claim 1, wherein the plate body is made of metal or ceramic. 如請求項7所述的機械手臂,其中該板體或該蓋片的材質為鋁材或不鏽鋼。The robot arm of claim 7, wherein the plate body or the cover sheet is made of aluminum or stainless steel. 如請求項1所述的機械手臂,其中該耐熱膠為一雙面PVC膠帶、雙面PE膠帶、雙面PET膠帶或雙面矽樹脂膠帶。The robot arm of claim 1, wherein the heat resistant adhesive is a double-sided PVC tape, a double-sided PE tape, a double-sided PET tape or a double-sided silicone tape. 如請求項1所述的機械手臂,其中該槽道形狀為橢圓形、矩形或不規則形狀。The robot arm of claim 1, wherein the channel shape is elliptical, rectangular or irregular.
TW105202284U 2016-02-17 2016-02-17 Mechanical arm TWM520975U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW105202284U TWM520975U (en) 2016-02-17 2016-02-17 Mechanical arm

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW105202284U TWM520975U (en) 2016-02-17 2016-02-17 Mechanical arm

Publications (1)

Publication Number Publication Date
TWM520975U true TWM520975U (en) 2016-05-01

Family

ID=56509602

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105202284U TWM520975U (en) 2016-02-17 2016-02-17 Mechanical arm

Country Status (1)

Country Link
TW (1) TWM520975U (en)

Similar Documents

Publication Publication Date Title
TWI524012B (en) Sucker
JP7121707B2 (en) Gripping tools and gripping systems
JP5512052B2 (en) Non-contact suction board
US10875196B2 (en) Gripping device and industrial robot
US9656368B2 (en) Device for gripping substrate without contact
KR102043656B1 (en) Transfer device for plate-like member, and suction pad
KR20060044853A (en) Sucking unit
JP2014534612A5 (en)
US11298833B2 (en) Gripper, grasping device, and industrial robot
TWM496228U (en) Wafer tray structure
TWI779072B (en) Pellicle film element, photomask with pellicle film element attached, exposure method, semiconductor manufacturing method, and display manufacturing method
TWM520975U (en) Mechanical arm
CN106011788B (en) A kind of apparatus for removing foreign material
JP2002184835A (en) Suction pad
TWM522935U (en) High efficiency suction device
US20150068556A1 (en) Device for the removal of a covering from a substrate and a method pertaining thereto
JPH04159043A (en) Vacuum chuck
TWI529850B (en) Dust proof structure for substrate sucker
CN104495377A (en) Vacuum box body adsorption device
TW201336009A (en) Substrate plate
CN206277033U (en) A kind of vacuum storehouse of Laser Processing
CN216736444U (en) Suction nozzle structure
CN215847716U (en) Vacuum adsorption platform
CN213320195U (en) Sponge type suction tool adaptable to cargo size
WO2021001676A1 (en) Vacuum structure of workbench of coating machine

Legal Events

Date Code Title Description
MM4K Annulment or lapse of a utility model due to non-payment of fees