TWM519810U - Clamp jaw structure for wafer cassette temporary storage platform - Google Patents

Description

Crystal boat box temporary storage platform jaw structure

The utility model provides a clamping structure for a wafer boat temporary storage platform, in particular to a clamping structure of a wafer boat temporary storage platform which is simple and quick in clamping action, strong in clamping force and stable in moving process.

According to the wafer, the wafer must be in a clean and clean room environment during the manufacturing process. To ensure the safe handling process, the wafer is generally mounted in a container, which is known as the wafer boat box.

The boat box can be transported by the OHT (Overhead Hoist Transfer) driven by a monorail train by means of a dust-free room on a rail on the ceiling, and then unloaded on each temporary storage platform, and then transferred by a temporary platform. The boat box is transferred to the boat cassette transfer machine, and during the transportation process, in order to avoid wafer vibration damage, the transport speed is slow, and the time for unloading and loading the boat box is increased.

The above-mentioned gripper for transporting the boat box can be divided into three types: one, the fixed jaw, which causes the jaw to vertically descend and horizontally move to the top surface of the boat box, so that the fixed jaw is lifted. Second, the horizontal pneumatic jaws, so that the jaws are vertically lowered to the height of the top surface of the boat box, so that the jaws respectively protrude from the left and right sides to clamp the wafer cassette; Third, the rotary jaw After the jaws are moved to the appropriate height above the boat box, the motor is used to drive the jaws to rotate to fix the boat box. One of the above three handling methods is used to transport the boat to the processing machine.

However, when the above-mentioned gripper carrying the wafer cassette is used, the following problems and defects are indeed to be improved:

1. The fixed jaw moves in a complicated path and cannot be accurately positioned.

Second, the horizontal pneumatic gripper and the rotary jaw have a relatively unstable clamping force, and a large force is required to securely grip the wafer cassette.

Therefore, how to solve the above problems and deficiencies in the past, that is, the applicants of the new type and the relevant manufacturers engaged in this industry are eager to study the direction of improvement.

Therefore, in view of the above-mentioned shortcomings, the applicants of this new type have collected relevant information, and through multi-party evaluation and consideration, and through years of experience in the industry, through continuous trial and modification, the design of this clamping action is simple and fast. A new patent holder for the clamping jaw structure of the wafer boat box with strong gripping force and stable moving process.

The main purpose of the present invention is to use a clamping member that swings by the principle of the lever to simplify the clamping action, improve the working efficiency, and use the torque to increase the clamping force and increase the stability of the wafer when moving.

In order to achieve the above object, the main structure of the present invention comprises: a plurality of clamping mechanisms, wherein each of the clamping mechanisms comprises a clamping member, and the clamping member comprises a movable arm and a one end disposed on the movable arm Positioning a hook, and pivoting a drive arm away from the positioning hook to drive the clamping device in a telescopic manner, and then placing a pivot between the positioning hook and the driving device on the movable arm The rotating member is configured to swing the clamping member with the pivoting member as an axis; when the user applies the novel to the carrying jaw of the boat, the clamping mechanism is moved to the top side of the boat box. Then, the movable arm is moved by the driving device, so that the clamping member swings with the pivoting member as the axis, and the positioning hook is fixed to fix the boat box, so that the clamping action can be completed simply and quickly. In the above process, the force of the driving device telescopically acts, using the movable arm as the moment and the pivoting member as the axis, so that the power multiple of the driving device is transmitted to the positioning hook, thereby only applying a small force. A stable grip can be achieved.

With the above-mentioned technology, it is possible to break through the problems such as the complicated moving path of the gripper carrying the wafer boat box, the inability to accurately position, the unstable clamping force, and the use of a large force to accurately grasp the wafer box. To achieve the practical advancement of the above advantages.

1‧‧‧ jaw structure

11‧‧‧Clamping mechanism

12‧‧‧ Carrying parts

121‧‧‧ pivot seat

2, 2a‧‧‧ clamping parts

21‧‧‧ movable arm

22, 22a‧‧‧ positioning hook

23a‧‧‧Positioning convex

3‧‧‧ drive

31‧‧‧Power components

32‧‧‧ Telescopic rod

321‧‧‧Docking Department

4‧‧‧ pivoting parts

5, 5a‧‧‧Sailboat Box

51a‧‧‧ Robotic Arm Grab

The first figure is a perspective view of a preferred embodiment of the present invention.

The second drawing is an exploded view of the preferred embodiment of the present invention.

The third view is a side perspective view of the preferred embodiment of the present invention.

The fourth figure is a schematic diagram of the action of the preferred embodiment of the present invention (1).

The fifth figure is a schematic diagram of the action of the preferred embodiment of the present invention (2).

Figure 6 is a diagram showing the state of use of another embodiment of the present invention.

In order to achieve the above objects and effects, the technical means and structure adopted by the present invention are described in detail in the preferred embodiment of the present invention, and the features and functions thereof are as follows.

Please refer to the first, second and third figures, which are perspective perspective views, exploded views and side perspective views of the preferred embodiment of the present invention. The jaw structure 1 of the present invention can be clearly seen from the drawings. The clamping mechanism 11 includes a clamping member 2, and the clamping member 2 includes a movable arm 21 and a positioning hook 22 disposed at one end of the movable arm 21. a driving device 3 pivotally driven from the end of the movable arm 21 away from the positioning hook 22 and driving the clamping member 2 in a telescopic manner, the driving device 3 comprising a power component 31 and a connecting power component And a telescopic rod 32 pivotally disposed on the movable arm 21, and the telescopic rod 32 has an abutting portion 321 cooperated with the movable arm 21, and the power component 31 is a cylinder; and the movable arm is disposed on the movable arm The pivoting member 4 between the positioning hook 22 and the driving device 3 is configured to swing the clamping member 2 with the pivoting member 4 as an axis; and at least one carrier member 12 for supporting and supporting the pivoting member The driving device 3 has a plurality of pivoting seats 121 for pivoting the pivoting member 4.

According to the above description, the structure of the present technology can be understood, and according to the corresponding cooperation of the structure, the clamping action can be simple and fast, the clamping force is strong, and the moving process is stable, and the detailed explanation will be The following instructions.

Please refer to the first to fifth figures at the same time, which are a perspective view, an exploded view, a side perspective view, a schematic view (1) and an action schematic (2) of the preferred embodiment of the present invention. In the configuration, it can be clearly seen from the figure that the driving device 3 is fixed on the carrier 12 in the structural arrangement, and the clamping member 2 is disposed on the side of the carrier 12 with the pivoting member 4, so that the clamping member 2, the driving device 3 is configured by the L-shaped group to form the clamping mechanism 11, and the two clamping mechanisms 11 form the jaw structure 1 in a rectangular pattern group, and the relevant control device is installed in the center of the rectangle. This space configuration reduces the overall size and improves space utilization.

In actual operation, when the wafer cassette 5 loaded with the wafer is to be moved in or out on the temporary storage platform, the jaw structure 1 is moved to a predetermined position above the wafer cassette 5, and then the driving device 3 is activated. To drive the clamping member 2, the telescopic rod 32 is pushed out by the power element 31, and the movable arm 21 is driven by the abutting portion 321 on the telescopic rod 32, and the movable arm 21 is pivoted on the carrying member 21 by the pivoting member 4 Piece When the movable arm 21 receives an external force from the driving device 3 corresponding to one end of the abutting portion 321 , the clamping member 2 swings with the pivoting member 4 as an axis, and the positioning hook 22 is fixed. In the wafer box 5, the gripping action is completed.

In the above clamping process, the driving principle is mainly implemented by the principle of a lever, wherein the driving device 3 is a force applying end, the movable arm 21 is a force applying arm, the pivoting member 4 is a supporting point, and the positioning hook 22 is a receiving end, so the driving principle is driven by a lever principle. The multiple of the thrust of the device 3 is transmitted to the positioning hook 22, the clamping force of the clamping member 2 and the clamping stability are improved, or the fixing action is performed with a small force, thereby reducing the wear of the driving device 3 and increasing the service life thereof. The jaw structure 1 is made more practical and progressive.

Please also refer to the sixth figure, which is a use state diagram of another embodiment of the present invention. As can be clearly seen from the figure, the clamping member 2a further includes at least one positioning convex portion 23a for engaging. The robot arm gripping portion 51a on the wafer boat case 5a is engaged with the robot arm gripping portion 51a of the wafer boat case 5a by the positioning convex portion 23a while the positioning hook 22a of the holding member 2a is fixed. The utility model has the function of auxiliary fixing, mainly for improving the clamping precision of the clamping member 2a, and avoiding the instability of the handling process due to the offset of the clamping action.

However, the above description is only the preferred embodiment of the present invention, and thus does not limit the scope of the patent of the present invention. Therefore, all the simple modifications and equivalent structural changes that are made by using the present specification and the drawings are the same. It is included in the scope of this new patent and is given to Chen Ming.

Therefore, the key technology of the cartridge structure of the present type of the crystal boat box temporary storage platform is to improve the conventional technology:

First, the clamping force of the clamping member 2 and the clamping stability are improved by the principle of the lever.

Second, the use of the principle of leverage to reduce the wear of the drive unit 3, increasing its service life.

3. The positioning accuracy of the clamping member 2a is improved by the positioning convex portion 23a.

Fourth, the effective space configuration makes the overall volume smaller.

In summary, the new type of wafer boat temporary storage platform jaw structure can achieve its efficacy and purpose when used, so the new type is a new type of practicality, which is in line with the application requirements of the new patent.提出 Submit an application in accordance with the law, and hope that the trial committee will grant this new type as soon as possible to protect the applicant's hard work. If there is any doubt in the trial committee, please do not hesitate to give instructions, the applicant will try his best to cooperate and feel polite.

11‧‧‧Clamping mechanism

12‧‧‧ Carrying parts

121‧‧‧ pivot seat

2‧‧‧Clamping parts

21‧‧‧ movable arm

22‧‧‧ Positioning hook

3‧‧‧ drive

31‧‧‧Power components

32‧‧‧ Telescopic rod

321‧‧‧Docking Department

4‧‧‧ pivoting parts

Claims (8)

A wafer cassette temporary storage platform jaw structure, the jaw structure comprises a plurality of clamping mechanisms, and each of the clamping mechanisms mainly comprises: a clamping member, the clamping member comprises a movable arm, and a setting a positioning hook at one end of the movable arm; a driving device pivoted away from the end of the movable arm and driving the clamping member in a telescopic manner; and a device disposed on the movable arm and located at the positioning hook And the pivoting member between the driving device is configured to swing the clamping member with the pivoting member as an axis. The wafer cassette temporary storage platform jaw structure according to claim 1, wherein the clamping member further comprises at least one positioning convex portion for engaging a mechanical arm grasping portion on the wafer boat box. The wafer cassette temporary storage platform jaw structure according to claim 1, wherein the driving device comprises a power component, and a telescopic rod coupled to the power component and pivoted on the movable arm. The wafer cassette temporary storage platform jaw structure according to claim 3, wherein the power component is a cylinder. The wafer cassette temporary storage platform jaw structure according to claim 3, wherein the telescopic rod has an abutting portion cooperated with the movable arm. The wafer cassette temporary storage platform jaw structure according to claim 1, wherein the jaw structure further comprises at least one carrier for supporting and driving the driving device. The wafer cassette temporary storage platform jaw structure according to claim 6, wherein the carrier has a plurality of pivoting seats for pivoting the pivoting member. The wafer cassette temporary storage platform jaw structure according to claim 1, wherein the clamping member and the driving device form the clamping mechanism in an L form group, and the two clamping mechanisms are in a moment The morphological group constitutes the jaw structure.