TWM515693U - Mask material taking device and clamping mechanism - Google Patents

Description

Mask reclaiming device and clamping mechanism thereof

The creation belongs to a reclaiming and moving reticle reclaiming technology, in particular to a reticle reclaiming device capable of automatically clamping a reticle and a clamping mechanism thereof, thereby improving the convenience of gripping and improving the movement operation. Stability.

According to the process of semiconductor, the surface pattern of the wafer is completed by photolithography and etching process, and the mask is an indispensable key. The reticle is a light-transmissive glass sheet with a specific pattern, and includes a patterned pattern area for transferring a pattern on the pattern area to a photoresist on the wafer by using a light source, and then performing an etching process. The pattern is completed on the surface of the wafer. In order to protect the pattern on the pattern area, the mask is usually provided with a Pellicle above the pattern area to prevent the pattern on the pattern area from being scratched, contaminated or destroyed.

Since the reticle gripper is used to hold the reticle when the reticle is removed or moved, the semiconductor technology has become more and more fine in recent years, and the graphics area is usually closer to the edge of the reticle, and Alignment marks and bar codes on both sides of the mask. If the mask clip is used improperly, it will cause scratches on the alignment marks and barcodes, resulting in the accuracy of the mask alignment on the exposure machine or affecting the mask. Identification, so that the space available for the reticle is more and more limited;

Conventional mechanical reticle gripper is designed to avoid reticle The 撑-shaped support clip of the cover film is detached from the bottom of the reticle to be separated from the support of the reticle box when the reticle is taken in the reticle, and then the reticle is removed from the reticle box. And move to the work area (such as cleaning or inspection, etc.), when it is gripped, it needs a large area, but because the edge area of the mask is getting smaller and smaller, it is easy to touch the mask cover film and cause the mask to fall off. Falling, especially when the edge of the pattern area is very close to the edge of the mask, the edge of the mask film is also very close to the edge of the mask, which causes problems in the pick and place of the mask, such as the conventional use of the mask inspection machine. The reticle collet may touch the mask cover and may not hold the reticle securely, or even drop the reticle or be damaged by the clamping force.

In the process of moving, the transfer of the existing reticle holder is mainly performed by linear action, so it needs to be slipped by the X-axis, the Y-axis, and the Z-axis, and these actions are mainly caused by the telescopic movement of the lead screw or the cylinder. To be done. However, it will have a frustrating feeling when it is at the extreme position or stop, which may easily cause the reticle to shift on the chuck, or even fall, so the moving speed cannot be too fast, and the moving stroke is a linear distance, which requires More time, invisible affects work efficiency.

In other words, the shortcomings of the existing mechanical reticle holders necessitate a design that can firmly hold the reticle to prevent the reticle from falling, and at the same time shorten the moving distance and improve the reticle. Convenience and increase the efficiency of its work.

In view of this, the creator has in-depth discussion on the problems faced by the above-mentioned existing masks, and actively seeks solutions through the experience of the creators for years of relevant development, and has been continuously researching and developing. Finally, a mask reclaiming device and a clamping mechanism have been successfully created, thereby overcoming the troubles and inconveniences caused by the existing gripping area being too large and the moving distance being long.

Therefore, the main purpose of the present invention is to provide a clamping mechanism for stably holding the reticle, so that the reticle can be effectively clamped only by requiring a small clamping area to prevent the reticle from falling or improperly colliding.

Moreover, the second primary objective of the present invention is to provide a reticle reclaiming device that is easy to grip the reticle, which can quickly and stably capture the reticle, and can be widely used in various reticle entry and exit systems.

Furthermore, another main purpose of the present invention is to provide a photomask reclaiming device with a short moving distance, which can effectively maintain the smoothness of movement and further improve work efficiency.

To this end, the present invention mainly achieves the above-mentioned various purposes and effects through the following technical means. The reticle reclaiming device comprises at least one open box mechanism and a clamping mechanism disposed on the open box mechanism. Opening a reticle transfer box and accommodating a reticle disposed in the reticle transfer case, wherein the reticle transfer case comprises a bottom plate for supporting the reticle and a cover body for covering the bottom plate to form a closed space; The unpacking mechanism has a substrate, and the substrate is provided with a moving plate capable of carrying the upper and lower displacement of the stencil transfer box bottom plate, and the other substrate is provided with a top plate located above the moving plate, the top plate is capable of positioning the reticle transfer box, and the top plate Forming a through hole for the bottom plate to pass through; the clamping mechanism is disposed on a side of the moving plate on the substrate, and has a seat plate that can be displaced relative to the substrate, and a driving member is disposed on the bottom surface of the seat plate. The piece can be rotated by a rotating cantilever pivoted on the top surface of the seat plate, and the free end of the rotating cantilever is provided with a holder, and the holder has two synchronous relatively far away Or close to the clamping head for simultaneous clamping or release of the opposite side edges of the reticle.

Thereby, through the specific implementation of the foregoing technical means, the photomask reclaiming device of the present invention can not only selectively open and close the reticle transfer box by using the open box mechanism, but also clamps through the gripper of the clamping mechanism. The reticle and the clamping head of the holder greatly reduce the width and area of the edge of the nip cover without touching the mask film, and will not affect the alignment mark and the barcode, and can be firmly clamped at the same time. Holding the reticle will not cause the reticle to fall or be damaged due to excessive clamping force. At the same time, during the transportation process, the clamping mechanism will move through the rotatable rotating cantilever, which greatly shortens the transfer distance and can reduce unnecessary Frustration, which can speed up the movement and smoothness of the movement, and improve its work efficiency, can increase its added value and improve its economic efficiency.

In order to enable the review board to further understand the composition, characteristics and other purposes of the creation, the following are some of the preferred embodiments of the creation, and together with the detailed description of the drawings, the following can be implemented by those skilled in the art. .

(10) ‧‧‧Substrate

(11)‧‧‧ bushing

(12)‧‧‧ Slider

(13)‧‧‧Second brakes

(14)‧‧‧Connected board

(15)‧‧‧ Column

(16)‧‧‧First brake

(17)‧‧‧Mobile board

(18)‧‧‧Supporting parts

(19) ‧‧‧3⁄2

(20)‧‧‧ top board

(21) ‧‧‧Limited parts

(25)‧‧‧through holes

(30)‧‧‧Clamping mechanism

(31) ‧‧‧ seat board

(32)‧‧‧ Drives

(33)‧‧‧Rotating cantilever

(35)‧‧‧Clamps

(36)‧‧‧Clamping head

(37)‧‧‧Clamping parts

(50)‧‧‧Photomask transfer box

(51) ‧‧‧floor

(55)‧‧‧ Cover

(60) ‧‧‧Photomask

The first picture: the appearance of the photomask reclaiming device.

The second figure: an exploded view of the photomask reclaiming device of the present invention, illustrating the aspects of each component and their relative relationship.

The third picture: a schematic diagram of the partial decomposition action of the created photomask reclaiming device in actual use.

The fourth picture: a schematic diagram of the plane action of the clamping mechanism of the present photomask reclaiming device in actual use.

The fifth picture: the clamping mechanism of the photomask reclaiming device of the present invention is actually used. Another schematic diagram of the plane action.

Fig. 6 is a schematic view showing another action of the photomask reclaiming device of the present invention in actual use.

The present invention is a reticle reclaiming device and a clamping mechanism thereof, and the specific embodiments of the creation and its components are exemplified with the accompanying drawings, all related to front and rear, left and right, top and bottom, upper and lower, and horizontal The reference to the vertical is for convenience of description only, and does not limit the creation, nor restricts its components to any position or spatial orientation. The drawings and the dimensions specified in the specification may be varied according to the design and needs of the specific embodiments of the present invention, without departing from the scope of the invention.

The brief structure of the photomask reclaiming device of the present invention is as shown in the first and second figures. The photomask reclaiming device can be applied to the reticle in and out of the workstation, the reticle cleaning device, and the reticle. Inspecting equipment or other related reticle application equipment, etc., and the reticle reclaiming device includes at least one open box mechanism (1) and a clamping mechanism (30) disposed on the open box mechanism (1) for respectively opening one The reticle transfer box (50) "Reticle SMIF Pod, RSP" and a reticle (60) that can be placed in the reticle transfer case (50), wherein the reticle transfer case (50) is supported by a light The bottom plate (51) of the cover (60) and a cover body (55) for covering the bottom plate (51) to form a sealed space, wherein the composition and operation of the reticle transfer case (50) and the reticle (60) are typical The same, and not the characteristics of this creation, will not be repeated; for the detailed composition of this creation, please refer to the disclosure of the second and third figures, the open box mechanism (1) has a substrate (10), and the substrate (10 The top surface is provided with a plurality of columns (15), and each of the columns (15) is slidably provided with a moving plate (17), wherein the moving plate (17) utilizes a first brake member disposed on the bottom surface of the substrate (10) ( 16) Actuating up and down displacement, the first brake member (16) may be selected from a typical cylinder, a cylinder, or a motor with a telescopic function such as a screw or a rack, and a moving plate (17) is provided for The reticle transfer box (50) bottom plate (51) supports the positioning support member (18), and the movable plate (17) is additionally provided with a bottom plate (51) and a cover for selectively opening the reticle transfer case (50). a dialing member (19) of the body (55), a top plate (20) at the top end of the other column (15), and a limiting member (21) for positioning the reticle transfer box (50) on the surface of the top plate (20), and The top plate (20) defines a through hole (25) through which the bottom plate (51) passes in the range of the limiting member (21), so that the bottom plate (51) of the reticle transfer case (50) can be driven up and down by the moving plate (17). Displacement; the clamping mechanism (30) is disposed on one side of the space surrounded by the columns (15) of the substrate (10), and is provided on the substrate (10) with at least two bushings (11), each lining The sleeve (11) is respectively slidably disposed by a sliding bar (12), and the bottom surface of the substrate (10) is surrounded by the aforementioned sliding bar (12) The center is provided with a second brake member (13), and the second brake member (13) can be selected from a typical cylinder, a cylinder, or a motor with a telescopic function, such as a screw and a rack, and a second brake member ( 13) The output shaft is provided with a connecting plate (14) connected to each of the sliding rods (12), and the second braking member (13) is synchronously actuated to slide the sliding rods (12) relative to the substrate (10); The holding mechanism (30) is provided with a plate (31) spanning the top end of each of the sliding rods (12) above the substrate (10), and a driving member (32) is disposed on the bottom surface of the seat plate (31), the driving member (32) Available for pivoting on the seat plate (31 The top rotating cantilever (33) rotates, and the free end of the rotating cantilever (33) is provided with a holder (35) having two clamping heads that are relatively distant from or close to each other (36). ), for the opposite side edges of the photomask (60), and the opposite surfaces of each of the clamping heads (36) respectively have a clamping member (37) corresponding to the crotch-shaped notch, each of the clamping members (37) ) is made of polyetheretherketone (PEEK) material, and the upper and lower edges of the notch of the clamping member (37) are outwardly flared, so that the holder (35) clamps the head (36) The clamping member (37) can be firmly clamped only when the edge of the reticle (60) is clamped to the edge of the reticle (60); thereby forming a quick and stable reticle reclaiming device and Clamping mechanism.

In the actual application, the creation is as shown in the first, third, fourth and fifth and sixth figures, and it is convenient to observe the action state of the creation. In the third and fourth figures, the top plate (20) is separated upward.

When the reticle (60) is to be taken out from the reticle transfer case (50) and transported to the work area, the reticle transfer case (50) containing the reticle (60) is placed in the open box mechanism (1) Between the limiting members (21) of the top plate (20), the moving plate (17) is then moved upward by the action of the first braking member (16), and the supporting member passing through the through hole (25) of the top plate (20) is utilized. (18) The top support restricts the bottom plate (51) of the reticle transfer case (50), and releases the lock of the bottom plate (51) and the cover body (55) through the dial member (19), after which the first brake member (16) Actuating the moving plate (17) drives the bottom plate (51) together with the reticle (60) to move downward through the top plate (20) through hole (25) to the clamping position; and further, through the substrate (10) the second braking member (13) The action of the clamping mechanism (30) is slightly displaced upwards to avoid rotating the cantilever (33) at During the turning process, it hits the reticle (60), the clamping mechanism (30) uses the driving member (32) to actuate the rotating cantilever (33) to position the holder (35) above the reticle (60), and the holder (35) The two clamping heads (36) are away from each other, and when the clamping mechanism (30) is acted upon by the second braking member (13), the clamping head (36) of the holder (35) corresponds to the clamping light. When the cover (60) is in position, the holder (35) can actuate the clamping member (37) of the clamping head (36) relative to the clamping mask (60), since the clamping member (37) has an upper and lower oblique edge. The shape of the notch can greatly reduce the edge area of the clamping reticle (60), and can provide a stable clamping force to avoid displacement or falling off due to vibration; and the rotating cantilever (33) of the clamping mechanism (30) After the holder (35) completes the operation of the clamping reticle (60), the second braking member (13) can be used to raise the clamping mechanism (30) to disengage the reticle (60) from the bottom plate (51). As shown in the four figures, the rotating cantilever (33) is rotated by the driving member (32) to the working position; otherwise, when the reticle (60) is to be retracted into the reticle transfer box (50) from the working area, In the manner described above, the reticle (60) is held by the rotating cantilever (33) holder (35) of the clamping mechanism (30). Clamping and reversing the reticle (60) back to the reticle transfer case (50) bottom plate (51) of the moving plate (17) of the unpacking mechanism (1), and placing the reticle (60) After the fixed position above the bottom plate (51), the clamping mechanism (30) uses the driving member (32) to rotate the cantilever (33) to rotate the holder (35) to the working area for standby, and the moving plate (17) is subjected to the first A brake member (16) acts to drive the bottom plate (51) upward, and when the bottom plate (51) is combined with the cover body (55), the dial member (19) of the support member (18) can be selectively locked to the bottom plate (51). ) and the cover body (55), so that the reticle transfer box (50) can carry the reticle ( 60) is taken away from the box mechanism (1) to complete the entire operation.

Through the above description, the present invention can selectively open and close the bottom plate (51) and the cover body (55) of the reticle transfer case (50) by using the open box mechanism (1), and further penetrate the clamping mechanism (30). The holder (35) clamps the reticle (60), and the clamping head (36) of the holder (35) has a clamping member (37) with a relatively nick-shaped notch, so that the clamping can be greatly reduced. The width and area of the edge of the reticle (60), without touching the mask film, will not affect the alignment mark and the bar code, and at the same time, the reticle can be firmly held without causing the reticle to fall or the clip The force is too large and damaged; and during the transportation process, the clamping mechanism (30) is moved through the rotatable rotating cantilever (33), which greatly shortens the transfer distance, thereby reducing unnecessary frustration, thus speeding up movement Speed and smoothness, so it improves the convenience of capturing the reticle and improves its working efficiency.

In summary, it can be understood that this creation is a creative and excellent new creation. In addition to effectively solving the problems faced by the practitioners, the effect is greatly enhanced, and the same or similar product creation is not seen in the same technical field. Or public use, and at the same time have an improvement in efficacy, so this creation has met the requirements of "newness" and "progressiveness" of the new patent, and is applying for a new type of patent according to law.

(10) ‧‧‧Substrate

(12)‧‧‧ Slider

(14)‧‧‧Connected board

(15)‧‧‧ Column

(16)‧‧‧First brake

(17)‧‧‧Mobile board

(18)‧‧‧Supporting parts

(20)‧‧‧ top board

(21) ‧‧‧Limited parts

(30)‧‧‧Clamping mechanism

(31) ‧‧‧ seat board

(32)‧‧‧ Drives

(33)‧‧‧Rotating cantilever

(35)‧‧‧Clamps

(36)‧‧‧Clamping head

(50)‧‧‧Photomask transfer box

(51) ‧‧‧floor

(60) ‧‧‧Photomask

Claims (10)

A reticle reclaiming device, the reticle reclaiming device comprises at least an unpacking mechanism and a clamping mechanism disposed on the unpacking mechanism for respectively opening a reticle transfer box and placing and placing the reticle on the reticle a reticle in the box, wherein the reticle transport box comprises a bottom plate for supporting the reticle and a cover body for covering the bottom plate to form a closed space; and the open box mechanism has a substrate, and the substrate is provided with a tunable mask for transporting a moving plate on the upper and lower sides of the bottom plate of the box, and a top plate on the other substrate above the moving plate, the top plate is for positioning the photomask transfer box, and the top plate is formed with a through hole for the bottom plate to pass through; The side of the moving plate on the substrate has a seat plate that can be displaced relative to the upper and lower sides of the substrate, and a bottom surface of the seat plate is provided with a driving member for actuating a rotating cantilever pivoting on the top surface of the seat plate. Furthermore, the free end of the rotating cantilever is provided with a holder having two clamping heads which are relatively far apart or close to each other for synchronously clamping or releasing opposite side edges of the reticle; thereby forming a group Quick and clip The solid mask removal device by its clamping mechanism. The reticle reclaiming device of claim 1, wherein the substrate is provided with a plurality of columns on the top surface, and the moving plate is slidably disposed between the columns, and the top plate is spanned at the top of each of the columns. And the moving plate is moved up and down by using a first brake member disposed on the bottom surface of the substrate. The reticle reclaiming device of claim 1, wherein the moving plate is provided with a supporting member for supporting and positioning the stencil conveying box bottom plate, and the moving plate A dial member for selectively opening the bottom plate and the cover of the reticle transfer box is further provided. The reticle reclaiming device according to claim 1, wherein the moving plate is provided with a supporting member for supporting and positioning the stencil conveying box bottom plate, and the moving plate is further provided with a second for selectively releasing the bottom plate. A toggle member that is locked with the cover. The reticle reclaiming device of claim 1, wherein the clamping mechanism is provided with at least two bushings on the substrate, and each bushing is respectively provided with a sliding bar, and the clamping mechanism is seated. The plate system is disposed at the top of each of the sliding rods, and the bottom surface of the substrate is provided with a second braking member at a center of the sliding rod, and the output shaft of the second braking member is provided with a connecting plate connected with each of the sliding rods. The two brake members simultaneously actuate each of the sliders to slide relative to the substrate. The reticle reclaiming device of claim 1, wherein the opposing surfaces of the gripping heads of the clamping mechanism respectively have a clamping member with a relatively nick-shaped notch, and the notch of the clamping member is The lower edge is an outwardly flared beveled edge for the clamping member to be firmly clamped when the edge of the reticle is clamped to a very narrow area. The reticle reclaiming device of claim 6, wherein the clamping member is made of a material selected from the group consisting of polyetheretherketone (PEEK). A clamping mechanism having a holder having two clamping heads that are relatively remote from or close to each other for simultaneously clamping or releasing opposite side edges of a mask, and each of the holders The opposite surfaces of the clamping head respectively have a clamping member with a relatively meandering notch, and the upper and lower edges of the notch of the clamping member are outwardly The beveled edge of the expansion allows the clamping member to be firmly clamped when the edge of the reticle is clamped to a very narrow area. The clamping mechanism of claim 8, wherein the clamping mechanism has a plate, and a driving member is disposed on a bottom surface of the seat plate, and the driving member is configured to rotate a rotating cantilever pivoted on a top surface of the seat plate. The holder is attached to the free end of the rotating cantilever. The clamping mechanism of claim 8, wherein the clamping member is made of a material selected from the group consisting of polyetheretherketone (PEEK).