TWM483263U - Die sucking rail with replaceable sucking sections - Google Patents

Description

Die suction track of replaceable suction section

This creation relates to a die suction track for a replaceable suction section, and more particularly to a feed track suitable for use in a semiconductor die inspection apparatus.

Please refer to FIG. 1 , which is a top view of a feed module of a conventional grain inspection apparatus. As shown in FIG. 1, the feeding module Fc of the grain detecting device Ti mainly includes a feeding tray 6 and a feeding rail 7, wherein the feeding force is generated by the feeding tray 6, and the crystal grains C are sequentially passed through. The material track 7 is fed to the suction mechanism 8, and the suction mechanism 8 sucks the crystal grains C and moves to the detecting device 81 (probe) for testing.

Referring again to Figure 2, Figure 2 is a partial side elevational view of a conventional suction mechanism and feed track. As shown in Fig. 2, when the crystal grain C is fed to the end of the feed rail 7, the suction mechanism 8 is lowered in contact with the crystal grain C and sucked for transfer. On the other hand, in the common crystal grain type, the peripheral edge of the crystal grain is provided with an insulating material similar to glass, which has high strength, withstand voltage, and insulation properties. However, after the detection machine has been operated for a long time, the suction mechanism 8 continuously sucks the crystal grains C, and the crystal grain C itself has a high-strength glass insulation material, which will cause the feed rail 7 to be worn and sunken, resulting in The case where the grain cannot be properly positioned.

Further, as shown in Fig. 1, the conventional feed rail 7 is directly fixed to the machine table, and it is usually impossible to adjust the position of the feed rail 7 by directly locking the bolt 9 and the screw hole. However, when faced with the detection of different sized grains, or the further processing of the feed track 7, the position of the feed track 7 cannot be adjusted, and a completely new feed track 7 must be reworked, resulting in a cost Cost.

It can be seen that the die suction track of the replaceable suction section which can replace the worn and recessed parts locally without having to eliminate the entire feed track and adjust the position of the feed track in time is actually an industry. An urgent demander.

The main purpose of this creation is to provide a die suction track of a replaceable suction section. When the normal loss of the suction track affects normal use, the worn and recessed parts can be partially replaced without eliminating the entire part. Feed rails to reduce costs and resource costs.

In order to achieve the above object, the present invention creates a die suction track of a replaceable suction section, which mainly comprises a suction section and a rail body. The suction section includes a first guiding sidewall and a suction platform, and the first guiding sidewall is adjacent to a side edge of the suction platform and protrudes upwardly from the suction platform; in addition, the rail body includes a The second guiding sidewall and a feeding platform are adjacent to one of the side edges of the feeding platform and protrude upwardly from the feeding platform. Furthermore, the suction section is detachably assembled to one side end of the rail body, and the first guiding side wall of the suction section and the suction platform are respectively connected to the second guiding side wall of the rail body, and Feeding platform. Accordingly, the suction section of the creation can be replaced according to the surface loss caused by long-term use, without the elimination of the entire suction rail, the reduction of the profit margin, and the reduction of resource waste.

Preferably, the suction section of the present invention can be an L-shaped member, which can include a suction side and a fixed side, and the first guiding side wall and the suction platform can be located on the suction side. In addition, the die suction track of the present invention may further comprise a locking bolt, and a constant perforation may be formed on the fixed side of the suction section, and a screw hole may be formed on the side end of the rail body, and the locking bolt can be worn through. The through hole of the suction section is locked to the screw hole of the rail body. Accordingly, the creation of the suction section can be set on the rail body by the fixing method of the bolt bolt, which is simple, stable, and convenient to assemble and disassemble.

Furthermore, a positioning pin can be protruded from the side end of the main body of the present invention, and a positioning hole can be formed on the fixed side of the suction section, and the positioning pin of the rail body is inserted into the positioning hole of the suction section. Accordingly, the present invention can further fix the suction section and the rail body by means of the positioning pin and the positioning hole, and the bolt and the bolt form two fixed points, and can stably combine the suction section and the rail body, so that the suction section is not caused by It is easy to rotate or shake by bolts alone.

In addition, a positioning platform can be protruded from the side end of the track body of the present invention, and a positioning groove can be recessed on the fixed side of the suction section, and the positioning platform of the rail body can be accommodated in the positioning groove of the suction section . Accordingly, the design can additionally integrate the suction section and the rail body through the design of the positioning table and the positioning groove, and also helps to locate the suction section.

Moreover, the track body of the present invention may further comprise a fixing platform adjacent to the feeding platform, and at least one locking long groove may be formed on the fixing table. Among them, the locking long groove is mainly used to lock the rail body to the machine table, and the setting of the locking long groove can provide the adjustment of the position of the die suction track. In other words, the position of the feed track can be adjusted to meet the various needs, such as depending on the grain size, or the cutting or other processing of the feed track, to achieve reusable and resource and cost savings.

In addition, the fixed table of the present invention can open a plurality of blanking through holes, which are arranged equidistantly along the feeding platform, and preferably have three blanking through holes. Moreover, each of the blanking through holes may include a bevel that faces the feed direction of a die, and the horizontal angle of the bevel to the feed platform may be 30 degrees. Among them, the setting of the inclined surface is mainly to assist the blanking of the crystal grains, and the crystal grains can be prevented from being damaged by falling at a vertical angle.

Before the detailed description of the die suction track of the replaceable suction section is described in this embodiment, it is to be noted that in the following description, like elements will be denoted by the same reference numerals.

Please also refer to FIG. 3, FIG. 4, FIG. 5A, and FIG. 5B. FIG. 3 is a top exploded view of a preferred embodiment of the die suction track of the replaceable suction section of the present invention. The figure is a partial enlarged view of a track suction body of a replaceable suction section of a preferred embodiment, and FIG. 5A is a preferred die suction track of the replaceable suction section of the present invention. A top view of the suction section of the embodiment, and FIG. 5B is a left side view of the suction section of the preferred embodiment of the die suction track of the replaceable suction section.

As shown in the figure, the die suction track of the replaceable suction section of the embodiment mainly comprises a suction section 2, a rail body 3, and a locking bolt 4. The suction section 2 includes a first guiding side wall 21 and a suction platform 22, which are integrally formed, and the first guiding side wall 21 is adjacent to one side edge of the suction platform 22 and protrudes upward. On the suction platform 22. The first guiding sidewall 21 is mainly used for guiding the wafer to be tested, so that the wafer to be tested can be fed along the first guiding sidewall 21, and the suction section 2 is mainly for loading the wafer to be tested for suction by the suction mechanism. Transfer.

In addition, the suction section 2 of the present embodiment is an L-shaped member, which includes a suction side 201 and a fixed side 202, and the first guiding side wall 21 and the suction platform 22 are located on the suction side 201. In addition, the fixed side 202 of the suction section 2 defines a continuous through hole 23 which penetrates the corresponding end surface of the fixed side 202, and a positioning hole 24 is formed on one side end surface of the rail body 3, and a positioning groove 25 is recessed. The positioning groove 25 is recessed from the lower surface of the fixed side 202.

On the other hand, the rail body 3 includes a second guiding side wall 31 and a feeding platform 32, which are also integrally formed, and the second guiding side wall 31 is adjacent to one side edge of the feeding platform 32 and upward. Projected out of the feed platform 32. Likewise, the second guiding sidewall 31 and the feed platform 32 serve primarily to enable the wafer to be tested to travel along the second guiding sidewall 31 to feed on the feed platform 32.

In addition, as shown in the figure, the rail body 3 defines a screw hole 33 on a side end surface facing the suction section 2, and a positioning pin 34 and a positioning platform 35 are protruded. The positioning pin 34 is used for the positioning hole 24 of the suction section 2, and the positioning table 35 is used for the positioning groove 25 of the suction section 2.

Furthermore, the suction section 2 is detachably assembled to one side end of the rail body 3 by the locking bolt 4, that is, the locking bolt 4 passes through the through hole 23 of the suction section 2 and is locked to Inside the screw hole 33 of the rail body 3. The positioning pin 34 of the rail body 3 is inserted into the positioning hole 24 of the suction section 2, and the positioning table 35 of the rail body 3 is accommodated in the positioning groove 25 of the suction section 2. Accordingly, the first guiding sidewall 21 of the suction section 2 and the suction platform 22 are respectively connected to the second guiding sidewall 31 of the rail body 3 and the feeding platform 32, so that the wafer to be tested can be along the first The guiding side wall 21 and the second guiding side wall 31 are fed to the suction platform 22 at the feeding platform 32 for suction.

As described above, in this embodiment, the suction section 2 is assembled on the rail body 3 by the bolt bolts 4, which is simple, stable, and convenient to assemble and disassemble. In addition, in the embodiment, the suction section 2 and the rail body 3 are fixed by the positioning pin 34 and the positioning hole 24, and the bolt and the bolt form two fixed points, and the suction section 2 and the rail body 3 can be stably combined to make suction. Segment 2 does not easily rotate or sway due to bolting alone. In addition, the embodiment also adopts the design of the positioning table 35 and the positioning groove 25 to more stably combine the suction section 2 and the rail body 3, and also helps to locate the suction section 2, and can increase the suction. The support of paragraph 2.

As shown in FIG. 3, the rail body 3 of the present embodiment further includes a fixing base 36 which is adjacent to the feeding platform 32, and the fixing base 36 is mainly used for fixing the rail body 3 to the machine table (in the figure). Not shown). The fixing table 36 is provided with five locking long slots 361, which are mainly used for the fixing table 36 to be attached to the machine table, and the position of the die suction rail position can be adjusted by the arrangement of the long slots. . In other words, by locking the characteristics of the long slot 361, the position of the feed track can be adjusted to meet various needs, such as depending on different grain sizes, or to cut or otherwise process the feed track, to achieve repeatability. Use to save resources and cost.

As shown in FIG. 3, the fixing table 36 defines three blanking through holes 362 which are arranged equidistantly along the feeding platform 32, and each blanking through hole 362 includes a slope 363 which is oriented toward a crystal. The feed direction of the pellets, while the angle between the ramps 363 and the feed platform 32 is 30 degrees. Accordingly, in this embodiment, by the arrangement of the blanking through holes 362, the crystal grains that are not sequentially arranged on the feeding platform 32 will fall into the blanking through holes 362 to be re-fed to avoid the position being incorrect. Continued feeding of the die to the suction section 2 causes the suction mechanism to fail to pick up or pick up the position and cause the test to fail. Moreover, the bevel 363 of the blanking through hole 362 can assist in the blanking of the crystal grains, and can prevent the crystal grains from falling at a vertical angle and being damaged.

The above-described embodiments are merely examples for convenience of description, and the scope of the claims is intended to be limited to the above embodiments.

[study]

6‧‧‧feed tray
7‧‧‧Feed track
8‧‧‧Suction mechanism
81‧‧‧Detection device
9‧‧‧ bolt
C‧‧‧ grain
Fc‧‧‧feed module
Ti‧‧‧ grain inspection equipment [this creation]
2‧‧‧ suction section
21‧‧‧First guiding side wall
201‧‧‧ suction side
202‧‧‧ fixed side
22‧‧‧Suction platform
23‧‧‧through holes
24‧‧‧Positioning holes
25‧‧‧ positioning slot
3‧‧‧ Track body
31‧‧‧Second guiding side wall
32‧‧‧ Feeding platform
33‧‧‧ screw holes
34‧‧‧Locating pin
35‧‧‧ Positioning table
36‧‧‧ fixed table
361‧‧‧Lock with long slot
362‧‧‧Dropping through hole
363‧‧‧Bevel
4‧‧‧Lock bolts

Figure 1 is a top plan view of a feed module of a conventional grain inspection apparatus. Figure 2 is a partial side view of a conventional suction mechanism and feed track. Figure 3 is a top exploded view of a preferred embodiment of the present invention.

Figure 4 is a partial enlarged view of the track body of a preferred embodiment of the present invention. Figure 5A is a top plan view of a suction section of a preferred embodiment of the present invention. Figure 5B is a left side view of the suction section of a preferred embodiment of the present invention.

2‧‧‧ suction section

3‧‧‧ Track body

31‧‧‧Second guiding side wall

32‧‧‧ Feeding platform

33‧‧‧ screw holes

34‧‧‧Locating pin

35‧‧‧ Positioning table

36‧‧‧ fixed table

361‧‧‧Lock with long slot

362‧‧‧Dropping through hole

363‧‧‧Bevel

4‧‧‧Lock bolts

Claims (10)

A die suction track of a replaceable suction section, comprising: a suction section comprising a first guiding sidewall and a suction platform, the first guiding sidewall being adjacent to the suction platform a side edge projecting upwardly from the suction platform; and a rail body including a second guiding side wall and a feeding platform adjacent to a side edge of the feeding platform And protruding upwardly from the feeding platform; wherein the suction section is detachably assembled to one side end of the rail body, the first guiding side wall of the suction section, and the suction platform respectively Corresponding to the second guiding sidewall connected to the rail body and the feeding platform. The die suction track of the replaceable suction section according to claim 1, wherein the suction section is an L-shaped member, comprising a suction side and a fixed side, the first guide The leading side wall and the suction platform are located on the suction side. The die suction track of the replaceable suction section according to claim 2, further comprising a locking bolt, the fixed side of the suction section is provided with a continuous perforation, the side end of the rail body A screw hole is formed in the hole, and the locking bolt passes through the through hole of the suction section and is locked to the screw hole of the rail body. The die suction track of the replaceable suction section according to claim 2, wherein a positioning pin protrudes from the side end of the rail body, and a positioning is provided on the fixed side of the suction section The positioning pin of the rail body is inserted into the positioning hole of the suction section. The die suction track of the replaceable suction section according to claim 2, wherein a positioning platform is protruded from the side end of the rail body, and the fixed side of the suction section is recessed The positioning slot is disposed in the positioning slot of the suction section. The die suction rail of the replaceable suction section according to claim 1, wherein the rail body further comprises a fixing platform adjacent to the feeding platform, and the fixing platform has at least one lock Attached to the long slot. The die suction track of the replaceable suction section according to claim 6, wherein the fixing table defines a plurality of blanking through holes which are arranged equidistantly along the feeding platform. The die suction track of the replaceable suction section according to claim 7, wherein each of the blanking through holes comprises a slope which faces a feeding direction of a die. The die suction track of the replaceable suction section according to claim 8 of the patent application, wherein the angle between the inclined surface and the feeding platform is 30 degrees. The die suction track of the replaceable suction section according to claim 7 of the patent application, wherein the plurality of blanking through holes refers to three blanking through holes.