TWM482859U - Organic light emitting diode - Google Patents
Organic light emitting diode Download PDFInfo
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Description
本創作係一種有機發光二極體,特別是一種以旋轉塗佈或刮刀塗佈有機材料及降低基板所處環境的壓力之有機發光二極體。The present invention is an organic light-emitting diode, in particular, an organic light-emitting diode that is coated with an organic material by spin coating or doctor blade and reduces the pressure of the environment in which the substrate is placed.
由於有機發光二極體(Organic Light Emitting Diode,OLED)具有自發光、輕薄、操作溫度範圍較為寬廣等特性,因此被視為平面顯示器的另一種重要類型。Organic Light Emitting Diode (OLED) is considered to be another important type of flat panel display because of its self-illumination, thinness and wide operating temperature range.
有機發光二極體的結構主要係由銦錫氧化物(ITO)基板、有機材料層以及陰極層所組成。有機材料層通常包含了有機發光層(Emitting Material Layer,EML)、電子注入層(Electron Inject Layer,EIL)、電子傳輸層(Electron Transport Layer,ETL)、電洞傳輸層(Hole Transport Layer,HTL)與電洞注入層(Hole Inject Layer,HIL)等結構。The structure of the organic light-emitting diode is mainly composed of an indium tin oxide (ITO) substrate, an organic material layer, and a cathode layer. The organic material layer usually includes an organic light emitting layer (EML), an electron injection layer (Electron Inject Layer (EIL), an electron transport layer (ETL), and a hole transport layer (HTL). And a structure such as a Hole Inject Layer (HIL).
於製作上述各種結構時,主要是先利用半導體鍍膜技術,將各種有機材料分層沉積於ITO基板,然後預烤基板,揮發掉基板上之有機材料的溶劑含量,接著再進行固烤固化有機材料,重複有機層製作及完成電極,最後進行封裝製程,即可完成有機發光二極體之製作。於基板上製作有機發光二極體時,則可先於ITO基板表面設置一具若干開孔之遮罩,然後在遮罩表面塗佈有機材料。有機材料填入遮罩之開孔內,使基板表面 形成出若干有機顯示單元後,再經過預烤、固烤與封裝等製程即可。In the production of the above various structures, the first is to use a semiconductor coating technology to deposit various organic materials on the ITO substrate, and then pre-bake the substrate, volatilize the solvent content of the organic material on the substrate, and then solid-bake the cured organic material. The organic layer is fabricated and the electrode is completed, and finally the encapsulation process is performed to complete the fabrication of the organic light-emitting diode. When the organic light emitting diode is fabricated on the substrate, a mask having a plurality of openings may be disposed on the surface of the ITO substrate, and then the organic material is coated on the surface of the mask. The organic material is filled into the opening of the mask to make the surface of the substrate After forming a plurality of organic display units, the process of pre-baking, solid baking and packaging can be performed.
但是,當上述有機材料填入遮罩之開孔時,有機材料會因本身的流動性而滲入遮罩與基板之間,形成有機材料向開孔外側溢流,使有機材料黏著於遮罩與基板之間。另外,基板在製作的過程中若因移動而產生碰撞與震動,或是遮罩移除於基板表面時,有機材料會因為黏著於遮罩與基板而受到破壞,進而影響發光品質。另外,有機材料沉積於基板之後,必須經過一定時間的預烤、固烤等製程,才能完成整個製作過程,使得製作時間較長,成本較高。However, when the organic material is filled in the opening of the mask, the organic material penetrates between the mask and the substrate due to its own fluidity, and the organic material overflows to the outside of the opening, so that the organic material adheres to the mask and Between the substrates. In addition, if the substrate collides and vibrates due to movement during the manufacturing process, or the mask is removed from the surface of the substrate, the organic material is damaged by adhesion to the mask and the substrate, thereby affecting the light quality. In addition, after the organic material is deposited on the substrate, it must be pre-baked and solid-baked for a certain period of time to complete the entire production process, which makes the production time longer and the cost higher.
因此,本創作之主要目的乃在於提供一種有機發光二極體,其可減少有機材料於製作過程中所產生之溢流現象,同時提高製程品質。Therefore, the main purpose of the present invention is to provide an organic light-emitting diode which can reduce the overflow phenomenon of organic materials in the manufacturing process and improve the process quality.
本創作之另一目的則在於提供一種有機發光二極體之有機材料層,其可縮短製造時間,並減少製造成本。Another object of the present invention is to provide an organic material layer of an organic light-emitting diode which can shorten manufacturing time and reduce manufacturing cost.
為達成上述目的,本創作所提供一種有機發光二極體,其至少包含一基板以及一有機材料層,有機材料層形成於基板上,該有機材料層係由一具有溶劑之有機材料所組成,其中該有機材料以旋轉塗佈或刮刀塗佈的方式形成於基板上,同時藉由降低基板所處環境的壓力,以減少該有機材料所具有的溶劑含量。所述有機發光二極體依下列步驟完成:一、以旋轉塗佈或刮刀塗佈的方式塗佈具溶劑之有機材料於基板上;二、降低基板所處環境之壓力,用以減少該有機材料所含有的溶劑含量。藉由上述降低壓力的方式,本創作即可達成減少有機材料層於製作過程中所產生之溢流現象,同時達成提高製程品質、縮短製造時間,以及減少製造成本等 目的。In order to achieve the above object, the present invention provides an organic light emitting diode comprising at least a substrate and an organic material layer formed on a substrate, the organic material layer being composed of an organic material having a solvent. The organic material is formed on the substrate by spin coating or blade coating while reducing the solvent content of the organic material by reducing the pressure of the environment in which the substrate is placed. The organic light emitting diode is completed by the following steps: 1. coating the organic material with the solvent on the substrate by spin coating or knife coating; second, reducing the pressure of the environment in which the substrate is placed, to reduce the organic The solvent content of the material. By the above-mentioned method of reducing the pressure, the creation can reduce the overflow phenomenon of the organic material layer in the manufacturing process, and at the same time achieve the improvement of the process quality, shorten the manufacturing time, and reduce the manufacturing cost. purpose.
以下,有關本創作的特徵、實作與功效,茲配合圖式做最佳實施例。In the following, regarding the characteristics, implementation and efficacy of the present creation, the best embodiment is implemented in conjunction with the drawings.
10‧‧‧基板10‧‧‧Substrate
20‧‧‧有機材料/有機材料層20‧‧‧Organic/organic layer
21‧‧‧有機材料單元21‧‧‧Organic Materials Unit
30‧‧‧承載基台30‧‧‧bearing abutments
40‧‧‧噴嘴40‧‧‧ nozzle
50‧‧‧熱板50‧‧‧ hot plate
60‧‧‧刮刀60‧‧‧ scraper
70‧‧‧遮罩70‧‧‧ mask
71‧‧‧開孔71‧‧‧Opening
第一圖係為本創作之有機發光二極體第一實施例之製程方法流程圖。The first figure is a flow chart of the manufacturing method of the first embodiment of the organic light-emitting diode of the present invention.
第二圖係為本創作之有機發光二極體旋轉塗佈之示意圖。The second figure is a schematic diagram of the spin coating of the organic light-emitting diode of the present invention.
第三圖係為本創作之有機發光二極體刮刀塗佈之示意圖。The third figure is a schematic diagram of the organic light-emitting diode blade coating of the present invention.
第四圖係為本創作之有機發光二極體第二實施例之示意圖,主要顯示遮罩內填入有機材料之狀態。The fourth figure is a schematic view of the second embodiment of the organic light-emitting diode of the present invention, mainly showing the state in which the organic material is filled in the mask.
第五圖係為本創作第二實施例之示意圖,主要顯示基板設有多數有機材料單元之狀態。The fifth figure is a schematic view of the second embodiment of the present invention, mainly showing the state in which the substrate is provided with a plurality of organic material units.
第六圖係為本創作第三實施例之製程方法流程圖。The sixth drawing is a flow chart of the manufacturing method of the third embodiment of the present invention.
以下茲配合圖式列舉若干較佳實施例,用以對本創作之有機發光二極體進行詳細說明,其中各圖式之簡要說明如下:第一圖係為本創作之有機發光二極體第一實施例之製程方法流程圖。第二圖係為本創作之有機發光二極體旋轉塗佈之示意圖。第三圖係為本創作之有機發光二極體刮刀塗佈之示意圖。第四圖係為本創作之有機發光二極體第二實施例之示意圖,主要顯示遮罩內填入有機材料之狀態。第五圖係為本創作第二實施例之示意圖,主要顯示基板設有多數有機材料單元之狀態。第六圖係本創作第三實施例之製程方法流程圖。In the following, a number of preferred embodiments are listed in conjunction with the drawings for a detailed description of the organic light-emitting diode of the present invention. The brief description of each of the drawings is as follows: The first figure is the first organic light-emitting diode of the present invention. Flow chart of the process method of the embodiment. The second figure is a schematic diagram of the spin coating of the organic light-emitting diode of the present invention. The third figure is a schematic diagram of the organic light-emitting diode blade coating of the present invention. The fourth figure is a schematic view of the second embodiment of the organic light-emitting diode of the present invention, mainly showing the state in which the organic material is filled in the mask. The fifth figure is a schematic view of the second embodiment of the present invention, mainly showing the state in which the substrate is provided with a plurality of organic material units. The sixth figure is a flow chart of the process method of the third embodiment of the present creation.
請參閱第一圖所示,係為本創作之有機發光二極體第一實施例之製程方法流程圖,主要係用於製造單片有機發光二極體(Organic Light Emitting Diode,OLED),製造方法包含有下列步驟:步驟一:塗佈。首先將一已清潔完成之銦錫氧化物(ITO)基板放入一腔室內,並於基板表面塗佈一有機材料,使基板表面形成一有機材料層,有機材料層可為電子注入層、電子傳輸層、發光層、電洞傳輸層,或是電洞注入層。基板可作為有機發光二極體之陽極層。Please refer to the first figure, which is a flow chart of a process method for the first embodiment of the organic light-emitting diode of the present invention, which is mainly used for manufacturing a monolithic organic light emitting diode (OLED). The method comprises the following steps: Step 1: Coating. First, a cleaned indium tin oxide (ITO) substrate is placed in a chamber, and an organic material is coated on the surface of the substrate to form an organic material layer on the surface of the substrate. The organic material layer can be an electron injection layer or an electron. The transport layer, the light-emitting layer, the hole transport layer, or the hole injection layer. The substrate can serve as an anode layer of an organic light emitting diode.
步驟二:減壓。降低腔室內的壓力,腔室內壓力降低時,有機材料所含有之溶劑的蒸發速率亦隨之加快。於本實施例中,腔室內的壓力係降至1大氣壓力以下。當有機材料所含溶劑之蒸氣壓力較大,有機材料隨即於減壓後呈乾燥狀態,而可再塗佈另一有機材料層。若是有機材料於減壓後無法呈固化時,則可再進行以下步驟:步驟三:烘乾預烤。將已減壓後之基板移至另一腔室內,並昇高基板所處環境之溫度至攝氏約100度,可再減少有機材料層內的溶劑含量。烘乾預烤也可使有機材料層表面較為平坦。Step 2: Decompression. When the pressure in the chamber is lowered and the pressure in the chamber is lowered, the evaporation rate of the solvent contained in the organic material is also accelerated. In this embodiment, the pressure in the chamber is reduced to below 1 atmosphere. When the vapor pressure of the solvent contained in the organic material is large, the organic material is dried in a reduced state, and another organic material layer may be further coated. If the organic material cannot be cured after decompression, the following steps can be performed: Step 3: Drying and pre-baking. The solvent content in the organic material layer can be further reduced by moving the decompressed substrate into another chamber and raising the temperature of the substrate in the environment to about 100 degrees Celsius. Dry pre-baking can also make the surface of the organic material layer relatively flat.
步驟四:固烤。以高於烘乾預烤階段之溫度烘乾基板與有機材料層,使溶劑的含量降到最低,同時固化有機材料層。當該有機材料層固化以後,如第一圖所示,可再重複步驟一至步驟四等程序塗佈另一層有機材料層,直到所需要之組成結構都塗佈堆疊完成為止。Step 4: Solid roast. The substrate and the organic material layer are dried at a temperature higher than the drying pre-bake stage to minimize the solvent content while curing the organic material layer. After the organic material layer is cured, as shown in the first figure, another layer of the organic material layer may be coated by repeating steps 1 through 4, etc. until the desired composition is coated and stacked.
步驟五:製作陰極層。以鍍膜技術於有機材料層表面設置一金屬層,該金屬層可作為有機發光二極體之陰極層。Step 5: Make a cathode layer. A metal layer is disposed on the surface of the organic material layer by a coating technique, and the metal layer can serve as a cathode layer of the organic light emitting diode.
步驟六:封裝。利用玻璃蓋板與UV膠包覆住已固化之有機 材料層,完成單片有機發光二極體之製作。Step six: Encapsulation. Cover the solidified organic with a glass cover and UV glue The material layer completes the fabrication of a single-piece organic light-emitting diode.
請再參考第二圖與第三圖所示,第二圖係為本創作之有機發光二極體旋轉塗佈之示意圖。第三圖係為本創作之有機發光二極體刮刀塗佈之示意圖。如第二圖所示,上述有機發光二極體可以旋轉塗佈的方式,其包含一承載基台30與一噴嘴40,該承載基台30用以承載該基板10,該噴嘴40用以輸出該有機材料20於該基板10上,當該噴嘴40輸出該有機材料20於該基板10之同時,該承載基台30承載該基板10並帶動該基板10定點旋轉,俾使該有機材料20得以旋轉塗佈的方式均勻形成於該基板10上。如第三圖所示,上述有機發光二極體可以刮刀塗佈的方式,其包含一熱板50與一刮刀60,該熱板50用以承載該基板10並使該基板10均勻受熱,該刮刀60用以輸出該有機材料20於該基板10,同時均勻化該有機材料20以形成該有機材料層20。Please refer to the second and third figures. The second figure is a schematic diagram of the spin coating of the organic light-emitting diode of the present invention. The third figure is a schematic diagram of the organic light-emitting diode blade coating of the present invention. As shown in the second figure, the organic light emitting diode can be spin-coated, and includes a carrier base 30 and a nozzle 40. The carrier base 30 is used to carry the substrate 10, and the nozzle 40 is used for output. The organic material 20 is disposed on the substrate 10, and when the nozzle 40 outputs the organic material 20 to the substrate 10, the carrier base 30 carries the substrate 10 and drives the substrate 10 to rotate at a fixed point to enable the organic material 20 to be A spin coating method is uniformly formed on the substrate 10. As shown in the third figure, the organic light-emitting diode can be blade-coated, and includes a hot plate 50 and a scraper 60 for carrying the substrate 10 and uniformly heating the substrate 10. The doctor blade 60 is used to output the organic material 20 to the substrate 10 while homogenizing the organic material 20 to form the organic material layer 20.
請再參考第四圖與第五圖所示,其分別為本創作之有機發光二極體第二實施例之示意圖,主要顯示遮罩內填入有機材料之狀態與本創作第二實施例之示意圖,主要顯示基板設有多數有機材料單元之狀態。主要用於批次製作多片有機發光二極體,其製法包含有下列步驟:步驟一:首先將一已清潔之ITO基板10放置於一腔室內,再將一具有多數開孔71之遮罩70設置於基板10表面。Please refer to the fourth embodiment and the fifth figure again, which are respectively schematic diagrams of the second embodiment of the organic light-emitting diode of the present invention, mainly showing the state in which the organic material is filled in the mask and the second embodiment of the present creation. The schematic diagram mainly shows the state in which the substrate is provided with a plurality of organic material units. It is mainly used for batch production of a plurality of organic light-emitting diodes, and the method comprises the following steps: Step 1: First, a cleaned ITO substrate 10 is placed in a chamber, and a mask having a plurality of openings 71 is further disposed. 70 is disposed on the surface of the substrate 10.
步驟二:於遮罩70上塗佈有機材料20,使有機材料20填入各開孔71內,基板10表面即可成形出多數有機材料單元21。Step 2: The organic material 20 is coated on the mask 70, and the organic material 20 is filled into each of the openings 71, and a plurality of organic material units 21 can be formed on the surface of the substrate 10.
步驟三:降低腔室內的壓力,當腔室內壓力降低時,基板10表面之有機材料單元21所含的溶劑蒸發速率亦加快,使溶劑含量可較為 快速地降低。於本實施例中,當腔室內的壓力降至約0.5大氣壓以下時,溶劑含量可由原本的90%降至10%左右或更低。Step 3: reduce the pressure in the chamber. When the pressure in the chamber decreases, the evaporation rate of the solvent contained in the organic material unit 21 on the surface of the substrate 10 is also accelerated, so that the solvent content can be relatively high. Reduce quickly. In the present embodiment, when the pressure in the chamber drops below about 0.5 atm, the solvent content can be reduced from about 90% to about 10% or less.
步驟四:將已減壓處理後的基板10放置於另一腔室,並烘乾預烤基板10與各有機材料單元21,俾使各有機材料單元21的溶劑含量持續降低。本實施例中的預烤溫度約為攝氏150度左右,預烤時間約為30秒,預烤後可使溶劑含量減少至1%以下。Step 4: The substrate 10 after the pressure reduction treatment is placed in another chamber, and the pre-baked substrate 10 and each organic material unit 21 are dried, so that the solvent content of each organic material unit 21 is continuously lowered. The pre-baking temperature in this embodiment is about 150 degrees Celsius, and the pre-baking time is about 30 seconds. After pre-baking, the solvent content can be reduced to less than 1%.
步驟五:以更高的溫度烘烤基板10,使有機材料層20固化。當該有機材料層20固化以後,可重複步驟二至步驟五塗佈另一層有機材料層20,直到所需要之組成結構都塗佈堆疊完成為止。步驟六:於有機材料層20表面製作陰極層。步驟七:移除遮罩70並且封裝基板10,接著將各有機材料單元21分割開來,即可形成出複數個有機發光二極體。Step 5: Baking the substrate 10 at a higher temperature to cure the organic material layer 20. After the organic material layer 20 is cured, another layer of the organic material layer 20 may be applied by repeating steps 2 through 5 until the desired composition is coated and the stack is completed. Step 6: forming a cathode layer on the surface of the organic material layer 20. Step 7: The mask 70 is removed and the substrate 10 is packaged, and then the organic material units 21 are separated to form a plurality of organic light-emitting diodes.
經由上述較佳實施例之製法說明,不論是一次只製作單片有機發光二極體或多片有機發光二極體,當有機材料設於ITO基板,再經過減壓製程以後,有機材料所含有的溶劑含量都可以較為快速地減少。而溶劑含量快速減少時,如第二實施例之步驟二中,有機材料之流動速度即可較為緩慢,使得材料之溢流現象大幅減少。若是基板移動至另一腔室的過程中有些微的碰撞或震動,或者是遮罩移除於基板表面時,有機材料層也不會因為黏著於遮罩與基板而受到破壞。According to the manufacturing method of the above preferred embodiment, whether only a single organic light emitting diode or a plurality of organic light emitting diodes are formed at a time, when the organic material is disposed on the ITO substrate and then subjected to a decompression process, the organic material is contained. The solvent content can be reduced relatively quickly. When the solvent content is rapidly decreased, as in the second step of the second embodiment, the flow rate of the organic material can be relatively slow, so that the overflow phenomenon of the material is greatly reduced. If there is a slight collision or vibration during the movement of the substrate to another chamber, or if the mask is removed from the surface of the substrate, the organic material layer is not damaged by adhesion to the mask and the substrate.
再者,當有機材料經過減壓製程之後,材料內含有的溶劑蒸發較快,不但是可以直接乾燥固化,即使進行後續預烤的溫度也可隨之降低,預烤或是固烤的時間也可縮短。藉此,利用上述減壓製程,本創作即可達成減少有機材料層於製作過程中所產生之溢流現象、提高製程品質, 以及達成縮短製造時間,減少製造成本等目的。再如第六圖所示,係為本創作第三實施例所提供有機材料層之製造方法,其主要特點在於基板表面塗佈有機材料,並且進行減壓時同步加熱基板與有機材料,使有機材料內的溶劑揮發之後,有機材料即可呈固化狀,或是再利用預烤或固烤步驟進行固化,同樣可以達成上述創作之目的。Furthermore, when the organic material is subjected to a decompression process, the solvent contained in the material evaporates faster, not only can be directly dried and solidified, but the temperature of subsequent pre-baking can be lowered, and the time of pre-baking or solid-baking is also reduced. Can be shortened. Thereby, by using the above-mentioned decompression process, the creation can reduce the overflow phenomenon of the organic material layer in the manufacturing process and improve the process quality. And to achieve the purpose of shortening the manufacturing time and reducing the manufacturing cost. Further, as shown in the sixth embodiment, the method for manufacturing the organic material layer provided in the third embodiment of the present invention is characterized in that the surface of the substrate is coated with an organic material, and the substrate and the organic material are simultaneously heated under reduced pressure to make the organic After the solvent in the material is volatilized, the organic material can be solidified or cured by a pre-bake or solid-bake step, which can also achieve the above-mentioned creation.
雖然本創作之實施例揭露如上所述,然並非用以限定本創作,任何熟習相關技藝者,在不脫離本創作之精神和範圍內,舉凡依本創作申請範圍所述之形狀、構造、特徵及數量當可做些許之變更,因此本創作之專利保護範圍須視本說明書所附之申請專利範圍所界定者為準。Although the embodiments of the present invention are disclosed as described above, it is not intended to limit the present invention, and any person skilled in the art may, without departing from the spirit and scope of the present invention, the shapes, structures, and features described in the scope of the present application. And the quantity can be changed in a small amount, and therefore the scope of patent protection of this creation is subject to the definition of the scope of the patent application attached to this specification.
10‧‧‧基板10‧‧‧Substrate
20‧‧‧有機材料/有機材料層20‧‧‧Organic/organic layer
30‧‧‧承載基台30‧‧‧bearing abutments
40‧‧‧噴嘴40‧‧‧ nozzle
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