TWM479514U - Mask container and nip member - Google Patents

Description

Photomask container and its crimping member

The present invention belongs to the technical field of a reticle container, in particular to a reticle container and a crimping member thereof, which can reduce the contact area, thereby avoiding indentation on the surface of the reticle and reducing unnecessary scratches, and further It can improve its air tightness.

According to the characteristics of electronic products, such as light, short, high-frequency, high-efficiency, etc., and to meet the development direction of this product, the wafers of the core semiconductor components used in electronic products need to be miniaturized and highly efficient. When the wafer is miniaturized and high-performance, the wire diameter of the integrated circuit on the wafer needs to be refined. Therefore, the existing integrated circuit wire diameter has been developed from the early 0.25 micron to 90 to 45 nm, and the integrated circuit on the wafer. The success of the miniaturization of the wire diameter is mainly due to the yellow light lithography process technology in the semiconductor process, and the key component is the reticle [Reticle].

When the photomask is stored or transported, the reticle container for storage needs to have better airtightness, in addition to preventing harmful gases from entering and leaving the reticle container, and also effectively preventing the intrusion of particles to avoid fogging on the surface of the reticle. Or attach dust. In addition, it is necessary to prevent the squeegee from sliding or swaying in the container, in addition to reducing the generation of static electricity, and avoiding scratching the surface of the reticle, thereby affecting the overall yellow lithography process, so the reticle is The positioning inside the mask container is extremely It is important.

However, existing photomask containers are usually made up of an upper cover and a lower cover. The corner is provided with at least one supporting member for supporting the reticle housed in the reticle box, wherein the supporting member is substantially block-shaped, and the structure is characterized by a body and a concave holding structure, and the seat system supports the point The cover is fixed to the cover body and the lower cover body, and the recessed holding structure has a top surface and a limiting surface. When the photomask box carries a light cover and covers, the top of the recessed holding structure The holding surface can carry the reticle, and the limiting surface can be positioned, and the recessed holding structure of the upper cover supporting member and the recessed holding structure of the lower cover supporting member have an accommodating space for carrying and positioning the reticle. Since the support member needs to bear the function of bearing and positioning at the same time, when the photomask is placed thereon, the top bearing surface of the reticle needs to have a large bearing area, which may not only damage the edge of the film of the reticle, but also cause it to be easily A large indentation is generated on the surface of the mask, and the mask cannot be effectively positioned. The mask is easily scratched and static due to shaking, which affects the quality of the mask.

In addition, a conventional photomask container is attached to the upper cover and the lower cover. The corners are formed with a plurality of support members arranged in a suspended manner, and the support members are closed sheets which are respectively connected to adjacent side edges of the inner surface corners of the upper and lower covers, and are closed to the sheet body. The turn forms a gap for the corners of the hood. Although the support members can reduce the contact area, the positioning effect is still poor, and it cannot be accurately positioned in the photomask container, and the quality of the photo mask cannot be effectively improved.

In other words, existing reticle containers fail to reduce their nip area, and The reticle cannot be stably positioned in the reticle container, and the reticle container is more likely to be airtight due to deformation. How to solve the above problems is an important issue in the industry.

The reason is that the creator still faces the question of the aforementioned mask container. With the long-term experience of R&D and production of related industries, the creator has finally succeeded in developing a reticle container and its crimping parts, thereby overcoming the existing reticle container due to the support of the reticle and easy deformation. Trouble and inconvenience.

Therefore, the main purpose of the present invention is to provide a mask container having a small contact area, thereby reducing the contact area between the mask container and the mask, thereby making the mask and positioning of the mask more stable, and reducing the sloshing. Phenomenon to avoid damage to the mask.

Based on this, the present invention mainly implements the foregoing objectives and effects through the following technical means; the photomask container is configured to receive a photomask, comprising: a first cover body, a second cover body and at least one clip Pressing parts. The second cover body is selectively closably opposite to the first cover body; the crimping members are disposed on the opposite inner faces of the first and second covers corresponding to the corners of the supporting or crimping reticle, and The clamping members have a base for supporting or pressing the reticle, and the other base forms an arc convex surface corresponding to the side edge of the reticle, and the pedestal forms a slant above the most outwardly protruding high point of the arc convex surface. A recessed recess is formed in the downward direction, and a bottom of the recessed opening of the recessed recess is formed with a bearing arch that carries or compresses the upper and lower surfaces of the mask.

Therefore, through the display of the foregoing technical means, after the photomask container of the present invention is closed, the photomask is restricted by the limiting baffles of the first and second covers, so that it does not arbitrarily shake, so when it is placed When the first and second covers are on the base of the crimping members, the bearing arc edges can be extremely close to the edges of the upper and lower surfaces of the mask, and the bearing arches are in linear contact with the mask, so that the contact surfaces are actively small. And it can improve the clamping effect and effectively prevent the sway of the mask.

Moreover, the second main purpose of this creation is to provide a kind of The shape of the reticle container can reduce deformation to ensure airtightness during movement or storage of the reticle container, and effectively avoid contamination of the reticle.

Based on this, this creation is mainly based on the following technical means. The reticle container is configured to receive a reticle, and comprises: a first cover body, a second cover body and at least one crimping member. Wherein, the first cover body is formed with an outer ring flange on the surface of the opening, and the inner surface of the first cover is provided with a limiting block for supporting the inner surface and the side wall at adjacent corners, and the limiting block has It can be attached to the side stop surface of the peripheral wall surface of the reticle, and the top cover of the first cover body has a top convex pressure edge equal to the outer ring flange, so that the top limit of the limit blocking piece is pressed Forming a clamping groove between the edge and the inner surface of the outer ring flange; the second cover body is selectively closably opposite to the first cover body, and the second cover body is formed on the surface of the opening with a first cover The outer ring flange is staggered to cover the inner ring flange, the inner ring flange can be embedded in the nip groove of the first cover body, and the inner surface of the second cover is provided with a support inner surface at adjacent corners a limiting piece of the side wall, and the limiting piece has a side surface which can be attached to the peripheral wall surface of the reticle; the clamping parts are arranged on the opposite inner surface of the first and second covers corresponding to the supporting or clamping reticle In the corner.

In this way, the inner faces of the first and second covers are also divided into adjacent corners. The utility model has a limiting baffle for supporting the inner surface and the side wall of the first and second cover bodies to improve the structural strength and the bearing capacity thereof, and at the same time, the top surface of the limiting baffle of the first cover body has a second cover body capable of clamping The top convex pressing edge can avoid any deformation of the outer ring flange and the inner ring flange of the first cover and the second cover body, and the airtightness after the cover is ensured, thereby increasing the added value and improving Its economic benefits.

In order to enable your review board to further understand the composition of this creation, Features and other objects, the following is a preferred embodiment of the present invention, and will be described in detail with reference to the drawings, and can be implemented by those skilled in the art.

(10) ‧‧‧first cover

(12)‧‧‧Outer ring flange

(14) ‧ ‧ limit stop

(140)‧‧‧ side stop

(141)‧‧‧Top crown

(142)‧‧‧Clamping groove

(15)‧‧‧ ‧ ear

(20)‧‧‧Second cover

(22)‧‧‧ Inner ring flange

(24)‧‧‧Limited blanks

(240)‧‧‧ side stop

(25)‧‧‧ ‧ ear

(30)‧‧‧Clamping parts

(31)‧‧‧ Engagement column

(32) ‧ ‧ pedestal

(320)‧‧‧Tongkong

(33) ‧ ‧ joints

(330)‧‧‧ jack

(34)‧‧‧Arc convex

(35) ‧‧‧ recessed groove

(36)‧‧‧bearing arc

(37)‧‧‧Arc flange

(40) ‧‧‧fasteners

(50) ‧‧‧Photomask

Figure 1: Schematic diagram of the appearance of the reticle container.

Fig. 2 is an exploded and enlarged schematic view of the present photomask container and its crimping member, illustrating the state of each component and its relative relationship.

Fig. 3 is a top plan view showing the state in which the photomask container is closed in actual use.

Fig. 4 is a side cross-sectional view showing the state in which the photomask container is closed in actual use.

Fig. 5 is a partial cross-sectional reference view of the reticle container of the present invention when it is actually used for capping.

Fig. 6 is a partial cross-sectional reference schematic view of the present photomask container when it is actually used for capping.

The present invention is a reticle container for accommodating and storing a reticle for manufacturing a semiconductor element, and a crimping member thereof, and a specific embodiment of the reticle container and its components exemplified by the drawings, all related to Rear, left and right, top and bottom, upper and lower, and horizontal and vertical references are provided for ease of description only and are not intended to limit the creation, nor to limit its components to any position or orientation. The drawings and the dimensions specified in the specification may be varied according to the design and needs of the specific embodiments of the present invention, without departing from the scope of the invention.

For the composition of the created photomask container and its crimping member, please refer to Figures 1 and 2, which are provided by a first cover body (10) and a second cover body (20) which can be oppositely covered. The first and second covers (10, 20) are pivotally connected to one side of the first and second covers (10). 20) selectively attaching or unfolding, and the first and second covers (10, 20) are respectively provided with a clamping member (30) for supporting the corner edge of the reticle (50) with respect to each corner of the inner surface. The other side edges of the first and second covers (10, 20) different from the pivoting side edges are provided with at least one fastener (40) for the first and second covers (10, 20) to be oppositely closed. The material of the first and second covers (10, 20) can be selected from metal or plastic. The creation is made of a hard ABS plastic [styrene, acrylonitrile and butadiene emulsion). 】 is the main example.

With regard to the detailed construction of the preferred embodiment of the present invention, please refer to Figures 1, 2 and 3, wherein the first cover (10) is formed with a thin outer ring flange on the surface of the opening ( 12), and the second cover body (20) is formed with a thin inner ring flange (22) on the surface of the opening, so that the first and second covers (10, 20) are convex when the cover is closed. The rim (12) and the inner ring flange (22) may be in a staggered fit. Moreover, a limiting piece (14) is disposed on the inner surface of the first cover body (10) adjacent to each corner to support the inner surface and the side wall of the first cover body (10), and the second cover body (20) A limiting baffle (24) is also disposed at adjacent corners for supporting the inner surface and the side wall of the second cover body (20), and when the first and second covers (10, 20) are closed The equal-limit flaps (14, 24) can surround the periphery of the reticle (50). In a preferred embodiment, the limit stops (14, 24) of the corners of the first and second covers (10, 20) may be, but are not limited to, vertically disposed, and may respectively abut the reticle ( 50) corresponding to the vertical adjacent edges of the corner, and the limits The flaps (14, 24) have side stops (140, 240) that can be attached to the peripheral wall surface of the reticle (50). In addition, the top cover of the first cover (10) has a top convex pressing edge (141) which is equal to the outer ring flange (12), and the limit blocking piece (14) A clamping groove (142) is formed between the top convex pressing edge (141) and the inner surface of the outer ring flange (12), so that the first cover body (10) is closed when the first and second cover bodies (10, 20) are closed. The limit stop (14) can press the inner ring flange (22) of the second cover (20) to avoid the relative outer ring flange of the first and second covers (10, 20). The inner ring flange (22) is arbitrarily deformed to ensure airtightness after the first and second covers (10, 20) are closed. Furthermore, the first and second covers (10, 20) each have at least one pivotal pivot (15, 25) opposite to each other, so that the first and second covers (10, 20) are selectively flipped relative to each other. Open and close.

The clamping members (30) are respectively provided with an engaging post (31) on the inner surface of the first and second covers (10, 20), and the engaging post (31) can be selected from the non-circular column. Or a non-round hole jack column, the present invention uses an elliptical cylinder as a main embodiment, and a base (32) for carrying the reticle (50) is fixed on the joint post (31), the base (32) A uniform hole (320) is formed in the center, the through hole (320) can provide a large compressive elastic strain force of the base (32), and the base (32) base (32) has a corresponding first The two cover bodies (10, 20) engage the joint portion (33) of the column (31), and the joint portion (33) of the creation base (32) has a socket (330) corresponding to the joint post (31). The base (32) can be embedded on the joint post (31) without any rotation, and the other base (32) forms an arc convex surface (34) corresponding to the side edge of the light shield (50), and the base ( 32) forming a downwardly downward concave groove (35) above the most outwardly protruding high point of the arc convex surface (34), and the base (32) is open at the inner concave avoiding groove (35) The lower edge and the upper edge are formed separately There is a bearing edge (36) and an arc flange (37). When the first and second covers (10, 20) are covered by the reticle (50), the pedestals of the nips (30) are 32) The bearing arc edge (36) can support the upper and lower surfaces of the reticle (50), and the inner recessed sluice (35) can avoid the angle between the pedestal (32) and the upper and lower surfaces of the reticle (50) and the peripheral wall surface. interference. It should be particularly emphasized that the artificial bearing arc edge (36) has a special linear arc edge design, so that it has nearly substantial linear contact with the mask (50), thereby achieving the purpose of minimizing contact surface and minimizing dust particles. .

In a preferred embodiment of the present invention, the base (32) of the crimping member (30) is selected from a high hardness and wear resistant polyetheretherketone (PEEK), polyimide resin (VESPEL). One or a combination of the materials consisting of materials such as Teflon to prevent the susceptor (32) and the reticle (50) from being rubbed by contact to form dust particles. In this embodiment, by using the special material of the crimping member (30), the first and second covers (10, 20) can be used without using the special materials, which can effectively save the use of special materials. At the same time, it can prevent friction from forming dust particles and reduce costs. Thereby, the group is configured to form a mask container having a small contact area and which is not easily deformed, and a crimping member thereof.

Through the above description, the present invention is in the actual application, as disclosed in Figures 3, 4, 5 and 6, when the photomask (50) is housed in the photomask container, the first and second covers are used. (10, 20) relatively open, and the photomask (50) is placed on the base (32) of each crimping member (30) of the first cover body (10), and the lower surface edge of the photomask (50) is made It is placed on the bearing edge (36) of the base (32), and the first stop (140) of the first cover (10) is used to generate a preliminary limit.

Next, the second cover (20) is downwardly opposed to the first cover (10) Covering, so that the second cover body (20) can be clamped to the edge of the upper surface of the reticle (50) by the bearing edge (36) of the pedestal (32) of each nip member (30), so that the reticle ( 50) The fully sturdy clip is limited between the first and second covers (10, 20) of the reticle container.

Through the implementation and use instructions of the above technical means, the present invention has at least the following enhancements: First, since the first and second covers (10, 20) are closed, the photomask (50) is first. The limiting cover (14, 24) of the two covers (10, 20) is limited, so that it does not arbitrarily shake, so when it is placed on the first and second covers (10, 20) of the crimping members ( 30) on the base (32), the bearing edge (36) of the base (32) can be very close to the edge of the upper and lower surfaces of the mask (50), and the bearing edge (36) is more with the mask (50) The contact surface is positive, and the base (32) of the crimping member (30) can also use the through hole (320) to generate a large elastic strain, thereby improving the clamping effect. Therefore, the sway of the photomask (50) is effectively prevented, so that dust is not formed by friction, and static electricity is not generated, and the generation of harmful substances is greatly reduced, and the quality of the reticle (50) is improved.

Next, the base (32) of the crimping member (30) is embedded on the joint post (31) formed on the inner faces of the first and second covers (10, 20) by the joint portion (33). The seat (32) and the first and second covers (10, 20) may be selected from different materials, so that when special materials are required for special needs, such as the base (32) of the crimping member (30) can be used. High-hardness, wear-resistant polyetheretherketone (PEEK), or polyimide resin (VESPEL), or Teflon, etc., the first and second covers (10, 20) can be used for general plastics. The material is OK, so it can be The amount of special materials used in the province will greatly reduce the cost of manufacturing and increase its economic benefits.

Moreover, the inner surface of the first and second covers (10, 20) is also provided with a limit stop (14, 24) at the adjacent corners for supporting the first and second covers (10, 20). The inner surface and the side wall improve the structural strength and the bearing capacity, and at the same time, the top surface of the limiting baffle (14) of the first cover body (10) has a top convex pressing edge capable of clamping the second cover body (20) ( 141), the outer cover flange (12) and the inner ring flange (22) of the first and second covers (10, 20) can be prevented from being arbitrarily deformed to ensure airtightness after the cover.

In summary, it can be understood that this creation is a creative and excellent new creation. In addition to effectively solving the problems faced by the practitioners, the effect is greatly enhanced, and the same or similar product creation is not seen in the same technical field. Or public use, and at the same time have an improvement in efficacy, so this creation has met the requirements of "newness" and "progressiveness" of the new patent, and is applying for a new type of patent according to law.

(10) ‧‧‧first cover

(12)‧‧‧Outer ring flange

(14) ‧ ‧ limit stop

(140)‧‧‧ side stop

(141)‧‧‧Top crown

(142)‧‧‧Clamping groove

(15)‧‧‧ ‧ ear

(20)‧‧‧Second cover

(22)‧‧‧ Inner ring flange

(24)‧‧‧Limited blanks

(240)‧‧‧ side stop

(25)‧‧‧ ‧ ear

(30)‧‧‧Clamping parts

(31)‧‧‧ Engagement column

(32) ‧ ‧ pedestal

(320)‧‧‧Tongkong

(33) ‧ ‧ joints

(330)‧‧‧ jack

(34)‧‧‧Arc convex

(35) ‧‧‧ recessed groove

(36)‧‧‧bearing arc

(37)‧‧‧Arc flange

(40) ‧‧‧fasteners

Claims (20)

A reticle container for accommodating a reticle, comprising: a first cover body; a second cover body, the second cover body being selectively closably opposite to the first cover body; at least a crimping member, the crimping members are disposed at opposite corners of the first and second covers corresponding to the corners of the supporting or crimping mask, and the crimping members have a base for supporting or pressing the mask a base, the other base corresponding to the side edge of the reticle forms an arc convex surface, and the pedestal forms a diagonally downward concave groove above the most outwardly protruding high point of the arc convex surface, and the base is inside The lower edge of the recessed slot opening is formed with a bearing arch that carries or compresses the upper and lower surfaces of the mask. The reticle container of claim 1, wherein the first cover body is formed with a thin outer ring flange on the surface of the opening, and the second cover body is formed on the surface of the opening to be thinner. The inner ring flange is such that the outer ring flange and the inner ring flange can be staggered when the first and second covers are closed. The photomask container according to claim 2, wherein the inner surface of the first and second covers are respectively provided with a limiting piece for supporting the inner surface and the side wall at adjacent corners, and the limiting piece has a sticker The side cover surface of the peripheral wall of the reticle, and the top cover of the first cover body has a top convex pressure edge equal to the outer ring flange, so that the top limit flange of the limit block A nip groove is formed between the inner surface of the outer ring flange and the inner ring flange of the second cover. The reticle container of claim 1, wherein one side edge of the first and second covers respectively has at least one pivotal pivotal arm, and the first The second cover body is different from the other side edge of the pivoting side, and at least one fastener is provided for the first cover and the second cover body to be selectively buckled after being relatively closed. The photomask container according to claim 1, wherein the crimping members are provided with a non-circular engaging post on the inner surfaces of the first and second covers, and the base has a corresponding insertion and engagement. The joint of the column enables the base to be embedded on the joint post without arbitrarily rotating. The reticle container of claim 1, wherein a center of the base of the crimping member is formed with a through hole for generating a large elastic strain. The photomask container according to claim 1, wherein the base of the crimping member is selected from one of a group consisting of polyetheretherketone, polyimide resin and Teflon, or a combination thereof. . A reticle container for accommodating a reticle, comprising: a first cover body, the first cover body is formed with an outer ring flange on the surface of the opening, and the first cover body is adjacent to the inner surface Each corner is provided with a limiting baffle for supporting the inner surface and the side wall, and the limiting baffle has a side stop surface which can be attached to the peripheral wall surface of the photomask, and the limiting cover top mask of the first cover body has a The top flange of the outer ring flange has a embossing groove formed between the top convex pressing edge of the limiting piece and the inner surface of the outer ring flange; a second cover body, the second cover body Selectively facing the first cover body, and the second cover body is formed on the surface of the opening with an inner ring flange which can be interlaced with the first cover outer ring flange, the inner ring flange can be embedded A limiting piece for supporting the inner surface and the side wall is disposed in the nip groove of the first cover body, and the inner surface of the second cover is adjacent to each corner, and the limiting piece has a wall surface that can be attached to the periphery of the reticle. Side stop surface The at least one crimping member is disposed at a corner of the opposite inner surface of the first and second covers corresponding to the supporting or crimping reticle. The reticle container of claim 8, wherein one side edge of the first and second covers respectively has at least one pivotal pivotal arm, and the first and second covers are different from the pivotal side. The other side edge is provided with at least one fastener for the first and second cover bodies to be selectively buckled after being relatively closed. The reticle container of claim 8, wherein the nipple has a pedestal supporting or pressing the reticle, and the pedestal forms an arc convex surface corresponding to the side edge of the reticle, and the pedestal is An obliquely downwardly concave recess is formed above the most convex high point of the arc convex surface, and the base is formed with a bearing edge for carrying or pressing the upper and lower surfaces of the mask on the lower edge of the recessed opening . The photomask container according to claim 10, wherein the crimping members are provided with a non-circular engaging post on the inner surfaces of the first and second covers, and the base has a corresponding insertion and engagement. The joint of the column enables the base to be embedded on the joint post without arbitrarily rotating. The reticle container of claim 10, wherein a center of the base of the crimping member is formed with a through hole for generating a large elastic strain force. The photomask container according to claim 10, wherein the base of the crimping member is selected from one of a group consisting of polyetheretherketone, polyimide resin and Teflon, or a combination thereof. . The invention relates to a nip of a reticle container, which is arranged in a reticle container for supporting or clamping a reticle, and is characterized by: The clamping member has a base fixed to the reticle container, the pedestal forms an arc convex surface corresponding to the side edge of the reticle, and the pedestal is formed above the most outwardly protruding high point of the arc convex surface. An obliquely downwardly concave recess avoids the groove, and the base defines a load bearing edge for carrying or pressing the upper and lower surfaces of the reticle to the lower edge of the recessed opening. The nip of the reticle container of claim 14, wherein the nip is attached to the reticle container with a non-circular engaging post, and the pedestal has a corresponding inserting into the engaging post. The joint portion allows the base to be embedded on the joint post without arbitrarily rotating. According to the nip of the reticle container of claim 14, wherein the center of the pedestal is formed with a through hole which can generate a large elastic strain force. The nip of the reticle container of claim 14, wherein the susceptor is selected from one of a group consisting of polyetheretherketone, polyimide resin, and Teflon, or a combination thereof. A semiconductor substrate container comprising: a first cover body; a second cover body selectively closably facing the first cover body; and at least one crimping member fixed to the first cover body and/or The opposite inner surface of the second cover body is configured to carry and position at least one semiconductor substrate, and the material of the at least one crimping member is selected from the group consisting of polyetheretherketone, polyimide resin and Teflon. One or a combination thereof. A semiconductor substrate container comprising: a first cover; a second cover selectively closably facing the first cover; and At least one clamping member has a base fixed to the opposite inner surface of the first cover body or the second cover body, the base having at least one linear bearing edge for carrying and Positioning at least one semiconductor substrate and in substantial linear contact with the at least one semiconductor substrate. The semiconductor substrate container according to claim 19, wherein the susceptor is selected from one of a group consisting of polyetheretherketone, polyimide resin, and Teflon, or a combination thereof.