TWM466413U - Temperature sensing circuit with circuit abnormality self-detection function - Google Patents

Description

Temperature sensing circuit with loop abnormal self-detection

This creation is about a temperature sensing circuit with loop abnormal self-detection, especially a way to determine whether a faulty damage has occurred, so as to prevent the detection result from being wrong, and can directly replace the old one in its overall implementation. The circuit is an innovative designer of temperature sensing circuits with loop abnormal self-detection to increase practical convenience and improve reliability.

According to IC, in the production process, it can be roughly divided into:

Design: First, define the function of the product, then design the circuit, through the simulation verification [Simulation] and circuit layout [Circuit Layout], convert the circuit diagram on the enamel mask, and then use the germanium wafer as the substrate for wafer fabrication. Packaging, electrical testing;

Photomask: Integrated circuit design [IC Design] circuit, with the aid of computer-aided design system, with electron beam [E-Beam] or laser beam [Laser Beam] exposure, the circuit is imprinted on the glass substrate, this moment is printed The glass substrate of the circuit is called a mask [Mask];

Manufacture: After the reticle is completed, using the technology of lithography, using a photoresist and other chemicals as a material, a very fine circuit pattern on the reticle is layered on the enamel wafer, and then etched [Etching] technology. Part of the layer of tantalum nitride that has not been protected by photoresist is removed, leaving the required part of the circuit diagram, and then phosphorus is used as an ion source [Ion Source] to implant the entire wafer with phosphorus atoms. [Ion Implantation], then remove the photoresist [Photoresist Scrip], and then carry out the metallization process [Metallization] to make metal wires to connect the various transistors to the components;

Package: The packaging process [Packaging] is to use a plastic or ceramic package die and wiring to form an integrated circuit [Integrated Circuit, IC], the purpose of this process is to create a protective layer of the circuit produced, to avoid mechanical damage to the circuit Scratches or high temperature damage, and finally the entire integrated circuit will pull out the tripod [Pin], which is called wire bonding, as a connection with the external circuit board;

Testing: In the initial testing phase, the packaged die will be placed in various environments to test its electrical characteristics, such as power consumption, speed, voltage tolerance, etc., after testing, the IC will be graded according to its electrical characteristics. And put in different Bin [this process is called Bin Splits], and finally, according to the customer's demand specifications, take out some ICs in the corresponding Bin to do special test and burn [Burn-In], this is In the final test, the finished product will be labeled [Brand] and packaged and then delivered to the customer. Products that fail the test will be downgraded [Downgrading] or discarded.

Among them, in the IC semiconductor or industrial processing process, a heating device is required to perform the heating operation, and in the heating process of the heating device, in order to accurately control the heating state, the heating device is subjected to temperature detection; The schematic diagram of the structure and the schematic diagram of the seventh circuit shown in the prior art, the temperature detecting circuit (2) is provided with a noise filtering unit (21) at the input end, and a thermocouple amplifier is connected to the noise filtering unit (21). 22), the noise filtering component (21) of the heating device is connected to the noise filtering unit (21) of the temperature detecting circuit for noise filtering, and then transmitted to the thermocouple amplifier (22) for amplification output to output The detected temperature status.

However, although the above temperature detecting circuit can achieve the expected effect of performing temperature detection, it is also found in its practical operation that the circuit does not have any comparison and judgment design, and the thermocouple amplifier is more likely to be damaged during use. When the thermocouple amplifier is damaged, because it cannot be compared and judged, it will output an erroneous signal, affecting the detection result, and even causing loss of the IC manufacturing process, resulting in its overall structural design. There is still room for improvement.

The reason is that, in view of this, the creators have been researching and improving the existing structures and deficiencies by providing rich experience in design and development of the relevant industries for many years, and providing a temperature sensing circuit with loop abnormal self-testing in order to achieve better practicality. The purpose of value and reliability improvement.

The main purpose of the present invention is to provide a temperature sensing circuit with loop abnormal self-detection, which is mainly provided with first and second thermocouple amplifiers, respectively, for calculating and comparing the output signals of the first and second thermocouple amplifiers. Therefore, it can be judged whether the faulty damage condition occurs by comparing the output signal error values of the first and second thermocouple amplifiers, so as to prevent the detection result from being erroneous, and the overall implementation can directly replace the old one. Circuits to increase practical convenience and improve reliability.

The main purpose and effect of the temperature sensing circuit with loop abnormal self-detection are achieved by the following specific technical means:

The temperature sensing circuit is provided with a noise sensing unit, and the noise filtering unit is respectively connected with a first thermocouple amplifier and a second thermocouple amplifier, in the first and second The thermocouple amplifiers are all connected to an error calculation unit, and the error calculation unit is connected with an error range comparator, and then the output range integration unit is connected to the error range comparator, and the first and second thermocouple amplifiers are also The output signal integration unit is connected.

Another purpose and effect of the temperature sensing circuit with loop abnormal self-detection is achieved by the following specific technical means:

The temperature sensing circuit is provided with two corresponding noise filtering units at the input end, and the signal switching switch is connected to the two noise filtering units, and then the signal switching switches are respectively connected. The first thermocouple amplifier and the second thermocouple amplifier are connected to an error calculation unit, and the error calculation unit is connected with an error range comparator, and then connected to the error range comparator An output signal integration unit is provided, and the first and second thermocouple amplifiers are also connected to the output signal integration unit.

The present invention has a preferred embodiment of a temperature sensing circuit for loop abnormal self-detection, wherein the error calculating unit and the error range comparator are constructed in a microprocessor [MCU] having an analog digital converter [ADC] built therein.

The present invention has a preferred embodiment of a temperature sensing circuit for loop abnormal self-detection, wherein the error calculating unit and the error range comparator are constructed in a microprocessor [MCU], and the microprocessor [MCU] is coupled with Analog to digital converter [ADC].

The present invention has a preferred embodiment of a temperature sensing circuit for loop abnormal self-detection, wherein when the fault condition occurs, the error range comparator output error range is too large, and the output signal integration unit integrates the output exceeding the temperature range warning. The signal is known to the machine.

(1) ‧‧‧temperature sensing circuit

(11)‧‧‧ Noise Filter Unit

(111)‧‧‧Signal switch

(12)‧‧‧First thermocouple amplifier

(13)‧‧‧Second thermocouple amplifier

(14) ‧‧‧Error calculation unit

(15)‧‧‧Error Range Comparator

(16)‧‧‧Output signal integration unit

(2) ‧ ‧ temperature detection circuit

(21)‧‧‧ Noise Filter Unit

(22)‧‧‧Thermal Coupled Amplifier

The first picture: Schematic diagram of the creation

Second picture: Schematic diagram of the first embodiment of the present creation

Third figure: schematic diagram of the circuit of the first embodiment of the present creation

Figure 4: Circuit diagram of the second embodiment of the present creation

Figure 5: Circuit diagram of the third embodiment of the present creation

Figure 6: Schematic diagram of the existing architecture

Figure 7: Existing circuit schematic

In order to make the technical content, creative purpose and the effect achieved by this creation more complete and clear, please elaborate below, and please refer to the drawings and drawings:

First, please refer to the schematic diagram of the first diagram of the creation. The creation is mainly provided with a temperature sensing circuit (1). The temperature sensing circuit (1) is provided with a noise filtering unit (11) at the input end. The noise filtering unit (11) is respectively connected with a first thermocouple amplifier (12) and a second thermocouple amplifier (13), and the first and second thermocouple amplifiers (12) and (13) are connected to an error calculation. a unit (14), the error calculating unit (14) is connected to an error range comparator (15), and the error calculating unit (14) and the error range comparator (15) can be constructed with an analog digital converter built in [ADC] In the microprocessor [MCU], or the analog-to-digital converter [ADC] is used to construct the error calculation unit (14) and the error range comparator (15) microprocessor [MCU] to be able to utilize the microcomputer body The program execution error calculation is compared with the error range, and the output signal integration unit is connected to the error range comparator (15). 16), and also led to the first and second thermocouple amplifier (12), (13) an output signal of the integration unit (16) is connected.

In addition, please refer to the second embodiment of the first embodiment of the present invention and the third embodiment of the present invention. The temperature sensing circuit (1) of the present invention can also be respectively input at the input end. There are two corresponding noise filtering units (11), and a signal switching switch (111) is connected to the two noise filtering units (11), and the signal switching switch (111) is respectively connected with the first thermocouple. The amplifier (12) and the second thermocouple amplifier (13) are connected to an error calculation unit (14) in the first and second thermocouple amplifiers (12), and the error calculation unit (14) is connected. There is an error range comparator (15), and the error calculation unit (14) and the error range comparator (15) can be constructed in the microprocessor [MCU] with the analog digital converter [ADC] built in [please again Referring to the fourth circuit diagram of the second embodiment of the present invention, or by using an analog-to-digital converter [ADC], the error calculation table is constructed. (14) Microprocessor [MCU] with error range comparator (15) [please refer to the circuit diagram of the third embodiment of the present invention as shown in the fifth figure], and then the error range comparator (15) The connection is provided with an output signal integration unit (16), and the first and second thermocouple amplifiers (12), (13) are also connected to the output signal integration unit (16).

In this way, the creation of the creation is based on the temperature sensing component output signal that can be provided by the heating device of the IC processing machine. When only the output signal of the single temperature sensing component can be provided, the temperature is sensed. The component is connected to the noise filtering unit (11) of the temperature sensing circuit (1), or one of the noise filtering units (11) corresponding to the temperature sensing element and the temperature sensing circuit (1) is connected. At the same time, the signal switching switch (111) is used to switch to receive the signal transmitted by the single noise filtering unit (11), and when the two temperature sensing element output signals can be provided, the two output signals are respectively connected to the temperature sensing circuit. (1) The two corresponding noise filtering units (11) are arranged, and the signal switching switch (111) is switched to receive signals transmitted by the two noise filtering units (11), and the temperature sensing element outputs signals in the interfering After the noise filtering unit (11) performs noise filtering, the first thermocouple amplifier (12) and the second thermocouple are respectively input. The signal is amplified in the device (13), and the amplified signal is simultaneously input into the error calculation unit (14) for calculation, and the calculated error value is input to the error range comparator (15) for comparison. When the signal error value output by the first thermocouple amplifier (12) and the second thermocouple amplifier (13) is less than a preset value, it means that the first and second thermocouple amplifiers (12) and (13) are not faulty. The detected value is the correct value, and when the signal error value outputted by the first thermocouple amplifier (12) and the second thermocouple amplifier (13) is greater than a preset value, The first and second thermocouple amplifiers (12) and (13) have faults, and the values compared by the error range comparator (15) are combined with the first and second thermocouple amplifiers (12) and (13). The output signal is transmitted to the output signal integration unit (16) for integrated output. When no fault occurs, the output signal is used for subsequent correlation processing, and there is a reason When the situation occurs, the error range excessively outputted by the error range comparator (15) can be used, and the integrated output of the output signal integration unit (16) directly replaces the temperature signal, so that the warning signal exceeding the temperature range is issued to make the machine After the station end is identified, it is provided for maintenance by relevant personnel.

By the above, the composition and use of the creation structure can be seen that, compared with the existing structure, this creation mainly has first and second thermocouple amplifiers, respectively, using the first and second thermoelectrics. The output signals of the coupled amplifiers are calculated and compared, so that the output signal error values of the first and second thermocouple amplifiers can be compared to determine whether there is a fault damage condition, so as to prevent the detection result from being erroneous, and The overall implementation can directly replace the old circuit, in order to increase the practical convenience and improve the reliability.

The above-mentioned embodiments or drawings are not intended to limit the structure of the present invention, and any suitable variations or modifications of those skilled in the art should be considered as not departing from the scope of the invention.

In summary, the present embodiment can achieve the expected use efficiency, and the specific structure disclosed is not only found in similar products, nor has it been disclosed before the application, and has fully complied with the requirements and requirements of the Patent Law.爰Proposing an application for a new type of patent in accordance with the law, and pleading for a review and granting a patent, it is really sensible.

(1) ‧‧‧temperature sensing circuit

(11)‧‧‧ Noise Filter Unit

(12)‧‧‧First thermocouple amplifier

(13)‧‧‧Second thermocouple amplifier

(14) ‧‧‧Error calculation unit

(15)‧‧‧Error Range Comparator

(16)‧‧‧Output signal integration unit

Claims (5)

A temperature sensing circuit with loop abnormal self-detection, which is mainly provided with a temperature sensing circuit, wherein the temperature sensing circuit is provided with a noise filtering unit at the input end, so that the noise filtering unit is respectively connected with the first thermocouple amplifier and the first The second thermocouple amplifier is connected to an error calculation unit in the first and second thermocouple amplifiers, wherein the error calculation unit is connected with an error range comparator, and the output signal integration unit is connected to the error range comparator. The first and second thermocouple amplifiers are also connected to the output signal integration unit. A temperature sensing circuit with loop abnormal self-detection is mainly provided with a temperature sensing circuit, wherein the temperature sensing circuit is provided with two corresponding noise filtering units at the input end, and the signals are connected to the two noise filtering units. Switching the switch, and then connecting the signal switching switch to the first thermocouple amplifier and the second thermocouple amplifier respectively, wherein the first and second thermocouple amplifiers are connected to an error calculation unit, and the error calculation unit is connected with an error range The comparator is further provided with an output signal integration unit connected to the error range comparator, and the first and second thermocouple amplifiers are also connected to the output signal integration unit. The temperature sensing circuit with loop abnormal self-detection as described in claim 1 or 2, wherein the error calculating unit and the error range comparator are constructed in a microprocessor (MCU) with an analog digital converter [ADC] ]Inside. A temperature sensing circuit having a loop abnormal self-detection as described in claim 1 or 2, wherein the error calculating unit and the error range comparator are constructed in a microprocessor [MCU], and the microprocessor is [MCU] ] The link is matched with an analog digital converter [ADC]. The temperature sensing circuit with loop abnormal self-detection as described in claim 1 or 2, wherein when the fault condition occurs, the error range comparator output error range is too large, and the output signal integration unit integrates the output more than The warning signal of the temperature range is known to the machine.