TWM457723U - Sorting treatment device of silicon wafer cutting sludge - Google Patents

Description

分Processing device for wafer cutting sludge

This creation is about a sorting and processing device for 矽 wafer cutting sludge, especially for the 矽 wafer cutting sludge passing through a sorting treatment device, which can recover bismuth and strontium carbide in the sludge, and can avoid contamination. The problems caused by mud on the environment, such as load and pollution, achieve multiple benefits such as environmental protection, resource regeneration and economy.

According to the cutting oil used in the wafer manufacturing industry, it is a water-soluble cutting oil for abrasive cutting. The waste water-soluble cutting oil is discharged into the wastewater treatment plant due to the high concentration of pollution, which will increase the load on the wastewater treatment system. Influencing the quality of treated water, most factories will collect and store the waste liquid separately or entrust the waste treatment industry. Some factories use evaporation and concentration and then the external treatment method, which can concentrate the cutting oil to 1/10 of the original volume. the following.

Generally, the treatment technology for removing metal dust, grease and other impurities from cutting oil is called "filtration", but in fact it should be subdivided into two different treatment technologies: "filtration" and "separation". Waste cutting oil filtration and separation Equipment, separation technology is to use the physical properties of the separation object (such as different specific gravity) to remove impurities in the cutting oil, the filtration technology is to use the filter material to filter the solid impurities of the cutting oil, the easiest method in the separation technology, The storage tank for collecting the cutting oil is used as a sedimentation tank for solid impurities, and the processing machine discharges the cutting oil containing the powder. Before being returned to the machine without repeated flow, the static sedimentation method is used in the storage tank to precipitate the large particles of the cutting oil in the bottom of the tank, and then manually removed, or collected by using a removable filter in the storage tank. The basket is used to collect and remove the sediment.

Due to the inclusion of bubbles, oil droplets and other chemicals in the cutting oil, the sedimentation speed of the dust is slowed down. Generally, particles with a pore diameter of more than 15 microns can settle in 7 to 10 minutes, but metal dust of less than 15 microns takes longer. It can be settled or even removed by natural gravity sedimentation. Therefore, existing hydraulic separators (Hydro-cyclons), telecentric separators (Screw Decanter Centrifuge) and magnetic separators, etc., hydraulic separators use centrifugal force to make the specific gravity larger. The powder and the like are separated and removed from the cutting oil having a small specific gravity, and the swirling vortex is generated by the flow velocity when the cutting oil flows into the separator, so that the metal particles in the cutting oil are thrown to the outer edge of the device by the centrifugal force, and The vortex direction of the edge is downward, so that the metal particles are led to the bottom of the separator, and the clean cutting oil will flow from the central part of the separator to the top, because the vortex speed of the separator depends on the cutting oil inflow speed, so The faster the inflow velocity, the better the separation effect. The telecentric separator is used to separate two or more different types of dust, and also uses different specific gravity. Separating different speeds, centrifugal force, can be separated from the liquid out of the solid.

Although the inorganic sludge produced by the wafer manufacturing industry contains Si and SiC, the current domestic recycling performance is in its infancy, and almost all of them are disposed of by the removal and disposal mechanism, but the buried treatment method is easy to pollute the environment. And resources cannot be recycled.

This creation department can solve the problem that the treatment of the waste sludge of the wafer can not effectively improve the load and pollution caused by the sludge to the environment.

The purpose of this creation is to provide a sorting processing device for 矽 wafer cutting sludge, which can recover bismuth and tantalum carbide products, can be used as ceramic raw materials or secondary industries, and can avoid the load caused by muddy soil. , pollution and other issues, to achieve environmental protection, resource regeneration and economic and other benefits.

The sludge composition of the wafer cutting sludge is mainly composed of tantalum carbide and niobium. According to the hydrophobic nature of the surface of the niobium particles and the acidic pH value controlling the condensation of niobium carbide particles, the two solid components are separated by flotation. Remove the sputum from the floating ore and remove the products such as strontium carbide from the sinking ore.

The separation processing device for the wafer cutting sludge of the present invention is an adjustment tank, a dosing machine, a rough selection flotation machine, a flotation flotation machine, a sinking flotation machine, a first thickener, and a first a second concentrator, a first filter press, a second filter press, a third filter press, a fourth filter press, a first agitation tank, a second agitation tank, a third agitation tank, a fourth agitation tank, and a first The drying machine and the second dryer are configured, wherein: the adjusting tank is used for temporary storage, wafer cutting sludge slurrying and dosing; the dosing machine is connected with the adjusting tank, the dosing machine The sludge in the adjustment tank is added with a regulator, a trapping agent, a foaming agent, and water to react the surface of the cerium particles with the adjusting agent to strengthen the surface hydrophobicity, which is advantageous for trapping, and at the same time, the adjusting agent is used to control the pH value of the slurry. Condensation and sedimentation of the niobium carbide; the rough flotation machine is connected to the adjustment tank, and the sludge is sorted into a flotation mine and a sinking ore by the rough flotation machine; the flotation flotation machine is selected Connected to the rough selection flotation machine, the rough selection flotation The floating ore in the sludge in the machine is sent to the flotation flotation machine for flotation; the first concentrator is connected with the flotation flotation machine, and the first concentrator and the flotation flotation are selected A first motor is arranged between the machines, and the first motor is used to pressurize the floating ore in the flotation flotation machine to the first concentrator, and the floating syrup is concentrated by the first concentrator , the solid-liquid separation is carried out, the solid slurry is deposited at the bottom of the first concentrator, and the liquid is located above the solid slurry, and the liquid is transported into the adjustment tank by a first water conduit; the first agitation tank, And the first agitating tank is configured to stir the concentrated floating slurry; the first filter press is connected to the first agitating tank, the first filter press and the first a second motor is disposed between the stirring tanks, and the floating slurry in the first stirring tank is pressurized and sent to the first filter press by the second motor, the first filter press system is solid-liquid Separating into small particles of cerium-containing solids and filtrate, the liquid in the first filter press is from a second water conduit The second agitation tank is connected to the first filter press, and the floating slurry is refilled with water and stirred by the second agitation tank to form a flotation concentrate; the second filter press The machine is connected to the second agitating tank, and the second filter press is provided with a waste water discharge port, and the floating ore concentrate is again solid-liquid separated by the second filter press, and the waste water is discharged from the waste water discharge port. The first dryer is connected to the second filter press, the first dryer is used to dry the flotation concentrate, and the antimony product is taken out from the flotation concentrate; the sedimentation flotation machine is selected. And connecting to the rough flotation machine, conveying the sediment in the sludge in the rough flotation machine to the sinking flotation machine for flotation; the second concentrating machine is selected with the sinking Flotation machine connection, the second concentrator A third motor is disposed between the sinking and selecting flotation machine, and the third motor is used to pressurize the sinking in the sinking flotation machine to the second concentrator by the second concentrating The machine concentrates the slurry to separate the solid and liquid, the solid slurry is deposited at the bottom of the second concentrator, and the liquid is located above the solid slurry, and the liquid is transported to the adjusting tank by a third water conduit; The third agitation tank is connected to the second concentrator, the third agitation tank is for agitating the concentrated slurry; the third filter is connected to the third agitation tank, the third a fourth motor is disposed between the filter press and the third agitation tank, and the slurry in the third agitation tank is pressurized and sent to the third filter press by the fourth motor, the third pressure The filter system separates the solid liquid into large particles of cerium carbide-containing solids and filtrate, and the liquid in the third filter press is transported into the adjusting tank by a fourth water conduit; the fourth stirring tank is connected thereto The third filter press is connected, and the sinking slurry is refilled with water and stirred by the fourth stirring tank. a sedimentation concentrate; the fourth filter press is connected to the fourth agitation tank, the fourth filter press is provided with a waste water discharge port, and the sedimentation concentrate is re-solidified by the fourth filter press Separating, the waste water is discharged from the waste water discharge port; the second dryer is connected to the fourth filter press, the second dryer is used to dry the concentrate, and the carbonization is taken out from the sediment concentrate.矽 product.

The apparatus for sorting and processing the wafer cutting sludge in the present invention, wherein the adjusting agent may be a mixed acid of hydrofluoric acid or hydrochloric acid or sulfuric acid, and an appropriate amount is added to adjust the pH to 2-6, and the collecting agent is a neutral trapping agent. The amount of addition is preferably 1~5kg/t ore, the foaming agent is turpentine, the addition amount is 0.1~0.5kg/t ore, and the amount of water added is depending on the slurry. The concentration of the slurry is preferably 10 to 30% depending on the concentration.

The apparatus for sorting and processing a wafer cutting sludge according to the present invention, wherein the slurry in the first concentrator and the second concentrator contains a flotation agent, wherein the first water conduit and the third water conduit The water in the first concentrator and the second concentrator is respectively input into the adjustment tank, and the water in the first filter press and the third filter press also contains a medicament, and the second The water conduit and the fourth water conduit respectively input the water in the first filter press and the third filter press into the adjustment tank, and can be used as circulating water, thereby saving medicine and water.

1‧‧‧Adjustment slot

2‧‧‧Dosing machine

3‧‧‧Rough selection flotation machine

40‧‧‧Floating mine flotation machine

41‧‧‧First Concentrator

42‧‧‧First Stirring Tank

43‧‧‧First filter press

44‧‧‧Second agitation tank

45‧‧‧Second filter press

450‧‧‧Wastewater discharge

46‧‧‧First dryer

50‧‧‧Sink mining flotation machine

51‧‧‧Second thickener

52‧‧‧ third stirring tank

53‧‧‧ Third filter press

54‧‧‧fourth stirring tank

55‧‧‧Four filter press

550‧‧‧Wastewater discharge

56‧‧‧Second dryer

60‧‧‧First motor

61‧‧‧second motor

62‧‧‧ Third motor

63‧‧‧fourth motor

70‧‧‧First water conduit

71‧‧‧Second water conduit

72‧‧‧ Third water conduit

73‧‧‧fourth water conduit

The first figure is a schematic diagram of the configuration of the processing device of the present embodiment.

The embodiment of the separation processing device for the wafer cutting sludge of the present invention is shown in the first figure, including: adjustment tank 1, dosing machine 2, rough selection flotation machine 3, flotation flotation machine 40. The sedimentation flotation machine 50, the first concentrator 41, the second concentrator 51, the first filter press 43, the second filter press 45, the third filter press 53, and the fourth filter press 55, The first agitation tank 42, the second agitation tank 44, the third agitation tank 52, the fourth agitation tank 54, the first dryer 46, and the second dryer 56 are configured, wherein the adjustment tank 1 is temporarily stored. The wafer cutting sludge is used for slurrying and dosing; the dosing machine 2 is connected to the adjusting tank 1, and the dosing machine 2 is added with a small amount of adjusting agent and trapping to the sludge in the adjusting tank 1. Agent, foaming agent, water, make the surface of the cerium particles react with the modifier, strengthen the surface hydrophobicity, which is conducive to trapping, and use the adjusting agent to control the pH value of the sludge (pulp) to 2~6, which is conducive to the enthalpy of carbonization Settling, the adjusting agent may be hydrofluoric acid or hydrochloric acid or sulfuric acid mixed acid, and the appropriate amount is added to adjust the pH. The amount of the trapping agent is preferably 1~5kg/t ore, and the foaming agent is added in an amount of 0.1~0.5kg/t ore. The amount of water added depends on the concentration of the slurry, and the concentration of the slurry is preferably 10 to 30%; the rough selection flotation machine 3 is connected to the adjustment tank 1, and the sludge is obtained by the coarse flotation machine 3 Dividing into flotation and sinking; the flotation flotation machine 40 is connected to the rough flotation machine 3, and the floating ore in the sludge in the rough flotation machine 3 is transported to the float The flotation machine 40 is floated in the flotation machine 40; the first concentrator 41 is connected to the flotation flotation machine 40, and the first concentrator 41 and the flotation flotation machine 40 are provided with a first The motor 60 is configured to pressurize the floating ore in the floating ore flotation machine 40 into the first thickener 41, and the first thickener 41 concentrates the floating slurry to make it Solid-liquid separation, the solid slurry is deposited at the bottom of the first concentrator 41, and the liquid is located above the solid slurry, and the liquid is delivered to the adjustment tank 1 by a first water conduit 70. The slurry in the first concentrator 41 contains a flotation agent, which can be used as circulating water to save chemicals and water. The first agitation tank 42 is connected to the first concentrator 41, and the first agitation tank 42 is connected. The first floating filter 43 is connected to the first agitating tank 42. A second motor 61 is disposed between the first filter press 43 and the first agitating tank 42. The floating slurry in the first agitation tank 42 is pressurized and sent to the first filter press 43 by the second motor 61. The first filter press 43 separates the solid-liquid into small particles. The solid and the filtrate, the liquid in the first filter press 43 is transported by a second water conduit 71 The slurry in the first filter press 43 also contains a flotation agent, which can be used as circulating water to save chemicals and water; the second agitation tank 44 is connected to the first pressure. The filter 43 is connected, and the floating slurry is refilled with water and stirred by the second stirring tank 44 to form a floating ore concentrate; the second filter press 45 is connected to the second stirring tank 44, and the second pressure is connected. The filter machine 45 is provided with a waste water discharge port 450, and the floating ore concentrate is again solid-liquid separated by the second filter press 45, and the waste water is discharged from the waste water discharge port 450; the first dryer 46 is connected thereto. The second filter press 45 is connected, the first dryer 46 is used to dry the flotation concentrate, and the antimony product is taken out from the flotation concentrate; the sedimentation flotation machine 50 is connected to the rough flotation The machine 3 is connected, and the sediment in the sludge in the rough flotation machine 3 is sent to the flotation flotation machine 50 for flotation; the second concentrator 51 is connected to the sediment flotation machine 50. Connected, a second motor 62 is disposed between the second concentrator 51 and the sinking selective flotation machine 50, and the third motor 62 is used in the sinking flotation machine 50. The sediment is pressurized and sent to the second concentrator 51, and the slurry is concentrated by the second concentrator 51 to be solid-liquid separated, and the solid slurry is deposited at the bottom of the second concentrator 51, the liquid Then, it is located above the solid slurry, and the liquid is transported to the adjusting tank 1 by a third water conduit 72. The slurry in the second thickener 51 contains a flotation agent, which can be used as circulating water to save the medicament and Water is used; the third agitation tank 52 is connected to the second concentrator 51 for agitating the concentrated slurry; the third filter 53 is connected to the third agitator a slot 52 is connected, and a fourth motor 63 is disposed between the third filter press 53 and the third agitating tank 52. The motor 63 pressurizes the slurry in the third agitation tank 52 to the third filter press 53, and the third filter press 53 separates the solid-liquid into large particles of the ruthenium carbide-containing solid and the filtrate. The liquid in the third filter press 53 is sent to the adjusting tank 1 by a fourth water conduit 73. The fourth stirring tank 54 is connected to the second filter press 53 by the fourth stirring. The tank 54 refills and sinks the sinking slurry to form a sinking concentrate; the fourth filter press 55 is connected to the fourth stirring tank 54, and the fourth filter press 55 is provided with a waste water discharge port 550. The sedimentation concentrate is again solid-liquid separated by the fourth filter press 55, and the waste water is discharged from the waste water discharge port 550; the second dryer 56 is connected to the fourth filter press 55, the second The dryer 56 is used to dry the concentrate, and the tantalum carbide product is taken out from the sinking concentrate.

The present invention uses the above-mentioned sorting processing device to feed the 矽 wafer cutting sludge into the adjusting tank 1, adjust the pulp to make the pulp reach better conditions, and then use the flotation to divide the slurry into floating ore and sinking, floating The mine and the sinking mine will then be re-floated separately into the flotation machine. The selection can be gradually improved by using multiple selections. The flotation and sedimentation can be gradually purified by multiple selections. The floating ore can obtain 99% of the grade, and the sinking can be obtained. Two products with 99% grade of tantalum carbide can be used as ceramic raw materials and secondary industry.

In summary, the present invention has achieved the intended use and effect, and is more desirable and practical than the prior art. However, the above embodiments are only specifically described for the preferred embodiment of the present invention. This embodiment is not intended to limit the scope of the patent application of the present invention, and other features not disclosed in the present disclosure. Equivalent changes and modifications made under the means of surgery shall be included in the scope of the patent application covered by this creation.

1‧‧‧Adjustment slot

2‧‧‧Dosing machine

3‧‧‧Rough selection flotation machine

40‧‧‧Floating mine flotation machine

41‧‧‧First Concentrator

42‧‧‧First Stirring Tank

43‧‧‧First filter press

44‧‧‧Second agitation tank

45‧‧‧Second filter press

450‧‧‧Wastewater discharge

46‧‧‧First dryer

50‧‧‧Sink mining flotation machine

51‧‧‧Second thickener

52‧‧‧ third stirring tank

53‧‧‧ Third filter press

54‧‧‧fourth stirring tank

55‧‧‧Four filter press

550‧‧‧Wastewater discharge

56‧‧‧Second dryer

60‧‧‧First motor

61‧‧‧second motor

62‧‧‧ Third motor

63‧‧‧fourth motor

70‧‧‧First water conduit

71‧‧‧Second water conduit

72‧‧‧ Third water conduit

73‧‧‧fourth water conduit

Claims (6)

The utility model relates to a sorting and processing device for a silicon wafer cutting sludge, comprising: an adjusting tank, a dosing machine, a roughing flotation machine, a flotation flotation machine, a sedimentation flotation machine, a first thickener, a second a concentrator, a first filter press, a second filter press, a third filter press, a fourth filter press, a first agitation tank, a second agitation tank, a third agitation tank, a fourth agitation tank, and a first drying The machine and the second dryer are configured, wherein: the adjusting tank is used for temporary storage, wafer cutting sludge slurrying and dosing; the dosing machine is connected with the adjusting tank; the rough selection flotation The machine is connected to the adjusting tank, and the sludge is sorted into floating ore and sediment by the roughing flotation machine; the flotation flotation machine is connected with the rough flotation machine, The flotation in the sludge in the rough flotation machine is sent to the flotation flotation machine for flotation; the first concentrator is connected to the flotation flotation machine, the first concentrator and the A first motor is disposed between the flotation flotation machine, and the first motor is pressurized to transport the floating ore in the flotation flotation machine to the first concentrator; a first agitation tank is connected to the first concentrator, the first agitation tank is configured to stir the concentrated pulverized slurry; the first filter press is connected to the first agitation tank, the first pressure a second motor is disposed between the filter and the first agitation tank, and the floating slurry in the first agitation tank is pressurized and sent to the first filter press by the second motor, the first filter press The machine separates the solid liquid into small particles of cerium-containing solids and filtrate; the second stirring tank is connected to the first filter press by the second stirring tank The floating slurry is refilled with water and stirred to form a floating ore concentrate; the second filter press is connected to the second agitating tank, and the second filter press is provided with a waste water discharge port, by the second pressure filter The machine re-solidifies the flotation concentrate, and the waste water is discharged from the waste water discharge port; the first dryer is connected to the second filter press, and the first dryer is used for the flotation concentrate Drying, removing the antimony product from the flotation concentrate; the sedimentation flotation machine is connected with the rough flotation machine, and the sediment in the sludge in the rough flotation machine is transported to the sediment selection Flotation is carried out in the flotation machine; the second concentrator is connected to the sinking flotation machine, and a third motor is arranged between the second concentrator and the sinking flotation machine, the third motor Cooling the sediment in the sedimentation flotation machine to the second concentrator; the third agitation tank is connected to the second concentrator, and the third agitation tank is for concentrating The slurry is stirred; the third filter is connected to the third agitation tank, and the third filter press and the third agitation tank a fourth motor is provided, and the slurry in the third agitation tank is pressurized and sent to the third filter press by the fourth motor, and the third filter press separates the solid liquid into large particles. a solid solution containing ruthenium carbide and a filtrate; the fourth agitation tank is connected to the third filter press, and the slurry is refilled with water and stirred by the fourth agitation tank to form a sinking concentrate; the fourth pressure filter The machine is connected to the fourth agitation tank, and the fourth filter press is provided with a waste water discharge port, and the sedimentation concentrate is again solid-liquid separated by the fourth filter press, and the waste water is discharged from the waste water discharge port. The second dryer is connected to the fourth filter press, and the second dryer is used to dry the concentrate, and the tantalum carbide product is taken out from the sinking concentrate. The apparatus for sorting and processing a wafer cutting sludge according to the first aspect of the invention, wherein the dosing machine is added to the sludge in the adjusting tank by adding a adjusting agent, a collecting agent, a foaming agent, and water. The surface of the cerium particles is reacted with the adjusting agent to strengthen the surface hydrophobicity, which is favorable for the collection, and the adjusting agent is used to control the pH value of the slurry, which is beneficial to the coagulation and settlement of the cerium carbide. The apparatus for sorting and processing a wafer-cutting sludge according to the first aspect of the invention, wherein the first concentrator is provided with a first water conduit, and the first water conduit is in the first concentrator The liquid is delivered back into the adjustment tank. The apparatus for sorting and processing a wafer-cutting sludge according to the first aspect of the invention, wherein the first filter press is provided with a second water conduit, the second water conduit is the first filter press The liquid inside is transported back into the adjustment tank. The apparatus for sorting and processing a wafer-cutting sludge according to the first aspect of the invention, wherein the second concentrator is provided with a third water conduit, wherein the third water conduit is in the second concentrator The liquid is delivered back into the adjustment tank. The apparatus for sorting and processing a wafer-cutting sludge according to the first aspect of the invention, wherein the third filter press is provided with a fourth water conduit, the fourth water conduit is the third filter press The liquid inside is transported back into the adjustment tank.