M443167 五、新型說明： 【#型所屬之技術領域】 特別是指一種具有同 本新型是有關於一種觀測系統 軸燈源與線性燈源的觀測系統。 【先前技術】 影像檢測設備或光學顯微鏡且 ^ ^ ^ 兄 >、有一觀測系統，該觀测 系統會因所欲觀察的待測物的特性M443167 V. New description: 【#-type technology field】 Especially refers to an observation system with an observation system shaft light source and linear light source. [Prior Art] An image detecting device or an optical microscope and ^ ^ ^ brother > has an observation system that is responsive to the characteristics of the object to be observed
寸注，而採用不同的照明I 置。 • ㈣1所示，-種供觀測-待測物91的觀測系統92， 包含位於該待測物91的一侧的—同轴燈源93、一線性燈源 94、一半穿反透鏡95及一觀測單元96。 該同軸燈源93為面光源，具有—發光表面们及—與該 待測物91的一待測平面T2平行的第一光學軸Mi ，該半穿 反透鏡95與該發光表面Tl3M5度，且炎角開口朝向該待測 平面T2。一併參閲圖2，該同軸燈源93發出的光線先經該 ^ ' 半穿反透鏡95反射至該待測物91，並自該待測物91反射後 再透射經該半穿反透鏡95而到達該觀測單元％。 該線性燈源94具有一通過該待測物91的第二光學軸 M2 ，該第二光學軸M2與一通過該待測物91且垂直該待 測平面T2的法線夾一入射角δΐ。一併參閱圖3，該線性燈 ' 源94發出的光線先透射經該半穿反透鏡95而照射該待測物 91，並自該待測物91反射後再透射經該半穿反透鏡95而到 達該觀測單元96。該觀測單元96例如是一影像擷取裝置， 其朝向該待測物91且沿一通過該待測物91且平行於該法線 3 M443167 的第三光學軸M3取像。 補充說明的是，該同轴燈源93配合該半穿反透鏡95提 供了與該第三光學轴M3平行的照明，對於空焊（missing solder )類型的缺點能夠有比其他類型光源更好的檢測效果 。線性燈源94則是可以進行一般性的檢測。如此，使用者 可藉由選擇使用該同軸燈源93或該線性燈源94發出光線， 供該觀測單元96進行不同的觀測》 然而，長期以來，使用如上述觀測系統92的設計中（ 例如台灣專利公告號552413以及台灣專利公開號201024711 )’在使用線性燈源94時’由於該觀測單元96的第三光學 軸M3與該待測平面T2的法線平行，也就是夾角為零度， 但線性燈源94直接反射的光線的行進方向是與待測平面Τ2 的法線夾一與入射角δΐ相同的非零的反射角δ2，因此直接 反射的光線無法進入該觀測單元96，而使得該觀測單元％ 只旎使用非直接反射光線成像的暗視野來觀測。 【新型内容】 因此本新型之目的’即在提供一種使用同轴燈源及 線性燈源時均可以明視野觀測的觀測系統。 ;疋本新型觀測系統，適用於觀測一待測物，並包 含位於該待測物的—側的一同軸燈源一線性燈源、一半 穿反透鏡及一觀測單元。 該同軸燈源為面光源， 物的一待測平面平行的第一 出光線。 包括一發光表面及一與該待測 光學軸，並沿該第一光學軸發 4 •該線性燈源包括一通過該待測物的第二光學軸，該第 -光學轴與-通㈣待測物且垂直該㈣平面的 入射角。 - -- 該半穿反透鏡與該發光表面失45度且夫角開口朝向 該待測平面。 該觀測單元朝向該待測物且沿一第三光學轴取像該 第三光學㈣過該待測物並與該法線夾—與該人射角大小 相同的反射角。該同軸燈源發出的光㈣經該半穿反透鏡 反射至該待測物，it自該待測物反射後再透射經該半穿反 透鏡而到達該觀測單元。該線性燈源沿該第二光學軸發出 光線，該光線先透射經該半穿反透鏡而到達該待測物，並 自該待測物反射後再透射經該半穿反透鏡而到達該觀測單 元0 較佳地’ §亥觀測單元6取像的第三光學軸L3與該法線 L4的夾角小於等於1〇度。 較佳地，還包括一與該同軸燈源及該線性燈源電連接 的控制器，切換該二燈源發出光線。 本新型之功效在於：在使用該線性燈源時，該線性燈 源的光線直接反射至該觀測單元而使該觀測單元以明視野 觀測。在使用該同轴燈源時，由於由該發光表面發出的光 線的發散度較高，故在其照射範圍内包含著較多不同角度 的光線，因此該觀測單元亦能以明視野觀測。 【實施方式】 有關本新型之前述及其他技術内容、特點與功效，在 M443167 以下配合參考圖式之一個較佳實施例的詳細說明中將可 清楚地呈現。 參閱圖4及圖5，本新型觀測系統2之—較佳實施例 ，適用於觀測一待測物丨，並包含位於該待測物丨的一側 的一同轴燈源3、一線性燈源4、一半穿反透鏡5、一觀 測單元6及一控制器7。 該同轴燈源3為面光源，包括一發光表面幻及一與該 待測物1的一待測平面S2平行的第一光學軸u，並沿該第 一光學軸L1發出光線。 該線性燈源4包括一通過該待測物1的第二光學軸L2 ’該第一光學軸L2與一通過該待測物1且垂直該待測平面 S2的法線L4夾一入射角Θ1。 該半穿反透鏡5與該發光表面si夾45度，且夾角開口 朝向該待測平面S2。 該觀測早元6朝向該待測物1且沿一第三光學轴υ取 像。該第二光學軸L3通過該待測物1並與該法線夾一與 該入射角Θ1大小相同的反射角Θ2。 該控制器7與該同軸燈源3及該線性燈源4電連接， 切換該二燈源發出光線》 一併參閱圖6，該同軸燈源3發出的光線先經該半穿 反透鏡5反射至該待測物1，並自該待測物1反射後再透 射經該半穿反透鏡5而到達該觀測單元6。由於由該發光 表面S1發出的光線的發散度較高，故在其照射範圍内包含 著較多不同角度的光線’因此該觀測單元6亦能以明視野 6 觀測。 一併參閱圖7，該線性燈源4沿該第二光學軸L2發出 光線’該光線先透射經該半穿反透鏡5而到達該待測物1 ’並自該待測物1反射後再透射經該半穿反透鏡5而到達 该觀測單元6，而使該觀測單元6以明視野觀測。 使用暗視野時，由於大多只有被待測平面S2漫射的光 線進入該觀測單元6，直接反射的光線並未進入，因此待 測平面S2的大部分範圍亮度較低，而缺陷等不平整的易漫 射的部分雖亮度較高可被識別，但是一些較平整的異色缺 陷，漫射的光線本就較少，在與該待測平面S2的亮度對比 不足的情況下，難以被識別，此一情況較不利人員的檢測 。使用明視野時，待測平面S2的大部分範圍的反射光線均 進入該觀測單元6而亮度較高，除了缺陷等不平整的易漫 射的部分的反射光較少進入該觀測單元6而亮度較低易被 識別以外，較平整的異色缺陷於亮度較高的待測平面幻上 ，與該待測平面S2的亮度對比較大，相對容易辨別是否有 缺陷’有利於人員檢測。 實驗結果顯示，觀測單元6取像的第三光學軸u與該 法線的夹角以10度以内為宜，如此觀測單元6即能以= 視野觀測，因此只需線性燈源4的第一光學軸以配合與該 法線L4央相同的10度以内的角度，即可使該觀測單元6在 使用該同軸燈源3及該線性燈源4時均能以明視野觀測。 綜上所述，在使用該線性燈源4時，該線性燈源々的 光線直接反射至該觀測單元6而使該_單以以明視野 M443167 觀測。在使用該同軸燈源3時，由於由該發光表面si發出 的光線的發散度較高’故在其照射範圍内包含著較多不同 角度的光線，因此該觀測單元6亦能以明視野觀測，故確 實能達成本新型之目的。 惟以上所述者’僅為本新型之較佳實施例而已，當不 能以此限定本新型實施之範圍，即大凡依本新型申請專利 範圍及新型說明内容所作之簡單的等效變化與修飾，皆仍 屬本新型專利涵蓋之範圍内。 【圖式簡單說明】 圖1是一系統配置示意圖，說明先前技術的一種觀測 系統； 圖2是一光路示意圖，說明該觀測系統使用一同轴燈 源； 圖3是一光路示意圖’說明該觀測系統使用一線性燈 源； 圖4是一系統配置示意圖，說明本新型觀測系統的一 較佳實施例； 圖5是一系統方塊圖，說明該實施例的一同軸燈源、 —線性燈源及一控制器； 圖ό是一光路示意圖，說明該實施例使用該同軸燈源 :及 圖7是一光路示意圖，說明該實施例使用該線性燈源 M443167 【主要元件符號說明】Inch, and use different lighting I. • (4)1, an observation system 92 for observation-test object 91, including a coaxial light source 93, a linear light source 94, a half-transflecting lens 95, and a side on the side of the object to be tested 91. Observation unit 96. The coaxial light source 93 is a surface light source having a light-emitting surface and a first optical axis Mi parallel to a plane T2 to be tested of the object to be tested 91, the half-transflecting lens 95 and the light-emitting surface Tl3M5 degrees, and The flaming corner opening faces the plane T2 to be measured. Referring to FIG. 2, the light emitted by the coaxial light source 93 is first reflected by the semi-transflective lens 95 to the object to be tested 91, and is reflected from the object to be tested 91 and then transmitted through the semi-transmissive lens. 95% of the observation unit is reached. The linear light source 94 has a second optical axis M2 passing through the object to be tested 91. The second optical axis M2 is incident with an incident angle δΐ passing through the object to be tested 91 and perpendicular to the normal to the plane T2 to be measured. Referring to FIG. 3, the light emitted by the linear lamp 'source 94 is first transmitted through the semi-transmissive lens 95 to illuminate the object to be tested 91, and is reflected from the object to be tested 91 and then transmitted through the transflective lens 95. The observation unit 96 is reached. The observation unit 96 is, for example, an image capturing device that faces the object to be tested 91 and takes an image along a third optical axis M3 that passes through the object to be tested 91 and is parallel to the normal line 3 M443167. It is additionally noted that the coaxial light source 93 cooperates with the semi-transmissive lens 95 to provide illumination parallel to the third optical axis M3, which can be better than other types of light sources for the disadvantages of the type of missing solder. Detect the effect. The linear light source 94 is capable of general detection. Thus, the user can choose to use the coaxial light source 93 or the linear light source 94 to emit light for the observation unit 96 to perform different observations. However, for a long time, the design of the observation system 92 as described above has been used (for example, Taiwan). Patent Publication No. 552413 and Taiwan Patent Publication No. 201024711) 'When a linear light source 94 is used', since the third optical axis M3 of the observation unit 96 is parallel to the normal to the plane T2 to be measured, that is, the angle is zero degrees, but linear The direction of travel of the light directly reflected by the light source 94 is the same as the normal angle of the plane Τ2 to be measured, and the non-zero reflection angle δ2 of the incident angle δΐ, so that the directly reflected light cannot enter the observation unit 96, so that the observation Unit % is only observed using dark fields of non-direct reflected light imaging. [New content] Therefore, the object of the present invention is to provide an observation system capable of observing a bright field when using a coaxial light source and a linear light source. The new observing system is suitable for observing a test object, and comprises a coaxial light source, a linear light source, a semi-transparent lens and an observation unit on the side of the object to be tested. The coaxial light source is a surface light source, and a first light output of the object parallel to the plane to be measured. Included as a light emitting surface and an optical axis to be tested, and along the first optical axis 4 • the linear light source includes a second optical axis passing through the object to be tested, the first optical axis and the through (four) Measure the object and perpendicular to the angle of incidence of the (four) plane. - - The semi-transmissive lens loses 45 degrees from the illuminating surface and the horn opening faces the plane to be measured. The observation unit faces the object to be tested and takes a third optical axis along the third optical axis to pass the object to be tested and is clamped with the normal line to the same angle of reflection as the angle of the person. The light (4) emitted by the coaxial light source is reflected by the semi-transmissive lens to the object to be tested, and is reflected from the object to be tested and then transmitted through the semi-transmissive lens to reach the observation unit. The linear light source emits light along the second optical axis, and the light first passes through the semi-transmissive lens to reach the object to be tested, and is reflected from the object to be tested and then transmitted through the semi-transmissive lens to reach the observation. Preferably, the angle 0 of the third optical axis L3 taken by the unit 0 of the observation unit 6 and the normal line L4 is less than or equal to 1 degree. Preferably, a controller is further connected to the coaxial light source and the linear light source to switch the two light sources to emit light. The effect of the novel is that when the linear light source is used, the light of the linear light source is directly reflected to the observation unit and the observation unit is observed in a bright field. When the coaxial light source is used, since the light emitted from the light-emitting surface has a high degree of divergence, light having a plurality of different angles is included in the illumination range, so that the observation unit can also observe the bright field. [Embodiment] The foregoing and other technical contents, features, and advantages of the present invention will be apparent from the following detailed description of a preferred embodiment of the invention. Referring to FIG. 4 and FIG. 5, a preferred embodiment of the present observation system 2 is adapted to observe a sample to be tested, and includes a coaxial light source 3 and a linear lamp on one side of the object to be tested. The source 4, half penetrates the counter lens 5, an observation unit 6, and a controller 7. The coaxial light source 3 is a surface light source comprising a light emitting surface imagining a first optical axis u parallel to a plane S2 to be measured of the object 1 to be tested, and emitting light along the first optical axis L1. The linear light source 4 includes a second optical axis L2 ′ passing through the object 1 to be tested. The first optical axis L2 and an ordinary angle L4 passing through the object 1 to be tested and perpendicular to the plane S2 to be measured are incident angle Θ1. . The semi-transmissive lens 5 is sandwiched by the light-emitting surface si by 45 degrees, and the angled opening faces the plane S2 to be measured. The observation early element 6 faces the object 1 and captures an image along a third optical axis. The second optical axis L3 passes through the object 1 to be tested and has a reflection angle Θ2 of the same magnitude as the incident angle Θ1 with the normal. The controller 7 is electrically connected to the coaxial light source 3 and the linear light source 4, and switches the two light sources to emit light. Referring to FIG. 6, the light emitted by the coaxial light source 3 is first reflected by the half-reflecting lens 5. The object to be tested 1 is reflected from the object 1 and then transmitted through the transflective lens 5 to reach the observation unit 6. Since the light emitted from the light-emitting surface S1 has a high degree of divergence, a plurality of light rays of different angles are included in the illumination range. Therefore, the observation unit 6 can also observe the bright field 6 . Referring to FIG. 7, the linear light source 4 emits light along the second optical axis L2. The light first passes through the semi-transmissive lens 5 to reach the object to be tested 1' and is reflected from the object to be tested 1 and then The observation unit 6 is transmitted through the semi-transmissive lens 5 to the observation unit 6, and the observation unit 6 is observed in a bright field. When the dark field is used, since most of the light diffused by the plane S2 to be measured enters the observation unit 6, the directly reflected light does not enter, so most of the range of the plane S2 to be measured is low in brightness, and the defects are uneven. Although the diffuse portion can be recognized with high brightness, some flat-colored heterochromatic defects have less diffused light, and it is difficult to be recognized when the contrast with the brightness of the plane S2 to be tested is insufficient. A situation where the detection of less favorable personnel. When the bright field is used, most of the reflected light of the plane S2 to be measured enters the observation unit 6 and the brightness is high, and the reflected light of the uneven portion other than the unevenness such as defects enters the observation unit 6 less. In addition to the lower recognition, the flatness of the heterochromatic defect is higher on the brightness of the plane to be tested, and the brightness of the plane S2 to be tested is relatively large, and it is relatively easy to distinguish whether there is a defect, which is advantageous for personnel detection. The experimental results show that the angle between the third optical axis u and the normal line taken by the observation unit 6 is preferably within 10 degrees, so that the observation unit 6 can be observed with the field of view, so only the first of the linear light source 4 is needed. The optical axis can be observed at a bright field by using the coaxial light source 3 and the linear light source 4 when the optical axis is at an angle within 10 degrees of the normal line L4. In summary, when the linear light source 4 is used, the light of the linear light source 直接 is directly reflected to the observation unit 6 so that the _ single is observed in the bright field M443167. When the coaxial light source 3 is used, since the light emitted from the light-emitting surface si has a high degree of divergence, the light having a plurality of different angles is included in the illumination range, so that the observation unit 6 can also observe the bright field. Therefore, it is indeed possible to achieve the purpose of this new type. However, the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, that is, the simple equivalent changes and modifications made by the novel application scope and the novel description. All remain within the scope of this new patent. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic diagram of a system configuration illustrating an observation system of the prior art; FIG. 2 is a schematic diagram of an optical path illustrating the use of a coaxial light source; FIG. 3 is a schematic diagram of an optical path illustrating the observation The system uses a linear light source; FIG. 4 is a schematic diagram of a system configuration, illustrating a preferred embodiment of the present invention; FIG. 5 is a system block diagram illustrating a coaxial light source, a linear light source, and A controller is a schematic diagram of an optical path, which illustrates the use of the coaxial light source in this embodiment: and FIG. 7 is a schematic diagram of an optical path illustrating the use of the linear light source M443167 in this embodiment.
1 ..........待測物 2 ..........觀測系統 3 ..........同軸燈源 4 ..........線性燈源 5 ..........半穿反透鏡 6 ..........觀測單元 7 ..........控制器 Θ1.........入射角 Θ2.........反射角 51 .........發光表面 52 .........待測平面 L1 ........第一光學轴 L2 ........第二光學軸 L3 ........第三光學軸 L4 ........法線1 ..........DST 2 ..........Observation system 3 .......... Coaxial light source 4 ........ .. linear light source 5 .......... semi-transmissive lens 6 .......... observation unit 7 .......... controller Θ 1... ... incident angle Θ 2 ......... reflection angle 51 ... ... light-emitting surface 52 ... ... to be measured plane L1 .... ....first optical axis L2 ........second optical axis L3 ........third optical axis L4 ........normal