五、新型說明： 【新型所屬之技術領域】 [0001] 本創作係有關於一種應用在半導體製程的設備，特別是 一種兼具原料反應與產物分離之二合一反應與熔融設備 〇 【先前技術】 [0002] 習知半導體製程技術中，所需之最終反應生成物，往往 需要經過兩站之設備得以產出，分別是反應設備及分離 設備。因此需將各別反應原料先送至第一站之反應設備 中混合並進行化學反應後，將產生一初始反應生成物， 且尚需待上述之初始反應生成物冷卻。之後，再將冷卻 後之初始反應生成物送至第二站之分離設備中進行高溫 製程，才可得到所需之最終反應生成物。 [0003] 然，上述習知之半導體製程技術，在得到所需之最终反 應生成物方面，有以下缺點： [0004] 1. 需要分別購置反應設備及分離設備，將使得購買設 備成本增加。 2. 需要經過反應設備及分離設備，將使得製程的時間 增加。 3. 在反應設備產生初始生成物之後，仍需使其冷卻， 之後又再送至分離設備中加熱，以產生最終反應生 成物，亦浪費使其冷卻之能源。 [0005] 因此，若能發明一種設備可解決上述之問題，實為業界 所需。 表單编號A0101 第3頁/共13頁 M429171 【新型内容】 [0006] 為了解決上述先前技術不盡理想之處，本創作提供一種 二合一反應與熔融設備，主要包含有第一容器、第二容 器及加熱裝置。其中，第一容器的内部形成有第一腔體 ，第一容器的底部具有第一出口。第二容器設置於第一 容器的第一腔體内，且第二容器的體積小於第一腔體， 使第二容器與第一腔體之間形成間隙，同時，第二容器 之側壁上具有複數個透孔，且在第二容器底部具有第二 出口，第二容器的内部具有第二腔體，可容置第一反應 原料與第二反應原料。此外，加熱裝置係設置在第一容 器的外部。 [0007] 此外，本創作再提出一種二合一反應與熔融設備内部的 坩鍋結構，包含第一容器及第二容器，其中第一容器的 内部形成有第一腔體，且第一容器底部具有第一出口； 第二容器設置於第一容器内部的第一腔體内，且第二容 器之體積小於第一腔體，使得第二容器與該第一腔體之 間形成有一間隙，同時，第二容器之側壁上具有複數個 透孔，且第二容器底部具有至少一個第二出口，該第二 容器的内部具有一第二腔體，用以容置一第一反應原料 與一第二反應原料。 [0008] 因此，本創作之主要目的係將反應設備與熔融設備互相 結合，故可達到設備整合的功效，使購買設備成本降低 ，提昇設備使用效率。 [0009] 本創作之次要目的係將反應設備與熔融設備互相結合， 並進一步利用進行反應設備内化學反應後所產生之熱能 表單編號A0101 第4頁/共13頁 輔以加熱裝置將熱能提供給熔融設備，因此可達到節省 月t*源、製程時間縮短的功效。 【實施方式】 [0010] 由於本創作係揭露一種二合一反應與熔融設備，其中所 利用到的化學反應原理與熔融反應原理，已為相關技術 領域具有通常知識者所能明瞭，故以下文中之說明，不 再作完整描述。同時，以下文中所對照之圖式，係表達 與本創作特徵有關之結構示意，並未亦不需要依據實際 尺寸完整繪製’盍先敘明。 [0011] 首先请參考圖1及圖2，係本創作提出之第一實施例，為 一種二合一反應與熔融設備9，其包含有第一容器丨、第 二容器2及加熱裝置3。 [0012]上述的第一容器1的内部形成有第一腔體丨丨，且在第一容 器1内第一腔體11上方具有内凸緣12 ,同時，在第一容器 1的底部具有第一出口 13。第二容器2設置於第一容器1的 第一腔體11内，且第二容器2之體積略小於第一腔體u， 因此，當第二容器2設置在第一腔體丨丨内時，第二容器2 與第一腔體11之間具有間隙1〇 ,更進一步地，第二容器2 内具有與第一容器1内凸緣12所對應的外凸緣22，使第二 容器2可利用外凸緣22靠持於第一容si的内凸緣12，藉 此，讓第二容器2以懸掛的方式設置於第一腔體丨丨的内部 ’此外’在第二容器2的底部具有至少一個第二出口 23， 而第二容器2之側壁上具有複數個透孔24(如圖3所示）， 且第二容器2的内部具有第二腔體21，在第二腔體21的上 方具有進料口4，進料口4與第二腔體21相通，第一反應 表單編號A0101 第5頁/共13頁 M429171 原料與第二反應原料可藉由進料口 4進入第二腔體21内。 [0013] 更進一步地，在第二容器2的第二出口 23可設置延伸段 231，延伸段231伸入第一容器1的第一出口 13(如圖4所 示）。 [0014] 加熱裝置3，設置於第一容器1的外部，係供應熱源給第 二腔體12作為物理反應所使用。其中加熱裝置3可為電磁 線圈、加熱線圈、石英加熱管或加熱陶曼等任一種。當 加熱裝置3為電磁線圈時，則第二容器2的材質為被電磁 感應之材質。 [0015] 此外，本創作再提出第二實施例為一種二合一反應與熔 融設備内部的坩鍋結構，包含第一容器及第二容器，本 創作第二實施例中的第一容器與第二容器皆與本創作之 第一實施例中的第一容器1及第二容器2相同，且第二容 器亦可用以容置第一反應原料與第二反應原料，故在此 不在加以贅述，值得一題的是，本創作第二實施例的坩 鍋結構可結合不同形式的加熱裝置3而構成反應與熔融設 備，例如第一實施例中將加熱裝置3設置在第一容器1外 部，或者可以將加熱裝置3設置在第一容器與第二容器之 間等。 [0016] 前述第一實施例及第二實施例中的第一反應原料主要為 含7A族之化合物或4A族之化合物；第二反應原料主要為 1A族元素或為含1A族之化合物〇特別要說明的是，第一 反應原料與第二反應原料係於第二腔體21内發生化學反 應以形成第一反應生成物；並且第一反應生成物亦係於 第二腔體21内發生物理反應以形成第二反應生成物。由 表單編號A0101 第6頁/共13頁 於第一反應生成物係為由不同化合物反應形成之混合物 ，因此可以因其在而溫下不同炼點之物理特性，藉著加 熱至不同的溫度’而將不同化合物分離而得到第二反應 生成物。又’上述之化學反應的程序為一種放熱模式， 因此進行化學反應時，將產生熱能’並且再搭配加熱裝 置3之使用，則可成為一種高溫放熱製程。 [0017]因此，本創作第一實施例及第二實施例中之第一反應原 料與第二反應原料在第二腔體21内進行化學反應後，成 為第一反應生成物，接著，利用前述化學反應所產生之 熱能’使第一反應生成物吸收此熱能，並且再搭配加熱 裝置3之使用’繼續在第二腔體21内進行物理反應，當第 二腔體21内的溫度達到第一反應生成物所含之不同物質 之熔點時，呈現熔融狀態的物質先藉由第二容器2側壁上 的透孔2 4流出’而自透孔2 4所流出的炫融狀態物質，沿 著第二容器2與第一腔體11之間的間隙1〇，流至第一容器 1底部的第一出口 13，藉此’得以將第一反應生成物分離 出第二反應生成物，值得注意的是，為了熔融狀態的物 質能順利流出透孔24 ’透孔24的孔徑建議可為1 mm~ 5mm ’在本創作的實施例中以1. 4mm〜2. 6mm為更佳的透孔24 孔徑。 [0018] 接著，由於第一反應生成物各為不同熔點之混合物，故 當溫度上升至能使第一反應生成物完全熔融時，第一反 應生成物中高熔點的物質會產生燒結現象，燒結現象可 避免此高熔點物質被低熔點物質在熔為液態分離時帶走 ，因此高熔點的物質即為第二反應生成物，最後第二反 表單編號A0101 第7頁/共13頁 M429171 應生成物再自第二容器2底部的第二出口 23排出第二容器 2，藉此達到將第一反應生成物分離出第二反應生成物之 目的，特別的是，在本創作中第二容器2底部具有至少一 個第二出口 23，可讓第一反應生成物中溶點低的物質容 易流出，以免出口單一個第二出口 23被燒結的第二反應 生成物堵住而無法流出，此外，在第二出口 23設計延伸 段231亦是便於使溶點低的物質流出第一容器1及第二容 器2外。 [0019] 一般而言，要取得第二反應生成物之製程需要分別在兩 個設備進行，並且在從第一個設備至第二個設備之前， 還需要一冷卻步驟。但，藉由上述之二合一反應與熔融 設備9，便可在同一設備中，先進行化學反應之放熱模式 ，之後，再進行物理反應之吸熱模式，則可避免如先前 技術般，需再進行冷卻之步驟；且又可在同一設備中進 行。緣此，故可以達到節省能源、製程時間縮短之目的 ，並且亦可達到購買設備成本降低，提昇設備使用效率 之效用。 [0020] 以上所述僅為本創作之較佳實施例，並非用以限定本創 作之申請專利權利；同時以上的描述，對於熟知本技術 領域之專門人士應可明瞭及實施，因此其他未脫離本創 作所揭示之精神下所完成的等效改變或修飾，均應包含 在申請專利範圍中。 【圖式簡單說明】 [0021] 圖1為本創作二合一反應與熔融設備第二容器分離示意圖 表單编號A0101 第8頁/共13頁 M429171 [0022] 圖2為本創作二合一反應與熔融設備組合示意圖。 [0023] 圖3為本創作二合一反應與熔融設備之第二容器示意圖。 [0024] 圖4為本創作二合一反應與熔融設備組合示意圖。 【主要元件符號說明】 [0025] 二合一反應與熔融設備9 [0026] 第一容器1 [0027]間隙 10V. New Description: [New Technology Field] [0001] This creation is about a device used in semiconductor manufacturing, especially a two-in-one reaction and melting device that combines raw material reaction and product separation. [0002] In the conventional semiconductor process technology, the final reaction product required often needs to be produced by two stations, namely, a reaction device and a separation device. Therefore, it is necessary to separately send the respective reaction raw materials to the reaction equipment of the first station and carry out a chemical reaction, and then an initial reaction product is produced, and the initial reaction product to be cooled is still required to be cooled. Thereafter, the cooled initial reaction product is sent to a separation apparatus at the second station for high-temperature processing to obtain the desired final reaction product. [0003] However, the above-mentioned conventional semiconductor process technology has the following disadvantages in obtaining the desired final reaction product: [0004] 1. The need to separately purchase the reaction device and the separation device will increase the cost of the purchased device. 2. The need to pass the reaction equipment and separation equipment will increase the process time. 3. After the reaction equipment has produced the initial product, it still needs to be cooled, and then sent to the separation equipment for heating to produce the final reaction product, which also wastes the energy for cooling. [0005] Therefore, if an apparatus can be invented to solve the above problems, it is actually required by the industry. Form No. A0101 Page 3 of 13 M429171 [New Content] [0006] In order to solve the above-mentioned prior art unsatisfactory, the present invention provides a two-in-one reaction and melting device, mainly comprising a first container, Two containers and heating device. Wherein, the inside of the first container is formed with a first cavity, and the bottom of the first container has a first outlet. The second container is disposed in the first cavity of the first container, and the volume of the second container is smaller than the first cavity, so that a gap is formed between the second container and the first cavity, and at the same time, the sidewall of the second container has The plurality of through holes have a second outlet at the bottom of the second container, and the inside of the second container has a second cavity for accommodating the first reaction raw material and the second reaction raw material. Further, the heating device is disposed outside the first container. [0007] In addition, the present invention further proposes a crucible structure inside a two-in-one reaction and melting apparatus, comprising a first container and a second container, wherein a first cavity is formed inside the first container, and a bottom of the first container The first container is disposed in the first cavity inside the first container, and the volume of the second container is smaller than the first cavity, so that a gap is formed between the second container and the first cavity, and at the same time The second container has a plurality of through holes on the side wall thereof, and the second container has at least one second outlet at the bottom thereof, and the second container has a second cavity therein for accommodating a first reaction material and a first Two reaction raw materials. [0008] Therefore, the main purpose of the present invention is to combine the reaction equipment and the melting equipment, so that the efficiency of equipment integration can be achieved, the cost of purchasing equipment can be reduced, and the equipment use efficiency can be improved. [0009] The secondary objective of this creation is to combine the reaction equipment and the melting equipment, and further utilize the heat energy generated by the chemical reaction in the reaction equipment. Form No. A0101, page 4/13, supplemented by a heating device to provide heat energy. The melting equipment can be used to save the monthly t* source and shorten the process time. [Embodiment] [0010] Since the present invention discloses a two-in-one reaction and melting device, the principle of chemical reaction and the principle of melting reaction utilized by the present invention have been known to those skilled in the relevant art, so the following The description will not be fully described. At the same time, the drawings in the following texts express the structural schematics related to the characteristics of the creation, and do not need to be completely drawn according to the actual size. [0011] Referring first to Figures 1 and 2, a first embodiment of the present invention is a two-in-one reaction and melting apparatus 9 comprising a first container, a second container 2 and a heating device 3. [0012] The first chamber 1 is formed with a first cavity 丨丨, and has an inner flange 12 above the first cavity 11 in the first container 1, and at the bottom of the first container 1 An exit 13. The second container 2 is disposed in the first cavity 11 of the first container 1, and the volume of the second container 2 is slightly smaller than the first cavity u, so when the second container 2 is disposed in the first cavity a gap 1 is formed between the second container 2 and the first cavity 11, and further, the second container 2 has an outer flange 22 corresponding to the inner flange 12 of the first container 1, so that the second container 2 The outer flange 22 can be held against the inner flange 12 of the first volume si, whereby the second container 2 is suspended in the interior of the first cavity 此外 'in addition' in the second container 2 The bottom portion has at least one second outlet 23, and the second container 2 has a plurality of through holes 24 (as shown in FIG. 3) on the side wall, and the second container 2 has a second cavity 21 in the second cavity. Above the 21, there is a feed port 4, and the feed port 4 communicates with the second cavity 21, the first reaction form number A0101, page 5/13, M429171, the raw material and the second reaction material can enter the first through the feed port 4. Inside the two chambers 21. Further, an extension 231 may be provided at the second outlet 23 of the second container 2, and the extension 231 extends into the first outlet 13 of the first container 1 (as shown in FIG. 4). [0014] The heating device 3, which is disposed outside the first container 1, supplies a heat source to the second chamber 12 for use as a physical reaction. The heating device 3 may be any one of an electromagnetic coil, a heating coil, a quartz heating tube or a heating Tauman. When the heating device 3 is an electromagnetic coil, the material of the second container 2 is electromagnetically induced. [0015] In addition, the second embodiment of the present invention is a crucible structure inside a two-in-one reaction and melting apparatus, comprising a first container and a second container. The first container and the second container in the second embodiment of the present invention The second container is the same as the first container 1 and the second container 2 in the first embodiment of the present invention, and the second container can also be used for accommodating the first reaction material and the second reaction material, and therefore will not be described herein. It is worth mentioning that the crucible structure of the second embodiment of the present invention can be combined with different forms of heating device 3 to constitute a reaction and melting device. For example, in the first embodiment, the heating device 3 is disposed outside the first container 1, or The heating device 3 can be disposed between the first container and the second container, and the like. [0016] The first reaction raw materials in the foregoing first embodiment and the second embodiment are mainly a compound containing a group 7A or a compound of a group 4A; and the second reaction raw material is mainly a group 1A element or a compound containing a group 1A. It is to be noted that the first reaction raw material and the second reaction raw material are chemically reacted in the second cavity 21 to form a first reaction product; and the first reaction product is also physically generated in the second cavity 21. The reaction is carried out to form a second reaction product. The first reaction product is a mixture formed by the reaction of different compounds by the form number A0101, page 6 of the total number of compounds, so that it can be heated to different temperatures due to the physical properties of the different melting points at the temperature. The different compounds are separated to obtain a second reaction product. Further, the above-mentioned chemical reaction procedure is an exothermic mode, so that when a chemical reaction is carried out, heat energy is generated and, in combination with the use of the heating device 3, it can be a high-temperature exothermic process. [0017] Therefore, in the first embodiment and the second embodiment, the first reaction raw material and the second reaction raw material are chemically reacted in the second cavity 21 to become a first reaction product, and then, using the foregoing The thermal energy generated by the chemical reaction causes the first reaction product to absorb the thermal energy, and in combination with the use of the heating device 3, continues to physically react in the second cavity 21, when the temperature in the second cavity 21 reaches the first When the melting point of the different substances contained in the reaction product is present, the substance which is in a molten state flows out through the through-holes 24 on the side wall of the second container 2, and the substance in the molten state flows out from the through-holes 24, along the first The gap between the second container 2 and the first chamber 11 is 1〇, flows to the first outlet 13 at the bottom of the first container 1, whereby the first reaction product is separated from the second reaction product, notable. The aperture of the through-hole 24 is preferably 1 mm to 5 mm in the embodiment of the present invention. In the embodiment of the present invention, 1. 4 mm to 2. 6 mm is a better aperture. . [0018] Next, since the first reaction products are each a mixture of different melting points, when the temperature rises to enable the first reaction product to be completely melted, the high melting point substance in the first reaction product may be sintered, and the sintering phenomenon occurs. It can be avoided that the high melting point substance is taken away by the low melting point substance when it is melted into a liquid state, so the substance having a high melting point is the second reaction product, and finally the second reverse form number A0101 Page 7 of 13 M429171 The second container 2 is discharged from the second outlet 23 at the bottom of the second container 2, thereby achieving the purpose of separating the first reaction product from the second reaction product, in particular, the bottom of the second container 2 in the present creation. Having at least one second outlet 23 allows the material having a low melting point in the first reaction product to easily flow out, so as to prevent the second reaction outlet 23 from being blocked by the sintered second reaction product from flowing out and not flowing out. The second outlet 23 design extension section 231 is also convenient for allowing substances having a low melting point to flow out of the first container 1 and the second container 2. [0019] In general, the process for obtaining the second reaction product needs to be performed separately in two devices, and a cooling step is required before the first device to the second device. However, by the above-mentioned two-in-one reaction and melting device 9, the heat release mode of the chemical reaction can be performed first in the same equipment, and then the heat absorption mode of the physical reaction can be performed, thereby avoiding the need of the prior art. The step of cooling is performed; and it can be carried out in the same equipment. As a result, energy saving and process time can be shortened, and the cost of purchasing equipment can be reduced and the efficiency of equipment can be improved. The above description is only a preferred embodiment of the present invention, and is not intended to limit the patent application rights of the present invention; at the same time, the above description should be understood and implemented by those skilled in the art, so that the others are not separated. Equivalent changes or modifications made in the spirit of the present disclosure should be included in the scope of the patent application. [0021] Figure 1 is a schematic diagram of the separation of the second container of the two-in-one reaction and melting equipment. Form No. A0101 Page 8 of 13 M429171 [0022] Figure 2 is a two-in-one reaction A schematic diagram combined with a melting apparatus. [0023] FIG. 3 is a schematic view of a second container for creating a two-in-one reaction and melting apparatus. [0024] FIG. 4 is a schematic diagram of the combination of the two-in-one reaction and melting equipment. [Description of Main Element Symbols] [0025] Two-in-One Reaction and Melting Apparatus 9 [0026] First Container 1 [0027] Gap 10
[0028] 第一腔體11 [0029] 内凸緣1 2 [0030] 第一出口 1 3 [0031] 第二容器2 [0032] 第二腔體21 [0033] 外凸緣2 2First cavity 11 [0029] inner flange 1 2 [0030] first outlet 1 3 [0031] second container 2 [0032] second cavity 21 [0033] outer flange 2 2
[0034] 第二出口 2 3 [0035] 延伸段231 [0036]透孔 24 [0037] 加熱裝置3 [0038] 進料口 4 表單編號A0101 第9頁/共13頁[0034] Second Outlet 2 3 [0035] Extension Section 231 [0036] Through Hole 24 [0037] Heating Device 3 [0038] Feed Port 4 Form No. A0101 Page 9 of 13