M427592 五、新型說明： 【新型所屬之技術領域】 本創作係關於一種收納護膜之護膜收納容器，該護膜係 為了防止於製造構成大型積體電路（LSI，Large Scale Integration)、液晶顯示器（LCD，Liquid Crystal Display)之 薄膜電晶體（TFT ’ Thin Film Transistor)或彩色漶光片 (CF ’ Color Filter)等時的光微影步驟中使用之光罩或比例 光罩上附著異物而採用。尤其關於鋪展之護膜用膜之面積 為1000 cm2以上的大型護膜用護膜收納容器。 【先前技術】 本創作係關於護膜之收納容器之技術，首先，對護膜進 行說明。 先前，於半導體裝置或液晶顯示器等之微細電路圖案製 造時之光微影步驟中，一般使用被稱作護膜之防塵機構， 來防止異物附著於光罩或比例光罩上。 護膜係如下所述者，即，於具有與光罩（ph〇t〇mask)或者 比例光罩（reticle)之形狀相配合的形狀且厚度及寬度為數 毫米程度之護膜框體（以下亦稱作「護膜框」）之上緣面， 鋪展且接著厚度10 μιη以下之硝化纖維素、纖維素衍生物 或者含氟之聚合物等之透明高分子膜即護膜用膜，於該護 膜框體之下緣面塗覆黏著材從而形成光罩用黏著材層，使 保護膜以特定的接著力黏著於該光罩用黏著材層上。 該光罩用黏著材層係用於使護膜固著於光罩或者比例光 罩上者，而且，保護膜係保護光罩用黏著材層之接著面 M427592 者，以使光罩用黏著材層能夠維持黏著材之接著力而滿足 其用途。 一般而言’此種護膜係由製造護膜之製造商（以下亦稱 作「製造者」）供給至製造光罩或者比例光罩（以下亦稱作 「光罩等」）之製造商（以下亦稱作「使用者」）。使用者將 護膜貼附於光罩等上之後，將由護膜所保護之光罩等供給 至半導體製造商、液晶面板製造商等進行光微影處理之製 造商。 當將該護膜自製造者搬運至使用者時，為了防止護膜上 附著異物'或者防止護膜損傷，一般而言，將該護膜收納 於包含載置其之托盤及蓋體之護膜收納容器内，進而將該 護膜收納容器收納於防塵袋等中進行搬運。 然而，就護膜收納容器而言，需要具有用於使塵埃不會 附著於護膜上之密封性。而且，就護膜收納容器而言，為 了防止蓋體接觸於護膜用膜而使護膜用膜受到污染或者破 損，要求具有能夠以非接觸之狀態切實地保持護膜用膜的 保持性》 通常，護膜收納容器係藉由對ABS、丙烯酸等樹脂進行 射出成形或真空成形而製造。利用該等成形方法之原因在 於’其等具有如下優點：表面平滑，異物之附著或起塵之 可能性小；因係一體成形故無接縫，起塵或異物侵入之可 能性小；複雜形狀之護膜收納容器亦容易製造；及，量產 性優良，能實現低成本化。 作為主要使用於液晶用護膜中之如一邊超過5〇〇随的 M427592 大型護膜收衲容器，一般使用對ABS、丙烯酸等合成樹脂 片材進行真空成形而成者。其原因在於，在自1處或者多 處淹口向模具内高速地注入樹脂之射出成形中，樹脂之流 動距離過長，因此製法較困難。相對於此，於真空成形 中’僅藉由在模具上覆蓋經加熱之樹脂片材而進行真空處 理便可形成，故容易形成大型護膜收納容器。 二而於真空成形之情形時存在如下問題：無法成形為 土厚者，而且，雖可以翼肋之程度進行加強，但因僅使板 厚基本上相同之片材彎曲，故難以製成高剛性者。因此’ 護膜收納谷器需要猎由某種方法來抑制蓋體或護膜載置台 之變形。 因此，本申請人提出如下技術：藉由對托盤或蓋體中之 至少一者安裝加強板，而抑制護膜收納容器之變形，藉由 對光罩用黏著材層之一部分局部地施加重量來防止產生空 氣通道或防止因翹曲或變形而使托盤或蓋體接觸於護膜 (參照專利文獻1)。 而且，本申請人提出如下技術：藉由對托盤或蓋體中之 至少-者設置翼肋，而抑制護膜收納容器之搬運中因高溫 度所致之蓋體或托盤的翹曲等而引起的變形，且防止異物 侵入（參照專利文獻2)。 而且’作為不使用加強材之方法，提出如下之護膜收納 容器：藉由對托盤設置橫越托盤外形之對角線且不與其他 翼肋交又之複數個翼肋，而特別提高扭曲方向上之剛性 (參照專利文獻3)。 M427592 而且’提出如下之護膜收納容器：藉由在載置托盤之護 膜框之載置台之外側或内側中之任一者設置階差部，主在 低於階差部之位置載置護膜框，使得傳送中護膜難以活 動’且降低了護膜框底面之黏著材捲縮之危險性（參照專 利文獻4)。 [先前技術文獻] [專利文獻] [專利文獻1]日本專利特開2005-49765號公報 [專利文獻2]曰本專利特開2〇〇〇_173887號公報 [專利文獻3]曰本專利特開2〇〇8_139417號公報 [專利文獻4]曰本專利特開2〇〇7 47238號公報 【新型内容】 [創作所欲解決之問題] 如上所述，通常，護膜收納容器係藉由對ABS、丙烯酸 等樹脂進行射出成形或真空成形而製造。 因此，當先前利用另一加強板來提高剛性之情形時，可 充分獲得剛性，但重量有所增加，故存在如下問題：護膜 用膜之面積越大，則為了確保充分之剛性使得加強板之重 量越大於容器本體之重量。而且，不僅需要加強板自身’ 而且亦需要用於將加強板緊固於容器本體上之零件，進 而’亦需要將該零件安裝於容器本體上之工時，因此與 僅有容器本體之情形相比，成.本大幅增加。 翼肋來提高剛性之情 。然而，如專利文獻 而且，當先前不使用加強板而利用 形時，可減少上述之重量增加之問題 M427592 2所述’若使翼肋之形狀成為設置於外形之對角線連接而 成之方向上的X字型，則因於翼肋存在交又部故可能導 致扭曲方向之剛性極度下降，托盤沿著任—對角線扭曲， 而以相對頂點接近之方式彎曲。 而且’如專利文獻3所述之翼肋之配置係對於托盤之傾 斜的扭曲方向上之剛性而言較有效，但因翼肋之頂點附近 存在於邊之令央附近、或邊之令央附近不存在翼肋，故當 搬運托盤時存在如下問題，gp，由人工搬運兩短邊側或兩 長邊側之欣σ附近、或利用堆高機於中央附近移動該托 盤之情形時等’存在邊之中央附近產生應力而使得與邊垂 直之折痕方向上之剛性較弱的傾向。而且，當由大型護膜 貼附於光罩時係利用自動取出機之情形時，需要吸附把持 托盤之底面，故而’有拕盤之底面較佳為相對平面之傾 向相對於此，右如專利文獻3所示配置翼肋，則越使護 膜收納容器大型化，則越需要設置複數個翼肋，故而，存 在相對平面之面減少，難以吸附保持托盤之底面之問題。 進而，專利文獻4中揭示之護膜收納容器中，因載置台 之僅外側或内側中之任一者具有階差部，故當護膜收納容 器整體受到外力之情形時，護膜之載置台無法維持平坦 性，搬運護膜時無法防止護膜用膜之皺褶的產生（相當於 後述之比較例1)。 由上述’就例如收容鋪展之護膜用膜之面積（以下亦簡 稱為「面積」）為超過5〇〇〇 cm2且達到8〇〇〇 、進而是達 到10000 cm2之大型護膜的護膜收納容器而言，未使用加 M427592 強體而僅由護膜容器本體無法保持充分之剛性及底面之平 面性’且無法防止護膜用膜之皺褶之產生。 [解決問題之技術手段] 因此’本創作者為了解決上述問題，發現如下之護膜收 納容器能夠解決上述問題，且思及本創作，該護膜收納容 器係包含托盤中央底面、自該托盤中央底面向上部側隆起 而載置護膜之大致角環狀之載置台、及自該載置台之外周 緣沿水平方向延伸之外延部者，其中，於該托盤中央底面 與該載置台之間、該載置台與該外延部之間分別具有緩衝 部。 亦即，本創作之護膜收納容器，其具有：托盤，其對於 在護膜框體之一緣面上鋪展有護膜用膜之護膜進行載置； 及蓋體，其自該托盤之上部進行覆蓋；該護膜收納容器 中該托盤包含.托盤中央底面；大致角環狀之載置台， 其自該托盤中央底面向上部側隆起而載置護膜；及外延 部，其自該載置台之外周緣沿水平方向延伸；且，於該托 盤中央底面與該載置台之間、及該載置台與該外延部之 間，分別具有緩衝部。 進而，較佳為，該托盤中夬底面與該載置台之間的該緩 衝部係，於與該托盤中央底面及該載置台不同之高度位置 上分成2個以上之階差的階差部；該載置台與該外延部之 間的該緩衝部係、’於與該載置台及該外延部不同之高度位 置上分成2個以上之階差的階差部。 進而，較佳為，該托盤中央底面與該載置台之間的該緩 M427592 衝部中、形成於該載置台之角部附近的該緩衝部之面積係 向該托盤中央底面方向擴展，藉此相對地增大。 進而，較佳為，該托盤中央底面與該載置台之間的緩衝 部、即形成於該載置台之角部附近之緩衝部，具有自該托 盤中央底面向該護膜框體之該載置台方向立起並且橫越該 托盤外形之對角線的垂直面。 進而’較佳為，於該托盤中央底面之該載置台附近，形 成有上述護膜框體之高度方向上的第二階差部。 [創作之效果] 根據本創作之護膜收納容器，即便不使用加強板亦能確 保護膜收納容器之剛性、尤其是載置台之剛性及平坦性， 因此當搬運護膜時能夠防止護膜用膜之皺褶產生。 【實施方式】 [第1實施形態] 以下，參照圖式，對於本創作之較佳實施形態進行說 月圖1係表示第1實施形態之護膜收納容器之整體構成的 略。丨面圖。圖2係表示圖丨所示之護膜收納容器之托盤的 概略正面圖。圖3係圖2所示之ΙΙΙ-ΙΠ線上之剖面圖。再 者，對於所有圖中相同或同等之部分標^目同之符號。 (收納容器） 如圖1所示，護膜收納容器1包含載置護膜4之托盤2、及 罩於托盤2之頂面上而覆蓋托盤2之頂面的蓋體^並且， 托盤2與蓋體3藉由膠帶等（未圖示）而密封固定、或藉由夹 具等（未圖示）緊固工具固定。 M427592 收納於護膜收納容器丨内之護膜4包含：大致角環狀之護 膜框4b，其形狀與光罩或比例光罩等（未圖示）之形狀相配 合；護膜用膜4a，其鋪展且接著於護膜框仆之上緣面；及 光罩用黏著材層4c，其塗覆於護膜框4b之下緣面。護膜用 膜4a為厚度1〇 μπια下之硝化纖維素纖維素衍生物或含 氟之聚合物等之透明高分子膜。護膜框仆係具有與光罩或 比例光罩等（未圖示）之形狀相配合的形狀且厚度及寬度為 數毫米程度之護膜框體。光罩用黏著材層牦係塗覆有黏著 材之層，且為了维持黏著材之接著力，隸面上黏著有保 蒦膜因此，護膜框4b之咼度方向係指抬起護膜用膜4&之 護膜框4b之厚度方向，圖！中表示為上下方向。 托盤2及蓋體3之材質較佳為工程塑料、強化塑料、金屬 等。自輕量化、成型性之觀點而言，多數情況下選擇塑料 素材，可使用丙烯酸樹脂、丙烯腈樹脂、聚碳酸酯樹脂、 聚對苯二甲酸乙二酯樹脂、丙烯腈·丁二烯·#乙烯樹脂 等。進而，托盤2及蓋體3之材質除上述樹脂以外，亦可使 用聚對苯二甲酸乙二酯以外之聚酯樹脂、$乙烯或聚丙烯 等烯烴系樹脂、聚苯乙烯或丙烯腈•苯乙烯樹脂等聚苯乙 烯系樹脂等。為了防止因靜電導致之異物附著，亦可向上 述樹脂賦予抗靜電性。而且，亦可使用纖維強化塑料。當 選擇金屬之情形時，自輕量化之觀點而言，使用鋁等。 托盤2及蓋體3可使用上述之材質採用真空成形、射出成 形、或貼合等组裝方式而製造。尤其是當採用大型托盤2 或蓋體3之情形時，較佳為藉由真空成形而製造。托盤2或 M427592 mm~ 1 〇 mm ° 盍體3之厚度較佳為i 托盤2及蓋體3之尺 疋，且具有略小於收納 寸可根據收納之護膜 之護膜4之尺寸。 4之大小 而設 而且 半透明 黑色。 作為蓋體3’ 4 了易於確認内部，較佳為透明或 作為托盤2, $ 了易於確認附著之異物較佳為 托盤2與蓋體3係於彼此之周緣部欲合，作為托盤2與蓋 體3之間的間隙’為了防止來自外部之異物侵入，較佳 儘可能狹窄。 +如圖2及圖3所示，托盤2包含：托盤中央底面$，其於與 蓋體3相向之側具有開口部；載置台6，其載置護膜* ;及 嵌合部7’其與蓋體3相嵌合。 (載置台之緩衝部） 載置台6係自托盤中央底面5之周圍向托盤2之頂面侧即 載置護膜4之側隆起。並且，載置台6上，形成有於護膜框 4b之高度方向移位之緩衝部，且於載置台6上之隆起之最 高的水平部分13載置有護膜4 β此處，作為緩衝部/只要 構成為翼肋、或將階差分成2個以上之階差部等能夠吸收 外力’以使施加於收納箱體整體之外力不會直接傳遞至載 置台，則可發揮本創作之效果，故無特別限制。 於載置台6上之托盤2之外緣側，形成有：第一垂直面部 14a，其自水平部分13向大致垂直方向之下方下垂；第一 水平面部15a，其自第一垂直面部14a之下端向托盤2之外 緣方向大致水平地延伸出；及第二垂直面部16a，其自第 M427592 一水平面部15a之前端進一步向大致垂直方向下方下垂且 與嵌合部7相連。 而且，於載置台6之托盤中央底面5側，形成有：第一垂 直面部14b，其自水平部分13向大致垂直方向之下方下 垂；第一水平面部15b，其自第一垂直面部i4b之下端向托 盤2之中心方向（托盤中央底面5側）大致水平地延伸出；及 第二垂直面部16b’其自第一水平面部15b之前端進一步向 大致垂直方向之下方下垂且與托盤中央底面5相連。 如上所述，藉由水平部分13、第一垂直面部14a、第— 水平面部15 a及第二垂直面部16a，而於載置台6之托盤2之 外緣側形成護膜框4b之高度方向的緩衝部8，且藉由水平 部分13 '第一垂直面部14b、第一水平面部15b及第二垂直 面部16b，而於載置台6之托盤中央底面5側形成護膜框仆 之高度方向的緩衝部9。 再者，第一垂直面部14a、1仆、第二垂直面部16a、 ⑽、第一水平面部15a、15b之長度係根據護膜之大小而 變動’可彼此相同，亦可不同。 並且’較佳為，托盤中央底面5與載置台6之間的緩衝部 8中的、形成於載置台6之角部6a附近的緩衝部8之面積係 向托盤中央底面方向擴展，藉此相對地增大。藉由以形成 於托盤t央底面5與載置台6之間且形成於載置台仏 附近的缓衝部8之面積向托盤中央底面方向擴展之方式配 置，可提高護膜收納容器之扭曲方向上之剛性。此、 配置於載置台6之角部6a附近之第一水平面部…的； -12· M427592 部A呈大致三角形狀之方 _ 式將第一垂直面部16b配置於橫 越托盤2外形的對角線之位置_亦即緩衝部9係如下所 述’配置於載置台6之角部6a附近之第一水平面部W之角 部A形成為大致：r||开^灿 双一月形狀，並且第二垂直面部16b配置於盥 托盤2外形之對角線交又之位置上。藉由如此形成緩衝部 9 ’對於托盤2之扭曲之剛性提高，且亦可保持载置台6之 平坦性。再者’當將第二垂直面部⑽配置於與托盤2外形 對角線交叉之位置上時’第二垂直面部⑽能夠在對於 托盤2之扭曲的剛性提高、且發揮保持載置台6之平坦性之 效果的範圍内構成，未必需要嚴密的垂直性。 此處，參照圖7,對於形成於第一水平面部i5b之角部a 的大致三角形狀之尺寸等進行說明。 如圖7所示，將托盤2外形之長邊之長度設為χ，將形成 於角部A之大致三角形狀中的與托盤2外形之長邊平行之邊 之長度設為X。此時，與托盤2外形長邊平行的三角形狀之 邊之長度X相對於托盤2外形長邊之長度χ的比例（χ/χ)較佳 為0.5〜50%，更佳為卜45%，進而更佳為3〜4〇%，再更佳為 5〜30%，再更佳為8〜25%，最佳為1〇〜2〇%。如此，若將與 托盤2外形長邊平行的二角形狀之邊之長度χ相對於托盤2 外形長邊之長度X的比例設為如此之範圍，則尤其是剛性 得到提高，故較佳。因此，本實施形態中，將與托盤2外 形長邊平行的二角形狀之邊之長度χ相對於托盤2外形長邊 之長度X的比例（χ/Χ)設為14〇/〇。 而且，將托盤2外形之短邊之長度設為γ，將形成於角部 -13- M427592 a之大致三角形狀中的與牦盤2外形之短邊平行之邊之長度 設為y»此時，與托盤2外形短邊平行的三角形狀之邊之長 度y相對於托盤2外形短邊之長度γ的比例（y/Y)較佳為 0.5〜50%，更佳為〗〜45%，進而更佳為3〜4〇%，再更佳為 10〜40%，最佳為15〜35%„如此，若將與托盤2外形短邊平 行的二角形狀之邊之長度y相對於托盤2外形短邊之長度Υ 的比例設為如此之範圍，則尤其是剛性得到提高，故而較 佳。因此，本實施形態中，將與托盤2外形短邊平行的三 角形狀之邊之長度y相對於托盤2外形短邊之長度γ的比例 (y/Y)設為 17.5%。 而且，托盤2外形之對角線與第二垂直面部16b所成之角 較佳為30〜110。，更佳為7〇〜1〇〇。，最佳為9〇。。 再者，作為形成於載置台6上之緩衝部，較佳為形成於 與載置台6垂直之方向上的1段以上之階差，因載置台6自 身狹窄，故該階差較佳為1〜3段。而且，自成形性等之關 係而5，較佳為，形成於載置台6上之緩衝部為形成於與 載置台6垂直之方向上的段以上之階差。 而且，因形成於載置台6上之緩衝部係形成於載置台6之 兩側，故平衡性較佳，剛性亦較高。並且，水平部分13之 平坦性亦優良。水平部分13係載置護膜框4b之場所，故若 水平部分13之平坦性變差，則光罩用黏著材層4c之黏著材 會追隨著水平部分13之平坦性之惡化程度而變形當貼附 於光罩上時，有時會產生空氣通道等之問題。 (曲率半徑） M427592 並且’較佳為，水平部分13與第-垂直面部14a、第一 垂直面部…與第-水平面部15a、第一水平面部15a與第 垂直面部16a、第一垂直面部16a與嵌合部7、水平部分 13與第一垂直面部14b、第一垂直面部⑷與第一水平面部 15b、第一水平面部⑸與第二垂直面部⑹、第二垂直面 部16b與托盤中央底面5係分別具有特定的曲率半徑之連接 構化。右其等呈直角連接，則有應力集中於頂點之傾向， 故而’集中應力作用於該連接部分。對此，藉由使該連接 部分具有少許曲率半徑’亦可實現應力之分散’且對於成 形時之樹脂之流動或脫模亦有效地起到作用。曲率半徑若 為〇_5 mm以上，則較佳。上限亦可根據載置台6之大=而 適當地設定為最佳範圍内，但只要為3〇〇mm以下即可若 為200 mm以下、進而是100 mm以下則更佳。其中，較佳 為111111 30 mm，更佳為2 mm〜2〇 mm，進而更佳為2 mm〜15 mm。進而，該等緩衝部所成之角度未必一定要限 定為9〇。’而可適當地設定，自托盤2之製造之觀點等出 發’亦可將該等角度設為鈍角。 (嵌合部） 嵌合部7包含：外延部7a，其自載置台6之外周緣沿水平 方向延伸；及最外延部7b，其自外延部蚊周端部向上方 延伸。並且，該嵌合部7成為與蓋體3相對應之形狀，當托 盤2被蓋體3覆蓋時，可與蓋體3密接。再者，嵌合部7亦可 進而包含自最外延部7b之周端部向外方延伸之緣部(未圖 示）。 M427592 [第二實施形態] 接著，參照圖4及圖5，對於第2實施形態中之護膜收納 谷器進仃說明。圖4係表示第2實施形態之護膜收納容器之 整體構成的概略剖面圖。圖5俾表示圖4所示之護膜收納容 器之托盤的概略正面圖。圖6係圖5所示之¥1¥1線上之剖 面圖。 (收納容器） 護膜收納容器21基本上與第1實施形態中之護膜收納容 器1相同，僅托盤之形狀與第丨實施形態中之護膜收納容器 1不同。因此，以下，僅針對與第丨實施形態中之護膜收納 容器1不同的部分進行說明，省略其他說明。 如圖4所示，護膜收納容器21包含載置護膜4之托盤22、 及覆蓋托盤22之頂面之蓋體3。並且，托盤22與蓋體3係由 膠帶等（未圖示）密封固定、或由夾具等（未圖示）緊固工具 固定。 如圖5及圖6所示，托盤22包含：托盤中央底面25，其於 與蓋體3相向之側具有開口部；載置台26，其載置護膜4 ; 及嵌合部27，其與蓋體3相嵌合。 (托盤中央底面之第二階差部） 於托盤中央底面25,以不影響自動取出之吸附之方式， 使一對第二階差部37形成於護膜框4b之高度方向。第二階 差部37係配置於載置台26之長邊側附近的大致三角形狀之 凹陷’且形成有自托盤中央底面25向垂直方向之下方丁垂 之垂直面部37a、及連接於垂直面部37a之下端緣之平面狀 -16- M427592 之底面部37b。 (載置台之緩衝部） 載置台26係自托盤中央底面25之周緣向載置護膜4之側 隆起。並且，載置台26係於護膜框4b之高度方向具有緩衝 部，且於載置台26之隆起之最高水平部分33載置護膜4。 於载置台26上的托盤22之外緣側，形成有：第一垂直面 部34a’其自水平部分33向大致垂直方向之下方下垂；第 一水平面部35a，其自第一垂直面部34a之下端向牦盤。之 外緣方向大致水平地延伸出；及第二垂直面部36a，其自 第一水平面部35a之前端進一步向大致垂直方向之下方下 垂且與嵌合部27相連。 而且’於載置台26上之托盤中央底面5側，形成有：第 一垂直面部34b，其自水平部分33向大致垂直方向之下方 下垂；第一水平面部35b，其自第一垂直面部341)之下端向 托盤22之中心方向（托盤中央底面5側）大致水平地延伸出； 及第二垂直面部3 6b，其自第一水平面部35b之前端進一步 向大致垂直方向之下方下垂且與托盤中央底面5相連。 如此，藉由水平部分33、第一垂直面部34a、第一水平 面部35a及第二垂直面部36a，而於載置台26之托盤22之外 緣側形成護膜框4b之高度方向上的緩衝部28，且藉由水平 部分33、第一垂直面部34b、第一水平面部35b及第二垂直 面部36b ’而於載置台26之托盤中央底面5側形成護膜框仆 之南度方向上的緩衝部2 9。 並且’以配置於載置台26之角部26a附近的第一水平面 17 M427592 部35b之4個角部B呈大致三角形狀之方式，將第二垂直面 部36b配置於橫越托盤22外形之對角線的位置。 此處，形成於第一水平面部35b之角部B的大致三角形狀 之尺寸等之範圍係基本上與第1實施形態令所說明之形成 於第一水平面部15b之角部A的大致三角形狀之尺寸等之範 圍相同（參照圖7)。因此，第2實施形態中，將與托盤22外 形長邊平行的二角形狀之邊之長度χ相對於托盤22外形長 邊之長度X的比例（Χ/Χ)設為15%，且將與托盤22外形短邊 平行的二角形狀之邊之長度y相對於托盤22外形短邊之長 度Y的比例（y/Y)設為33〇/〇。 而且’於載置台26之長邊側，僅形成有第一垂直面部 34b，而不形成第一水平面部35b及第二垂直面部％^^。 亦即，緩衝部29係如下所述，配置於載置台26之角部 26a附近的第一水平面部35b之角部B形成為大致三角形 狀，並且第二垂直面部3 6b配置於與托盤22外形之對角線 交又的位置上《並且，於載置台26之長邊側未設置緩衝部 29取而代之，於托盤中央底面5上的載置台26附近設有 第二階差部37。再者，如此，於載置台26之長邊側，可僅 於一側設置第二階差部，亦可於兩側設置第二階差部。 (曲率半徑） 並且’較佳為，不僅水平部分33與第一垂直面部34a、 第垂直®部34a與第一水平面部35a、第一水平面部35a 與第一垂直面部36a、第二垂直面部36a與嵌合部27、水平 4刀33與第一垂直面部34b、第一垂直面部3朴與第一水平 M427592 面部35b、第一水平面部35b與第二垂直面部刊匕、第二垂 直面部36b與托盤中央底面25分別成為具有特定的曲率半 徑之連接構造，而且托盤中央底面25與垂直面部Wa、垂 直面部37a與底面部37b亦分別成為具有特定的曲率半徑之 連接構造。若其等呈直角連接’則有應力集中於頂點之傾 向，故而集令應力作用於該連接部分。與此相對藉由使 該連接部分具有少許曲率半徑’可實現應力之分散且對 於成形時之樹脂之流動或脫模亦可有效地發揮作用。曲率 半徑若為0.5 mm以上則較佳。上限亦可根據載置“之大 小而適當地設定於最佳範圍，但只要為__以下即可， 若為200 _以下、進而是1〇〇 _以下則更佳。其中較 佳為2 _〜30 mm，更佳為2 _〜2〇酿，進而更佳為2 _〜15龍。進而，該等階差所成之角度未必—定要限定 為州，可適當地較，自托盤2之製造之觀點等，亦可將 該專角度設為純角。 (栽合部） 嵌合部27包含自載置台26之外周緣沿水平方向延伸之外 延4 27a、及自外延部27a之周端部向上方延伸之最外延部 27b。並且’該嵌合部27具有與蓋體3相對應之形狀，當蓋 體3覆蓋於托盤22時，可與蓋體3密接。再者，丧合部i亦 可進而包含自最外延部27b之周端部向外方延伸之緣部（未 圖示）。 X上參’’、、隨附圖式對本創作之較佳實施形態進行 明’但本創作並不限玄 ° +隈疋於上述不例。業者瞭解，可於專利 -19· M427592 申請範圍所記載之思想範疇内思及各種變更例或修正例， 其等當然亦屬於本創作之技術範圍。 例如’於第1實施形態中，亦說明載置台6之第二垂直面 部16b係直線狀（平面狀）者，但並非限定為該形狀例如可 如圖7之16b，所示，為凹型之圓弧狀（曲面狀），亦可如圖7 之16b"所示，為凸型之圓弧狀（曲面狀）。此時，托盤2外形 之對角線與第二垂直面部l6b所成之角係由托盤2外形之對 角線與第二垂直面部16b交叉之位置上的第二垂直面部 之接線與托盤2外形之對角線所成的角表示，且。再者， 第2實施形態之第二垂直面部36b亦相同。 而且，載置台6未必需要為完全之環狀，例如亦可僅於 與托盤2外形之短邊平行之部分形成為環狀，亦可僅於與 托盤2外形之長邊平行之部分形成環狀。 [實施例] 以下表不具體的實施例及比較例，且針對其等之評估進 行詳細說明。 [實施例1] 實施例1中’採用第2實施形態中之護膜收納容器，該護 膜收納谷斋之托盤係使用外徑尺寸為寬度i〇〇〇 縱深 1600 mm、尚度60 mm、厚度6 mm之ABS樹脂製造的真空 成型品。並且，於托盤中央底面與載置台之間、載置台與 外延部之間分別設有緩衝部，進而，將載置台之角部附近 之第水平面部形成為三角形狀，進而，於托盤中央底面 設有三角形狀之階差（參照圖4)。 •20· M427592 於實驗室之桌上，設置上述實施例1之護膜收納容器， 將護膜收納容器之3處之角部與桌子一同夹入且固定，而 將剩餘之1處角部利用吊秤以2.5 kgf之力進行拉伸，利用 金屬尺測量護膜收納容器之翹曲（變形量）。確認此時之膜 皺褶。計量結果示於表1中。 [實施例2] 實施例2中採用第1實施形態中之護膜收納容器，該護膜 收納容器之托盤係使用外徑尺寸為寬度95〇 mmx縱深14〇〇 mm、问度85 mm、厚度5 mm的ABS樹脂製造之真空成型 。並且，於托盤中央底面與載置台之間、載置台與外延 部之間，分別設有緩衝部（參照圖2)，除此以外進行與實 施例1相同的實驗。計量結果示於表〗中。 [比較例1] 比較例1係採用如下護膜收納容器：於實施例1之護膜收 納夺器中’不使載置台隆起，而僅在配置於載置台内側之 托盤中央底面與载置台之間設有緩衝部，與實施例【相同 地進行實驗。計量結果示於表丨中。 [比較例2] 比較例2係採用如下之罐胺你細办 r °隻膜收納容器：於實施例1之護膜 收納容器中，在隆起之哉要二μ 咚之載置σ上無緩衝部，且與實施例！ 相同地進行實驗。計量結果示於表丨中。 [比較例3 ] 比較例3係採用如下之鳟膜此缺 〈瘦膜收納各器：於實施例2之護膜 收納容器中’在隆起之葡罟a卜 又戟置σ上無緩衝部，且與實施例1 -21 - M427592 相同地進行實驗。計量結果示於表1中β [表1] 變形量 膜皺褶 實施例1 22 mm 無 實施例2 34 mm 無 比較例1 40 mm 少許 ^、 比較例2 56 mm 有 比較例3 124 mm i_ - 明顯 —-- 如表1所示，比較例1〜3中均確認產生膜皺褶，而實施例 1及2中均確認未產生膜皺褶。 [產業上之可利用性] 本創作可用作護膜收納容器。 【圖式簡單說明】 圖1係表示第1實施形態之護膜收納容器之整體構成的概 略剖面圖。 圖2係表示圖丨所示之護膜收納容器之托盤的概略正面 圖。 圖3係圖2所示之ΙΠ-ΙΙΙ線上之刮面圖。 圖4係表示第2實施形態之護膜收納容器之整體構成的概 略剖面圖。 圖5係表示圖4所示之護膜收納容器之托盤的概略正面 圖。 圖6係圖5所示之VI-VI線上之剖面圖。 圖7係用於說明形成於第一水平面部15b之角部Α的大致 二角形狀之尺寸等之圖式。 -22· M427592 【主要元件符號說明】 1 護膜收納容器 2 托盤 3 蓋體 4 護膜 4a 護膜用膜 4b 護膜框 4c 光罩用黏著材層 5 托盤中央底面 6 載置台 6a 角部 7 嵌合部 7a 外延部 7b 最外延部 8 緩衝部 9 緩衝部 13 水平部分 14a 第一垂直面部 14b 第一垂直面部 15a 第一水平面部 15b 第一水平面部 16a 第二垂直面部 16b 第二垂直面部 21 護膜收納容器 •23· M427592 22 托盤 25 托盤中央底面 26 載置台 26a 角部 26b 載置台 27 嵌合部 27a 外延部 27b 最外延部 28 ' 29 緩衝部 33 水平部分 34a 第一垂直面部 34b 第一垂直面部 35a 第一水平面部 35b 第一水平面部 36a 第二垂直面部 36b 第二垂直面部 37 第二階差部 37a 垂直面部 37b 底面部 A、B 角部 -24-M427592 V. New type of description: [Technical field of the new type] This is a film storage container for accommodating a protective film, which is designed to prevent the formation of large scale integrated circuits (LSI, Large Scale Integration) and liquid crystal display. In the photolithography step of the TFT (Thin Film Transistor) or the TFT 'Color Filter (LCD), the photomask or the ratio mask is used for attaching foreign matter. . In particular, it is a protective film storage container for a large-sized film having an area of a film for spreading film of 1000 cm 2 or more. [Prior Art] This work is about the technology of the storage container for the protective film. First, the protective film will be described. Conventionally, in the photolithography step in the manufacture of a fine circuit pattern such as a semiconductor device or a liquid crystal display, a dustproof mechanism called a protective film is generally used to prevent foreign matter from adhering to the photomask or the proportional mask. The protective film is as follows, that is, a protective film frame having a shape matching the shape of a reticle or a reticle and having a thickness and a width of several millimeters (hereinafter also A film for the protective film, which is a transparent polymer film such as nitrocellulose, a cellulose derivative or a fluorine-containing polymer, which is spread on the upper edge surface of the "film frame" and has a thickness of 10 μm or less. The lower edge of the film frame is coated with an adhesive material to form an adhesive layer for the photomask, and the protective film is adhered to the adhesive layer for the photomask with a specific adhesive force. The viscous material layer for the reticle is used to fix the film to the reticle or the proportional reticle, and the protective film protects the contiguous surface M427592 of the viscous adhesive layer for the reticle adhesive The layer maintains the adhesion of the adhesive to meet its use. In general, such a film is supplied by a manufacturer of a protective film (hereinafter also referred to as "manufacturer") to a manufacturer who manufactures a photomask or a proportional mask (hereinafter also referred to as "photomask"). Hereinafter also referred to as "user"). After the user attaches the protective film to a photomask or the like, the photomask or the like protected by the protective film is supplied to a manufacturer who performs photolithography processing by a semiconductor manufacturer or a liquid crystal panel manufacturer. When the protective film is transported from the manufacturer to the user, in order to prevent the foreign matter from adhering to the protective film or to prevent damage to the protective film, the protective film is generally housed in a protective film containing the tray and the lid on which the protective film is placed. In the storage container, the film storage container is stored in a dust bag or the like and transported. However, in the film storage container, it is necessary to have a sealing property for preventing dust from adhering to the film. In addition, in order to prevent the cover film from being in contact with the film for the film, the film for the film is contaminated or damaged, and it is required to be able to reliably maintain the film for the film in a non-contact state. Usually, the film storage container is produced by injection molding or vacuum forming a resin such as ABS or acrylic. The reason for using these forming methods is that they have the following advantages: smooth surface, low possibility of adhesion or dusting of foreign matter; no seam due to integral molding, and low possibility of dust or foreign matter intrusion; complex shape The film storage container is also easy to manufacture; and the mass productivity is excellent, and the cost can be reduced. As a M427592 large-capacity retractable container which is mainly used for a liquid crystal film, it is generally used for vacuum forming a synthetic resin sheet such as ABS or acrylic. The reason for this is that in the injection molding in which the resin is injected into the mold at a high speed from one or more flood ports, the flow distance of the resin is too long, and thus the production method is difficult. On the other hand, in the vacuum forming, the vacuum processing can be carried out only by covering the heated resin sheet on the mold, so that it is easy to form a large-sized protective film container. Secondly, in the case of vacuum forming, there is a problem that it cannot be formed into a thick soil, and although it can be reinforced by the degree of the rib, it is difficult to make a high rigidity because only the sheet having substantially the same thickness is bent. By. Therefore, the film-receiving barn needs to be hunted by some means to suppress deformation of the cover or the film mounting table. Therefore, the present applicant has proposed a technique of suppressing deformation of a film storage container by attaching a reinforcing plate to at least one of a tray or a cover, by partially applying weight to a portion of the adhesive layer for the photomask. The air passage is prevented from being generated or the tray or the lid is prevented from coming into contact with the cover film due to warpage or deformation (see Patent Document 1). Further, the present applicant has proposed a technique of suppressing warpage of a lid or a tray due to high temperature during conveyance of a film storage container by providing ribs to at least one of a tray or a lid. The deformation is prevented and foreign matter is prevented from intruding (see Patent Document 2). Moreover, as a method of not using the reinforcing material, the following film storage container is proposed: the twist direction is particularly improved by arranging a plurality of ribs which are diagonal to the tray shape and which are not intersected with other ribs. The rigidity is high (refer to Patent Document 3). M427592 Further, 'the following film storage container is proposed: a step portion is provided on either the outer side or the inner side of the mounting table of the protective film frame on which the tray is placed, and the main portion is placed below the step portion. The film frame makes it difficult to move the film during transportation and reduces the risk of the adhesive material curling on the bottom surface of the film frame (refer to Patent Document 4). [PRIOR ART DOCUMENT] [Patent Document 1] Japanese Patent Laid-Open Publication No. 2005-49765 [Patent Document 2] Japanese Patent Laid-Open Publication No. Hei No. Hei. Japanese Laid-Open Patent Publication No. Hei No. Hei. No. Hei. No. Hei. No. 2, No. 7,47,238 [New Content] [Problems to be Solved by the Creation] As described above, in general, the film storage container is used by A resin such as ABS or acrylic is produced by injection molding or vacuum forming. Therefore, when the rigidity of the other reinforcing plate is used to increase the rigidity, the rigidity can be sufficiently obtained, but the weight is increased, so that there is a problem that the larger the area of the film for the film, the stronger the plate is to ensure the rigidity. The weight is greater than the weight of the container body. Moreover, it is not only necessary to reinforce the panel itself but also parts for fastening the reinforcing panel to the container body, and thus the working time of mounting the component on the container body is also required, so that it is the same as the container body only. Than, into. This has increased dramatically. The ribs increase the rigidity. However, as in the patent document, when the shape is not used previously without using the reinforcing plate, the above-mentioned problem of weight increase can be reduced. M427592 2 "If the shape of the rib is made to be diagonally connected to the outer shape On the upper X-shape, the rigidity of the twisting direction may be extremely lowered due to the intersection of the ribs, and the tray is twisted along any-diagonal line and curved in a manner close to the apex. Further, the arrangement of the ribs as described in Patent Document 3 is effective for the rigidity in the twisting direction of the tilt of the tray, but is present near the apex of the rib near the edge of the side, or near the edge of the side. There is no rib, so there is a problem when the tray is transported, gp, when manually transporting the short side or the two sides of the long side, or when using the stacker to move the tray near the center, etc. Stress is generated near the center of the side so that the rigidity in the direction of the crease perpendicular to the side tends to be weak. Moreover, when the large-sized film is attached to the reticle when the automatic take-out machine is used, it is necessary to adsorb the bottom surface of the holding tray, so that the bottom surface of the squeegee is preferably relatively flat, and the right is like a patent. When the ribs are arranged as shown in the document 3, the larger the size of the protective film container is, the more the ribs need to be provided. Therefore, there is a problem that the surface of the flat surface is reduced, and it is difficult to adsorb and hold the bottom surface of the tray. Further, in the film storage container disclosed in Patent Document 4, since only one of the outer side and the inner side of the mounting table has a step portion, when the entire film storage container receives an external force, the film holding table is placed. The flatness was not maintained, and the wrinkles of the film for a film were not able to be prevented when carrying a film (corresponding to the comparative example 1 mentioned later). The area of the film for the film for covering the film (hereinafter, simply referred to as "area") is a film storage of a large protective film of more than 5 〇〇〇cm 2 and 8 〇〇〇 and further 10000 cm 2 . In the case of the container, the M427592 was not used, and the film container body could not maintain sufficient rigidity and the flatness of the bottom surface, and the wrinkles of the film for the film were not prevented. [Technical means for solving the problem] Therefore, in order to solve the above problems, the present inventors have found that the following film storage container can solve the above problems, and that the film storage container includes the center bottom surface of the tray from the center of the tray. a mounting table having a substantially angular annular shape on which the bottom surface is raised toward the upper side and a peripheral portion extending from the outer periphery of the mounting table in a horizontal direction, wherein between the bottom surface of the tray and the mounting table, A buffer portion is provided between the mounting table and the extension portion. In other words, the protective film storage container of the present invention has a tray on which a protective film for a film for a protective film is spread on one edge of a protective film frame, and a lid body from which the tray is placed The upper part is covered; the tray is contained in the film storage container. a bottom surface of the tray; a substantially annular annular mounting table that is erected from the central bottom surface of the tray to the upper side and placed with a protective film; and an extension portion extending in a horizontal direction from the outer periphery of the mounting table; and A buffer portion is provided between the central bottom surface and the mounting table, and between the mounting table and the extension portion. Furthermore, it is preferable that the buffer portion between the bottom surface of the tray and the mounting table is divided into two or more step portions at a height position different from the center bottom surface of the tray and the mounting table; The buffer portion between the mounting table and the extension portion is divided into two or more step portions at a height position different from the mounting table and the extension portion. Furthermore, it is preferable that an area of the buffer portion formed in the vicinity of the corner portion of the mounting table in the slow M427592 punching portion between the center bottom surface of the tray and the mounting table is extended toward the bottom surface of the tray. Relatively increased. Furthermore, it is preferable that a buffer portion between the center bottom surface of the tray and the mounting table, that is, a buffer portion formed near a corner portion of the mounting table, has a mounting table facing the protective film frame from a center bottom of the tray. The vertical direction of the diagonal that rises and traverses the shape of the tray. Further, it is preferable that a second step portion in the height direction of the protective film frame is formed in the vicinity of the mounting table on the bottom surface of the tray. [Effects of Creation] According to the film storage container of the present invention, the rigidity of the film storage container, in particular, the rigidity and flatness of the mounting table can be ensured without using the reinforcing plate, so that the film can be prevented from being used when the film is conveyed. The wrinkles of the film are produced. [Embodiment] [First Embodiment] Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a view showing an overall configuration of a protective film storage container according to a first embodiment. Picture. Fig. 2 is a schematic front view showing a tray of the film storage container shown in Fig. 2; Figure 3 is a cross-sectional view of the ΙΙΙ-ΙΠ line shown in Figure 2. Furthermore, the same or equivalent parts of all figures are the same as the symbols. (Storage container) As shown in Fig. 1, the film storage container 1 includes a tray 2 on which the protective film 4 is placed, and a cover body that covers the top surface of the tray 2 and covers the top surface of the tray 2, and the tray 2 and The lid body 3 is sealed and fixed by a tape or the like (not shown), or is fixed by a fastening tool such as a jig (not shown). M427592 The protective film 4 accommodated in the protective film container 包含 includes a substantially annular annular protective film frame 4b having a shape matching with the shape of a mask or a proportional mask (not shown), and a film for mask 4a. And spreading on the upper edge surface of the film frame; and the adhesive layer 4c for the photomask, which is applied to the lower edge surface of the film frame 4b. The film for film 4a is a transparent polymer film such as a nitrocellulose cellulose derivative or a fluorine-containing polymer having a thickness of 1 μm. The film frame is a film frame having a shape matching the shape of a mask or a proportional mask (not shown) and having a thickness and a width of several millimeters. The mask is coated with an adhesive layer on the adhesive layer, and in order to maintain the adhesion of the adhesive, a protective film is adhered to the surface of the mask. Therefore, the twist direction of the cover 4b refers to lifting the protective film. The thickness direction of the film 4& film cover 4b, figure! The middle is indicated as the up and down direction. The material of the tray 2 and the lid 3 is preferably an engineering plastic, a reinforced plastic, a metal or the like. From the viewpoint of light weight and formability, plastic materials are often used in many cases, and acrylic resin, acrylonitrile resin, polycarbonate resin, polyethylene terephthalate resin, acrylonitrile butadiene·# can be used. Vinyl resin, etc. Further, in addition to the above resin, the material of the tray 2 and the lid 3 may be a polyester resin other than polyethylene terephthalate, an olefin resin such as ethylene or polypropylene, or polystyrene or acrylonitrile/benzene. A polystyrene resin such as a vinyl resin. In order to prevent adhesion of foreign matter due to static electricity, it is also possible to impart antistatic properties to the above resin. Moreover, fiber reinforced plastics can also be used. When a metal is selected, aluminum or the like is used from the viewpoint of weight reduction. The tray 2 and the lid body 3 can be manufactured by using a material such as vacuum forming, injection molding, or bonding. In particular, when a large tray 2 or a cover 3 is used, it is preferably manufactured by vacuum forming. The thickness of the tray 2 or M427592 mm~1 〇 mm ° body 3 is preferably the size of the i-tray 2 and the cover 3, and has a size slightly smaller than the size of the protective film 4 according to the storage film. The size of 4 is set and translucent black. As the lid body 3'4, it is easy to confirm the inside, and it is preferable to be transparent or as the tray 2. It is preferable that the foreign matter which is easy to confirm adhesion is preferably the tray 2 and the lid body 3 attached to each other as the tray 2 and the lid. The gap between the bodies 3 is preferably as narrow as possible in order to prevent intrusion of foreign matter from the outside. As shown in FIGS. 2 and 3, the tray 2 includes a tray bottom bottom surface $ having an opening on a side facing the lid body 3, a mounting table 6 on which a protective film* is placed, and a fitting portion 7' It is fitted to the lid body 3. (Buffering section of the mounting table) The mounting table 6 is raised from the periphery of the center bottom surface 5 of the tray toward the top surface side of the tray 2, that is, the side on which the protective film 4 is placed. Further, the mounting table 6 is formed with a buffer portion that is displaced in the height direction of the protective film frame 4b, and the protective film 4β is placed on the highest horizontal portion 13 of the swell on the mounting table 6 as a buffer portion. / As long as it is configured as a rib or a step difference of two or more steps, the external force can be absorbed, so that the force applied to the entire storage case is not directly transmitted to the mounting table, and the effect of the present invention can be exerted. Therefore, there are no special restrictions. On the outer edge side of the tray 2 on the mounting table 6, a first vertical surface portion 14a is formed which hangs downward from the horizontal portion 13 in a substantially vertical direction; a first horizontal surface portion 15a from the lower end of the first vertical surface portion 14a The second vertical surface portion 16a extends from the front end of the horizontal surface portion 15a of the M427592 to the lower portion in the substantially vertical direction and is connected to the fitting portion 7. Further, on the side of the center bottom surface 5 of the tray 6 of the mounting table 6, a first vertical surface portion 14b is formed which hangs downward from the horizontal portion 13 in a substantially vertical direction; a first horizontal surface portion 15b from the lower end of the first vertical surface portion i4b The horizontal direction of the tray 2 (the side of the bottom surface 5 of the tray) extends substantially horizontally; and the second vertical surface portion 16b' hangs from the front end of the first horizontal surface portion 15b further downward in the substantially vertical direction and is connected to the bottom surface 5 of the tray. . As described above, the horizontal portion 13, the first vertical surface portion 14a, the first horizontal surface portion 15a, and the second vertical surface portion 16a are formed on the outer edge side of the tray 2 of the mounting table 6 in the height direction of the protective film frame 4b. The buffer portion 8 is formed by the horizontal portion 13' the first vertical surface portion 14b, the first horizontal surface portion 15b, and the second vertical surface portion 16b, and is formed in the height direction of the protective film frame on the tray bottom bottom surface 5 side of the mounting table 6. Department 9. Further, the lengths of the first vertical surface portions 14a, 1 and 2, the second vertical surface portions 16a, (10), and the first horizontal surface portions 15a, 15b may vary depending on the size of the protective film, and may be different from each other. Further, it is preferable that the area of the buffer portion 8 formed in the vicinity of the corner portion 6a of the mounting table 6 in the buffer portion 8 between the tray center bottom surface 5 and the mounting table 6 is expanded toward the bottom surface of the tray, thereby The ground is enlarged. By arranging the area of the buffer portion 8 formed between the tray bottom surface 5 and the mounting table 6 and formed in the vicinity of the mounting table in the direction of the bottom surface of the tray, the twisted direction of the film storage container can be improved. Rigidity. Here, the first horizontal surface portion ... disposed in the vicinity of the corner portion 6a of the mounting table 6; -12. The M427592 portion A has a substantially triangular shape. The first vertical surface portion 16b is disposed at a diagonal across the outer shape of the tray 2. The position of the line, that is, the buffer portion 9 is formed as follows: the corner portion A of the first horizontal surface portion W disposed in the vicinity of the corner portion 6a of the mounting table 6 is formed in a substantially r_|open double-month shape, and The second vertical surface portion 16b is disposed at a position opposite to the diagonal line of the outer shape of the stacking tray 2. The rigidity of the twist of the tray 2 is improved by the buffer portion 9' thus formed, and the flatness of the mounting table 6 can be maintained. Further, when the second vertical surface portion (10) is disposed at a position intersecting the diagonal line of the outer shape of the tray 2, the second vertical surface portion (10) can be increased in rigidity against twisting of the tray 2, and the flatness of the holding table 6 can be maintained. The effect is within the scope of the effect, and does not necessarily require strict verticality. Here, the size and the like of the substantially triangular shape formed in the corner portion a of the first horizontal surface portion i5b will be described with reference to Fig. 7 . As shown in Fig. 7, the length of the long side of the outer shape of the tray 2 is set to χ, and the length of the side parallel to the long side of the outer shape of the outer shape of the tray 2 formed in the substantially triangular shape of the corner portion A is X. At this time, the ratio (χ/χ) of the length X of the side of the triangular shape parallel to the long side of the outer shape of the tray 2 to the length 长 of the long side of the outer shape of the tray 2 is preferably 0. 5 to 50%, more preferably 45%, further preferably 3 to 4%, more preferably 5 to 30%, still more preferably 8 to 25%, and most preferably 1 to 2%. As described above, when the ratio of the length χ of the side of the rectangular shape parallel to the long side of the outer shape of the tray 2 to the length X of the long side of the outer shape of the tray 2 is in such a range, the rigidity is particularly improved, which is preferable. Therefore, in the present embodiment, the ratio (χ/Χ) of the length 边 of the side of the rectangular shape parallel to the outer long side of the tray 2 to the length X of the long side of the outer shape of the tray 2 is 14 〇 / 〇. Further, the length of the short side of the outer shape of the tray 2 is set to γ, and the length of the side parallel to the short side of the outer shape of the outer shape of the disk 2 formed in the substantially triangular shape of the corner portion -13 - M427592 a is set to y» The ratio (y/Y) of the length y of the side of the triangular shape parallel to the short side of the outer shape of the tray 2 with respect to the length y of the short side of the outer shape of the tray 2 is preferably 0. 5~50%, more preferably 〖~45%, and even more preferably 3~4〇%, even more preferably 10~40%, optimally 15~35% „So, if it will be short side with the tray 2 shape The ratio of the length y of the side of the parallel two-corner shape to the length Υ of the short side of the outer shape of the outer shape of the tray 2 is such a range that the rigidity is particularly improved. Therefore, in the present embodiment, the tray 2 is The ratio of the length y of the side of the short-side parallel triangular shape to the length γ of the short side of the outer shape of the tray 2 (y/Y) is set to 17. 5%. Further, the angle formed by the diagonal line of the outer shape of the tray 2 and the second vertical surface portion 16b is preferably 30 to 110. More preferably, it is 7〇~1〇〇. The best is 9〇. . Further, as the buffer portion formed on the mounting table 6, it is preferable to form a step of one or more steps in the direction perpendicular to the mounting table 6, and since the mounting table 6 itself is narrow, the step is preferably 1 ~ 3 paragraphs. Further, in terms of the relationship between the formability and the like, it is preferable that the buffer portion formed on the mounting table 6 is a step which is formed in a direction perpendicular to the direction perpendicular to the mounting table 6. Further, since the buffer portions formed on the mounting table 6 are formed on both sides of the mounting table 6, the balance is better and the rigidity is also higher. Also, the flatness of the horizontal portion 13 is also excellent. The horizontal portion 13 is placed at the place where the protective film frame 4b is placed. Therefore, if the flatness of the horizontal portion 13 is deteriorated, the adhesive material of the adhesive cover layer 4c of the photomask is deformed following the deterioration of the flatness of the horizontal portion 13. When attached to a photomask, problems such as air passages may occur. (radius of curvature) M427592 and 'preferably, horizontal portion 13 and first-vertical surface portion 14a, first vertical surface portion... and first-level surface portion 15a, first horizontal surface portion 15a and first vertical surface portion 16a, first vertical surface portion 16a and The fitting portion 7, the horizontal portion 13 and the first vertical surface portion 14b, the first vertical surface portion (4) and the first horizontal surface portion 15b, the first horizontal surface portion (5) and the second vertical surface portion (6), the second vertical surface portion 16b, and the center bottom surface of the tray 5 Connection structures with specific radii of curvature, respectively. When the right side is connected at right angles, there is a tendency for stress to concentrate on the apex, so that concentrated stress acts on the connecting portion. In this regard, the dispersion of stress can be achieved by making the joint portion have a small radius of curvature ' and it is also effective for the flow or demolding of the resin at the time of forming. If the radius of curvature is 〇_5 mm or more, it is preferable. The upper limit may be appropriately set within the optimum range according to the large value of the mounting table 6, but it is preferably 200 mm or less and further 100 mm or less as long as it is 3 mm or less. Among them, it is preferably 111111 30 mm, more preferably 2 mm to 2 mm, and still more preferably 2 mm to 15 mm. Further, the angle formed by the buffer portions is not necessarily limited to 9 inches. </ RTI> can be appropriately set, and the angles can be made obtuse from the viewpoint of the manufacture of the tray 2 or the like. (Fitting portion) The fitting portion 7 includes an extension portion 7a extending in the horizontal direction from the outer periphery of the mounting table 6, and an outermost portion 7b extending upward from the outer peripheral portion of the epitaxial portion. Further, the fitting portion 7 has a shape corresponding to the lid body 3, and when the tray 2 is covered by the lid member 3, it can be in close contact with the lid body 3. Further, the fitting portion 7 may further include an edge portion (not shown) extending outward from the peripheral end portion of the most extension portion 7b. M427592 [Second Embodiment] Next, a description will be given of a film storage basket in the second embodiment with reference to Figs. 4 and 5 . Fig. 4 is a schematic cross-sectional view showing the overall configuration of a protective film storage container according to a second embodiment. Fig. 5A is a schematic front view showing a tray of the film storage container shown in Fig. 4; Fig. 6 is a cross-sectional view taken along the line ¥1¥1 shown in Fig. 5. (Storage container) The film storage container 21 is basically the same as the film storage container 1 of the first embodiment, and only the shape of the tray is different from that of the film storage container 1 of the second embodiment. Therefore, only the portions different from the film storage container 1 in the second embodiment will be described below, and the other description will be omitted. As shown in FIG. 4, the film storage container 21 includes a tray 22 on which the protective film 4 is placed, and a lid body 3 that covers the top surface of the tray 22. Further, the tray 22 and the lid body 3 are sealed and fixed by a tape or the like (not shown), or are fixed by a fastening tool such as a jig (not shown). As shown in FIGS. 5 and 6, the tray 22 includes a tray bottom bottom surface 25 having an opening on a side facing the lid body 3, a mounting table 26 on which the protective film 4 is placed, and a fitting portion 27, which is The lid body 3 is fitted. (Second step portion of the bottom surface of the tray) The pair of second step portions 37 are formed in the height direction of the film frame 4b on the bottom bottom surface 25 of the tray so as not to affect the suction of the automatic take-out. The second step portion 37 is formed in a substantially triangular recess ” disposed in the vicinity of the long side of the mounting table 26 and is formed with a vertical surface portion 37a that is vertically downward from the center bottom surface 25 of the tray, and is connected to the vertical surface portion 37a. The lower end portion 37b of the lower end edge of the -16-M427592. (Buffering Portion of the Mounting Table) The mounting table 26 is swelled from the periphery of the center bottom surface 25 of the tray toward the side on which the protective film 4 is placed. Further, the mounting table 26 has a buffer portion in the height direction of the sheath frame 4b, and the protective film 4 is placed on the highest horizontal portion 33 of the swell of the mounting table 26. On the outer edge side of the tray 22 on the mounting table 26, a first vertical surface portion 34a' is formed to sag downward from the horizontal portion 33 in a substantially vertical direction; a first horizontal surface portion 35a from the lower end of the first vertical surface portion 34a To the plate. The outer edge direction extends substantially horizontally; and the second vertical surface portion 36a is further suspended from the front end of the first horizontal surface portion 35a toward the lower side in the substantially vertical direction and is connected to the fitting portion 27. Further, on the side of the center bottom surface 5 of the tray on the mounting table 26, a first vertical surface portion 34b is formed which hangs downward from the horizontal portion 33 in a substantially vertical direction; a first horizontal surface portion 35b from the first vertical surface portion 341) The lower end extends substantially horizontally toward the center of the tray 22 (the side of the bottom surface 5 of the tray); and the second vertical surface portion 36b is further suspended from the front end of the first horizontal surface portion 35b toward the lower side of the substantially vertical direction and the center of the tray The bottom surface 5 is connected. In this manner, the horizontal portion 33, the first vertical surface portion 34a, the first horizontal surface portion 35a, and the second vertical surface portion 36a form a buffer portion in the height direction of the protective film frame 4b on the outer edge side of the tray 22 of the mounting table 26. 28, and the horizontal portion 33, the first vertical surface portion 34b, the first horizontal surface portion 35b, and the second vertical surface portion 36b' are buffered in the south direction of the protective film frame on the tray bottom bottom surface 5 side of the mounting table 26. Department 2 9. Further, the second vertical surface portion 36b is disposed across the diagonal of the outer shape of the tray 22 so that the four corner portions B of the first horizontal surface 17 M427592 portion 35b disposed near the corner portion 26a of the mounting table 26 have a substantially triangular shape. The position of the line. Here, the range of the substantially triangular shape or the like formed in the corner portion B of the first horizontal surface portion 35b is substantially the same as the triangular shape formed in the corner portion A of the first horizontal surface portion 15b described in the first embodiment. The dimensions and the like are the same (see Fig. 7). Therefore, in the second embodiment, the ratio (Χ/Χ) of the length 边 of the side of the rectangular shape parallel to the long side of the outer shape of the tray 22 to the length X of the outer side of the outer shape of the tray 22 is set to 15%, and The ratio (y/Y) of the length y of the side of the rectangular shape in which the short side of the tray 22 is parallel to the short side of the outer shape of the tray 22 is set to 33 〇/〇. Further, on the long side of the mounting table 26, only the first vertical surface portion 34b is formed, and the first horizontal surface portion 35b and the second vertical surface portion %^^ are not formed. In other words, the buffer portion 29 is formed such that the corner portion B of the first horizontal surface portion 35b disposed in the vicinity of the corner portion 26a of the mounting table 26 is formed in a substantially triangular shape, and the second vertical surface portion 36b is disposed in the outer shape of the tray 22. In the position where the diagonal line is overlapped, the buffer portion 29 is not provided on the long side of the mounting table 26, and the second step portion 37 is provided in the vicinity of the mounting table 26 on the center bottom surface 5 of the tray. Further, in this manner, the second step portion may be provided on only one side of the long side of the mounting table 26, or the second step portion may be provided on both sides. (radius of curvature) and 'preferably, not only the horizontal portion 33 and the first vertical surface portion 34a, the vertical portion 34a and the first horizontal surface portion 35a, the first horizontal surface portion 35a and the first vertical surface portion 36a, and the second vertical surface portion 36a And the fitting portion 27, the horizontal 4 blade 33 and the first vertical surface portion 34b, the first vertical surface portion 3 and the first horizontal M427592 face portion 35b, the first horizontal surface portion 35b, the second vertical surface portion, and the second vertical surface portion 36b Each of the tray center bottom surfaces 25 has a connection structure having a specific radius of curvature, and the tray center bottom surface 25 and the vertical surface portion Wa, the vertical surface portions 37a, and the bottom surface portion 37b also have a connection structure having a specific curvature radius. If they are connected at right angles, stress is concentrated on the apex of the apex, so that the stress is applied to the connecting portion. On the other hand, the dispersion of the stress can be achieved by making the connecting portion have a small radius of curvature ', and the flow or the release of the resin during molding can also be effectively performed. If the radius of curvature is 0. More than 5 mm is preferred. The upper limit may be appropriately set in the optimum range according to the size of the mounting, but it may be __ or less, and more preferably 200 Å or less, and further 1 〇〇 or less. Preferably, 2 _ ~30 mm, more preferably 2 _~2 brewing, and more preferably 2 _~15 dragons. Further, the angle formed by these steps is not necessarily limited to the state, and can be appropriately compared with the tray 2 The angle of manufacture may be set to a pure angle. (Matching portion) The fitting portion 27 includes an outer extension 4 27a extending from the outer periphery of the mounting table 26 in the horizontal direction, and a circumference from the extension portion 27a. The end portion 27b extending upward, and the fitting portion 27 has a shape corresponding to the lid body 3. When the lid body 3 covers the tray 22, it can be in close contact with the lid body 3. The portion i may further include an edge portion (not shown) extending outward from the peripheral end portion of the most extension portion 27b. The above embodiment of the present invention is described with reference to the drawings. This creation is not limited to the above-mentioned exceptions. The industry understands that the scope of the ideas can be described in the scope of the application of Patent -19· M427592. It is to be noted that various modifications and corrections are also within the technical scope of the present invention. For example, in the first embodiment, the second vertical surface portion 16b of the mounting table 6 is linear (planar), but The shape is not limited to the arc shape (curved surface) of the concave shape as shown in FIG. 7 and 16b, and may be a convex arc shape (curved surface) as shown in FIG. 7 and 16b". At this time, the angle formed by the diagonal line of the outer shape of the tray 2 and the second vertical surface portion 16b is the wiring of the second vertical surface at the position where the diagonal line of the outer shape of the tray 2 intersects with the second vertical surface portion 16b and the shape of the tray 2 The angle formed by the diagonal line is also the same, and the second vertical surface portion 36b of the second embodiment is also the same. Moreover, the mounting table 6 does not necessarily need to be completely annular, and may be, for example, only in the shape of the tray 2. The portion in which the short sides are parallel is formed in a ring shape, and may be formed in a ring shape only in a portion parallel to the long side of the outer shape of the tray 2. [Embodiment] The following Tables are not specific examples and comparative examples, and evaluations thereof are made. Detailed description will be given. [Embodiment 1] In Embodiment 1 In the film storage container according to the second embodiment, the tray for storing the film is vacuum-formed using ABS resin having an outer diameter of a width i, a depth of 1600 mm, a width of 60 mm, and a thickness of 6 mm. Further, a buffer portion is provided between the bottom surface of the tray center and the mounting table, and between the mounting table and the extension portion, and the first horizontal surface portion near the corner portion of the mounting table is formed in a triangular shape, and further in the center of the tray The bottom surface is provided with a triangular step (see Fig. 4). • 20· M427592 The protective film storage container of the above-described first embodiment is placed on the table of the laboratory, and the corners of the three portions of the protective film storage container are together with the table. Clamp and fix, and use the remaining scale at the corner to 2. The force of 5 kgf was stretched, and the warpage (deformation amount) of the film storage container was measured by a metal ruler. Confirm the film wrinkles at this time. The measurement results are shown in Table 1. [Embodiment 2] In the second embodiment, the film storage container according to the first embodiment is used. The tray of the film storage container has an outer diameter of 95 mm, a depth of 14 mm, a length of 85 mm, and a thickness. Vacuum forming of 5 mm ABS resin. Further, the same experiment as in the first embodiment was carried out except that a buffer portion (see Fig. 2) was provided between the bottom surface of the tray and the mounting table, and between the mounting table and the extension portion. The measurement results are shown in the table. [Comparative Example 1] In Comparative Example 1, the following film storage container was used: In the film storage device of the first embodiment, the mounting table is not raised, but only the center surface of the tray and the mounting table disposed on the inner side of the mounting table. A buffer portion was provided between them, and experiments were carried out in the same manner as in the examples. The measurement results are shown in the table. [Comparative Example 2] In Comparative Example 2, the following tank amine was used, and the film storage container was prepared in the following manner: in the film storage container of Example 1, there was no buffer on the load σ of the ridge of the ridge. Department, and with the embodiment! Experiments were performed in the same manner. The measurement results are shown in the table. [Comparative Example 3] In Comparative Example 3, the following enamel film was used, and the thin film accommodating device was used: in the protective film storage container of Example 2, there was no buffer portion in the ridge of the ridge and the σ. The experiment was carried out in the same manner as in Example 1-21-M427592. The measurement results are shown in Table 1 β [Table 1] Deformation film wrinkle Example 1 22 mm No Example 2 34 mm No Comparative Example 1 40 mm A little ^, Comparative Example 2 56 mm Comparative Example 3 124 mm i_ - Obviously, as shown in Table 1, in Comparative Examples 1 to 3, film wrinkles were confirmed, and in Examples 1 and 2, it was confirmed that no film wrinkles were generated. [Industrial Applicability] This creation can be used as a film storage container. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic cross-sectional view showing the overall configuration of a protective film storage container according to a first embodiment. Fig. 2 is a schematic front view showing a tray of the film storage container shown in Fig. 2; Figure 3 is a plan view of the ΙΠ-ΙΙΙ line shown in Figure 2. Fig. 4 is a schematic cross-sectional view showing the overall configuration of a protective film storage container according to a second embodiment. Fig. 5 is a schematic front view showing a tray of the film storage container shown in Fig. 4; Figure 6 is a cross-sectional view taken along line VI-VI of Figure 5. Fig. 7 is a view for explaining the size and the like of the substantially two-corner shape formed at the corner portion 第一 of the first horizontal surface portion 15b. -22· M427592 [Description of main components] 1 Protective film storage container 2 Tray 3 Cover 4 Protective film 4a Film for protective film 4b Protective film frame 4c Adhesive layer for photomask 5 Center bottom surface of tray 6 Mounting table 6a Corner 7 Fitting portion 7a Epitaxial portion 7b Most epitaxial portion 8 Buffer portion 9 Buffer portion 13 Horizontal portion 14a First vertical surface portion 14b First vertical surface portion 15a First horizontal surface portion 15b First horizontal surface portion 16a Second vertical surface portion 16b Second vertical surface portion 21 Film storage container•23· M427592 22 tray 25 tray center bottom surface 26 mounting table 26a corner portion 26b mounting table 27 fitting portion 27a extension portion 27b most extension portion 28' 29 buffer portion 33 horizontal portion 34a first vertical surface portion 34b first Vertical face 35a First horizontal face 35b First horizontal face 36a Second vertical face 36b Second vertical face 37 Second step portion 37a Vertical face 37b Bottom portion A, B Corner portion - 24-