M422698 五、新型說明： 【新型所屬之技術領域】 本創作係有關於一種鍵盤之感測構造，特別是指一 種具i電式振動模組的觸控鍵盤之按壓感測彳薄造。 【先前技術】 近年來，觸控板及觸控螢幕作為指令輸入工具已廣泛應 用於行動電話、電腦等電子產品。以觸控螢幕為例，使用者可 以方便地使用手接觸該觸控螢幕以輸入指令。另外，以裝設在 鍵盤上的觸控板為例，使用者可以用手指輕觸觸控板或是在上 面滑動，以類似滑鼠操作的方式，向電腦發出操作指令。 觸控板及觸控螢幕通常有電阻式、電容式、超音波式及 紅外線式等多種類型，其中又以電阻式觸控板的產品最多電 阻式觸控板的設計主要又可區分為四線式、五線式、八線式。 而四線式觸控板因為成本及技術層面較為成熟等有利因素，幾 乎是所有觸控板業者最基本的生產規格，其基本架構為一氧化 銦錫導電玻璃(Indium Tin Oxide Glass，ITO Glass)，一 導電薄 膜(ITOFilm)，一般而言，IT0Glass與⑽即瓜導通後均使 用+5V電壓’及一位於二者之間的絕緣間隙子饰黯），其目 的在於將ITO Glass與1丁〇 Film進行支撐與分開，以避免無 觸摸時因導通造成短路而產生誤觸動作。 ； 而般笔阻式觸控面板係利用分別設置在上基板(包括第 一導電層)的第一感測層與設置在下基板(包括第二導電層)的 3 第二感測層之間非接觸式而懸空的結構，在使用者按壓時，必 /貝使第-感_與彳層獅，才會產生滅給微控單元 進仃後續作動’若是按壓的施力夺小導致第一感測層與第二感 測層並未接觸到，就無法發出訊號給微控單元，造成無動作的 現象發生，且沒有回饋訊號給振動器以產生提示振動，使用者 可能會以為觸控面板產生問題或是接觸不良等，對使用者而言 會認為產品有問題’對製造商而言在商譽上亦容易受損。 有鑑於此，本案創作人遂以其所申請並經我國智慧財產 局核準之中華民國新型專利第M39駡號之新型專利為基礎 及其多年從事難之製造及設計實務驗，而積極研究改 良’並經多二欠實物樣品製作及測試，進而具體改良習知鍵盤之 上述缺點，終致完成本創作。 【新型内容】 因此，本創作目的係在於解決上述問題，而提供一 種以壓阻材料或壓電材料之中間層作為對第一導電層 與第二導電層直接進行失層支#，並藉以發出按壓訊 號，而不會有按塵後無觸動回饋訊號之情形，以期增進 觸控式鍵盤之使用效能者。 :故’為達上述目的’本創作係提出一種觸控鍵盤之按壓 _構造’其㈣括i電式觸控板及—壓電式振動模 、，且’其中.該壓電式觸控板係包括一下基板，係為塑料材 質所製；-第二導電層’係4置在該下基板上；奸按縣構， 系相互間h地佈没在该第二導電層上，各該碰結構罝有一减 測層、-接觸層及-連接層，該_層係疊置在該第二導電層 上二該接觸層係疊界在該感測層上，且該接觸層係由屋阻材科 或壓％材料所觀，而該連接層係疊置在該接觸層上；—第一 導電層，係設置在該等按壓結構上；以及一上基板，係由塑料 材貝所製成，且疊置在該第_導電層上；而該壓電式振動模組 係包括i控單元一轉換器及至少—壓電式振妨，該壓電 式振動模組係與該壓電式觸控板電氣相接。 較佳者，該觸控式鍵盤結構更包括若干間隙子，係分 別地設置在各該按壓結構之間，且疊置在該第二導電層 上，各該間隙子係藉-框膠層巾與該第一導電層連接。 本創作上述之目的及優點，不難從下述所選用實施例之 詳細說明與關巾，獲得深人瞭解。當然，本創作在某些另件 上’或另件之安排上料有所不同，但所選用之實施例，則於 本說明書中，予以詳細說明，並於附圖中展示其構造。 【實施方式】 關於本創作藉以達到上述目的之技術手段，茲以下列實 施型態配合圖示於下文作詳細說明之。 請同時參考圖1及圖2，其中，圖丨係表示本創作觸控鍵 盤之按壓感測構造的立“外觀圖，圖2係表示本創作觸控 鍵盤之按壓感測構造從圖1之A-A剖線的剖視圖。 本創作的觸控鍵盤之按壓感測構造係包括一壓電式觸控 板1及一壓電式振動模組7，其中： 該壓電式觸控板1係包括一下基板2、一第二導電層3、 若干ί壓結構4、一第一導電層5以及一上基。 θ 遠下基板2係為塑料材質所製成，例如聚對笨二曱酸乙 二醇脂(Polyethylene Terephthalate，PET)，但並不以此 為限，而戎第二導電層3係疊置在該下基板2上。 各該按壓結構4係相互間隔地佈設在該第二導電層3 上，並具有一感測層41、一接觸層42及一連接層43，其中， 该感測層41係由感赌質(如導體、半導體等)所製成，且疊 置在該第二導電層3上，該接觸層42係疊置在該感測層^ 上，且該接觸層42係由壓輯料或魏材料所製成，而該連 接層43係疊置在該接觸層42上。 由於該接觸層42係由壓阻材料製成而具有壓阻效應，即 指當該細層42細树受形卜界壓力侧於其上時，其電 阻值會隨之改變’尤其當以半導體材料作域測元件材質時， 阻值變化較熟材肢域著；另#該_層42係由壓電材 料製成時’壓t材料特_具樣較應⑼⑽而 屬-種機械能與電能互換的現象，而壓電材料會有壓電效應是 因晶格，子間特殊排財式’使得材财應力，與電場偶合 的效應’壓電效财_，即正壓纽應⑼酬如牆咖 effect)及逆壓效應(converse piez〇electric effect)，其中，正壓 電效應係將機械能轉換為電能，當對壓電材料施以物理壓力 M422698 時’材料體内之電偶極矩會因塵縮而變短，此時壓電材料為抵 抗这變化會在材料表面產生正貞電荷⑽持原狀，即產生電壓 t或電流訊號，本創作即姻此種,理；而逆舰應係將^轉 為機械月匕’當在壓電材料表面施加電場(電塵），因電場作用 時電偶極矩會被拉長，壓電材料為抵抗變化而沿電場方向伸 長。 第-導電層5係設置在所有按壓結構4上，而上基板6 的材質與下基板2相同，係由如ρΕτ的塑料材質所製成，且 疊置在第一導電層5上。 另外，在該上基板6上更可疊置一印刷層(圖未示），係印 製有若干鍵盤按鍵字母符號及數字，而為因應不同使用者的手 指大小’各個按鍵字母觀及數字係姉應單—健壓結構4 而5又置’或者是相對應多個按塵結構4而設置，意即單個按鍵 予母符號或數字與其相對應—健壓結構4，係形成代表其符 號或數字的虛麵’或者是單触鍵字母符號絲字與其相對 應的多個㈣結構4 ’係代表其符號或數字的虛擬鍵。 為使該上基板6與下基板2之間的間距能更加穩固，因 此本創作觸控鍵盤之按愿感測構造之廢電式觸控板i更包括 1若干間隙子(Spacer)91，係分別$設置在各該按壓結構4 之間且d：置在该第二導電層3上，各該間隙子％係 藉一框膠層92而與該該第一導電層5連接。 而該壓電式振動模組7係包括一微控單元(MCU_micr〇 7 M422698 CO咖1副)71、-轉換器（inverter) 72及至少一虔電式振動 器73，該1電式振_組7係與越電式觸控板1電氣相接， 而該壓電式振動模$ 7係藉該微控單元71接收處理該壓電式 觸控板1之峨，趣由_觀π對訊號電壓鮮調變處 理後，進而啟動該壓電式振 73，_電式振肺73内部 係具有-壓電式振動片731，當接收到電壓訊號後，會因壓電M422698 V. New description: [New technical field] This creation is about a sensing structure of a keyboard, especially a touch sensing keyboard with an i-electric vibration module. [Prior Art] In recent years, touch panels and touch screens have been widely used as command input tools for electronic products such as mobile phones and computers. Taking a touch screen as an example, the user can conveniently touch the touch screen with his hand to input an instruction. In addition, taking the touchpad mounted on the keyboard as an example, the user can tap the touchpad with a finger or slide on the upper side to issue an operation command to the computer in a mouse-like manner. Touchpads and touchscreens are usually available in resistive, capacitive, ultrasonic, and infrared types. Among them, the most resistant resistive touchpads are designed to be four-wire. Style, five-wire, eight-wire. The four-wire touch panel is the most basic production specification for all touch panel manufacturers because of its cost and technical maturity. Its basic structure is Indium Tin Oxide Glass (ITO Glass). , a conductive film (ITOFilm), in general, IT0Glass and (10) that after the melon is turned on, the +5V voltage 'and an insulating gap between the two are used), the purpose is to ITO Glass and 1 〇 The film is supported and separated to avoid a false touch caused by a short circuit caused by no contact when there is no touch. And the pen-type touch panel is different between the first sensing layer respectively disposed on the upper substrate (including the first conductive layer) and the third sensing layer disposed on the lower substrate (including the second conductive layer) The contact-type and suspended structure, when the user presses, must make the first sense and the 彳 layer lion, will produce the fire to the micro-control unit, and then follow the action. When the measurement layer and the second sensing layer are not in contact, the signal cannot be sent to the micro control unit, causing no action, and there is no feedback signal to the vibrator to generate the prompt vibration. The user may think that the touch panel is generated. Problems or poor contact, etc., the user will think that the product has a problem 'is also easy to damage the goodwill of the manufacturer. In view of this, the creator of this case is actively researching and improving based on the new patents that he applied for and approved by the Intellectual Property Office of China for the new model of the Republic of China No. M39, and for many years of difficult manufacturing and design practice. And through the production and testing of more than two physical samples, and then specifically improve the above shortcomings of the conventional keyboard, and finally complete the creation. [New content] Therefore, the purpose of the present invention is to solve the above problems, and to provide an intermediate layer of a piezoresistive material or a piezoelectric material as a direct layer of the first conductive layer and the second conductive layer, and thereby The signal is pressed, and there is no need to touch the feedback signal after the dust is pressed, in order to improve the performance of the touch keyboard. : Therefore, in order to achieve the above objectives, the author of the present invention proposes a touch keyboard pressing _structure' (4) including an electric touch panel and a piezoelectric vibration mode, and 'the piezoelectric touch panel The first substrate is made of a plastic material; the second conductive layer '4 is placed on the lower substrate; the ridges are constructed by the county, and the other grounds are not disposed on the second conductive layer. The structure has a subtraction layer, a contact layer and a connection layer, wherein the layer is stacked on the second conductive layer, and the contact layer is overlapped on the sensing layer, and the contact layer is blocked by the housing a material or a % of material, wherein the connecting layer is superposed on the contact layer; a first conductive layer is disposed on the pressing structure; and an upper substrate is made of plastic material And superposing on the first conductive layer; and the piezoelectric vibration module includes an i-control unit-converter and at least a piezoelectric vibrating system, and the piezoelectric vibrating module is coupled to the piezoelectric type The touchpad is electrically connected. Preferably, the touch keyboard structure further includes a plurality of gaps respectively disposed between the pressing structures and stacked on the second conductive layer, each of the gaps being a frame-by-frame adhesive layer Connected to the first conductive layer. The above objects and advantages of the present invention are not difficult to understand from the detailed description of the selected embodiments described below. Of course, the present invention differs in the arrangement of certain parts or parts, but the selected embodiments are described in detail in the present specification, and the construction thereof is shown in the drawings. [Embodiment] The technical means by which the present invention achieves the above object will be described in detail below with reference to the drawings. Please refer to FIG. 1 and FIG. 2 simultaneously. FIG. 2 is a front view showing the pressing sensing structure of the present touch keyboard, and FIG. 2 is a view showing the pressing sensing structure of the present touch keyboard from the AA of FIG. 1 . A cross-sectional view of the touch panel of the present invention includes a piezoelectric touch panel 1 and a piezoelectric vibration module 7, wherein: the piezoelectric touch panel 1 includes a lower substrate 2. A second conductive layer 3, a plurality of pressing structures 4, a first conductive layer 5, and an upper substrate. θ The lower substrate 2 is made of a plastic material, such as poly(p-bismuth citrate) (Polyethylene Terephthalate, PET), but not limited thereto, and the second conductive layer 3 is stacked on the lower substrate 2. Each of the pressing structures 4 is disposed on the second conductive layer 3 at intervals from each other. And having a sensing layer 41, a contact layer 42 and a connecting layer 43, wherein the sensing layer 41 is made of gamma (such as a conductor, a semiconductor, etc.) and is stacked on the second conductive On the layer 3, the contact layer 42 is stacked on the sensing layer, and the contact layer 42 is made of a press material or a Wei material. And the connection layer 43 is stacked on the contact layer 42. Since the contact layer 42 is made of a piezoresistive material and has a piezoresistive effect, that is, when the fine layer 42 is subjected to a pressure on the boundary layer When it is above, its resistance value will change accordingly. Especially when the semiconductor material is used as the material of the domain measurement component, the resistance value changes more than the mature material limb; the other #42 layer is made of piezoelectric material. t material special _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The effect of 'piezoelectric effect _, that is, positive pressure should be (9) reward as wall coffee effect) and reverse effect (converse piez 〇 electric effect), where the positive piezoelectric effect is to convert mechanical energy into electrical energy, when the pressure When the electrical material is applied with the physical pressure M422698, the electric dipole moment in the material body will be shortened due to dust shrinkage. At this time, the piezoelectric material resists this change and will generate a positive electric charge on the surface of the material (10), which will generate the voltage t. Or the current signal, this creation is the marriage, and the reverse ship should turn ^ into the mechanical month.匕 'When an electric field (electric dust) is applied to the surface of the piezoelectric material, the electric dipole moment is elongated due to the electric field, and the piezoelectric material is elongated in the direction of the electric field in response to the change. The first conductive layer 5 is provided at all pressing The structure of the upper substrate 6 is the same as that of the lower substrate 2, and is made of a plastic material such as ρΕτ, and is stacked on the first conductive layer 5. Further, the upper substrate 6 is more superposed. A printed layer (not shown) is printed with a number of keyboard keys and symbols, and in response to the size of the fingers of different users, each button letter and digital system should be single-health structure 4 'Or is corresponding to a plurality of dust-removing structures 4, meaning that a single button to the mother symbol or number corresponds to it - the pressure-pressing structure 4 forms an imaginary surface representing its symbol or number' or a one-touch letter symbol The silk word corresponds to a plurality of (four) structures 4' which represent virtual keys of its symbols or numbers. In order to make the spacing between the upper substrate 6 and the lower substrate 2 more stable, the waste electric touch panel i of the touch sensing structure of the present touch keyboard further includes a plurality of spacers 91. Each of the pressing structures 4 is disposed between the pressing structures 4 and d is disposed on the second conductive layer 3, and each of the spacers is connected to the first conductive layer 5 by a sealant layer 92. The piezoelectric vibration module 7 includes a micro control unit (MCU_micr〇7 M422698 CO coffee 1 pair) 71, an inverter 72 and at least one electric vibrator 73. The group 7 is electrically connected to the Yueyue touch panel 1 , and the piezoelectric vibrating mold 7 is received by the micro control unit 71 to process the piezoelectric touch panel 1 . After the signal voltage is freshly modulated, the piezoelectric vibration 73 is activated, and the internal vibration type 73 has a piezoelectric vibrating piece 731. When the voltage signal is received, the piezoelectric vibration is caused.
效應使越電式振動片731產生機械變形而伸展及收縮，藉此 特性使得祕電伽^ 731產生鶴，俾令者於按壓字 鍵後，將感受到該壓電式振動器73之回饋振動，$，該壓電 式觸控板1底部尚疊置有—底板⑽，該底板⑽之適處係可供 該壓電式織模組7組設定，並可提供簡電式觸控板】 支撐及保護的效果。 “請參考圖3，係表示本創作觸控鍵盤之按壓感測構造The effect causes the electro-vibration vibrating piece 731 to mechanically deform and expand and contract, whereby the characteristic causes the secret electric 365 to generate a crane, and the commander will feel the feedback vibration of the piezoelectric vibrator 73 after pressing the word key. , $, the bottom of the piezoelectric touch panel 1 is stacked with a bottom plate (10), the bottom plate (10) is suitable for the piezoelectric woven module 7 set, and can provide a simple electric touch panel] The effect of support and protection. "Please refer to FIG. 3, which shows the pressing sensing structure of the present touch keyboard.
藉由-微控單元71處_馈訊號的方襲；該碰結構4中 的感測層41射電性連接—微控單元71，頭微控單元71 係电性連接訊號之轉換器万，該轉換器％係電性連接該壓電 式振動器73 ’ _微控單元71經職轉換器72而可控制啟 動電式振動器73，俾令每次按壓字鍵時，能夠產生振動 的效果，其詳細作動將於後詳述。 ^請再啊參相4及圖5，其巾，圖4係麵本創作施力 於该上基板6 _叙單轉魏钱继姆應—健壓 結構4日_姻，圖5縣林創倾力於該JL基板6印刷 8 M422698 層之單個符號數字鍵與其相對應的多個按壓結構4時的剖視 圖。 章使用者以手指按廢施力於該上基板6印^層之單個符 號或單個數字與其相對應一個按壓結構4的虛擬鍵時(如圖4 所示）’因該接觸層42受施力而被壓縮，以該接觸層42為壓 阻材料為例，則該接觸層42的電阻值會有所改變，而該感測 層41會感測到該接觸層42電阻值之壓阻變化的狀態，當其超 過所設定閥值時則會傳輸一對應之按鍵訊號至一處理器或電 腦主機（圖未示）’而其電阻值之壓阻變化閥值係可由處理器 之軟體調整設定之，以期因應使用者之手指施力的力道觸感需 求者，再者，當其超過所設定閥值時則會產生一回饋訊號(如 圖3所示），崎送訊號魏壓料振祕纟a 7之該微控單元 71 ’並由该微控單元71經該轉換器72轉換訊號以控制啟動該 厘電式振鮮73 ’使得該壓電式鶴器73内之該壓電式振動 4 731 效果’躺制振動提示傳輸按鍵訊號 之作用。 相同地，當使用者以手指按壓施力於印刷層中單個符號 或單健字與其相對應乡個按舰構4的虛擬鍵時(如圖5所 示)因夕個接觸層42受施力而被壓縮，以_觸層42為壓阻 材料為例’則接觸層42的電阻值會有所改變，而該感測層41 S感測到5好個接觸層42電阻值之壓阻變化的狀態，當其超 過所叹疋間值日调產生回饋峨，細能發送按麵動之振動 9 提示訊號。 因此’猎由上述結構，使用者可直接細控面板上的虛 擬鍵直接輸人資⑨需再連接般的輸人鍵盤，以縮小整體 to積’且相|χ於自知電阻式觸控面板巾二制層之間為非接觸 的懸空結構，本___之按顯_造之壓電式觸控板 1,中的按壓結構4係直接與第—導電層5及第二導電層3接觸 並支撐，故可不使用或使用少量的間隙子91進行上基板6及 下基板2之_讀，私降低成本，且可避免使用者因施力 過小所造成絲作的狀況發生，更能制按_控鍵盤之振動 提示訊號的效能。 以上所述實施型態之揭示铜以制本創作，並非用以 限制本創作，故軌触之敎麟效元狀置換仍應隸屬本 創作之範°#。由社詳細說明，可使熟知本項技藝者明瞭本創 作的讀可賴前述目的’實已符合專獅之規定，爰提出專利 申請。 【圖式簡單說明】 圖1 係表示本創作觸控鍵盤之按壓感測構造之按壓 感測構造的立體分解圖。 圖2 係表示本創作觸控鍵盤之按壓感測構造之按壓 感測構造沿圖1之A-A刮線的剖視圖。 圖3. 係表示本創作觸控鍵盤之按壓感測構造之微控單 元處理回饋訊號的方塊圖。 M422698 圖4 係表示按壓於上基板印刷層之單個字鍵與其相對應 一個按壓結構的按壓狀態剖視圖。 圖5 係表示本創作按壓於上基板印刷層中單個字鍵與其 相對應的多個按壓結構的按壓狀態剖視圖。 【主要元件符號說明】The sensing layer 41 in the touch structure 4 is electrically connected to the micro-control unit 71, and the head micro-control unit 71 is a converter 10000, which is electrically connected to the signal. The converter % is electrically connected to the piezoelectric vibrator 73 _ the micro control unit 71 can control the start-up electric vibrator 73 via the internal converter 72, so that the vibration effect can be generated each time the word key is pressed. The detailed action will be detailed later. ^Please participate in phase 4 and Figure 5, its towel, Figure 4 is the basis of this creation force on the upper substrate 6 _ Syrian Wei Weiqianmu Ying - Jianmin structure 4th _ marriage, Figure 5 County Lin Chuang A cross-sectional view when the JL substrate 6 prints a single symbol number key of 8 M422698 layers and a plurality of corresponding pressing structures 4 thereof. When the user presses a finger to apply a single symbol or a single number of the upper substrate 6 to the virtual key of the pressing structure 4 (as shown in FIG. 4), the user is forced by the contact layer 42. When the contact layer 42 is a piezoresistive material, the resistance value of the contact layer 42 may change, and the sensing layer 41 senses the piezoresistive change of the resistance value of the contact layer 42. State, when it exceeds the set threshold, it will transmit a corresponding button signal to a processor or computer host (not shown) and the resistance value change threshold of the resistance value can be adjusted by the software of the processor. In order to respond to the demand of the user's finger force, in addition, when it exceeds the set threshold, it will generate a feedback signal (as shown in Figure 3), and send the signal to the pressure source. The micro control unit 71' of the a7 is controlled by the micro control unit 71 via the converter 72 to control the activation of the PCT mode 73' such that the piezoelectric vibration in the piezoelectric device 73 is 4 731 Effect 'Live vibration prompts the role of the transmission button signal. Similarly, when the user presses a finger to apply a single symbol or a single word in the printed layer to correspond to the virtual key of the shipbuilding 4 (as shown in FIG. 5), the contact layer 42 is applied. And the compression is performed, taking the _ touch layer 42 as a piezoresistive material as an example, the resistance value of the contact layer 42 is changed, and the sensing layer 41 S senses the resistance change of the resistance of 5 good contact layers 42. The state, when it exceeds the value of the sigh, the feedback is generated, and the fine vibration signal 9 is sent. Therefore, by the above structure, the user can directly control the virtual keys on the panel to directly input the human input. 9 need to connect the input keyboard to reduce the overall to product' and the self-known resistive touch panel. The non-contact floating structure between the two layers of the towel, the pressing structure 4 of the piezoelectric touch panel 1 of the present ___ is directly connected to the first conductive layer 5 and the second conductive layer 3 Contact and support, so that the upper substrate 6 and the lower substrate 2 can be read without using or using a small amount of spacers 91, which can reduce the cost and prevent the user from being caused by the application of the force being too small. Press the _ control keyboard to vibrate the signal's performance. The above-mentioned embodiment of the disclosure of copper is based on the creation of the book, and is not intended to limit the creation. Therefore, the replacement of the unicorn effect of the track should still belong to the scope of this creation. The detailed description by the agency will enable those skilled in the art to understand that the creation of this creation may be in accordance with the provisions of the lion and the patent application. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is an exploded perspective view showing a pressing sensing structure of a pressing sensing structure of the present touch keyboard. Fig. 2 is a cross-sectional view showing the pressing sensing structure of the pressing sensing structure of the present touch keyboard taken along line A-A of Fig. 1. FIG. 3 is a block diagram showing the micro-control unit processing feedback signal of the pressing sensing structure of the creation touch keyboard. M422698 Fig. 4 is a cross-sectional view showing a pressed state of a single word key pressed against a printed layer of the upper substrate and a corresponding pressing structure. Fig. 5 is a cross-sectional view showing a pressed state in which a plurality of pressing structures corresponding to a single word key in the upper substrate printed layer are pressed. [Main component symbol description]
1 壓電式觸控板 2 下基板 3 第二導電層 4 按壓結構 41 感測層 42 接觸層 43 連接層 5 第一導電層 6 上基板 7 壓電式振動模組 71 微控單元 72 轉換器 73 壓電式振動器 731 壓電式振動片 80 底板 91 間隙子 92 框膠層1 Piezoelectric touch panel 2 Lower substrate 3 Second conductive layer 4 Pressing structure 41 Sensing layer 42 Contact layer 43 Connecting layer 5 First conductive layer 6 Upper substrate 7 Piezoelectric vibration module 71 Micro control unit 72 Converter 73 Piezo Vibrator 731 Piezo Vibrating Plate 80 Bottom Plate 91 Spacer 92 Frame Layer