TWM413853U - Vapor chamber leakage detection equipment - Google Patents

Description

M413853 V. New Description: [New Technology Field] [0001] This creation is related to a leak detection machine, especially a device for leak detection on a soaking plate. [Prior Art] [0002] According to the vapor chamber, the cavity is first sintered at a high temperature to form a capillary structure on the inner wall of the cavity, and then a plurality of copper powder cylinders having a capillary structure are disposed in the cavity. The cavity is evacuated to make it a vacuum chamber, and the working fluid is injected into the vacuum chamber. The working fluid is quickly and uniformly dispersed by the heat to the low temperature to be condensed, and then the capillary structure in the cavity is returned to the heat source. The repetitive evaporation/condensation action in the near-ultrasonic speed operation removes a large amount of heat energy in a very short time. [0003] The inside of the cavity needs to be completely vacuumed to make the internal fluid and the copper powder column

The body forms a two-phase flow cycle, which achieves the effects of continuously absorbing heat energy and dissipating heat. For example, the inside of the cavity flows into the air. Because of the moisture in the air, the capillary structure is blocked by ice, and the fluid cannot flow, which may also cause damage to the heat equalizing plate. Therefore, the vacuum of the cavity is very important for the formation of the soaking plate [0004] It is assumed that the inside of the cavity is not completely sealed, so that the fluid can flow out of the hole and cannot be vacuumed. In the past, the surface was sprayed with soap on the surface of the object. Soak the liquid, and inject the gas into the cavity to check whether there is any bubble in the bubble. If there is a bubble, you can know that there is a loophole. However, this type of detection method is too slow and takes too much time. . Form No. A0101 Page 3 of 16 [0005] M413853 In view of this, the author has devoted himself to research and combined with years of experience in related businesses to propose a soaking plate leak detection device to overcome the conventional problems. Disadvantages. [New Content] [0006] The main purpose of this creation is to provide a "soaking plate leak detection device", which is to automatically detect whether the heat equalizing plate leaks through a leak detection device. [0007] The purpose of this creation and solving its technical problems are achieved by the following technical solutions. According to the present invention, a soaking plate leakage detecting device is provided, comprising: [0008] a loading platform having a receiving area and a working area; a vacuum device disposed in the receiving area, the vacuum device being provided with a vacuum a vacuum buffering bucket; at least one leak detecting device is disposed above the working area by a fixed seat, and the leak detecting device is provided with a vacuum pipeline set, a vacuum valve, a degassing leak detecting head and a sensing component, The vacuum pipeline set has a first end, a second end and an extension. The first end is connected through the fixing seat and connected to the vacuum buffer barrel, the second end is connected to one end of the vacuum valve, and the other end of the vacuum valve is connected to the degassing test. Leaking head, wherein the sensing component is disposed in the extension portion; a control device is disposed on one side of the receiving area for controlling the operating parameters of the vacuum device and viewing the sensing component; at least one operating device is disposed on one side of the loading platform The operating device is configured to control the operation of the vacuum device and the leak detecting device. The actuating method of the hot plate leakage detecting device of the present invention is to insert a soaking plate with a filling tube into the degassing leak detecting head through the injection pipe, and pre-set the working parameters of the vacuum device by the control device, thereby starting the operation. The device makes the form number A0101 page 4 / a total of 16 pages [0009] M413853 degassing head is fastened to the injection tube, the vacuum device will vacuum the soaking plate, and then with the sensing components to view Whether the hot plate is completely sealed and has no loopholes. In summary, the advantage of this creation is that the injection tube of the soaking plate is directly inserted into the leak detecting device, and the operation device is activated to make the leak detecting device start to operate. It is known that there is a loophole in the soaking plate, and the effect of vacuum leak detection can be automatically and quickly performed.

[Embodiment] The following is a detailed description of the specific embodiments with the accompanying drawings, and it is easier to understand the technical contents, characteristics, and effects achieved by the present invention. First, please refer to FIG. 1 and FIG. 2, the creation of the soaking plate leakage detecting device, comprising a loading table 10, a vacuum device 2, at least one leak detecting device 30, a control device 4 and at least one Operating device 5〇, wherein:

The loading platform 10 has a receiving area U and a working area 12. The receiving area is formed by the stage 10 and a first partition 111, and the working area 12 is composed of the stage 10 and a second partition. 121 is formed by mutual division, and the stage 1 is made of aluminum extruded material. The same as shown in Fig. 3, the outer side of the stage 1 is further provided with a plurality of sealing plates 13 for covering the stage 10 and also for carrying the stage. 1〇 is more beautiful. The vacuum device 20 is disposed in the accommodating area η. The vacuum device 2 is provided with a vacuum pump 21 and a vacuum buffer tank 22 for extracting air and connecting with the vacuum buffer tank 22. [(10)(5) Please also refer to Fig. 4, the leak detection device 3 is provided above the work area 丨2 by a fixing seat η in a screw-on manner, and the leak detecting device 3 is provided with a form number A0101 M413853 [0016] [ [0019] [0019] a vacuum line set 31, a vacuum valve 32, a degassing leak detecting head 33 and a sensing element 34, and the vacuum line set 31 has a first end 311 and a second end 312 An extension portion 313, the first end 311 is passed through the fixing base 14 and connected to the vacuum buffer barrel 22, the second end 312 is connected to one end of the vacuum valve 32, and the other end of the vacuum valve 32 is connected to the deaeration leak detecting head 33 by vacuum The opening and closing of the valve 32 controls the conduction of the vacuum line group 31 and the deaeration leak detecting head 33. The degassing head 33 is further provided with a gas-tight element (not shown) which is a rotating gas counter, and the air-tight element can be an electric rotating gas counter or a pneumatic rotating gas counter, as shown in Fig. 5. It is shown that the degassing leak detecting head 33 is provided for the object to be tested 60 having a filling tube 61 and is inserted by the filling tube 61, thereby opening the vacuum valve 32 so that the object to be tested 60 can be evacuated, so that the object to be tested 60 can be tested. A negative pressure state is formed inside, and the object to be tested 60 is a soaking plate having a closed cavity. The sensing component 34 is disposed in the extending portion 313. The sensing component 34 can be a vacuum detecting sensor, a pressure sensor, a flow sensor, and an ultrasonic leak detector for sensing the vacuum in the heat equalizing plate cavity. degree. The control device 40 is disposed on one side of the accommodating area 11, the control device 40 is a microcomputer control unit, and the microcomputer control unit is a Programmable Logic Controller (PLC) for controlling the operation of the vacuum device 20. For example, the control device 40 further includes a control panel 41 for displaying the sensing condition of the sensing component 34. The control panel 41 is a liquid crystal display having a plurality of buttons 411. Or a flow meter, whereby the operating parameters of the setting vacuum device 20 can be changed at any time. The operating device 50 is disposed on the side of the stage 10 and is connected to the control device 40, the electrical form number A0101, page 6 / 16 pages, M413853. The operating device 50 is provided with a box body 51, and the box body 51 is provided with a plurality of buttons 52 for controlling the operation of the vacuum device 20 and the leak detecting device 30. When the button 52 is pressed, the airtight member of the deaeration metering head 33 is rotated. Tightly, the vacuum device 20 will also be activated. When the button 52 is pressed again, the vacuum device 20 will stop and the airtight member will be loosened. [0020] By the foregoing description, the heat spreader is manually used in the operation of the present creation.

The injection tube 61 is inserted into the deaeration leak detecting head 33, and then the button 52 of the operating device 50 is pressed, and the airtight member inside the deaeration leak detecting head 33 will screw the injection tube 61 to make the degassing leak detection. The joint of the head 33 and the injection pipe 61 is tightly sealed to prevent the air from flowing from the deaeration leak detecting head 3 3 to cause incomplete vacuuming of the heat equalizing plate. When the airtight member is screwed to the injection pipe 61, the vacuum device 20 will be Then, the vacuuming of the soaking plate is started, and the soaking plate is vacuumed, and the sensing component 34 senses the vacuum of the soaking plate, and the sensing component 34 transmits the sensed vacuum parameter to the control panel. 41, when the vacuum parameter reaches the preset operating parameter, the button 52 of the operating device 50 is pressed again to stop the vacuum device 20, and the airtight component of the leak detecting device 30 is also loosened, and the connection will be continued. The hot plate is removed to complete the vacuum leak detection of the soaking plate. [0021] In summary, the creation is indeed a rather excellent idea, and the application for a new type of patent is filed according to law; only the above is only a preferred embodiment of the creation, and is not intended to limit the implementation of the creation. Scope, so that any changes or modifications to the characteristics and spirits described in the scope of this application shall be included in the scope of the patent application for this creation. [Simple description of the drawing] [0022] Fig. 1 is a perspective view of the creation device. Form No. A0101 Page 7 of 16 M413853 [0023] Figure 2: A three-dimensional combination of the vacuum device and the leak detection device. [0024] FIG. 3 is a perspective view showing the addition of a sealing plate to the creation device. [0025] FIG. 4 is a front view showing the addition of a sealing plate to the creation structure. [0026] Figure 5: This is a front view of the creation of a soaking plate on the leak detection device. [Main component symbol description] [0027] Stage. 1 0 [0028] accommodating area. 11 [0029] First partition. 111 [0030] Work area · 1 2 [0031] Second partition. 121 [0032 Sealing plate.13 [0033] Fixing seat.14 [0034] Vacuum device.20 [0035] Vacuum pump.21 [0036] Vacuum buffer tank.22 [0037] Leak detection device.30 [0038] Vacuum line group. 31 [0039] First End. 311 [0040] Second End. 31 2 [0041] Extension. 313 Form No. A0101 Page 8 of 16 M413853

[0046] [0046] [0024] [0052] [0052] vacuum valve. 32 degassing leak detection head. 33 sensing element. 34 control Device .40 Control Panel .41 Button .411 Operating Device .50 Box .51 Button .52 DUT.6 0 Injection Tube .61

Form No. A0101 Page 9 of 16

Claims (1)

M413853 •, the scope of application for patents: 1. A soaking device for a soaking plate, comprising: a loading platform having a receiving area and a working area; a vacuum device disposed in the receiving area, the vacuum The device is provided with a vacuum pump and a vacuum buffering bucket; at least one leak detecting device is disposed above the working area by a fixing seat, the leak detecting device is provided with a vacuum pipeline group, a vacuum valve and a degassing leak detecting head And a sensing component, the vacuum tube set has a first end, a second end and an extension, the first end is passed through the fixing base and connected to the vacuum buffer barrel, and the second end is connected to the vacuum One end of the valve, the other end of the vacuum valve is connected to the deaeration leak detecting head, the sensing component is disposed in the extending portion; a control device is disposed on one side of the receiving area for controlling the operating parameters of the vacuum device And viewing the sensing component; and at least one operating device disposed on one side of the carrier, the operating device being electrically coupled to the control device for controlling the vacuum device and the leak detecting device to operate 2 The scope mentioned in item 1 of the scope Leak plate apparatus, in addition to 9 wherein the gas leak detection system for a head having an analyte injection by the injection of tube insertion tube for evacuating the analyte. 3. The homogenizing plate leak detecting device according to claim 2, wherein the object to be tested is a soaking plate. 4. The homogenizing plate leak detecting device according to claim 1, wherein the deaeration leak detecting head further comprises an airtight member. 5. The homothermal plate leak detecting device according to claim 4, wherein the airtight component is a rotary gas counter. 6. The homothermal plate leak detecting device according to claim 5, wherein the rotary gas counter is an electric rotary gas counter or a pneumatic rotary gas counter. 100208946 Form No. A0101 Page 10 of 16 1002029452-0 M41-3853. The soaking plate leak detection device of claim 1, wherein the control device is a microcomputer control unit. 8. The soaking plate leakage detecting device according to claim 7, wherein the micro-electric control unit uses a programmable controller (PLC) to adjust the sensing element and The operating parameters of the vacuum device. 9. The homogenizing plate leak detecting device according to claim 1, wherein the control device further comprises a control panel for controlling and displaying the operating parameters of the vacuum device and displaying the sensing state of the sensing component. . 10. The homogenizing plate leak detecting device according to claim 9, wherein the control panel is a liquid crystal display or a flow meter having a plurality of buttons. 11. The homothermal plate leak detecting device according to claim 1, wherein the sensing component is a vacuum detecting sensor, a pressure sensor, a flow sensor, and an ultrasonic leak detector for sensing The degree of vacuum of the test object. 12. The homothermal plate leak detecting device of claim 1, wherein the fixing seat is disposed above the working area by screwing engagement. 13. The homogenizing plate leak detecting device according to claim 1, wherein the stage is made of aluminum extruded material. 14. The homogenizing plate leak detecting device according to claim 1, wherein the operating device is provided with a casing, and the casing is provided with a plurality of buttons. 15) The homogenizing plate leak detecting device according to claim 1, wherein the outer side of the stage is further provided with a plurality of sealing plates for covering the stage. 100208946 Form No. A0101 Page 11 of 16 1002029452-0