M412455 五、新型說明： 【新型所屬之技術領域】 本創作係有關-種可於同-铜上選擇變換不同流體，並搭 配不同型式、尺寸之喷口，而提供最佳噴麗型態迅速完成預設作 業，進而易於節水及利於空間配置之複合式喷頭。 【先前技術】 在現今’半㈣晶圓、鏡#、玻璃、印刷電路板、 療儀器等元件，於製作或移載過程中，树之表面會附著雜質、 微粒或油污等，而必須以清洗機清洗去除元件表面之雜質由 =▼、油污之附著力抑’清洗機運用賴之清洗流體也 Γϋ ΐί :ϊ潔液或高壓水等，以便確實清洗雜質、油污 執抑洗作業完畢後，清洗機㈣氧體以乾燥元件 而提升元件之潔淨度及品質。 請參閱第1、2®，係為-種晶HI清洗機，叫 ^巧轉，1轉台12，用以承载J清 r旋轉台12之一侧設有-可擺i ?喷二 噴，31 ’用以魏水液而清洗晶圓，旋L 12之另一侧則設有一可擺動之噴氣管工 ，轉口 供應裝置(圖未示出)，另-端則ΐ設有 ，時’可將待清洗之晶圓15置放於s轉ί=r先，上5 上2即帶動待清洗之晶圓1 5旋轉，接著轉台 :洗之晶圓15上方’並以喷頭工3丄噴麗水至待 表面上之雜質等，於執行清洗作章、麗上液〜洗日日圓1 5 復位，巧 達到清洗及乾燥晶圓惟氣體 3 M412455 該喷漢吹乾裳置僅能以喷流管丄3 时 液執行清洗作業，並盔法喷灑不貫頭131喷灑單一水 水，若晶圓表面之油體性質之清潔液或高壓 直至去除晶圓表面之油污為止，喷c液 及不符合環保之缺失。 洗作業相當耗費水液 2 該噴灑吹乾裝置之噴流fl3及 + ，以麗水液及氣體，若欲以不= 二具喷頭之噴外於機台11上裝配 ::流管及喷氣管相當佔用空空= 費較長時間噴灑大量水液，方可紐^ :時’即必須花 j又》r種易於卽水及利於機 =;Γ件清洗機之複合式喷頭== 含有式噴頭，包 端t=r輸送不同流體之：二 係於相對應本體之各流道位置’ Μ噴口面板 並裝配於本體上’使得各噴寸;噴口： ϊί:ί)’，=:ΐΐ上選擇變換不同流體(例:水液、ίίΞ 該 並由喷 本，目的二，蕊==環機=:， 之本體内部係設有複數個流道，以供輸入不同流=喷頭 4 财12455 喷頭係於本複合式噴頭，該 =需面板，使得喷頭可提供不同流體，並搭配: 作;作業)，而有效縮短作業時間，達到提升 【實施方式】 為使#審查委員對本創作作更進一步之瞭解 實施例並配合圖式，詳述如后： + μ 圖，本創作之複合式喷頭2 〇包含有本 1及喷口面板2 3 ’林體2 1係於内部開設有複數個流 道’於本實_巾’該本體2 i係於内部開設有吹乾氣體流道2 1 1、清絲流道2 1 2、混錢體流道2 ! 3、黯水液流道 214、水液流道215、高壓水流道216及清洗流道2丄7， 其中’ s亥吹乾氣體流道21 1可供輸入/輸出吹乾用氣體，該清 潔液流道212可供輸入/輸出清潔液，該混流氣體流道21 3、混流水液流道214及水液流道215可供分別輸入氣體及 水液，且混流乳體>’il道2 1 3、混流水液流道2 1 4及水^流道 215係共同連通於清洗流道217，另於本體2 χ上開設有垂 直相通於混流氣體流道2 1 3、混流水液流道2 ]_ 4及水液流道 215的螺孔218 ’供螺入一具通氣道2 41之調整件2 4， 用以調整氣體及水液之混流比例，使清洗流道217輸出混流後 之氣水，又該南壓水流道216則可供輸入/輪出其懕皮，另該 噴口面板2 3係開設有複數個可呈不同形狀、^ —字噴口、十字噴口、螺旋狀喷口、圓形噴口或方形喷口等，於 5 M412455 本實施例巾，該喷口面板2 3係於相對應本體21之吹乾氣體流 道2 1 1位置開設有呈十字形之吹乾喷口 2 3 i，用以喷;麗吹乾 用氣體’並於相對應清潔液流道2工2位置開設有呈圓形之清潔 液嘴口 2 3 2 ’用以倾清潔液’另於相對應清洗流道2丄7位 置開，有呈士字形之清洗噴。2 3 3，用以賴水液或氣水，以 目對應兩壓水流道216位置開設有呈十字形之高壓水喷口 =^用以賴高壓水，再者，該噴口面板2 3可採活動式或 於本體2 1上’於本實施例中，係於本體2 1之侧面 开 1设有複數個螺孔2 1 9，㈣σ祕2 3_ 2丄之 各1孔92 ί9位置開設有通孔2 3 5，以供栓具將喷 σ 土夫閲於上進而組裝成一複合式喷頭20。 元件本創作之複合式喷頭20可應用於不同 二ϊΐΐ乾燥等不同預設作業，於本實施例中， 0之内部係裝設有-可旋轉作動=冗用 =待==中⑽f配於旋轉台5〇 f配=條輸送管’於本實施心中，係 1 1係連通吹乾氣體輸送管3 1，二二 =^24^1通清潔液輸送管32，用以^入清潔液:= 机轧體抓道213、混流水液流道2丄4及 此 3通ΐ流:，輸送管3 3、混流水液輸送管輸g 高壓壓，壓水流道2 1 6“ 特性’而選擇:4【流附著，質 佳之噴_而執行晶圓清洗作業，當執行清絲面二： 6 料12455 ^可將待·清洗之晶817 ◦置放於旋轉台5 〇 σ 〇帶動旋轉’接著使嗔麗吹乾|晉βΠ之擺臂 工=0處，使憧⑦ .# 2 1 f m液輪廷管3 2輸送清潔液至本體2 1之清潔 Ϊΐ“喷以ΪΪ流道2 1 2可使清潔液由喷口面板2 3 江二口 p q 出喷灑於待清洗之晶圓7 0上，並可利用 :z:'讀形狀及尺寸，而控制倾水柱之流向及水M412455 V. New description: [New technical field] This type of creation can select different fluids on the same copper, and match the nozzles of different types and sizes to provide the best spray pattern. It is a compound nozzle that is easy to save water and space. [Prior Art] In today's 'half (four) wafer, mirror #, glass, printed circuit board, therapeutic equipment and other components, during the production or transfer process, the surface of the tree will adhere to impurities, particles or oil, etc., and must be cleaned The machine cleaning removes the impurities on the surface of the component by =▼, the adhesion of the oil stains, and the cleaning fluid used by the cleaning machine is also Γϋ ΐί : cleaning liquid or high-pressure water, etc., in order to surely clean the impurities and oil, after the washing operation is completed, the cleaning The machine (4) oxygen body enhances the cleanliness and quality of the components by drying the components. Please refer to the 1st, 2®, the system is a kind of crystal HI cleaning machine, called ^Qiao turn, 1 turntable 12, used to carry one side of the J clear r rotary table 12 - can be placed, sprayed, sprayed, 31 'When the wafer is cleaned with Wei water, the other side of the rotary L 12 is provided with a swingable jet plumber, a rotary feeder (not shown), and the other end is provided with a The wafer 15 to be cleaned is placed on the s turn ί=r first, the upper 5 is 2, the wafer to be cleaned is rotated 15 5, and then the turntable is: the wafer 15 is washed above and the nozzle is sprayed with water. To the surface of the impurities, etc., in the implementation of the cleaning chapter, Lishang liquid ~ washing the Japanese yen 1 5 reset, clever to clean and dry the wafer only gas 3 M412455 This spray can be blown out only by the jet tube 3 hours of liquid cleaning operation, and the helmet method sprays the head 131 to spray a single water, if the oil surface of the wafer surface of the cleaning liquid or high pressure until the oil surface of the wafer is removed, the liquid c liquid does not meet The lack of environmental protection. The washing operation consumes a lot of water. The sprays fl3 and + of the spray-drying device are used to liquefy the liquid and the gas. If it is not to be sprayed on the machine table 11, the flow tube and the jet tube are equivalent. Occupy empty space = long time to spray a large amount of water, only when you can: ^ must be spent j and "r kind of easy to drown and benefit the machine =; composite nozzle of the cleaning machine == containment nozzle, The package end t=r transports different fluids: the second line is at the position of each flow channel of the corresponding body' Μ Μ 面板 并 并 并 装配 装配 装配 装配 装配 ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; 选择Different fluids (eg: water, ίίΞ, and by spray, purpose two, core == ring machine =:, the body is internally provided with a plurality of flow channels for input different flow = nozzle 4 12455 nozzle Attached to the composite nozzle, the = need panel, so that the nozzle can provide different fluids, and with: work; work), and effectively shorten the working time, to achieve improvement [implementation] In order to make the # review committee to further this creation Understand the embodiment and cooperate with the schema, as detailed below: + μ map, the composite of this creation The head 2 〇 includes the 1 and the spout panel 2 3 'The forest body 2 1 is internally provided with a plurality of flow passages 'in this real _ towel'. The main body 2 i is internally provided with a blow dry gas flow passage 2 1 1 , clear wire flow channel 2 1 2, mixed body flow channel 2! 3, hydrophobic liquid flow channel 214, water liquid flow channel 215, high pressure water flow channel 216 and cleaning flow channel 2丄7, where 's dry gas The flow path 21 1 is available for input/output blow dry gas, and the cleaning liquid flow path 212 is available for input/output cleaning liquid, and the mixed flow gas flow path 21 3 , the mixed flow liquid flow path 214 , and the water liquid flow path 215 are available. The gas and the liquid are respectively input, and the mixed emulsion >'il channel 2 1 3, the mixed flow channel 2 1 4 and the water channel 215 are connected to the cleaning channel 217, and the body 2 is opened. a screw hole 218' perpendicularly communicating with the mixed gas flow passage 2 1 3, the mixed flow liquid flow passage 2]_4 and the water flow passage 215 is screwed into an adjustment member 2 4 of the air passage 2 41 for adjustment The mixed flow ratio of the gas and the water liquid causes the cleaning flow channel 217 to output the gas water after the mixed flow, and the south pressure water flow channel 216 can be input/rounded out of the skin, and the nozzle plate 2 3 is opened and provided. The nozzles can be in different shapes, the nozzles, the cross nozzles, the spiral nozzles, the circular nozzles or the square nozzles, etc., in the 5 M412455 embodiment towel, the nozzle panel 23 is tied to the blown gas flow of the corresponding body 21. A cross-shaped blow-drying nozzle 2 3 i is opened at the position of the road 2 1 1 for spraying; the dry-blowing gas is used and a circular cleaning liquid mouth is opened at the position 2 of the corresponding cleaning liquid flow channel 2 2 3 2 'Use to clean the liquid' and open it at the position of the corresponding cleaning channel 2丄7. There is a cleaning spray with a zigzag shape. 2 3 3, used for water or gas water, with a cross-shaped high-pressure water spout at the position of the two pressure water passages 216 = ^ used to rely on high-pressure water, and further, the nozzle panel 2 3 can be used for activities Or in the body 2 1 'in this embodiment, the side of the body 2 1 is opened 1 is provided with a plurality of screw holes 2 1 9, (4) σ secret 2 3_ 2 丄 each of the holes 92 ί9 position is provided with a through hole 2 3 5, for the bolt to be squirted and then assembled into a composite nozzle 20. The composite nozzle 20 of the present invention can be applied to different preset operations such as different drying operations. In this embodiment, the internal system of 0 is provided with - rotatable actuation = redundant use = to be == medium (10) f is matched with In the present embodiment, the rotary table 5〇f is equipped with a strip conveying pipe. In the present embodiment, the system 1 1 is connected to the blow-drying gas delivery pipe 3 1, the second=^24^1 is connected to the cleaning liquid conveying pipe 32 for the cleaning liquid: = machine rolling body grabbing 213, mixed flow liquid flow channel 2丄4 and this 3-way turbulent flow: the conveying pipe 3 3, the mixed flow liquid conveying pipe, the g high pressure, the pressurized water flow channel 2 1 6 "characteristics" : 4 [flow attachment, good quality spray _ and perform wafer cleaning operation, when performing clear wire surface 2: 6 material 12455 ^ can be placed on the rotating table 5 〇 〇 〇 〇 旋转 ' ' ' Let the beautiful blow dry | Jin βΠ swing arm work = 0, so that 憧 7 . # 2 1 fm liquid wheel tube 3 2 transport cleaning liquid to the body 2 1 clean Ϊΐ "spray ΪΪ flow channel 2 1 2 can The cleaning liquid is sprayed on the wafer to be cleaned by the spout panel 2 3 pq, and the flow direction and water of the pouring column can be controlled by using: z: 'read shape and size
ί，’以先迅出圓束流向及適量、適壓之液 ΠΙ»1固7〇表面上之部份油性雜質；請參閱第1 泣鹖，噴灑清潔液，並視清洗作業所需而變換喷灑之 ΐ祕太Μ 1 流之氣水接續執行進—步清洗作業，事前 細_送3二4』=體及水液之混流比例’ =整件2 4之通氣道2 4 1流入於清洗流道2 1 洛m Vi液輸运管3 4則輸送水液至本體2 1之混流水 整件2 4可控制水液流量，而可控制適量 1 7机、217，使得氣體及水液混流於清洗流道2 待:主,先^日二3 2 3之清洗噴σ 2 3 3將混流之氣水喷漢於 °表面’由於清洗噴口 2 3 3之形狀係呈十字形 迅^1賴出十字流向且較A水量之水柱，以更加 此，Ϊ視;作Ξίΐ上之油性雜S，而完成清洗晶圓作業，因 並搭配適用之d::頭2 〇上選擇變換不同流體， 流♦及:ί, 'The first part of the oily liquid on the surface of the liquid ΠΙ 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 The secret of the spraying is too long. 1 The gas and water in the stream continue to perform the step-by-step cleaning operation. Before the fine _ send 3 2 4 』 = the mixing ratio of the body and the water liquid ' = the whole part 2 4 the air passage 2 4 1 into the Cleaning flow channel 2 1 Luo m Vi liquid transport pipe 3 4 is transporting water to the body 2 1 mixed water whole piece 2 4 can control the flow of water and liquid, and can control the appropriate amount of 17 machine, 217, so that the gas and water liquid Mixed flow in the cleaning flow channel 2 Waiting: Main, first ^ 2 2 3 3 cleaning spray σ 2 3 3 The mixed flow of water is sprayed on the surface of the surface 'Because the shape of the cleaning nozzle 2 3 3 is a cross shape fast ^1 Depending on the water column that flows in the cross and is more water than A, it is more contemptuous; as the oily miscellaneous S on the Ξ, the wafer cleaning operation is completed, and the different fluids are selected and matched with the applicable d:: head 2 , Flow ♦ and:
Kg逆1 1圖’於清洗晶圓7 ◦完畢後，可控制吹 ，氣體至本體2 1之吹乾氣體流道2 11， ΐϊϊ^? i1 1可使氣體由嘴σ面板2 3之吹乾喷口 2 3 1 ϊϊΐίί it之晶圓7 〇上’由於吹乾喷口 2 3 1之形狀係 柱，而可魏出十字流向且較大流量之氣 \速吹乾晶圓70之表面，以完成乾燥晶圓作業；請 7 1 A、清洗噴口 2 3 3 A、之，2 3 $潔液和2 3 2 A，使 $ 門3具螺碇形 用效能之實用^。、 具有夕樣化之賴型態，達到提升使Kg reverse 1 1 picture 'after cleaning the wafer 7 ◦, can control the blowing, gas to the body 2 1 of the dry gas flow channel 2 11, ΐϊϊ ^? i1 1 can make the gas from the mouth σ panel 2 3 The nozzle of the nozzle 2 3 1 ϊϊΐίί it 7 〇 'Because the shape of the nozzle 2 3 1 is blown, the surface of the wafer 70 can be blown out by a large flow of air to quickly dry the surface of the wafer 70 to complete the drying. Wafer operation; please 7 1 A, cleaning nozzle 2 3 3 A, 2 3 $ cleaning solution and 2 3 2 A, so that the door 3 has a screw-shaped utility. With the eve of the eve of the temperament
並有效提升=J :利於機台空間配置， 見有相同之產品及刊物八；/衣八實用性及進步性之設計，然未 法提出申請 A開，從而允符新型專利申請要件，爱依 【圖式簡單說明】 習式晶圓清洗機之示意圖。 習式喷流管及喷氣管之示意圖。 本創作複合式翻之零件分解圖。 本創作複合式喷頭之外觀圖。 本創作複合式翻之喊剖視圖。 頭應用於晶圓清洗機之示意 .if 頭與各輸送管之示意圖。 本創作複合式喷頭之使用示意m 作複合式噴頭之使用示意圖(i)。 33作複合式噴頭之使用示意圖。 ，2圖·本創作複合式喷頭更換嘴口上 【主要元件符號說明】 之不％、圖 第1圖 苐2圖 第3圖 圖 旋轉台：12 噴頭：1 3 1 噴頭：14 1 苐4圖 第5圖 第6圖 第7圖 第8圖And effectively improve = J: Conducive to the space configuration of the machine, see the same product and publication eight; / clothing eight practical and progressive design, but did not apply for A to open, thus allowing for new patent applications, Aiyi [Simple diagram of the diagram] Schematic diagram of the conventional wafer washer. Schematic diagram of a conventional jet tube and a jet tube. This creative composite flipped part exploded view. The appearance of the composite nozzle. This creation is a composite cross-sectional view. The schematic diagram of the head applied to the wafer cleaning machine. If the head and each conveying pipe are schematic. The use of the composite nozzle of the present invention is shown as a schematic diagram of the use of the composite nozzle (i). 33 is a schematic diagram of the use of a composite nozzle. 2,·This creation of composite nozzle replacement nozzle [Main component symbol description] No%, Figure 1 Figure 2 Figure 3 Figure 3 Rotary table: 12 nozzle: 1 3 1 nozzle: 14 1 苐 4 Figure 5, Figure 6, Figure 7, Figure 8
〔習式〕 機台：1 1 噴流管：13 噴氣管：14 晶圓：1 5 8 M412455 〔本創作〕 喷頭：2 ◦ 吹乾氣體流道：21 1 混流氣體流道：213 水液流道：215 清洗流道：217 螺孔：219 喷口面板·· 2 3、2 3 A 清潔液喷口 ： 2 3 2、2 3 2A 高壓水噴口 ： 2 3 4、2 3 4A 調整件：2 4 栓具：2 5 吹乾氣體輸送管：31 混流氣體輸送管：3 3 水液輸送管：3 5 清洗槽：4 0 旋轉台：5 0 噴灑吹乾裝置：6 〇 晶圓·· 7 Q 本體：2 1 清潔液流道：212 混流水液流道：214 高壓水流道：216 螺孔：218 吹乾噴口 ： 2 31、2 3 1 A 清洗噴口 ： 2 3 3、2 3 3A 通孔：2 3 5 通氣道：2 41 清潔液輪送管：3 2 混流水液輸送管：3 4 而壓水輪送管：3 6 擺臂：6 ΐ[History] Machine: 1 1 Jet tube: 13 Jet tube: 14 Wafer: 1 5 8 M412455 [This creation] Nozzle: 2 吹 Dry gas flow path: 21 1 Mixed gas flow path: 213 Water flow Road: 215 Cleaning flow path: 217 Screw hole: 219 Spout panel · · 2 3, 2 3 A Cleaning liquid spout: 2 3 2, 2 3 2A High pressure water spout: 2 3 4, 2 3 4A Adjusting parts: 2 4 Bolt With: 2 5 dry gas delivery pipe: 31 mixed gas delivery pipe: 3 3 water liquid delivery pipe: 3 5 cleaning tank: 4 0 rotary table: 5 0 spray drying device: 6 〇 wafer · · 7 Q body: 2 1 Cleaning fluid flow path: 212 Mixed flow liquid flow path: 214 High pressure water flow path: 216 Screw hole: 218 Drying spout: 2 31, 2 3 1 A Cleaning spout: 2 3 3, 2 3 3A Through hole: 2 3 5 Air passage: 2 41 Cleaning fluid transfer tube: 3 2 Mixed flow liquid delivery tube: 3 4 and pressurized water delivery tube: 3 6 Swing arm: 6 ΐ