M384401 五、新型說明： 【新型所屬之技術領域】 本新型疋關於-種傳送裝置，特別是指一種專門用來 傳送載具的傳送裝置。 【先前技術】 參閱圖1、2’在以往的濺鑛加工中，為了縣材原子 旎夠沉積在預定物件的表面上，通常是將數片基板^架設 • 一個直立的載具12上，再利用-個傳送裝置2將承載有基 板η的載具12送到一個真空腔座13内，該載具12具有一 個位在下方的驅動端121，以及一個位在上方的導引端 . 。所述真空腔座13具有-個界定出-個真空腔室131的腔 壁132 ’該腔壁132具有兩片平行直立的側壁部133，以及 一片水平位在該側壁部133頂端的頂壁部134。 而該傳送袭置2包括一個架設在該腔壁132的其中一 個側壁部！33上並且驅動載具12沿著一個移送方向前進的 • 傳送機構21，以及一個架設在該頂壁部U4及載具12之導 引端122間的導引機構22。該傳送機構21具有數個位在 空腔室m内並供載具12的驅動端121架靠的輸送輪2ιι ’由於本新型的改良和傳送機構21的構造無關，此處不再 詳述。而該導引機構22具有-條安裝在載纟12的導引端 122上的軌道22卜α及數個間隔地安裝在真空腔座13的 懸部134下方的導引桿222 ’每個導引桿222都具有一個 -伸入該執道221的一個導引槽223内的導引頭224〇 當傳送機構21帶動載具12沿著移送方向前進時藉M384401 V. New description: [Technical field of new type] The present invention relates to a type of conveying device, and more particularly to a conveying device specially used for conveying a carrier. [Prior Art] Referring to Figures 1 and 2', in the conventional sputtering process, in order to deposit the atomic material on the surface of the predetermined object, a plurality of substrates are usually mounted on an upright carrier 12, and then The carrier 12 carrying the substrate η is sent to a vacuum chamber 13 by means of a transfer device 2, the carrier 12 having a drive end 121 positioned below and a leading end positioned above. The vacuum chamber 13 has a chamber wall 132 defining a vacuum chamber 131. The chamber wall 132 has two parallel upright side wall portions 133 and a top wall portion horizontally positioned at the top end of the side wall portion 133. 134. The transport attack 2 includes a side wall portion that is mounted on the cavity wall 132! A transport mechanism 21 that drives the carrier 12 in a transport direction, and a guide mechanism 22 that is mounted between the top wall portion U4 and the lead end 122 of the carrier 12. The transport mechanism 21 has a plurality of transport wheels 2, which are located in the cavity m and which are supported by the drive end 121 of the carrier 12. Since the modification of the present invention is independent of the configuration of the transport mechanism 21, it will not be described in detail herein. The guiding mechanism 22 has a rail 22 mounted on the guiding end 122 of the carrier 12 and a plurality of guiding rods 222 ′ each spaced below the hanging portion 134 of the vacuum chamber 13 . The lead rods 222 each have a seeker 224 that extends into a guide groove 223 of the lane 221. When the transport mechanism 21 drives the carrier 12 to advance in the transport direction,
3 M384401 由所述導引桿222的導弓丨頭224伸人執道22ι的導引槽如 内’可以防止載具12在移送時，該導引端122產生晃動、 不穩的現象。 以往用來傳送載具12的傳送裝置2在設計上，雖然可 以利用該導引機構22來増加載具丨2移送時的順暢性，但 是就導引桿222及執道221的設計來說，該導引桿222的 導引頭224必需和執道221的導引槽223寬度相配合，才 能達到較佳的導引效果，但如此一來，該導引頭以也會 和界定出該導引槽223的槽壁面產生摩擦，進而產生摩擦 粉塵。由於產生的粉塵會散布在真空腔室13卜這樣不但影 響到真空腔室131的潔淨度，也會降低賤鍍加卫物件的加 工品質。 【新型内容】 本新型之目的是在提供一種可以提高加工環境的潔淨 度，並提尚加工品質的載具的傳送裝置。 本新型的傳送裝置是安裝在一個真空腔座上，並且傳 达一個載具沿著一個移送方向前進，所述載具並具有—個 導引端。而該傳送裝置包含：一個用來移送該載具的傳送 機構，以及一個對應該載具的導引端的磁浮導軌機構。 該磁浮導軌機構包括：一個安裝在該載具的導引端上 的磁洋單兀、一個安裝在所述真空腔座上的安裝座，以及 一個安裝在該安裝座上並對應該磁浮單元的固定導磁單元 ，則述固定導磁單元和該磁浮單元間是利用相斥作用力， 而使得該磁浮單元能夠以平穩而且不和其他元件接觸的方 4 式隨著載具移動。 t新型的有益功效在於：當載具被移送的㈣中，該 •單元及固定導磁單元是以懸空的方式移動而不會和 其他的元件產生摩擦’因此’本新型該項設計不但可以提 向工作環境㈣淨度，也可以提高加卫物件的加工品質。 【實施方式】 、有關本新型之前述及其他技術内容、特點與功效，在 乂下配合參考圖式之較佳實施例的詳細說明巾，將可 的呈現。 參閱圖3、4、5,本新型傳送裝置的—個較佳實施例是 架設在-個真空腔座30上，並可承載一個載具31，同時驅 動該載具3!沿著一個移送方向32前進，該真空腔座％包 括-個腔壁3(H，以及-個由該腔壁3〇1界定而成的真空腔 室302,所述腔壁3()1並具有兩片直立的側壁部3〇3，以及 -片架設在所述側壁部303頂緣間的頂壁部3〇4，而該載呈 3!具有-個靠近下方的驅動端311，以及一個接近頂壁部 304的導引端312。 本實施例的傳送裝置包含：一個供載具31架設並傳送 載具31沿著移送方向32前進的傳送機構4，以及一個用來 導引該載具31的磁浮導軌機構5。 本實施例的傳送機構4包括數個間隔地架設在該真空 腔座so的其中-個側壁部303上的傳動輪41、一個連動所 述傳動輪41的皮帶單元42 ’以及-個圖中未示出並可驅動 所述傳動輪41旋轉的動力源 ’每個傳動輪41都具有一個 M384401 位在真空腔室302内並供載具31的驅動端311架設的導環 溝 411。 本實施例的磁浮導軌機構5包括一個懸掛在真空腔座 30的頂壁部304下方的安裝座51、一個安裝在所述安裝座 51上的固定導磁單元52，以及一個固定地安裝在載具 的導引端312上的磁浮單元53。該安裝座51具有兩個左右 間隔的懸掛桿511，以及一個懸掛在所述懸掛桿511下方的 安裝軌道512，該安裝軌道512具有兩個沿著移送方向32 延伸並且前後間隔的安裝壁513，每個安裝壁513都具有一 個相對設置的安裝面514。本實施例的固定導磁單元52具 有一個安裝在其中-個安裝面514的第一導磁件521，以及 -個安裝在另外-個安裝面514上的第二導磁件522，上述 第-及第二導磁件521、522都是強力磁鐵的形式而且第 一導磁件521具有一個朝向第二導磁件522的 523，第二導磁件522具有一個朝向第一導磁件的第二 導磁面524 ’上述第一及第二導磁面523、524的磁性相反 〇 本實施例的磁浮單元53是沿著移送方向32橫向延伸 ’其是固定在載具31的導引端312上方，並且位在該第一 導磁件521及第二導磁件似之間，該磁浮單元53是強力 磁鐵的形式’並具有一個朝向第一導磁面功的第一磁浮 面53卜以及一個朝向第二導磁面524的第二磁浮面说： 或第-磁洋面531和第一導磁面523的極性相同第二磁 浮面532和第二導磁面524的磁性也是相同。 6 本實施例之傳送裝置在使用時，該載具31的驅動端 311是架，在傳動輪41的導環溝4U上，並且沿著該移送 °别進而在載具31移送的過程中，由於該載具31 的頂端絲有該磁浮單元53，所述磁浮單元53又位在第一 第導磁件521 ' 522之間，再加上該磁浮單元53的第 及第一磁斤面531、532和對應的第一及第二導磁面523 都是同極相斥’因此，利用這些關係，可以讓磁浮單 凡53在不會和第—及第二導磁件521、522接觸的情況下 ’達到隨著載具3丨料時穩定、不晃動的目i換句話說 由於本實細例在移送載具31的過程中，該磁浮導執機構 5的：件不會抵靠、摩擦’因此，本新型該項設計可以提高 加工環境的潔淨度以及加工物件的加工品質。 在《又什上，本新型的磁浮單元53以及固定導磁單元52 除了可以如實施例所揭露使用長條狀的強力磁鐵條外，還 可以將其中的一個改變成間隔小塊的形式，也就是說，本 新型的磁洋單it 53也可以是數個間隔的強力磁鐵塊，或者 將固疋導磁單元52的第一及第二導磁件52丨、522改變成 為數個間隔設置的強力磁鐵塊，以上的改變都可以達到本 新型預期的創作目的。 惟以上所述者’僅為本新型之較佳實施例而已，當不 月b以此限定本新型實施之範圍，即大凡依本新型申請專利 範圍及新型說明内容所作之簡單的等效變化與修飾，皆仍 屬本新型專利涵蓋之範圍内。 【圖式簡單說明】 M384401 圖1是一種以往傳送裝置的立體使用示意圖； 圖2是，以往傳送裝置的侧視安裝示意圖; 圖3疋本新型傳送裝置的一個較佳實施例的使用狀態 參考圖’顯示該傳送裝置安裝在—個真空腔座上並且承載 一個載具時的狀態； 圖4是該較佳實施例的一個前視示意圖；及 圖5是該較佳實施例的-個局部放大圖，主要顯示該 傳送裝置的一個磁浮導軌機構。 M384401 【主要元件符號說明】 30 真空腔座 51 安裝座 301 腔壁 511 懸掛桿 302 真空腔室 512 安裝軌道 303 側壁部 513 安裝壁 304 頂壁部 514 安裝面 31 載具 52 固定導磁單 311 驅動端 521 第一導磁件 312 導引端 522 第二導磁件 32 移送方向 523 第一導磁面 4 傳送機構 524 第二導磁面 41 傳動輪 53 磁浮單元 411 導環溝 531 第一磁浮面 42 皮帶單元 532 第二磁浮面 5 磁浮導軌機構3 M384401 The guiding groove of the guiding rod 224 of the guiding rod 222 extends into the guiding groove 22, which can prevent the guiding end 122 from being shaken and unstable when the carrier 12 is transferred. In the past, the transport device 2 for transporting the carrier 12 has been designed to use the guide mechanism 22 to facilitate the smoothness of the transfer of the carrier 2, but in terms of the design of the guide bar 222 and the road 221, The guiding head 224 of the guiding rod 222 must match the width of the guiding groove 223 of the trajectory 221 to achieve a better guiding effect, but in this way, the guiding head can also define the guiding The groove wall surface of the groove 223 generates friction, which in turn generates friction dust. Since the generated dust is scattered in the vacuum chamber 13, this not only affects the cleanliness of the vacuum chamber 131, but also reduces the processing quality of the enamel-coated object. [New content] The purpose of the present invention is to provide a conveyor for a vehicle that can improve the cleanliness of the processing environment and improve the processing quality. The novel transfer device is mounted on a vacuum chamber and conveys a carrier in a direction of transfer which has a leading end. The transfer device includes a transfer mechanism for transferring the carrier and a maglev guide mechanism corresponding to the leading end of the carrier. The maglev guide mechanism includes: a magnetic single-seat mounted on the leading end of the carrier, a mounting seat mounted on the vacuum chamber, and a mounting on the mounting seat and corresponding to the magnetic floating unit In the fixed magnetic conducting unit, the fixed magnetic conducting unit and the magnetic floating unit utilize a repulsive force, so that the magnetic floating unit can move with the carrier in a manner that is smooth and does not contact other components. The new beneficial effect is that when the carrier is transferred (4), the unit and the fixed magnetic conductive unit move in a suspended manner without friction with other components. Therefore, the design of the new model can not only mention To the working environment (four) clarity, it can also improve the processing quality of the edging objects. [Embodiment] The foregoing and other technical contents, features, and effects of the present invention will be presented in conjunction with the detailed description of the preferred embodiments of the reference drawings. Referring to Figures 3, 4, and 5, a preferred embodiment of the present type of transfer apparatus is mounted on a vacuum chamber holder 30 and can carry a carrier 31 while driving the carrier 3! along a transfer direction. 32, the vacuum chamber % comprises a chamber wall 3 (H, and a vacuum chamber 302 defined by the chamber wall 3〇1, the chamber wall 3() 1 having two uprights The side wall portion 3〇3, and the sheet is erected on the top wall portion 3〇4 between the top edges of the side wall portion 303, and the carrier 3! has a driving end 311 close to the lower side, and a near top wall portion 304. The guiding end 312. The conveying device of the embodiment comprises: a conveying mechanism 4 for the carrier 31 to erect and convey the carrier 31 to advance in the conveying direction 32, and a maglev guiding mechanism for guiding the carrier 31 5. The transport mechanism 4 of the present embodiment includes a plurality of transmission wheels 41 that are spanly mounted on one of the side wall portions 303 of the vacuum chamber seat so, a belt unit 42' that interlocks the transmission wheel 41, and a picture. A power source not shown and capable of driving the transmission wheel 41 to rotate 'each transmission wheel 41 has a M384401 position The guide ring groove 411 is disposed in the cavity 302 and is provided with the driving end 311 of the carrier 31. The magnetic floating rail mechanism 5 of the present embodiment includes a mounting seat 51 suspended below the top wall portion 304 of the vacuum chamber holder 30, and an installation a fixed magnetic conductive unit 52 on the mounting base 51, and a magnetic floating unit 53 fixedly mounted on the leading end 312 of the carrier. The mounting base 51 has two left and right spaced suspension rods 511, and a suspension A mounting rail 512 below the suspension bar 511 has two mounting walls 513 extending along the transport direction 32 and spaced back and forth, each mounting wall 513 having an opposite mounting surface 514. The fixed magnetic conductive unit 52 has a first magnetic conductive member 521 mounted on one of the mounting surfaces 514, and a second magnetic conductive member 522 mounted on the other mounting surface 514, the first and the third The two magnetic conductive members 521, 522 are all in the form of a strong magnet and the first magnetic conductive member 521 has a 523 toward the second magnetic conductive member 522, and the second magnetic conductive member 522 has a second guide toward the first magnetic conductive member. Magnetic surface 524 'the above first and The magnetic permeability of the two magnetically conductive surfaces 523, 524 is opposite. The magnetic floating unit 53 of the present embodiment extends laterally along the transfer direction 32. It is fixed above the leading end 312 of the carrier 31 and is located at the first magnetically conductive member. Between the 521 and the second magnetically permeable member, the magnetic levitation unit 53 is in the form of a strong magnet and has a first magnetic floating surface 53 facing the first magnetic conductive surface and a second toward the second magnetic conductive surface 524. The magnetic floating surface says: or the magnetic properties of the first magnetic ocean surface 531 and the first magnetic conductive surface 523 are the same. The magnetic properties of the second magnetic floating surface 532 and the second magnetic conductive surface 524 are also the same. 6 When the conveying device of the embodiment is in use, the driving end 311 of the carrier 31 is a frame, on the guide ring groove 4U of the transmission wheel 41, and along the transfer and further during the transfer of the carrier 31, Since the top end of the carrier 31 has the magnetic floating unit 53, the magnetic floating unit 53 is again located between the first magnetic conductive members 521' 522, and the first and first magnetic surfaces 531 of the magnetic floating unit 53 are added. , 532 and the corresponding first and second magnetically conductive surfaces 523 are all repelled by the same pole. Therefore, by utilizing these relationships, the magnetic levitation unit 53 can be prevented from coming into contact with the first and second magnetic conductive members 521 and 522. In the case of 'achieving a stable, non-sloshing condition with the vehicle 3, in other words, in the process of transferring the carrier 31, the magnetic floating guide 5 does not abut, Friction' Therefore, this new design can improve the cleanliness of the processing environment and the processing quality of the processed objects. In addition, the magnetic floating unit 53 and the fixed magnetic conductive unit 52 of the present invention can also change one of them into a small block shape in addition to the strip-shaped strong magnet strip as disclosed in the embodiment. That is to say, the magnetic ocean single it 53 of the present invention may also be a plurality of spaced strong magnet blocks, or the first and second magnetic conductive members 52 丨, 522 of the solid magnetic conductive unit 52 may be changed into a plurality of intervals. Strong magnet block, the above changes can achieve the intended purpose of this new model. However, the above description is only a preferred embodiment of the present invention, and when it is not limited, the scope of the present invention is limited, that is, the simple equivalent change of the patent application scope and the new description content of the present invention is Modifications are still within the scope of this new patent. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic perspective view of a conventional transfer device; FIG. 2 is a schematic side view of a conventional transfer device; FIG. 3 is a view of a use state of a preferred embodiment of the present transfer device 'showing the state in which the conveyor is mounted on a vacuum chamber and carrying a carrier; Figure 4 is a front elevational view of the preferred embodiment; and Figure 5 is a partial enlargement of the preferred embodiment The figure mainly shows a magnetic floating rail mechanism of the conveying device. M384401 [Main component symbol description] 30 Vacuum chamber 51 Mounting seat 301 Cavity wall 511 Hanging rod 302 Vacuum chamber 512 Mounting rail 303 Side wall portion 513 Mounting wall 304 Top wall portion 514 Mounting surface 31 Carrier 52 Fixed magnetic guide 311 drive End 521 first magnetic conductive member 312 leading end 522 second magnetic conductive member 32 transfer direction 523 first magnetic conductive surface 4 transport mechanism 524 second magnetic conductive surface 41 transmission wheel 53 magnetic floating unit 411 guide ring groove 531 first magnetic floating surface 42 belt unit 532 second magnetic floating surface 5 magnetic floating rail mechanism