M383898 五、新型說明： 【新型所屬之技術領域】 本創作係有關一種雷射直寫裝置，特別是一種用於面板電路製作 之雷射直寫裝置。 【先前技術】 近年來光電產業蓬勃發展，觸控面板及電漿面板成為光電產業主 要產品其中之一。觸控技術可分為電阻式、電容式等技術，其中透明 導電玻璃及透明導電膜為其關鍵組件，因玻璃不具導電性，因此需在 玻璃或其他透明絕緣材質之基材上鍍一層透明導電薄膜，並在透明導 電薄膜上製作金屬電極以感應透明導電薄膜因觸碰產生的電壓變化而 得知觸碰位置。如第1圖所示，係為一觸控面板alO之示意圖，包含可 視區al2及非視區ai4，非視區al4為面板外框遮蓋處，金屬電極al6 位於非視區al4中，使得使用者於外觀上看不到金屬電極al6等電路連 接’由於目前產品往窄緣化發展，因此金属電極al6電路也被要求愈來 愈精細化。 在電漿面板製程中，於玻璃基材上鍍一層透明導電薄膜，將導電 薄膜製成特殊圖案電路成為透明電極，因面板使用時產生大量熱能會 使透明電極之阻值上升，因此在透明電極上製作金屬電極以增加導電 度’另為避免金屬電極造成發光的阻礙，金屬電極導線必須做得相當 纖細。 目前金屬電極之製程主要為採用蝕刻製程或網版印刷製程，電漿 面板之钱刻製程係於透明電極上依序鍍上鉻、銅及鉻三層金屬，再以 3 M383898 濕式鞋刻製簡金屬侧成所需縣；觸控面板之峨印刷製程則將 銀電極漿料透過具所需圖樣之網版印刷在透明電極上。另外仍有以網 版印刷方式將銀電極漿㈣作成感紐的漿料，以印刷的方式將此材 料整面印刷顧有透明電極的玻璃基板上面，再以黃光製程將銀電極 漿料姓刻成所需之圖案。 然而，不論是蝕刻或網版印刷皆有精度之瓶頸，在電極電路要求 愈來愈精細之情況下，常會造成導制短路、精度不良或粗細不一致 之問題。再者，為管控品質，於蝕刻製程或網版印刷製程後，需以目 視或儀驗般时導_路，再佐以雷_紐術將购線距之金 屬部分移除’以修復短路導線，勢必增加人力、物力及製程複雜度。 【新型内容】 有鐘於此，本創作提出一種用於面板電路製作之雷射直寫裝置， 用以加工包含基板及位於基板上之至少一金屬薄膜區域之面板，可直 接在具金屬薄膜上以雷射劃線技術刻劃出電路，由於雷射劃線之精度 高，可解決蝕刻或網版印刷精度不良之問題，亦可免除後續檢測修補 之程序。 本創作提出之雷射直寫裝置包含雷射模組、運動平台及加工平台。 雷射模組包含雷射光源、監控單元及輸出單元。雷射光源用以產生 第一雷射光束，監控單元用以接收並調校第—雷射光束而輸出第二雷 射光束，輸出單元連接於監控單元，接收並聚焦第二雷射光束而後輸 出第三雷射光束。 運動平台承載雷射模組’用以沿第一方向及垂直於第一方向之第二 4 方向移動雷射模組。 加工平台位於雷射模組下方，承載具至少一金屬薄膜區域之面板， 使金屬薄膜區域接受第三雷射光束聚焦照射直接蝕刻金屬部分，加工 平台漫射通過面板之第三雷射光束以避免傷害面板之基板。 有關本創作之較佳實施例及其功效，茲配合圖示說明如後。 【實施方式】 以下舉出具體實施例以詳鈿說明本創作之内容，並以圖示作為辅 助說明。說明中提及之符號係參照圖示符號。 請參照第2圖及第3圖’係本創作之示意圖。本創作提出之雷射直 寫裝置包含雷射模組20、運動平台30及加工平台40，用以加工包含 基板52及位於基板52上之至少一金屬薄膜區域54之面板5〇 (如第4 圖所不）。在本實施例中，基板52可為玻璃或PET (聚乙烯對苯二甲 酸酯）等透明材質，金屬薄膜區域54之製作較佳地可以網版印刷方式 製作無關精度之金屬薄膜區域54，其材質可為銀。 雷射模組20包含雷射光源22、監控單元24及輸出單元26。雷射 光源22用以產生第一雷射光束60，監控單元24用以接收、監測第一 雷射光束60之特性，並調校第一雷射光束6〇而輪出第二雷射光束&， 輸出單元26連接於監控單元24，接收並聚焦第二雷射光束61而後輸 出第二雷射光束62。監控早元24外圍有一遮蔽護罩28包覆，用以防 止雷射或其他輻射線外露傷害人體。雷射光源22產生之第一雷射光東 6〇實質上為532nm波長之綠光雷射。在此，輪出單元26與監控單元 24之連接以風箱式密閉連接管連接，但本創作非以此為限。 M383898 監控單元24包含第一光曲路器241、雷射光閘242、第一分光鏡 243、光譜儀244、雷射功率衰減器245、第二分光鏡246、光功率計 247、第二光曲路器248、光束整形器249、準直擴束器250、第三光曲 路器25卜第三分光鏡252、第四光曲路器253及光束輪廓分析儀254。 第一光曲路器241接收第一雷射光束60,用以將第一雷射光束6〇位移 90度至雷射光閘242，雷射光閘242於電源開啟時才使第一雷射光束 6〇通過雷射光閘242至第一分光鏡243，第一分光鏡243分光第一雷 射光束60為90度角偏移之第一反射光束63及與原行進方向相同之第 一橫向偏移光束6心光譜儀2糾接收第一橫向偏移光束64並分析其光 譜，雷射功率衰減器245接收第一反射光束63並控制其功率後輸出至 第二分光鏡246,第二分光鏡246分光第一反射光束63為90度角偏移 之第二反射光束65及與原行進方向相同之第二橫向偏移光束66。光功 率汁247接收第二反射光束65並分析其功率，第二光曲路器248接收 第二橫向偏移光束66並將之90度位移至光束整形器249,光束整形器 249接收第二橫向偏移光束66，用以將第二橫向偏移光束邰之高斯能 里分佈轉為平頂式（top-flat)能量分佈後輸出，準直擴束器25〇接收經 光束整形器249之第二橫向偏移光束66，並校準其行進方向及直徑後 輸出至第三光曲路器25卜第三光曲路器251將第二橫向偏移光束砧 位移90度至第三分光鏡252 ’第三分光鏡252分光第二橫向偏移光束 66為90度角偏移之第二雷射光束61及與原行進方向相同之第三橫向 偏移光束67。第四光曲路器253接㈣三橫向偏移光束67並將之9〇 度位移至絲輪齡析儀254 ’錄輪齡賴帛时析第三橫向 6 M383898 偏移光束67，並提供即時的光參數上τ限範@作為品質管控，當光參 數超出範圍時發出警告’使輪出光的品質制管控並可對於雷射加工 設定之參數提出記錄與更正警訊。 輪出單70 26包含第四分光鏡％卜伸縮光束管262、校正模組263、 圈馬達264、喷嘴265及對位視覺模組266。第四分光鏡261接收來 自槪控單凡24之第三雷射光束61，並將第二雷射光束Μ偏移如度角， 你垂直於第-方向X與第二方向γ之第三方向z輸出第二雷射光束 61。伸縮光束管262之-端連接於第四分光鏡261，使第四分光鏡261 輸出之第二雷射光束通過伸縮光東管Μ:至校正模組263，校正模 组263連接於伸縮光束管262之另一端，用以接收並聚焦經過伸縮光 束e 262之第一雷射光束61。音圈馬達264連接於校正模組2砧上， 用以微調校正模，组263沿第三方向z移動，藉以調整第三雷射光束62 打在面板50之深度，以準確蝕刻面板5〇之金屬薄膜區域5心喷嘴265 連接於校正模組263，接收經校正模組263之第二雷射光束以，輸出 第三雷射光束62。對位視覺模組266連接於第四分光鏡261之與伸縮 光束管262相對側，用.以觀測並辅助定位第三雷射光束纪輪出之位 置。在此，伸縮光束管262為風箱式光束管，但本創作非以此為限。 校正模組263包含線性可調底座2632、光束品質增強器2634及聚 焦鏡組2636。線性可調底座2632 —端與伸縮光束管262連接，另一端 與光束品質增強器2634連接，線性可調底座2632用以微調第三雷射 光束62之光斑打在面板50之深度，光束品質增強器2634用以圓極化 第二雷射光束61，以形成均勻之光斑，聚焦鏡組2636與光束品質增強 器2634連接，用以聚焦第二雷射光束61。 對位視覺模組266包含第一旁轴攝影機2661、濾光片2662、第二 旁軸攝影機2663、色差校正鏡組2664及同軸攝影機2665 »第一旁轴 攝影機2661連接於第四分光鏡261，並與伸縮光束管262相對，用以 辅助精密定位第三雷射光束62輸出之位置，濾光片2662連接於第一 旁軸攝影機2661，用以濾除非532nm波長之光，第二旁軸攝影機2663 連接於濾光片2662,用以辅助精密定位第三雷射光束62輸出之位置， 色差校正鏡組2664連接於第二旁軸攝影機2663，用以修正第二旁轴攝 衫機對第三訪光束62感触置之誤差，同鱗織2665與色差校 正鏡組2664連接，用以觀看第三雷射光束62。 在此，本創作提出之雷射直寫裝置更包含主機7〇與顯示器72。主 機7〇與對位視覺模組π6之第一旁轴攝影機2撕與第二旁抽攝影機 舶相連接，用以判別第一旁軸攝影機觸與第二旁軸攝影機細擷 取之景/像。顯不器72無位視覺模組挪之同轴攝影機2俯連接， 用以顯示同輕攝影機施操取到之晝面。 運動平台3〇承載雷射模組2〇，用以沿第一方向χ及垂直於第— 方向X之第〜方向γ移動雷射模Μ2()，使其可依欲湖金·膜區域 羡移動雷射模组2〇。以本創作之較佳實施例而言，運動平台 為龍門平台。 一加工平台4〇包含透明平板€與金屬平板44。加工平台4〇位於雷 •。0之下’承載具至少一金屬薄膜區域54之面板5〇，使金屬薄 、品接文第二雷射光束62聚焦照射直接钱刻部分金屬，加工平 台40漫射通過面板50之第三雷射光束62以避免傷害面板5〇之基板 52 (如第5圖所示）。在此，加工平台4〇之透明平板42材質可為硬度 較玻璃低之光學壓克力或高分子材質，用以使透射面板5〇之第三雷射 光束62經金屬平板44漫射於透明平板42中，使免於傷害面板50之 基板52，但本創作非以此為限。 本創作以精密的雙軸運動平台與可精密調整聚焦光斑位置之雷射 光進行二轴精密定位，用以精確製作面板之電路，並透過漫射之加工 平台，保護面板免於雷射光之損害，可解決蝕刻或網版印刷精度不良 之問題’亦可免除後續檢測修補之程序。 雖然本創作的技術内容已經以較佳實施例揭露如上，然其並非用以 限定本創作’任織f此技藝者，林麟本辦之_所作些許之 更動與潤飾，皆應涵蓋於本創作的範疇内，因此本創作之保護範圍當 視後附之申請專利範圍所界定者為準。 M383898 【圖式簡單說明】 第1圖為一種習知觸控面板之示意圖。 第2圖為本創作之示意圖。 第3圖為本創作之雷射模組之示意圖。 第4圖為本創作之加工面板之示意圖。 第5圖為本創作之加工平台之示意圖。 【主要元件符號說明】 alO :觸控面板 al2 :可視區 al4 :非視區 al6 :金屬電極 20 :雷射模組 22 :雷射光源 24 :監控單元 241 :第一光曲路器 242 :雷射光閘 243 :第一分光鏡 244 :光譜儀 245 :雷射功率衰減器 246 :第二分光鏡 247 :光功率計 248 :第二光曲路器 249 :光束整形器 250 :準直擴束器 251 ·第三光曲路器 252 :第三分光鏡 253 :第四光曲路器 254 :光束輪廓分析儀。 26 :輸出單元 261 :第四分光鏡 262 :伸縮光束管 263 :校正模組 2632 :線性可調底座 2634 :光束品質增強器 2636 :聚焦鏡組 M383898M383898 V. New description: [New technical field] The present invention relates to a laser direct writing device, in particular to a laser direct writing device for panel circuit fabrication. [Prior Art] In recent years, the optoelectronic industry has flourished, and touch panels and plasma panels have become one of the main products of the optoelectronic industry. Touch technology can be divided into resistive and capacitive technologies. Transparent conductive glass and transparent conductive film are key components. Because glass is not conductive, it needs to be coated with transparent conductive on glass or other transparent insulating substrate. The film is formed on the transparent conductive film to induce the touch position of the transparent conductive film due to the voltage change caused by the touch. As shown in FIG. 1 , it is a schematic diagram of a touch panel a10, including a visible area a2 and a non-view area ai4. The non-view area a4 is a cover of the panel outer frame, and the metal electrode al6 is located in the non-view area al4, so that The circuit connection of the metal electrode al6 is not seen in the appearance. Due to the development of the current product, the metal electrode al6 circuit is also required to be more and more refined. In the plasma panel process, a transparent conductive film is plated on the glass substrate, and the conductive film is made into a special pattern circuit to become a transparent electrode. Since a large amount of heat energy is generated when the panel is used, the resistance of the transparent electrode is increased, so the transparent electrode is Metal electrodes are fabricated to increase the conductivity. In addition, in order to avoid the hindrance of the metal electrodes, the metal electrode wires must be made quite thin. At present, the process of the metal electrode is mainly an etching process or a screen printing process, and the plasma engraving process is sequentially plated with three layers of chromium, copper and chromium on the transparent electrode, and then engraved with 3 M383898 wet shoes. The simple metal side is formed into the required county; the touch panel printing process passes the silver electrode paste through the screen with the desired pattern on the transparent electrode. In addition, there is still a slurry of silver electrode paste (four) which is made into a sensation by screen printing. The material is printed on the whole surface of the glass substrate with transparent electrodes by printing, and then the silver electrode paste is surnamed by a yellow light process. Engraved into the desired pattern. However, both the etching and the screen printing have a bottleneck of precision, and in the case where the electrode circuit is required to be more and more fine, the problem of short circuit, poor precision, or inconsistency in thickness is often caused. In addition, in order to control the quality, after the etching process or the screen printing process, it is necessary to visually or illuminate the time-guided road, and then replace the metal part of the purchased wire distance with the Ray_News to repair the short-circuit wire. It is bound to increase the complexity of manpower, material resources and process. [New content] In this case, the present invention proposes a laser direct writing device for panel circuit fabrication, which is used for processing a panel comprising a substrate and at least one metal film region on the substrate, which can be directly on the metal film. The laser scribing technique is used to scribe the circuit. Due to the high precision of the laser scribing, the problem of poor etching or screen printing accuracy can be solved, and the procedure for subsequent detection and repair can be eliminated. The laser direct writing device proposed by the present invention comprises a laser module, a motion platform and a processing platform. The laser module includes a laser light source, a monitoring unit, and an output unit. The laser light source is used to generate a first laser beam, the monitoring unit is configured to receive and adjust the first laser beam and output the second laser beam, the output unit is connected to the monitoring unit, receives and focuses the second laser beam, and then outputs The third laser beam. The motion platform carries the laser module 'for moving the laser module in a first direction and a second direction perpendicular to the first direction. The processing platform is located under the laser module, and carries a panel with at least one metal film region, so that the metal film region receives the third laser beam and directly illuminates the metal portion, and the processing platform diffuses through the third laser beam of the panel to avoid Damage the substrate of the panel. The preferred embodiment of the present invention and its effects are described below with reference to the drawings. [Embodiment] The specific embodiments are described below in detail to explain the contents of the present invention, and are illustrated by the accompanying drawings. The symbols mentioned in the description are referred to the pictograms. Please refer to Figure 2 and Figure 3 for a schematic diagram of this creation. The laser direct writing device of the present invention comprises a laser module 20, a motion platform 30 and a processing platform 40 for processing a panel 5 comprising a substrate 52 and at least one metal film region 54 on the substrate 52 (eg, 4th) Figure does not). In this embodiment, the substrate 52 may be a transparent material such as glass or PET (polyethylene terephthalate), and the metal film region 54 is preferably fabricated by screen printing to produce a metal film region 54 of irrelevant precision. Its material can be silver. The laser module 20 includes a laser source 22, a monitoring unit 24, and an output unit 26. The laser source 22 is used to generate a first laser beam 60. The monitoring unit 24 is configured to receive and monitor the characteristics of the first laser beam 60, and adjust the first laser beam 6 〇 to rotate the second laser beam & The output unit 26 is connected to the monitoring unit 24, receives and focuses the second laser beam 61 and then outputs the second laser beam 62. The perimeter of the monitoring element 24 is covered by a shield guard 28 to prevent exposure of the laser or other radiation to the human body. The first laser light produced by the laser source 22 is substantially a green light laser having a wavelength of 532 nm. Here, the connection between the wheeling unit 26 and the monitoring unit 24 is connected by a bellows type closed connecting pipe, but the present invention is not limited thereto. The M383898 monitoring unit 24 includes a first optical path 241, a laser shutter 242, a first beam splitter 243, a spectrometer 244, a laser power attenuator 245, a second beam splitter 246, an optical power meter 247, and a second optical path. The 248, the beam shaper 249, the collimator beam expander 250, the third optical tracker 25, the third beam splitter 252, the fourth optical path 253, and the beam profiler 254. The first optical path 241 receives the first laser beam 60 for displacing the first laser beam 6 90 by 90 degrees to the laser shutter 242, and the laser shutter 242 causes the first laser beam 6 to be turned on when the power is turned on. 〇 passing the laser shutter 242 to the first beam splitter 243, the first beam splitter 243 splits the first laser beam 60 into a first reflected beam 63 with an angular offset of 90 degrees and a first laterally offset beam that is the same as the original traveling direction. The 6-heart spectrometer 2 corrects the first laterally-shifted beam 64 and analyzes its spectrum. The laser power attenuator 245 receives the first reflected beam 63 and controls its power, and outputs it to the second beam splitter 246, which is split by the second beam splitter 246. A reflected beam 63 is a second reflected beam 65 that is offset by a 90 degree angle and a second laterally offset beam 66 that is the same as the original direction of travel. The optical power juice 247 receives the second reflected beam 65 and analyzes its power, the second optical path 248 receives the second laterally offset beam 66 and shifts it 90 degrees to the beam shaper 249, and the beam shaper 249 receives the second lateral direction The offset beam 66 is configured to convert the Gaussian energy distribution of the second laterally offset beam into a top-flat energy distribution, and the collimator beam expander 25 receives the beam shaper 249 Secondly, the beam 66 is laterally offset, and its traveling direction and diameter are calibrated and output to the third optical path 25. The third optical path 251 displaces the second laterally offset beam anvil by 90 degrees to the third beam splitter 252'. The third beam splitter 252 splits the second laterally offset beam 66 into a second laser beam 61 that is offset by a 90 degree angle and a third laterally offset beam 67 that is the same as the original direction of travel. The fourth optical path 253 is connected to the (four) three laterally offset beam 67 and is displaced 9 degrees to the wire age analyzer 254 'recording wheel age Lai's analysis of the third lateral 6 M383898 offset beam 67, and provides instant The τ limit of the light parameter is used as the quality control. When the light parameter is out of range, it will issue a warning. 'The quality control of the wheel light can be recorded and corrected for the parameters of the laser processing setting. The wheeling sheet 70 26 includes a fourth beam splitter, a telescopic beam tube 262, a correction module 263, a circle motor 264, a nozzle 265, and an alignment vision module 266. The fourth beam splitter 261 receives the third laser beam 61 from the control unit 24, and shifts the second laser beam 如 by a degree angle, which is perpendicular to the third direction of the first direction X and the second direction γ. z outputs a second laser beam 61. The end of the telescopic beam tube 262 is connected to the fourth beam splitter 261, so that the second laser beam outputted by the fourth beam splitter 261 passes through the telescopic light beam: to the correction module 263, and the correction module 263 is connected to the telescopic beam tube. The other end of the 262 is for receiving and focusing the first laser beam 61 passing through the telescopic beam e 262. The voice coil motor 264 is connected to the anvil of the correction module 2 for fine-tuning the calibration mode, and the group 263 is moved along the third direction z, thereby adjusting the depth of the third laser beam 62 at the panel 50 to accurately etch the panel 5 The metal film region 5 core nozzle 265 is connected to the correction module 263, receives the second laser beam of the correction module 263, and outputs the third laser beam 62. The alignment vision module 266 is coupled to the opposite side of the fourth beam splitter 261 from the telescopic beam tube 262 for observing and assisting in locating the position of the third laser beam. Here, the telescopic beam tube 262 is a bellows type beam tube, but the present invention is not limited thereto. The calibration module 263 includes a linearly adjustable base 2632, a beam quality enhancer 2634, and a focusing lens assembly 2636. The linearly adjustable base 2632 is connected to the telescopic beam tube 262, and the other end is connected to the beam quality enhancer 2634. The linearly adjustable base 2632 is used to fine tune the spot of the third laser beam 62 to the depth of the panel 50, and the beam quality is enhanced. The 2634 is used to circularly polarize the second laser beam 61 to form a uniform spot, and the focusing mirror 2636 is coupled to the beam quality enhancer 2634 for focusing the second laser beam 61. The aligning vision module 266 includes a first paraxial camera 2661, a filter 2662, a second paraxial camera 2663, a chromatic aberration correcting mirror group 2664, and a coaxial camera 2665. The first paraxial camera 2661 is connected to the fourth beam splitter 261. And opposite to the telescopic beam tube 262, to assist in precisely positioning the output position of the third laser beam 62, the filter 2662 is connected to the first rangefinder camera 2661 for filtering light of 532 nm wavelength, the second rangefinder camera 2663 is connected to the filter 2662 to assist in precisely positioning the output position of the third laser beam 62. The chromatic aberration correcting lens group 2664 is connected to the second rangefinder camera 2663 for correcting the second rangefinder camera pair third. The access beam 62 is in contact with the error, and is connected to the swatch 2665 and the chromatic aberration correcting mirror group 2664 for viewing the third laser beam 62. Here, the laser direct writing device proposed by the present invention further includes a host 7 and a display 72. The first side camera 2 of the host 7〇 and the alignment vision module π6 is connected to the second side camera to determine that the first rangefinder camera touches the scene/image of the second rangefinder camera. . The display unit 72 has no telescopic camera 2 coaxial connection, which is used to display the same light camera. The motion platform 3〇 carries the laser module 2〇 for moving the laser mode 2() in the first direction 垂直 and in the first direction γ of the first direction X, so that it can be used in the gold film area. Move the laser module 2〇. In the preferred embodiment of the present invention, the motion platform is a gantry platform. A processing platform 4A includes a transparent plate and a metal plate 44. The processing platform 4〇 is located in Ray•. Below 0, the panel 5 of the at least one metal film region 54 is carried, so that the metal thin, the second laser beam 62 of the article is focused to directly illuminate part of the metal, and the processing platform 40 diffuses through the third ray of the panel 50. The beam 62 is fired to avoid damage to the substrate 52 of the panel 5 (as shown in Figure 5). Here, the material of the transparent plate 42 of the processing platform 4 can be an optical acrylic or polymer material having a lower hardness than the glass, so that the third laser beam 62 of the transmissive panel 5 is diffused through the metal plate 44 to be transparent. In the flat plate 42, the substrate 52 of the panel 50 is protected from damage, but the present invention is not limited thereto. The creation uses a precise two-axis motion platform and a laser that can precisely adjust the position of the focused spot to perform two-axis precision positioning to accurately fabricate the panel circuit and protect the panel from laser light damage through a diffused processing platform. It can solve the problem of poor etching or screen printing accuracy', and it can also eliminate the procedure of subsequent detection and repair. Although the technical content of the present invention has been disclosed above in the preferred embodiment, it is not intended to limit the author of the creation of the artist, and the changes and refinements made by Lin Lin should be covered in this creation. Therefore, the scope of protection of this creation is subject to the definition of the scope of the patent application. M383898 [Simple Description of the Drawing] FIG. 1 is a schematic view of a conventional touch panel. Figure 2 is a schematic diagram of the creation. Figure 3 is a schematic diagram of the laser module of the creation. Figure 4 is a schematic view of the processing panel of the creation. Figure 5 is a schematic diagram of the processing platform of the creation. [Main component symbol description] alO: touch panel al2: visible area a4: non-view area al6: metal electrode 20: laser module 22: laser light source 24: monitoring unit 241: first optical path 242: mine Light shutter 243: first beam splitter 244: spectrometer 245: laser power attenuator 246: second beam splitter 247: optical power meter 248: second optical path 249: beam shaper 250: collimation beam expander 251 Third optical path 252: Third beam splitter 253: Fourth optical path 254: Beam profiler. 26 : Output unit 261 : 4th beam splitter 262 : Telescopic tube 263 : Correction module 2632 : Linear adjustable base 2634 : Beam quality enhancer 2636 : Focusing mirror M383898
264 :音圈馬達 265 :噴嘴 266 :對位視覺模組 2661 :第一旁軸攝影機 2662 :濾光片 2663 :第二旁轴攝影機 2664 :色差校正鏡組 2665 :同軸攝影機 28 :遮蔽護罩 30 :運動平台 40 :加工平台 42 :透明平板 44 :金屬平板 50 :面板 52 :基板 54 :金屬薄膜區域 60 :第一雷射光束 61 :第二雷射光束 62 :第三雷射光束 63 :第一反射光束 64 :第一橫向偏移光束 65第二反射光束 66 :第二橫向偏移光束 67 :第三橫向偏移光束 70 :主機 72 :顯示器 X:第一方向 Y:第二方向 Z:第三方向264: voice coil motor 265: nozzle 266: alignment vision module 2661: first rangefinder camera 2662: filter 2663: second rangefinder camera 2664: chromatic aberration correction mirror set 2665: coaxial camera 28: shadow shield 30 : motion platform 40: processing platform 42: transparent plate 44: metal plate 50: panel 52: substrate 54: metal film region 60: first laser beam 61: second laser beam 62: third laser beam 63: A reflected beam 64: a first laterally offset beam 65, a second reflected beam 66: a second laterally offset beam 67: a third laterally offset beam 70: Host 72: Display X: First direction Y: Second direction Z: Third direction