/〇斗/| 五、新型說明： 【新型所屬之技術領域】 本創作係一種近場探針，尤指一種能抑制探針本身的 共振而降低因共振所衍生之混附波干擾，增加可用頻寬與 提高解析度之近場探針。 【先前技術】 • 隨著高速電器系統的小型化，電子零件與電路佈線在 產叩中呈現尚密度的排列，該些電子零件所產生的電磁波 係曰盈受到重視，當發射的電磁波過強時，將干擾周圍其 匕的電子元件而使其效能改變或導致誤動作，故建立有電 磁相各性（E|ectr〇magnetic c〇mpatibinty)的相關測試標準 並已開發出可用的測試儀器。 其中一種測量電磁場之方式便是採用近場探針，請參 考第五圖所示，係揭示一習用近場探針（50)之使用示意圖， _該近場探針（50)係懸空在具有一信號線（51)之電路板（52)上 •方田施加電流於該k號線（51)時，於信號線（51)周圍將 產生感應磁場，而近場探針（5〇)則是連接至一測量儀器。 此時以非接觸的測量方式移動該近場探針（50)，當變化近 場探針（50)之水平或垂直位置時，根據法拉第感應定律 (Fraday’s |aw of inducti〇n)，當通過廻路所包圍的面積的 磁通量發生變化時，在廻路中所產生的感應電動勢（E)是與 磁通變化率成正比，故測量儀器即依據近場探針（5〇)所測 得之電動勢判斷出該信號線（51)所建立的電磁場強度分 3 驾用近％探針（50)係由一介質基板及一環狀金屬平板 所構成，&而在實際測量的過程中，該環狀金屬平板自身 會產生共振’此共振現象將會衍生出混附波效應，進而干 擾近場探針（50)之測量解析度。當待測量對象的尺寸更加 精密微小，若近場探針（5〇)因混附波干擾而導致較差的解 析度，將更難以獲得精確的測量結果。再者，該環狀金屬 平板自身會產生共振’其共振的效應將影響通過金屬環的 的磁场分佈致錯誤的量測結果，因此近場探針（5〇)可 用頻寬受到環狀金屬平板自身共振的限制。 【新型内容】 故有鑑於習用近場探針因自身共振而衍生混附波效 應’造成測量解析度較低與可用頻寬較小之缺點，本_ 之主要目的係提供-種具抑制混附波功能的近場探針，藉 由具特殊設計之金屬平板結構而抑制共振、降低因共振^ 生之混附波干擾’提高近場探針的可用頻寬與量測解析 針包含有： 為達成前述㈣’本創作具抑制混㈣功能的近場探 一介質基板； -導電金屬Μ，係設在該介質基板的纟面，導 屬平板包含有一環狀部及兩延伸部，該環狀部具有一開口 而形成兩端部，前述兩延伸部係分別自該兩端部平汗口 各延伸部的内側邊係形成有複數個缺口，兩延伸部上 的複數缺口係對稱排列。 前述複數缺口之長度可為等長、呈對數關係或以規律 弋文變例如以等比級數或等差級數的規律方式改變。 於該複數缺口中，兩相鄰缺口之間的間距值可為相 同、呈對數關係或以規律方式改變。 错由前述結構’兩延伸部之缺口可提供類似濾波器的 效果，使導電金屬平板之自身共振可獲得有效抑制，從而 降低混附波效應而高近場探針之量測解析度及操作頻寬。 【實施方式】 請參考第一、二圖所示，本創作具抑制混附波功能的 近場探針（1)係包含有： 一介質基板（10); 一導電金屬平板（20)，係設在該介質基板（1〇)的表面 上，包含有一環狀部（21)及兩延伸部（22)，該環狀部（21)係 具有一開口（211)而形成兩端部（212) ’前述兩延伸部（22) 係分別自兩端部（21 2)朝開口（211)外側平行延伸而出。 請參考第三圖所示’各延伸部（22)的内側邊係形成有 複數個缺口（221)〜（223)，兩延伸部（22)上的缺口 (221)〜（223)係對稱排列，其中該缺口（221)〜（223)的缺口 長度（d1)(d2)(d3)可皆為相同，或是具有對數關係，或是以 規律方式改變’例如三個缺口（221)〜（223)的缺口長度 (d1)(d2)(d3)呈現等差級數或等比級數的關係。 再者’兩相鄰缺口（221)〜（223)之間的間距值（ai)(a2) 5 [78471 同樣可設計為等長，或是具有對數關係，或是以規律方式 改變’例如該間距值（a 1)(a2)呈現等差級數或等比級數的 關係°前述缺口長度（d1)(d2)(d3)及間距值（a1)(a2)的關係 非必然對應’即缺口長度（d1)(d2)(d3)若為對數關係，則間 距值（a1)(a2)可設計成等長或等比級數的關係。 該兩平行之延伸部（22)上的缺口（221 )~(223)構造能提 - 供類似濃波器的功用，能抑制導電金屬平板（20)的自身共 振’降低因自身共振所衍生之混附波干擾，因此能提高近 ® 場探針之可用頻寬與其解析度。 請參考第四圖所示’當利用本創作近場探針（彳）進行電 磁場強度分佈量測時，係將近場探針（1)以非接觸的方式懸 空设在is號線（51)的上方。該近場探針（1)之兩延伸部係利 用導線連接至一測試儀器（30)的連接埠（31)，該測試儀器 (30)亦自另一連接埠（32)輸出電流至信號線（51)使其產生感 應電磁場，§亥化號線（51)可為一 5 〇歐姆的微帶線 (microstrip line);當近場探針（1)以χ、丫、z任一方向相 •對信號線（5彳）移動時，該近場探針（1)可得知感應電動勢， 令測试儀器（30)記錄、分析該感應電動勢，從而得知信號 線（51)上的電磁場狀態。 综上所述，本創作於導電金屬平板之兩平行延伸部上 形成缺口後，導電金屬平板之自身共振可獲得有效抑制， 因此降低混附波效應，使近場探針之量測解析度更進—步 提升，對要求須以高解析度測量的應用情況，本創作更能 符合要求。 6 【圖式簡單說明】 第一圖：係本創作之平面圖。 第二圖：係本創作之立體圖。 第二圖：係本創作中該延伸部之局部放大圖。 第四圖：係本創作之使用狀態示意圖。 第五圖：係習用近場探針之使用狀態示意圖。 【主要元件符號說明】 (20)導電金屬平板 (211)開口 (22)延伸部 (31)(32)連接埠 (1)近場探針 (1〇)介質基板 (21)環狀部 (212)端部 (221)〜(223)缺 (30)測試儀器 (d1)(d2)(d3)缺 口長度 (a1 )(a2)間距值 (50)近場探針 （51)信號線 (5 2)電路板/〇斗/| V. New Description: [New Technology Field] This creation is a near-field probe, especially one that can suppress the resonance of the probe itself and reduce the interference caused by resonance. Near-field probe with bandwidth and improved resolution. [Prior Art] • With the miniaturization of high-speed electrical systems, electronic components and circuit wiring exhibit a density arrangement in the calving, and the electromagnetic wave generated by these electronic components is highly valued, when the emitted electromagnetic waves are too strong. It will interfere with its surrounding electronic components to change its performance or cause malfunctions. Therefore, relevant test standards for electromagnetic phase (E|ectr〇magnetic c〇mpatibinty) have been established and test instruments have been developed. One way to measure the electromagnetic field is to use a near-field probe. Please refer to the fifth figure to reveal a schematic diagram of the use of a conventional near-field probe (50). The near-field probe (50) is suspended. On the circuit board (52) of a signal line (51), when Fangtian applies current to the line k (51), an induced magnetic field is generated around the signal line (51), and the near field probe (5 〇) It is connected to a measuring instrument. At this time, the near-field probe (50) is moved in a non-contact measurement manner, and when the horizontal or vertical position of the near-field probe (50) is changed, according to Faraday's law (Fraday's | aw of inducti〇n), when passing When the magnetic flux of the area enclosed by the road changes, the induced electromotive force (E) generated in the circuit is proportional to the rate of change of the magnetic flux, so the measuring instrument is measured by the near-field probe (5〇). The electromotive force judges that the electromagnetic field intensity established by the signal line (51) is divided into three. The near-probe probe (50) is composed of a dielectric substrate and a ring-shaped metal plate, and in the actual measurement process, the The circular metal plate itself will resonate. This resonance phenomenon will induce a mixed wave effect, which in turn interferes with the measurement resolution of the near field probe (50). When the size of the object to be measured is more precise and small, if the near-field probe (5〇) is poorly resolved due to the interference of the mixed wave, it will be more difficult to obtain accurate measurement results. Furthermore, the annular metal plate itself generates resonance 'the effect of its resonance will affect the measurement result caused by the magnetic field distribution of the metal ring, so the near-field probe (5 〇) available bandwidth is subjected to the annular metal plate. Restriction of self resonance. [New content] Therefore, in view of the disadvantage that the conventional near-field probe derivatizes the wave effect due to its own resonance, resulting in a low measurement resolution and a small available bandwidth, the main purpose of this _ is to provide - suppression of mixing The near-field probe with wave function suppresses resonance and reduces the interference of the mixed wave due to resonance by the specially designed metal plate structure. The available bandwidth of the near-field probe and the measurement analytical needle include: Achieving the above (4) 'the present invention has a near-field detecting dielectric substrate for suppressing the mixed (4) function; - a conductive metal crucible is disposed on the back surface of the dielectric substrate, and the guiding plate comprises an annular portion and two extending portions, the ring The portion has an opening to form both end portions, and the two extending portions are formed with a plurality of notches from the inner side edges of the extending portions of the flat sweating ports at the two end portions, and the plurality of notches on the two extending portions are symmetrically arranged. The length of the aforementioned complex notch may be of equal length, logarithmic relationship or regular law change, for example, in a regular manner of equal series or equal progression. In the complex notch, the spacing values between two adjacent notches may be the same, logarithmic, or change in a regular manner. The gap between the two extensions of the foregoing structure can provide a filter-like effect, so that the self-resonance of the conductive metal plate can be effectively suppressed, thereby reducing the mixing wave effect and the measurement resolution and operation frequency of the high near-field probe. width. [Embodiment] Referring to the first and second figures, the near field probe (1) for suppressing the mixed wave function includes: a dielectric substrate (10); a conductive metal plate (20), The surface of the dielectric substrate (1) includes an annular portion (21) and two extending portions (22). The annular portion (21) has an opening (211) to form both ends (212). The 'two extensions (22) extend parallel to the outside of the opening (211) from the end portions (21 2), respectively. Referring to the third figure, the inner side of each extension (22) is formed with a plurality of notches (221) to (223), and the notches (221) to (223) of the two extensions (22) are symmetric. Arrange, wherein the gap lengths (d1) (d2) (d3) of the notches (221) to (223) may all be the same, or have a logarithmic relationship, or change in a regular manner, such as three notches (221)~ The gap length (d1) (d2) (d3) of (223) exhibits a relationship of an arithmetic progression or an equal power series. Furthermore, the spacing value (ai) between the two adjacent notches (221) to (223) (a2) 5 [78471 can also be designed to be of equal length, or have a logarithmic relationship, or be changed in a regular manner] The pitch value (a 1) (a2) exhibits a relationship of an equal difference series or an equal series. The relationship between the gap length (d1) (d2) (d3) and the pitch value (a1) (a2) does not necessarily correspond to ' If the notch length (d1)(d2)(d3) is a logarithmic relationship, the pitch value (a1)(a2) can be designed to be equal or proportional. The notches (221)-(223) structures on the two parallel extensions (22) can provide functions similar to a diffuser, and can suppress the self-resonance of the conductive metal plate (20) from being reduced by self-resonance. Mixing wave interference increases the available bandwidth and resolution of the near-field probe. Please refer to the fourth figure. When using the near-field probe (彳) to measure the electromagnetic field intensity distribution, the near-field probe (1) is suspended in the non-contact manner on the is line (51). Above. The two extensions of the near field probe (1) are connected by wires to a connection port (31) of a test instrument (30), and the test instrument (30) also outputs current from the other port (32) to the signal line. (51) to generate an induced electromagnetic field, § Haihua line (51) can be a 5 〇 ohm microstrip line; when the near field probe (1) is in any direction of χ, 丫, z • When moving the signal line (5彳), the near-field probe (1) can know the induced electromotive force, and the test instrument (30) records and analyzes the induced electromotive force to know the electromagnetic field on the signal line (51). status. In summary, after the creation of the gap on the two parallel extensions of the conductive metal plate, the self-resonance of the conductive metal plate can be effectively suppressed, thereby reducing the effect of the mixing wave and making the measurement of the near-field probe more accurate. Step-by-step improvement, this creation is more suitable for applications that require high-resolution measurement. 6 [Simple description of the diagram] The first picture: is the plan of the creation. The second picture: a perspective view of the creation. Second figure: A partial enlarged view of the extension in the present creation. The fourth picture is a schematic diagram of the state of use of this creation. Figure 5: Schematic diagram of the state of use of the near-field probe. [Description of main component symbols] (20) Conductive metal plate (211) opening (22) extension (31) (32) connection 埠 (1) near-field probe (1 〇) dielectric substrate (21) annular portion (212 End (221) ~ (223) missing (30) Test instrument (d1) (d2) (d3) Notch length (a1) (a2) Spacing value (50) Near-field probe (51) Signal line (5 2 ) circuit board