五、新型說明： 【新型所屬之技術領域】 本創作係關於一種面板檢測平台之設計，特別是關於 一種異物檢查裝置之檢測平台結構。 【先前技術】 現今顯示器面板朝向大面積製程發展，尺寸越大價格 越是昂貴，在製程中越不允許有報廢的狀況，以往在製程檢 查上多採用人工檢視或自動光學檢查（Automatic Optical Inspection，AOI)設備抽檢的方式。 自動光學檢查為工業自動化有效的檢測方法，使用機 器視覺做為檢測標準技術，大量應用於LCD/TFT、電晶體與 PCB工業製程上。光學檢查是工業製程中常見的代表性手法 ，利用光學方式取得成品的表面狀態，以影像處理來檢出異 物或圖案異常等瑕疵，因為是非接觸式檢查，所以可在中間 製程檢查半成品。 參閱第1圖，其係顯示習知之異物檢查裝置之檢測平台 結構之示意圖之一。如圖所示，在習知技術之異物檢查裝置 之檢測平台結構10 0中，一面板承置平台1上承置有一標的面 板P，一攝像裝置2垂直配置於標的面板P上方一定攝像高度 Η處進行取像，利用側面光源3發射光線L通過標的面板P之 待檢測面Ρ1，標的面板Ρ上只要有異物F存在，光線L就會從 整個異物F向外反射或散射出，藉由攝像裝置2接收一部分的 反射或散射光線，轉換為電力訊號來檢出異物F。 然而’此種檢測方式，攝像裝置2需要極為接近標的面 板P之待檢測面P1，以提昇檢測精度。但因此攝像裝置2备 六 P 9 不填·直接或間锋碰觸到標的面板P，造成標的面板P的 才貝傷。再者，光源3經長時間的使用後亮度會衰減，而對檢 測結果有所影響。 參閱第2圖，其係顯示習知之異物檢查裝置之檢測平台 、〜構之不意圖之二。如圖所示，異物檢查裝置之檢測平台結 構l〇〇a之光源3由側面傾斜角度發射光線l，攝像裝置2與標 的面板P之待檢測面P1成傾斜角度配置。面板承置平台丄設 有運送機構11，使標的面板p在面板承置平台丨上以一預定的 運达方向Μ移動’以掃描檢測整個標的面板p之待 夬之異物F。 ' 測壯標的面板？在被運送時會產生振動，容易導致檢 八^以’影響檢測精度。掃描檢測整個標的面板ρ十 二耗=，且r配置多個攝像裝置2，成本㈣相對較高。並 ㊂標的面板p愈大時，運送上俞阳雜认、al 檢測時程相對延寻、以:；!愈困難、檢測更加不易且 承置平~上方 ' 避免振動發生。此外，面板 除哭配置有許多其它相關設備，如靜電清 矛' 口口，k成攝像裝置2在配置時 ，除沪的品t 才s有上間擺设的問題。並且 除私的面板P外，這些攝像裝置2、 的承會亦n ±山 光’原J及其它相關設備 扪承重亦冋時由面板承置平台2來負 使面板承置平台^ ^ 子—久，會容易 α , 警面板承置平台1的氽承拌声 ，振動問題亦同時會隨時間而逐漸嚴 广月又 【新型内容】 本創作所欲解決之技術問題 鑑於以上所述’習知之異物檢查裝置之檢測平台結構 t測的精度上有其限制，且其檢測時容易直接或間接碰觸 =板化成才貝傷。動態掃描式的檢測為了掃描整個面板， 2面板沿檢測方向移動，但移動_產生的振動卻會造成 妝亚且’隨標的面板愈大’不僅在運送及檢測上更為困 難，攝像裝置也需配置多個，提高成本_及檢測上的難度 。再：，攝像裝置、光源及其它相關設備的承重皆由面板承 置平台負擔，容易在長期使用後產生傾斜，影響水平精度以 及平台及攝像裝置的穩定度，亦是不容忽視的問題所在。 、、^•此，本創作之目的即是提供一種異物檢查裝置之檢 測平°結構’不需近接檢測面板即能在檢測上具有高精度， 且結構上擁有良好制振能力，以解決習知技術之問題。 本創作解決問題之技術手段 本創作為解決習知技術之問題所採用之技術手段係包 括一設備承置基座、至少—對錢㈣機構、—光發射單元 及一光接收單元。 設備承置基座位在一用以承置標的面板之面板承置平 台之鄰近位置處，設有至少—對相互平行^以—檢測方向延 伸之導引結構，分別位在面板承置平台之對應側。 直線位移機構可滑移地結合於設備承置基座之導引結 構，包括有一滑塊及一感測器承置座。 M375870 光發射單元設置在其中一直線位移機構之感測器承置 座，面朝該標的面板且高於標的面板之待檢測面，用以發射 一預定高度的檢測參束通過標的面板之待檢測面。光接收單 元設置在與光發射單元相對應位置之另一直線位移機構之 感測器承置座，用以接收檢測光束。 在本創作之較佳實施例中，直線位移機構之感測器承 置座更結合有一定位調整座。設備承置基座為一剛性阻尼基 座，其可設有二對相互平行之導引結構，且其中一對導引結 構之檢測方向與另一對導引結構之檢測方向相互垂直。標的 面板可為玻璃板，導引結構則可為滑軌。 此外，光發射單元包括一雷射二極體及至少一聚焦鏡 片，雷射二極體發射雷射光束，經由聚焦鏡片聚焦成平行之 檢測光束通過檢測區。光接收單元包括一光接收元件及至少 一集光鏡片，檢測光束通過集光鏡片後集光於光接收元件。 本創作對照先前技術之功效 經由本創作所採用之技術手段，光發射單元及光接收 單元利用直線位移機構進行同步直線位移而自側面掃描標 的面板，在檢測時與標的面板間可保持一定距離而不相互接 觸，檢測速度比起運送標的面板有大幅的提升。在檢測精度 上，直線位移機構可配合近接開關、光學尺，保持同步直線 位移時的精確定位。並透過定位調整座動態調整光發射單元 及光接收單元之高度，以因應標的面板厚度尺寸之不同，調 整精度可達數μιη之等級，亦可輔助初次裝機時之現場精密 -6 - 定位。 再者’光發射單元及光接收單元因設在設備承置基座 Ί備t置基座4剛性阻尼基座’能有效抑制光發射單元 及光接收單7G在位移時的振動，減少檢測誤差。且整體架構 上採獨立外掛线方式運作，設備承置基座與面板承置平台 間相互獨立，故在設置時無需變更原有面板承置平台及其運 作程序’使面板承置平台不會有在長期承重使用下的問題， 更同時使光發射單元、光接收單元與面板承置平纟間的振動 不會互相傳遞，提升檢測精度。 本創作所採用的具體實施例，將藉由以下之實施例及 附呈圖式作進一步之說明。 【實施方式】 參閱第3圖、第4圖及第5圖，其係顯示本創作較佳 實施例之立體圖、本創作較佳實施例之側視示意圖及本創作 較佳貫施例之上視示意圖。如圖所示，本創作之異物檢查裝 置之檢測平台結構100b包括一設備承置基座4、至少一對 直線位移機構5a、5b、—光發射單S6a、-光接收單元6b 及一控制單元7。 面板承置平台1承置有標的面板p，標的面板p為玻 璃板。設備承置基座4在本實_巾為—難阻尼基座，其 设在一基礎結構C上，並位在面板承置平台丨之鄰近位置 處，與面板承置平台1間相互獨立。 設備承置基座4設有至少一對相互平行且以一檢測方 M375870 向i延伸之導引結構41a、41b，分別位在面板承置平台^ 之對應側’導引結構41a、41b在本實施例中為滑執。另外， 設備承置基座4.在本實施财更包财至少—定位調整板 42,結合在料結構仏、411?側緣，用於加強固定整個設 備承置基座4，並同時定位出一對導引結構―、仙間的 距離W ’以配合不同大小的標的面板p作距離的調整。直 線位移機構5a、5b可滑移地結合於設備承置基座4之導引V. New description: [New technical field] This creation is about the design of a panel inspection platform, especially the detection platform structure of a foreign object inspection device. [Prior Art] Nowadays, the display panel is developing toward a large-area process. The larger the size, the more expensive the product is. The more it is not allowed to be scrapped in the process, the manual inspection or automatic optical inspection (Automatic Optical Inspection, AOI) has been used in the process inspection. The way the equipment is sampled. Automated optical inspection is an effective method for industrial automation. It uses machine vision as a standard for inspection and is widely used in LCD/TFT, transistor and PCB industrial processes. Optical inspection is a common method commonly used in industrial processes. It uses optical methods to obtain the surface state of finished products, and image processing to detect foreign matter or pattern anomalies. Because it is a non-contact inspection, semi-finished products can be inspected in an intermediate process. Referring to Fig. 1, there is shown a schematic diagram showing the structure of a detection platform of a conventional foreign matter inspection device. As shown in the figure, in the detection platform structure 100 of the foreign matter inspection device of the prior art, a panel mounting platform 1 is provided with a target panel P, and a camera device 2 is vertically disposed at a certain imaging height above the target panel P. The image is taken, and the light source L is emitted by the side light source 3 through the surface to be detected Ρ1 of the target panel P. As long as the foreign matter F exists on the target panel, the light L will be reflected or scattered outward from the whole foreign object F, by imaging. The device 2 receives a portion of the reflected or scattered light and converts it into a power signal to detect the foreign matter F. However, in the detection mode, the image pickup apparatus 2 needs to be in close proximity to the surface P1 to be inspected of the target panel P to improve the detection accuracy. However, the camera device 2 is equipped with six P 9 and does not fill the direct or the front touches the target panel P, causing the target panel P to be damaged. Furthermore, the brightness of the light source 3 is attenuated after a long period of use, which has an effect on the detection result. Referring to Fig. 2, it shows the detection platform of the conventional foreign matter inspection device, and the second intention. As shown in the figure, the light source 3 of the detecting platform structure 10a of the foreign matter detecting device emits light 1 from the side inclined angle, and the image pickup device 2 is disposed at an oblique angle to the surface P1 to be detected of the target panel P. The panel receiving platform is provided with a transport mechanism 11 for moving the target panel p on the panel receiving platform 以 in a predetermined direction of travel to scan for the foreign matter F to be detected of the entire target panel p. 'Measure the panel of the strong standard? When it is transported, vibration is generated, which easily causes the detection to affect the detection accuracy. Scanning detects the entire target panel ρ XX =, and r configures a plurality of camera devices 2, and the cost (four) is relatively high. And the larger the panel p of the three standard is, the more it is carried on the Yuyang miscellaneous, the relative detection time of the al detection, the more difficult, the more difficult the detection and the flatness of the upper part to avoid vibration. In addition, the panel is equipped with many other related equipment, such as the electrostatic clearing spear' mouth, and the k-incorporated camera device 2 has the problem of the top display except for the Shanghai product t. And in addition to the private panel P, these cameras 2, the acceptance of the camera also n ± Shanguang 'original J and other related equipment 扪 when the load is also 由 when the panel is placed on the platform 2 to make the panel to mount the platform ^ ^ - For a long time, it will be easy to α, the police panel will be used to support the sound of the platform 1 and the vibration problem will also gradually become more and more gradual with time. [New content] The technical problem to be solved by the creative in view of the above-mentioned 'foreign foreign object inspection The detection platform structure of the device has a limitation on the accuracy of the measurement, and it is easy to directly or indirectly touch the plate when it is detected. Dynamic scanning detection In order to scan the entire panel, the 2 panels move in the direction of detection, but the vibration generated by the movement _ will cause the makeup and the larger the panel with the label is not only more difficult to transport and detect, but also the camera Configure multiple, increase cost _ and difficulty in detection. Furthermore, the load-bearing capacity of the camera, light source and other related equipment is borne by the panel-mounted platform, which is easy to tilt after long-term use, affecting the horizontal accuracy and the stability of the platform and camera. It is also a problem that cannot be ignored. The purpose of this creation is to provide a detection flat structure of a foreign object inspection device. It can have high precision in detection without the need of a proximity detection panel, and has a good vibration-building capability in the structure to solve the conventional knowledge. Technical issues. The technical means for solving the problem of the present invention The technical means for solving the problems of the prior art include a device receiving base, at least a money (four) mechanism, a light emitting unit and a light receiving unit. The device receiving base is located at a position adjacent to the panel receiving platform for receiving the standard panel, and is provided with at least a guiding structure extending parallel to each other in the detecting direction, respectively corresponding to the panel receiving platform side. The linear displacement mechanism is slidably coupled to the guiding structure of the apparatus receiving base, and includes a slider and a sensor mounting base. The M375870 light emitting unit is disposed in a sensor mounting seat of the linear displacement mechanism, facing the target panel and higher than the surface to be inspected of the target panel, for transmitting a predetermined height of the detection component through the target panel to be detected . The light receiving unit is disposed at a sensor holder of another linear displacement mechanism at a position corresponding to the light emitting unit for receiving the detection beam. In a preferred embodiment of the present invention, the sensor housing of the linear displacement mechanism is further coupled to a positioning adjustment seat. The device receiving base is a rigid damping base which can be provided with two pairs of mutually parallel guiding structures, wherein the detecting direction of the pair of guiding structures is perpendicular to the detecting direction of the other pair of guiding structures. The target panel can be a glass panel and the guiding structure can be a rail. In addition, the light emitting unit includes a laser diode and at least one focusing lens, and the laser diode emits a laser beam, and the detecting beam is focused through the detecting region through the focusing lens. The light receiving unit includes a light receiving element and at least one light collecting lens, and the detecting light beam is collected by the light collecting lens and collected by the light receiving element. According to the technical means adopted by the present invention, the light emitting unit and the light receiving unit use a linear displacement mechanism to perform synchronous linear displacement and scan the target panel from the side, and maintain a certain distance from the target panel during the detection. Without touching each other, the detection speed is greatly improved compared to the panel that carries the target. In terms of detection accuracy, the linear displacement mechanism can be used with the proximity switch and the optical scale to maintain accurate positioning during synchronous linear displacement. The height of the light-emitting unit and the light-receiving unit is dynamically adjusted through the positioning adjustment seat, and the adjustment precision can be up to several μm according to the thickness of the standard panel, and can also assist the on-site precision -6-positioning during the initial installation. Furthermore, the 'light-emitting unit and the light-receiving unit are provided in the equipment receiving base, and the base 4 is rigidly damped to the base 4', which can effectively suppress the vibration of the light-emitting unit and the light-receiving unit 7G during displacement, and reduce the detection error. . The whole structure adopts the independent external line mode operation, and the equipment receiving base and the panel mounting platform are independent of each other, so there is no need to change the original panel mounting platform and its operation program when setting up, so that the panel mounting platform will not have In the long-term load-bearing problem, the vibration between the light-emitting unit, the light-receiving unit and the panel receiving flat is not transmitted to each other, and the detection accuracy is improved. The specific embodiments used in the present application will be further illustrated by the following examples and accompanying drawings. [Embodiment] Referring to Figures 3, 4, and 5, there are shown a perspective view of a preferred embodiment of the present invention, a side view of the preferred embodiment of the present invention, and a top view of the preferred embodiment of the present invention. schematic diagram. As shown in the figure, the detection platform structure 100b of the foreign object inspection device of the present invention comprises a device receiving base 4, at least one pair of linear displacement mechanisms 5a, 5b, a light emitting single S6a, a light receiving unit 6b and a control unit. 7. The panel receiving platform 1 houses a standard panel p, and the label panel p is a glass panel. The equipment receiving base 4 is a hard-to-damper base, which is disposed on a basic structure C and is located adjacent to the panel receiving platform ,, and is independent of the panel receiving platform 1. The device receiving base 4 is provided with at least one pair of guiding structures 41a, 41b which are parallel to each other and extend to a detecting side M375870 to i, respectively located on the corresponding side of the panel receiving platform ^' guiding structures 41a, 41b In the embodiment, it is slippery. In addition, the device is mounted on the base 4. In the present embodiment, at least the positioning adjustment plate 42 is combined with the side edges of the material structure 仏, 411, for reinforcing and fixing the entire equipment receiving base 4, and simultaneously positioning The distance between the pair of guiding structures, and the distance W' between the fairy, is adjusted to match the size of the panel p of different sizes. The linear displacement mechanisms 5a, 5b are slidably coupled to the guiding of the device receiving base 4
結構41a、41b’在對應的直線位移機構5a、5b間定義為-檢測區A。 配合參閱第6圖’各直線位移機構5a、5b包括有-滑 塊51a、5lb及一感測器承置座52&、饥，滑塊仏、训 可受驅動而沿㈣方向！進行位移。在本實施财，直線位 ^機構5a更結合有—定位調整座仏，包括有至少一個調 即各方向的調整桿531a和至少—可受調節而微動位移的微 調座體532a(第7圖），透過操作各個調整桿5仏來調節微 調座體532a在各方向的位置’以因應標的面板p之待檢測 面P1也就疋可配合標的面板P的厚度，調整感測器承置 座52a之南度。 在實際應用時’上述之設備承置基座4、導引結構仏、 41b及直線位移機構5a、5b是採獨立的可分離式設計。配 合不同設備檢測時，各組成構件可因應原設備既有面板承置 平台的規格及設置環境條件，以外掛方式設置，無需變更既 有機台設備之設計或更健㈣“，在產㈣壯具極佳之 適用性及可實施性。 光發射單元6a設置在其中一直線位移機構5a之感測 器承置座52a，光發射單元6a面朝標的面板P且高於標的 面板P之待檢測面P1 —預定之光束檢測高度D，用以發射 一檢測光束B平行通過標的面板P之待檢測面P1上之檢測 區A。 光接收單元6b設置在與光發射單元6a相對應位置之 另一直線位移機構5b之感測器承置座52b，用以將光發射 單元6a所發射之檢測光束B通過檢測區A後由光接收單元 6b予以接收，產生一序列之檢測信號S。 控制單元7連接光發射單元6a、光接收單元6b及直線 位移機構5a、5b，控制單元7經由一驅動裝置71驅動直線 位移機構5a、5b帶動光發射單元6a及光接收單元6b以檢 測方向I進行同步位移，並接收光接收單元6b所產生之檢 測信號S，據以判斷出標的面板P之待檢測面P1上的異物 F。在實際應用時，可於直線位移機構5a、5b配合近接開關 與光學尺在檢測方向I作精確定位，補償光發射單元6a及 光接收單元6b間的對位誤差以降低檢測時的誤判。 參閱第8圖，其係顯示光發射單元和光接收單元之示 意圖。如圖所示，光發射單元6a包括一雷射二極體61a及 至少一聚焦鏡片62a、63a。雷射二極體61a發射雷射光束 B0，經由聚焦鏡片62a、63a聚焦成平行之檢測光束B通過 檢測區A。 光接收單元6b包括一光接收元件61b及至少一集光鏡 片62b，檢測光束B通過集光鏡片62b後集光於光接收元件 M375870 61b。由於檢測光束B經過異物F時會產生陰影z，陰影z 大小的改k會影響檢測光束B被光接收元件6丨b接收時之 光量，亦即接收的米亮度，光接收元件61b基於接收之檢測 光束B之光量改變產生檢測信號S輸出。 參閱第9圖，其係顯示本創作另一實施例之上視示意 圖。如圖所示，設備承置基座4設有二對相互平行之導引結 構4la、41b、41c、41d ’且其中一對導引結構41a、41b之 檢測方向Π與另一對導引結構41c、41d之檢測方向12相 互垂直。導引結構41a、41b、41c、41d分別結合有直線位 移機構5a、5b、5c、5d ’及成對的光發射單元以和光接收 單，6b與成對的光發射單元6c和光接收單元&，由光發 射單元6a、6c分別發射之檢測光束B丨、B2通過檢測區a , 以檢測異物F。 蒼閱第10圖，其係顯示以二檢測光束檢測異物之示意 圖。在實際應用時’利用二檢測光束B1、B2同時進行異物 F檢測’其效果可進—步判斷異物F的方位及形狀。在實施 上可在判斷出檢測到異物F時，利用直線位移機構^、 5b 5c ' 5d的位置反推得出異物F在標的面板p上兩個方 :的：置’而疋位出其方位。再者，利用遮光陰影造成的光 又P可求得異物F在兩個方向的面積，加上利用檢測光 束m、B2檢測發現有異物F時的起始與結束位置即可求得 異物F在兩個方向的寬度W1，2，進而從面積及寬度们、 W2推☆出㈣F各尺寸參數以至於整體形狀。 由以上之實施例可知，本創作所提供之異物檢查裝置 之檢測平台結構確具產業上之利用價值，故本創作業已符合 :專引之要件。惟以上之敘述僅為本創作之較佳實施例說 明’凡精於此項技聲者當可依據上述之說明而作其它種種之 改良’惟這些改變仍屬於本創作之創作精神及以下所界定之 專利範圍中。 【圖式簡單說明】 第1圖係顯示習知之異物檢查裝置之檢測平台結構之示意 圖之一； 第2圖係顯示習知之異物檢查裝置之檢測平台結構之示意 圖之二； 第3圖係顯示本創作較佳實施例之立體圖； 第4圖係顯示本創作較佳實施例之側視示意圖； 第5圖係顯示本創作較佳實施例之上視示意圖，· 第6圖係顯示直線位移機構結合導引結構之立體圖； 第7圖係顯示定位調整座之立體圖； 第8圖係顯示光發射單元和光接收單元之示意圖； 第9圖係顯示本創作另一實施例之上視示意圖； 第10圖係顯示以二檢測光束檢測異物之示意圖。 【主要元件符號說明】 100 ' 100a > 100b 1 異物檢查裝置之檢測平台結構 面板承置平台 運送機構 11 M375870The structures 41a, 41b' are defined as - detection area A between the corresponding linear displacement mechanisms 5a, 5b. Referring to Fig. 6, each of the linear displacement mechanisms 5a, 5b includes a slider 51a, 5lb and a sensor holder 52&, hunger, slider 仏, and training can be driven along the (four) direction! Perform displacement. In the implementation, the linear position mechanism 5a is further combined with a positioning adjustment seat, including at least one adjustment, that is, an adjustment rod 531a in each direction, and at least a fine adjustment seat 532a that can be adjusted and slightly displaced (Fig. 7). Adjusting the position of the fine adjustment seat 532a in each direction by operating each of the adjustment levers 5' to adjust the thickness of the target panel P in response to the thickness of the panel P to be inspected, and adjust the sensor housing 52a. South degree. In practical applications, the above-mentioned equipment receiving base 4, guiding structure 仏, 41b and linear displacement mechanisms 5a, 5b are independently separable designs. When testing with different equipments, each component can be set according to the specifications and setting environmental conditions of the original panel-mounted platform, and the external components are not required to change the design or health of the organic equipment. (4) "In production (4) Excellent applicability and implementability. The light emitting unit 6a is disposed in the sensor receiving seat 52a of the linear displacement mechanism 5a, and the light emitting unit 6a faces the target panel P and is higher than the to-be-detected surface P1 of the target panel P. a predetermined beam detecting height D for emitting a detecting beam B parallel to the detecting area A on the surface to be detected P1 of the target panel P. The light receiving unit 6b is disposed at another position corresponding to the light emitting unit 6a The sensor holder 52b of the 5b is configured to receive the detection beam B emitted by the light emitting unit 6a through the detection area A and then receive the detection signal S by a light receiving unit 6b. The control unit 7 is connected to the light emission. The unit 6a, the light receiving unit 6b and the linear displacement mechanisms 5a, 5b, the control unit 7 drives the linear displacement mechanisms 5a, 5b via a driving device 71 to drive the light emitting unit 6a and the light receiving unit 6b performs synchronous displacement in the detection direction I, and receives the detection signal S generated by the light receiving unit 6b, thereby determining the foreign matter F on the surface P1 to be detected of the target panel P. In practical applications, the linear displacement mechanism 5a can be used. 5b cooperates with the proximity switch and the optical scale to accurately position in the detecting direction I, and compensates for the misalignment between the light emitting unit 6a and the light receiving unit 6b to reduce false positives during detection. Referring to Fig. 8, it shows the light emitting unit and the light. A schematic diagram of the receiving unit. As shown, the light emitting unit 6a includes a laser diode 61a and at least one focusing lens 62a, 63a. The laser diode 61a emits a laser beam B0, which is focused via focusing lenses 62a, 63a. The parallel detection beam B passes through the detection area A. The light receiving unit 6b includes a light receiving element 61b and at least one collecting lens 62b, and the detecting beam B is collected by the collecting lens 62b and collected on the light receiving element M375870 61b. B will generate a shadow z when passing through the foreign matter F, and the change k of the size of the shadow z affects the amount of light when the detection beam B is received by the light receiving element 6丨b, that is, the received brightness of the meter, the light receiving element 61b The change in the amount of light of the received detection beam B produces a detection signal S. Referring to Figure 9, a top view of another embodiment of the present invention is shown. As shown, the device receiving base 4 is provided with two pairs of mutual The parallel guiding structures 4la, 41b, 41c, 41d' and the detecting direction Π of the pair of guiding structures 41a, 41b are perpendicular to the detecting direction 12 of the other pair of guiding structures 41c, 41d. The guiding structures 41a, 41b 41c, 41d are combined with the linear displacement mechanisms 5a, 5b, 5c, 5d' and the pair of light emitting units to and the light receiving unit, 6b and the pair of light emitting units 6c and the light receiving unit & by the light emitting unit 6a The detection beams B丨 and B2 respectively emitted by 6c pass through the detection area a to detect the foreign matter F. Referring to Figure 10, it is a schematic diagram showing the detection of foreign matter by two detection beams. In the actual application, the effect of the foreign matter F detection is simultaneously performed by the two detecting beams B1 and B2, and the effect of the foreign matter F can be determined in advance. In the implementation, when it is determined that the foreign matter F is detected, the position of the linear displacement mechanism ^, 5b 5c ' 5d is reversely derived to obtain the foreign matter F on the two sides of the target panel p: . Furthermore, the light caused by the shading shadow can be used to obtain the area of the foreign matter F in both directions, and the foreign matter F can be obtained by detecting the start and end positions when the foreign matter F is detected by the detection beams m and B2. The widths W1, 2 in both directions, and then from the area and width, W2 push ☆ out (four) F each size parameter to the overall shape. It can be seen from the above embodiments that the detection platform structure of the foreign matter inspection device provided by the present invention has industrial utilization value, so the original operation has been met: the specific requirements. However, the above description is only for the preferred embodiment of the present invention. 'Anyone who is skilled in this skill can make other improvements according to the above description', but these changes still belong to the creative spirit of this creation and are defined below. In the scope of patents. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic diagram showing the structure of a detection platform of a conventional foreign matter inspection device; FIG. 2 is a second schematic view showing the structure of a detection platform of a conventional foreign matter inspection device; 3 is a side view showing a preferred embodiment of the present invention; FIG. 5 is a top view showing a preferred embodiment of the present invention, and FIG. 6 is a view showing a linear displacement mechanism. 3 is a perspective view showing a positioning adjustment seat; FIG. 8 is a schematic view showing a light emitting unit and a light receiving unit; FIG. 9 is a top view showing another embodiment of the present creation; A schematic diagram showing the detection of foreign matter by two detection beams is shown. [Main component symbol description] 100 ' 100a > 100b 1 Detection platform structure of foreign object inspection device Panel mounting platform Transport mechanism 11 M375870
2 攝像裝置 3 光源 4 ' 設備承置基座 41a、41b、41c、41d 導引結構 42 定位調整板 5a、5b、5c、5d 直線位移機構 51a > 51b 滑塊 52a ' 52b 感測器承置座 53a 定位調整座 531a 調整調整桿 532a 微調座體 6a 光發射單元 6b 光接收單元 6c 光發射單元 6d 光接收單元 61a 雷射二極體 61b 光接收元件 62a ' 63a 聚焦鏡片 62b 集光鏡片 7 控制單元 71 驅動裝置 A 檢測區 B、B1、B2 檢測光束 BO 雷射光束 -12 - M375870 c 基礎結構 D 光束檢測尚度 F > 異物 H 攝像高度 I 、 11 、 12 檢測方向 L 光線 M 運送方向 P 標的面板 PI 待檢測面 S 檢測信號 W1 ' W2 寬度 z 陰影2 Camera unit 3 Light source 4' Equipment receiving base 41a, 41b, 41c, 41d Guide structure 42 Positioning adjustment plate 5a, 5b, 5c, 5d Linear displacement mechanism 51a > 51b Slider 52a ' 52b Sensor mounting Seat 53a Positioning adjustment seat 531a Adjustment adjustment lever 532a Fine adjustment seat 6a Light emitting unit 6b Light receiving unit 6c Light emitting unit 6d Light receiving unit 61a Laser diode 61b Light receiving element 62a '63a Focusing lens 62b Light collecting lens 7 Control Unit 71 Drive unit A Detection area B, B1, B2 Detection beam BO Laser beam -12 - M375870 c Infrastructure D Beam detection stillness F > Foreign object H Imaging height I, 11 , 12 Detection direction L Ray M Transport direction P Target panel PI to be detected surface S detection signal W1 ' W2 width z shadow
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