TWM364561U - Thermal deformation compensating device for processing device - Google Patents

Thermal deformation compensating device for processing device Download PDF

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Publication number
TWM364561U
TWM364561U TW97215782U TW97215782U TWM364561U TW M364561 U TWM364561 U TW M364561U TW 97215782 U TW97215782 U TW 97215782U TW 97215782 U TW97215782 U TW 97215782U TW M364561 U TWM364561 U TW M364561U
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Taiwan
Prior art keywords
temperature
thermal displacement
compensation
machine
compensation device
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TW97215782U
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Chinese (zh)
Inventor
De-Yang Wu
jian-wen Shen
Jian-Hua Shen
Chun-Wei Su
Ting-Quan Tang
wen-fang Chen
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Prec Machinery Res & Dev Ct
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Priority to TW97215782U priority Critical patent/TWM364561U/en
Publication of TWM364561U publication Critical patent/TWM364561U/en

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Description

M364561 五、新型說明: 【新型所屬之技術領域】 本創作係關於一種熱變位補償裝置,特別是配置於一切削 加工中心機,例如立式c型切削加工中心機、立式龍門切削 加工中心機、車床切削加工中心機、臥式切削加工中心機、臥 式搪床切削加工中心機、鑽孔加工機,或各式專利切削加工中 心機,的熱變位補償裝置。 【先前技術】 Ν氏⑺丹碉恍迷性與精密性㈡〜月匕乃丨又 加工成本降低且提升加工品質。然而在高速運轉下,互相接觸 的組件或機構會產生高熱而造成熱變形或位移,特別是主轴或 進給系統的熱變位更是明顯,如此會使得加工精度降低。 傳統熱變位的補償方式是針對容易產生高溫的組件或位 置加設冷卻裝置。然而對加工中心機的主軸而言,因為加工過 程其為高賴動’因此冷聽置不適合加裝於主轴上。 另一熱變位補償修方式是在加卫機的控制器内撰入一修 ntr彻溫度翻11取得加1娜練制熱變位溫 二:度傳送到控制器,該修正程式便會自動計算出 置:加::了後再進一步控制加工機於加工時修正加工位 置及加I,藉此提高加工精度。 荦揭^^tn29GG82提供—種鋪儀統。該專利前 _一4卡取得-溫度感測器所偵測到的溫度信 M364561 號’並且吨度卡執行顯、其他__作叫得-正確的㈤ ,料。^外以控制器的程式語言(巨集程式單元及可程‘ °控制單⑹撰寫一程式搭配該正確溫度資料,即可以計算出 適當的修正量’然後再進行組精度的修正。換言之,溫度卡 的作用在於接收加工機的溫度信號及產生正確的溫度資料,而 =制如部所建立的熱補償程式則進行補償量的計算及下達M364561 V. New description: [New technical field] This creation is about a thermal displacement compensation device, especially in a cutting center machine, such as vertical c-type cutting center machine, vertical gantry machining center Thermal displacement compensation device for machine, lathe cutting center machine, horizontal cutting center machine, horizontal boring machine cutting center machine, drilling machine, or various patent cutting center machines. [Prior Art] Ν (7) Tanjong's fascination and precision (2) ~ 匕 匕 丨 丨 丨 丨 丨 丨 丨 丨 丨 丨 加工 加工 加工 加工 加工 加工 加工 加工 加工 加工However, at high speeds, components or mechanisms that come into contact with each other generate high heat and cause thermal deformation or displacement, especially the thermal displacement of the spindle or feed system, which results in reduced machining accuracy. The traditional thermal displacement compensation method is to add a cooling device to components or locations that are prone to high temperatures. However, for the spindle of the machining center machine, because of the high processing speed of the machining process, the cold listening is not suitable for the spindle. Another thermal displacement compensation repair method is to compile a repair in the controller of the elevator. The temperature is changed by 11 and the temperature is adjusted to the controller. The correction program will automatically Calculate the setting: After adding:: further control the processing machine to correct the machining position and add I during machining, thereby improving the machining accuracy.荦揭^^tn29GG82 provides - planting system. The patent before the _ 4 card acquisition - the temperature sensor detected by the temperature sensor M364561 'and the ton card implementation, the other _ _ get the right (five), material. ^ In addition to the controller's programming language (the macro program unit and the program ' ° control sheet (6) to write a program with the correct temperature data, you can calculate the appropriate correction amount ' and then correct the group accuracy. In other words, the temperature The function of the card is to receive the temperature signal of the processing machine and generate the correct temperature data, and the thermal compensation program established by the department is used to calculate and release the compensation amount.

、然而’目為雜補償喊並非加卫機之控制器内部 =既定程式’喊需要使用者制地撰寫,因此操作上非常不 【新型内容】 社要目的係在提供—種切 位補償裝置,复1^ _,日、〜、有此夠接絲自一加工中心機之熱變位溫名 L二敎位溫度訊號搭配—溫度補償模型以自動計, 、賞量該熱變位補償量傳送給加工中心機之控I 器以修正加工蕃 本創作、據此達到使關便及高加工精密的效果。 位補健置目⑽在提供—種切跡卫中^機之_ 用時無需再自建之溫度娜卿錢算减,所則 補伽型ΐ,可倾為_;此外每一取 更為精確。 特定機型加工機,所以可使得熱補償效3 本發明的 位補償裝置, 又目的係在提供一種切削加工中心機之熱變 其具有一輸入/輸出通訊模組能夠與各型式的控 M364561 制器連線,藉達到使用方便的功效。 另外’本創作能夠與-外部電腦或一資料庫連結並下載經 處理過之溫度鶴_,藉此使_較的使収符合實際需 求。 ’、 本創作所揭露的切削加工中心機之熱變位補償裝置包 含.-溫度細n,-溫度補倾組電性地_該溫度感測 器,一輸入/輸出通訊模組電性地耦接該溫度補償模組丨以及 一控制器電性_接該輸入/輸出通訊模、组;如此將溫度感測 器配置於_加卫巾心機的機台肋取得—熱變位溫度,而該 溫度補償歡以該錢位溫度魏—溫賴償财計算得到 一熱變位補償量;該輸入/輸出通訊模組電性耦接控制器,且 將熱變位補償量傳送給控制II以修正切削加卫中心機的進給 量。 是以根據本創作的目的、功效及結構,_出較佳實施例 並配合圖式詳細說明如下。 【實施方式】 請參閱第1圖’本創作揭露一種熱變位補償襄置,其包含 一溫度補償权組1〇配置於一切削加工中心機2〇的機台;一溫 度感測器12及-控制器14分別電性耦接該溫度補償模組1〇。 值得注意的是…輸人/輸φ軌触3G介_溫度補償模組 10與控制器14之間。 更進一步,該溫度感測器12係配置在切削加工中心機2〇 M364561 的主軸、伺服進給軸,或是其他類似會具有高熱的部件表面。 该溫度感測器12可以是熱電偶熱、電阻式、熱敏電阻式或其 他形式的温測感測元件。 . 請參閱第2A圖,該溫度補償模組10係一處理器42電性 耦接一溫度訊號處理單元44、一記憶體單元46。其中處理器 42具有接收訊號以及運算功能;溫度訊號處理單元34係電性 輕接溫度感測器12,用以接收溫度感測器12所輸出的訊號並 Φ 進仃類比/數位轉換,此外還可以放大訊號及過滤雜訊。記憶 體單元46作為資料的存取裝置,特別是一溫度補償模型47可 被存取地配置摘記麵較46 Μ。域麵翻47係為溫 度與熱變位補償量所構成的一個係數或是一個數對。 進一步而言,溫度補償模組1〇還可以包含一顯示元件48 及操作單元49分電性轉接處理器42,其中顯示元件48用 以顯示溫度訊號及/或熱變位補償量,以及其他關於切削加工 •巾心機(未顯示)的資訊;藉由操作該操作單元49可以切換該 顯示元件48的顯示内容。 此外,溢度補伽組1〇還可以包含一資訊傳鮮元S2, 其可以是各摘連齡面,例如RS232介面、咖介面平 行埠介面,或其他同樣具有能夠傳輸數位資料之介面。該資訊 傳輸單元52係電性粞接—外部資料庫6〇。該外部資料庫 建置複數溫賴倾㈣’且各溫賴償_ 62能藉由資訊 傳輸單元52而《於該記鐘單元46内。上述㈣料庫6〇 M364561 可以被建置在一伺服器内。 該輸入/輸出通訊模組30可以具有一個或多個不同形式的 接口,這些接口能夠與目前市面常見之控器制14資料線相接。 值知注意的是,因為不同的控制器14未見得會自動與本 創作所揭露的溫度補伽組1G形歧線錢行敍,因此該 輸入/輸出通訊模組30與控制器14連接後,操作者可以進一 步地透過控制器14來輸入一些操作指令,進而使得控制器 • 與輸入/輸出通訊模組3〇及溫度補償模組10形成連線及可傳 輸訊號。 上揭實施例的輸入/輸出通訊模組30係獨立於溫度補償模 組10之外;然而’另一實施例請參閱第2B圖,輸入/輸出通 訊模組30可以被建置在溫度補償模組1〇内電性耦接處理器 42 ° 請參閱第3圖,關於本創作使用主要是以溫度感測器12 監測切削加工中心機的熱變位溫度然後傳送給溫度補償模組 10 ;經溫度補償模組1〇分析、運算後產生一熱變位補償量後, 經輸入/輸出通訊模組3〇傳送到控制器14,然後再由控制器 14下藉指令補償切削加工中心機2〇的加工量。 請參閱第4圖,進一步說明本創作的使用方式,溫度感測 器12在取得切削加工中心機的熱變位溫度之後,將熱變位溫 度傳送給溫度訊號處理單元44,此時的溫度訊號處理單元44 可以進行類比/數位轉換(A/D轉換),使熱變位溫度訊號形成數 M364561 位化訊號。然後再配合放大器(未顯示)將訊號放大,以及搭配 過濾器(未顯示)濾除雜訊。 處理器42擷取上述的數位化熱變位溫度訊號以及記憶體 46内所建置的溫度補償模型47,然後進行計算並產生一熱變 位補償量。熱變位補償量經由輸入/輸出通訊模組3〇輸出到控 制器Η ’並且利用該熱變位補償量來補償切削加工中心機的 主軸或伺服進給⑽進給量(_量),以修正因熱變位而產生 之偏移量。 另外,顯示元件48上可以顯示出溫度感測器12對切削加 工中心機賴J#到的紐位溫度,錢因紐位溫度所產生的 熱變位量。 疋^藉由本創作的實施可以有效的監控切削加工中心機 的脈度變化及缝位量的變化情形;此外本創作糊熱變位溫 度搭配適當的溫細魏型47來進行分析計算,並藉此獲得 ^變位補&昼’而該熱變位補償量可經由一個能夠與各式控 制器14連線之輸人/輸出通訊模組3G傳送到該控制器14,使 仔控制器U錢得鋪補償量後進—步修正加工進給 量,因此本創作具有操作簡便及提高加工精確度的效果。 >閱苐5圖本創作另一實施例係溫度偵測元件I]可 以取得錢位4 ’以及搭配適合献大_(未顯示)將熱變位 溫度的滅先予峨大;已放大_變位訊麟送給溫度訊號 處理單元4切進行類崎位域賴’使得_魏號成為 M364561 可以供作數位分析及計算之數位化訊號。至於處理器42、輸 入/輸出通訊模組3〇、顯示元件48、記憶體單元46及控制器 14的作用皆與前述相同不再贅述。 本創作的使用情形更包含在切削加工中心機的待測量位 置的三維方向上皆配置一溫度感測器12及分別對分個溫度感 測器12搭配一熱變位補償值,即可補正方向的熱變位偏移 量’如此主軸可以更精確地移動到加工位置並且進行準確的加 工動作。 由於補度補償裝置10對每一型的切削加工中心機皆提供 至少一組溫度補償模型47及一運算程式,所以使用者無需自 行撰寫溫度補償程式,就使用上而言,本創作具有更簡便的功 效。另外,因為運算程式配合溫度補償模型47可以針對不同 溫度計算出補償值,所以補償效果精準,相對能夠使加工精密 更為提高。 此外本創作藉資訊傳輸單元51而_輸出感測及補償資 料,以及輸入溫度補償模型。在必要或特定的條件下,還可以 經由資訊傳輸單元W將處·42所計算及產生的補償值量測 溫度值及輯訊息’傳酬耕㈣腦⑽闹加峨察或記 錄以利日後追縱/分析之用。 上述實施例僅為_性·本_之技術及其功效,而非 用於限制本創作。任何熟於此項技術人士均可在科背本創作 之技術顧及麟的軌下,對上述實施舰雜改及變化, M364561 因此本創作之權利保護範圍應如後所述之申請專利範圍所列。 【圖式簡單說明】 第1圖係本創作與一切削加工中心機的配置示意圖。 第2A圖係本創作的構成組件及耦接關係示意圖一。 第2B圖係本創作的構成組件及耦接關係示意圖二。 第3圖係本創作的測量與訊號傳輸的方塊圖。 第4圖係本創作進行溫度補償之控制方塊圖一。 瞻第5圖係本創作進行溫度補償之控制方塊圖二。 【主要元件符號說明】 10溫度補償模組 14控制器 30控制器 44溫度訊號處理單元 47溫度補償模型 49操作元件 60資料庫 12溫度感測器 20切削加工中心機 42處理器 46記憶體單元 48顯示元件 51資訊傳輸單元 62溫度補償模型However, the purpose of the miscellaneous compensation is not the controller inside the controller. The established program 'speaks need to be written by the user. Therefore, the operation is very not. [New content] The purpose of the society is to provide a kind of position compensation device. Complex 1^ _, day, ~, there is enough to connect the wire from a machining center machine thermal displacement temperature name L two position temperature signal matching - temperature compensation model to automatically calculate, reward the heat displacement compensation amount transmission The control unit of the machining center machine is used to correct the processing of the original creation, thereby achieving the effect of making the cutting and high processing precision. The position of the supplement (10) is provided in the _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ accurate. The specific machine type processing machine can make the thermal compensation effect 3. The position compensating device of the present invention is also intended to provide a cutting machine center heat change, which has an input/output communication module capable of being controlled with various types of M364561 Connected to the cable, to achieve the convenience of use. In addition, this creation can be linked to an external computer or a database and downloaded the processed temperature crane _, thereby making the _ comparison of the actual demand. 'The thermal displacement compensation device of the cutting machine center disclosed in this creation includes: - temperature fine n, - temperature compensation tilt group electrical ground _ the temperature sensor, an input / output communication module is electrically coupled Connecting the temperature compensation module and a controller to the input/output communication module and the group; thus, the temperature sensor is disposed on the machine rib of the edging machine to obtain the thermal displacement temperature, and the The temperature compensation Huan calculates the thermal displacement compensation amount by using the money temperature Wei-Wen Lai compensation; the input/output communication module is electrically coupled to the controller, and transmits the thermal displacement compensation amount to the control II to correct Cutting the feed of the center machine. It is based on the purpose, function and structure of the present invention, and the preferred embodiment is described in detail below with reference to the drawings. [Embodiment] Please refer to FIG. 1 'The present invention discloses a thermal displacement compensation device, which comprises a temperature compensation right group 1〇 arranged on a cutting machine 2 〇 machine; a temperature sensor 12 and The controller 14 is electrically coupled to the temperature compensation module 1 分别. It is worth noting that the input/output φ rail touches the 3G _ temperature compensation module 10 and the controller 14. Further, the temperature sensor 12 is disposed on the main shaft of the cutting machine 2 〇 M364561, the servo feed shaft, or the like, which may have a high heat surface. The temperature sensor 12 can be a thermocouple thermal, resistive, thermistor or other form of temperature sensing element. Referring to FIG. 2A, the temperature compensation module 10 is electrically coupled to a temperature signal processing unit 44 and a memory unit 46. The processor 42 has a receiving signal and an arithmetic function; the temperature signal processing unit 34 is electrically connected to the temperature sensor 12 for receiving the signal output by the temperature sensor 12 and Φ analog/digital conversion, in addition to You can zoom in on the signal and filter the noise. The memory unit 46 serves as an access device for the data, and in particular, a temperature compensation model 47 can be accessed to configure the extracted surface to be 46 Μ. The domain surface flip 47 is a coefficient or a pair of temperature and thermal displacement compensation. Further, the temperature compensation module 1A may further include a display component 48 and an operation unit 49, and the display component 48 is configured to display the temperature signal and/or the thermal displacement compensation amount, and the like. Information on the cutting process (not shown); the display content of the display element 48 can be switched by operating the operating unit 49. In addition, the overflow compensation group 1 can also include an information transmission element S2, which can be an alternate age range, such as an RS232 interface, a coffee interface parallel interface, or other interface capable of transmitting digital data. The information transmission unit 52 is electrically coupled to an external database. The external database is constructed with a plurality of temperature thresholds (four) and each of the temperature compensation units 62 can be "in the clock unit 46" by the information transmission unit 52. The above (4) material library 6〇 M364561 can be built in a server. The input/output communication module 30 can have one or more different types of interfaces, which can be connected to the 14 data lines commonly used in the market. It should be noted that since the different controllers 14 are not automatically associated with the temperature-compensated group 1G-shaped manifold disclosed in the present application, the input/output communication module 30 is connected to the controller 14. The operator can further input some operation commands through the controller 14, thereby enabling the controller to form a connection and transmittable signals with the input/output communication module 3 and the temperature compensation module 10. The input/output communication module 30 of the above embodiment is independent of the temperature compensation module 10; however, for another embodiment, please refer to FIG. 2B, and the input/output communication module 30 can be built in the temperature compensation mode. Group 1 internal electrical coupling processor 42 ° Please refer to Figure 3, for the purpose of this creation, the temperature sensor 12 is used to monitor the thermal displacement temperature of the cutting machine and then transmitted to the temperature compensation module 10; After the temperature compensation module 1〇 analyzes and calculates a thermal displacement compensation amount, it is transmitted to the controller 14 via the input/output communication module 3〇, and then the controller 14 borrows the instruction to compensate the cutting machining center 2〇 The amount of processing. Referring to FIG. 4, the use mode of the present invention is further described. After the temperature sensor 12 obtains the thermal displacement temperature of the cutting center machine, the thermal displacement temperature is transmitted to the temperature signal processing unit 44, and the temperature signal at this time. The processing unit 44 can perform analog/digital conversion (A/D conversion) so that the thermal displacement temperature signal forms a number M364561 bit signal. Then use an amplifier (not shown) to amplify the signal and filter it with a filter (not shown) to filter out the noise. The processor 42 captures the above-described digital thermal displacement temperature signal and the temperature compensation model 47 built in the memory 46, and then performs calculation and generates a thermal displacement compensation amount. The thermal displacement compensation amount is output to the controller Η via the input/output communication module 3〇, and the thermal displacement compensation amount is used to compensate the spindle or servo feed (10) feed amount (_ amount) of the machining center machine to Correct the offset due to thermal displacement. In addition, the display element 48 can display the amount of thermal displacement generated by the temperature sensor 12 to the button temperature of the cutting center machine J#.疋^ By the implementation of this creation, the variation of the pulse degree of the cutting machine and the change of the amount of the seam can be effectively monitored. In addition, the temperature of the paste heat displacement is matched with the appropriate temperature and fine type 47 for analysis and calculation. This obtains the position compensation & 昼' and the thermal displacement compensation amount can be transmitted to the controller 14 via a human/output communication module 3G that can be connected to various types of controllers 14 to enable the controller U Qian Depu compensated the amount and then corrected the machining feed amount, so this creation has the effect of easy operation and improved processing accuracy. >Reading 5 Picture Creation Another embodiment of the temperature detecting element I] can obtain the money position 4' and the matching suitable for the big _ (not shown) will be the heat distortion temperature before the first; The positional signal is sent to the temperature signal processing unit 4 to cut the class of the domain, so that the _Wei number becomes the digital signal that the M364561 can be used for digital analysis and calculation. The functions of the processor 42, the input/output communication module 3, the display unit 48, the memory unit 46, and the controller 14 are the same as those described above and will not be described again. The use case of the present invention further includes that a temperature sensor 12 is disposed in the three-dimensional direction of the position to be measured of the cutting center machine, and a thermal displacement compensation value is respectively matched with the temperature sensor 12 to correct the direction. The thermal displacement offset 'The spindle can move to the machining position more precisely and perform accurate machining operations. Since the compensation device 10 provides at least one set of temperature compensation models 47 and a calculation program for each type of cutting center machine, the user does not need to write a temperature compensation program by himself, and the creation is simpler in terms of use. The effect. In addition, since the calculation program and the temperature compensation model 47 can calculate the compensation value for different thermometers, the compensation effect is accurate, and the machining precision can be relatively improved. In addition, the present invention uses the information transmission unit 51 to output sensing and compensation data, and input a temperature compensation model. Under the necessary or specific conditions, the compensation value calculated and generated by the information transmission unit W can also be used to measure the temperature value and the series of information, and the information can be recorded or recorded to facilitate future pursuit. Vertical / analytical use. The above embodiments are only the technology of _sex and the function of the present invention, and are not intended to limit the creation. Anyone who is familiar with this technology can carry out the above-mentioned implementation of the ship's miscellaneous changes and changes under the guidance of the technology of the company's creation. M364561 Therefore, the scope of protection of this creation should be as listed in the patent application scope mentioned later. . [Simple description of the diagram] The first diagram is a schematic diagram of the configuration of the creation and a cutting center machine. Figure 2A is a schematic diagram of the components and coupling relationships of the present creation. Figure 2B is a schematic diagram of the components and coupling relationships of the present creation. Figure 3 is a block diagram of the measurement and signal transmission of this creation. Figure 4 is a control block diagram of temperature compensation for this creation. Figure 5 shows the control block of the temperature compensation in this creation. [Main component symbol description] 10 temperature compensation module 14 controller 30 controller 44 temperature signal processing unit 47 temperature compensation model 49 operating element 60 database 12 temperature sensor 20 cutting center machine 42 processor 46 memory unit 48 Display element 51 information transmission unit 62 temperature compensation model

Claims (1)

M364561 六、申請專利範圍: -種加I機之熱變位補償裝置,係用以偵測—加工機之 機台的熱變位溫度並計算出熱變位補償量,相饋給 機,其包含: 、 一溫度感測器,係配置在該機台上用以取得熱變位溫度; 、-溫《伽組,魏性地輪該溫度_器,且依據該 溫度感測讀輸㈣熱變位溫度計算得到—熱補償值; -輸入/輸出通訊模組,係電性地耗接該溫度補償模組; -控制器’係電性軸接該輸人/輸出通訊模組及該機台, 用以取得該一熱變位補償值且傳送給該機台。 2. 如申請專職_丨項所述之加讀之_位補償裝 置,其中該溫度感測器配置在該機台的主轴或饲服進給轴。 3. 如U利範圍第1項所述之加1機之熱變位補償裝 置’其中該溫賴侧_職人通賴組健合成同一 元件。 4. 如申明專利範圍第1項所述之加工機之熱變位補償裝 置’其中該溫度補償模組係、包含—處理器分別地電性祕一溫 度訊號處理單狀-記紐單元,顧處理料_接該輸入/ 輸出通訊模組。 5. 如申睛專利範圍第4項所述之加工機之熱變位補償裝 置,其中該記憶體單元用以存取一溫度補償模型。 6. 如申請專利範圍第5項所述之加工機之熱變位補償裝 11 M364561 置,其巾該溫度補倾魏為溫度與補償#所構成之係數或數 對。 7.如ΐ料嫌㈣4彻述之加卫機之熱變位補償裝 置’更包含-顯示元件配置於該溫度補償模組且電性減該處 理器。 8·如申%專利範圍第7項所述之加工機之熱變位補償裝 。更G 3操作單元配置於該溫度補償模組且電性耦接該處 理器用以控制或切換鋪示元件的顯示内容。 9.如申Μ專·圍第4項所述之加讀之熱變位補償裝 更匕3 =貝訊傳輸單元’該資訊傳輸單元配置於該溫度補 偏莫組且電_接魏·。 置η月專利範圍第9項所述之加工機之熱變位補償裝 μ更匕3外部資料庫,該外部資料庫配置複數個溫度補償 鲁_且電性地輪接該該資訊傳輸單元。 12M364561 VI. Scope of application for patents: - A thermal displacement compensation device for adding I machine, which is used to detect the thermal displacement temperature of the machine of the processing machine and calculate the thermal displacement compensation amount, and the phase feed device The method comprises: a temperature sensor disposed on the machine for obtaining a heat displacement temperature; and a temperature group, the temperature is set, and the heat is sensed according to the temperature. The displacement temperature is calculated as - the thermal compensation value; - the input/output communication module is electrically consuming the temperature compensation module; - the controller is electrically connected to the input/output communication module and the machine The station is configured to obtain the thermal displacement compensation value and transmit it to the machine. 2. If you apply for the _ position compensation device as described in the full-time _ item, the temperature sensor is placed on the spindle or feed axis of the machine. 3. The thermal displacement compensation device of the 1 machine as described in item 1 of the U profit range, wherein the temperature component is combined with the same component. 4. The thermal displacement compensating device of the processing machine according to claim 1 of the patent scope, wherein the temperature compensating module, the inclusive processor respectively, the electric secret temperature signal processing unitary-reporting unit, Gu The processing material_ is connected to the input/output communication module. 5. The thermal displacement compensation device of the processing machine of claim 4, wherein the memory unit is configured to access a temperature compensation model. 6. If the thermal displacement compensation device 11 M364561 of the processing machine described in the fifth paragraph of the patent application is applied, the temperature of the towel is the coefficient or the pair of temperature and compensation #. 7. If the thermal displacement compensation device of the elevator is described in detail, the display component is disposed in the temperature compensation module and electrically subtracted from the processor. 8. The thermal displacement compensation device of the processing machine described in item 7 of the patent scope of the application. The G 3 operating unit is disposed in the temperature compensation module and electrically coupled to the processor for controlling or switching display content of the display component. 9. If the thermal displacement compensation device is added as described in item 4 of the application, it is more than 3 = the transmission unit of the bei transmission unit. The information transmission unit is disposed at the temperature compensation group and is connected to Wei. The thermal displacement compensation device of the processing machine described in item 9 of the n-month patent range is further referred to as an external database, and the external database is configured with a plurality of temperature compensations and electrically connected to the information transmission unit. 12
TW97215782U 2008-09-02 2008-09-02 Thermal deformation compensating device for processing device TWM364561U (en)

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI401135B (en) * 2009-12-29 2013-07-11
CN103676778A (en) * 2012-09-18 2014-03-26 财团法人精密机械研究发展中心 Method capable of conducting heat deformation compensation on multiple processing machines simultaneously
TWI459166B (en) * 2012-08-31 2014-11-01
TWI469851B (en) * 2011-04-28 2015-01-21
TWI600989B (en) * 2014-01-31 2017-10-01 Tokyo Electron Ltd Substrate processing device, editing method, and memory medium
TWI635377B (en) * 2013-12-04 2018-09-11 南韓商循環工程股份有限公司 Dynamic and thermal error real time compensation system for linear motion single-plane gantry stage, stage apparatus and manfacturing, measuring and inspecting equipment
TWI709453B (en) * 2019-08-14 2020-11-11 蘇春維 Cooling of machine and thermal deformation compensation method and chiller machine

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI401135B (en) * 2009-12-29 2013-07-11
TWI469851B (en) * 2011-04-28 2015-01-21
TWI459166B (en) * 2012-08-31 2014-11-01
CN103676778A (en) * 2012-09-18 2014-03-26 财团法人精密机械研究发展中心 Method capable of conducting heat deformation compensation on multiple processing machines simultaneously
TWI635377B (en) * 2013-12-04 2018-09-11 南韓商循環工程股份有限公司 Dynamic and thermal error real time compensation system for linear motion single-plane gantry stage, stage apparatus and manfacturing, measuring and inspecting equipment
TWI600989B (en) * 2014-01-31 2017-10-01 Tokyo Electron Ltd Substrate processing device, editing method, and memory medium
TWI709453B (en) * 2019-08-14 2020-11-11 蘇春維 Cooling of machine and thermal deformation compensation method and chiller machine

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