TWM357615U - Two optical elements f-θ lens of MEMS laser scanning - Google Patents

Abstract

Two f-θ lens used for micro-electro mechanical system (MEMS) laser scanning unit having a first lens and a second lens, the first lens is a biconvex lens and the second lens is a meniscus lens which the concave surface towards the MEMS mirror. The first lens has two optical surfaces, and at least one of the optical surfaces is aspheric surfaces which at the primary scanning direction. The second lens has two optical surfaces, which focuses the scanning light to the target by calibrating itself. Both the first lens and the second lens are satisfied the specified optical condition. The purpose of linear scanning and high resolution scanning can be achieved by disposing the first lens and the second lens.

Description

M357615 VIII. New description: • [New technical field] This is a two-piece f (9 lens) for micro-electromechanical laser scanning device, especially for correcting micro-electromechanical mirrors with simple motion. And the angle of the sinusoidal relationship with time is k: t, to achieve the two-piece f β lens required for the scanning effect of the ray misalignment. Lu [Prior Art] Sighting laser beam printer LBP (Laser Beam print) laser scanning device LSU (Laser Scanning Unit) 'Using a high-speed rotating polygon mirror to control the laser beam scanning of the beam, such as US 7091717, US6377293, US6295116, or as described in Taiwan Patent 966. The principle is as follows: a laser beam (1 and beam) is emitted by using a --body laser, first through a collimator, and then through a diaphragm (ape plus re) to form a parallel beam, and the parallel beam After a cylindrical mirror (such as 5), the width of the axis in the sub-scanning direction can be parallel to the parallel direction of the X-axis of the main scanning! Focusing to form a line image, and then shooting onto a multi-mirror rotating at a speed, while the polygon mirror is uniformly and continuously provided with a polygon mirror, which is located at or near the above line image (lineimage) The focus position. The polygon mirror controls the projection direction of the laser beam, and when the continuous plurality of mirrors rotates at a high speed, the laser beam incident on a mirror can be extended by the same direction in the parallel direction of the main scanning direction (χ axis). The angular velocity is deflected to an f (9 linear scanning lens, and the ίθ linear scanning lens is placed beside the polygon mirror, which can be a single-dement scanning lens or a two-piece Lens structure. The function of this μ linear scanning mirror M357615 is to enable the laser beam reflected by the mirror on the polygon mirror to be focused into an elliptical spot and projected onto a light receiving surface (ph〇t〇recept 〇r d_, ie "imaging surface, and meet the requirements of linear scanning. However, the conventional, laser-sweeping device LSU has the following problems in use: (1), rotary multi-faceted The production of the mirror is difficult and the price is not low, which increases the production cost of the LSU. (2) The polygon mirror must have a high-speed rotation (such as 40,000 rpm) function, and the precision requirements are high, so that the general polygon mirror reflects Mirror surface γ The extremely thin width requires a cylindrical mirror to be added to the conventional LSU so that the laser beam can be focused into a line (a point on the Y-axis) through the cylindrical mirror and then projected onto the mirror of the polygon mirror. As a result, the composition and assembly process are increased. (3) The conventional polygon mirror must be rotated at a high speed (such as 4 rpm), resulting in a relatively high rotational noise, and the polygon mirror takes a long time from start to work. , increase the time after booting. (4) The assembled structural towel of the LSU for the meal 'projected to the polygon beam of the polygon mirror φ: the mandrel is not facing the center axis of the polygon mirror' so that the design fits the lens date On the same day, Shouyi considered the off-axis deviation of the polygon mirror (〇ff axis deviati〇n), which made it relatively difficult to design and manufacture the lens. 'Every j years ago' in order to improve the LSU assembly structure, the current market development A oscillating (osciUat〇ry) microelectromechanical mirror (]^]5]^8 is used to replace the conventional polygon mirror to control the laser beam scanning. The microelectromechanical mirror is a torque vibrator. (10)UlatOTS) 'There is a counter on its surface Layer, which can be scanned by vibrating ship reflective layer, = line reflection. 'The future laser scanning device that can be applied to imaging system ^, sweeper or laser printer is similar to M357615 Scanning unit (LSU), the scanning efficiency (Scanning efflciency) will be higher than that of the traditional rotating polygon mirror. For example, US Pat. No. 6,844,951, uS6,956,597, which generates at least one driving signal, whose driving frequency approaches the complex micro-electromechanical Resonating frequency of the mirror, and driving the microelectromechanical mirror with a driving signal to generate a scanning path, US 7, 〇 64, 876, US 7, 184, 187, US 7,190, 499, US 2006/0113393; or as Taiwan patent TW M253133 ' Between the collimating mirror and the printing lens in the LSU module structure, a micro-electromechanical mirror is used instead of the dragon rotating polygon mirror to control the projection direction of the laser beam or as Japanese patent JP 2006-201350. This microelectromechanical mirror has the advantages of small components, fast rotation speed, and low manufacturing cost. However, due to the microelectromechanical mirror, after receiving a = pressure drive, it will be made to be a simple harmonic, and this method of the face (10) & (4) is proportional to the angular velocity and projected to the microelectromechanical mirror. The relationship between the reflected angle Θ and the time t after reflection is: 〇{t) = Qs -sm(2n ft) The scanning frequency of the mirror, the inverse (four) degree system and time corresponding to the MEMS micro-electromechanical inverse string function When the positive sin (2; r on the same day 7 interval ~, the angle of reflection changes: and has a nonlinear relationship with time, that is, when the light generated by this reaction, the amount of change in angle = ^ the oscillation of the mirror The movements of the sinusoidal wave peaks and troughs move differently, and the multi-faceted mirrors of the conventional sinusoidal angles are converted into an equal angular velocity. The Sweeping device (Lsu) is used on the right side and the f6 is used in the lens, and the lens has a ray amount with a microelectromechanical mirror. The first velocity of the field caused by the angle change caused by the imaging surface mirror will produce a non-equal rate scanning phenomenon to produce the imaging deviation of the M357615 on the imaging surface. The device is referred to as the microelectromechanical band: Laser sweep composed of electromechanical mirror The line passes through the microelectromechanical mirror, and its characteristic is laser light, so it can develop the scanning light, so that it can be recorded correctly on the target, such as the surface of the woman's light ("Dolvnomial, . ' 揭铭9 direction correction, still difficult Accuracy requires .m μαW, which is “into the _ shape, only the main scanning is in the main scanning direction for angle change. The beam cross section is not ideally small and then 匕, but the section is flat due to the laser _ ' Oval, modified scan Lai (10) (four), butterfly _ woven at the same time [new content]: Innovative: the purpose is to provide a kind of micro-electromechanical laser scanning device convex system by micro-inverse financial. Department by ^ lens for 3 convex The second type is a double-time (four) lens which is reflected by the double-lens mirror and the scanning effect of the micro-electromechanical anti-requirement on the target object. The laser scanning device 2 is achieved. Another object is to provide a - Μ Μ lens for MEMS laser scanning to reduce the effect of the surface of the spot on the target / ^ one-piece resolution. Reaching the goal of improving this creation - the purpose is to mention For a micro-electromechanical laser lens, the distortion correction is caused by the deviation of the scanning light from the light, and the offset of one of the sub-scanning directions is increased, so that the image is formed in the photosensitive drum as the direction and the problem, and the size of each image is obtained. Homogenization, the effect of circular quality (resolution quality). As a result, the two-piece printing lens of the MEMS laser scanning device is suitable for the M357615. A laser that emits light from the source by oscillating left and right: ί scanning the microelectromechanical mirror for imaging on the target; for Rayleigh static ^ 'This target is often the photosensitive drum (dmm) 'ie' to be imaged The light spot is scanned by the IG micro-electromechanical mirror, and the micro-electromechanical mirror reflects the scanning light. The scanning light is corrected by the two-piece % lens of the creation to form a light spot on the bank drum (ah). The drum is coated with a photosensitizer, and the drink should be concentrated on the paper so that the data can be printed out. 1 lens 2 = 2 type Γ lens contains one of the first, starting from the microelectromechanical mirror, 'and brother' lens, where the first lens has _ first optical surface and 'dipole 1 and second optical surface, in The structure of Jing 2 is composed of a spherical surface, which is mainly a non-rate scanning of the micro-electromechanical anti-mystery of the simple harmonic motion, so that it is corrected to the equal-third optical surface; ===! scanning. The second series has at least one optical direction. The surface is aspheric: it is necessary to: scan poorly, and correct the scanning light of the first lens to condense the sense of light on the drum first to form an imaging bias [embodiment] Please take a picture of the micro-electromechanical optical path. The two-piece % lens of the present invention is provided with a two-piece lens package having a first optical laser scanning device and a first lens 13 having a third optical surface 132 and an optical surface 131b. The system is suitable for the micro-electromechanical laser sweeping and smashing ^ 囟 132b brother's second lens 132, ^ clothing. In the figure, the microcomputer (four) radiation scanning device mainly includes M357615 a laser light source 11, a microelectromechanical mirror 1〇 , a cylindrical mirror 16, two optical detectors i4a, 14b, and a target for sensitization. The target system is implemented by a photosensitive drum (dmm) 15. The light beam 111 generated by the laser light source 11 passes through the cylindrical mirror 16 and is projected onto the microelectromechanical mirror 10. The microelectromechanical mirror 10 swings left and right with resonance. In a manner, the light beam 111 is reflected into the scanning light rays 113a' 113b, 114a, 114b, 115a, 115b. The projection of the broom light rays 113a, 113b, 114a, 114b, 115a, 115b in the X direction is referred to as the sub-scanning direction (sub Scanning direction), the projection in the γ direction is called the main scanning direction and the scanning angle of the microelectromechanical mirror 1 is known. Please refer to Figure 1 and Figure 2, where Figure 2 is -micro Electromechanical mirror scanning angle θ Electromechanical mirror 1G is a simple harmonic motion, and its motion angle is along with ", the middle peak aa and the trough bb, and the swing angle _ 曰 曰 5丨 ", and the angular velocity ___ ' =+ degrees^ is less than the band 妯 and the 戚 偏差 deviation, therefore, the photo-electrical sensor (4), the maximum scanning angle inside the wall, Ω " placed in the mechanical and electrical mirror ι 〇 by the microelectromechanical mirror 10 黯 ^ ^ Ρ ' The peak of the beam _ 2 begins the inductance detector] such as _==== 1 scanning light ma; When the light reaches the +ΘΡ angle, it is equivalent to the change of the scanning angle of the microelectromechanical mirror 10 in Fig. 1, ^', as shown in Fig. 2a: the scanning light 114a; when the microelectromechanical mirror 10 is the laser Transfer secret == 目 f 丨 杂 杂 杂 杂 杂 ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; , when #翏照图1 and circle 3 + bundle (1), so complete - cycle. 4 Figure 3 over the first - mirror to receive the second system of sweeping plum 10 M357615 light path map. The needle and the ground are effective scanning angles. When the (4) angle of the microelectromechanical mirror ω enters the escape, the laser source η starts to emit the laser beam ln, which is reflected by the microelectromechanical mirror 10 to sweep the cat light, and when the breeze light passes through ―Lens 131 The distance between the first optical surface 131a of the first lens 13a and the second optical surface (10) is non-linear with time _ the scanning light _ replaced by 』 = sex = scanning light. After the scanning light passes through the first, i3i and second lenses 132, the straw-optical surface 131a, the second optical surface/the T dl von microelectromechanical mirror 10, and the first t 2 are the first optical surfaces 131a to Between the two optical faces = 3 a to (4) the distance between the optical faces (10), and d5 is the 15th interval. The curvature is the first. The curvature radius of the optical surface 131b is the third. The radius of curvature of the optical surface 132b of the optical coffee. After the semi-finished R4 is cast, the transmittance of the first mirror and the second mirror along the optical axis is zero, so the light spot % ^ ^ imaged on the photosensitive drum 15 is generated. Move H3b and 113c through the first lens 丨... 'circular. When the light is scanned, it is incident on the photosensitive lens drum 15 after being incident on the lens 132 of the first lens 131. The light spot formed by the M357615 ra is large; this case is also in the sub-scanning direction. The light spot formed by the scanning light of the red light / tianla llla will also be larger; although the light is in the main saG# sbG is the t= Γ _ ____ direction of the broom light of the 1G riding machine Length, Ga, and Gb ^Gaussian Beams are at the light intensity of i3 5% at the Y side.

i path = the beam radius to the 'as shown in Figure 5' Figure 5 _ shows the γ direction of the beam longitudinally 14 'This creation of the second type ω lens can reflect the microelectromechanical mirror (7) to the light, Gauss The beam of the beam is distorted (distQrti (10) correction, and the time-angular velocity is converted into a daily pin _ turn _,. In the main scanning side ^ scan the beam radius in the X direction and γ direction through (four) the angle of the lens! The magnification of 疋 produces silk on the imaging surface to provide a resolution that meets the requirements. ... In order to achieve the above-mentioned effect, the two-piece twisted lens of the present invention is on the first optical surface nia or the second optical surface of the first lens 131. The third optical face or the fourth optical face (10)' of the second lens m can be corrected in the main scanning direction or the sub-scanning direction by using a spherical surface or a surface curved surface. If an aspheric surface is used, the aspheric surface is used. Use the following surface equation: Anamorphic equation 7- (Cx)X2+(Cy)Y2 i+^1-(1 + ^)(Cx)2 + Work 1 - 戽)χ2 + (1+本)' Leaf +

Br [(1 -Bf)X2+(\ + Bp )Y2 ] + CR [(1 - cp )X2 +(\ + CP )Y2 ]4 +

Dja-D,)^2+(1 + 1),)^]5 (2) where Z is the distance from the optical axis direction to the tangent plane (SAG) at any point on the lens; 12 M357615 and X direction respectively Curvature in the Y direction; A and A are the Conic coefficients in the χ direction and the Y direction, respectively; A, A, G and the four times, six times, eight of the rotationally symmetric portions, respectively. Deformation from the conic; 戽, 戽, <^ and respectively, respectively, non-rotationally symmetric components are four, six, eight, Deformi〇n from fine conic; when, (4 and -^, = 0 is reduced to a single aspheric surface. Field 2. Toric equation Z = Zv + — iCxy )x2 \ + ^-(Cxy)2X2

Cxy = —~—- (1 / Cx) — Zy

Zy - (Cy)Y2 1 + -yjl- (1 + Ky){Cy)2 Y2 + 54Γ4+5676 +5878+510710 (3) where 'Z is the point on the lens from the optical axis to the tangent plane Distance (sag);

f Curvature in the Y direction and the X direction respectively; & Conie eoeffident in the γ direction H, & and ^ is four, six, ten, ten times rder coefficients) from the conic ); #一今^Simplify riding-spherical. ▲ In order to enable the scanning light to maintain the scanning speed on the imaging surface of the target object, for example, two different time periods _, maintaining two light points _ from the ma-transforming light (10), by the first Mirror two ====== phase __ The two points of the light are equal. After the reflection of H ^ s 15 is reduced, its Gaussian beam # 〇; n n is larger via the microelectromechanical mirror 舁 Gb, if the scanning light passes the distance of the micro M357615 electromechanical mirror 10 and the photosensitive drum 15 'Gaussian beam radius and will be larger' does not meet the requirements of the resolution. The two-piece twisted lens of the present invention can further form Ga and Gb between the scanning light 113a and the scanning light 113b reflected by the microelectromechanical mirror 10. The small Nantes beam 'produces a smaller spot on the photosensitive drum 15 that focuses on imaging; further, the two-piece ίθ lens of the present invention can evenly equalize the size of the spot imaged on the photosensitive drum 15 (restricted In the range of meeting the resolution requirements, to get the best analytical results. The two-piece twisted lens of the present invention comprises: a micro-electromechanical mirror 1 〇 sequentially, wherein: the first lens 131 and the second lens 132 ′ - the lens 131 is a double convex lens and the first lens 132 is a double convex lens, wherein the first lens (3) has a first optical surface 131a and a second optical surface 131b, which converts the scanning light point of the angle 盥 time-linear relationship of the microelectromechanical mirror 1〇 into The distance between the distance and the time is a ray spot, wherein the second lens 132 is a crescent-shaped and concave surface on the microelectromechanical mirror side, and has a first optical surface 132a and a fourth optical surface 132b. The scanning light of the first lens 131 is condensed on the target; the scanning light reflected by the microelectromechanical mirror K) is imaged on the photosensitive drum 15; wherein, the first optical surface (3) The second optical surface 131b, the third optical surface, and the fourth optical surface 132b have an optical surface formed by a non-spherical surface in the main scanning direction, a first optical surface, and a second optical surface. 132a and the fourth optical surface 132b may have at least two in the sub-scanning direction. The optical surface formed by the surface or the light IT formed by the spherical surface in the sub-scanning direction is further formed on the first lens 131 and the second lens 132, and the optical effect condition is created by the sheet twist lens. The main scanning direction further satisfies the formula (4) to (5) / (, ) Υ <0.6 (4) 14 M357615

-0·4 < Al)Y < -0.02 (5) Or, satisfying the formula (6) 0.1 <<1.2 (6) in the main scanning direction and satisfying the equation (7) 0.086 < (α) in the sub-scanning direction +(α

fsX <1.0 (7) where ' f(1) γ is the focal length of the first lens 131 in the main scanning direction, the focal length of the f(2) YS second lens 132 in the main scanning direction, and the mountain is 0 = 〇. The distance from the target side optical surface of the first lens i3l to the optical surface of the second lens 132 microelectromechanical mirror 1 is the furnace. The second lens 132 has the fullness and 屯 is θ = 〇. The second lens 132 is the distance from the object side optical surface to the target object, sx is the composite focal length of the one-dimensional lens in the sub-scanning direction (c〇mbinati〇n focaj length), and fsY is the two-piece calendar lens in the main scanning direction. The composite focal length, the radius of curvature of the first optical surface in the sub-scanning direction; Riy is the radius of curvature of the second optical surface in the main scanning direction; and the refractive index _action index of the first lens 131 and the second lens 132, for example, Furthermore, the spot uniformity formed by the two-piece lens of the present invention satisfies the ratio of the maximum value and the minimum value of the beam size of the scanning light on the photosensitive drum 15 to satisfy the formula (8): <

_ min^ -Sa) max(VD (8) More Steps - Steps] The two-piece twist lens of this creation is the resolution point of the machine, the machine is turned, the surface is rotated, the drum is light = __ and η_ is micro Electromechanical back-pull (10) The light of the sweeping line on the reflective surface is 15 M357615 = The ratio of the most tilting of the charm on the drawing level 15 means 'that can satisfy the equations (9) and (9) (10) ς中& and Sb On the photosensitive cymbal 15, the direction of the light formed by the cat is swept, and the length of the X direction, S is the level of the sense 15. The square Y is the ratio of the sweeping point of the micro-electromechanical mirror ω reflecting surface, ^ long time back The spot and minus value of the potassium target line; SaG and SbQ are the ratio of the first point of the micro-machine f (1) reflection surface ff 15 and the length of the secondary sweep. The 4-line spot is in the main scan. Make this creation seem to be clear and lucid, _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ >|The main constituent elements are described. Therefore, this creation is based on the electric seedlings. In addition to the two-piece a lens disclosed in this creation, the potted structure is a general notification technique, so _ _like in this dumping county Those skilled in the art understand that the constituent elements of the two-piece w-lens of the microelectromechanical laser scanning device disclosed in the present application are not related to the structure of the embodiment, that is, the micro-surface laser scanning device is equipped with ten lenses. Each of the constituent elements is capable of undergoing many changes, modifications, and even equivalent changes. For example, the curved diameter design or surface design, material selection, and pitch adjustment of the first-lens m and the second-made 132 are not limited. M357615 <First Embodiment> The first lens 131 and the second lens 132 of the two-piece lens of the present embodiment, wherein the first lens o is a biconvex lens and the second lens m is The crescent-shaped and concave surface is formed on the lens of the microelectromechanical mirror side, and the first optical surface 131a, the first optical surface 131b, the second optical lens 132, the third optical surface 132a and the fourth optical surface mb are both formed. The system is aspherical. The formula (2) is an aspheric formula. The optical and aspheric parameters are shown in Table 1 and Table 2. Table 1. Optical characteristics of fB in the first embodiment

Optical surface curvature radius (mm) (optical surface) (curvature) d thickness (mm) nd refractive index (refraction index) MEMS reflective surface R 〇〇15.00 1 lens 1 1.533 Rl (Anamort) hic) Rlx* • 59.36 8.00 Rly* 412.45 R2fAnamorohic') R2x* -13.83 15.00 R2y* -191.01 lens 2 1.533 R3 iAnamorohic) R3x* 44.64 8.00 R3y* -67.42 R4rAnamor〇hic') R4x* 79.17 35.90 R4y* -140.15 威异'鼓Cdrum'iRi 〇〇0.00 * indicates aspheric surface 17 Μ 357615 Table 2. Optical surface aspheric parameters of the first embodiment _ Anamorphic equation coefficent _ Optical surface (optica 丨 Ky cone coefficient 4th power coefficient 6th power coefficient 8th power factor 10th power factor surface) (Conic Order Order Order Order _Coefficent) Coefficient (AR) Coefficient (BR) Coefficient (CR) Coefficient (DR)

Rl* -9.999866 〇.〇〇〇〇〇〇〇.〇〇〇〇〇〇〇.〇〇〇〇〇〇〇.〇〇〇〇〇〇R2* 2.0503E 十01 -9.9853E-08 -4.9315E -10 O.OOOOE+OO 0.0000E+00 R3* -1.0279E+00 -9.5331E-08 7.4517E-11 0.0000E+00 0.0000E+00 R4* 4.2555E+00 -3.8792E-06 6.3532E-10 0.0000E+00 0.0000E+00

Kx conic coefficient her power factor 6th power factor 8th power factor 10th power factor (Conic Order Order Order Order

Coefficent) Coe cient (AP) Coefficient (BP) Coefficient (CP) Coefficient (DP) R1R2R3R4 -37.712682 0.757670 -1.043425 〇.〇〇〇〇〇〇〇.〇〇〇〇〇〇-9.6614E-01 2.805 IE- 01 O.OOOOE+OO O.OOOOE+OO 0.0000E+00 6.0316E+00 3.1716E+00 0.0000E+00 O.OOOOE+OO 0.0000E+00

2.5689E+01 -1.4215E+00 -1.2072E-01 O.OOOOE+OO The optical surface of the two-piece twisted lens thus formed, f(1)y=248.747, f(2)Y: 256·151, fsX=283 (H, fsY=3349.652 (mm) can convert the scanning light into a linear point of distance and time, and scan the microelectromechanical mirror 1G glazing Sa0=14.19_, Sb〇: 3109.99 (four) scanning The light is focused on the photosensitive drum 15" to form a small spot 6 and satisfies the conditions of the formulas (4) to (10), as shown in Table 3, with the central axis z-axis being at a distance γ from the central axis Y in the γ direction (four) #痛束梁直径_, as shown in Table 4; and the light spot distribution map of this embodiment is shown in Figure 7. 18 M357615 Table 3, the first embodiment meets the condition table

+d/wY f{2)Y main scanning direction Sub-scanning direction ( ιηϊηί^ δ

Vmu Gold Rl ercheng) 1113⁄43⁄4)

^ K)fsx

}bO ' ^aO 0.2368 -0.1401 0.4105 0.3319 0.4261 0.0732 0.0312 Table 4, the maximum value of the Gaussian beam on the photosensitive drum of the first embodiment Y -107.464 .96.〇75^ΠΤ—-----48.240 -36.152 -24.085 〇.〇〇〇1-27Ε-02 1.10Ε-02 9.01Ε-03 8.76Ε-03

MaxaGUGb) 1.95E.G2 1.38E.G2 Ζ4(Η ·60.337 ---~~-^〇2L61E-02 1.41Ε-02

<Second Embodiment> The first lens of the two-piece lens of the present embodiment, the lens i3i, and the second lens, the lens of the second lens, are a double convex shape, and the mirror of the microelectromechanical mirror side is _ The shape and the concave surface are the aspherical surface of the second optical surface (four), the second lens 131, and the second optical surface, and the optical surface of the optical plane 132b and the optical surface 132b of the fourth embodiment are as shown in Table 5 and Table 6 (). Turn the pepper to count. Optical contact with aspherical surface finger 19 M357615 Table 5, optical properties of the second embodiment, optical surface curvature radius (mm) (optical surface) (curvature) d thickness (mm) (thickness) nd refractive index (refraction index) MEMS Reflective surface R 〇〇41.10 1 lens 1 1.533 RH Anamorphic) Rlx* -58.93 11.06 Rly* 500.00 R2f Anamorphic) R2x* -14.25 22.54 R2y* -131.98 lens 2 1.533 RBiAnamorDhic) R3x* 41.95 11.34 R3y* -68.38 R4(AnamorDhie) R4x* 44.94 59.54 R4y* -193.19 糸 C Cdrum) R5 〇〇0.00 * indicates aspheric surface table 6. Optical surface aspherical parameter optical surface of the second embodiment RJ* R2* R3* ___R4* Anamorphic equation coefficent

Ky Cone Coefficient 4th Power Coefficient 6th Power Coefficient 8th Power Coefficient 10th Power Coefficient (Conic Order Order Order Coefficent) Coefficient (AR) Coefficient (BR) Coefficient (CR) Coefficient (DR) -1.0000E+01 4.1220E +00 -6.5523E-01 -2.1519E+01 -1.5664E-07 1.7671E-07 -5.4141E-07 -7.5590E-07 -2.461 IE-08 -1.0738E-10 -1.1074E-10 2.4110E-11

0.0000E+00 O.OOOOE+OO O.OOOOE+OO O.OOOOE+OO 0.0000E+00 0.0000E+00 0.0000E+00 oooonF.+oo

Kx Cone Coefficient 4th Power Coefficient 6th Power Coefficient 8th Power Coefficient 10th Power Coefficient (Conic Order Order Order Order

12 3 4 RRRR .Coefficent) Coefficient (AP) CoefflcienUBP) Coefficient (CP) Coefficient (DP) 9.0863E+00 -2.0046E-01 -1.0375E+00 0.0000E+00 0.0000E+00 -7.3631E-01 -2.3614 E+00 0.0000E+00 0.0000E+00 0.0000E+00 9.9824E+00 -7.5108E-01 0.0000E+00 O.OOOOE+OO 0.0000E+00 _ _ 3.7629E+00 _ -5.0883E-Q1 _ 2.5704E-01 0.0000E+00 0 00〇nF+nn The two-piece ίθ lens thus constructed, f(1)γ= 199·25〇, f(2)Y= -207.231, fsX~29.556, fsY=1482.761 (mm The scanning light can be converted into a scanning light spot whose distance is linear with time 'and the spot of the microelectromechanical mirror 10 is SaQ=1419aim), sbQ=20 M357615 3109.99 (μηι) is scanned into the scanning light, and the photosensitive drum 15 is scanned. Focusing on, forming a smaller spot 8 and satisfying the condition of (4)~(1〇), as shown in Table 7; the distance from the central axis γ in the x-axis of the photosensitive drum 15 in the x-axis The Gaussian beam diameter (called ^) of the light spot is as shown in Table 8; and the light spot distribution map of this embodiment is as shown in FIG. Table VII, the brother consistently meet the condition table d·^ ^ d4 -}- d5 d5 / (1) r 0.4689 f (2) Y main scanning direction sub-scanning direction _ _ team η — ν R,, KRix Rjf- -0.2873 0.1528 0.1101 53⁄4) 0.4150 0.0579 - ------ 0.0238

Table VIII, the maximum value of the Gaussian diameter of the light spot on the second drum

'-107.460 -95.920 -84.089 Max(2Ga,2Gb) 5.12E-03 8.48E-03 7.56E-03 -72.091 .60022 :7.949—.35.9〇5—^23.903 7-S7E-03 5.86E-03 5.06E -03 4.03E-03 2.40E-03 <Third Embodiment> In the second embodiment, the first lens of the fB lens and the first lens ma of the first lens ma are biconvex lenses and the second lens 132. For the crescent-shaped and _ micro-electromechanical mirror side of the lens, in the first lens 131 - optical face coffeepan two lenses! The fourth optical surface (10) is an aspherical two-type design; the second optical surface (10) and the second lens 21 M357615;:=^rr(2) are the characteristics of the male-aged butterfly.

Table IX, Twisted Optical Characteristics of the Third Embodiment Optical Surface Curvature Radius (mm) (curvature^ MEMS and RR R〇〇lens 1 RliY Toroid) Rlx -36.01 Rly* 358.67 R2fAnamorphic.) R2x* -11.95 R2y* -181.18 lens 2 R3(Anamorphic) R3x* 49.11 R3y* -88.10 R4 (Ύ Toroid) R4x 68.27 R4y* -91.94 Drum (drum^RS 〇〇* indicates asphericity (mm) iijH^cness) 35.00 8.00 15.00 8.00 37.94 ____ 0.00 nd refractive index (refraction index) 1 1.533 1.533 φ Table 10, optical surface aspherical parameters of the third embodiment optical surface (optics surface) bad image 甶 甶 程式 program T〇r; c ef)丨丨afi〇n Ky Conic Coefficient (Conic Coefficent) 4th Power You 6th Power Factor Order Order Coefficient (B4) Coefficient CRfi'» 8th Power Coefficient Order Coefficient (B8) 10th Power Coefficient Order Coefficient Rl* -3.8493 E+02 -9.3615E-07 -1.7154E-10 O.OOOOE+OO 0.0000E+00 R4* -9.1937E+01 -1.1043E-07 3.7377E-11 O.OOOOE 00 0.0000E+00 Horizontal image surface Anamorohic eauation coefficent optical surface (optical Ky cone system) Number 4rii Power Coefficient 6th Power Coefficient 8th Power Coefficient 10th Power Coefficient surface) (Conic Order Order Order Coefficent) Coefficient (AR) Coefficient iBR) Coefficient (CR) Coefficient (DR) R2* -6.1828E+00 - 3.3262E-08 -1.4185E-10 O.OOOOE+OO 0.0000E+00 R3* -2.0464E+00 5.4912E-08 1.2009E-10 O.OOOOE+OO 0.0000E+00 Kx Cone coefficient 4th power factor 6th Power factor 8th power factor 10th power factor (Conic Order Order Order Coefficent) Coefficient (AP) Coefficient (BP) Coefficient (CP) Coefficient (DP) R2* -6.3742E-01 1.3726E+00 0.0000E+00 0.0000E+00 0.0000E+00 R3* 1.0000E+0J 9.2103E-01 0.0000E+00 O.OOOOE+OO O.OOOOE 00 22 M357615 By this; t冓 into a two-piece twist lens, f(1)γ= 29.477, f(2)Y=_197.425, fsX=27 collapse, fs production shift. Still (mm) can scan the scanning light, and the microelectromechanical mirror 1G light spot SaG=1419 ((4), 3109.99〇πη scanning into scanning light, focusing on the photosensitive drum 15, forming a smaller spot ίο, and satisfying the conditions of (4)~(10), as shown in Table 10-; The photoacoustic drum 15 is photographed with a gamma distance (mm) at a Y-axis distance on the central axis Z-axis, as shown in Table 12; the light spot distribution map of this embodiment is as shown in FIG. Table Η—, third real ^ conditional competition + + d5 /〇 )y

Ja)y main scanning direction sub-scanning direction δ m;

Vmir 11113⁄43⁄4⁄4 b0 °g〇, 0.2655 -0.1922 1.0546 0.2138 0.4240 0.0711 0.0301 Table 12, the maximum value of the Gaussian beam diameter on the photosensitive drum of the third embodiment Y -107.460 -96.198~~^84420~-72.403~~-60.285 ~~^48 145~^36030~τΓοτη"

Max(2Ga, 2Gb) 7.29E-02 5 56F ω λ . 23-970 〇·〇〇〇--3.76Ε-02 3.05Ε-02 2.51Ε-02 1.87Ε-02 1.29Ε-02 U6E_〇2 &lt The fourth lens 131 and the second lens 132 of the two-piece twist lens of the present embodiment, wherein the first lens 131a is a biconvex lens, and the second lens 132 is a micro-electromechanical device. The mirror side is formed by the cutting, and the first optical surface 13b of the first lens 131 = 23 M357615, the second optical surface 131b, and the second optical surface 132a and the fourth optical surface 132b of the second lens 132 are aspherical. (2) Designed for an aspheric formula. Its optical characteristics and non-a number are shown in Table 13. Torsional optical characteristics of the thirteenth and fourth embodiments

Optical surface curvature radius (mm) (optical surface) (curvature) d thickness (mm) nd refractive index (thickness) (refraction index1) MEMS reflection ar 〇〇 9.47 1 lens 1 1.533 RUAnamomhic, Rlx* -61.11 9.47 Rly* 1000.00 R2iAnamorphic ') R2x* -13.73 15.00 R2y* -111.48 lens 2 1.533 R3 TAnamorphic) R3x* 43.15 8.00 R3y* -72.64 R4fAnamorohic) R4x* 54.97 39.56 R4y* -186.13 Sense drum Cdrum)R5 〇〇0.00 * indicates aspheric 24 M357615 Table 14 and the fourth embodiment of the optical surface aspherical parameter Anamornhic equation coefflceni optical surface (optical Ky cone coefficient surface) (Conic Coefficent) 4th power coefficient 6th power coefficient 8th power factor 10th Power Order Order Order Order Coefficient (A豕)Coefficient noefficient CCR) Coefficient (DR) Rl* R2* R3* R4* -10.00000C 3.8144E+00 -5.4525E-0I -1.7S19E+01 1 〇.〇〇 〇〇〇〇1 1.8217E-07 -1.3836E-07 -2.282 IE-07 〇.〇〇〇〇〇〇-1.3336E-10 -1.0391E-10 3.4574R-11 〇.〇〇〇〇〇〇0.0000 E+00 0.0000E+00 no oooF+oo 〇.〇〇〇〇〇〇0.0000E+00 0.0000E+00 0.0000E+00 Rl* R2* R3* R4* Kx Conic Coefficent 4th Power Coefficient 6th Power Coefficient Order Order Coefficient ( API Coeffi^Vnt (pp) 8th power coefficient 10th power coefficient Order Order Coefficient Coefficient ΌΡΙ 1.406035 -6.7830E-01 1.0000E+01 -3.8113E+00 -0.112245 -2.3380E+00 -7.2372E-03 -5.0027E -01 -1.041759 0.0000E+00 0.0000E+00 1.8215E-01 〇.〇〇〇〇〇〇0.0000E+00 O.OOOOE+OO 0.0000E+00 〇.〇〇〇〇〇〇0.0000E+00 O .OOOOE+OO 0.0000E+00 The two-piece calendar lens thus constructed, f(i)Y=19〇79〇, _231 568, fsX=28.33, fsY=834.13 (mm) converts the scanning light into a distance Scanning the light spot with time is linear, and focusing on the 1G on the wire Sa『1419(_,.31〇9."(μιη) scanning into the scanning light' on the photosensitive drum ls, forming a comparison The small spot 12, and the condition of the full-type (10), as shown in Table 15; the Gaussian beam of the spot on the photosensitive drum 15 with the central axis Z-axis in the Y direction from the axis of the y-axis (yield) (_ As shown in Table 16 Light spot of the present embodiment and the embodiment shown in Figure 1. Distribution (). - 25 M357615 Table 15, the fourth embodiment satisfies the condition table

+ + d5 d5 fmr J{2) Y main scanning direction Sub-scanning direction ( 々ι), ν 1 J(^) y-i+ -—)Λ, δ

minA R]x ^3jc and 4" ):3⁄4 0.3279 -0.1708 0.4105 0.1977 0.4325 0.0705 0.0305 Table 16. The maximum value of the Gaussian beam diameter on the drum of the fourth embodiment Y -107.460 -96.194 -84.415 Max(2Ga, 2Gb) 9.49E-03 7.14E-03 7.16E-03 -72.368 -60.215 -48.060 -35.956 -23.920 0.000 8.30E-03 7.79E-03 7.18E-03 5.82E-03 7.87E-03 1.22E-02 &lt Fifth embodiment >

A first lens 131 and a second lens 132 of a two-piece twist lens according to the embodiment, the & lens 131a is a biconvex lens, the second lens 132 is crescent shaped and the concave surface is at 4 electromechanical reflection Mirror side lens, in the first lens (3) first optical surface (3) & and the first optical surface 131b, second lens 132 third optical surface 132a and fourth optical surface 13 沘 26 M357615 Table seventeen, fifth Example; TO optical characteristics optical surface radius of curvature (mm) (curvature) d thickness (mm) (thickness) nd refractive index (refraction index) MEMS reflective surface R lens 1 OO 15.45 1 1.533 RlfAnamorphic) Rlx Rly * 34.72 158.19 9.96 R2fAnamorphic) R2x* R2y* lens 2 -18.95 -96.96 10.00 1.533 R3 fAnamorphic) R3x* R3y* 44.05 -271.41 12.00 R4 TAnamorphic) R4x* -88.76 23.38 R4y* -518.31 _感糸叙idrunORS OO 0.00 6 Aspheric surface table 18, the fifth embodiment of the optical surface aspherical parameter transverse image surface equation coefficient (Anamorphic equation coefficen1 optical surface (optical Ky cone coefficient 4tii power factor 6th power coefficient 8th power factor surface) (Conic Order Order Order *· * *·**·*. R1SR3Rr, 2r3r4 10th power coefficient Order Coefficent) Coefficient (AR) Coefficient (BR) Coefficient (CR) Coefficient (DR) 3.2139E+00 2.7416E-06 - 4.5I15E-10 0.0000E+00 0.0000E+00 4.0120E+00 -6.4991E-08 5.5193E-09 O.OOOOE+OO 0.0000E+00 1.0000E+01 -2.3351E-05 1.5929E-09 O.OOOOE +OO O.OOOOE+OO 1.0000E+01 63319E-07 4.3735E-10 0.0000E+00 0.0000E+00

Κχ cone coefficient 4th power coefficient 6th power coefficient Μ power factor 10th power coefficient (Conic Order Order Order Coefficent) Coefficient (AP) Coefficient (BP) Coefficient (CP) Coefficient (DP) -1.4366E+01 2.7499E -01 O.OOOOE+OO O.OOOOE+OO 0.0000E+00 1.8682E+00 -5.6172E+00 0.0000E+00 0-0000E+00 0.0000E+00 5.4516E+00 -6.7539E-0I 0.0000E+ 00 00 00 00 00 00 00 00 00 00 00 00 00 00 ) Y= -1099.047, fsx=21.265, fsY=128.663 (mm) converts the scanning light into a scanning rule with a distance and time of 27 M357615, and scans the anti-Wei ω • 3:99 ((4) scanning light, At the light spot 12 of the photosensitive drum 15, and satisfying the conditions of (4) to (10), as shown in Table 19; photosensitive tr, η "t center distance (mm) of the light point of the Gaussian light poetry m α -, Lin implementation The light spot distribution map of the example is shown in Figure η. Table 19 and the fifth embodiment satisfy the condition table.

.f^LZi) +(^2-1) 0.3927 -0.0212 ,(2)r main scanning direction /iT fx> sub-scanning direction - ί!1) 5=min(V^ k:3⁄43⁄4 +

V 1113⁄43⁄4 ~^Γ ' 0.5312 0.8038 0.4633 0.0993 0.0483 Table 20, the maximum value of the Gaussian beam diameter on the fifth real age field γ -107.460 -96.156 -84.406-^72 426------

Max(2Ga, 2Gb) 2 91F mi λλ 60·346 .48.240 -36.147 .24.079 0.000 2.91E-02 1.66E-02 1.73E-02 1.08E-02 1 snp m , TM II-----.50E- 02 1.92E-02 1.77E-02 1.14E-02 7.79E-03 With the above description, this creation can at least achieve the following functions: (1) With the setting of the two-piece lens of this creation, The computer will be a simple harmonic motion = the optical distance of the mirror on the imaging surface is reduced or increased by the non-= rate which increases with time. The phenomenon is described as 'correcting the speed of the scale and making the projection of the laser on the imaging surface. The equal-rate sweep "' makes the distance between two adjacent spots formed on the target object equal. 28 M357615 and the sub-sweeping method, the distortion can be corrected (4) the scanning square is small. The spot on the target is retracted and 2 sweeps =^=(4)(4), and the surface of the target is scanned and the size of the spot on the target is uniformed. Fine (four) Na (four) is a descriptive fall into the creation of even the equivalent change [simple description of the schema] The schematic diagram of the optical path of the two-piece twisted lens of the creation; Mirror scanning angle θ when m 3 is the first and the second lens of the lens', Θ, FIG; known in the optical field and the first line of FIG path SIGNS LIST

Fig. 4 The complementary surface domain, first called the crane screen, the difference is shown in Fig. 5 is the relationship between the Gaussian distribution of the beam and the light intensity; Figure 6 is the path of the first lens and the second lens through the creation; FIG. 8 is a schematic diagram of a light spot of a second embodiment; FIG. 9 is a schematic view of a light spot of a third embodiment; FIG. Example of a light spot; and 29 M357615 FIG. 11 is a schematic view of a light spot of the fifth embodiment. [Description of main component symbols] ' 10 : Microelectromechanical mirror; II : Laser light source; III : Light beam; 113a, 113b, 113c, 114a, 114b, 115a, 115b: Scanning light; 131: First lens; 132 : second lens; 14a, 14b: photodetector, 15 · photoreceptor drum; 16: cylindrical mirror; 2, 2a, 2b, 2c: light spot; and 3 · effective scanning window.

30

Claims (1)

M357615 IX. Patent application scope: 1. A two-piece twist lens, which is suitable for a micro-electromechanical laser scanning device, the micro-electromechanical laser scanning device comprises at least a light source for emitting a light beam, and swinging left and right with resonance - the source-emitting beam is reflected as a micro-electromechanical mirror for scanning light, and a target for sensitization; the two-piece calendar lens comprises, by a microelectromechanical mirror, sequentially, which is the first of a pair of convex shapes The lens and the second lens having a crescent shape and a concave surface on the side of the microelectromechanical mirror, wherein the first lens has a first optical surface and a second optical surface, the first optical surface and the first optical surface In the main scanning direction, at least one optical surface is composed of a non-spherical surface, and the scanning light ray spot whose angle of reflection and the time nonlinear relationship is reflected by the MEMS mirror is converted into a scanning light ray point whose distance is linear with time. Wherein the second lens has a third optical surface and a fourth optical surface, the third optical surface and the fourth optical surface, wherein at least one optical surface is aspherical in the main scanning direction So, the scanning line of the first lens correction light condensed on the object; scanning light by the formula Li two lenses of the micro-electromechanical mirror reflection image on the object. 2. The two-piece calendar lens described in claim 1 of the patent application further satisfies the following conditions in the main scanning direction: · Λ, d3+d4 + heart 0.1 _l <06 -0.4 <-^-<-〇 .〇2 ; J(2)Y where ' ίωγ is the focal length of the first lens in the main scanning direction, the focal length of the second lens in the main scanning direction, and the angle at which the 微 is reflected by the microelectromechanical mirror, 屯θ=〇. The distance from the first lens target side optical surface to the second lens microelectromechanical mirror side optical surface, the mountain is θ = ο, the second lens thickness, and the mountain is θ = 0. The distance from the second lens target side optical surface to the target object. 31 /4 M357615 3. The two-piece lens according to item 1 of the patent application further satisfies the following conditions: 满足 0.1 in the main scanning direction Λκ.((η^ + 〇^=1)) J (\) y J (2) y < 1.2 satisfies 0.086 << 1.0 in the sub-scanning direction; where ' fi ^ Y and f ( 2 ) Y are the first lens and the second lens in the main scanning direction Focal length, fsx is the composite focal length of the two-piece twisted lens in the sub-scanning direction, fsY is the two-piece wound lens - the composite focal length in the main scanning direction, and the radius of curvature of the second optical surface in the sub-scanning direction, 11 (11 and 11) (12 is the refractive index of the first lens and the second lens respectively. 4. ^ The second embodiment of the invention is the twisted lens, wherein one of the minimum spot and the maximum spot is formed on the object. The ratio of the size satisfies: 0.4 < δ = maH) ❿ The length of any spot formed by the sweeping cat's light on the target in the direction of the main sweeping field, δ is the minimum spot on the target The maximum 5 does not satisfy ^^sa) ^Xr<0·10 32 M357615 ^ <〇.1〇; PiO ·*\〇) η ΐί where, Sa0 And sbG is the spot for scanning the light on the reflecting surface of the MEMS mirror in the target 33