TWM353923U - Transmission equipment - Google Patents

Transmission equipment Download PDF

Info

Publication number
TWM353923U
TWM353923U TW97218647U TW97218647U TWM353923U TW M353923 U TWM353923 U TW M353923U TW 97218647 U TW97218647 U TW 97218647U TW 97218647 U TW97218647 U TW 97218647U TW M353923 U TWM353923 U TW M353923U
Authority
TW
Taiwan
Prior art keywords
storage
wafer
storage box
conveying
wafers
Prior art date
Application number
TW97218647U
Other languages
Chinese (zh)
Inventor
Chi-Chen Chen
Ying-Chieh Lin
Chi-Chiang Chen
Original Assignee
Neo Solar Power Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Neo Solar Power Corp filed Critical Neo Solar Power Corp
Priority to TW97218647U priority Critical patent/TWM353923U/en
Publication of TWM353923U publication Critical patent/TWM353923U/en

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

Transmission equipment transfers a plurality of wafers and includes a conveyor and a receiving mechanism. The conveyor transfers the wafers and has an exit terminal. The receiving mechanism is disposed adjacent to the exit terminal of the conveyor. The receiving mechanism has a receiving platform and a receiving case. The receiving case is disposed on one side, which far away from the exit terminal, of the receiving platform.

Description

M353923 八、新型說明: 【新型所屬之技術領域】 本創作係關於一種輸送設備。 【先前技術】 , 於傳統產業或科技產業的領域中,常利用輪送設備以輪送各種物 件’藉以提升生產效能以及降低人力成本。 • 請參照圊1A以及圖1B所示,圖1A係為習知輸送設備1的示意 圖,圖1B係為圖1A之輸送設備1的局部放大圖。如圖所示,輸 送設備1係包含-輸送帶η以及-收集機構12,而其係以輸送晶^ (wafer)為例說明。 輪送設備1係藉由輸送帶11輸送複數晶片13,並將其輸送至收 集機構12。其中,收集機構12係包含一收集平台121以及一收集區 122。當晶片13輸送至收集平台121時,機械手臂(圖未示)係將晶 鲁片13搬運至一儲存卡匣(圖未示)。 — #觀帶11操作於正常的輸送速财,顧手臂係可將輸送帶 .π所輸送的晶片η全部搬運至儲存卡£中存放,而當需要增加產量 而加快輪送帶u的輸送速度時,輸送帶u輸送晶片13的輪送速度可 :能會大於機械手臂搬運晶片13的速度,此時則會有部分之晶片^進 入收集區122。岐人收集區122的晶片13則必須由操作人員將其放 至儲存卡g中。 另外,如圖iB所示,由於收集區122為一斜板的構造,因此, 5 M353923 當晶片η直接進人收如22日衬能會因為左抑滑域偏轉,而容 易產生破⑽問題,棚此造献率下降。因此,如何降低輸送 的損壞機率的輸送設備,實屬當前重要課題之一。 【新型内容】 有鑑於上述課題,本發明之目的為提供—種能夠降低輸送物 損壞機率的輸送設備。 為達上述目的,摘作提供—種輸送設備,其雜送複數晶片, 並包含-輸送帶以及-收納麟。輸送帶係輸送日日日片,並且有一出口 處。收納機構鄰設於輸送帶之出口處,並具有_收納平台及—收納盒。 收納盒位於收納平台遠離出口處之一側。 最 承上所述,依據本鑛之輸送設備,係藉缝納機構之收納盒, 以收納輸送帶所輸送的晶片,俾使晶片有順序地置人收納盒,藉= 低晶片的破片率。 , 【實施方式】 以下將參照相咖式,說明依據本創作較佳實施例之輸送設備。 、,請參照圖2Α所示’本創作較佳實施例之輸送設備2係包含一輪 送帶21以及一收納機構22。 4 輸送帶21係可輸送各輸件,於此,輸送帶W係崎送複數晶 片23為例說明。於本實施例中,輸送設備2係可包含複數輸送帶^, 错从輸送更多的晶片23。又,輸送帶21具有—出口處211,而收納機 M353923 構22係鄰設於輸送帶21的出口處211。 如圖2A所示,收納機構22具有一收納平台221以及一收納盒 222。收納平台221位於輸送帶21以及收納盒222之間,且收納盒 位於收納平台221遠離出口處211的一側。 如圖2B所示,本實施例之收納機構22更包含一擋止部223,其 .係可限制收納盒222的位置。擋止部223具有至少一開口 224,且開 口 224係與收納盒222的一取放部225相對設置,以利於操作人員取 籲放收納盒222。於本實施例中’擔止部222具有複數開口 224。 本實施例之輸送設備2更包含一機械手臂(圖未示),其係鄰設於 收納機構22。當輸送帶21輸送晶片23至收納平台221時,機械手臂 係將晶片23搬運至一儲存卡匣(圖未示當提高輸送帶21的輸送速 度時’其係可輸送較多的晶片23,然而,由於機械手臂由收納平台221 將晶片23搬運至卡匣的速度為固定,因此,會有部分的晶片23被輸 送而置於收納盒222中。 • 本實施例之輸送設備2更包含一緩衝元件226,,其係設置於收納 ,盒222中。當晶片23被輸送而置於收納盒222時,係可藉由緩衝元件 226降低晶片23與收納盒222之間碰觸的力道,以降低晶片a的破 片率。 另外,收納盒222的側邊222a具有物件區隔的效果,俾使各晶片 23置於相對應的收納盒222中。藉此,本實施例係利用收納盒222來 收納機械手臂來不及搬運的晶片23,進而降低晶片23損毁的機率。 經由實際統計,本實施例之輸送設備2係可降低20%的破片率。 7 M353923 另外,如圖2A所示,收納盒222與收納平台221間具有一夾角 Θ】。請參照圖3所示,於本實施例中,係可藉由調整收納盒與收 納平台221間的夾角<9〗之角度(例如使角度變大),而使得晶片^能 平滑地置入收納盒222中,進而降低晶片23的破片率。 综上所述,依據本創作之輸送設備,係藉由於收納機構之收納盒 收納晶片,俾使晶片有順序地置入收納盒,藉以降低晶片的破片率。 另外,藉_整收納盒與㈣平台間的肢,俾使晶片能較平滑地置 #入收納盒中。經由實際統計,本實施例之輸送設備係可降低2〇%的破 片率。 以上所述僅為舉雕,而料關性者。任何未脫離本創作之精 神與範嘴’而對魏行之粒修改更,均挑含於後附之申請專 利範圍中。 【圖式簡單說明】 • 圖1A以及圖1B為習知輸送設備的示意圖; ® 2A以及圖2B為本創作較佳實施例之輸送設備的示意圖;以及 目3為本創作較佳實施例之輸送設備㈣化態樣圖。 【主要元件符號說明】 1、2:輸送設備 11 ' 21 ·輸送帶 12、22 :收納機構 M353923 13、23 :晶片 121、221 :收納平台 122 :收集區 211 :出口處 222 :收納盒 223 :擋止部 224 :開口 t 225 :取放部M353923 VIII. New description: [New technical field] This creation is about a conveying device. [Prior Art] In the field of traditional industries or technology industries, it is common to use wheeling equipment to rotate various objects' to improve production efficiency and reduce labor costs. • Referring to 圊1A and FIG. 1B, FIG. 1A is a schematic view of a conventional conveying apparatus 1, and FIG. 1B is a partial enlarged view of the conveying apparatus 1 of FIG. 1A. As shown, the transport apparatus 1 includes a conveyor belt η and a collecting mechanism 12, which are exemplified by a transport wafer. The transporting apparatus 1 transports a plurality of wafers 13 by a conveyor belt 11 and conveys them to the collecting mechanism 12. The collection mechanism 12 includes a collection platform 121 and a collection area 122. When the wafer 13 is transported to the collection platform 121, a robotic arm (not shown) transports the wafer 13 to a storage cassette (not shown). — #观带11 operates in normal transportation speed, and the arm system can transport all the wafers η conveyed by the conveyor belt.π to the storage card, and accelerate the conveying speed of the belt u when it is necessary to increase the output. At this time, the conveying speed of the conveyor belt u to transport the wafer 13 can be greater than the speed at which the robot arm transports the wafer 13, and at this time, a portion of the wafers enter the collection area 122. The wafer 13 of the deaf collection area 122 must be placed in the memory card g by the operator. In addition, as shown in FIG. 1B, since the collecting area 122 is a sloping plate structure, when the wafer η is directly inserted into the human body, the lining can be broken due to the left sliding domain, and the problem of breakage (10) is easily caused. The shed has a decline in the rate of contribution. Therefore, how to reduce the probability of transport damage is one of the current important issues. [New Content] In view of the above problems, an object of the present invention is to provide a conveying apparatus capable of reducing the probability of damage of a conveyed object. To achieve the above object, an apparatus for conveying a plurality of wafers, including a conveyor belt and a storage lining, is provided. The conveyor belt transports the day and day, and has an exit. The storage mechanism is adjacent to the exit of the conveyor belt, and has a storage platform and a storage box. The storage box is located on one side of the storage platform away from the exit. In the above, according to the conveying equipment of the mine, the storage box of the sewing mechanism is used to store the wafer conveyed by the conveyor belt, so that the wafers are sequentially placed in the storage box, and the fragmentation rate of the low wafer is low. [Embodiment] Hereinafter, a conveying apparatus according to a preferred embodiment of the present invention will be described with reference to a phase coffee type. Referring to Fig. 2A, the transport apparatus 2 of the preferred embodiment of the present invention comprises a transport belt 21 and a storage mechanism 22. 4 The conveyor belt 21 is capable of transporting each of the transport members. Here, the conveyor belt W is an example of a plurality of wafers 23. In the present embodiment, the transport apparatus 2 can include a plurality of transport belts, and more wafers 23 are transported from the wrong side. Further, the conveyor belt 21 has an outlet 211, and the storage machine M353923 22 is adjacent to the outlet 211 of the conveyor belt 21. As shown in FIG. 2A, the storage mechanism 22 has a storage platform 221 and a storage box 222. The storage platform 221 is located between the conveyor belt 21 and the storage box 222, and the storage box is located on the side of the storage platform 221 away from the outlet 211. As shown in Fig. 2B, the storage mechanism 22 of the present embodiment further includes a stopper portion 223 for restricting the position of the storage case 222. The stopper portion 223 has at least one opening 224, and the opening 224 is disposed opposite to a pick-and-place portion 225 of the storage box 222 to facilitate the operator to access the storage box 222. In the present embodiment, the holding portion 222 has a plurality of openings 224. The conveying device 2 of the present embodiment further includes a robot arm (not shown) which is disposed adjacent to the storage mechanism 22. When the conveyor belt 21 transports the wafer 23 to the storage platform 221, the robot arm transports the wafer 23 to a storage cassette (not shown when the conveying speed of the conveyor belt 21 is increased), which can transport more wafers 23, however Since the speed at which the robot arm transports the wafer 23 to the cassette by the storage platform 221 is fixed, a part of the wafer 23 is transported and placed in the storage case 222. • The transport apparatus 2 of the present embodiment further includes a buffer The component 226 is disposed in the housing 222. When the wafer 23 is transported and placed in the storage case 222, the force contact between the wafer 23 and the storage case 222 can be reduced by the cushioning member 226 to reduce the force. The fragmentation rate of the wafer a. The side 222a of the storage case 222 has an effect of partitioning the objects, and the wafers 23 are placed in the corresponding storage cases 222. This embodiment is stored by the storage case 222. The robot arm does not have time to transport the wafer 23, thereby reducing the probability of damage of the wafer 23. By actual statistics, the transport apparatus 2 of the present embodiment can reduce the fragmentation rate by 20%. 7 M353923 In addition, as shown in FIG. 2A, the storage box 222 and Receive The center platform 221 has an angle Θ. As shown in FIG. 3, in the embodiment, the angle between the storage box and the storage platform 221 can be adjusted (for example, the angle is increased). Therefore, the wafer can be smoothly placed in the storage case 222, thereby reducing the fragmentation rate of the wafer 23. In summary, according to the creation of the transport device, the wafer is stored by the storage box of the storage mechanism. The storage box is sequentially placed to reduce the fragmentation rate of the wafer. In addition, the wafer between the storage box and the (four) platform can be used to smoothly place the wafer into the storage box. Through actual statistics, the present embodiment The conveying equipment can reduce the fragmentation rate by 2〇%. The above description is only for carving, but the material is kind. Anything that has not deviated from the spirit and vanity of this creation and the modification of Wei Xing's grain is included in the attachment. BRIEF DESCRIPTION OF THE DRAWINGS [FIG. 1A and FIG. 1B are schematic views of a conventional conveying apparatus; FIG. 2A and FIG. 2B are schematic views of a conveying apparatus of a preferred embodiment; Loss of the preferred embodiment Sending device (4) Sample image. [Main component symbol description] 1, 2: Conveying device 11 ' 21 · Conveyor belt 12, 22: Storage mechanism M353923 13, 23: Wafer 121, 221: Storage platform 122: Collection area 211: Exit 222: storage box 223: stopper portion 224: opening t 225: pick-and-place portion

Claims (1)

M353923 九、申請專利範圍: 1、一種輪送設備,係輸送複數晶片,包含: —輸送帶,係輸送該等晶片,並具有一出口處;以及 —收納機構,鄰設於該輸送帶之該出口處,並具有一收納平台及一 收納盒,該收納盒位於該收納平台遠離該出口處之一側。 、如申請專利範圍第1項所述之輸送設備,其中該收納機構更具有一 擋止部以限制該收納盒之位置。 3 I 如申请專利範圍第2項所述之輸送設備’其中該擋止部具有一開 口’其與該收納盒之一取放部相對設置。 4、 如申請專利範圍第1項所述之輸送設備,其中該收納盒與該收納平 α間具有一角度。 5、 如申請專利範圍第1項所述之輸送設備,更包含: —機械手臂’鄰設於該收納機構,而由該收納平台將部分之該等晶 片移動至一儲存卡匣。M353923 IX. Patent application scope: 1. A wheeling device for conveying a plurality of wafers, comprising: a conveyor belt for conveying the wafers and having an outlet; and a storage mechanism adjacent to the conveyor belt The outlet has a storage platform and a storage box, and the storage box is located at one side of the storage platform away from the outlet. The conveying device of claim 1, wherein the storage mechanism further has a stopper to limit the position of the storage box. 3 I The conveying device as described in claim 2, wherein the stopper has an opening which is disposed opposite to a pick-and-place portion of the storage box. 4. The conveying apparatus of claim 1, wherein the storage box has an angle with the storage flat α. 5. The conveying apparatus of claim 1, further comprising: - a robot arm adjacent to the storage mechanism, wherein the storage platform moves a portion of the wafers to a storage cassette.
TW97218647U 2008-10-17 2008-10-17 Transmission equipment TWM353923U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW97218647U TWM353923U (en) 2008-10-17 2008-10-17 Transmission equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW97218647U TWM353923U (en) 2008-10-17 2008-10-17 Transmission equipment

Publications (1)

Publication Number Publication Date
TWM353923U true TWM353923U (en) 2009-04-01

Family

ID=44376463

Family Applications (1)

Application Number Title Priority Date Filing Date
TW97218647U TWM353923U (en) 2008-10-17 2008-10-17 Transmission equipment

Country Status (1)

Country Link
TW (1) TWM353923U (en)

Similar Documents

Publication Publication Date Title
KR101695434B1 (en) System and methods for handling wafers
TW201715876A (en) Medium discharge device and image reading apparatus
WO2007008677A3 (en) Load port module
JP2008222346A (en) Suspended type track conveying truck and conveying system
TW200807605A (en) Conveying system
KR101728935B1 (en) Magnetic annealing apparatus
TW200423283A (en) Producing object connecting device and carrying system therewith
JP2007015026A (en) Manipulator for carrying article
TWM353923U (en) Transmission equipment
TWI616963B (en) Vibration apparatus for test handler
TW200418699A (en) Catcher and operation method
JPWO2015141793A1 (en) Substrate processing apparatus, semiconductor device manufacturing method, and program
TW201843085A (en) Taping apparatus
JP6522476B2 (en) Transport mechanism
KR102165875B1 (en) Leadframe loading machine
US20180242481A1 (en) Apparatus for securing electronic devices on a carrier during transportation
JP5401210B2 (en) Wafer frame transfer apparatus and transfer method
US5669508A (en) Pod carrier function expansion by adding a fixture
JPH0936215A (en) Carrier case
TWI775650B (en) Strip fasten device
KR20140117000A (en) Appratus for transfering substrate
KR102372514B1 (en) Foup fixing device for fims system
TWI714472B (en) Wafer carrier transfer system
CN116022411A (en) Binding device, binding system and binding disc for binding band storage
KR20160104601A (en) Magnetic annealing apparatus

Legal Events

Date Code Title Description
MK4K Expiration of patent term of a granted utility model