TWM353575U - The square matrix type piezoelectric motor - Google Patents

The square matrix type piezoelectric motor Download PDF

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Publication number
TWM353575U
TWM353575U TW97221612U TW97221612U TWM353575U TW M353575 U TWM353575 U TW M353575U TW 97221612 U TW97221612 U TW 97221612U TW 97221612 U TW97221612 U TW 97221612U TW M353575 U TWM353575 U TW M353575U
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TW
Taiwan
Prior art keywords
square
piezoelectric
piezoelectric motor
square base
motor
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TW97221612U
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Chinese (zh)
Inventor
Jwo-Ming Jou
Ming-Yuen Huang
Ming-Hsun Tsai
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Jwo-Ming Jou
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Priority to TW97221612U priority Critical patent/TWM353575U/en
Publication of TWM353575U publication Critical patent/TWM353575U/en

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Abstract

This creation is a kind of square matrix piezoelectric motor, it is by screw, spacer, square base and piezoelectric actuating component makes up. Its characteristic lies in: Screw and spacer this lie square base, but piezoelectric actuating component is put side under square base. Among them this square base has punch, in order to facilitate piezoelectric actuating component, screw and spacer is worn and has and can be locked on square base. While operating, so long as construct piezoelectric actuating component with driving voltage and resonance frequency, can let the square matrix piezoelectric motor fast movement on the platform. Keywords: screw, screw, spacer, square base, piezoelectric actuating component, platform.

Description

M353575 八、新型說明: 【新型所屬之技術領域】 本創作係關於一種壓電馬達,尤指一種方陣式壓電馬達。 【先前技術】 白知技術中,可以在線性平台上快速移動或撥弄線性滑軌移動之線性 ^ -¾馬達,其在結構上的設計日趨簡易。例如早期的朽形(兀形)壓電馬達 • [1]’其在Pl形(π形)的金屬結構上分別貼上兩片壓電陶瓷片。操作時,只 要在兩片壓電陶竟片±施以驅動電壓(v”c〇s(〇t 〇r/and Vppsi⑽t)與共振頻 率’即可碾Pi形〇形)壓電馬達在線性平台上快速移動或撥弄線性滑轨移 動。該種Pi形(兀形则馬達的優點就是結構簡單、製造成本低;而缺點就 是1占貼壓電陶“較麻煩’如果黏貼不夠確實或黏合強度不夠,則會產生 阻Μ共振解不—的情事以及壓電喊片有脫落或剝落之疑慮。另外的 缺點是,單層壓電陶以所構成的壓電馬達,其致動力與負載能力也較為 為了改善致動力與1載能力从的缺點,另-種Η形㈣壓電馬達 則在P1形(π形)的金屬結構上嵌入積層式壓電陶曼片,藉此來提高壓 7的致物貞輸。機,罐爾嘯綱 3壓崎魏綱軸咖,其纖力碰不容易。如 擠破過低,則其共_爾現;預應力過高,繼壓電咖 再者, 種蟹形壓電馬達[3],其外形如同螃蟹 一般,其在门形金屬基 5 M353575 座的45Q)上分別雜上兩支螯,該 所組成;其操作方式轉動相轉、f p.打 積層式的壓電陶究片 點是製造成本☆厂 4Pl形㈣)壓電馬達—致。惟相對缺 ^本…㈣陶^黏貼與預應力調整不易,而且其致 載此力沒有明_增益性。 。員 種方形壓電馬_,其伽四支壓電致動元件、方形基座與耐 • ΓΓ 其特徵在於:該厂堅電致動元件係由中空長圓柱形之壓電陶 .尤所製成’且絲電陶究的兩面上做電極塗佈。另外,其四支屢電致動元 _件的底部分職設有耐磨元件’其操作方式與勒原理與前述壓電馬達一 致。該方_電馬達的優點是致動力與負載能力較高,惟其姆缺點是中 空圓長柱形之壓電喊燒結與電極塗佈不P且中空圓長柱形之壓電陶竞 與耐磨元件的組裝方式略顯煩瑣。 本創作係針對上述習用壓電馬達仍然有其相對之缺點,而設計出一種 具有結構簡單、負載能力高、製造容易與組裝便捷等功效之壓電馬達來。 參考資料 • [1] Takehiro Takano, Yoshiro Tomikawa, Masatoshi Yaginuma and ToshiharuM353575 Eight, new description: [New technology field] This creation is about a piezoelectric motor, especially a square matrix piezoelectric motor. [Prior Art] In the white technology, the linear motion of the linear slide can be quickly moved or manipulated on a linear platform, and the structural design is becoming more and more simple. For example, the early die-shaped (兀-shaped) piezoelectric motor • [1]' has two piezoelectric ceramic sheets attached to the P1-shaped (π-shaped) metal structure. In operation, as long as the two piezoelectric ceramics are applied with a driving voltage (v"c〇s(〇t 〇r/and Vppsi(10)t) and the resonant frequency 'can be crushed Pi-shaped) piezoelectric motor on a linear platform Quickly move or fiddle with the linear slide movement. This kind of Pi shape (the shape of the motor is simple structure and low manufacturing cost; but the disadvantage is that 1 sticks to the piezoelectric pottery "more troublesome" if the adhesive is not enough or the adhesive strength is not enough , there will be a situation in which the resonance of the resonance is not solved, and the fact that the piezoelectric flashing film is detached or peeled off. The other disadvantage is that the piezoelectric motor composed of the single-layer piezoelectric ceramic has a higher driving force and load capacity. In order to improve the shortcomings of the actuation force and the one-load capability, another type of Η-shaped (four) piezoelectric motor is embedded in the P1-shaped (π-shaped) metal structure to laminate the piezoelectric ceramics, thereby increasing the pressure 7 The object is lost. The machine, the tank of the squadron, the pressure of the Weiqi, is not easy to touch. If the squeezing is too low, then it is a total of _ _ _ now; the pre-stress is too high, following the piezoelectric coffee, A crab-shaped piezoelectric motor [3], which has the same shape as a crab, and is in the shape of a gate-shaped metal base 5 M353575 5Q) is composed of two kinds of chelate, which are composed of the same; the operation mode is reversed, and f p. The piezoelectric ceramics of the laminated layer is the manufacturing cost ☆ factory 4Pl (four) piezoelectric motor. However, the relative lack of this ... (four) Tao ^ paste and prestress adjustment is not easy, and its load is not clear _ gain. . The member of the square piezoelectric horse _, its gamma four piezoelectric actuators, square base and resistance ΓΓ ΓΓ is characterized by: the plant's electro-active components are made of hollow long cylindrical piezoelectric ceramics. Electrode coating was performed on both sides of the silk fabric. In addition, the bottom part of the four electric actuating elements is provided with a wear-resistant element', and its operation and principle are consistent with the aforementioned piezoelectric motor. The advantage of the electric motor is that the driving force and the load capacity are high, but the disadvantage of the electric motor is that the hollow circular long cylindrical piezoelectric shouting sintering and the electrode coating are not P and the hollow round long cylindrical piezoelectric pottery and wear resistance The assembly of the components is a bit cumbersome. In view of the above-mentioned conventional piezoelectric motor, the present invention still has its relative disadvantages, and designs a piezoelectric motor having the advantages of simple structure, high load capacity, easy manufacture and convenient assembly. References • [1] Takehiro Takano, Yoshiro Tomikawa, Masatoshi Yaginuma and Toshiharu

Ogasawara, ,5A Linearly Moving Ultrasonic Motor Using a LongitudinalOgasawara, ,5A Linearly Moving Ultrasonic Motor Using a Longitudinal

And Bending Multi-Mode Vibrator”,Applications of Ferroelectrics, IEEE 7th International Symposium, pp.521-524 (June 1990).And Bending Multi-Mode Vibrator", Applications of Ferroelectrics, IEEE 7th International Symposium, pp.521-524 (June 1990).

[2] Tomoki Funakubo, Toshiharu Tsubata,Yoshihisa Taniguchi and Kazuhiro Kumei, "Ultrasonic Linear Motor Using Multilayer Piezoelectric Actuators55, Jpn. J. Appl. Phys., Vol. 34, Part 1, NO. 5B, pp.2756-2759 (May 1995).[2] Tomoki Funakubo, Toshiharu Tsubata, Yoshihisa Taniguchi and Kazuhiro Kumei, "Ultrasonic Linear Motor Using Multilayer Piezoelectric Actuators55, Jpn. J. Appl. Phys., Vol. 34, Part 1, NO. 5B, pp.2756-2759 (May 1995).

[3] Takaaki Ishii, Kentaro Nakamura, Sadayuki Ueha and Kazumasa Ohnishil Precision, ’’ A Wear Evaluation Chart of Friction Materials Used for Ultrasonic Motors^, IEEE Ultrasonics Symposium, pp.699-702 (1995).[3] Takaaki Ishii, Kentaro Nakamura, Sadayuki Ueha and Kazumasa Ohnishil Precision, ’’ A Wear Evaluation Chart of Friction Materials Used for Ultrasonic Motors^, IEEE Ultrasonics Symposium, pp. 699-702 (1995).

[4] Hiroyuki Hashiguchi, Yoshiya Egashira, Hiroyuki Furukawa, Taishi Endo, Tetsuya Kosaka,Koji Kosaka, Kiyohiko Uozum, Masayuki Watanabe, Takahiro Yamakawa, Noboru Miyata, Akira Nakada, Hiroshi Kubota and[4] Hiroyuki Hashiguchi, Yoshiya Egashira, Hiroyuki Furukawa, Taishi Endo, Tetsuya Kosaka, Koji Kosaka, Kiyohiko Uozum, Masayuki Watanabe, Takahiro Yamakawa, Noboru Miyata, Akira Nakada, Hiroshi Kubota and

Tadahiro Ohmi,“Highly Reliable Piezoelectric Actuator for Precision Stage System”,Jpn. J. Appl. Phys., Vol. 44, No. 5A,pp.3307-3312 (May 2005). M353575 【新型内容】 本創作主要目的是在於提供一種結構簡單之方陣式壓電馬達。 本創作另-目的是在於提供—種貞載能力高之方陣式壓電馬達。 本創作再目的疋在於提供一種製造容易之方陣式壓電馬達。 本創作取後目的是在於提供—種^裝便捷之方陣式壓電馬達;而該壓 .電馬達除了可以在平台上快速的移動之外,當其裝設齒輪後可以緊貼著排 _ 齒在平台上快速的移動。 為達成上述目的,本創作提供一糧方陣式堡電馬達,其係由螺絲、墊 片、方形基座錢電致動元件所組成;其特徵在於:該螺絲與墊片位於方 形基座上方’而壓電_元件職於方形基座之下方;射該方形基錢 有穿孔,以方賴電軸元件、螺絲與料穿設且可以顧在方形基座上· ^時’只魏«致航件施轉動電麵共振解,啊讓方陣式壓 笔馬達在平台上快速的移動。 如前職之神讀電喊,其巾,财職棘有 ^中四職錄物仏嶋,她物動元^ 片穿㈣;而崎輸中間之穿孔,_ w重物/ 如前所述之方陣式壓電馬達,i 陶瓷片$ /、致動元件係由頭部、壓電 是片與腿部所組成,其中壓電陶刎之極化方 位如前所财轉崎’其中,簡物爾—四Γ。、 Ζ形基座四個角落之穿孔被螺絲與墊片鎖固於方形基釘方 —支壓電致觸可物爛㈣㈣轉,㈣控= M353575 - 式壓電馬達之移動速度與方向。 如前所述之方陣式壓電馬達’其中,該壓電致動元件之腿部可以分別 套設齒輪’ _齒輪鮮貼於排#上;藉此讓方陣式壓電馬達在平台上移 動以及控制其移動位置。 綜上所述’本創作所述之方陣式壓電馬達已相對地克服習用裝置之缺 . 失’實具產業上之利用性與實用性。 Φ 【實施方式】 以下透過配合第-圖至第五圖,來說明本創作之组成與實施方式,期 使該技術賴者可㈣地麵摘作之主補徵及欲達成之功效或目的。 本創作係為-種方陣式壓電馬達’其係由螺絲(、塾片2、方形基座3Tadahiro Ohmi, "Highly Reliable Piezoelectric Actuator for Precision Stage System", Jpn. J. Appl. Phys., Vol. 44, No. 5A, pp. 3307-3312 (May 2005). M353575 [New Content] The main purpose of this creation It is to provide a square matrix piezoelectric motor with a simple structure. The purpose of this creation is to provide a square-array piezoelectric motor with high load carrying capacity. A further object of the present invention is to provide a square-array piezoelectric motor that is easy to manufacture. The purpose of this creation is to provide a square-type piezoelectric motor that is convenient and convenient; and the pressure motor can be quickly moved on the platform, and when it is equipped with gears, it can be closely attached to the row _ teeth. Move quickly on the platform. In order to achieve the above objectives, the present invention provides a grain square array electric motor, which is composed of a screw, a gasket and a square base money electric actuating element; the screw and the gasket are located above the square base' The piezoelectric element is placed below the square base; the square base money is perforated, and the square shaft element, screw and material are worn and can be placed on the square base. The rotating electric resonance solution is used to make the square matrix pen motor move quickly on the platform. For example, the predecessor of the gods read the electric shouting, its towel, the financial position has a ^ middle four records, her physical movement ^ piece wear (four); and the bottom of the perfuse, _ w heavy object / as mentioned The square-array piezoelectric motor, i ceramic piece $ /, the actuating element is composed of the head, the piezoelectric piece and the leg part, wherein the polarization orientation of the piezoelectric ceramic pot is as before the former物尔—四Γ. The perforations in the four corners of the 基座-shaped base are locked by the screws and the spacers on the square base nails. The piezoelectric touches can be rotted (4) (four), (4) control = M353575 - the moving speed and direction of the piezoelectric motor. a square matrix piezoelectric motor as described above, wherein the legs of the piezoelectric actuator element can be respectively sleeved with gears _ gears freshly attached to the row #; thereby allowing the square matrix piezoelectric motor to move on the platform and Control where it moves. In summary, the square-array piezoelectric motor described in the present invention has relatively overcome the shortcomings of the conventional device. The utility model has the industrial applicability and practicability. Φ [Embodiment] The following is a description of the composition and implementation of this creation by cooperating with the first to fifth figures, so that the technology can be used to (4) the main replenishment of the ground and the effect or purpose to be achieved. This creation is a square-array piezoelectric motor. It is made of screws (, cymbals 2, square base 3

與壓電致動元件4雜成;其概在於:該獅丨熱片2位於方形基座3 上方,而壓電致動元件4則置於方形基座3之下方;射該方形基座3設 有穿孔队32),以方便壓電致航件4、螺絲丨與㈣2穿設且可以_ 在方形基座3上;操作時’只要_致動元件4施以驅動電樹 Vp.pSi—與共振頻率(阻抗趨近於零或阻抗最低之鮮,該共振頻率可以 透過阻抗分析儀來協助尋找),即可讓方陣式壓電馬達在平台5上快速的移 如前所述之方陣式壓電馬達,其中,該方形基座3設有至少五個穿孔(31, 32)以上,其巾四個穿孔&分別位於謂基座3四_落,其係供壓電致 動元件4、螺絲i與墊片2穿設之用;而位於方形M 3中間之穿孔Μ, 則是用以固定重物(圖未示)。 8 M353575 士月j所述之方陣式壓電馬達,其中,該 壓電陶:光片42、導電片43 _M4 w2動辑4係由頭部41' ⑽兩兩相對。,、腿機斤、、且成’其中壓電陶曼片幻之極化方 如前所述之方陣式屢電馬達,其中,觸電致動元件卜丘 別位於方形基座3四個角落之穿孔32被螺絲丨與 林^ 下方;I中备一±疏+, 項u於万形基座3 此來”方^厂 件4可以施以不同的驅動«與共振頻轉 此认制方陣式壓電馬達之移動速度與方向。 料精 分別===^!馬達’其中’該壓電致動元件4之腿部”以 平…嫩姻2=峨7上;||此物她物 综上所述,本創作利用螺絲卜整片2 所組成之辦式壓電$達.έ人* 々座3 電致動元件4 馬達,組合日守只要將螺絲丨 電致動元件4鎖固在方形基座3上:操作時’ 2,即可將壓 驅動電壓與丘搪稍盅,卩 要對辽电致動兀件4施以 只要麵電致動元件4 2讓方陣式屋電馬達在平台5上快速的移動;又, 即可讓方陣概獅平T上=齒輪6,且該齒輪6緊貼峨^ 上之利用性,‘而經查無相關襄置或前案 ㈣位置,已付合產業 而本創作所構成之主要# y 付°利申請要件令之新穎性; 傅蚊主要技*與特徵也 專利申請要种之進步性 、月教增益性,亦符合 ㈣委骑予简型專利為荷f 9 M353575 【圖式簡單說明】 第一圖:係本創作之實施樣態; 第二圖:係本創作之組立圖; 第三圖:係本創作壓電致動元件之侧視圖; 第四圖:係本創作之爆炸圖; 第五圖:係本創作之可行變化例。 【主要元件符號說明】Mixed with the piezoelectric actuator element 4; the general: the lion's hot sheet 2 is located above the square base 3, and the piezoelectric actuator 4 is placed below the square base 3; the square base 3 is shot A perforating team 32) is provided to facilitate the piezoelectric traversing member 4, the screw cymbal and the (4) 2 to be worn and can be _ on the square base 3; during operation, as long as the operative element 4 is driven by the electric tree Vp.pSi- With the resonant frequency (impedance approaching zero or the lowest impedance, the resonant frequency can be assisted by the impedance analyzer), the square matrix piezoelectric motor can be quickly moved on the platform 5 as described above. a piezoelectric motor, wherein the square base 3 is provided with at least five perforations (31, 32) or more, and the four perforations of the towel are respectively located on the base 3, which is provided for the piezoelectric actuator element 4. The screw i and the spacer 2 are used for piercing; and the perforated crucible located in the middle of the square M 3 is for fixing a heavy object (not shown). 8 M353575 The square-array piezoelectric motor described in the above, wherein the piezoelectric ceramic: the optical sheet 42, the conductive sheet 43_M4 w2, and the movable portion 4 are opposed to each other by the head 41' (10). , the leg machine jin, and into the 'the piezoelectric Taoman illusion of the polarization of the square array of electric motors as mentioned above, wherein the electric shock-actuating element Buqiu is located in the four corners of the square base 3 The perforation 32 is screwed to the bottom of the forest ^; in the I, the one is ± sparse +, the item u is in the pedestal of the base 3. The square piece 4 can be applied with different driving « and the resonant frequency is transferred to this square matrix. The moving speed and direction of the piezoelectric motor. The material is respectively ===^! The motor 'where the leg of the piezoelectric actuating element 4' is flat...the tender marriage 2=峨7;||this thing she comprehensive As mentioned above, this creation utilizes the whole type of the piezoelectric piece of the screw type 2, which is composed of the two pieces of the screw, and the electric actuator 4 motor. The combination of the day and the keeper is only to lock the screw 丨 electric actuating element 4 Square base 3: When operating, '2, the pressure driving voltage and the hillock can be slightly smashed, and the Liaodian actuating element 4 is applied as long as the surface electric actuating element 4 2 makes the square array electric motor The platform 5 moves quickly; in addition, the square lion is flat on the T=gear 6, and the gear 6 is close to the usability of the ,^, and the relevant position or the previous case (four) position has been checked. pay The main reason for the combination of the creation and the creation of this creation is the novelty of the application requirements of the application; the main skills and characteristics of Fu Mo, and the progressiveness of the patent application, the reward of the monthly education, and also the (4) riding to the simple type The patent is a load f 9 M353575 [Simple description of the drawing] The first picture: the implementation form of the creation; the second picture: the group diagram of the creation; The third picture: the side view of the piezoelectric actuator element The fourth picture: the explosion map of the creation; the fifth picture: a feasible variation of the creation. [Main component symbol description]

1 螺絲 2 墊片 3 基座 31 穿孔 32 穿孔 4 壓電致動元件 41 頭部 42 壓電陶瓷片 421 極化方向 43 導電片 44 腿部 5 平台 6 齒輪 7 排齒 101 Screw 2 Gasket 3 Base 31 Perforation 32 Perforation 4 Piezoelectric actuating element 41 Head 42 Piezoelectric ceramic piece 421 Polarization direction 43 Conductive piece 44 Leg 5 Platform 6 Gear 7 Row of teeth 10

Claims (1)

M353575 九、申請專利範圍 卜種方陣式«馬達,其係由螺絲、糾、方 組成;其特徵在於:、座·電致動元件所 娜絲與墊片位於方形 則置於方形基座之下方,·立中 上方,而屬電致動元件 件、螺_墊片穿 X 穿孔,財便壓電 累U牙故且可以鎖固在方形基座上;操作時 動元件施以驅動紐與共 〃伍電致 的移動。 羊即了濃方陣式壓電馬達在平台上快速 2.^請專利範圍第1項所述之方陣式壓電馬達,其中,該方形基座設有 ”五個穿孔以上,射_穿孔分雜於方形基心個㈣,其係供 i電致動元件、螺絲與塾片穿 ' 是用以固定重物。之用,而位於方形基座中間之穿孔,則 3.如申請專利範圍第1項所述之方陣式壓電馬達,其中,《電致動元件 係由頭部、壓電陶竞片、導電片與腿部所組成,其中厂堅電陶竟片之極化 方向兩兩相對D 4·如申請專侧第丨項所述之方陣式壓電馬達,其中,該麵致動元件 —共四支,分難於方形基座四則落之穿孔被獅與料_於方形 方〃中每{壓電致動元件可以施以不同的驅動電壓與共振頻 率,藉此來控制方陣式壓電馬達之移動速度與方向。 5’如U利關第丨項所狀方陣式壓電馬達,其巾,該壓電致動元件 之腿部可以分別套設齒輪,而該齒輪則緊貼於排齒上;藉此讓方陣式壓 電馬達在平台上移動以及控制其移動位置。M353575 Nine, the scope of application for patents, the square array «motor, which consists of screws, corrections, and squares; its characteristics are: seat, electric actuating element, the wire and the gasket are placed in the square and placed under the square base. ,······························································································· The movement of electricity. The sheep is a concentrated square piezoelectric motor fast on the platform. 2. Please refer to the square matrix piezoelectric motor described in the first item of the patent scope, wherein the square base is provided with "five perforations or more, and the perforation is perforated. In the square base (4), it is used for i electric actuating components, screws and cymbals are used to fix heavy objects. For the perforation in the middle of the square base, 3. For patent application scope 1 The square-array piezoelectric motor described in the item, wherein the electric actuating component is composed of a head, a piezoelectric ceramic piece, a conductive piece and a leg part, wherein the polarization direction of the factory-hardened ceramic tile is opposite to each other. D 4· The square-array piezoelectric motor described in the application of the above-mentioned item, wherein the surface actuating element—four in total, is difficult to be squared, and the four perforations are pierced by the lion and the material _ in the square square Each {piezo actuator element can be applied with different driving voltages and resonant frequencies, thereby controlling the moving speed and direction of the square matrix piezoelectric motor. 5', as in the case of the U-turn, the square-array piezoelectric motor, The towel, the leg of the piezoelectric actuating element can be separately sleeved, and the gear is closely attached On the teeth; thereby allowing the square matrix piezoelectric motor to move on the platform and control its moving position.
TW97221612U 2008-12-01 2008-12-01 The square matrix type piezoelectric motor TWM353575U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103296194A (en) * 2012-03-05 2013-09-11 中央研究院 piezoelectric actuator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103296194A (en) * 2012-03-05 2013-09-11 中央研究院 piezoelectric actuator
US9190938B2 (en) 2012-03-05 2015-11-17 Academia Sinica Piezoelectric actuating device

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