M351352 八、新型說明： 【新型所屬之技術領域】 …、t創作係關於—種相機台，特別係關於-種具.封閉 測§式環境之針测機台。 【先前技術】 圖1例示一般習知之針_台1〇〇。以一般習知之針測 機台100對待測元件102上元件進行電性測試時，待測元件 二、夹盤總成！G4及測試探針（未“）均曝露於外在的 ^下。^此習知之針測機台_無適當之«，㈣ 於在進打低電流與高頻之測試時，遭受電磁干擾（ Electr〇magnetic In^ence ； EMI) ^ ± M ^ 〇 __ ，著測試需求絲電流及高頻更進—步發展時，更顯出 習知之針測機台100無法應付未來之需求。 目韵一般產業界面臨EjyQ之彻·、、+及# 田之外置~爱β 之做広係將—具EMI屏蔽效 2對:^ 件102與夹盤總成104，藉以隔絕外界 。之衫響。然而，為因應針測系統或夾盤油成驅 動裝置間=連結，需於外罩上設置—些開孔予以配:，且 此等之要长……段以確保贿屏蔽效果。然 此寻之要求使機構之設計與安襄複雜化，並增加 保養之困難’況且開孔之接缝處雖有密封，防二 不足之虞。更甚者，電性測試期間，外罩外 相對=者，需加上具彈性機制之包覆機構，才=! 全之屏崎，㈣嶋⑽^= M351352 度’更提高機台之成本。 綜上所述，隨著測試靈$彡 而衣在低電流及高頻發展，針測 產業界急需一種設計簡單並且完 、 機台。 、凡王之刪屏敵效果之針剛 【新型内容】 本創作提供—種設計簡單並具完全之麵屏蔽效果之 針測機台。 本創作一實施例之封閉式針測機台，包含-用以支捭 -待測元件之夹盤總成、一用以持固一用於接觸寺 件之探針之支持裝置以及一内:部包含―容置空間^^ 其中該央盤總成與該支持裝置設置於該容置空間中。 本創作另-實施例之封閉式針測機台，包含—用 持一待測元件之夹盤總成、— 叉 用以持固一用於接觸該 2件之探針且設置於一導引件上之針座以及一内部包含二 容置空間之殼體，其中該央盤總成、該針座 置於該容置空間中。 千故 上文已相當廣泛地概述本創作之技術特徵 使下文之本創作詳細描述得以獲得較佳瞭解。太俾 之申請專利範圍標的之1它技 創作 匕技#特被及優點將描述於 二本創作所屬技術領域中具有通常知識者應瞭解，可 谷易地利用下文揭示之概念與特定實施例可作田 計其它結構或製程而杂盥士 、' >改或設 枉而貝現與本創作相同之目的。 屬技術領域中具有通常知識者亦應瞭解 ^作所 法脫離後附之申請專利範圍所界定之本創作的;S建構無 j #的精砷和範圍 M351352 【實施方式】 本創作提供一種封閉式機台，其包含—可提供^^^^屏 蔽之殼體，使得待測元件進行電性測試時可完全不受外邱 麵之影響。殼體上具—電連接裝置，該電連接|置提: - 探針與殼體外部間之訊號傳送，使殼體上無需具備探針所 • 需之延伸開孔，且由於探針未延伸之殼體外，故無需額外 • 用於屏蔽延伸部位及其移動時所需之彈性包覆機構。是故 ^本創作具有設計簡單、成本低廉、並因開口減少而具較 完全之ΕΜΙ屏蔽效果等之優點。 又 圖2與圖3例示本創作—實施範例之封閉式針測機△ 2一〇〇。士參照圖2，制式針測機台200包含-夾盤總成^ 支持衣置204及—殼體2〇6。夾盤總成2〇2係用以支持 =牛21〇’而該待測元件210可為晶圓上之半導體元件： 4裝置2 0 4係用以持固—用於接觸該待測元件叫之探M351352 VIII. New description: [New technical field]..., t creation department about a kind of camera station, especially related to - type of tool. Closed test § environment needle measuring machine. [Prior Art] Fig. 1 illustrates a conventional pin _ table 1 〇〇. When the electrical component of the component to be tested 102 is electrically tested by the conventional needle measuring machine 100, the component to be tested is second, the chuck assembly! G4 and test probes (not ") are exposed to the external ^. ^ This conventional needle measuring machine _ no appropriate «, (d) in the test of low current and high frequency, suffered electromagnetic interference ( Electr〇magnetic In^ence ; EMI) ^ ± M ^ 〇__ , when testing the demand for wire current and high-frequency development, it is even more obvious that the conventional needle measuring machine 100 can not cope with future needs. The general industry faces EjyQ's Che, ·, + and # 田外置~爱β's 広 system will be - with EMI shielding effect 2 pairs: ^ 102 and chuck assembly 104, in order to isolate the outside world. However, in order to respond to the needle measurement system or the chuck oil into the drive unit = connection, it is necessary to set some openings on the cover to match:, and these are longer... to ensure the bribe shielding effect. The requirements complicate the design and installation of the mechanism, and increase the difficulty of maintenance. Moreover, although the joints of the openings are sealed, the two are insufficient. Even worse, during the electrical test, the outer cover is opposite, Need to add a covering mechanism with elastic mechanism, only =! All of the screen, (four) 嶋 (10) ^ = M351352 degrees 'more improved machine In summary, with the development of low current and high frequency, the needle industry is in urgent need of a simple design and complete machine. Contents] This creation provides a needle measuring machine that is simple in design and has a complete surface shielding effect. The closed needle measuring machine of the present embodiment includes a chuck assembly for supporting the component to be tested. And a support device for holding a probe for contacting the temple member, and an inner portion including a “accommodation space ^^, wherein the central disk assembly and the support device are disposed in the accommodation space. Another embodiment of the enclosed needle measuring machine comprises: a chuck assembly for holding a component to be tested, a fork for holding a probe for contacting the two members and being disposed on a guiding member The needle holder and a housing containing two accommodating spaces therein, wherein the central disk assembly and the needle seat are placed in the accommodating space. The technical features of the present invention have been summarized extensively above. The detailed description of this creation is better understood. It is to be understood that those skilled in the art of the art of the present invention should be able to make use of the concepts disclosed below and specific embodiments to make other structures or Process and miscellaneous, '> change or set up and present the same purpose as this creation. Those who have general knowledge in the technical field should also understand that this work is defined by the scope of the patent application. S-construction of arsenic and range M351352 without J# [Embodiment] The present invention provides a closed machine, which comprises a casing capable of providing shielding, so that the component to be tested can be electrically tested. It is completely unaffected by the outer surface. The housing has an electrical connection device. The electrical connection is provided: - the signal transmission between the probe and the outside of the housing eliminates the need for a probe on the housing. The opening is open, and since the probe is not extended outside the housing, there is no need to additionally • to shield the extension and the elastic covering mechanism required for its movement. Therefore, this creation has the advantages of simple design, low cost, and a relatively complete shielding effect due to the reduction of the opening. Further, Fig. 2 and Fig. 3 illustrate the closed needle measuring machine Δ 2 本 of the present creation-implementation example. Referring to Figure 2, the standard needle testing machine 200 includes a chuck assembly ^ support housing 204 and a housing 2 6 . The chuck assembly 2〇2 is used to support =牛 21〇' and the device under test 210 can be a semiconductor component on a wafer: 4 device 2 0 4 is used for holding - for contacting the device to be tested Exploration
擊 （未繪示），而兮您私7 a A ‘内部包人— +可包含於—測試卡212中。殼體206 3谷置空間208，其中該夹盤總成202盥該支 置204設置於該灾罢* ”遠支持裝 ^ 、 置二間208中，使該夹盤總成202愈哕彡_ 裝置204得封閉於兮拉μ ‘ 亥支持 何延伸所需之門孔〜又體2〇6内，而於該殼體裏上無需具任 幵1孔。故當滑芸2 〇 9闕卜r石这-5 Λ 士 )後，殼體206内可唯种 （如則樹向顯示 該殼體206传可以疋測試環境條件（如溫度等）。 料可為金屬、導磁：磁屏蔽材料所製成，而該電磁屏蔽材 卞间之金屬、導電性複合材料或具相同 M351352 功能之其他類似者。由於殼體拠係―封閉式殼體，因此可 達到較完全之EMI屏蔽效果。 本創作—實施例中，支持裝置2G4包含—導弓丨件214， -用以持固-探針且設置於該導引件214之針座216，以及 用以移動該導引件214之移動裝置218。針座216可固定於導 引件214上，且得沿其導引方向移動並可藉此調整位置以量 ^不同位置之待測元件21G。—實施例中，導引件川係— ’月軌。導引件214之兩端設置於移動裝置218，而該移動裝 置以8可使該針座216往有別於導引件214之導引方向移動 ，使針座2!6可於夾盤總成2〇2上任意遊走。移動裝置 之功此除㈣針座216測試位置外，亦可藉其將針座㈣移 開，以方便待測元件21〇取放於夹盤總成2〇2之上。一實施 例中，移動裝置21 8可使針座216往垂直於導弓j件2 14之方向 移動。-實施例中’封閉式針測機台中可配置一或一組 以上之支持裝置204’而其上可配置一或一組以上之針座 2 1 6，藉此設置以達到平行測試之目的。 參照圖3，t滑蓋209開啟時，纟係疊置於一背板3〇2 上方。滑蓋209之開關係依將其兩側嵌住之執道3〇4，以滑 動之方式為之。封閉式針測機台2〇〇背面之-表面306上包 含:電連«置308,而探針之測試訊號或測試訊號之控制 二5虎即透過該電連接裝置3〇8與殼體规外部之測試系統 310進仃電性通連。藉此—設計，可減少封閉式針測機台2⑻ 所具有之開"而達成較完全之EM味蔽效果。—實施例中 M351352 ’該電連接裝置3_GPIB(IEEE44S)介面。本創作之實 施例中’封閉式針測機台2⑽之兩側可設計為包含用以控溫 之風管及訊號線3 14之側邊區3 12。 圖4例示本創作一實施例之針座216。一實施例中，測 試卡212係以螺絲4〇2或具相同功能者固定於針座ye底部 ’亚將電極406壓於同軸線404端子形成電性連接。針座216 包含可调整X、γ、三及θ四軸向之四轴調整裝置4〇8，測試 卡2 12之探針41〇之位置與角度可藉其加以調整。 本創作之技術内容及技術特點已揭示如上，然而本創 作所屬技術領域中具有通常知識者應瞭解，在不背離後附 申請專利範圍所界定之本創作精神和範圍内，本創作之教 示及揭示可作種種之替換及修飾。 此外’本案之權利範圍並不偈限於上文揭示之特定實 靶例的製程、機台、製造、物質之成份、裝置、方法或步 知本創作所屬技術領域中具有通常知識者應瞭解，基於 本創作教示及揭示製程、機台、製造、物質之成份、裝置 、方法或步驟，無論現在已存在或日後開發者，其與本案 實施例揭示者係以實質相同的方式執行實質相同的功能， 而達到實質相同的結果，亦可使用於本創作。因此，以下 之申請專利範圍係用以涵蓋用以此類製程、機台、製造、 物質之成份、裝置、方法或步驟。 【圖式簡單說明】 藉由參照前述說明及下列圖式，本創作之技術特徵及 優點得以獲得完全瞭解。 M351352 圖1例示一般習知之針測機台； 圖2與圖3例示本創作一實施範例之封閉式針測機台 以及 圖4例示本創作一實施例之針座。 【主要元件符號說明】 100 針測機台 102 待測元件 104 夾盤總成 200 封閉式針測機台 202 夾盤總成 204 支持裝置 206 殼體 208 容置空間 209 滑蓋 210 待測元件 212 測試卡 214 導引件 216 針座 218 移動裝置 302 背板 304 執道 M351352 306 表面 308 電連接裝置 310 測試系統 312 側邊區 314 風管及訊號線 402 螺絲 406 電極 408 四軸調整裝置Click (not shown), and you are private 7 a A ‘internal package — + can be included in the test card 212. The housing 206 3 is located in the space 208, wherein the chuck assembly 202 is disposed in the disaster support device, the remote support device, and the second room 208, so that the chuck assembly 202 becomes more and more _ The device 204 is enclosed in the door hole of the 兮拉μ' hai support extension and the body 2 〇6, and there is no need to have a hole in the housing. Therefore, when the shovel is 2 〇 9 阙 r r After the stone is -5 )), the shell 206 can be seeded only (if the tree is displayed to the shell 206, the environmental conditions (such as temperature) can be tested. The material can be metal, magnetically permeable: magnetic shielding material. Made of metal, conductive composite or similar to the M351352 function of the electromagnetic shielding material. Due to the shell-closed housing, a more complete EMI shielding effect can be achieved. In the embodiment, the support device 2G4 comprises a guide bow member 214, a needle holder 216 for holding the solid probe and disposed on the guide member 214, and a mobile device 218 for moving the guide member 214. The needle seat 216 can be fixed on the guiding member 214 and moved along the guiding direction thereof to adjust the position to measure the position. The component to be tested 21G. In the embodiment, the guide member is the same as the 'moon track. The two ends of the guiding member 214 are disposed on the mobile device 218, and the moving device can make the needle holder 216 different from The guiding direction of the guiding member 214 is moved, so that the needle seat 2! 6 can be arbitrarily swept away on the chuck assembly 2〇2. In addition to the (four) needle seat 216 test position, the moving device can also be used to take the needle seat. (4) removing, so that the component 21 to be tested is placed on the chuck assembly 2〇2. In an embodiment, the moving device 218 can move the hub 216 in a direction perpendicular to the guide j. - In the embodiment, one or more sets of support means 204' may be disposed in the 'closed needle tester' table, and one or more sets of needle holders 2 1 6 may be disposed thereon for the purpose of parallel testing. Referring to Fig. 3, when the t-slider 209 is opened, the tethers are stacked above a back plate 3〇2. The opening relationship of the sliding cover 209 is in accordance with the way of enclosing the sides 3〇4, in a sliding manner. The closed-ended needle measuring machine 2 〇〇 on the back surface 306 includes: electrical connection «set 308, and the probe test signal or test signal control 2 5 tiger through the electricity The connecting device 3〇8 is electrically connected to the test system 310 outside the housing gauge. By this, the design can reduce the opening of the closed needle measuring machine 2 (8) and achieve a more complete EM taste effect. In the embodiment, M351352 'the electrical connection device 3_GPIB (IEEE44S) interface. In the embodiment of the present invention, both sides of the 'closed needle measuring machine 2 (10) can be designed to include the air duct for controlling temperature and the signal line 3 14 The side area 3 12 is shown in Fig. 4. In Fig. 4, the needle holder 216 of the embodiment of the present invention is illustrated. In one embodiment, the test card 212 is fixed to the bottom of the needle holder ye by the screw 4〇2 or the same function. The connection to the coaxial line 404 terminal forms an electrical connection. The hub 216 includes a four-axis adjustment device 4〇8 that can adjust the four axes of X, γ, three, and θ, and the position and angle of the probe 41〇 of the test card 2 12 can be adjusted. The technical content and technical features of the present invention have been disclosed as above. However, those having ordinary knowledge in the technical field of the present invention should understand that the teaching and disclosure of the present invention should be carried out without departing from the spirit and scope of the present invention as defined by the scope of the appended patent application. Can be used for various substitutions and modifications. In addition, the scope of the present invention is not limited to the specific process examples of the specific target examples disclosed above, the machine, the manufacturing, the composition of the substance, the device, the method, or the step-by-step knowledge in the technical field to which the author belongs. The present teachings teach and disclose processes, machines, manufactures, components, devices, methods, or steps of matter, whether present or future developers, performing substantially the same functions in substantially the same manner as those disclosed by the embodiments of the present invention, To achieve substantially the same result, it can also be used in this creation. Accordingly, the following claims are intended to cover such <RTI ID=0.0> </ RTI> </ RTI> <RTIgt; </ RTI> processes, machines, manufactures, compositions, devices, methods or steps. BRIEF DESCRIPTION OF THE DRAWINGS The technical features and advantages of the present invention are fully understood by referring to the foregoing description and the following drawings. M351352 Fig. 1 illustrates a conventional conventional needle measuring machine; Figs. 2 and 3 illustrate an enclosed needle measuring machine of an embodiment of the present invention, and Fig. 4 illustrates a needle holder of an embodiment of the present invention. [Main component symbol description] 100 needle measuring machine 102 to be tested component 104 chuck assembly 200 closed needle measuring machine 202 chuck assembly 204 support device 206 housing 208 accommodation space 209 slider 210 component to be tested 212 Test card 214 Guide 216 Needle mount 218 Mobile device 302 Backplane 304 Eave M351352 306 Surface 308 Electrical connection device 310 Test system 312 Side zone 314 Duct and signal line 402 Screw 406 Electrode 408 Four-axis adjustment device