TWM345227U - An optical fringe projection measuring system that can measure the surface roughness and the profile of sheet materials at the same time - Google Patents

An optical fringe projection measuring system that can measure the surface roughness and the profile of sheet materials at the same time Download PDF

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Publication number
TWM345227U
TWM345227U TW097204287U TW97204287U TWM345227U TW M345227 U TWM345227 U TW M345227U TW 097204287 U TW097204287 U TW 097204287U TW 97204287 U TW97204287 U TW 97204287U TW M345227 U TWM345227 U TW M345227U
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Taiwan
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image
light
angle
structured light
measured
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TW097204287U
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Chinese (zh)
Inventor
Fang-Jung Shiou
Shin-Ju Chen
Chia-Hao Hsu
Chun-Ting Chen
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United Ship Design & Amp Dev Ct
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Priority to TW097204287U priority Critical patent/TWM345227U/en
Publication of TWM345227U publication Critical patent/TWM345227U/en

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Abstract

This invention introduces an equal-gap light and shades structured light or a sine wave structured light as active light source to form an optical scanning measuring system by using the trigonometric theory. After appropriate adjustments, this system can measure the surface roughness and profile simultaneously. These innovations of this invention are as follows: firstly, using an imaging curtain to capture the portraits can improve the image distinguish ability of high reflectivity workpieces. Besides, compared to the line laser system, the structured light system can measure large-area workpieces in a faster speed. Moreover, by estimating the width variation of the gap of structured light, the purpose to measure the surface roughness and profile simultaneously can be achieved.

Description

M345227 八、新型說明: 【新型所屬之技術領域】 測原理所發展出的光學式光帶投影量啦統,_當的校正後可 以用來量财頓賴絲膠CFRP)卫叙轉或雜面的表面 本創作係以-具有等間距明暗對比’或_具有正弦相位分佈 之結構光為主動光源’搭配高解析度CCD攝影機、可調整角度之 工件夾治具、成像幕、-部個人電腦與控制量難式,以三=量M345227 VIII, new description: [New technology field] The optical tape projection system developed by the principle of measurement, _ can be used to adjust the amount of money after the correction CFRP) Wei Xuan or noodles The surface of this creation is - with equal spacing of light and dark contrast 'or _ sinusoidal phase distribution of structured light as the active light source' with high-resolution CCD camera, adjustable angle of the workpiece fixture, imaging screen, - part of the personal computer and The amount of control is difficult, with three = amount

粗糙度與三維輪廓。 【先前技術】 光學量測技術是非接觸式量_主要方法,原理即利用不同 視覺角度的比對’以得到待測物的輪廓’而其應賴式又可以分 為被動式量測與主動式量測兩類。 被動式量測需使用兩組攝影機,經由不同視角取得相同場 景’再配合影像處_技巧,產生被#測物㈣何翻,再經由 計算而制其真實財。_量職目朗,但此綠的量測精 度有限,所以工業上較少用這種量測方法。 主動式的量測方法,常用者為雷射掃推法*结構光法。 作方式為:將點/線雷射光或者一已知_的結構光源,以一個已 知的角度投射在被難的表面,此統相秘體表面高度變化 而產生變形’將此變形_案,經㈣單的三角幾何計算,即可 將此變型量轉化為曲面的高度變化。 6 M345227 主動式的量測方法,其取像的方法以及影像的鑑別度,會大 大影響買測的精度。如果被測物的表面反射度過高,則攝影機取 得的反射影像’其差異就會減低。所以過去的研究中,多應用於 置測光平複材元件、霧化處理過的金屬工件等反射度較低的物 品,缺少針對高亮度工件的量測實例。 【新型内容】 • 針對汽車、遊艇這類高反射度表面塗裝,以及使用鋼琴烤漆 的電子產品,過去多半使用目視檢視塗裝品質,而人的視覺評斷 車乂為主觀’且不同檢視者間的差異度大,所以難以做為產品製程 β又计/、口口貝笞理的標準。而本創作中所開發的光學量測系統,即 可用來量測此類產品的表面塗裝品質。 絕大多數社喊光學制方法,是個CCD攝影機,以適 曰的角度’直接對試#表面的反射影像做攝影。但如果直接使用 _ 攝减對_物取像,當_物的表面反射度較高時,即便量測 #間的表面輪廓與粗糙度不同,攝影機所能取得的反射影像差 ”乃:、、、:不鬲這日$就需要使用特殊濾鏡取像,以渡除部份光源 而心加衫像差異度。本創作的特殊之處,就在於利用成像幕取像: 被測物的影像反射至成像幕後,再由攝影機取像 ’如此,即可在 不使赠鏡的情形下,也可以取得差異度大的反射影像,以利後 續計算。 7 M345227 【實施方式】 茶考第-圖·本創作巾,以―具有等間距明暗對比,或一具 有正弦相位分佈之結構光投能7G為主動絲,經固定於z轴移 動機。50上並移動到適當高度,而後將欲檢測物品置於可調整角 又之件夾/口具30上,並使用χγ二軸移動機台2〇將檢測物品 移動至最佳投影位置。當結構光源投射在欲檢測物品的表面上 時,由絲面的高低起伏與㈣造度變化,會使得投影的光源圖案 ® 產生變形,而此光源圖案會反射到一置於適當位置的成像幕6〇 上。此時,可利用裝設了適當鏡組的高解析度CCD攝影機4〇,對 成像幕上的反射條紋光帶加以取像,並傳輸至個人電腦8〇。最後, 將所擷取得的反射條紋光帶影像91,利用電腦程式,依據校驗結 果,計算出被測物的粗糖度與表面輪廓。 用以量測表面粗糙度的方法為反射光能量法,可參考第二 圖:以其中一條紋光為例,當表面較精細時,反射光大部份集中 • 於主反射方向,而隨著粗糙度值之增加,散射光能量會因而增加。 再參考第三圖:較粗糙工件其反射光能量能致使檢測作用之範圍 h大於較光滑者L,因此我們可設定適當的閥值,由ccd攝影機 所感應到的反射光能量寬度來判定工件粗糙度值的趨勢,亦即可 藉由校驗不同粗糙度與CCD攝影機所量測得到其對應的的線寬 結果,即可推算待測件之表面粗糙度。當工件表面愈粗糙反射呈 像線會愈寬且光強度變弱,因此,可進行粗糙度光學量測系統的 校驗’可參考第四圖:利用接觸式粗糙度儀先量測不同試片之粗 8 M345227 ι度再找出其與反射線線見之間的對應關係。 "用以調表面輪靡的方法為三角量測校驗法,以其中一條紋 光為例、於圖巾X為待測物巾心、與成像幕麟P角 為軸心平行於y轴之旋㈣度、0角為如平行於X軸之旋轉角 度、h為工件之高度變化,驗量測平面制時,可考慮β角、 ㈣〇’當Μ為〇時,△㈣,當㈣為〇時觸。藉由分 析^後顧的變化,經由校驗,即可計算工件之高度變化卜當 =牛=存在麵高低差,則反射於雜幕之結構光,將會產生 變形之程度和輪廓高低差有關,_擷取的影像找出其 =先線條k的變化’再與利用接觸式輪輕測系統所得之輪 化置之_轉換係數,據以量_之麵 【圖式簡單說明】 第一圖本創作之代表圖。 第二圖主反射光隨表面粗糙度變化擴散散射示意圖。 第三圖粗糙度與反射光能量分佈關係。 第四圖粗糙度與平均線寬校驗結果示意圖。 紅圖三角量測校驗法進行形狀輪私度量測計算示意圖 第六圖形狀輪廓高度校驗結果示意圖。 · 9 M345227 【主要元件符號說明】 ίο 光學量測系統機台 20 XY二軸移動機台 30 可調整角度之工件夾治具 40 高解析度CCD攝影機 50 Z軸移動機台 60 成像幕 70 結構光投射器 80 個人電腦 90 於成像幕之反射條级光帶 91 反射條紋光帶經由CCD攝影機擷取至個人電腦之影像Roughness and 3D contours. [Prior Art] Optical measurement technology is a non-contact quantity _ main method, the principle is to use the comparison of different visual angles 'to get the contour of the object to be tested' and its dependence can be divided into passive measurement and active quantity Test two categories. For passive measurement, two sets of cameras are needed to obtain the same scene through different angles of view, and then cooperate with the image department to generate the real thing. _ Quantitative job, but the measurement accuracy of this green is limited, so this measurement method is rarely used in industry. Active measurement method, commonly used is laser sweep method * structured light method. The method is as follows: a point/line laser light or a known illuminating light source is projected on a difficult surface at a known angle, and the surface of the unified body is changed in height to cause deformation. Through the triangular geometry calculation of (4), the deformation amount can be converted into the height change of the surface. 6 M345227 Active measurement method, its image acquisition method and image discrimination will greatly affect the accuracy of the test. If the surface reflectance of the object to be tested is too high, the difference in the reflected image taken by the camera will be reduced. Therefore, in the past research, it was mostly used to measure items with low reflectivity such as flat-level composite components and atomized metal workpieces, and there is no measurement example for high-brightness workpieces. [New content] • For high-reflective surface coatings such as automobiles and yachts, as well as electronic products using piano paint, most of the past used visual inspection of the quality of the painting, and the human visual judgment of the car is subjective 'and between different viewers The degree of difference is large, so it is difficult to be the standard for the product process β and / / mouth and mouth. The optical metrology system developed in this creation can be used to measure the surface finish quality of such products. The vast majority of the community shouted the optical method, which is a CCD camera that directly photographs the reflected image of the surface of the test # at an appropriate angle. However, if the _ object is directly used to take the image, when the surface reflectance of the object is high, even if the surface profile and roughness between the measurements # are different, the difference in the reflection image that the camera can obtain is: :: If you don't want to use this day, you need to use a special filter to take pictures to eliminate some of the light sources and add a shirt to the difference. The special feature of this creation is to use the imaging screen to take images: the image of the object under test After reflection to the image screen, the image is taken by the camera. In this way, the reflected image with large difference can be obtained without the use of the mirror, so as to facilitate the subsequent calculation. 7 M345227 [Embodiment] Tea test-graph · The creation towel, with a light-dark contrast of equal spacing, or a structure with a sinusoidal phase distribution, 7G as the active wire, fixed on the z-axis moving machine. 50 and moved to the appropriate height, and then the item to be detected Placed on the adjustable angle clip/mouth 30 and use the χγ two-axis moving machine 2 to move the detected item to the optimal projection position. When the structural light source is projected on the surface of the item to be inspected, High and low fluctuations of the surface and (four) degree The change will cause the projected light source pattern® to be deformed, and the light source pattern will be reflected to an image screen 6〇 placed in an appropriate position. At this time, a high-resolution CCD camera equipped with a suitable lens group can be used. The image of the reflective stripe on the imaging screen is imaged and transmitted to a personal computer. Finally, the reflected stripe strip image 91 obtained by the image is used, and the measured object is calculated based on the verification result by a computer program. The method of measuring the surface roughness is the reflected light energy method. Refer to the second figure: Take one of the stripe lights as an example. When the surface is fine, the reflected light is mostly concentrated. The direction of reflection, and as the roughness value increases, the scattered light energy will increase. Referring to the third figure: the light energy of the rougher workpiece can cause the detection range h to be larger than the smoother L, so we can set the appropriate Threshold, the width of the reflected light energy sensed by the ccd camera to determine the trend of the workpiece roughness value, which can also be measured by verifying the different roughness and CCD camera According to the result of the line width, the surface roughness of the workpiece to be tested can be estimated. When the surface of the workpiece is rougher, the reflection will be wider and the light intensity will be weaker. Therefore, the calibration of the roughness optical measurement system can be performed. Refer to the fourth picture: use the contact type roughness meter to measure the thickness of the different test pieces 8 M345227 ι and find out the correspondence between them and the reflected line. Triangular measurement and verification method, taking one of the stripe lights as an example, the towel X is the object to be tested, and the P angle of the imaging screen is parallel to the y-axis (four degrees), and the 0 angle is parallel to The rotation angle of the X-axis and h are the height changes of the workpiece. When measuring the plane system, consider the β angle, (4) 〇 'When Μ is 〇, △ (4), when (4) is 〇, touch. Change, through the verification, can calculate the height change of the workpiece. When the cow = the surface height difference, the structural light reflected on the curtain will be related to the degree of deformation and the height difference of the contour. Out of it = the change of the line k first' and then the wheeled by the contact wheel light measurement system _Conversion coefficient, according to the amount of _ [Simplified description of the diagram] The first picture represents the representative of this creation. The second figure shows a schematic diagram of the diffusion of the main reflected light with surface roughness. The relationship between the roughness of the third graph and the energy distribution of the reflected light. The fourth graph shows the roughness and average linewidth calibration results. The red figure triangle measurement and verification method is used to calculate the shape wheel private measurement measurement. The sixth figure shows the shape contour height verification result. · 9 M345227 [Main component symbol description] ίο Optical measuring system machine 20 XY two-axis moving machine 30 Adjustable angle workpiece fixture 40 High-resolution CCD camera 50 Z-axis moving machine 60 Imaging screen 70 Structure light Projector 80 Personal computer 90 Reflective strip light strip on the imaging screen 91 Reflective stripe light strip captured from the CCD camera to the PC

Claims (1)

M345227 九、申請專利範圍: 1· -種可同日❿貞彳板材粗糙度及平面度之光帶投影量啦統,係 包括·一個結構光投射11、高解析度CCD攝影機與Z軸移動機 台、可调整工件位置的χγ =軸移賴台、可調整角度之工件 爽治具、成像幕、可以固定以上設備的光學量測系統機台、_ 部個人電腦與控制量測軟體;其中,由結構光投射器所發射之 絲’投射至待測件之表面,經由反射喊像於成像幕上,再 _ 纟❺解析度CCD攝影谢頡取成像幕上的影像,傳輸至個人電腦 後依據昼測系統之校驗結果,經軟體計算分析,即可量測待 測面之表面輪廓與粗糙度,此特徵在於: 糊成像幕轉,即可在不使_齡鱗高反射率的待測面 表面取像,並取得差異度大的反射影像,以利後續計算。 2·如申明專利範圍帛1項之一種可同時量測板材粗經度及平面度 之光帶投影量測系統,其中結構光投射器,所投出之光源圖形, I T為料㈣㈣暗對比之結縣,也可為具有正弦相位分佈 之結構光。 3·如申請專利範圍第1項之一種可同時量測板材粗糙度及平面度 之光帶投影量測系統,其中可調整角度之工件夾治具,經調整 角度後可使結構光投射器所投射之光源,以〇到9〇度之間的角 度入射至被測物表面,並以〇到90度之間的角度將被測面的反 射影像投影至成像幕。 4·如申凊專利範圍第1項之一種可同時量測板材粗链度及平面度 11 M345227 之光帶投影量測系統,其中高解析度CCD攝影機,可以適當的 角度,對成像幕取像,並將所得影像傳輸至個人電腦。 12M345227 Nine, the scope of application for patents: 1 · A kind of light belt projection with the same roughness and flatness of the same day, including a structured light projection 11, high-resolution CCD camera and Z-axis mobile machine Χγ=axis shifting table with adjustable workpiece position, workpiece can be adjusted with angle adjustment, imaging screen, optical measuring system machine that can fix the above equipment, _ part PC and control measurement software; The wire emitted by the light projector is projected onto the surface of the object to be tested, and is shouted on the image screen through reflection. Then, the image of the image is taken by the CCD camera, and transmitted to the personal computer. The calibration result of the system can be measured by software calculation, and the surface contour and roughness of the surface to be measured can be measured. The characteristic is: the paste image is turned on, and the surface of the surface to be tested can be made without the sage high reflectivity. Take the image and obtain a highly reflective image to facilitate subsequent calculations. 2. As stated in the patent scope 帛1, a light tape projection measurement system capable of simultaneously measuring the gross longitude and flatness of a sheet, wherein the structured light projector, the light source pattern cast, and the IT material (4) (4) dark contrast knot The county may also be a structured light having a sinusoidal phase distribution. 3. A light tape projection measurement system capable of measuring the roughness and flatness of a sheet at the same time as the first item of the patent application scope, wherein the workpiece clamp can be adjusted at an angle, and the structured light projector can be adjusted after adjusting the angle The projected light source is incident on the surface of the object to be measured at an angle of between 9 degrees and the projected image of the measured surface is projected to the imaged screen at an angle of between 90 degrees. 4. A light tape projection measurement system capable of simultaneously measuring the thick chain degree and flatness of the plate 11 M345227, such as the high-resolution CCD camera, which can image the image frame at an appropriate angle. And transfer the resulting image to a personal computer. 12
TW097204287U 2008-03-12 2008-03-12 An optical fringe projection measuring system that can measure the surface roughness and the profile of sheet materials at the same time TWM345227U (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102954772A (en) * 2011-12-13 2013-03-06 中国科学院对地观测与数字地球科学中心 Sea ice surface roughness measuring method based on line laser
TWI391623B (en) * 2008-12-17 2013-04-01 Ship & Ocean Ind R & D Ct Measuring device and measuring method
CN104515773A (en) * 2013-09-03 2015-04-15 库利克和索夫工业公司 Systems and methods for measuring physical characteristics of semiconductor device elements using structured light
CN106403850A (en) * 2016-08-30 2017-02-15 苏州博众精工科技有限公司 Flatness detection method

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI391623B (en) * 2008-12-17 2013-04-01 Ship & Ocean Ind R & D Ct Measuring device and measuring method
CN102954772A (en) * 2011-12-13 2013-03-06 中国科学院对地观测与数字地球科学中心 Sea ice surface roughness measuring method based on line laser
CN104515773A (en) * 2013-09-03 2015-04-15 库利克和索夫工业公司 Systems and methods for measuring physical characteristics of semiconductor device elements using structured light
TWI561810B (en) * 2013-09-03 2016-12-11 Kulicke & Soffa Ind Inc Systems and methods for measuring physical characteristics of semiconductor device elements using structured light
US9810641B2 (en) 2013-09-03 2017-11-07 Kulicke & Soffa Industries, Inc. Systems and methods for measuring physical characteristics of semiconductor device elements using structured light
US10352877B2 (en) 2013-09-03 2019-07-16 Kulicke And Soffa Industries, Inc Systems and methods for measuring physical characteristics of semiconductor device elements using structured light
CN106403850A (en) * 2016-08-30 2017-02-15 苏州博众精工科技有限公司 Flatness detection method

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