TWM335787U - Wafer-container transportation box structure - Google Patents

Wafer-container transportation box structure Download PDF

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Publication number
TWM335787U
TWM335787U TW96217511U TW96217511U TWM335787U TW M335787 U TWM335787 U TW M335787U TW 96217511 U TW96217511 U TW 96217511U TW 96217511 U TW96217511 U TW 96217511U TW M335787 U TWM335787 U TW M335787U
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Taiwan
Prior art keywords
unit
box
plate
molding plate
container transport
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TW96217511U
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Chinese (zh)
Inventor
jin-quan Lin
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Boscien System Co Ltd
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Priority to TW96217511U priority Critical patent/TWM335787U/en
Publication of TWM335787U publication Critical patent/TWM335787U/en

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M335787 八、新型說明: 【新型所屬之技術領域】 本,作隸屬1車體晶圓容器機柱之自動潰縮技術, ^係指-種可讓晶圓容器機柱選擇性自動潰縮的装 動产i用=並於車體撞擊他物時使晶κ容器機柱自 /貝、、,7,、在車禍中防止駕駛者撞擊晶圓容器。 【先前技術】 旦1♦來,㈣科技發展的料,各式電腦、通訊設備 ^處理設備等’均越來越微細化與多功能化,而這些 ^’、要來自現有的半導體製程可將積體電路、功能元 ’以微細化的方式形成於晶圓之晶片表面。而—般 ^曰曰^要係先經由長晶製程形成脉,再經由切割方能 “ί::工ΐ晶圓片,一般稱為長晶製程。接著讓晶圓片 先、薄膜、蝕刻和擴散等製程來形成前述的積體電 路,一般稱為前段製程。再者晶圓於完成積體電路後,尚 片、封襄與測試等製程’其才能形成供一般設備 便用之日日片,一般稱為後段製程; y由此可知,半導體製程中主要可分為長晶、前段製程 與後段製程,其每一道製程都很精密,而這些 性極高,但在設備與廠房的佈置上差異極大了^丄 ί;不=在設薇之經濟效益考量下,前述;個大製 :般:不在同—公司或同一廠區,由於晶圓主要係以矽 為:::厚度極薄,不慎碰撞即可能造成無法挽回的損傷 ,口此過程中的晶圓運輸即極為重要,而在 塵與防震的要求,且讓製程可有效連貫,1晶=容置 5 M335787 於一可用於無塵室内之晶圓容器,再將複數晶圓容器置於 一運輸箱内,以增加運輸量與節省成本,而現有晶圓容器 運輸箱的構成主要係如第七圖所示,其包含有一中空箱體 (60)與可覆設於箱體(60)上之蓋體(70)所組成,其 中箱體(60)具有向上開口之容置部(61),且箱體(60 )底端並一體形成有一棧板部(65),棧板部(65)周緣 " 並形成有複數橫向延伸之插孔(66),以供堆高機於堆高 • 或移載時穿插使用,而為了增加其防震效果及避免晶圓容 器(90)相互碰撞或磨擦,箱體(60)内通常會設有多格 φ 狀之内襯盒體(80),其係利用鉚扣(85)固設複數防震 隔層(81)所組成,讓各晶圓容器(90)可分設於不同隔 間内; 前述習式的運輸箱在使用上並無太大的問題,但其係 先開設對應箱體(60)與蓋體(70)形狀之模具,再分別 利用射出成型的技術一體射出成型前述之箱體(60)與蓋 體(70),而其中箱體(60)包含有用於堆高機使用之棧 板部(65),因此在材料與硬度的考量需同時注意到容置 φ 部(61)與棧板部(65)的要求; 由此其在製造上,不僅需要支出昂貴的開模成本,且 • 在成型時亦需使用到射出成型的設備,因此整體的製造成 . 本極高,再者箱體(60)與蓋體(70)因其體積大,故在 射出成型時,其技術要求極高,同時容易產生不良品,也 會降低其生產效率,無形間亦會進一步提高其製造成本; 更甚者受到其射出模具與射出良率的影響,運輸箱的尺寸 大小也受到相當的限制,無法提高運量與降低運輸成本。 本創作即在於克服晶圓容器運輸箱前述的製造與成本 6 M335787 之不便與缺點。換言之,如能讓運輸箱不需經由開模製造 ,則即可簡化製造流程與降低成本,進一步並可提高晶圓 的運量與降低運輸成本。 有鑑於此,本發明人乃藉由多年從事相關產業的研 發與製作經驗,針對現有晶圓容器運輸箱所面臨的問題 深入探討,並積極尋求解決之道,經不斷努力之開發與 試作,終於成功創作出一種晶圓容器運輸箱結構,藉以 ' 簡化製造、且降低生產成本,並能增加其結構的可變性 ,不致受限於模具的限制。 【新型内容】 因此,本創作主要係在提供一種晶圓容器運輸箱結構 ,其可以接合方式成型,具有易於製作、且良率高之效, 同時能降低其製造的成本。 依本創作的一實施例,該晶圓容器運輸箱結構包括有 :一箱體單元,其用於容置晶圓容器,該箱體單元具有一 中空之容置部,容置部係由一可彎折、且定型之塑型板彎 I 折環繞而成,該塑型板並具有相對之一第一端緣與一第二 端緣,使塑型板可利用第一、二端緣相對黏合形成接合線 j , 一棧板單元,其係呈實心體,棧板單元並鎖設於箱體 單元之容置部底端,以封閉容置部之底端開口,再者棧板 單元周緣形成有複數橫向延伸之穿孔; 一蓋體單元,其係覆設於箱體單元之容置部頂端開口 ,該蓋體單元係由一可彎折、且定型之塑型板彎折環繞而 成,塑型板並具有相對之一第一端緣與一第二端緣,使塑 7 M335787 ,板Π用二端緣相軸合形成接合線,再者蓋體 早兀』錢於環繞成型後之上方開σ固設有—塑性平板,· > f由上述的說明,本創作透過前述技術手段的展現, 可讓本創作運輸箱能塑型板可彎折、定形之特性組構 而成:以降低其生產成本,同時提高產品的良率與可變性 ’大幅增加產品的附加價值。 以下並舉一較佳實施例, 對本創作做進一步之說明,讓 作有更詳細的瞭解: 【實施方式】 同時配合不同圖式及圖號, 熟悉本技術領域者能對本創 參考所附之圖式,首先參考第一、二及三圖所示,本 創作之晶圓容n運輸箱結構包含有—環狀之箱體單元⑴ )、一设於箱體單元(10)底端開口之棧板單元(2〇), 以及Γ覆設箱體單元(10)頂端開口之蓋體單元(別), 以透過一内襯盒體(40)容置複數晶圓容器(50); 而關於本創作之詳細構成,則請參閱第一、二及三圖 所揭,之一較佳實施例而言,該箱體單元(10)具有一由 一可彎折、且定型之塑型板(12)彎折環繞而成的容置部 (11 ),其中塑型板(12 )係選自可彎折、定型之塑性材 質如聚丙烯類【PP】等,該塑型板(12)並具有相對之 第鳊緣(121)與一第二端緣(122),讓塑型板(I〗 )=彎折、定型後利用第一、二端緣(121) (122)相對 黏合形成接合線(14),進而形成矩形環繞之中空容置部 ^11),容置部(11)之塑型板(12)周緣形成有複數鉚 合孔(13),用於固定置於内部之内襯盒體(4〇)【如第 M335787 二圖所示】。又箱體單元(1〇)於容置部(n)下方接人 固设有-接合部(15) ’該接合部(15)亦係由一可 且疋i之塑型板(16)彎折環繞而成,其中接合部(μ )略大於容置部(11),使接合部(15)内徑對應容置部 11)外徑,又其中塑型板(16)係選自可彎折、定型之 塑性材質,如聚丙烯類【PP】等,該塑型板(16)並且有 相對之-第一端緣(161)與一第二端緣(162),讓塑型 板(16)於彎折、定型後利用第一、二端緣(i6i) (162 )相對黏合形成接合線(19),進而形成矩形環繞之中空 接合部(15),且接合部(15)塑型板(16)底緣 複數鎖接凸片(17),讓鎖接凸片(17)可利用一或多數 鎖固元件(18)鎖接前述之棧板單元(2〇); 又前述棧板單元(20)係呈實心體,其係選自複合之 玻璃纖維塑料【FRP】,且棧板單元(2〇)可嵌置於接合部 (15)塑型板(16)所圍之範圍内,再者棧板單元(2〇) 周緣形成有複數橫向延伸之第一穿孔(21)與第二穿孔( 2 2)’供堆南機堆局或移轉時使用; 而蓋體單元(30)係由一可彎折、且定型之塑型板( 31)彎折環繞而成,請進一步搭配參看第四圖所示,其中 塑型板(31)係選自如聚丙烯類【pp】等具可彎折、定型 之塑性材質,又塑型板(31)並具有相對之一第一端緣( 311)與一第二端緣(312),讓塑型板(31)於彎折、定 型後利用第一、一端緣(311) (312)相對黏合形成接合 線(34),蓋體單元(30)塑型板(31)所圍空間之内护 略大於箱體單it (10)之容置部(11)外徑,又塑型板^ 31)頂緣一體形成有一或多數向上凸伸之止擋凸片(犯) M335787 ,再者蓋體單元(30)之塑型板(31)内緣固設有一或多 數可插入箱體單元(10)容置部(11)内緣之限位元件( 33),以確保蓋體單元(3〇)覆設於箱體單元(1〇)之穩 固性。再者蓋體單元(30)塑型板(31)於環繞成型後^ 上方開口固設有一塑性平板(35),前述止擋凸片(32) 並可凸出塑性平板(35)頂面,再者塑性平板(35)於塑 型板(31)所圍範圍之内面設有一由縱橫交錯之肋片組( 36),以增加蓋體單元(30)之強度; 、 再者,箱體單元(10)之容置部(11)内可設有一内 襯盒體(40),該内襯盒體(4〇)係由一或多數防震隔層 (41 )所組成,其中防震隔層(μ )係選自聚丙烯類【pp 】瓦肋片或其他防震材質所製成,且防震隔層(41)上形 成有一或多數之鉚合孔(42),其中各防震隔層(41)之 鉚合孔(42)可相互對應或對應箱體單元(1〇)容置部( 11)之鉚合孔(13),以供利用一或多數鉚扣(45)固掣 於箱體單元(10)之容置部⑴)内,使内襯盒體(仙) 形成多格型式,以供容置複數之晶圓容器(5〇), 離與防震效果; 且製造成本低之晶圓容器 猎此’組構成一可變性高 運輸箱結構者。 々透過刖述之結構設計,本創作之實際操作時,則係如 第三〜六圖所揭示者,本創作藉由塑型板(12) (16)、 (31)分別形成箱體單元(1〇)之容置部(11)、接合部 (15)與蓋體單元(30),且箱體單元(1〇)並利用接入 鎖;承受力較大之棧板單元⑶,而形成完; 珣相,/、亚可於容置部内設置具防震、隔離效 M335787 果之内襯盒體(40),而供容置晶圓容器(50),同時 過f體單元(10)之接合部(15)、棧板單元(20)與蓋 體單兀(30)之内、外徑設計,使運輸箱可相對堆疊,並 ,用蓋體單元(30)之止擋凸片(32)產生止擋效^【如 第六圖所示】,避免其任意滑移,提升其穩固性; 因此本創作具有易於製造之效,而無需如習用者要另 行開立模具,也不需使用到射出成型機械,不僅具有易於 製造之效,且可大幅降低其成本,同時透過塑型板(12)、 (16)、(31)定型化的生產,並可降低產品的不良率, 同時本創作運輸箱不需使用到特定模具,且塑型板(Ο (16)、(31)易於調整與裁剪形狀,故具有較佳的可 ίΓ客戶需求於箱體單元(⑷與蓋體單元(3〇)外 ;加其他_配件,如提把或如條碼、 ,增進其操作的便舰。 ㈣識70件等 可大可以理解到本創作為—創意極佳之新型創作, 同或近似的產品創作或公開域中未見相 故本創作已符合新型專利有潁:八$效的增進, 要件,乃依法提出申請新^專關利。新賴性」與「進步性」的 M335787 【圖式簡單說明】 弟一圖·係本創作運輸箱結構之立 揭示本創作各組件之態樣。 …… 第二圖:係本創作運輸箱結構之大部組合示意圖, = :: =運輪箱結構之― 第五圖:係本成之局部剖面示意圖。 圖。運輸相結構於實際使用時之參考示意M335787 VIII. New description: [New technical field] This is the automatic crushing technology of the column of the 1st body wafer container, ^ is a kind of equipment that can automatically and automatically collapse the wafer container column. The movable property i is used to prevent the driver from hitting the wafer container during a car accident when the vehicle body hits the object. [Prior Art] Once the 1 ♦ comes, (4) the development of science and technology, all kinds of computers, communication equipment, processing equipment, etc. are increasingly more refined and multi-functional, and these ^', from the existing semiconductor process can be The integrated circuit and the functional element 'are formed on the wafer surface of the wafer in a fine manner. And the general ^曰曰^ must first form a vein through the crystal growth process, and then through the cutting can be "ί:: work wafer, generally called the long crystal process. Then let the wafer first, film, etching and Diffusion and other processes to form the aforementioned integrated circuit, generally referred to as the front-end process. In addition, after the completion of the integrated circuit, the wafer is still in the process of filming, sealing, and testing, so that it can form a daily film for general equipment. It is generally referred to as the back-end process; y It can be seen that the semiconductor process can be mainly divided into long crystal, front-end process and back-end process, each process is very precise, and these are extremely high, but in the arrangement of equipment and plant The difference is enormous ^丄ί; not = in the economic considerations of the establishment of Wei, the above; a large system: general: not in the same company - the same plant, because the wafer is mainly based on::: very thin thickness, no Careful collision can cause irreparable damage. The wafer transportation in the process is extremely important. In the dust and shockproof requirements, the process can be effectively coherent. 1 crystal = accommodating 5 M335787 can be used for dust-free. Indoor wafer container, then plural The round container is placed in a transport box to increase the transportation volume and save cost, and the existing wafer container transport box is mainly constructed as shown in the seventh figure, and includes a hollow box (60) and can be covered in the box. The cover body (70) is formed on the body (60), wherein the box body (60) has an upwardly opening receiving portion (61), and the bottom end of the box body (60) is integrally formed with a pallet portion (65). The pallet portion (65) is circumferentially " and has a plurality of laterally extending jacks (66) for the stacker to be used for stacking or loading, in order to increase its shockproof effect and avoid wafer containers ( 90) Colliding or rubbing each other, the box body (60) usually has a multi-grid lining box body (80), which is composed of a plurality of anti-vibration spacers (81) fixed by a rivet (85). The wafer containers (90) can be divided into different compartments; the transport case of the above formula does not have much problem in use, but it is first to open the corresponding box (60) and the cover (70). The shape of the mold is separately injection molded by the injection molding technology to integrally form the aforementioned box body (60) and the cover body (70), wherein the box body (60) The pallet portion (65) for use in the stacker is included, so the material and hardness considerations need to be noted at the same time to accommodate the requirements of the φ portion (61) and the pallet portion (65); Not only does it require expensive mold opening costs, but also • injection molding equipment is required for molding, so the overall manufacturing is extremely high, and the cabinet (60) and the cover (70) are bulky. Therefore, when injection molding, the technical requirements are extremely high, and at the same time, it is easy to produce defective products, and the production efficiency is also lowered, and the manufacturing cost is further increased by the invisible; even worse, it is affected by the injection mold and the injection yield. The size of the transport case is also limited, which does not increase the volume and reduce the transportation cost. This creation is to overcome the inconvenience and shortcomings of the aforementioned manufacturing and cost of the wafer container transport case 6 M335787. In other words, if the transport case can be manufactured without opening the mold, the manufacturing process can be simplified and the cost can be reduced, and the throughput of the wafer can be increased and the transportation cost can be reduced. In view of this, the inventors have intensively explored the problems faced by existing wafer container transport boxes by years of experience in R&D and production of related industries, and actively sought solutions, and through continuous efforts and development, finally Successfully created a wafer container transport case structure, which simplifies manufacturing, reduces production costs, and increases the variability of its structure without being limited by mold limitations. [New content] Therefore, the present invention mainly provides a wafer container transport case structure which can be formed in a joint manner, has an easy-to-manufacture, high yield effect, and can reduce the manufacturing cost thereof. According to an embodiment of the present invention, the wafer container transport case structure includes: a box unit for accommodating the wafer container, the box unit having a hollow receiving portion, and the housing portion is The bendable and shaped molding plate is folded and folded, and the molding plate has a first end edge and a second end edge, so that the molding plate can be used with the first and second end edges. Bonding to form a joint line j, a pallet unit, which is a solid body, and the pallet unit is locked at the bottom end of the housing portion of the box unit to close the bottom end of the receiving portion, and then the periphery of the pallet unit Forming a plurality of laterally extending perforations; a cover unit covering the top opening of the receiving portion of the box unit, the cover unit being surrounded by a bendable and shaped molding plate The molding plate has a first end edge and a second end edge, so that the plastic 7 M335787 and the plate edge are axially joined to form a joint line, and the cover body is early and the money is wrapped around the shape. Above the open σ solid - plastic plate, · > f from the above description, this creation through the aforementioned technical hand Show, this allows the creation of the transport case can be folded plastic sheet, fabric made of amorphous characteristics: to reduce their production costs, while increasing the added value of the product yield and variability 'substantial increase in the product. In the following, a preferred embodiment will be further described, and a further detailed description will be given to the present invention. [Embodiment] At the same time, different drawings and drawings are provided, and those skilled in the art can refer to the drawings attached to the present application. First, referring to the first, second and third figures, the wafer storage n transport box structure of the present invention comprises a ring-shaped box unit (1) and a pallet which is arranged at the bottom end of the box unit (10). a unit (2), and a cover unit (not) for covering the top end of the box unit (10) for accommodating a plurality of wafer containers (50) through a liner box (40); For a detailed configuration, please refer to the first, second and third figures. In a preferred embodiment, the box unit (10) has a plyable and shaped molding plate (12). a receiving portion (11) surrounded by a bending, wherein the molding plate (12) is selected from a bendable, shaped plastic material such as a polypropylene type [PP], etc., and the molding plate (12) has a relative The first edge (121) and the second edge (122) allow the molding plate (I) to be bent and shaped to utilize the first and second ends. The edge (121) (122) is relatively bonded to form a bonding wire (14), thereby forming a rectangular surrounding hollow receiving portion (11), and the periphery of the molding plate (12) of the receiving portion (11) is formed with a plurality of riveting holes ( 13), used to fix the inner liner box (4〇) [as shown in Figure 2 of M335787]. Further, the box unit (1〇) is attached to the receiving portion (n) and is fixed to the joint portion (15). The joint portion (15) is also bent by a molding plate (16) capable of 疋i Folded, wherein the joint portion (μ) is slightly larger than the accommodating portion (11), such that the inner diameter of the joint portion (15) corresponds to the outer diameter of the accommodating portion 11), and wherein the molding plate (16) is selected from the bendable portion Folded, shaped plastic material, such as polypropylene [PP], etc., the molding plate (16) and has a first-end edge (161) and a second end edge (162), so that the plastic plate ( 16) After bending and shaping, the first and second end edges (i6i) (162) are relatively bonded to form a bonding wire (19), thereby forming a rectangular surrounding hollow joint portion (15), and the joint portion (15) is molded. The bottom edge of the plate (16) is a plurality of locking tabs (17), so that the locking tab (17) can lock the aforementioned pallet unit (2〇) by using one or more locking elements (18); The unit (20) is a solid body selected from a composite glass fiber plastic [FRP], and the pallet unit (2〇) can be embedded within the range of the joint (15) molding plate (16). , and then the pallet unit (2〇) circumference formation The plurality of laterally extending first perforations (21) and second perforations (2 2) are used for stacking or transferring the stacking machine; and the cover unit (30) is formed by a bendable and shaped mold The plate (31) is bent and surrounded. Please refer to the fourth figure for further matching. The molding plate (31) is selected from plastic materials such as polypropylene [pp] which can be bent and shaped, and molded. The plate (31) has a first end edge (311) and a second end edge (312), so that the molding plate (31) utilizes the first and one end edges (311) after being bent and shaped (312). The bonding wire (34) is formed by the relative bonding, and the inside of the space surrounded by the molding plate (31) of the cover unit (30) is slightly larger than the outer diameter of the receiving portion (11) of the single body (10) of the casing, and is molded. The top edge of the plate 31 is integrally formed with one or a plurality of upwardly protruding stop tabs (M), and the inner edge of the molding plate (31) of the cover unit (30) is fixed with one or more insertable housing units. (10) The limiting element (33) of the inner edge of the receiving portion (11) ensures the stability of the cover unit (3〇) to the casing unit (1〇). Furthermore, the plastic body plate (31) of the cover unit (30) is fixed with a plastic flat plate (35) at the upper opening of the molding unit, and the stop tab (32) can protrude from the top surface of the plastic flat plate (35). Further, the plastic flat plate (35) is provided with a rib piece group (36) which is criss-crossed on the inner surface of the plastic plate (31) to increase the strength of the cover unit (30); and, further, the box unit (10) The accommodating portion (11) may be provided with a lining box body (40), which is composed of one or more anti-vibration barrier layers (41), wherein the anti-vibration barrier layer ( μ) is selected from polypropylene [pp] tile ribs or other shockproof materials, and one or more riveting holes (42) are formed on the anti-vibration barrier layer (41), wherein each anti-vibration barrier layer (41) The riveting holes (42) may correspond to each other or to the riveting holes (13) of the housing unit (11) receiving portion (11) for fixing to the housing unit by using one or more riveting members (45) (10) In the accommodating part (1)), the lining box body (send) is formed into a multi-grid type for accommodating a plurality of wafer containers (5 〇), and the shockproof effect; and the manufacturing cost is low container Hunting this group constitutes a variability high transport box structure. 々 Through the structural design of the description, the actual operation of the creation is as disclosed in the third to sixth figures. The creation forms the box unit by the molding plates (12) (16) and (31) respectively. 1)) a receiving portion (11), a joint portion (15) and a lid unit (30), and the box unit (1) is formed by using an access lock; a pallet unit (3) having a large receiving capacity ; , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The inner portion and the outer diameter of the joint portion (15), the pallet unit (20) and the cover unit (30) are designed so that the transport boxes can be stacked relatively, and the stop tabs of the cover unit (30) are used (32). ) Produce a stop effect ^ [as shown in the sixth figure] to avoid any slippage and improve its stability; therefore, the creation is easy to manufacture, without the need to open the mold separately, or use it. The injection molding machine not only has the effect of being easy to manufacture, but also can greatly reduce the cost thereof, and at the same time, the production is finalized by the molding plates (12), (16), and (31). It can reduce the defect rate of the product. At the same time, the original transport case does not need to use a specific mold, and the plastic plate (Ο (16), (31) is easy to adjust and cut shape, so it has better customer needs in the box. Body unit ((4) and cover unit (3〇); plus other _ accessories, such as handles or bar code, to enhance the operation of the ship. (4) 70 pieces of knowledge can be understood to the creative - creative Jiazhi's new creation, the same or similar product creation or the open domain has not seen the same. This creation has been in line with the new type of patent: the improvement of the eight-effect, the essentials, is to apply for a new ^ special interest in accordance with the law. M335787 with "progressiveness" [Simple description of the drawing] The first figure of the creation of the transportation box structure reveals the characteristics of each component of the creation. ...... The second picture: the majority of the structure of the creation of the transport box Schematic, = :: = structure of the wheel box structure - Figure 5: Schematic diagram of the partial section of the system. Figure. Reference of the transport phase structure in actual use

第六圖:係本創作運輸箱結構於 第七圖:係習式晶圓容器運輪=之外觀示意圖。 【主要元件符號說明】 目之刀解外觀示意圖。Figure 6: The structure of the creation transport box is shown in the seventh picture: the appearance of the conventional wafer container transport wheel =. [Main component symbol description] The schematic diagram of the tool.

(10) 箱體單元 (12) 塑型板 (122) 第二端緣 (14) 接合線 (16) 塑型板 (162) 第二端緣 (18) 鎖固元件 (20) 機板單元 (22) 第二穿孔 (31) 塑型板 (312) 第二端緣 (33) 限位元件 (35) 塑型平板 (40) 内襯盒體 (42) 鉚合孔 (50) 晶圓容器 (11) (121) (13) (15) (161) (17) (19) (21) (30) (311) (32) (34) (36) (41) (45) (60) 容置部 第一端緣 柳合孔 接合部 第一端緣 鎖接凸片 接合線 第—穿孔 蓋體單元 第—端緣 止擋凸片 接合線 肋片組 防震隔層 鉚扣 箱體 12 M335787 (61) 容置部 (65) 棧板部 (66) 插孔 (70) 蓋體 (80) 内襯盒體 (81) 防震隔層 (85) 鉚扣 (88) 晶圓容器(10) Box unit (12) Molding plate (122) Second end edge (14) Bonding wire (16) Molding plate (162) Second end edge (18) Locking element (20) Machine plate unit ( 22) Second perforation (31) Molding plate (312) Second end edge (33) Retaining element (35) Molded plate (40) Lining box (42) Riveting hole (50) Wafer container ( 11) (121) (13) (15) (161) (17) (19) (21) (30) (311) (32) (34) (36) (41) (45) (60) Housing First end edge willow joint joint first end edge locking tab joint line first perforated cover unit first end edge stop tab joint line rib piece set shockproof spacer rivet box 12 M335787 (61) Housing (65) Pallet (66) Jack (70) Cover (80) Lining box (81) Shock barrier (85) Rivet (88) Wafer container

1313

Claims (1)

M335787 % 九、申請專利範圍: 1、一種晶圓容器運輸箱結構,其包括: 一箱體單元,其用於容置晶圓容器,該箱體單元具 有中空之谷置部,容置部係由一可彎折、且定型 之塑型板、’4、折環繞而成,該塑型板並具有相對之一 - 第一端緣與一第二端緣,使塑型板可利用第一、二 - 端緣相對黏合形成接合線; 一棧板單元,其係呈實心體,棧板單元並鎖設於箱 體單元之容置部底端,以封閉容置部之底端開口, 再者棧板單元周緣形成有複數橫向延伸之穿孔; 一蓋體單元,其係覆設於箱體單元之容置部頂端開 口,該蓋體單元係由一可彎折、且定型之塑型板彎 折環繞而成,塑型板並具有相對之一第一端緣與一 第二端緣,使塑型板可利用第一、二端緣相對黏合 形成接合線,再者蓋體單元塑型板於環繞成型後之 上方開口固設有一塑性平板; 藉此,組構成一可變性高、且製造成本低之晶圓容 器運輸箱結構者。 2依據申請專利範圍第1項所述之晶圓容器運輸箱結 構’其中箱體單元於容置部下方接合固設有一接合 邛,該接合部亦係由一可彎折、且定型之塑型板彎 折環繞而成,又該塑型板並具有相對之一第一端緣 與一第二端緣,使塑型板於彎折、定型後利用第一 、一端緣相對黏合形成接合線。 14 M335787 ,據申§f專利㈣第2項所述之晶M335787 % Nine, the scope of application for patents: 1. A wafer container transport case structure, comprising: a box unit for accommodating a wafer container, the box unit having a hollow valley portion, and a housing portion Formed by a bendable and shaped molding plate, '4, folded, the molding plate has one of the opposite - the first end edge and a second end edge, so that the molding plate can utilize the first The second end edge is relatively bonded to form a joint line; a pallet unit is a solid body, and the pallet unit is locked at the bottom end of the housing portion of the box unit to close the bottom end of the receiving portion, and then The periphery of the pallet unit is formed with a plurality of laterally extending perforations; a cover unit is disposed on the top opening of the receiving portion of the box unit, and the cover unit is formed by a bendable and shaped plastic plate The bending plate is formed by bending, and the molding plate has a first end edge and a second end edge, so that the molding plate can be bonded by the first and second end edges to form a bonding wire, and the cover body is molded. a plastic flat plate is fixed on the upper opening of the plate after the molding; thereby, the group Into a high variability, and low manufacturing cost of the wafer container box structure's transport. [2] The wafer container transport case structure according to claim 1, wherein the case unit is joined to the lower portion of the receiving portion to be fixed, and the joint portion is also formed by a bendable and shaped mold. The plate is bent and surrounded, and the molding plate has a first end edge and a second end edge, so that the molding plate is bent and shaped, and the first and one end edges are relatively bonded to form a bonding wire. 14 M335787, according to the §f patent (4) item 2 圓容器運輪箱結 蝮數鎖接凸片, f牛鎖接前述之棧 t ” 一容器運輸 、足型之塑性材 中請專利笳囹筮1 A 丄、t ^ _Round container transport box knots 蝮 number of locking tabs, f cattle lock connected to the above stack t ” a container transport, foot-shaped plastic material, please patent 笳囹筮 1 A 丄, t ^ _ 箱結構 質,如聚丙烯類等。 、ί據甘申f專利範圍第1項所述之晶81容器運輸箱結 /、中棧板單元選自複合之玻璃纖維塑料。 6據申請專利範圍第i項所述之晶圓容器運輸箱結 構丄其中蓋體單元之塑型板頂緣一體形成有一或多 數兩於塑型平板之止擋凸片,而箱體單元之接合部 内徑對應容置部外徑,且棧板單元可嵌置於接合部 塑型板所圍之範圍内,而蓋體單元塑型板所圍空間 之内徑略大於箱體單元之容置部外徑,讓運輸箱可 相鄰堆疊,並產生限止定位作用。 7、 依據申請專利範圍第1或6項所述之晶圓容器運輸 箱結構,其中蓋體單元之塑型板内緣固設有一或多 數可插入箱體單元容置部内緣之限位元件,以確保 盍體早元覆设於箱體單元之穩固性。 8、 依據申請專利範圍第1或6項所述之晶圓容器運輸 箱結構,其中蓋體單元之塑性平板於塑型板所圍範 圍之内面設有一由縱橫交錯之肋片組,以增加蓋體 單元之強度。 9、 依據申請專利範圍第1項所述之晶圓容器運輸箱結 15 M335787The structure of the box is such as polypropylene. According to Ganshen f patent scope item 1, the crystal 81 container transport box junction /, the middle pallet unit is selected from composite glass fiber plastic. 6 The wafer container transport case structure according to the invention patent scope item i, wherein the top edge of the molding plate of the cover unit integrally forms one or a plurality of stop tabs on the plastic flat plate, and the joint of the box unit The inner diameter of the portion corresponds to the outer diameter of the receiving portion, and the pallet unit can be embedded in the range surrounded by the molding plate of the joint portion, and the inner diameter of the space surrounded by the plastic plate of the cover unit is slightly larger than the receiving portion of the box unit. The outer diameter allows the transport boxes to be stacked adjacent to one another and creates a limited positioning effect. 7. The wafer container transport case structure according to claim 1 or 6, wherein the inner edge of the molding plate of the cover unit is fixed with one or a plurality of limiting elements that can be inserted into the inner edge of the housing unit receiving portion. In order to ensure the stability of the carcass unit in the box unit. 8. The wafer container transport case structure according to claim 1 or 6, wherein the plastic flat plate of the cover unit is provided with a rib piece group which is criss-crossed on the inner surface of the plastic plate to increase the cover. The strength of the body unit. 9. Wafer container transport case as described in item 1 of the patent application scope 15 M335787 構’其中箱體單元之容置部内可設有一内襯盒體, 該内襯盒體係由一或多數防震隔層所組成,且防震 隔層上形成有一或多數之鉚合孔,而箱體單元容置 部之塑型板周緣形成有複數鉚合孔,各防震隔層之 鉚合孔可相互對應或對應容置部之鉚合孔,以&利 用一或多數鉚扣固掣於箱體單元之容置部内,使内 襯盒體形成多格型式。 16The inner casing of the casing unit may be provided with a lining box body, the lining box system is composed of one or more anti-vibration partitions, and one or more riveting holes are formed on the anti-vibration partition layer, and the box body A plurality of riveting holes are formed in a periphery of the molding plate of the unit accommodating portion, and the riveting holes of the anti-vibration spacers can correspond to each other or corresponding to the riveting holes of the accommodating portion, and are fixed to the box by using one or more rivets In the accommodating portion of the body unit, the lining box body is formed into a multi-grid type. 16
TW96217511U 2007-10-19 2007-10-19 Wafer-container transportation box structure TWM335787U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111562482A (en) * 2020-06-19 2020-08-21 青岛歌尔微电子研究院有限公司 Wafer performance testing device and method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111562482A (en) * 2020-06-19 2020-08-21 青岛歌尔微电子研究院有限公司 Wafer performance testing device and method

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