M315405 八、新型說明： 【新型所屬之技術領域】 供曰：關於—種承載固定裝置，尤指-種用以提 七、日日0片置§又固定的承載固定裝置。 【先前技術】 夂方產業的蓬勃發展’且在行動電話或通訊等 求不斷的成長，因此業界陸續大量開發有 口式口樣的+ ¥體電晶體，此一發 訊流通之速度及效率，亦為人們在生活及工=:= 的便利性。另，因曰 乍上页末極大 日/制W、+()的製作流程相當的複雜， 定後衣需藉助晶圓承載固定裝置來對晶圓片進行固 二 =3在丙，等有機溶劑内，並經過清洗及乾 及置取的固著良#將嚴重的影響到產品良率 =的方便性;因此’本創作人即以此作為研究課題進 習知晶圓承载固定裝置，如第一圖所示， 一環形框體10a、複數扣固片2Ga及複數螺絲施，盆中 该框體德係供一晶圓片5置放，而螺絲陁則穿設於扣 :片、2=—端’並等距固定在框體咖之頂部周緣面 :=固片2Ga可相對於螺絲3Ga作_擺動 對晶0片5進行壓掣固定。 然而’習知之晶圓承载固定裝置’在實際應用上仍存 有以下之問題點，由於其在對晶圓片5施以固定或卸離 M315405 時，是藉由逐一對各扣固片2〇a作旋入或旋出，來對晶圓 月5進行㈣固定或卸除分離；因此，在操作的過程中相 當費時與不方便，並衍生有作業員的人力成本等問題；而 亟待加以改善者。 【新型内容】 本創作之主要目的，在於提供一種晶圓承載固定裝 • 置。’其係藉由扣固片與磁性元件之間的磁性吸附作用，在 二圓^被裝人框體内時’可以固定機構對其進行快速的壓 ，疋且在取下日日圓片時，亦能達成迅速的卸離作業。 ^ *為了達成上述之目的，本創作係提供一種晶圓承載固 定^置，用以供晶圓片置設固定，包括一環形框體及一對 f定機構’其中該框體設有一供晶圓片貼接的内凸緣面及 • 一形成於内凸緣面上方的端面；該固定機構包含一固定連 φ接在框體的固定元件、一樞接在固定元件的扣固片及一對 應於扣固片之位置並固定在框體的磁性元件，該磁性元件 係用以對扣固片進行磁性吸附，並使扣固片壓擎固定在晶 圓片上。 【實施方式】 有關本創作之詳細說明及技術内容，配合圖式說明如 下’然而所附圖式僅提供參考肖說明用，並非用來對本創 • 作加以限制者。 請參照第二至五圖所示，係分別為本創作之組合示意 M315405 圖、局部立體分解放大圖、筮二 人也丨、日® 丄卜 乐二圖之組合示意圖及局部組 合剖視圖，本創作係提供一 包括-環形贿及一對固定;裝置，其主要 Q/r:=°係可為紹材或其他材料所製成，並呈- =’於侧10之底面向内延伸成形有一圓環形内凸 緣面11，於内凸緣面n之外 ^ 卜側向上延伸有一傾斜面12，於 傾斜面12之末端延伸有一與 、円凸、、彖面11平行的端面13，並 = 設有三個螺孔14，於各螺孔社左、右 兩侧分別設有凹孔15。 該固定機構2〇係可為_對或—對以上配置，本實施例 係t組，且其包含—固以件21、—扣固片22及一磁性 =件23 ’ 定元㈣係可為—螺絲’同理其亦可為圓 軸、鉚釘等各種型態，該螺絲之下方設有一開口槽211， 且其係螺固連接於框體10之螺孔14中；該扣固片22係可為 磁性體或金屬板片所製成，在板片之一端開設有一通槽 切並成形有-樞軸222，另一端則大致成形有一倒 U」形扣部223，該樞軸222係可♦人固定元件21之開 口槽2㈣，並可相對於固定元件21作上、下擺動。另磁 性:件23係可為-永久磁鐵或其他具有磁性吸附力之材料 所製成，本實施例之磁性元件23係呈一圓柱體，而分別對 %吟口扣固片22之位置並容設固框體之凹孔内。 組合時先將各磁性元件23分別迫入框體1〇之凹孔15 内—人將固定凡件21之開口槽2Π套設於扣固片22之樞軸 222上，再將固定元件21對應於框體10之螺孔14螺接；如 M315405 此，即可組合成本創作之晶圓承载固定裝置。 片置七圖所示’係分別為本創作用於供晶圓 錢及與晶圓片之組合外觀圖，本創作係用以 置㈣定’使料係將各扣㈣22相對於 固疋元件21作掀起，再將曰_ ΰ 、 冉將曰曰因片5置入框體1〇之内凸緣面 11上，即可將各扣固h' 片2板下，糟由扣固片22與磁性元件 ，之間的磁性吸附作用，可對晶圓片5進行快速的”固 二,之’在取下晶圓片5時，只要直接推動晶圓片5向 貝1私動’即可藉由晶圓片5推開各扣固片22而向上掀 起，以達成迅速卸離作業。 綜上所述，當知本創作之晶圓承載固定裝置已具有產 業利用性 '新穎性與進步性， 同類產品及公開使用，.入創作之構造亦未曾見於 用使用凡王付合新型專利申請要件，妥依 專利法提出申請。 【圖式簡單說明】 =一圖係習知之承載固定裝置之組合示意圖。 第二圖係本創作之組合示意圖。 =三圖係本創作之局部立體分解放大圖。 第四圖係第三圖之組合示意圖。 第五圖係本創作之局部組合刮視圖。 第六圖係本創作用於供晶圓片置放之剖視圖。 第七圖係、本創作與晶圓片之組合外觀圖。 M315405 【主要元件符號說明】 【習知】 框體10a 螺絲20a 扣固片30a 【本創作】 框體10 内凸緣面11 傾斜面12 端面13 螺孔14 凹孔15 固定機構20 固定元件21 開口槽211 扣固片22 通槽221 樞軸222 扣部223 磁性元件23M315405 VIII. New description: [New technical field] Supply: About the type of bearing fixture, especially for the purpose of carrying out the seven-day fixed-fixing device. [Prior Art] The booming development of the industry has been continually growing in mobile phones or communications. As a result, the industry has been developing a large number of oral crystals, which are the speed and efficiency of this communication. It is also the convenience of people in life and work =:=. In addition, because the production process of the great day/system W, +() at the end of the last page is quite complicated, the fixed clothes need to be fixed by the wafer bearing fixture to fix the wafer to 2, in C, etc. Inside, and after cleaning and drying and fixing, it will seriously affect the product yield = convenience; therefore, the creator uses this as a research topic to learn the wafer bearing fixture, as shown in the first figure. As shown, an annular frame body 10a, a plurality of fastening pieces 2Ga and a plurality of screws are applied. In the basin, the frame body is placed for a wafer 5, and the screw cymbal is disposed on the buckle: the piece, the 2=-end 'And equidistantly fixed on the top surface of the frame coffee cup: = The solid piece 2Ga can be pressed and fixed with respect to the screw 3Ga. However, the conventional wafer-carrying fixture has the following problems in practical applications. Since it fixes or detaches the wafer 5 from the M315405, it is by means of a pair of fastening pieces 2〇. a screwing in or unscrewing to perform (4) fixing or dismounting on the wafer month 5; therefore, it is quite time consuming and inconvenient in the course of operation, and has problems such as the labor cost of the operator; and needs to be improved. By. [New content] The main purpose of this creation is to provide a wafer carrier fixing device. 'It is made by the magnetic adsorption between the fastening piece and the magnetic element, and it can be quickly pressed by the fixing mechanism when the two rounds are installed in the frame, and when the Japanese yen piece is removed, It can also achieve rapid unloading operations. ^ * In order to achieve the above purpose, the present invention provides a wafer carrying and fixing device for fixing a wafer, comprising an annular frame body and a pair of f-fixing mechanisms, wherein the frame body is provided with a crystal The inner flange surface of the wafer is attached and an end surface formed above the inner flange surface; the fixing mechanism comprises a fixing member fixed to the frame body, a fastening piece pivotally connected to the fixing member, and a fastening piece Corresponding to the position of the fastening piece and fixed to the magnetic component of the frame, the magnetic component is used for magnetically adsorbing the fastening piece, and the fastening piece is fixed on the wafer. [Embodiment] The detailed description and technical contents of the present invention are as described below with reference to the drawings. However, the drawings are only provided for reference, and are not intended to limit the present invention. Please refer to the second to fifth figures, which are the combination of M315405, partial stereoscopic enlargement, 筮二人丨, 日® 丄卜乐图, and partial combination view. The utility model provides a device comprising a ring bribe and a pair of fixings; the main Q/r:=° system can be made of materials or other materials, and has a circle formed by -=' inwardly of the side of the side 10 The annular inner flange surface 11 has an inclined surface 12 extending outwardly from the inner flange surface n, and an end surface 13 parallel to the convex surface and the convex surface 11 is extended at the end of the inclined surface 12, and Three screw holes 14 are provided, and concave holes 15 are respectively provided on the left and right sides of each screw hole. The fixing mechanism 2 can be configured as a pair or a pair of the above, and the present embodiment is a group t, and includes a fixing member 21, a fastening piece 22, and a magnetic member 23'. - the screw 'synthesis can also be a variety of types of round shafts, rivets, etc., an opening groove 211 is provided under the screw, and is screwed into the screw hole 14 of the frame 10; the fastening piece 22 is It can be made of a magnetic body or a metal plate. A through groove is formed at one end of the plate and formed with a pivot 222, and the other end is substantially formed with an inverted U"-shaped buckle portion 223. ♦ The opening groove 2 (four) of the human fixing member 21 is swingable up and down with respect to the fixing member 21. Further magnetic: the member 23 can be made of a permanent magnet or other material having a magnetic attraction force. The magnetic member 23 of the present embodiment has a cylindrical shape, and the position of the % 扣 fastening sheet 22 is respectively accommodated. Set the recess in the frame. When combining, the magnetic elements 23 are respectively forced into the recesses 15 of the frame 1 - the open slots 2 of the fixed parts 21 are sleeved on the pivots 222 of the fastening piece 22, and the fixing elements 21 are correspondingly The screw holes 14 of the frame body 10 are screwed together; as in M315405, the cost-created wafer bearing fixture can be combined. The picture shown in Figure 7 is the original drawing for the combination of wafer money and wafer. This creation is used to set (4) to make the button (four) 22 relative to the solid element 21 After picking up, 曰 ΰ 、 冉 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置 置The magnetic attraction between the magnetic components can quickly "solidify" the wafer 5, and when the wafer 5 is removed, the wafer 5 can be directly pushed to the private sector. Each of the fastening pieces 22 is pushed up by the wafer 5 to be lifted up to achieve a quick unloading operation. In summary, when the wafer-carrying fixture of the present invention has industrial applicability, it is novel and progressive. Similar products and public use, the structure of the creation has not been seen in the use of Van Wang Fuhe new patent application requirements, the application of the patent law. [Simplified schematic] = a picture is a combination of the known bearing device. The second picture is a combination diagram of the creation. = Three pictures are the partial three-dimensional liberation of this creation. Fig. 4 is a schematic diagram of the combination of the third figure. The fifth picture is a partial combined view of the creation. The sixth picture is a cross-sectional view of the creation for the wafer placement. The seventh picture, the creation and M315405 [Description of main component symbols] [General] Frame 10a Screw 20a Fastening piece 30a [This creation] Frame 10 Inner flange surface 11 Inclined surface 12 End surface 13 Screw hole 14 Recessed hole 15 fixing mechanism 20 fixing element 21 opening groove 211 fastening piece 22 through groove 221 pivot 222 buckle part 223 magnetic element 23