TWM309572U - Carrier rack for substrates - Google Patents

Carrier rack for substrates Download PDF

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Publication number
TWM309572U
TWM309572U TW95213873U TW95213873U TWM309572U TW M309572 U TWM309572 U TW M309572U TW 95213873 U TW95213873 U TW 95213873U TW 95213873 U TW95213873 U TW 95213873U TW M309572 U TWM309572 U TW M309572U
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TW
Taiwan
Prior art keywords
substrate
support
brackets
strip
substrate carrier
Prior art date
Application number
TW95213873U
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Chinese (zh)
Inventor
Yau-Gung Li
Original Assignee
Yau-Gung Li
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Yau-Gung Li filed Critical Yau-Gung Li
Priority to TW95213873U priority Critical patent/TWM309572U/en
Publication of TWM309572U publication Critical patent/TWM309572U/en

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Description

M309572 ,八、新型說明: 【新型所屬之技術領域】 本創作係提供-種基板載架(―),尤指—種内部具有收納空 間並可提供基板承放的載具。 【先前技術】 參閱第-圖及第二圖,顯示一習用基板載具,其包含一對分 隔開的支架1以及配置該對支架隔開區域之間的複數支撐構件2 > 與支撑條3 ;各支架1係概成長方體狀,具有位在兩側的第一側 杯11、第二侧桿12、位在底部的下桿13及位在頂部的上桿, 支掃構件2係縱向配置地安裝在該對支架丨之第—侧桿之間與第 二側桿之間,以圍成可供基板4載放的收納空間,且各支撐構件 2上具有平行隔開的複數溝槽21用以提供基板4側邊置入承接, 而支撐條3係隔開地安裝在該二支架1之相對下桿13間,且在各 支撐條上具有平行隔開的複數凹部31用以個別承接基板4底部。 ►如此,當複數基板4 一一從該載具的頂端開口對應各溝槽21與凹 部31置入後,就能分隔開地堆疊載放。 I用基板載具利用該等支樓構件2形成側向支撐及該等支撐 條3形成底部支撐,雖然可提供複數基板4 (例如顯示器用基板) 垂直地堆疊載放,而能一次搬運多數個基板。但是,當所載放的 基板具有較大的尺寸及較小的厚度時,該等基紐會因為自身的 重1或是在受烘烤之後產生彎曲或變形,如第二圖所示;亦即, 各基板4只有兩侧邊及底部受承接支撐,所以在中間部分以及頂 M309572 部常會形成向喊是向外料^而妓板㈣曲量過大時,將造 成相鄰基板_距削、,甚至祕觸,贿賊臂無_入相鄰 基板之間來取出基板,此外,相鄰的基板並可能發生接觸碰撞導 致破裂。 為了避免⑦支撐的基板因彎曲而造成相鄰基板關距過小, 習用載具的改善方式係將支撐構件2上的溝槽21及支撐條3上的 凹部31之分隔距離放大,藉以使轉基板之間具有足夠的距離。 然而’这會使得該載具在同—體積之下所能收輯基板數目減 少,以致搬送效率降低。 【新型内容】 為對於該基板f曲造成關題尋求解靖策,本創作者經設 計後有本創狀產生。緣此,本創狀主要目的在提供一種改良 的基板载架,藉紅撐紐目喃:供基板底部敎#以及夾持, 使得堆疊在該載架内之基板彎曲量能有效降低,進而使得該載具 所月b承接的基板數目可以增加,達成提高基板的搬送效率及防止 基板在運送途中接觸損壞者。 依據本創作形成的基板载架(一),係包含一對分隔開的支 架以及配置該對支架隔開區域之間的複數支撐構件與支撐條;該 等支撐構件係縱向配置地設在該二支架之相對侧桿之間,以圍成 可供基板载放的收納空間,且各支撐構件上具有隔開的複數溝槽 用以個別承接一基板的侧邊,而支撐條係橫向配置地裝在該二支 架之相對下桿之間,且各支撐條上具有隔開的複數凹部用以個別M309572, 8, new description: [New technical field] This creation provides a kind of substrate carrier (-), especially a carrier that has a storage space inside and can provide substrate. [Prior Art] Referring to the first and second figures, there is shown a conventional substrate carrier comprising a pair of spaced apart brackets 1 and a plurality of support members 2 > and support bars disposed between the pair of bracket spaced regions 3; each bracket 1 has a substantially square shape, having a first side cup 11 on both sides, a second side rod 12, a lower rod 13 at the bottom, and an upper rod at the top, and the support member 2 is longitudinally The utility model is disposed between the first side bar of the pair of brackets and the second side bar to enclose a storage space for the substrate 4 to be placed, and each support member 2 has a plurality of parallel grooves spaced apart 21 is provided for providing the substrate 4 to be placed on the side, and the support strips 3 are installed between the opposite lower rods 13 of the two brackets 1 and have parallel recesses 31 for each of the support strips for individual The bottom of the substrate 4 is received. ► Thus, when the plurality of substrates 4 are placed one by one from the top end opening of the carrier corresponding to each of the grooves 21 and the recesses 31, they can be stacked and stacked. The substrate carrier for I uses the support members 2 to form lateral supports and the support bars 3 to form bottom supports. Although a plurality of substrates 4 (for example, substrates for display) can be vertically stacked and stacked, most of them can be transported at one time. Substrate. However, when the substrate to be placed has a larger size and a smaller thickness, the base may be bent or deformed due to its own weight 1 or after being baked, as shown in the second figure; That is to say, only the two sides and the bottom of each substrate 4 are supported by the support, so that in the middle portion and the top portion M309572, it is often formed that the shouting is the outward material and the slab (four) is too large, which will cause the adjacent substrate to be cut. Even the secret touch, the bribe arm does not enter the adjacent substrate to take out the substrate, in addition, the adjacent substrate may be contact collision resulting in cracking. In order to prevent the 7-supported substrate from being too small due to bending, the conventional carrier is improved by dividing the separation distance between the groove 21 on the support member 2 and the recess 31 on the support strip 3, thereby rotating the substrate. There is enough distance between them. However, this reduces the number of substrates that can be recovered under the same volume, so that the transport efficiency is lowered. [New content] In order to solve the problem of the substrate, the creator has created the original creation. Therefore, the main purpose of the present invention is to provide an improved substrate carrier, which can be effectively reduced by the amount of bending of the substrate stacked in the carrier by the support of the bottom of the substrate and the clamping. The number of substrates that the carrier b receives in the month b can be increased, and the transfer efficiency of the substrate can be improved and the substrate can be prevented from being damaged during transportation. The substrate carrier (1) formed according to the present invention comprises a pair of spaced apart brackets and a plurality of support members and support bars disposed between the pair of bracket spaced regions; the support members are longitudinally disposed Between the opposite side bars of the two brackets, a storage space for the substrate to be placed, and each of the support members has a plurality of spaced apart grooves for individually receiving the sides of a substrate, and the support strips are laterally disposed Mounted between the opposite lower rods of the two brackets, and each support strip has a plurality of spaced recesses for individual

6 M309572 承接基板的底邊,又各承接凹部並向τ延伸—夾以提供所承 接的基板底端插入形成夾持定位,使得由該載架所載放的基板不 易弯曲變形’進而使得設在職_之基板承制距能夠縮小, 以承接更多的基板,達成提高基板的搬送效率者。6 M309572 receives the bottom edge of the substrate, and each receives a recess and extends toward the τ-clip to provide the bottom end of the substrate to be inserted to form a clamping position, so that the substrate placed by the carrier is not easily bent and deformed, thereby enabling the in-service _ The substrate can be reduced in distance to support more substrates, and the transfer efficiency of the substrate can be improved.

在-實施财,該支撐條最好具有—絲本體及設置在該本 體上的複數支料,从獅係形摘ν雜,使得相鄰支擇部 之間具有概成ν形的凹部’又由各凹部向下延伸的夾槽最好具有 可將載放在各凹部之基板底部夾合定位的寬度。 關於本創作之其他目的、優點及特徵,將可由以下較佳實施 例的詳細說明並參照所附圖式來了解。 【實施方式】 本創作可用多鮮同的形式來實施。麟僅為例子但非用 限制的實施舰參騎關式就摘作較佳結_容說明如下 參閱第三®及第_,顯示依據本創侧成之基板載架一 财施例’其包含—對分隔開蚊架W及配置該對支架隔開丨 域之間的紐支_Μ與讀條7 ;在她_,該支架丨 與支樓構件6係赠述制組件構成,概要制如下:各支架 具有位在_邊的第-側桿51、第二側桿52、位在底部的一下4 _立在頂部的-上桿54,讀構件6係縱向配置地裝在該二; ,6 溝槽61,使得相對支觸件之間的溝槽能提供基板4 _ M309572 邊承接’另外’各支樓構件6的兩側邊具有突出的結合部62, 且4支木5之周邊上亦設有突出的結合部55,可藉由例如螺絲% 的連接件透過各讀構件的結合部62鎖人核或是透過支架5的 結合部55鎖入支樓構件,使得支撐構件6與支架5形成可拆卸地 連接(如第三圖、第七圖所示)。 配合第五®、第六圖所示,本_特徵在於該支撐條7的設 計,該支撐條7係可安裝在該二支架5之相對下桿53之間,且具 有-條狀本㈣及設置在财體上的魏續部?3,在本實施 例中,各域部73係形成倒V形狀,使得相鄰域部之間形成v 形的凹部Π,該等凹㈣數目最好和支職件6上的溝槽6i數 目相等並呈對齊配置’使得各凹部71能承接—基板4的底部Μ , 而且,各凹部71 #底端並向下延伸形成—夾槽74,該夾槽最好 具有可將餘在各凹敎基板底部41央奴_寬度,使得承接 在各凹部71的基板4能同時受支撐與受夾持。 依據本創作所賊的基域架,如上所述,射的支樓構件 6更在承接凹部41内包含-夾槽74用以將該基板底部41夾合, 使得所支_基板不易彎曲;_,#基板4堆疊地載放入該载 架内之後’除了可_域構件6以及支_ 7來形成侧向與底 部支撑之外,並可藉該錢74來將各基板4的底部41夾持定位, 以便將各基板4目自身重量或是細職生的彎曲量降至最低, 藉此’設在支樓構件上的溝槽61與設在支樓條上的凹部71之間 距將可縮小’躺使得賴架仙—體積下能載放更多的基板, M309572 達成提回基板顿顿率及防止基板在運送射接觸壞。故本 創作能達成_的設計目的及使用效果。 ⑴述僅讀本翁之構造作触實施_,峨本創作 的《又=射可作多種變化或修改;例如,支雜7上的凹部形 狀不限S為以’其它適合的幾何職畴也可以,支撑構件6 與支撐條7亦不限制為要以螺絲來鎖合在支架5上,其它習用結 合技術或是-體賴村使用。如,對·悉此魏藝人何 作之明㈣換雜改,仍將併人於摘作主_糊範圍内。 【圖式簡單說明】 =-嶋職嫩—侧,龜_㈣數齡 第一圖係沿第一圖之2-2線所取的剖視圖; 第一圖係本創作弟一實施例的組合立體圖; 第四圖係第三圖之元件分解略圖; 第五圖係第四圖之支撐條的立體放大圖; 第六圖係第三圖之-縱向剖視圖’並顯示内部堆 第七圖係沿第六圖之7-7線所取的剖視圖。 土 【主要元件符號說明】 h支架 11· 12·側桿 13·下桿 14·上桿 2·支撐構件 21.溝槽 3·支撐條 31·凹部 4·基板 41·底部 M309572 5. 支架 53.下桿 55. 62.結合部 6. 支撐構件 7. 支撐條 72.本體 74.夾槽 51. 52.侧桿 54.上桿 56.螺絲 61.溝槽 71.凹部 73.支撐部In the implementation, the support bar preferably has a wire body and a plurality of materials disposed on the body, and is shaped from the lion system so that the adjacent portions have a v-shaped recess between the adjacent portions. Preferably, the clip grooves extending downward from the respective recesses have a width at which the bottoms of the substrates placed on the respective recesses are sandwiched and positioned. Other objects, advantages and features of the present invention will become apparent from [Embodiment] This creation can be implemented in many different forms. Lin is only an example but the implementation of the non-restricted implementation of the ship's sneakers is better. _Following the description below refers to the third and the _, showing the substrate carrier based on this creation. - for the separation of the mosquito net W and the arrangement of the pair of brackets between the 丨 的 的 Μ 读 读 读 读 读 读 读 ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; As follows: each bracket has a first side rod 51 located at the _ side, a second side rod 52, a lower 4 _ standing at the top of the top - upper rod 54, the reading member 6 is longitudinally mounted on the two; , 6 grooves 61, so that the grooves between the opposite supporting members can provide the substrate 4 _ M309572 while the side of the 'other' each branch member 6 has a protruding joint 62 on both sides, and the periphery of the four branches 5 A protruding joint portion 55 is also provided on the upper portion, and the joint member can be locked by the joint portion of each of the read members 62 or the joint member 55 through the joint portion 55 of the bracket 5, for example, the support member 6 can be The bracket 5 is detachably connected (as shown in the third and seventh figures). In conjunction with the fifth and sixth figures, the present feature is characterized by the design of the support bar 7, which can be mounted between the opposite lower bars 53 of the two brackets 5, and has a strip-shaped (four) and Set up the continuation of the financial sector? 3. In the present embodiment, each of the domain portions 73 is formed in an inverted V shape such that a v-shaped concave portion 形成 is formed between adjacent domain portions, and the number of the concave portions (four) is preferably the same as the number of grooves 6i on the branch member 6. Equally and in an aligned configuration 'so that each recess 71 can receive the bottom Μ of the substrate 4, and the bottom end of each recess 71 # extends downwardly to form a clip groove 74, which preferably has a recess The base portion 41 of the substrate has a width such that the substrate 4 received in each of the recesses 71 can be simultaneously supported and clamped. According to the base frame of the thief of the present invention, as described above, the protruding branch member 6 further includes a clip groove 74 in the receiving recess 41 for sandwiching the bottom portion 41 of the substrate, so that the supported substrate is not easily bent; After the substrate 4 is stacked and placed in the carrier, the side surface 41 of each substrate 4 can be sandwiched by the money 74 in addition to the lateral member 6 and the support 7 to form the lateral and bottom supports. Positioning is performed to minimize the weight of each substrate 4 or its fineness, so that the distance between the groove 61 provided on the branch member and the recess 71 provided on the branch line will be The reduction of 'lie makes it possible to carry more substrates under the volume, and the M309572 achieves the recovery of the substrate and prevents the substrate from being damaged in transport. Therefore, this creation can achieve the design purpose and use effect. (1) The description only reads the structure of the Weng's construction. _, the creation of the 又 = 射 can be made a variety of changes or modifications; for example, the shape of the recess on the branch 7 is not limited to S other suitable geometric domain can also The support member 6 and the support bar 7 are also not limited to be locked to the bracket 5 by screws, and other conventional bonding techniques are used in the village. For example, if you understand the Wei Yiren's work (4), you will still be selected as the main _ paste. [Simple description of the schema] =- 嶋 嫩 — 侧 侧 侧 侧 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , = = = = = = The fourth figure is an exploded view of the third figure; the fifth figure is a three-dimensional enlarged view of the support bar of the fourth figure; the sixth figure is the third figure - the longitudinal sectional view 'and shows the internal pile seventh figure A cross-sectional view taken on line 7-7 of Figure 6. Soil [Main component symbol description] h bracket 11·12·side bar 13·lower bar 14·upper bar 2·support member 21.groove 3·support bar 31·recess 4·substrate 41·bottom M309572 5. bracket 53. Lower rod 55. 62. joint portion 6. support member 7. support rod 72. body 74. clip groove 51. 52. side rod 54. upper rod 56. screw 61. groove 71. recess 73. support portion

Claims (1)

M309572 九、申請專利範圍: 1、一種基板载架(一),包含·· 一對隔開並相對的支架,各支架具有兩側邊及一底部; 數支撐構件,各支撐構件係縱向地設置在該二支架之相對側 邊之間,且該等支撐構件上具有隔開的複數溝槽用以提供基 板的侧邊承接;及 數支撐條’各支撐條係隔開地設置在該二支架之相對底部之 • 間’各支撐條上具有隔開的複數凹部用以個別承接一基板的 底邊’且該凹部内並向下延伸一夾槽用以提供所承接的基板 底端插入形成夾持。 2如申明專利耽圍弟1項所述之基板載架(一),其中,該支撐 條具有一條狀本體及設置在該本體上的複數支撐部,各支撐 部係形成倒V形狀,使得相鄰支樓部之間形成V形的凹部。 3、 如申請專利範圍第2項所述之基板載架(一),其中,該支撐 _ 條上的夾槽係由各凹部的底端向下延伸形成,並具有可將基 板底部夾合定位的寬度。 4、 如申請專利範圍第工項所述之基板載架㈠,其中,設在該 支撐條上的凹糖目係與設在支撐構件上的溝槪 呈對齊配置。 5、 如中請專利範圍第丄項所述之基板载架㈠,其中 具有位在_邊的第—側桿、第二側桿及 ^、 而支樓構件伽絲顧二枝之_第^與 M309572 相對第二侧桿之間,且各支撐條係橫向配置地安裝在該二支 架之相對下桿之間。M309572 IX. Patent application scope: 1. A substrate carrier (1), comprising: a pair of spaced and opposite brackets, each bracket having two sides and a bottom; a plurality of support members, each supporting member is longitudinally disposed Between the opposite sides of the two brackets, and the supporting members have spaced apart plurality of grooves for providing side receiving of the substrate; and the plurality of supporting strips 'each supporting strip are spaced apart from the two brackets The bottom of each of the support strips has a plurality of spaced apart recesses for individually receiving a bottom edge of a substrate, and a recess is formed in the recess and downwardly for providing a bottom insert of the substrate to be inserted into the clip. hold. [2] The substrate carrier (1) of claim 1, wherein the support strip has a strip-shaped body and a plurality of support portions disposed on the body, each support portion forming an inverted V shape, such that the phase A V-shaped recess is formed between the adjacent branch portions. 3. The substrate carrier (1) according to claim 2, wherein the clamping groove on the support_ strip is formed by extending a bottom end of each concave portion and has a bottom portion of the substrate. The width. 4. The substrate carrier (1) according to the application of the patent scope, wherein the concave sugar system disposed on the support strip is aligned with the groove provided on the support member. 5. The substrate carrier (1) according to the scope of the patent application, wherein the first side bar, the second side bar and the ^, and the branch member gaze Gu _ ^ Between the second side bars and the M309572, and the support bars are laterally disposed between the opposite lower bars of the two brackets. 1212
TW95213873U 2006-08-07 2006-08-07 Carrier rack for substrates TWM309572U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI401764B (en) * 2008-09-29 2013-07-11 Tokyo Electron Ltd Substrate processing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI401764B (en) * 2008-09-29 2013-07-11 Tokyo Electron Ltd Substrate processing device

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