TWM296476U - Flip chip LED with high luminous efficiency - Google Patents

Flip chip LED with high luminous efficiency Download PDF

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Publication number
TWM296476U
TWM296476U TW94221521U TW94221521U TWM296476U TW M296476 U TWM296476 U TW M296476U TW 94221521 U TW94221521 U TW 94221521U TW 94221521 U TW94221521 U TW 94221521U TW M296476 U TWM296476 U TW M296476U
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Taiwan
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layer
flip
emitting diode
light
oxide
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TW94221521U
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Chinese (zh)
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Wei-Jr Wen
Yi-Feng Lin
Shi-Ming Pan
Feng-Ren Jian
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Formosa Epitaxy Inc
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Priority to TW94221521U priority Critical patent/TWM296476U/en
Publication of TWM296476U publication Critical patent/TWM296476U/en

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M296476 八、新型說明: 【新型所屬之技術領域】 本發明係有關於-種發光二極體,其係特別有關於提供高發光率之覆晶式 發光二極體結構。 【先前技術】 按,照明設備之發展以來,由於傳統照明設備功率較高之因素 生電力雜較多之缺點,為此,各國產、學、研界專家學者紛紛投人照明設 之發光元件的研究,發光二極體(Light Emitting DiQde; _即在此; 應而生。 广口 請參閱第-圖’其係為習知之仙藍寶石基板所成長氮化鎵系列之 極體之示意圖,如圖所示,其係依序將化鎵緩衝層2,,—n型氮化鏡二 接觸層3’,—氮化銦鎵之發光層4’,—p型氮化贿披覆層5,、—= 化鎵,姆接觸層6’及-P型透光金屬導電層7,遙晶成長於—藍寶石基板/ 上’最後’設置-陽極電極8’於該p型透光金屬導電層7,上方以及=置 :電極9’於該N型氮化鎵歐姆接觸層3,仏並分別於該陽極電二,‘ 陰極電極9’接設導線1()’,1Γ以導通—導電支架以,之兩電極。… β上述之習知發光二極體結構中,當該氮化銦鎵之發光層4,發出光 陽極電極8’係、會遮蔽該發光層4射出之光線,而使發光 = ^係為自知之覆晶式發光二極體之示意圖,如騎示,此姓 15> ^ ^ Η =細附於該基座15’之-第-導電區13’與-第二導電區 ”騎光層4發出之光線時,不經由該陽極電極8,,而穿透 板1 (如藍寶石)直接通導至外界,藉此,以增加發光面積。 〜 雖然上述第二圖所示之覆晶式發光二極體可解決該陽極 光層4發出之光線的問題,,然,由於此覆晶式發光二極體之部份光線 M296476 第-導電區13、該第二導電區14,及該基座i5, 覆晶式發光二極體結構係無法有效發揮發光效果。…、外界,故,此 有鑑於此,如何提出1高發光率之覆 . ^ 、久以來一直是使用者殷切盼望及本創作人冬茲在玆 =,而本解人胁多年從 業知識,終於研究出一籍古A止、本热 躬/、们人之專 題。 π 5+率之彳』式發光H體改良,可解決上述之問 【新型内容】 發光3=要目-白Γ在於提供—種發光二極體,其係提供高發光率之覆晶式 x = f 射發光層發出之光線,以避免光線被遮蔽的情形產生。 極4則細㈣術將發光二 _灿± ± ν”,、基板上,糟此,以縮短發光二極體之導熱距離,增加 兀件使用哥命,且進一步縮小封裝體積。 為缸述之目的及優點,本創作之一種高發光率之覆晶式發光二極體,其係 透月^^層氧化層、一金屬反射層、-導電層以及-擴散保護 二於Ρ型半導體層上方,藉此以反射一發光層發出之光線,提昇覆晶式發光 極體之毛光效率’此外’本創作亦可利用覆晶技術將發光二極體晶片反轉設 置於高導熱基板上,藉此,提昇發光二極體之散熱能力,進—步延伸此發光二 極體之使用週期。 【實施方式】 兹為使貴審查委員對本發明之結構特徵及所達成之功效有更進一步之瞭 解與認識,謹佐雜佳之實施·配合詳細之綱,說明如後: 基於習知之覆晶式發光二極體之發光效率不彰之缺失,故,本創作提供一 種咼叙光率之覆晶式發光二極體,以解決上述問題。 明芩閱第二圖,其係為本創作之高發光率之覆晶式發光二極體晶片之示意 圖,如圖所示,本創作之發光二極體晶片結構係包含一透明基板10、一半導體 M296476 厗透^導电層18、—氧化層20、—金屬反射層22、—導電層24、- (SaP^: ) , SiC) ^ ^t#(Zn〇) ^ ^^(Gap) ^ ^^(Ga :- 之者’或者具有南透光特性之基板材料。 r 體層^者基板1〇上方設置該半導體層,該半導體層包含一 N型半導 ^ 毛光層14以及一 丰導辦展】只甘cb ^^ 型半導體層12與該p_# 1^ 其巾,籍賴14係介於則 尘千¥體層16之間,而該n型半導體層丨?孫糸M 層,該P型半導體層16係為_p_GaN層。 传體層12係為-嶋 -音ίίΓ峨層14之_綱自InGaN/GaN錄量佛_、三—五族 兀此’”、的—半導體量子井(QUantum wel1)結構之其巾之-者,且辭導體旦 子井結構係包含AlaInbGai』/AU Ga ^ "…里 〇^y<l;x>c>a〇 -中 a,b』,ba+b<1;x,劍; 6產纽姆接觸,以減少接觸電阻’其中,該透明導電層Μ材料係可選自氧化 名、乳化錫、德麵、氧化_、氧化鋅、氧化銦鋅、氧化鎂鋅、氧化錫編、 llTmnT^' "(Pt)'Nl/AU' ΉΝ'Μ' CUA1°2'LaCu〇S'CuGa〇2' 觸、氧化銥⑽)、氧化職〇)、氧化釕_與金⑽組合之其 又,設置該氧化層20於該透明導電層18上方,以 於該氧化層2〇上方後,在該氧化層2Q之_適當位置處設置 該透明導電層18與該金屬反射層22產生電性連接,其中,該金屬反祕^之 材料係可為金(Au)、銘(A1)、銀(Ag)、姥⑽之其中之 可選自二氧娜㈣、、Sl__)、氧她: A1N與BeN之其中之一者。 在此實施例中’該金屬反射層22之材料係以銀或銘為例,因銀或銘之可見 先波段’反射率大於· ’故,使本創作之發光;體具有較高反射率之特性, 然,由於該金屬反射層22之材料皆具有高擴散係數,易與其他金屬反應,因此, 本創作係設置該氧化層20以作為該透明導電層18及該金屬反射層22 M296476 隔層,藉此’使本創作之發光二極體可承受更高的製程溫度而不影齡 之反射率’此外,亦因該氧化層的阻隔’以改善該金屬反射;之離 ⑽罐atlQn)現象,再者,當該發光層14射出光線時,亦可 孟屬反射層22之設置’反射光線以由該透明基板1Q取出,藉此,改盖 性雜遮蔽該發光層14射出之光線,而造成覆晶式發光二極體發光解不彰的 問題。M296476 VIII. New Description: TECHNICAL FIELD OF THE INVENTION The present invention relates to a light-emitting diode, which is particularly related to a flip-chip light-emitting diode structure that provides high luminosity. [Prior Art] According to the development of lighting equipment, due to the high power of traditional lighting equipment, there are many disadvantages of power generation. For this reason, experts, scholars and scholars from various industries, scholars and research institutes have invested in lighting components. Research, light-emitting diode (Light Emitting DiQde; _ is here; should be born. Wide-mouth, please refer to the figure - Figure' is a diagram of the polar body of the gallium nitride series grown by the known sapphire substrate, as shown As shown, the gallium buffer layer 2, the n-type nitriding mirror two-contact layer 3', the indium nitride gallium light-emitting layer 4', the p-type nitride brittle coating layer 5, —= gallium, m contact layer 6' and -P type light-transmissive metal conductive layer 7, the crystal growth on the sapphire substrate / upper 'last' setting - anode electrode 8' on the p-type transparent metal conductive layer 7, Above and = set: electrode 9' in the N-type gallium nitride ohmic contact layer 3, and respectively connected to the anode 2, 'cathode electrode 9' wire 1 () ', 1 Γ to conduct - conductive bracket, Two electrodes.... In the above-mentioned conventional light-emitting diode structure, when the indium nitride gallium light-emitting layer 4 emits light The anode electrode 8' is a schematic diagram that shields the light emitted from the light-emitting layer 4, so that the light emission = ^ is a self-known flip-chip light-emitting diode, such as riding, this surname 15 > ^ ^ Η = fine attached When the light emitted by the light-emitting layer 4 is in the -first conductive region 13' and the -second conductive region of the pedestal 15', the anode plate 8 is not passed through, and the penetrating plate 1 (such as sapphire) is directly guided. To the outside world, thereby increasing the light-emitting area. ~ Although the flip-chip light-emitting diode shown in the second figure above can solve the problem of the light emitted by the anode light layer 4, of course, due to the flip-chip light-emitting Part of the light of the polar body M296476, the first conductive region 13, the second conductive region 14, and the pedestal i5, the flip-chip light-emitting diode structure can not effectively exhibit the luminous effect. ..., the outside world, therefore, in view of this Therefore, how to propose a high luminosity coverage. ^, has long been the user's eager hope and the creator of the winter syllabus =, and the solution of the people's many years of professional knowledge, and finally researched a book ancient A, this Enthusiasm, the theme of the people. π 5+ rate 彳 式 发光 发光 发光 H H H H H H H H H H H H H H H H H H H H H H H H [New content] Luminous 3 = The main purpose - the white enamel is to provide a kind of illuminating diode, which provides a high illuminance flip chip x = f to emit light from the illuminating layer to avoid the situation where the light is blocked. The pole 4 is fine (four) will emit two _can ± ± ν", on the substrate, worse, to shorten the thermal distance of the light-emitting diode, increase the use of the scorpion, and further reduce the package volume. OBJECT AND ADVANTAGES OF THE INVENTION A high-luminosity flip-chip light-emitting diode of the present invention is formed by a vapor-permeable layer, a metal reflective layer, a conductive layer, and a diffusion-protected semiconductor layer. In order to reflect the light-emitting efficiency of the flip-chip light-emitting body by reflecting the light emitted by the light-emitting layer, the creation of the light-emitting diode chip can be reversed on the high-heat-conducting substrate by using the flip chip technology. The heat dissipation capability of the light-emitting diode is improved, and the use period of the light-emitting diode is further extended. [Embodiment] In order to enable the reviewing committee to have a better understanding and understanding of the structural features and the effects achieved by the reviewing committee, it is necessary to carry out the implementation and the detailed outline of the present invention, as follows: Based on the conventional flip-chip illuminating The luminous efficiency of the diode is not lost. Therefore, this creation provides a flip-chip light-emitting diode with a high luminous rate to solve the above problems. The second figure is a schematic diagram of the high-luminance flip-chip light-emitting diode chip of the present invention. As shown in the figure, the light-emitting diode structure of the present invention comprises a transparent substrate 10 and a Semiconductor M296476 厗 导电 conductive layer 18, oxidized layer 20, metal reflective layer 22, conductive layer 24, - (SaP^: ), SiC) ^ ^t#(Zn〇) ^ ^^(Gap) ^ ^^(Ga:- the person' or the substrate material having the south light transmitting property. The body layer is disposed above the substrate 1 , and the semiconductor layer includes an N-type semi-conductive light layer 14 and a conductive layer The exhibition is only for the cb ^^ type semiconductor layer 12 and the p_# 1^ its towel, and the 14 layer is between the dust layer 16, and the n-type semiconductor layer is the Sun M layer. The P-type semiconductor layer 16 is a _p_GaN layer. The carrier layer 12 is a 嶋- ί ί Γ峨 layer 14 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ (QUantum wel1) structure of the towel - and the conductor of the conductor structure contains AlaInbGai』/AU Ga ^ "...里〇^y<l;x>c>a〇-中 a,b』,ba +b<1;x,sword; 6 Nimm contact to reduce contact resistance', wherein the transparent conductive layer Μ material can be selected from the group consisting of oxidation name, emulsified tin, German surface, oxidation _, zinc oxide, indium zinc oxide, magnesium zinc oxide, tin oxide, llTmnT^' "(Pt)'Nl/AU' ΉΝ'Μ' CUA1°2'LaCu〇S'CuGa〇2' touch, yttrium oxide (10)), oxidized ruthenium), yttrium oxide _ and gold (10) Moreover, the oxide layer 20 is disposed above the transparent conductive layer 18, and after the oxide layer 2 is over, the transparent conductive layer 18 and the metal reflective layer 22 are electrically disposed at appropriate positions of the oxide layer 2Q. Connection, wherein the material of the metal anti-mystery can be gold (Au), Ming (A1), silver (Ag), 姥 (10), which may be selected from the group consisting of dioxin (four), S1__), oxygen her: A1N In this embodiment, the material of the metal reflective layer 22 is exemplified by silver or Ming, and the visible light of the silver or the visible first band 'reflectivity is greater than ·' The body has a high reflectivity characteristic, and since the material of the metal reflective layer 22 has a high diffusion coefficient, it is easy to react with other metals, therefore, The oxide layer 20 is disposed as a transparent layer of the transparent conductive layer 18 and the metal reflective layer 22 M296476, thereby enabling the luminous diode of the present invention to withstand higher process temperatures without the reflection rate of the age of the lens. In addition, due to the barrier of the oxide layer 'to improve the reflection of the metal; the (10) can atlQn phenomenon), and when the light-emitting layer 14 emits light, the light-reflecting layer 22 can also be set to 'reflect light The transparent substrate 1Q is taken out, whereby the light of the light-emitting layer 14 is shielded by the cover-up property, and the problem of the light-emitting of the flip-chip light-emitting diode is not solved.

而後’於該金屬反賴22上方設置該擴散保護層26,其係與該氧化層2〇 提供相同之作用,以髓該金屬反射層22不與其他金屬產生反應,其中,^廣 散保護層26材料係可選自Ti/Ni、Cr/Ni、TiN、TiW、鎮(W)、鎳(Ni) 鉻 钥(Mo)、鈀(Pd)、鉑(Pt)或上述元素組合之其中之一者。 ° 最後,於該發光層14與該N型半導體層12、該p型半導體層16與該發光 層14隔離的區域上設置該第一電極30,以做為發光二極體的陰極電極,其中, 該第一電極30係可與該N型半導體層12產生良好的歐姆接觸,進而有較低之 接觸電阻,且該第一電極30材料係可選自Ti/Al、Ti/Al/Ti/Au、Ti/Al/Pt/Au、Then, the diffusion protective layer 26 is disposed above the metal reciprocating layer 22, which provides the same function as the oxide layer 2, so that the metal reflective layer 22 does not react with other metals, wherein the protective layer is dispersed. The material of 26 may be selected from the group consisting of Ti/Ni, Cr/Ni, TiN, TiW, town (W), nickel (Ni) chrome (Mo), palladium (Pd), platinum (Pt) or one of the above combinations of elements. By. Finally, the first electrode 30 is disposed on the region of the light-emitting layer 14 and the N-type semiconductor layer 12 and the p-type semiconductor layer 16 and the light-emitting layer 14 as a cathode electrode of the light-emitting diode, wherein The first electrode 30 can generate good ohmic contact with the N-type semiconductor layer 12, thereby having a lower contact resistance, and the first electrode 30 material can be selected from the group consisting of Ti/Al, Ti/Al/Ti/ Au, Ti/Al/Pt/Au,

Ti/Al/Ni/Au 、 Ti/Al/Pd/Au 、 Ti/Al/Cr/Au 、 Ti/Al/Co/Au 、 Cr/Al/Cr/Au 、Ti/Al/Ni/Au, Ti/Al/Pd/Au, Ti/Al/Cr/Au, Ti/Al/Co/Au, Cr/Al/Cr/Au,

Cr/Al/Pt/Au > Cr/Al/Pd/Au > Cr/Al/Ti/Au ^ Cr/Al/Co/Au > Cr/Al/Ni/Au ^Cr/Al/Pt/Au > Cr/Al/Pd/Au > Cr/Al/Ti/Au ^ Cr/Al/Co/Au > Cr/Al/Ni/Au ^

Pd/Al/Ti/Au 、 Pd/Al/Pt/Au 、 Pd/Al/Ni/Au 、 Pd/Al/Pd/Au 、 Pd/Al/Cr/Au 、Pd/Al/Ti/Au, Pd/Al/Pt/Au, Pd/Al/Ni/Au, Pd/Al/Pd/Au, Pd/Al/Cr/Au,

Pd/Al/Co/Au 、 Nd/Al/Pt/Au 、 Nd/Al/Ti/Au 、 Nd/Al/Ni/Au 、 Nd/Al/Cr/Au 、Pd/Al/Co/Au, Nd/Al/Pt/Au, Nd/Al/Ti/Au, Nd/Al/Ni/Au, Nd/Al/Cr/Au,

Nd/Al/Co/Au 、 Hf/Al/Ti/Au 、 Hf/Al/Pt/Au 、 Hf/Al/Ni/Au 、 Hf/Al/Pd/Au 、Nd/Al/Co/Au, Hf/Al/Ti/Au, Hf/Al/Pt/Au, Hf/Al/Ni/Au, Hf/Al/Pd/Au,

Hf/Al/Cr/Au 、 Hf/Al/Co/Au 、 Zr/Al/Ti/Au 、 Zr/Al/Pt/Au 、 Zr/Al/Ni/Au 、Hf/Al/Cr/Au, Hf/Al/Co/Au, Zr/Al/Ti/Au, Zr/Al/Pt/Au, Zr/Al/Ni/Au,

Zr/Al/Pd/Au、Zr/Al/Cr/Au、Zr/Al/Co/Au、TiNx/Ti/Au、TiNx /Pt/Au、Zr/Al/Pd/Au, Zr/Al/Cr/Au, Zr/Al/Co/Au, TiNx/Ti/Au, TiNx/Pt/Au,

TiNx/Ni/Au、TiNx/Pd/Au、TiNx/Cr/Au、TiNx/Co/Au、TiWNx/Ti/Au、TiWNx/Pt/Au、TiNx/Ni/Au, TiNx/Pd/Au, TiNx/Cr/Au, TiNx/Co/Au, TiWNx/Ti/Au, TiWNx/Pt/Au,

TiMc/Ni/Au、TiWNx/Pd/Au、TiWNx/Cr/Au、TiWNx/Co/Au、NiAl/Pt/Au、TiMc/Ni/Au, TiWNx/Pd/Au, TiWNx/Cr/Au, TiWNx/Co/Au, NiAl/Pt/Au,

NiAl/Cr/Au 、 NiAl/Ni/Au 、 NiAl/Ti/Au 、 Ti/NiAl/Pt/Au 、 Ti/NiAl/Ti/Au 、 Ti/NiAl/Ni/Au、Ti/NiAl/Cr/Au 之其中之一者。 此外,請一併參閱第四圖,其係為本創作之高發光率之覆晶式發光二極體 之示意圖,如圖所示,本創作係於該擴散保護層26上方設置一第一金屬接合層 28以及該第一電極30上方設置一第二金屬接合層32後,利用覆晶技術反轉本 8 M296476 創作之發光二極體晶片,以使該第一金屬接合層28與該第二金屬接合層32接 合一導熱基板32上方,其中,該第一金屬接合層28與該第二金屬接合層犯材 料係可選自金、銦(In)、錫(Sn)之其中之一者,該導熱基板3係可選用導電材 料,如金、銀或鋁等,藉此,以形成本創作之高發光率之覆晶式發光二極體, 另由於本創作之發光二極體晶片係接合於該導熱基板32,因此可有效 二極體的散熱率與導電率。 再者,本創作係不同於習知之覆晶式結構需另蠢晶一第二電極,本創作之 該透明導電層18、該氧化層20、該金屬反射層22與該擴散倾層26係可作為 第二電極,即陽極電極,藉此,經由該導熱基板32通導陰性電極及陽性電極, 以使發光二極體發出光線。 綜上所述,本發明係有關於_種高發光率之覆晶式發光二極體,豆係於$ 透明導電層、該氧化層、該金屬反射層、該導電層以及該擴散保護層的配人了 發觸《之猶,藉此,贱發光二減光雜輕,並有额昇 此外’本創作之覆晶式發光二極體晶片係可應用於燈泡型([卿)、印刷 路板型(P⑻、正面發光型、側面發光型或表轉著型()等之賴,藉此, 以讓使用者本創作之發光二極體產品時,可獲得較高之發光率。3 故本發明實為—具有新穎性、進步性及可供產業利用者,應符合我 專 物嫩,___㈣,祈朗早日賜准 施之範=施例而已,並非用來_發明實 均等變化與修飾,均應包括於本發明之、特徵及精神所為之 M296476 【圖式簡單說明】 第一圖:其^^知之使賴寶石基板所成長氮化鎵系列之發光二極體之示意 第二圖··其係為習知之覆晶式發光二極體之示音圖· 以及 : ΪΙ:Ι::Ι;Ι:::::^-^^^ -t® 創作μ柄之覆晶式發光4體之示意圖。 【主要元件符號說明】 • 1 監寶石基板 2’ 氮化鎵緩衝層 3 N型氮化鎵歐姆緩衝層 4 氮化銦鎵之發光層 5 p型氮化鋁鎵披覆層 6 P型氮化鎵歐姆接觸層 7 p型透光金屬導電層 8 陽極電極 9’ 陰極電極 • 10,,11,導線 12’ 導電支架 13 第_導電區 14 第二導電區 15, 基座 10透明:&板 12 N型半導體層 14 發光層 16 p型半導體層 18透明導電層 10 M296476 20 氧化層 22 金屬反射層 24 導電層 26 擴散保護層 28 第一金屬接合層 30 第一電極 32 第二金屬接合層 34 導熱基板NiAl/Cr/Au, NiAl/Ni/Au, NiAl/Ti/Au, Ti/NiAl/Pt/Au, Ti/NiAl/Ti/Au, Ti/NiAl/Ni/Au, Ti/NiAl/Cr/Au One of them. In addition, please refer to the fourth figure, which is a schematic diagram of the high-luminance flip-chip light-emitting diode of the present invention. As shown in the figure, the present invention is provided with a first metal above the diffusion protection layer 26. After the bonding layer 28 and the second metal bonding layer 32 are disposed above the first electrode 30, the LED diode created by the 8 M296476 is inverted by the flip chip technology to make the first metal bonding layer 28 and the second The metal bonding layer 32 is bonded to a thermal conductive substrate 32, wherein the first metal bonding layer 28 and the second metal bonding layer may be selected from one of gold, indium (In), and tin (Sn). The heat-conducting substrate 3 may be made of a conductive material such as gold, silver or aluminum, thereby forming a high-luminance flip-chip light-emitting diode of the present invention, and the light-emitting diode chip bonding of the present invention. The heat conductive substrate 32 can effectively dissipate heat dissipation rate and conductivity of the diode. Furthermore, the present invention is different from the conventional flip-chip structure in that a second electrode is required, and the transparent conductive layer 18, the oxide layer 20, the metal reflective layer 22 and the diffusion layer 26 can be As the second electrode, that is, the anode electrode, the negative electrode and the positive electrode are guided through the heat conductive substrate 32 to cause the light emitting diode to emit light. In summary, the present invention relates to a high-luminance, flip-chip light-emitting diode, the bean being bonded to a transparent conductive layer, the oxide layer, the metal reflective layer, the conductive layer, and the diffusion protective layer. With the person who touched the "Just, by this, the 贱 二 减 减 减 减 , , , , 此外 此外 此外 此外 ' ' ' 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本The plate type (P(8), front-illuminated type, side-illuminated type, or surface-turned type) can be used to obtain a higher luminous efficiency when the user creates the light-emitting diode product. The invention is practically - novelty, progressive and available for industrial use, should conform to my speciality, ___ (four), and the early application of the stipulation of the application of the syllabus = not only for the actual change and modification of the invention M296476 [Simplified description of the drawings] The first picture: the schematic diagram of the LEDs of the gallium nitride series grown by the sapphire substrate. · It is a sound map of a conventional flip-chip light-emitting diode · and: Ϊ Ι:Ι::Ι;Ι:::::^-^^^ -t® Create a schematic diagram of the flip-chip light-emitting body of the μ handle. [Main component symbol description] • 1 gemstone substrate 2' gallium nitride Buffer layer 3 N-type gallium nitride ohmic buffer layer 4 Indium gallium nitride light-emitting layer 5 p-type aluminum gallium nitride cladding layer 6 P-type gallium nitride ohmic contact layer 7 p-type transparent metal conductive layer 8 Anode electrode 9 'Cathode electrode•10,,11, wire 12' Conductive support 13 _ conductive region 14 second conductive region 15, pedestal 10 transparent: & plate 12 N-type semiconductor layer 14 luminescent layer 16 p-type semiconductor layer 18 transparent conductive Layer 10 M296476 20 Oxide layer 22 Metal reflective layer 24 Conductive layer 26 Diffusion protective layer 28 First metal bonding layer 30 First electrode 32 Second metal bonding layer 34 Thermally conductive substrate

Claims (1)

M296476 九、申請專利範圍: 1· 一種高發光率之覆晶式 — 一透明基板; —極體,其主要結構係包含·· 半導體層,其係設於該透 光層及一 P型半導體 半導體層之間; 日月基板上方,且包含一况型铸體層、一發 ^其中,該發光層介於該N型半導j -體層與該P型 ‘透明導電層,其係設於該 P 型半導體層上方且電崎触p型半導體M296476 IX. Patent application scope: 1. A high-luminosity flip-chip type—a transparent substrate; a polar body whose main structure includes a semiconductor layer, which is disposed on the light transmissive layer and a P-type semiconductor semiconductor. Between the layers; above the solar and solar substrate, and including a conditional cast layer, wherein the light-emitting layer is interposed between the N-type semi-conductive j-body layer and the P-type transparent conductive layer, which is disposed on the P Above the semiconductor layer and the electric contact with the p-type semiconductor 氧化層,其係设於該透明導電層上方; 一金屬反射層,其係設於該氧化層上方; 以電性連接該透明導電 一導電層,其係設於該氧化層之-適當位置處, 層與該金屬反射層; 上方且電性連接該金屬反射層; N型半導體層上方且電性連接該N 一擴散保護層,其係設於該金屬反射層 一第一電極,其係設於該半導體層之該 型半導體層; 一導熱基板,該導熱基板之表面具有第一及第二金屬接和層; 其中’該發光二極體之第-電極與該概賴層是躺^導熱基板,分 別與第一與第二金屬接和層電性連接。 土An oxide layer is disposed above the transparent conductive layer; a metal reflective layer is disposed over the oxide layer; electrically connecting the transparent conductive conductive layer to a suitable position of the oxide layer And the metal reflective layer is electrically connected to the metal reflective layer; and the N-type semiconductor layer is electrically connected to the N-diffusion protection layer, and is disposed on the first electrode of the metal reflective layer. a semiconductor layer of the semiconductor layer; a thermally conductive substrate having a first and a second metal connection layer on the surface of the thermally conductive substrate; wherein the first electrode of the light emitting diode and the layer are thermally conductive The substrate is electrically connected to the first and second metal contacts and layers, respectively. earth 2_如申請專利範圍第丄項所述之高發光率之覆晶式發光二極體,其中,該導 熱基板係可選自金(Au)、銀(Ag)、鋁(A1)、鋼(cu)、石墨或其合金或複合物。 3.如申请專利範圍第1項所述之咼發光率之覆晶式發光二極體,其中,該透 明導電層、該氧化層、該金屬反射層與該擴散保護層係可作為一第二電極。 4·如申請專利範圍第1項所述之高發光率之覆晶式發光二極體,其中,該透 明基板係可選自藍寶石(Sapphic)、碳化矽(SiC)、氧化鋅(Zn0)、磷化鎵 (GaP)、石申化鎵(GaAs)之其中之者° 5.如申請專利範圍第1項所述之问發光率之覆晶式發光二極體,其中,該n 型半導體層可為N-GaN層。 12 M296476 6. 如申請專利範圍第1項所述之高發光率之覆晶式發光二極體,其中,該發 光層可選自InGaN/GaN多重ϊ子井結構、三-五族元素為主的一半導體重子 井(quantum well)結構之其中之一者。 7. 如申請專利範圍第6項所述之高發光率之覆晶式發光二極體,其中,該半 導體量子井結構係包含 AUIribGai-a-bN/AlxInyGai-x-yN,其中,a,b —0 ; 0$a+b <1 ; x,y^O ; 0$x+y<l ; x>c>a。 8. 如申請專利範圍第1項所述之高發光率之覆晶式發光二極體,其中,該P 型半導體層係可為P-GaN層。 9. 如申請專利範圍第1項所述之高發光率之覆晶式發光二極體,其中,該第 一電極係可選自 Ti/Al、Ti/Al/Ti/Au、Ti/Al/Pt/Au、Ti/Al/Ni/Au、 Ti/Al/Pd/Au、Ti/Al/Cr/Au、Ti/Al/Co/Au、Cr/Al/Cr/Au、Cr/Al/Pt/Au、 Cr/Al/Pd/Au ^ Cr/Al/Ti/Au > Cr/Al/Co/Au ^ Cr/Al/Ni/Au - Pd/Al/Ti/Au ^ Pd/Al/Pt/Au 、 Pd/Al/Ni/Au 、 Pd/Al/Pd/Au 、 Pd/Al/Cr/Au 、 Pd/Al/Co/Au 、 Nd/Al/Pt/Au 、 Nd/Al/Ti/Au 、 M/Al/Ni/Au 、 Nd/Al/Cr/Au 、 Nd/Al/Co/Au 、 Hf/Al/Ti/Au 、 Hf/Al/Pt/Au 、 Hf/Al/Ni/Au 、 Hf/Al/Pd/Au 、 Hf/Al/Cr/Au 、 Hf/Al/Co/Au 、 Zr/Al/Ti/Au 、 Zr/Al/Pt/Au 、 Zr/Al/Ni/Au 、 Zr/Al/Pd/Au 、 Zr/Al/Cr/Au、Zr/Al/Co/Au、TiNx/Ti/Au、TiNx /Pt/Au、TiNx/Ni/Au、 TiNx/Pd/Au、TiNx/Cr/Au、TiNx/Co/Au、TiWNx/Ti/Au、TiWNx/Pt/Au、 TiWNx/Ni/Au、TiWNx/Pd/Au、TiWNx/Cr/Au、TiWNx/Co/Au、NiAl/Pt/Au、 NiAl/Cr/Au 、 NiAl/Ni/Au 、 NiAl/Ti/Au 、 Ti/NiAl/Pt/Au 、 Ti/NiAl/Ti/Au 、 Ti/NiAl/Ni/Au、Ti/NiAl/Cr/Au 之其中之一者。 10·如申請專利範圍第i項所述之高發光率之覆晶式發光二極體,其中,該透 明導電層係可選自氧化銅、氧化錫、氧化銦銦、氧化銦鈽、氧化辞、氧化鋼 鋅、氧化鎂辞、氧化錫鎘、氧化銦錫、氧化鎳、Ni/Au、TiN、、CuAi〇2、 LaCuOS、CuGa〇2、SrCu2〇2、鉑(Pt)或氧化鎳(Ni0x)、氧化銥(Ir〇)、氧化铑 (RhO)、氧化釕(Ru0)與金(Au)組合之其中之一者。 11.如申睛專利範圍第i項所述之高發光率之覆晶式發光二極體,其中,該氧 化層係可選自二氧化石夕⑽2)、氮化石夕⑽〇、氮化氧石夕(Si〇N)、氧化銘 13 M296476 (AI2O3)、ZnO、A1N 與 BeN 之其中之一者。 12·如申請專利範圍第丨項所述之高發光率之覆晶式發光二極體,其中,該金 ^ 屬反射層係可選自金(An)、鋁(Α1)、銀(Ag)、铑(Rh)之其中之一者。“ 13·如申請專利範圍第!項所述之高發光率之覆晶式發光二極體,其中,該擴 散保護層係可選自Ti/M、Cr/Ni、TlN、TlW、鎢⑺、鎳㈤、鉻⑼:鉬 (Mo)、鈀(Pd)、鉑(Pt)或上述元素組合之其中之一者。 14. 如中4專伽圍第1項所述之高發光率之覆晶式發光二極體,其中,該第 一金屬接合層係可選自金、銦(ln)、錫(Sn)之其中之一者。 15. 如申請專利範圍第i項所述之高發光率之覆晶式發光二極體,其中,該第 • 二金屬接合層係可選自金、銦、錫之其中之一者。2) The high-luminance flip-chip light-emitting diode according to the above-mentioned claim, wherein the thermally conductive substrate is selected from the group consisting of gold (Au), silver (Ag), aluminum (A1), and steel ( Cu), graphite or alloys or composites thereof. 3. The flip-chip light-emitting diode according to claim 1, wherein the transparent conductive layer, the oxide layer, the metal reflective layer and the diffusion protective layer are used as a second electrode. 4. The high-luminance flip-chip light-emitting diode according to claim 1, wherein the transparent substrate is selected from the group consisting of sapphire, SiC, zinc oxide (Zn0), a lithographically-emitting luminescent device according to the first aspect of the invention, wherein the n-type semiconductor layer It can be an N-GaN layer. 12 M296476 6. The high-luminance flip-chip light-emitting diode according to claim 1, wherein the light-emitting layer is selected from the group consisting of InGaN/GaN multiple germanium well structures and three-five elements One of the semiconductor quantum well structures. 7. The high-luminance flip-chip light-emitting diode according to claim 6, wherein the semiconductor quantum well structure comprises AUIribGai-a-bN/AlxInyGai-x-yN, wherein a, b —0 ; 0$a+b <1 ; x,y^O ; 0$x+y<l ; x>c>a. 8. The high-luminance flip-chip light-emitting diode according to claim 1, wherein the P-type semiconductor layer is a P-GaN layer. 9. The high-luminance flip-chip light-emitting diode according to claim 1, wherein the first electrode system is selected from the group consisting of Ti/Al, Ti/Al/Ti/Au, Ti/Al/ Pt/Au, Ti/Al/Ni/Au, Ti/Al/Pd/Au, Ti/Al/Cr/Au, Ti/Al/Co/Au, Cr/Al/Cr/Au, Cr/Al/Pt/ Au, Cr/Al/Pd/Au ^ Cr/Al/Ti/Au > Cr/Al/Co/Au ^ Cr/Al/Ni/Au - Pd/Al/Ti/Au ^ Pd/Al/Pt/Au , Pd/Al/Ni/Au, Pd/Al/Pd/Au, Pd/Al/Cr/Au, Pd/Al/Co/Au, Nd/Al/Pt/Au, Nd/Al/Ti/Au, M /Al/Ni/Au, Nd/Al/Cr/Au, Nd/Al/Co/Au, Hf/Al/Ti/Au, Hf/Al/Pt/Au, Hf/Al/Ni/Au, Hf/Al /Pd/Au, Hf/Al/Cr/Au, Hf/Al/Co/Au, Zr/Al/Ti/Au, Zr/Al/Pt/Au, Zr/Al/Ni/Au, Zr/Al/Pd /Au, Zr/Al/Cr/Au, Zr/Al/Co/Au, TiNx/Ti/Au, TiNx/Pt/Au, TiNx/Ni/Au, TiNx/Pd/Au, TiNx/Cr/Au, TiNx /Co/Au, TiWNx/Ti/Au, TiWNx/Pt/Au, TiWNx/Ni/Au, TiWNx/Pd/Au, TiWNx/Cr/Au, TiWNx/Co/Au, NiAl/Pt/Au, NiAl/Cr One of /Au, NiAl/Ni/Au, NiAl/Ti/Au, Ti/NiAl/Pt/Au, Ti/NiAl/Ti/Au, Ti/NiAl/Ni/Au, Ti/NiAl/Cr/Au By. 10. The high-luminance flip-chip light-emitting diode according to claim i, wherein the transparent conductive layer is selected from the group consisting of copper oxide, tin oxide, indium oxide, indium oxide, and oxidized words. , zinc oxide, magnesia, cadmium tin oxide, indium tin oxide, nickel oxide, Ni/Au, TiN, CuAi〇2, LaCuOS, CuGa〇2, SrCu2〇2, platinum (Pt) or nickel oxide (Ni0x And one of a combination of cerium oxide (Ir〇), cerium oxide (RhO), cerium oxide (Ru0) and gold (Au). 11. The high-luminance flip-chip light-emitting diode according to claim i, wherein the oxide layer is selected from the group consisting of: (10) 2), nitridium (10) bismuth, and nitriding oxygen. One of Shi Xi (Si〇N), Oxidation Ming 13 M296476 (AI2O3), ZnO, A1N and BeN. 12. The high-luminance flip-chip light-emitting diode according to claim 2, wherein the gold-based reflective layer is selected from the group consisting of gold (An), aluminum (Α1), and silver (Ag). One of them, Rh. 13. The high-luminance flip-chip light-emitting diode according to the above-mentioned patent application, wherein the diffusion protective layer may be selected from the group consisting of Ti/M, Cr/Ni, TlN, TlW, tungsten (7), Nickel (5), chromium (9): molybdenum (Mo), palladium (Pd), platinum (Pt) or one of the above combinations of elements. 14. High-luminosity flip chip as described in Item 1 of The light-emitting diode, wherein the first metal bonding layer may be selected from one of gold, indium (ln), and tin (Sn). 15. High luminosity as described in claim i The flip-chip light emitting diode, wherein the second metal bonding layer is selected from one of gold, indium and tin. 1414
TW94221521U 2005-12-09 2005-12-09 Flip chip LED with high luminous efficiency TWM296476U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI555231B (en) * 2011-08-31 2016-10-21 日亞化學工業股份有限公司 Semiconductor light emitting device including metal reflecting layer
US9876145B2 (en) 2015-01-05 2018-01-23 Lextar Electronics Corporation Flip-chip light emitting diode chip
CN109643660A (en) * 2016-08-31 2019-04-16 流慧株式会社 P-type oxide semiconductor and its manufacturing method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI555231B (en) * 2011-08-31 2016-10-21 日亞化學工業股份有限公司 Semiconductor light emitting device including metal reflecting layer
US9876145B2 (en) 2015-01-05 2018-01-23 Lextar Electronics Corporation Flip-chip light emitting diode chip
TWI620349B (en) * 2015-01-05 2018-04-01 隆達電子股份有限公司 Flip-chip light emitting diode chip
CN109643660A (en) * 2016-08-31 2019-04-16 流慧株式会社 P-type oxide semiconductor and its manufacturing method
CN109643660B (en) * 2016-08-31 2024-03-05 株式会社Flosfia p-type oxide semiconductor and method for manufacturing the same

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